ISSP2013 Best Poster Award

2013.7   12th International Symposium on Sputtering & Plasma Processes  

Advanced Plasma Application Award

2012.10   11th Asia Pacific Conference on Plasma Science adn Technology (APCPST) & 25th Symposium on Plasma Science for Materials (SPSM)  

IUMRS-ICEM2012 "Young Scientist Awards: Silver Award Winners"

2012.9  

Best Presentation Award

2012.3   ISPlasma2012  

Invited Presentation Award

2008.6   Interfinish 2008 World Congress and Exposition  

応用物理学会第3回プラズマエレクトロニクス賞

2005.3   応用物理学会プラズマエレクトロニクス分科会  

第10回応用物理学会講演奨励賞

2001.5   応用物理学会  

Possible impact of plasma oxidation on the structure of C-terminal domain of SARS-CoV-2 spike protein: a computational study Reviewed International journal

P. Attri, K. Koga, M. Shiratani

Jpn. J. Appl. Phys.   14 ( 2 )   2021.1

Long-term response of Norway spruce to seed treatment with cold plasma: dependence of the effects on the genotype Reviewed International journal

Plasma Process Polym   2020.12

Size and flux of carbon nanoparticles synthesized by Ar+CH4 multi-hollow plasma chemical vapor deposition Reviewed International journal

S. H. Hwang, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Diam Relat Mater   109   2020.11

Graphene-Si3N4 nanocomposite blended polymer counter electrode for low-cost dye-sensitized solar cells Reviewed International journal

F. L. Chawarambwa, T. E. Putri, M. K. Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Chem. Phys. Lett.   758   2020.11

Experimental identification of the reactive oxygen species transported into a liquid by plasma irradiation Reviewed International journal

T. Kawasaki, K. Koga, M. Shiratani

Jpn. J. Appl. Phys.   59 ( 11 )   2020.11

Synthesis of Yb3+/Ho3+ co-doped Y2O3 nanoparticles and its application to dye sensitized solar cells Reviewed International journal

F. L. Chawarambwa, T. E. Putri, K. Kamataki, M. Shiratani, K. Koga, N. Itagaki, D. Nakamura

J. Mol. Struct.   2020.10

Impact of surface morphologies of substrates on the epitaxial growth of magnetron sputtered (ZnO)x(InN)1-x films Reviewed International journal

R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

Jpn. J. Appl. Phys.   60 ( SA )   2020.10

Cold plasma treatment of sunflower seeds modulates plant-associated microbiome and stimulates root and lateral organ growth Reviewed International journal

Front. Plant Sci.   11   2020.8

Real-time monitoring of surface passivationof crystalline silicon during growth of amorphous and epitaxial silicon layer Reviewed International journal

S. Nunomura, I. Sakata, H. Sakakita, K. Koga, M. Shiratani

J. Appl. Phys.   128 ( 3 )   2020.7

Cold plasma treatment of Arabidopsis thaliana (L.) seeds modulates plant-associated microbiome composition Reviewed International journal

Applied Physics Express   13   2020.5

Growth of single crystalline films on lattice-mismatched substrates through 3D to 2D mode transition Reviewed International journal

N. Itagaki, Y. Nakamura, R. Narishige, K. Takeda, K. Kamataki, K. Koga, M. Hori, M. Shiratani

Sci. Rep.   10 ( 1 )   2020.3

Effects of surrounding gas on plasma-induced downward liquid flow Reviewed International journal

T. Kawasaki, K. Nishida, G. Uchida, F. Mitsugi, K. Takenaka, K. Koga, Y. Setsuhara, M. Shiratani

Jpn. J. Appl. Phys.   59 ( SH )   2020.3

Impact of radish sprouts seeds coat color on the electron paramagnetic resonance signals after plasma treatment Reviewed International journal

K. Koga, P. Attri, K. Kamataki, N. Itagaki, M. Shiratani, V. Mildaziene

Jpn. J. Appl. Phys.   59 ( SH )   2020.3

Relationship between cold plasma treatment-induced changes in radish seed germination and phytohormone balance Reviewed International journal

L. D. Fomins, G. Pauzaite, R. Zukiene, V. Mildaziene, K. Koga, M. Shiratani

Jpn. J. Appl. Phys.   59   2020.2

Dielectric barrier discharge plasma treatment-induced changes in sunflower seed germination, phytohormone balance, and seedling growth Reviewed International journal

R. Zukiene, Z. Nauciene, I. Januskaitiene, G. Pauzaite, V. Mildaziene, K. Koga, M. Shiratani

Appl. Phys. Express   12 ( 12 )   2019.11

Identification and Suppression of Si-H2 Bond Formation at P/I Interface in a-Si:H Films Deposited by SiH4 Plasma CVD Reviewed International journal

K. Tanaka, H. Hara, S. Nagaishi, L. Shi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res.   14   2019.9

Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma Reviewed International journal

R. Zhou, K. Kamataki, H. Ohtomo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res.   14   2019.9

Effects of Gas Pressure on the Size Distribution and Structure of Carbon Nanoparticles Using Ar + CH4 Multi-Hollow Discharged Plasma Chemical Vapor Deposition Reviewed International journal

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res.   14   2019.9

Effect of Higher-Order Silane Deposition on Spatial Profile of Si-H2/Si-H Bond Density Ratio of a-Si:H Films Reviewed International journal

L. Shi, K. Tanaka, H. Hara, S. Nagaishi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res.   14   2019.9

Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes? Reviewed International journal

T. Iwase, Y. Kamaji, S. Y. Kang, K. Koga, N. Kuboi, M. Nakamura, N. Negishi, T. Nozaki, S. Nunomura, D. Ogawa, M. Omura, T. Shimizu, K. Shinoda, Y. Sonoda, H. Suzuki, K. Takahashi, T. Tsutsumi, K. Yoshikawa, T. Ishijima, K. Ishikawa

Jpn. J. Appl. Phys.   58   2019.6

Effects of gas velocity on deposition rate and amount of cluster incorporation into a-Si:H films fabricated by SiH4 plasma chemical vapor deposition Reviewed International journal

T. Kojima, S. Toko, K. Tanaka, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res.   13   1406082   2018.6

Dependence of CO2 Conversion to CH4 on CO2 Flow Rate in Helicon Discharge Plasma Reviewed International journal

S. Toko, R. Katayama, K. Koga, E. Leal-Quiros, M. Shiratani

Sci. Adv. Mater.   10 ( 5 )   2018.5

Synthesis of Nanoparticles using Low Temperature Plasmas and Its Application to Solar Cells and Tracers in Living Body Reviewed International journal

K. Koga, H. Seo, A. Tanaka, N. Itagaki, M. Shiratani

ECS Transactions   77 ( 3 )   2017.5

Plant Growth Enhancement of Seeds Immersed in Plasma Activated Water Reviewed International journal

T. Sarinont, R. Katayama, Y. Wada, K. Koga, M. Shiratani

MRS Adv.   2 ( 18 )   2017.2

Response of Silkworm Larvae to Atmospheric Pressure Non-thermal Plasma Irradiation Reviewed International journal

T. Sarinont, Y. Wada, K. Koga, M. Shiratani

Plasma Medicine   6 ( 3-4 )   2017.1

Effects of sputtering gas pressure dependence of surface morphology of ZnO films fabricated via nitrogen mediated crystallization Reviewed International journal

K. Iwasaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

MRS Adv.   2 ( 5 )   2016.12

Blue Photoluminescence of (ZnO)0.92(InN)0.08 Reviewed International journal

K. Matsushima, K. Iwasaki, N. Miyahara, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

MRS Adv.   2 ( 5 )   2016.12

Fluctuation of Position and Energy of a Fine Particle in Plasma Nanofabrication Reviewed International journal

M. Shiratani, M. Soejima, H. Seo, N. Itagaki, K. Koga

Materials Science Forum   879   2016.11

R&D status of agricultural applications of high voltage and plasma in Japan Invited International journal

M. Shiratani, T. Sarinont, K. Koga and N. Hayashi

Proc. Workshop on Application of Advanced Plasma Technologies in CE Agriculture   2016.4

Quantum Characterization of Si Nano-Particles Fabricated by Multi-Hollow Discharge Plasma Chemical Vapor Deposition Reviewed International journal

H. Seo, G. Uchida, N. Itagaki, K. Koga, and M. Shiratani

Sci. Adv. Mater.   8 ( 3 )   2016.3

Room Temperature Fabrication of (ZnO)x(InN)1-x films with Step-Terrace Structure by RF Magnetron Sputtering Reviewed International journal

K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

MRS Advances   1 ( 2 )   2016.1

Plant Growth Response to Atmospheric Air Plasma Treatments of Seeds of 5 Plant Species Reviewed International journal

