Kyushu University Academic Staff Educational and Research Activities Database
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Syuhei Kurokawa Last modified date:2017.06.05



Graduate School
Undergraduate School


Homepage
http://www.mech.kyushu-u.ac.jp/~premach/index.html
Academic Degree
Doctor of Engineering
Field of Specialization
Mechanical Engineering, Machine Element, Mechanical Design, Gear Technology, Metrology,CMP
Outline Activities
Outline of research:
Contact analysis of gears. Especially tooth bearing analysis under load, transmission error analysis and high precision measurement of T.E.
Development of automatic surface roughness measuring system with intelligent positioning.
Characterization of engineered surfaces and roughness topography.
Nano-machining to develop micro rotary encoders.
Topography measurement of tooth flank topography of micro gears.
High speed image recognition of transition phenomenon of chip formation and chip flow in Gear Hobbing.
Chop jamming phenomenon in gear hobbing process.
Fatigue strength of Austempered Ductile Iron in long life region.
High precision and high accuracy CMM development.
Measurement and evaluation of three-dimensional freeform surfaces.
Cemical Mecanical Polishing/Planarization, CMP on Si, SiO2, Sapphire, SiC, Diamond substrate.
Conditioning of CMP pads with High pressure micrio jet(HPMJ).
Diamond conditioning of CMP pads.
Thin film formation of OLED.
Conformal formation of photo-resist thin-film for TSV of 3D stacking devices.
High-efficiency use of CO2 absorbent.
CMP by using colloidal ceria slurry.

Visiting professor of WZL RWTH-Aachen in Germany from Mar.1998 to Mar.1999 with research project of characterization of global form deviations of three-dimentional freeformed surfaces using CMM.

Secretary of International Conference on Motion and Power Transmission MPT2001 held in Fukuoka Japan.
International Conference on Planarization/CMP Technology ICPT2014 Progam Chair.
International Conference on Planarization/CMP Technology ICPT2015, ICPT2016, ICPT2017 Executive Committee Member
JSME Fellow.
Delegate Member of JSME.
Secretary of JSME section meeting RC275.
Secretary of JSME section meeting P-SCD398.
Member of JSME MDT-ME1 Technical Committee.
Vice chairman of JSPE CMP/Planarization Committee.

Outline of education:
Lecture
* Manufacturing process II
* Machine Tools and Measuring Instruments
* Precision machining and measurement I, II
* Technical English
* Technical design and drafting of machine elements
* Manufacturing exercises with NC machine tools
* Laboratory (experimental exercises) of manufacturing and measurement of gears
* Laboratory (experimental exercises) of measurement and evaluation of surface roughness
* Core seminar (introduction to engineering)
* Technical design and creation
* Communications

Activities
* Adviser of KURT-robot-team in extracurricular activities "Sozokobo".
Won a special prize in NHK Robot contest national competition in 2006.
Won the Sanada prize in technical course of Intelligent Robot competition in 2007.
Placed in the top 7 and Won a special prize in NHK Robot contest national competition in 2009.
Placed in the top 3 and won the design prize in NHK Robot contest national competition in 2011.
Placed in the top 8 and won the Technical & design prizes in NHK Robot contest national competition in 2012.
Placed in the top 7 in NHK Robot contest national competition in 2013.
Placed in the top 4 in NHK Robot contest national competition in 2016.
Research
Research Interests
  • High-efficiency use of CO2 absorbent
    keyword : CO2, Absorbent, Spray, Fine manufacturing process
    2015.04Pad conditioning in CMP process by High pressure micrio jet.
  • Pad cleaning evaluation in CMP process
    keyword : Pad, cleaning, CMP, Slurry
    2014.04Pad conditioning in CMP process by High pressure micrio jet.
  • High efficient and high accurate CMP for hard-to-process material substrate
    keyword : CMP. hard material, power devices
    2012.04Pad conditioning in CMP process by High pressure micrio jet.
  • Manufacturing Process for Organic Thin-Film Solar Cell
    keyword : Organic Solar Cell, Atomization, planarization, CMP
    2010.04Atomization and planarization of Organic Electro-Luminescence material.
