Kyushu University Academic Staff Educational and Research Activities Database
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Kiichiro Uchino Last modified date:2020.07.14

Graduate School
Undergraduate School

 Reseacher Profiling Tool Kyushu University Pure
This home-page introduces the laboratory of plasma engineering. .
Academic Degree
Dr of Engineering
Country of degree conferring institution (Overseas)
Field of Specialization
Plasma Physics and Engineering, Electrical Discharge Engineering
Total Priod of education and research career in the foreign country
Research Interests
  • Studies on decomposition of Sn debris on the EUV collection mirror
    keyword : EUV lithography Sn debris hydrogen VHF plasma
  • Plasma thin film deposition of two-component metal oxides which can be used for a strage battery
    keyword : strage battery plasma thin film deposition metal oxide
  • Studies on production and diagnostics of processing plasmas used for fabrication of thin film solar cells
    keyword : solar cell plasma large area new production method Thomson scattering electron density temperature
  • Application of femto-second laser post-ionization to the TOF mass spectrometer
    keyword : mass analysis, femto-second laser, multiphoton ionization, time of flight
  • Collective Thomson scattering diagnostics of plasmas for extreme ultra-violet light source
    keyword : Lithography, laser produced plasmas, discharge produced plasmas, laser diagnostics, electron density, electron temperature
  • Laser Thomson scattering diagnostics of micro-plasmas for plasma display panel (PDP)
    keyword : PDP, laser diagnostics, plasma, discharge, electron density, electron temperature
Current and Past Project
  • Development of a plasma CVD device for fabrication of a non rare earth metal strage battery based on the semiconductor thin film
  • Development of a mass spectrometer system with ultra-high sensitivity and ultra-trace sampling for practical use
  • Development of Nobel Mass Spectrometer with Ultra-High Sensitivity and Ultra-Trace Sampling for Planetary Exploration
Academic Activities