M. Shiratani, T. Sarinont, T. Amano, N. Hayashi, K. Koga

MRS Adv.   1 ( 18 )   2016.1

Production of In, Au, and Pt nanoparticles by discharge plasmas in water for assessment of their bio-compatibility and toxicity Reviewed International journal

T. Amano, T. Sarinont, K. Koga, M. Hirata, A. Tanaka, M. Shiratani

MRS Adv.   1 ( 18 )   2016.1

水素プラズマとカーボン壁の相互作用で発生したダストに対するダスト除去フィルタのダスト除去性能評価

白谷正治, 古閑一憲, 立石瑞樹, 片山龍, 山下大輔, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 芦川直子, 時谷政行, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

九州大学超顕微解析研究センター報告   39   2015.12

Raman Spectroscopy of a-C:H Films Deposited Using Ar + H2+ C7H8 Plasma CVD Reviewed International journal

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015.10

Discharge characteristics and hydrodynamics behaviors of atmospheric plasma jets produced in various gas flow patterns Reviewed International journal

Y. Setsuhara, G. Uchida, A. Nakajima, K. Takenaka, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015.10

Gas flow rate dependence of the production of reactive oxygen species in liquid by a plasma-jet irradiation Reviewed International journal

G. Uchida, A. Nakajima, T. Kawasaki, K. Koga, K. Takenaka, M. Shiratani, Y. Setsuhara

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015.10

Effects of Ambient Humidity on Plant Growth Enhancement by Atmospheric Air Plasma Irradiation to Plant Seeds Reviewed International journal

T. Sarinont, T. Amano, K. Koga, S. Kitazaki, N. Hayashi, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015.10

Measurement of absolute density of N atom in sputtering plasma for epitaxial growth ZnO films via nitrogen mediated crystallization Reviewed International journal

T. Ide, K. Matsushima, T. Takasaki, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015.10

Measurements of absolute densities of nitrogen and oxygen atoms in sputtering plasma for fabrication of ZnInON films Reviewed International journal

K. Matsushima, T. Ide, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015.10

Measurements of nitrogen atom density in N2/Ar sputtering plasma for fabrication of high-mobility amorphous In2O3:Sn films Reviewed International journal

T. Takasaki, T. Ide, K. Matsushima, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015.10

Fabrication of p-i-n solar cells utilizing ZnInON by RF magnetron sputtering Reviewed International journal

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Mat. Res. Soc. Symp. Proc.   1741   2015.3

ZnO-based semiconductors with tunable band gap for solar sell applications Invited Reviewed International journal

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Proc. SPIE photonics west 2015   9364   2015.3

Effects of morphology of buffer layers on ZnO/sapphire heteroepitaxial growth by RF magnetron sputtering Reviewed International journal

T. Ide, K. Matsushima, R. Shimizu, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Mat. Res. Soc. Symp. Proc.   1741   2015.2

Effects of Atmospheric Air Plasma Irradiation to Seeds of Radish Sprouts on Chlorophyll and Carotenoids Concentrations in their Leaves Reviewed International journal

T. Sarinont, T. Amano, K. Koga, M. Shiratani, N. Hayashi

Mat. Res. Soc. Symp. Proc.   1723   2015.2

Comparative Study on the Pulmonary Toxicity of Indium Hydroxide, Indium-Tin Oxide, and Indium Oxide Following Intratracheal Instillations into the Lungs of Rats Reviewed International journal

A. Tanaka, M. Hirata, N. Matsumura, K. Koga, M. Shiratani, Y. Kiyohara

Mat. Res. Soc. Symp. Proc.   1723   2015.2

Multigeneration Effects of Plasma Irradiation to Seeds of Arabidopsis Thaliana and Zinnia on Their Growth Reviewed International journal

T. Sarinont, T. Amano, K. Koga, M. Shiratani, N. Hayashi

Mat. Res. Soc. Symp. Proc.   1723   2015.1

反応性微粒子プラズマプロセスを用いたゲルマニウム結晶ナノ粒子含有膜の堆積と量子ドット太陽電池への応用 Reviewed

内田儀一郎, 市田大樹, 徐鉉雄, 古閑一憲, 白谷正治

スマートプロセス学会誌   4 ( 1 )   2015.1

SiC Nanoparticle Composite Anode for Li-Ion Batteries Reviewed International journal

M. Shiratani, K. Kamataki, G. Uchida, K. Koga, H. Seo, N. Itagaki, T. Ishihara

Mat. Res. Soc. Symp. Proc.   1678   2014.7

Plasma etching of single fine particle trapped in Ar plasma by optical tweezers Reviewed International journal

T. Ito, K. Koga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida and M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

Control of the area irradiated by the sheet-type plasma jet in atmospheric pressure Reviewed International journal

T. Kawasaki, K. Kawano, H. Mizoguchi, Y. Yano, K. Yamashita, M. Sakai, G. Uchida, K. Koga, M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

Formation of carbon nanoparticle using Ar+CH4 high pressure nanosecond discharges Reviewed International journal

K. Koga, X. Dong, S. Iwashita, U. Czarnetzki and M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

Growth enhancement effects of radish sprouts: atmospheric pressure plasma irradiation vs. heat shock Reviewed International journal

T. Sarinont, T. Amano, S. Kitazaki, K. Koga, G. Uchida, M. Shiratani and N. Hayashi

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

Contribution of H2 plasma etching to radial profile of amount of dust particles in a divertor simulator Reviewed International journal

M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura and A. Sagara, the LHD Experimental Group

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD Reviewed International journal

S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method Reviewed International journal

D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency Reviewed International journal

Y. Hashimoto, S. Toko, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

Emission spectroscopy of Ar + H-2+ C7H8 plasmas: C7H8 flow rate dependence and pressure dependence Reviewed International journal

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine and M. Hori

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization Invited Reviewed International journal

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Proc. SPIE photonics west 2014   8987   2014.3

Effects of Atmospheric Air Plasma Irradiation on pH of Water Reviewed International journal

T. Sarinont, K. Koga, S. Kitazaki, G. Uchida, N. Hayashi, M. Shiratani

JPS Conf. Proc.   1   2014.3

Pressure dependence of carbon film deposition using H-assisted plasma CVD Reviewed International journal

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, K. Takenaka, Y. Setsuhara, M. Sekine, M. Hori

Proc. 8th Int. Conf. Reactive Plasmas   2014.2

Effects of growth enhancement by plasma irradiation to seeds in water Reviewed International journal

T. Sarinont, K. Koga, S. Kitazaki, M. Shiratani, N. Hayashi

Proc. 8th Int. Conf. Reactive Plasmas   2014.2

Long term growth of radish sprouts after atmospheric pressure DBD plasma irradiation to seeds Reviewed International journal

T. Amano, T. Sarinont, S. Kitazaki, N. Hayashi, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   2014.2

Multi-generation evaluation of plasma growth enhancement to arabidopsis thaliana (Invited) Invited Reviewed International journal

K. Koga, T. Sarinont, S. Kitazaki, N. Hayashi, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   2014.2

Visualization of oxidizing substances generated by atmospheric pressure non-thermal plasma jet with water Reviewed International journal

T. Kawasaki, K. Kawano, H. Mizoguchi, Y. Yano, K. Yamashita, M. Sakai, G. Uchida, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   2014.2

Growth control of ZnO nano-rod with various seeds and photovoltaic application Reviewed International journal

H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

J. Phys. : Conference Series (11th APCPST)   441 ( 1 )   2013.6

Control of nanoparticle formation in reactive plasmas and its application to fabrication of green energy devices Invited Reviewed International journal

M. Shiratani, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga

Proc. 13th International Conference on Plasma Surface Engineering   2 ( 26 )   2013.3

Subacute pulmonary toxicity of copper indium gallium diselenide following intratracheal instillations into the lungs of rats Reviewed International journal

A. Tanaka, M. Hirata, M. Shiratani, K. Koga, Y. Kiyohara

Journal of Occupational Health   54 ( 3 )   2012.6

The Optical Analysis and Application of Size-controllable Si Quantum Dots Fabricated by Multi-hollow Discharge Plasma Chemical Vapor Deposition Reviewed International journal

H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Mat. Res. Soc. Symp. Proc.   1426   2012.4

Effects of Atmospheric Pressure Dielectric Barrier Discharge Plasma Irradiation on Yeast Growth Reviewed International journal

S. Kitazaki, K. Koga, M. Shiratani, N. Hayashi

Mat. Res. Soc. Symp. Proc.   1469   2012.4

Influence of Atmospheric Pressure Torch Plasma Irradiation on Plant Growth Reviewed International journal

Y. Akiyoshi, N. Hayashi, S. Kitazaki, K. Koga and M. Shiratani

Mat. Res. Soc. Symp. Proc.   1469   2012.4

Rapid Growth of Radish Sprouts Using Low Pressure O2 Radio Frequency Plasma Irradiation Reviewed International journal

