Kyushu University Academic Staff Educational and Research Activities Database
List of Reports
Syuhei Kurokawa Last modified date:2018.03.12

Professor / Manufacturing Process / Department of Mechanical Engineering / Faculty of Engineering


Reports
1. 黒河 周平, 大西 修, 土肥 俊郎, 山崎 努, 會田 英雄, 畝田 道雄, 越山 勇, 市川 浩一郎, 尹 涛, Effects of Atmosphere and Ultraviolet Light Irradiation on Chemical Mechanical Polishing Characteristics of SiC Wafers, Japanese Journal of Applied Physics, Japanese Journal of Applied Physics 51 Brief Note pp.05EF05-1~05EF05-2, 2012.05.