| 1. |
Jiaqing Zhu, Terutake Hayashi, Syuhei Kurokawa, Measurement of number-weighted particle size distribution for CMP slurry using nanoparticle chip, Precision Engineering, https://doi.org/10.1016/j.precisioneng.2023.12.012, 86, 203-212, 2024.03, Chemical mechanical polishing/planarization (CMP) slurry contains mainly abrasive grains (primary particles) with few aggregations (secondary particles). Measuring the particle size distribution (PSD) of CMP slurry is crucial for improving the productivity of the CMP process. For the quality management of CMP slurry, it is necessary to evaluate both the sizes and quantities of both the primary and secondary particles. Conventional PSD analysis methods, except for image analysis, face challenges in identifying primary and secondary particles for PSD measurements. For image analysis, the particles must be transferred from a suspension to a substrate using the conventional sampling method; however, this creates aggregates, resulting in a change in the PSD of the particles on the substrate compared to that in suspension under poly-dispersed conditions. Thus, this study proposed a novel particle sizing method using nanoparticle chip (NPC) to assist in the image analysis of the PSD. The NPC can pick up a single particle in a small volume droplet to avoid aggregation and maintain the poly-dispersed condition of the particles in suspension. The primary and secondary particles can be identified using scanning electron microscope (SEM) or atomic force microscope (AFM), and the PSD can be evaluated by measuring the area and height of the particles. Further, the quantities of both the primary and secondary particles can be counted from the substrate. This study presented a comparison of the diameter measurements using NPC and the conventional method. The results show that the NPC identified the primary and secondary particles and decreased the measurement error of the particle diameters. Consequently, the NPC proves to be superior to the conventional method for use in the PSD analysis of CMP slurry.. |
| 2. |
Keigo Matsunaga, Terutake Hayashi, Syuhei Kurokawa, Hideaki Yokoo, Masaharu Nishikino, Noboru Hasegawa, Takayuki Kumada, Tomohito Otobe, Yasuhiro Takaya, Investigation of surface excitation effect for ablation of 4H-SiC substrate using double-pulse beam, Springer Proceedings in Physics: X-Ray Lasers 2016/ICXRL 2016, 2017.07. |
| 3. |
Terutake Hayashi, Toshiki Seri, Syuhei Kurokawa, A Novel Particle Sizing Method for Nano Abrasives in CMP Slurry by Using Fluorescent Nano Probe, International Journal of Automation Technology, Vol.11, No.4, 2017.07. |
| 4. |
Terutake Hayashi, Toshiki Seri, Syuhei Kurokawa, Particle Size Distribution Analysis for Nano-abrasives in CMP Slurry by Using Fluorescent Nano Probe, International Conference on Planarization/CMP Technology (ICPT2016), Vol.11, No.4, 2017.07. |
| 5. |
Jiaqing Zhu, Terutake Hayashi, Syuhei Kurokawa, Measurement of molar concentration spectra for nanoparticle with multi-modal nanoparticle size distribution using nanoparticle chip, International Journal of Automation Technology, https://doi.org/10.1016/j.precisioneng.2021.08.008, Vol.74, March 2022, 460-468, 2017.07. |
| 6. |
Keigo Matsunaga, Terutake Hayashi, Syuhei Kurokawa, Hideaki Yokoo, Masaharu Nishikino, Noboru Hasegawa, Takayuki Kumada, Tomohito Otobe, Yasuhiro Takaya, Study on low power laser processing technique with instant surface excitation using femtosecond double pulse, Proceedings of 16th International conference of Precision Engineering , C305-8183-1-C305-8183-4, 2016.11. |
| 7. |
Keigo Matsunaga, Terutake Hayashi, Syuhei Kurokawa, Hideaki Yokoo, Masaharu Nishikino, Noboru Hasegawa, Takayuki Kumada, Tomohito Otobe, Yasuhiro Takaya, Planarization for Translucent Polycrystalline Alumina by Surface Polishing Technique
, Proceedings of 16th International conference of Precision Engineering, C111-8207-1-C111-8207-4, 2016.11. |
| 8. |
Syuhei Kurokawa, Leo Hirashima, Terutake Hayashi, Keiichiro WATANABE, Hiroyuki TSUJI, Tomoki NAGAE, Planarization for Translucent Polycrystalline Alumina by Surface Polishing Technique, Proceedings of 16th International conference of Precision Engineering, C111-8207-1-C111-8207-4, 2016.11. |
| 9. |
Takayuki Kumada, Tomohito Otobe, Masaharu Nishikino, Noboru Hasegawa, Terutake Hayashi, Dynamics of spallation during femtosecond laser ablation studied by time-resolved reflectivity with double pump pulses, Applied Physics Letters , 10.1063/1.4939231, 108, 011102-1-011102-4, 2016.01. |
| 10. |
Terutake Hayashi, Yuki Ishizaki, Masaki Michihata, Yasuhiro Takaya, Shin-ichi Tanaka, Study on Nanoparticle Sizing Using Fluorescent Polarization Method with DNA Fluorescent Probe, International Journal of Automation Technology, vol. 9, no. 5,, 534-540, 2015.05. |
| 11. |
Terutake Hayashi, Wide-Range Axial Position Measurement for Jumping Behavior of Optically Trapped Microsphere Near Surface Using Chromatic Confocal Sensor, International Journal of Optomechatronics, vol. 9, no. 2,, 131-140, 2015.02. |