S. Kitazaki, K. Koga, M. Shiratani, N. Hayashi

Mat. Res. Soc. Symp. Proc.   1469   2012.4

Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition Reviewed International journal

M. Shiratani, K. Hatozaki, Y. Hashimoto, Y. Kim, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga

Mat. Res. Soc. Symp. Proc.   1426   2012.4

In-situ Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances Reviewed International journal

Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Mat. Res. Soc. Symp. Proc.   1426   2012.4

Self-organized carbon Mk formation on the top surface of fine trenches using a low temperature plasma anisotropic CVD for depositing fine organic structure International journal

K. Koga, T. Urakawa, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. Plasma Conf. 2011   2011.11

Deposition of FeSi2 nano-particle film International journal

M. Sato, Y. Wang, K. Nakahara, T. Matsunaga, H. Seo, G. Uchida, K. Koga and M. Shiratani

Proc. Plasma Conf. 2011   2011.11

Effects of substrate bias voltage on plasma anisotropic CVD of carbon using H-assisted plasma CVD reactor International journal

T. Urakawa, H. Matsuzaki, D. Yamashita, G. Uchida, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. Plasma Conf. 2011   2011.11

Growth promotion characteristics of bread yeast by atmospheric pressure dielectric barrier discharge plasma irradiation International journal

S. Kitazaki, K. Koga, M. Shiratani, N. Hayashi

Proc. Plasma Conf. 2011   2011.11

Production Process of Carbon Nanotube Coagulates International journal

T. Mieno, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   2011.11

Influence of active oxygen species produced by atmospheric torch plasma on plant growth Reviewed International journal

N. Hayashi, Y. Akiyoshi, S. Kitazaki, K. Koga, M. Shiratani

Proc. Intern. Symp. on Dry Process   33   2011.11

Optical emission spectroscopy of Ar+H2+ C7H8 discharges for anisotropic plasma CVD of carbon Reviewed International journal

T. Urakawa, H. Matsuzaki, D. Yamashita, G. Uchida, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. Intern. Symp. on Dry Process   33   2011.11

Quantum dot-sensitized solar cells using nitridated si nanoparticles produced by double multi-hollow discharges Reviewed International journal

M. Sato, Y. Wang, K. Nakahara, T. Matsunaga, H. Seo, G. Uchida, K. Koga, M. Shiratani

Proc. PVSEC-21   2011.11

Stable schottky solar cells using cluster-free a-si:h prepared by multi-hollow discharge plasma CVD Reviewed International journal

K. Hatozaki, K. Nakahara, G. Uchida, K. Koga, M. Shiratani

Proc. PVSEC-21   2011.11

Deposition of highly stable cluster-free a-Si:H films using fast gas flow multi-hollow discharge plasma CVD method International journal

K. Hatozaki, K. Nakahara, T. Matsunaga, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   2011.11

Performance enhancement of Si quantum dot-sensitized solar cells by surface modification using ZnO barrier layer International journal

Y. Wang, M. Sato, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Intern. Symp. on Dry Process   33   2011.11

Surface nitridation of silicon nano-particles using double multi-hollow discharge plasma CVD Reviewed International journal

G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani

Physica Status Solidi (c)   8 ( 10 )   2011.10

Deposition of cluster-free P-doped a-Si:H films using SiH4+PH3 multi-hollow discharge plasma CVD method Reviewed International journal

K. Koga, K. Nakahara, Y. Kim, Y. Kawashima, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani

Physica Status Solidi (c)   8 ( 10 )   2011.10

Hybrid sensitized solar cells using Si nanoparticles and ruthenium dye Reviewed International journal

G. Uchida, Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani

Physica Status Solidi (c)   8 ( 10 )   2011.10

Deposition profile control of carbon films on submicron wide trench substrate using H-assisted plasma CVD International journal

T. Urakawa, T. Nomura, H. Matsuzaki, D. Yamashita, G. Uchida, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

2011.7

Generation and Surface Modification of Si nano-particles using SiH4/H2 and N2 multi-hollow discharges and their application to the third generation photovoltaics Invited Reviewed International journal

K. Koga, G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Kamataki, N. Itagaki, M. Shiratani

International Conference on Advances in Condensed and Nano Materials (ICACNM)   1393   2011.2

マルチホロー放電プラズマＣＶＤによる量子ドット増感太陽電池用シリコンナノ結晶粒子の作製

内田儀一郎, 古閑一憲, 白谷正治

ケミカルエンジニヤリング   55 ( 12 )   947 - 954   2010.12

Fluctuation Control for Plasma Nanotechnologies Reviewed International journal

M. Shiratani, K. Koga, G. Uchida, N. Itagaki, K. Kamataki

Proc. IEEE TENCON 2010   2010.11

Growth Stimulation of Radish Sprouts Using Discharge Plasma Reviewed International journal

S. Kitazaki, D. Yamashita, H. Matsuzaki, G. Uchida, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010.11

Photoluminescence of Si nanoparticles synthesized using multi-hollow discharge plasma CVD Reviewed International journal

Y. Kawashima, K. Yamamoto, M. Sato, T. Matsunaga, K. Nakahara, D. Yamashita, H. Matsuzaki, G. Uchida, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010.11

Redox Characteristics of Amino Acids Using Low Pressure Water Vapor RF Plasma Reviewed International journal

Y. Akiyoshi, A. Nakahigashi, N. Hayashi, S. Kitazaki, Takuro Iwao, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010.11

Substrate temperature dependence of feature profile of carbon films on substrate with submicron trenches Reviewed International journal

T. Nomura, T. Urakawa, Y. Korenaga, D. Yamashita, H. Matsuzaki, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010.11

Cluster-Free B-Doped a-Si:H Films Deposited Using SiH4 + B10H14 Multi-Hollow Discharges Reviewed International journal

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010.11

Deposition profiles of microcrystalline silicon films using multi-hollow discharge plasma CVD Reviewed International journal

T. Matsunaga, Y. Kawashima, K. Koga, K. Nakahara, W. M. Nakamura, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

Proc. IEEE TENCON 2010   2010.11

Effects of Amplitude Modulation of rf Discharge Voltage on Growth of Nano-Particles in Reactive Plasma Reviewed International journal

K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

Proc. IEEE TENCON 2010   2010.11

Effects of Ar addition on breakdown voltage in a Si(CH3)2(OCH3)2 RF discharge Reviewed International journal

G. Uchida, S. Nunomutra, H. Miyata, S. Iwashita, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010.11

Deposition rate enhancement of cluster-free P-doped a-Si:H films using multi-hollow discharge plasma CVD method International journal

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010.10

Plasma parameter measurements of Ar+H2+C7H8 plasma in H-assisted plasma CVD reactor International journal

T. Nomura, T. Urakawa, Y. Korenaga, D. Yamashita, H. Matsuzaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010.10

Redox Characteristics of Thiol of Plants Using Radicals Produced by RF Discharge International journal

A. Nakahigashi, Y. Akiyoshi, N. Hayashi, S. Kitazaki, K. Koga, M. Shiratani

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010.10

Combinatorial deposition of microcrystalline Si films using multi-hollow discharge plasma CVD International journal

T. Matsunaga, Y. Kawashima, K. Koga, W. M. Nakamura, K. Nakahara, H. Matsuzaki, D. Yamashita, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010.10

Quantum dot-sensitized solar cells using Si nanoparticles Reviewed International journal

Y. Kawashima, K. Nakahara, H. Sato, K. Koga, M. Shiratani, M. Kondo

35 ( 3 )   2010.9

Si quantum dot-sensitized solar cells using Si nanoparticles produced by plasma CVD Reviewed International journal

Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

Proc. 35th IEEE Photovoltaic Specialists Conf.   2010.7

Effects of hydrogen dilution on electron density in multi-hollow discharges with magnetic field for A-Si:H film deposition Reviewed International journal

K. Koga, Y. Kawashima, K. Nakahara, T. Matsunaga, W. M. Nakamura, M. Shiratani

Proc. 35th IEEE Photovoltaic Specialists Conf.   2010.7

Deposition of cluster-free P-doped a-Si:H films using a multi-hollow discharge plasma CVD method Reviewed International journal

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 35th IEEE Photovoltaic Specialists Conf.   2010.7

Synthesis of crystalline Si nanoparticles for Quantum dots-sensitized solar cells using multi-hollow discharge plasma CVD International journal

Y. Kawashima, K. Nakahara, H. Sato, K. Koga, M. Shiratani, M. Kondo

Proc. of the 27th symposium on plasma processing   ( B5-05 )   2010.2

Control of deposition profile of hard carbon films on trenched substrates using H-assisted plasma CVD reactor International journal

T. Nomura, Y. Korenaga, H. Matsuzaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. of the 27th symposium on plasma processing   ( P1-39 )   2010.2

Effects of gas residence time and H2 dilution on electron density in multi-hollow discharges of SiH4+ H2 International journal