  • Rare Metal Alternatives/Alternative Abrasives for Glass Polishing and Cerium reduction Technique
    keyword : Cerium, Ceria, Rare Metal, Alternatives, Glass, planarization, CMP
    2009.07~2014.03Atomization and planarization of Organic Electro-Luminescence material.
  • Atomization and planarization of Organic Electro-Luminescence material
    keyword : Organic Electro-Luminescence, Atomization, planarization, CMP
    2008.04Atomization and planarization of Organic Electro-Luminescence material.
  • Measurement and evaluation of unknown freeform surfaces.
    keyword : Measurement, Evaluation, Freeform surface, CMM, Accuracy
    2008.04Measurement and evaluation of unknown freeform surfaces..
  • Wear resistance of Coating Film on Gear cutting tool
    keyword : Gear, Cutting, Hob, Coating, Wear resistance
    2008.04Atomization and planarization of Organic Electro-Luminescence material.
  • Pad conditioning in CMP process by diamond dressing
    keyword : Pad, Conditioning, CMP, Diamond dressing, Cut rate, Slurry
    2007.04Pad conditioning in CMP process by diamond dressing.
  • Pad conditioning in CMP process by High pressure micrio jet
    keyword : Pad, Conditioning, CMP, High pressure micrio jet, Slurry
    2007.04Pad conditioning in CMP process by High pressure micrio jet.
  • Development of high precsion and high speed CMM.
    keyword : CNC, CMM, Accuracy, Algorithm, High speed
    2006.04Development of high precsion and high speed CMM..
  • Precision measurement of tooth flank topography of small module gears
    keyword : Small module gear, Measurement, Topography, Accuracy
    2004.04Precision measurement of tooth flank topography of small module gears.
  • Nano-machining of micro rotaty encoder
    keyword : Measurement, Nano-machining, Micro rotaty encoder, Accuracy
    2004.04Nano-machining of micro rotaty encoder.
  • Contact analysis of gears. Especially tooth bearing analysis and measurement under load.
    keyword : Gear, Contact analysis, Tooth bearing analysis, Measurement, Load, Characterization, Topography
    1992.04Contact analysis of gears. Especially tooth bearing analysis and measurement under load..
  • Transmission error analysis and high precision measurement of T.E.
    keyword : Transmission error, High precision measurement, Micro gear system, Accuracy
    1995.04Transmission error analysis and high precision measurement of T.E..
  • Characterization of engineered surfaces and roughness topography.
    keyword : Characterization, Engineered surface, Roughness, Topography, Measurement, Accuracy
    1999.04Characterization of engineered surfaces and roughness topography..
  • Development of automatic surface roughness measuring system with intelligent positioning.
    keyword : Automation, Roughness, Measurement, Positioning, Image processing, Control, Leveling
    1997.04Development of automatic surface roughness measuring system with intelligent positioning..
Academic Activities
Books
1. Toshiro DOI, Ioan D. MARINESCU, and Syuhei KUROKAWA, Advances in CMP/Polishing Technologies for the Manufacture of Electronic Devices, William Andrew Applied Science Publishers, Elsevier Inc., 317ページ, 2011.12.
Papers
1. Syuhei KUROKAWA, Yasutsune ARIURA, and Toshiro DOI, Evaluation of Pitch Deviations with Comprehensive Representation Suitable for Engagement Evaluation in Different Types of Gears, International Journal of Automation Technology, 5, 2, 132-137, Vol.5, No.2, pp.132-137, 2011.03.
2. Syuhei KUROKAWA, Toshiro DOI, Tsutomu YAMAZAKI, Yoji UMEZAKI, Osamu OHNISHI, Yoji MATSUKAWA, Kiyoshi SESHIMO, Yasuhide YAMAGUCHI, and Yasunori KAWASE, Impact of Reduction in CeO2 Slurry Consumption for Oxide CMP ---Approach from Alternative Slurries and Pad Groove Patterns---, Proc. of International Conference on Planarization/CMP Technology 2010, 244-247, pp.244-247, 2010.11.
