Kyushu University Academic Staff Educational and Research Activities Database
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TOMITA KENTARO Last modified date:2017.04.07



Graduate School


E-Mail
Homepage
http://plasma.ence.kyushu-u.ac.jp/
Phone
093-583-7567
Fax
093-571-8013
Academic Degree
Doctor of Engineering
Field of Specialization
Diagnostics of industrial plasmas
Research
Research Interests
  • Collective Thomson Scattering diagnostics for collisionless shocks produced with high-power laser
    keyword : Collisionless shocks, Thomson scattering
    2011.08~2015.04.
  • Diagnostics of electron properties at plasma-nano interaction
    keyword : electron density, electron temperature
    2012.04~2014.03.
  • Laser Aided Diagnostics of Discharge plasmas for producing solar cells
    keyword : solar cells, negative ions, electron density, electron temperature
    2009.08~2013.05.
  • Studies of Arc discharges for Gas Circuit Breakers
    keyword : Gas Circuit Breakers , electron density, electron temperature, laser Thomson scattering
    2008.01~2011.03.
  • Development of an electron density and electron temperature measurement system for non-equilibrium discharge plasmas produced in atmospheric pressure
    keyword : electron density, electron temperature, laser Thomson scattering
    2007.10~2010.06.
  • Studies of Ion Engine Thruster using Laser Scattering Diagnostics
    keyword : laser Thomson scattering, ion engine, electron density, electron temperature
    2007.01.
  • Develpment of Laser Thomson Scattering system for Plasmas produced for Extreme Ultra Violet Lithography
    keyword : collective Thomson scattering, Extreme Ultra Violet Lithography, electron density, electron temperature, ionic charge
    2004.08.
Current and Past Project
  • This project tries to develop an excellent diagnostics tool of extreme ultra violet (EUV) light source plasmas, which is used as the light source of next generation lithography system. The main method of diagnostics is collective Thomson scattering. We try to measure fundamental parameters such as electron density and electron temperature of EUV light source plasmas with sufficient temporal and spatial resolutions.
Academic Activities
Papers
1. Kentaro Tomita, Daisuke Gojima, Takahiro Shimizu, Kiichiro Uchino, Tomoyuki Nakano, Yasunori Tanaka, Katsumi Suzuki, Takanori Iijima, Toshiyuki Uchii, and Takeshi Shinkai, Thomson scattering diagnostics of SF6 gas-blasted arcs confined by a nozzle under free-recovery conditions, J. Phys. D: Appl. Phys.,, 48 (2015) 265201 (14pp), 2015.05.
2. K. Tomita, K. Nagai, T. Shimizu, N. Bolouki, Y. Yamagata, K. Uchino, T. Kaneko, Thomson scattering diagnostics of atmospheric plasmas in contact with ionic liquids, Appl. Phys. Express, Vol. 7, 066101 (4 pages), 2014.05.
3. K. Tomita, D. Gojima, K. Nagai, K. Uchino, R. Kamimae, Y Tanaka, K. Suzuki, T. Iijima, T. Uchii, T. Shinkai, Thomson scattering diagnostics of decay processes of Ar/SF6 gas-blast arcs confined by a nozzle, J. Phys. D: Appl. Phys. (Fast Track Communications), Vol. 46, 382001 (5 pages) (2013), 2013.09.
4. T. Morita, Y. Sakawa, K. Tomita, T. Ide, Y. Kuramitsu, K. Nishio, K. Nakayama, K. Inoue, T. Moritaka, H. Ide, M. Kuwada, K. Tsubouchi, K. Uchino, H. Takabe, Thomson scattering measurements of a shock in laser-produced counter-streaming plasmas, Phys. Plasmas, Vol. 20, 092115 (6 pages) (2013), 2013.09.
5. K. Tomita, K. Nakayama, K. Inoue, A. Sunahara, K. Uchino, A collective laser Thomson scattering system for diagnostics of laser-produced plasmas for extreme ultraviolet light sources, Appl. Phys. Express, Vol. 6, 076101 (4 pages) (2013), 2013.06.
6. Kentaro Tomita, Nima Bolouki, Hiroki Shirozono, Yukihiko Yamagata, Kiichiro Uchinoa, Koichi Takaki, Two-dimensional Thomson scattering diagnostics of pulsed discharges produced at atmospheric pressure, Journal of Instrumentation, Vol. 7, C02057, 2012.02.
7. K. Tomita, N. Yamamoto, N Yamasaki, T. Tsuru, K. Uchino, H. Nakashima, Thomson Scattering Diagnostics of Plasmas Produced in a Miniature Microwave Discharge Ion Engine, Journal of Propulsion and Power, 26, 2, 381-384, 2010.03.
8. Kentaro Tomita, Taisuke Kagawa, Kiichiro Uchino,Sunao KATSUKI, Hidenori AKIYAMA, Collective Thomson Scattering Diagnostics of EUV Plasmas, Journal of Plasma and Fusion Research SERIES, 8, 1, 488-491, 2009.09.
9. Safwat Hassaballa, Masaaki Yakushiji, Young-Kee Kim, Kentaro Tomita, Kiichiro Uchino, Katsunori Muraoka, Two-Dimensional Structure of PDP Micro-Discharge Plasmas Obtained Using Laser Thomson Scattering, IEEE Trans. Plasma Sci., 32, 1, Vol. 32, pp.127-134, 2004.02.
10. Soushi Narishige, Shuichi Kitamura, Shuji Sakemi, Kentaro Tomita, Kiichiro Uchino, Katsunori Muraoka, Tadanori Sakoda, Thomson Scattering Diagnostics of Glow Discharge Plasmas Produced in Raman Active Gases, Jpn. J. Appl. Phys., 41, 11A, Vol. 41, pp. L1259-L1262, 2002.11.
Presentations
1. Collective Thomson Scattering Diagnostics of Plasmas for EUV Light Sources.
Membership in Academic Society
  • The institute of electrical engineers in japan
  • The Japan Society of Applied Physics
  • The Japan Society of Plasma Science and Nuclear Fusion Research