K. Koga, H. Sato, Y. Kawashima, W. M. Nakamura, M. Shiratani

Proc. of the 27th symposium on plasma processing   ( A5-06 )   2010.2

In-situ Measurement of Production Process of Nanotube-Aggregates by the Laser-Mie Scattering (Dependence of Arc Condition and Gravity) International journal

T. Mieno, GuoDong Tan, S. Usuba, K. Koga, M. Shiratani

Proc. of the 27th symposium on plasma processing   ( P2-17 )   2010.2

In-Situ Sampling of Dust Particles Produced Due to Interaction between Main Discharge Plasma and Inner Wall in LHD International journal

H. Miyata, S. Iwashita, YasuY. Yamada, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, LHD Experimental Group

Proc. of the 27th symposium on plasma processing   ( P1-14 )   2010.2

Measurement of electron density in multi-hollow discharges with magnetic field International journal

H. Sato, Y. Kawashima, K. Nakahara, K. Koga, M. Shiratani

Proc. of the 27th symposium on plasma processing   ( A6-01 )   2010.2

Observation of nano-particle transport in capacitively coupled radio frequency discharge plasma International journal

S. Iwashita, H. Miyata, YasuY. Yamada, H. Matsuzaki, K. Koga, M. Shiratani

Proc. of the 27th symposium on plasma processing   ( P1-13 )   2010.2

Substrate temperature dependence of deposition profile of plasma CVD carbon films in trenches Reviewed International journal

J. Umetsu, K. Inoue, T. Nomura, H. Matsuzaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

J. Plasma Fusion Res.   8   2009.9

Dust Particles formed owing to interactions between H2 or D2 helicon plasma, graphite International journal

H. Miyata, S. Iwashita, YasuY. Yamada, K. Koga, M. Shiratani

Proc. of 2009 International Symposium on Dry Process   2009.9

Measurements of electron density in SiH4+H2 multi-hollow discharges using a frequency shift probe International journal

K. Nakahara, Y. Kawashima, H. Sato, K. Koga, M. Shiratani

Proc. of 2009 International Symposium on Dry Process   2009.9

Measurements of Surface Temperature of a-Si:H Films in Silane Multi-Hollow Discharge with IR Thermometer International journal

H. Sato, Y. Kawashima, K. Koga, M. Shiratani

Proc. of 2009 International Symposium on Dry Process   2009.9

Porosity Control of Nano-Particle Composite Porous Low Dielectric Films using Pulse RF Discharges with Amplitude Modulation International journal

S. Iwashita, H. Miyata, K. Koga, H. Matsuzaki, M. Shiratani, M. Akiyama

Proc. of 2009 International Symposium on Dry Process   2009.9

Pressure, aspect ratio dependence of deposition profile of carbon films on trench substrates deposited by plasma CVD International journal

T. Nomura, Y. Korenaga, J. Umetsu, H. Matsuzaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. of 2009 International Symposium on Dry Process   2009.9

Synthesis of Si nanoparticles for multiple exciton generation solar cells using multi-hollow discharge plasma CVD International journal

Y. Kawashima, H. Sato, K. Koga, M. Shiratani, M. Kondo

Proc. of 2009 International Symposium on Dry Process   2009.9

Toward plasma nano-factories International journal

M. Shiratani, K. Koga

Proc. of 2nd International Conference on Advanced Plasma Technologies (iCAPT-II) with 1st International Plasma Nanoscience Symposium (iPlasmaNano-I)   2009.9

A comparison of dust particles produced due to interaction between graphite and plasma: LHD vs helicon discharges Reviewed International journal

S. Iwashita, H. Miyata, K. Koga, M. Shiratani, N. Ashikawa, K. Nishimura, A. Sagara, the LHD experimental group

J. Plasma Fusion Res.   8   2009.9

Control of Three Dimensional Transport of Nano-blocks by Amplitude Modulated Pulse RF Discharges using an Electrode with Needles Reviewed International journal

S. Iwashita, H. Miyata, H. Matsuzaki, K. Koga, M. Shiratani

J. Plasma Fusion Res.   8   2009.9

Dependence of volume fraction of clusters on deposition rate of a-Si:H films deposited using a multi-hollow discharge plasma CVD method Reviewed International journal

H. Sato, Y. Kawashima, M. Tanaka, K. Koga, W. M. Nakamura, M. Shiratani

J. Plasma Fusion Res.   8   2009.9

Detection of nano-particles formed in cvd plasma using a two-dimensional photon-counting laser-light-scattering method Reviewed International journal

H. Miyahara, S. Iwashita, H. Miyata, H. Matsuzaki, K. Koga, M. Shiratani

J. Plasma Fusion Res.   8   2009.9

Optical Emission Spectroscopy of a Magnetically Enhanced Multi-hollow Discharge Plasma for a-Si:H Deposition Reviewed International journal

W. M. Nakamura, Y. Kawashima, M. Tanaka, H. Sato, J. Umetsu, H. Miyahara, H. Matsuzaki, K. Koga, M. Shiratani

J. Plasma Fusion Res.   8   2009.9

Plasma CVD of Nano-particle Composite Porous SiOCH Films International journal

M. Shiratani, S. Iwashita, H. Miyata, K. Koga, H. Matsuzaki, M. Akiyama

Proc. of 19th International Symposium on Plasma Chemistry   2009.7

Characterization of Dust Particles Ranging in Size from 1 nm to 10 µm Collected in the LHD Reviewed International journal

4   34 - 34   2009.4

Nano-block manipulation using pulse RF discharges with amplitude modulation combined with a needle electrode

S. Iwashita, H. Miyata, H. Matsuzaki, K. Koga, M. Shiratani

Proc. of PSS2009/SPP26   2009.2

Characteristics of dust particles produced due to interaction between hydrogen plasma, graphite

S. Iwashita, H. Miyata, K. Koga, M. Shiratani, N. Ashikawa, A. Sagara, K. Nisimura

Proc. of PSS2009/SPP26   2009.2

Conductivity of nc-Si films depsited using multi-hollow discharge plasma CVD method

K. Koga, Y. Kawashima, W. M. Nakamura, H. Sato, M. Tanaka, M. Shiratani, M. Kondo

Proc. of PSS2009/SPP26   2009.2

Deposition profile of toluene plasma CVD carbon films in trenches

J. Umetsu, K. Inoue, T. Nomura, H. Matsuzaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. of PSS2009/SPP26   2009.2

Effects of magnetic fields on multi-hollow discharges for thin film silicon solar cells

Nakamura W. M., Sato H., Koga K., Shiratani M.

Proc. of PSS2009/SPP26   2009.2

High Rate Deposition of a-Si:H Depositied using a Low Gas Pressure Multi-hollow Discharge Plasma CVD Method

K. Koga, W. M. Nakamura, H. Sato, M. Tanaka, H. Miyahara, M. Shiratani

Proc. of PSS2009/SPP26   2009.2

Plasma CVD of Nano-particle Composite Porous Films of k=1.4-2.9, Young’s Modulus above 10 GPa Reviewed International journal

2008.12

Deposition profile of plasma CVD carbon films in trenches Reviewed International journal

J. Umetsu, K. Inoue, T. Nomura, H. Matsuzaki, K. Koga, Y. Setsuhara, M. Shiratani, M. Sekine, M. Hori

Proc. of 30th International Symposium on Dry Process   2008.12

Rapid transport of nano-particles in amplitude modulated rf discharges for depositing porous ultra-low-k films Reviewed International journal

S. Iwashita, K. Koga, M. Morita, M. Shiratani

J. Phys. : Conference Series   100 ( 6 )   2008.8

Cluster incorporation control for a-Si:H film deposition Reviewed International journal

W. M. Nakamura, K. Koga, H. Miyahara, M. Shiratani

J. Phys. : Conference Series   100 ( 8 )   2008.8

Optical emission spectroscopic study on H-assisted plasma for anisotropic deposition of Cu films Reviewed International journal

J. Umetsu, K. Koga, K. Inoue, M. Shiratani

J. Phys. : Conference Series   100 ( 6 )   2008.8

Nanoparticle-Suppressed Plasma CVD for Depositing Stable a-Si:H Films Reviewed International journal

M. Shiratani, W. M. Nakamura, H. Miyahara, K. Koga

Digest of Technical Papers of the Fifteenth International Workshop on Active-Matrix Flatpanel Displays, Devices (AM-FPD 08)   2008.7

Rapid transport of nano-particles having a fractional elemental charge on average in capacitively coupled rf discharges by amplitude modulating discharge voltage Invited Reviewed International journal