3. Syuhei KUROKAWA, Atsushi BEKKI, Yoji MATSUKAWA, and Toshiro DOI, Characteristics of Sidebands of Mesh Frequency Caused by Gear Eccentricity ---Identification of Indices of Amplitude Modulation under Load by Transmission Error Measurement---, Proc. of the International Conference on Gears, VDI-Berichte 2108.1, 293-304, VDI-Berichte 2108.1, pp.293-304, 2010.10.
4. Syuhei KUROKAWA, Yasutsune ARIURA, and Toshiro DOI, Comprehensive Representation of Pitch Deviations Suitable for Engagement Evaluation in Different Types of Gears, Proc. of the 10th International Symposium on Measurement and Quality Control, B2-051-1-B2-051-4, pp.B2-051-1-B2-051-4, 2010.09.
5. Hiromitsu KIDO, Syuhei KUROKAWA, Tetsuya TAGUCHI, Nagisa KOYAMA, and Toshiro DOI, Systematic Error by Temperature Transition of Gear Measuring Machine and Measurement of Tooth Root and Bottom Profiles of Cylindrical Gears, Proc. of International Symposium on Technology of Mechanical Design and Production 2010, pp.1-4, 2010.03.
6. Hiromitsu KIDO, Syuhei KUROKAWA, Tetsuya TAGUCHI, Nagisa KOYAMA, and Toshiro DOI, Development of Gear Measuring Machine and Measurement of Tooth Root and Bottom Profiles of Cylindrical Gears, Proc. of the 3rd International Conference on Advanced Manufacture, 533-537, pp.533-537, 2010.02.
7. Syuhei KUROKAWA and Yasutsune ARIURA, Development of a grating disk of a microrotary encoder for measurement of meshing accuracy of microgears, The International Journal of Advanced Manufacturing Technology, 46, 9, 931-944, Vol.46, Issue 9, pp.931-944, 2010.01.
8. Syuhei KUROKAWA, Yasutsune ARIURA, Yoji MATSUKAWA, and Toshiro DOI, Evaluation of gear engagement accuracy by Transmission Error with sub-microradian resolution, International Journal of Surface Science and Engineering, Vol.3, No.3, pp.160-177, 2009.05.
9. Syuhei KUROKAWA, Atsushi BEKKI, Yoji MATSUKAWA, Yoji UMEZAKI, and Toshiro DOI, Influence of Gear Eccentricity on Sidebands of Mesh Frequency ---Derivation and Detection of Amplitude Modulation by Transmission Error Measurement---, Proc. of the JSME International Conference on Motion and Power Transmissions, pp.221-226, 2009.05.
10. An Analysis of Particle in Spray Cleaning and a Study on their Cleaning Efficiency -A comparison of Cleaning Efficiency between Two Fluid Spray and High Pressure Micro Jet Spray-.
11. Syuhei Kurokawa, Keiji Miyachi, Yoshiyuki Seike, Shinichi Izumikawa, Shinichi Haba, and Toshiro Doi, Pad Conditioning Using a High Pressure Micro Jet (HPMJ) to Improve Life Span of Unwoven Fabric Pads in CMP for Silicon Wafers, Proc. of International Conference on Planarization/CMP Technology 2008, pp.243-249, 2008.11.
12. Research on Cleaning Efficiency of High Pressure Micro Het -A Study through Analysis of Particles' Novement and Experiment on Cleaning-.
13. Syuhei Kurokawa, Yasutsune Ariura, Bekki Atsushi, Yoji Matsukawa, Toshiro Doi, Application of Angle Measurement with Sub-micro Radian Resolution to Detect Nanometer Engagement of a Gear Pair, Proc. of the International Conference on Precision Measurement, ICPM2008, DVD-ROM, pp.1-11, 2008.09.
14. Syuhei Kurokawa, Yasutsune Ariura, Tatsuyuki Yamamoto , Automatic leveling procedure by use of the spring method in measurement of three-dimensional surface roughness, Proc. of the 4th International Symposium on Precision Mechanical Measurements, ISPMM2008, Proceedings of SPIE, Vol.7130, pp.71301I-1-71301I-7, 2008.08.
15. Syuhei KUROKAWA, and Yasutsune ARIURA, Development of a Grating Disk of a Micro Rotary Encoder for Measurement of Meshing Accuracy of Micro Gears, Proc. of the 8th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2007), pp.265-268, 2007.09.