| 12. |
Terutake Hayashi, Nanoparticle sizing method based on fluorescence anisotropy analysis, Measurement, vol. 59, 382-388, 2015.01, Demand for applications of nanoparticles in electric architecture has been increasing. Nanoparticles provide new opportunities for improving circuit response. We discuss a novel method for evaluating nanoparticle sizes based on fluorescence anisotropy analysis. Particle size evaluation is possible through measurements of the rotational diffusion coef- ficient, which is sensitive to particle size. We develop a system for measuring rotational diffusion coefficients by using a fluorescent probe to label a particle. We report fundamen- tal experiments that verify the feasibility of the proposed method. The rotational diffusion coefficients of gold nanoparticles with diameters ranging 6–20 nm were measured using the proposed method. The measured rotational diffusion coefficients decrease with increasing particle size. This finding indicates that nanoparticles smaller than 15 nm can be measured with fine resolution.. |
| 13. |
Terutake Hayashi, Study on chemical interaction analysis of reactive fullerenol molecules in Cu-CMP using high-sensitive Raman spectroscopy, Key Engineering Materials, vol. 625, 332-338, 2015.01. |
| 14. |
Masaki Michihata, Terutake Hayashi, Atushi Adachi, Yasuhiro Takaya, Measurement of probe-stylus sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery modes, CIRP, 63, 1, 469-472, 2014.08, Probe calibration contributes to the measurement uncertainty of micro-coordinate measuring machines (micro-CMMs). This study proposes a new method of measuring stylus sphere diameters for micro-CMMs based on the analysis of whispering gallery modes (WGMs). Depending on the incident wavelength, different WGMs will be excited in the probe stylus, resulting in a wavelength spectral fingerprint that is related to the sphere diameter. In this paper, the diameter of the microprobe stylus sphere was determined with a least-squares method using theoretical and measured spectra of WGMs.
The measurement results showed that the precision of the proposed method was nm.. |
| 15. |
Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, and Kok Fonog Lee, Development of nanoparticle sizing system using fluorescence polarization, ACTA IMEKO, 2, 2, 67-72, 2013.12. |
| 16. |
Yasuhiro TAKAYA, Masaki MICHIHATA, Terutake HAYASHI, Ryota MURAI, and Kazumasa KANO, Surface Analysis of the Chemical Polishing Process Using a Fullerenol Slurry by Raman Spectroscopy under Surface Plasmon Excitation, CIRP, 62, 1, 571-574, 2013.08. |
| 17. |
Masaki MICHIHATA, Tadaaki YOSHIKANE, Terutake HAYASHI, and Yasuhiro TAKAYA, New Technique of Single-Beam Gradient-Force Laser Trapping in Air Condition, International Journal of Optomechatronics, 7, 46-59, 2013.07. |
| 18. |
Terutake HAYASHI, Masaki MICHIHATA, and Yasuhiro TAKAYA, Development of an Optical Heterogeneity Evaluation System Using Phase-Shift Digital Holography, Key Engineering Materials, 523-524, 865-870, 2012.11. |
| 19. |
Masafumi YASUDA, Terutake HAYASHI, Masaki MICHIHATA, and Yasuhiro TAKAYA, A Novel Batch Fabrication of Micro Parts Using DNA Pattern Recognition, Key Engineering Materials, 523-524, 598-603, 2012.11. |
| 20. |
Yusuke FUKUTA, Terutake HAYASHI, Masaki MICHIHATA, and Yasuhiro TAKAYA, Development of a Novel Surface Processing System Using Femtosecond Pulse Train, Key Engineering Materials, 523-524, 220-225, 2012.11. |
| 21. |
Terutake HAYASHI, Masaki MICHIHATA, and Yasuhiro TAKAYA, Evaluation of Optical Heterogeneity Using Phase-Shift Digital Holography, International Journal of Nanomanufacturing, 8, 5-6, 508-521, 2012.08. |
| 22. |
Yasuhiro TAKAYA, Masaki MICHIHATA, Terutake HAYASHI, and Taisuke WASHITANI, Dimensional Measurement of Microform with High Aspect Ratio Using an Optically Controlled Particle with Standing Wave Scale Sensing, CIRP, 61, 1, 479-482, 2012.08. |
| 23. |
Masaki MICHIHATA, Yasuhiro TAKAYA, and Terutake HAYASHI, Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition, Journal of Advanced Mechanical Design, Systems, and Manufacturing, 6, 6, 764-770, 2012.06. |
| 24. |
Terutake HAYASHI, Yasuhiro TAKAYA, and Masaki MICHIHATA, Development of Nanoparticle Sizing System Integrated with Optical Microscopy Using Fluorescence Polarization, International Journal of Nanomanufacturing, 8, 1-2, 54-66, 2012.01. |
| 25. |
Yasuhiro TAKAYA, Hirotaka KISHIDA, Terutake HAYASHI, Masaki MICHIHATA, and Ken KOKUBO, Chemical Mechanical Polishing of Patterned Copper Wafer Surface Using Water-Soluble Fullerenol Slurry, CIRP, 60, 1, 567-570, 2011.08. |
| 26. |
Yasuhiro TAKAYA, Masaki MICHIHATA, and Terutake HAYASHI, Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle, International Journal of Automation Technology, 5, 3, 395-402, 2011.03. |
| 27. |
Terutake HAYASHI, Masaki MICHIHATA, and Yasuhiro TAKAYA, Total Angle-Resolved Scattering: Characterization of Microlens Mold Surface, Procedia Engineering, 19, 132-137, 2011.01. |