M. Shiratani, S. Iwashita, K. Koga, S. Nunomura

Faraday Discussions   137   2008.1

VHF discharge sustained in a small hole Reviewed International journal

K. Koga, W. M. Nakamura, and M. Shiratani

Proc. 28th Intern. Conf. on Phenomena in Ionized Gases   2007.7

Transport of nano-particles in pulsed AM RF discharges

S. Iwashita, K. Koga, M. Shiratani

Proc. the 24th Symp. on Plasma Processing   2007.1

In-situ sampling of dust generated in LHD and its analysis

M. Shiratani, S. Kiridoshi, K. Koga, S. Iwashita, N. Ashikawa, K. NIshimura, A. Sagara, A. Komori, LHD Experimental Group

Proc. the 24th Symp. on Plasma Processing   2007.1

Stability of a-Si:H deposited using multi-hollow plasma CVD

K. Koga, W. M. Nakamura, D. Shimokawa, M. Shiratani

Proc. the 24th Symp. on Plasma Processing   2007.1

Fabrication of nanoparticle composite porous films having ultra-low dielectric constant Reviewed International journal

S. Nunomura, K. Koga, M. Shiratani, Y. Watanabe, Y. Morisada, N. Matsuki, and S. Ikeda

Jpn. J. Appl. Phys.   44 ( 50 )   2005.12

Highly stable a-Si:H films deposited by using multi-hollow plasma chemical vapor deposition Reviewed International journal

K. Koga, T. Inoue, K. Bando, S. Iwashita, M. Shiratani, and Y. Watanabe

Jpn. J. Appl. Phys.   44 ( 48 )   2005.11

Production of crystalline Si nano-particles using VHF discharges and their properties Reviewed International journal

M. Shiratani, T. Kakeya, K. Koga, Y. Watanabe, and M. Kondo

30 ( 1 )   2005.3

Preparation of high-quality a-Si:H using cluster-suppressed plasma CVD method and its prospects Invited Reviewed International journal

Y. Watanabe, M. Shiratani, K. Koga

30 ( 1 )   2005.3

Carbon particle formation due to interaction between H2 plasma and carbon fiber composite wall Reviewed International journal

K. Koga, R. Uehara, Y. Kitaura, M. Shiratani, Y. Watanabe, A. Komori

IEEE Trans. Plasma Science   32 ( 2 )   2004.2

Effects of Excitation Frequency and H2 Dilution on Cluster Generation in Silane High-Frequency Discharges Reviewed International journal

M. Shiratani, K. Koga, A. Harikai, T. Ogata, and Y. Watanabe

MRS Symp. Proc.   762   2003.4

シランプラズマ中のクラスタ成長と薄膜形成

白谷正治, 古閑一憲, 尾形隆則, 掛谷知秀, 鹿口直斗, 渡辺征夫

信学技報   103 ( 6 )   2003.4

Anisotropic Plasma Chemical Vapor Deposition of Copper Films in Trenches Reviewed International journal

K. Takenaka, M. Onishi, M. Takeshita, T. Kinoshita, K. Koga, M. Shiratani, and Y. Watanabe

MRS Symp. Proc.   766   2003.4

Anisotropic Deposition of Copper by H-Assisted Plasma Chemical Vapor Deposition Reviewed International journal

K. Takenaka, M. Shiratani, M. Onishi, M. Takeshita, T. Kinoshita, K. Koga, and Y. Watanabe

Matr. Sci. Semiconductor Processing   5 ( 2 )   2003.2

ナノクラスタ制御プラズマCVDと高品質，光安定a-Si:H太陽電池への応用

白谷正治, 古閑一憲, 渡辺征夫

アモルファスセミナーテキスト   2002.11

Formation of nano-particles in microgravity plasma Reviewed International journal

M. Shiratani, K. Koga, Y. Watanabe

Journal of Japan Society of Microgravity Application   19   2002.10

Anisotropic deposition of copper by plasma CVD method International journal

K. Takenaka, M. Onishi, M. Takenaka, T. Kinoshita, K. Koga, M. Shiratani, Y. Watanabe

Proc. Intern. Symp. on Dry Process   2002.10

Nucleation and subsequent growth of clusters in reactive plasma (invited lecture paper) Reviewed International journal

Y. Watanabe, M. Shiratani, K. Koga

Plasma Sources Sci. Technol.   11   2002.8

Correlation between Si cluster amount in silane HF discharges and quality of a-Si:H films International journal

M. Shiratani, M. Kai, K. Imabeppu, K. Koga, Y. Watanabe

Proc. ESCANPIG16/ICRP5 Joint Meeting   2002.7

Anisotropic deposition of Cu with H-assisted plasma CVD International journal

K. Takenaka, H. J. Jin, M. Onishi, K. Koga, M. Shiratani, Y. Watanabe

Proc. ESCANPIG16/ICRP5 Joint Meeting   2002.7

Conformal deposition of pure Cu films in trenches by H-assisted plasma CVD using Cu(EDMDD)2 International journal

K. Takenaka, H. J. Jin, M. Onishi, K. Koga, M. Shiratani, Y. Watanabe, T. Shingen

Proc. ESCANPIG16/ICRP5 Joint Meeting   2002.7

Suppression methods of cluster growth in silane discharges and their application to deposition of super high quality a-Si:H films International journal

K. Koga, K. Imabeppu, M. Kai, A. Harikai, M. Shiratani, Y. Watanabe

Proc. Intern. Workshop on Information and Electrical Engineering (IWIE2002)   2002.5

Deposition of Cu films in trenches for LIS interconnects by H-assisted plasma CVD method International journal

K. Takenaka, M. Onishi, T. Kinoshita, K. Koga, M. Shiratani, Y. Watanabe, T. Shingen

Proc. Intern. Workshop on Information and Electrical Engineering (IWIE2002)   2002.5

Clustering phenomena in low-pressure reactive plasma: basis and applications (invited lecture paper) Reviewed International journal

Y. Watanabe, A. Harikai, K. Koga, M. Shiratani

Pure Appl. Chem.   74 ( 3 )   2002.3

In-situ measurement of size and density of particles in sub-nm to nm size range International journal

K. Koga, M. Shiratani, Y. Watanabe

Proc. Nano-technology Workshop   2002.2

Deposition of high-quality Si films by suppressing cluster growth in SiH4 high-frequency discharges International journal

M. Shiratani, K. Koga, Y. Watanabe

Proc. Nano-technology Workshop   2002.2

プロセスプラズマ中のクラスタ - アモルファスシリコン太陽電池製造用プラズマ中のクラスター Reviewed

白谷正治, 古閑一憲, 渡辺征夫

( 5 )   2002.1

クラスタ制御プラズマCVD法によるSi薄膜の高品質化

渡辺征夫, 古閑一憲, 白谷正治

シリコンテクノロジー   ( 37 )   2002.1

Deposition of pure copper thin films by H-assisted plasma CVD using a new Cu complex Cu(EDMDD)2 International journal

K. Takenaka, H. J. Jin, M. Onishi, K. Koga, M. Shiratani, Y. Watanabe

Proc. Intern. Symp. on Dry Process   2001.11

Cluster-less plasma CVD reactor and its application to a-Si:H film deposition Reviewed International journal

M. Shiratani, K. Koga, Y. Watanabe

Mat. Res. Soc. Symp. Proc.   2001.7

Behavior of a particle injected in ion sheath of electropositive and electronegative gas discharges International journal

M. Shiratani, A. Toyozawa, K. Koga, Y. Watanabe

Proc. Intern. Conf. on Phenomena in Ionized Gases   2001.7

Clustering phenomena in low-pressure reactive plasma: base and applications (invited) International journal

Y. Watanabe, M. Shiratani, K. Koga

Proc. Intern. Symp. on Plasma Chemistry   2001.7

Deposition of super high quality a-Si:H thin films using cluster-suppressed plasma CVD reactor International journal

K. Koga, T. Sonoda, N. Shikatani, M. Shiratani, Y. Watanabe

Proc. Intern. Conf. on Phenomena in Ionized Gases   2001.7

Development of H-assisted plasma CVD reactor for Cu interconnects International journal

M. Shiratani, H. J. Jin, K. Takenaka, K. Koga, T. Kinoshita, Y. Watanabe

Proc. Intern. Conf. on Phenomena in Ionized Gases   2001.7

Nucleation and subsequent growth of clusters in reactive plasma (invited) International journal

Y. Watanabe, M. Shiratani, K. Koga

Proc. Intern. Conf. on Phenomena in Ionized Gases   2001.7

Formation kinetics and control of dust particles in capacitively-coupled reactive plasma (invited) Reviewed International journal

Y. Watanabe, M. Shiratani, K. Koga

Phys. Scripta   T89   2001.1

Behavior of a particle injected in ion sheath International journal

M. Shiratani, A. Toyozawa, K. Koga, Y. Watanabe

Proc. of Plasma Science Symp. 2001/ 18th Symp. on Plasma Processing   2001.1

Development of cluster-suppressed plasma CVD reactor for high quality a-Si:H film deposition International journal