16. Syuhei KUROKAWA, and Yasutsune ARIURA, Measurement of Tooth Pair Deflections With Ultra High Resolution Encoders and Prediction of Transmission Error Under Load in High Precision, Proc. of the ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, IDETC/CIE 2007, DVD-ROM, pp.1-10, 2007.09.
17. Transient Phenomenon of Chip Generation and Its Movement in Hobbing
(4th Report, The Relationship between the Jamming of Chips on the Finished Surface and the Chip Form in Generating in Flytool Simulation Tests).
18. Transmission Error Analysis of Involute Cylindrical Gears with Consideration of Gear Eccentricity
(Derivation of Strict Analytical Solutions of Transmission Error with Radial Eccentricity).
19. Syuhei KUROKAWA and Shinya IMAMURA, Nano Manufacturing of a Small-tipped Stylus for Measurement of Micro-Machine Elements with Concave Surfaces, Proc. of the 35th International MATADOR Conference, pp.7-10, 2007.07.
20. Syuhei KUROKAWA, Yasutsune ARIURA and Akio KAWAMOTO, Identification of the Parameters of Gear Eccentericity by Using Measured Transmission Error Curves, Proc. of the International Conference on Manufacturing, Machine Design and Tribology, ICMDT2007, CD-ROM, pp.1-6, 2007.07.
21. Syuhei KUROKAWA, Topography measurement of gear tooth flanks with CMM and evaluation of pitch deviations with the new definition, The Journal of Chinese Society of of Mechanical Engineers, Vol.27, No.5, pp.513-518, 2006.10.
22. Syuhei KUROKAWA, and Yasutsune ARIURA, Influence of gear eccentricity on the characteristics of noise spectrum
(Frequency modulation and sidebands of mesh frequency), Proc. of the International Conference on Mechanical Transmissions, ICMT'2006, Vol.II, pp.896-901, 2006.09.
23. Syuhei KUROKAWA, and Yasutsune ARIURA, Evaluation of shot peened surfaces using characterization technique of three-dimensional surface topography, Journal of Physics, 13, Vol. 13, pp.9-12, 2005.09.
24. Syuhei KUROKAWA, and Yasutsune ARIURA, Evaluation of Transmission Error with Gear Eccentricity by Measurement and Approximate Formula, Proc. of the 1st International Conference on Manufacturing, Machine Design and Tribology, pp.1-4 CD-ROM, 2005.06.
Presentations
1. Transmission Error Prediction with Radial and Axial Eccentricity of a Gear Pair with Tooth Flank Topography.
2. Evaluation of tooth bearing patterns and gear engagement.
3. New evaluation of three-dimensional modification of gear tooth flanks using parameters for global form deviation.
Membership in Academic Society
  • The Institute of Electrical and Electronics Engineers
  • The Japan Society for the Promotion of Science
  • The Japan Society for Abrasive Technology
  • The Japan Society of Mechanical Engineers
  • The Japan Society for Precision Engineering
Awards
  • Tooth Flank Modification on Face Gear with Transmission Error Controlled Curve and Investigation on Rotational Feeling in Spinning Reel
  • Development of High Speed Tool Wear Detection System by using DC Two-Terminal Methods
Educational
Other Educational Activities
  • 2017.03.
  • 2016.12.
  • 2016.12.
  • 2016.12.
  • 2016.12.
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  • 2016.03.
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  • 2015.12.
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  • 2015.09.
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  • 2015.03.
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  • 2014.12.
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  • 2014.03.
  • 2013.12.
  • 2013.12.
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  • 2013.03.
  • 2012.12.
  • 2012.06, Placed in the top 8 and won the Technical & Special prizes in NHK Robot competition (Robocon2012)..
  • 2011.12.
  • 2011.12.
  • 2011.12.
  • 2011.06, Placed in the top 3 and won the design prize in NHK Robot competition (Robocon2011)..
  • 2011.05.
  • 2011.03.
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  • 2010.12.
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  • 2009.12.
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  • 2009.06.
  • 2008.12.
  • 2008.04.
  • 2007.06.
  • 2006.06.