M. Shiratani, T. Sonoda, N. Shikatani, K. Koga, Y. Watanabe

Proc. of Plasma Science Symp. 2001/ 18th Symp. on Plasma Processing   2001.1

Effects of H2 dilution and excitation frequency on initial growth of clusters in silane plasma International journal

K. Koga, K. Tanaka, M. Shiratani, Y. Watanabe

Proc. Plasma Science Symp. 2001/ 18th Symp. on Plasma Processing   2001.1

H assisted control of quality and conformality in Cu film deposition using plasma CVD method International journal

M. Shiratani, H. J. Jin, K. Takenaka, K. Koga, T. Kinoshita, Y. Watanabe

Proc. Advanced Metallization Conf. 2000   2001.1

Measurements of surface reaction probability of SiH3 International journal

M. Shiratani, N. Shiraishi, K. Koga, Y. Watanabe

Proc. of Plasma Science Symp. 2001/ 18th Symp. on Plasma Processing   2001.1

Plasma CVD method for Cu interconnects in ULSI (invited) International journal

M. Shiratani, K. Koga, Y. Watanabe

Proc. of Plasma Science Symp. 2001/ 18th Symp. on Plasma Processing   2001.1

Methods of suppressing cluster growth in silane rf discharges Reviewed International journal

M. Shiratani, S. Maeda, Y. Matsuoka, K. Tanaka, K. Koga, Y. Watanabe

Mat. Res. Soc. Symp. Proc.   2000.7

Deposition of smooth thin Cu films in deep submicron trench by plasma CVD reactor with H atom source Reviewed International journal

H. J. Jin, M. Shiratani, Y. Nakatake, K. Koga, T. Kinoshita, Y. Watanabe

Mat. Res. Soc. Symp. Proc.   2000.7

Propagation characteristics of ion acoustic waves in an Ar/SF6 plasma Reviewed International journal

R. Ichiki, M. Shindo, S. Yoshimura, K. Koga, Y. Kawai

J. Phys. Soc. Jpn.   69 ( 6 )   2000.6

Filling subquater-micron trench structure with high-purity copper using plasma reactor with H atom source Reviewed

H. J. Jin, M. Shiratani, Y. Nakatake, K. Koga, T. Kinoshita, Y. Watanabe

Res. Rep. ISEE Kyushu Univ.   5 ( 1 )   2000.3

Growth processes of particles up to nanometer size in high-frequency SiH4 plasma Reviewed International journal

Y. Watanabe, M. Shiratani, T. Fukuzawa, K. Koga

Jour. Technical Phys.   41 ( 1 )   2000.1

Observation of Asymmetric Sheath Structure in Multi-Component Plasma Containing Negative Ions Reviewed International journal

K. Koga, H. Naitou, Y. Kawai

J. Plasma Fusion Res.   2   1999.12

Observation of Local Structures in Asymmetric Ion Sheath Reviewed International journal

K. Koga, H. Naitou, Y. Kawai

J. Phys. Soc. Jpn.   68 ( 5 )   1999.5

Behavior of the Ion Sheath Instability in a Negative Ion Plasma Reviewed International journal

K. Koga, Y. Kawai

Jpn. J. Appl. Phys.   38 ( 3A )   1999.3

Growth control of Marchantia polymorpha gemmae using nonthermal plasma irradiation

Shoko Tsuboyama, Takamasa Okumura, Pankaj Attri, Kazunori Koga, Masaharu Shiratani, Kazuyuki Kuchitsu

Scientific Reports   14 ( 1 )   2024.2

Improving the efficiency of CO2 methanation using a combination of plasma and molecular sieves

Susumu Toko, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

Results in Surfaces and Interfaces   100204 - 100204   2024.2

Influence of humidity on the plasma-assisted CO<inf>2</inf> conversion

Pankaj Attri, Takamasa Okumura, Nozomi Takeuchi, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

Plasma Processes and Polymers   21 ( 1 )   2024.1

プラズマ触媒作用を用いた二酸化炭素還元反応の促進に関する基礎研究

13 ( 1 )   31 - 36   2024.1

On-axis sputtering fabrication of Tm3Fe5O12 film with perpendicular magnetic anisotropy

Marlis Nurut Agusutrisno, Christopher H. Marrows, Kunihiro Kamataki, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoto Yamashita

Thin Solid Films   788   140176 - 140176   2024.1

Health assessment of rice cultivated and harvested from plasma-irradiated seeds

Takamasa Okumura, Hayate Tanaka, Takumi Nakao, Teruki Anan, Ryo Arita, Masaki Shiraki, Kayo Shiraki, Tomoyuki Miyabe, Daisuke Yamashita, Kayo Matsuo, Pankaj Attri, Kunihiro Kamataki, Naoto Yamashita, Naho Itagaki, Masaharu Shiratani, Satoshi Hosoda, Akiyo Tanaka, Yushi Ishibashi, Kazunori Koga

Scientific Reports   13 ( 1 )   2023.12

Reaction kinetics studies for phenol degradation under the impact of different gas bubbles and pH using gas-liquid discharge plasma

A. El-Tayeb, Takamasa Okumura, Pankaj Attri, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics   62 ( SN )   2023.11

Contribution of active species generated in plasma to CO<inf>2</inf> methanation

Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

Japanese Journal of Applied Physics   62 ( SL )   2023.9

Single-step fabrication of fibrous Si/Sn composite nanowire anodes by high-pressure He plasma sputtering for high-capacity Li-ion batteries Reviewed

Giichiro Uchida, Kodai Masumoto, Mikito Sakakibara, Yumiko Ikebe, Shinjiro Ono, Kazunori Koga, Takahiro Kozawa

Scientific Reports   13 ( 1 )   2023.9

Influence of electric potential-induced by atmospheric pressure plasma on cell response

Takamasa Okumura, Chia-Hsing Chang, Kazunori Koga, Masaharu Shiratani, Takehiko Sato

Scientific Reports   13 ( 1 )   2023.9

Improving the efficiency of Sabatier reaction through H₂O removal with low-pressure plasma catalysis

Taiki Hasegawa, Susumu Toko, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics   62 ( SL )   SL1028 - SL1028   2023.8

Optical emission spectroscopy study in CO<inf>2</inf> methanation with plasma

Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

Japanese Journal of Applied Physics   62   2023.7

Instant switching control between two types of plasma-driven liquid flows Reviewed

Toshiyuki Kawasaki, Kecheng Shen, Heping Shi, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics_Rapid Communication   62 ( 6 )   060904-1 - 060904-4   2023.6

Editorial: Prospects of plasma generated species interaction with organic and inorganic materials

Pankaj Attri, Kazunori Koga, Hirofumi Kurita, Kenji Ishikawa, Masaharu Shiratani

Frontiers in Physics   10   2023.1

Role of insoluble atoms in the formation of a three-dimensional buffer layer in inverted Stranski–Krastanov mode

38 ( 5 )   1178 - 1185   2023.1

One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges

Iori Nagao, Kunihiro Kamataki, Akihiro Yamamoto, Michihiro Otaka, Yuma Yamamoto, Daisuke Yamashita, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

MRS Advances   7 ( 31 )   911 - 917   2022.12

Effects of substrate surface polarity on heteroepitaxial growth of pseudobinary ZnO–InN alloy films on ZnO substrates

38 ( 7 )   1803 - 1812   2022.11

Raman spectral analysis of the as-deposited a-C:H films prepared by CH4+ Ar plasma CVD

Shinjiro Ono, Sung Hwa Hwang, Takamasa Okumura, Kunihiro Kamataki, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Jun-Seok Oh, Susumu Takabayashi, Tatsuyuki Nakatani

MRS ADVANCES   7 ( 30 )   718 - 722   2022.11

Effects of amplitude modulated capacitively coupled discharge Ar plasma on kinetic energy and angular distribution function of ions impinging on electrodes: particle-in-cell/Monte Carlo collision model simulation

Kohei Abe, Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics   61 ( 10 )   106003 - 106003   2022.9

Detection of NO3− introduced in plasma-irradiated dry lettuce seeds using liquid chromatography-electrospray ionization quantum mass spectrometry (LC-ESI QMS)

12 ( 1 )   2022.7

Treatment of organic wastewater by a combination of non-thermal plasma and catalyst: a review

Pankaj Attri, Kazunori Koga, Takamasa Okumura, Fadzai L. Chawarambwa, Tika E. Putri, Yuichi Tsukada, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani

Reviews of Modern Plasma Physics   6 ( 1 )   2022.7

Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma

Michihiro Otaka, Toshiaki Arima, Jiansyun Lai, Kizuki Ikeda, Kunihiro Kamataki, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

MRS Advances   7 ( 31 )   918 - 922   2022.7

Growth of Single-Crystalline ZnO Films on 18%-Lattice-Mismatched Sapphire Substrates Using Buffer Layers with Three-Dimensional Islands

Yuta Nakamura, Naoto Yamashita, Kunihiro Kamataki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

Crystal Growth & Design   22 ( 6 )   3770 - 3777   2022.6

Performance comparison of nitrile-based liquid electrolytes on bifacial dye-sensitized solar cells under low-concentrated light

Tika E. Putri, Fadzai L. Chawarambwa, Pankaj Attri, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

MRS Advances   7 ( 21 )   427 - 432   2022.5

Epitaxial growth of Zn1−xMgxO films on sapphire substrates via inverted Stranski-Krastanov mode using magnetron sputtering

2022.2

Outcomes of Pulsed Electric Fields and Nonthermal Plasma Treatments on Seed Germination and Protein Functions

Pankaj Attri, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Douyan Wang, Katsuyuki Takahashi, Koichi Takaki

Agronomy   12 ( 2 )   2022.2

Effect of gas flow rate and discharge volume on CO2 methanation with plasma catalysis Reviewed

Susumu Toko, Masashi Ideguchi, Taiki Haseagawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

Japanese Journal of Applied Physics   2022.1

Improved luminescence performance of Yb³⁺-Er³⁺-Zn²⁺: Y<inf>2</inf>O<inf>3</inf> phosphor and its application to solar cells

Fadzai Lesley Chawarambwa, Tika Erna Putri, Sung Hwa Hwang, Pankaj Attri, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Daisuke Nakamura, Masaharu Shiratani

Optical Materials   123   2022.1

Functional nitrogen science based on plasma processing: quantum devices, photocatalysts and activation of plant defense and immune systems

Toshiro Kaneko, Hiromitsu Kato, Hideaki Yamada, Muneaki Yamamoto, Tomoko Yoshida, Pankaj Attri, Kazunori Koga, Tomoyuki Murakami, Kazuyuki Kuchitsu, Sugihiro Ando, Yasuhiro Nishikawa, Kentaro Tomita, Ryo Ono, Tsuyohito Ito, Atsushi M. Ito, Koji Eriguchi, Tomohiro Nozaki, Takayoshi Tsutsumi, Kenji Ishikawa

Japanese Journal of Applied Physics   61 ( SA )   SA0805 - SA0805   2022.1

Performance Characteristics of Bifacial Dye-Sensitized Solar Cells with a V-Shaped Low-Concentrating Light System

Tika E. Putri, Fadzai L. Chawarambwa, Min Kyu Son, Pankaj Attri, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ACS Applied Energy Materials   4 ( 12 )   13410 - 13414   2021.12

Impact of seed color and storage time on the radish seed germination and sprout growth in plasma agriculture

Pankaj Attri, Kenji Ishikawa, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Vida Mildaziene

Scientific Reports   11 ( 1 )   2021.12

Impact of Reactive Oxygen and Nitrogen Species Produced by Plasma on Mdm2–p53 Complex

22 ( 17 )   9585 - 9585   2021.9

Comparison between Ar+CH4 Cathode and Anode Coupled Capacitively Coupled Plasma Chemical Vapor Deposition of Hydrogenated Amorphous Carbon Films Reviewed International journal

S. H. Hwang, R. Iwamoto, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani

Thin Solid Films   729   2021.7

Impact of atmospheric pressure plasma treated seeds on germination, morphology, gene expression and biochemical responses

Pankaj Attri, Kazunori Koga, Takamasa Okumura, Masaharu Shiratani

Japanese Journal of Applied Physics   60 ( 4 )   2021.4

Highly efficient and transparent counter electrode for application in bifacial solar cells

Fadzai Lesley Chawarambwa, Tika Erna Putri, Pankaj Attri, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

Chemical Physics Letters   768   2021.4

Alterations of DNA Methylation Caused by Cold Plasma Treatment Restore Delayed Germination of Heat-Stressed Rice (Oryza sativa L.) Seeds Reviewed International journal

C. Suriyasak, K. Hatanaka, H. Tanaka, T. Okumura, D. Yamashita, P. Attri, K. Koga, M. Shiratani, N. Hamaoka, Y. Ishibashi

ACS Agric. Sci. Technol.   1 ( 1 )   2021.2

Possible impact of plasma oxidation on the structure of the C-terminal domain of SARS-CoV-2 spike protein: A computational study

Pankaj Attri, Kazunori Koga, Masaharu Shiratani

Applied Physics Express   14 ( 2 )   2021.2

Impact of surface morphologies of substrates on the epitaxial growth of magnetron-sputtered (ZnO) x (InN)1-x films

Ryota Narishige, Kentaro Kaneshima, Daisuke Yamashita, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

Japanese Journal of Applied Physics   60 ( SA )   SAAB02 - SAAB02   2021.1

Time of Flight Size Control of Carbon Nanoparticles Using Ar+CH4 Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method

Sung Hwa Hwang, Kazunori Koga, Yuan Hao, Pankaj Attri, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani, Jun-Seok Oh, Susumu Takabayashi, Tatsuyuki Nakatani

Processes   9 ( 1 )   2 - 2   2020.12

Experimental identification of the reactive oxygen species transported into a liquid by plasma irradiation

Toshiyuki Kawasaki, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics   59 ( 11 )   110502 - 110502   2020.11

Low-stress diamond-like carbon films containing carbon nanoparticles fabricated by combining rf sputtering and plasma chemical vapor deposition

Sung-Hwa Hwang, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Tatsuyuki Nakatani, Masaharu Shiratani

Japanese Journal of Applied Physics   59 ( 10 )   100906 - 100906   2020.10

Plasma agriculture from laboratory to farm: A review

Pankaj Attri, Kenji Ishikawa, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani

Processes   8 ( 8 )   2020.8

Influence of osmolytes and ionic liquids on the Bacteriorhodopsin structure in the absence and presence of oxidative stress: A combined experimental and computational study Reviewed

Pankaj Attri, Jamoliddin Razzokov, Maksudbek Yusupov, Kazunori Koga, Masaharu Shiratani, Annemie Bogaerts

International Journal of Biological Macromolecules   148   657 - 665   2020.4

Progress in photovoltaic performance of organic/inorganic hybrid solar cell based on optimal resistive Si and solvent modified poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate) junction

Hyunwoong Seo, Daisuke Sakamoto, Hakutatsu Chou, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

Progress in Photovoltaics: Research and Applications   26 ( 2 )   145 - 150   2020.2

Effect of hydrogen dilution on the silicon cluster volume fraction of a hydrogenated amorphous silicon film prepared using plasma-enhanced chemical vapor deposition Reviewed

Yeonwon Kim, Kazunori Koga, Masaharu Shiratani

Current Applied Physics   20 ( 1 )   191 - 195   2020.1

Local supply of reactive oxygen species into a tissue model by atmospheric-pressure plasma-jet exposure Reviewed

Toshiyuki Kawasaki, Fumiaki Mitsugi, Kazunori Koga, Masaharu Shiratani

Journal of Applied Physics   125   2019.6

Controlling feeding gas temperature of plasma jet with Peltier device for experiments with fission yeast Reviewed

Shinji Yoshimura, Mitsutoshi Aramaki, Yoko Otsubo, Akira Yamashita, Kazunori Koga

Japanese Journal of Applied Physics   58 ( SE )   SEEG03 - SEEG03   2019.6

Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development Reviewed

Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

Japanese Journal of Applied Physics   58 ( SE )   SE0804 - SE0804   2019.6

Progress and perspectives in dry processes for nanoscale feature fabrication: toward intelligent processes and virtual product development Reviewed

Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

Japanese Journal of Physics   Vol. 58   pp. SE0804(21pp)   2019.5

大気圧非平衡He プラズマジェットと溶液との相互作用に関する可視化研究 Invited

内田 儀一郎, 竹中 弘祐, 川崎 敏之, 古閑 一憲, 白谷 正治, 節原 裕一

スマートプロセス学会誌   8 ( 2 )   58 - 63   2019.3

Spatial correlation between density fluctuations of high energy electrons and nanoparticles in amplitude modulated capactively coupled plasma Reviewed

R. Zhou, K. Mori, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

J. Phys.: Conf. Ser.   2019.1

Room-temperature fabrication of amorphous In2O3:Sn films with high electron mobility via nitrogen mediated amorphization Reviewed

K. Imoto, H. Wang, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

J. Phys.: Conf. Ser.   2019.1

Effects of nitrogen impurity on zno crystal growth on Si substrates Reviewed

Soichiro Muraoka, Lyu Jiahao, Daisuke Yamashita, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

MRS Advances   2019.1

Sputter Epitaxy of (ZnO)x(InN)1-x films on Lattice-mismatched Sapphire Substrate Reviewed

Nanoka Miyahara, Seichi Urakawa, Daisuke Yamashita, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

MRS Advances   2019.1

Photoluminescence of (ZnO)0.82(InN)0.18 films -Incident light angle dependence- Reviewed

N. Miyahara, K. Iwasaki, D. Yamashita, D. Nakamura, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Mater. Sci. Forum   941   2099 - 2103   2018.12

Impact of Gamma rays and DBD plasma treatments on wastewater treatment

Pankaj Attri, Fumiyoshi Tochikubo, Ji Hoon Park, Eun Ha Choi, Kazunori Koga, Masaharu Shiratani

Scientific Reports   8 ( 1 )   2018.12

Cross correlation analysis of fluctuation of interactions between nanoparticles and low pressure reactive plasmas Reviewed

R. Zhou, K. Mori, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Mater. Sci. Forum   941   2104 - 2108   2018.12

Effects of sputtering pressure on (ZnO)<inf>x</inf>(InN)<inf>1-x</inf> crystal film growth at 450?C Reviewed

N. Itagaki, K. Takeuchi, N. Miyahara, K. Imoto, H. Seo, K. Koga, M. Shiratani

Mater. Sci. Forum   941   2093 - 2098   2018.12

Particle behavior and its contribution to film growth in a remote silane plasma

Yeonwon Kim, Kazunori Koga, Masaharu Shiratani

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films   36 ( 5 )   2018.9

The effect of the H<inf>2</inf>/(H<inf>2</inf> + Ar) flow-rate ratio on hydrogenated amorphous carbon films grown using Ar/H<inf>2</inf>/C<inf>7</inf>H<inf>8</inf>plasma chemical vapor deposition

660   891 - 898   2018.8

Low-Pressure Methanation of CO₂ Using a Plasma–Catalyst System

10 ( 8 )   1087 - 1090   2018.8

Transportation of reactive oxygen species in a tissue phantom after plasma irradiation

Toshiyuki Kawasaki, Gouya Kuroeda, Ryuhei Sei, Masaaki Yamaguchi, Reishi Yoshinaga, Riho Yamashita, Hikaru Tasaki, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics   57 ( 1 )   2018.1

低温プラズマによるナノ粒子の合成と太陽電池への応用 Reviewed

古閑一憲, 徐鉉雄, 板垣奈穂, 白谷正治

信学技報   117   5 - 8   2017.11

Low temperature rapid formation of Au-induced crystalline Ge films using sputtering deposition

Sota Tanami, Daiki Ichida, Shinji Hashimoto, Hyunwoong Seo, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   641   59 - 64   2017.11

色素増感太陽電池のポリマー対向電極における触媒反応の活性化 Reviewed

徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

信学技報   117   27 - 29   2017.11

Hysteresis in volume fraction of clusters incorporated into a-Si:H films deposited by SiH 4 plasma chemical vapor deposition

Susumu Toko, Yoshihiro Torigoe, Kimitaka Keya, Takashi Kojima, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

Surface and Coatings Technology   326   388 - 394   2017.10

Extension of the operational regime of the LHD towards a deuterium experiment

Y. Takeiri, T. Morisaki, M. Osakabe, M. Yokoyama, S. Sakakibara, H. Takahashi, Y. Nakamura, T. Oishi, G. Motojima, S. Murakami, K. Ito, A. Ejiri, S. Imagawa, S. Inagaki, M. Isobe, S. Kubo, S. Masamune, T. Mito, I. Murakami, K. Nagaoka, K. Nagasaki, K. Nishimura, M. Sakamoto, R. Sakamoto, T. Shimozuma, K. Shinohara, H. Sugama, K. Y. Watanabe, J. W. Ahn, N. Akata, T. Akiyama, N. Ashikawa, J. Baldzuhn, T. Bando, E. Bernard, F. Castejon, H. Chikaraishi, M. Emoto, T. Evans, N. Ezumi, K. Fujii, H. Funaba, M. Goto, T. Goto, D. Gradic, Y. Gunsu, S. Hamaguchi, H. Hasegawa, Y. Hayashi, C. Hidalgo, T. Higashiguchi, Y. Hirooka, Y. Hishinuma, R. Horiuchi, K. Ichiguchi, K. Ida, T. Ido, H. Igami, K. Ikeda, S. Ishiguro, R. Ishizaki, A. Ishizawa, A. Ito, Y. Ito, A. Iwamoto, S. Kamio, K. Kamiya, O. Kaneko, R. Kanno, H. Kasahara, D. Kato, T. Kato, K. Kawahata, G. Kawamura, M. Kisaki, S. Kitajima, W. H. Ko, M. Kobayashi, S. Kobayashi, T. Kobayashi, K. Koga, A. Kohyama, R. Kumazawa, J. H. Lee, D. Lopez-Bruna, R. Makino, S. Masuzaki, Y. Matsumoto, H. Matsuura, O. Mitarai, H. Miura, J. Miyazawa, N. Mizuguchi, C. Moon, S. Morita, T. Moritaka, K. Mukai, T. Muroga, S. Muto, T. Mutoh, T. Nagasaka, Y. Nagayama, N. Nakajima, Y. Nakamura, H. Nakanishi, H. Nakano, M. Nakata, Y. Narushima, D. Nishijima, A. Nishimura, S. Nishimura, T. Nishitani, M. Nishiura, Y. Nobuta, H. Noto, M. Nunami, T. Obana, K. Ogawa, S. Ohdachi, M. Ohno, N. Ohno, H. Ohtani, M. Okamoto, Y. Oya, T. Ozaki, B. J. Peterson, M. Preynas, S. Sagara, K. Saito, H. Sakaue, A. Sanpei, S. Satake, M. Sato, T. Saze, O. Schmitz, R. Seki, T. Seki, I. Sharov, A. Shimizu, M. Shiratani, M. Shoji, C. Skinner, R. Soga, T. Stange, C. Suzuki, Y. Suzuki, S. Takada, K. Takahata, A. Takayama, S. Takayama, Y. Takemura, Y. Takeuchi, H. Tamura, N. Tamura, H. Tanaka, K. Tanaka, M. Tanaka, T. Tanaka, Y. Tanaka, S. Toda, Y. Todo, K. Toi, M. Toida, M. Tokitani, T. Tokuzawa, H. Tsuchiya, T. Tsujimura, K. Tsumori, S. Usami, J. L. Velasco, H. Wang, T. -H. Watanabe, T. Watanabe, J. Yagi, M. Yajima, H. Yamada, I. Yamada, O. Yamagishi, N. Yamaguchi, Y. Yamamoto, N. Yanagi, R. Yasuhara, E. Yatsuka, N. Yoshida, M. Yoshinuma, S. Yoshimura, Y. Yoshimura

NUCLEAR FUSION   57 ( 10 )   2017.10

Impact of an ionic liquid on protein thermodynamics in the presence of cold atmospheric plasma and gamma rays

Pankaj Attri, Minsup Kim, Eun Ha Choi, Art E. Cho, Kazunori Koga, Masaharu Shiratani

PHYSICAL CHEMISTRY CHEMICAL PHYSICS   19 ( 37 )   25277 - 25288   2017.10

Performance enhancement of quantum dot-sensitized solar cells based on polymer nano-composite catalyst

Hyunwoong Seo, Chandu V. V. M. Gopi, Hee-Je Kim, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ELECTROCHIMICA ACTA   249   337 - 342   2017.9

The protective action of osmolytes on the deleterious effects of gamma rays and atmospheric pressure plasma on protein conformational changes

Pankaj Attri, Minsup Kim, Thapanut Sarinont, Eun Ha Choi, Hyunwoong Seo, Art E. Cho, Kazunori Koga, Masaharu Shiratani

SCIENTIFIC REPORTS   7   2017.8

低温プラズマによるナノ粒子の合成と太陽電池への応用 (有機エレクトロニクス)

古閑 一憲, 徐 鉉雄, 板垣 奈穂, 白谷 正治

電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   117 ( 8 )   5 - 8   2017.4

Densities and Surface Reaction Probabilities of Oxygen and Nitrogen Atoms During Sputter Deposition of ZnInON on ZnO

Koichi Matsushima, Tomoaki Ide, Keigo Takeda, Masaru Hori, Daisuke Yamashita, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

IEEE TRANSACTIONS ON PLASMA SCIENCE   45 ( 2 )   323 - 327   2017.3

Influence of plasma irradiation on silkworm

Akira Yonesu, Kazunori Koga, Masaharu Shiratani, Nobuya Hayashi

Plasma Medicine   7   313 - 320   2017.1

ホッとひといき プラズマのほどよい刺激で植物がスクスク育つ

古閑 一憲

応用物理   86 ( 1 )   55 - 58   2017.1

Effects of nonthermal plasma jet irradiation on the selective production of H2O2 and NO2- in liquid water

Giichiro Uchida, Atsushi Nakajima, Taiki Ito, Kosuke Takenaka, Toshiyuki Kawasaki, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

JOURNAL OF APPLIED PHYSICS   120 ( 20 )   2016.11

Optical Bandgap Energy of Si Nanoparticle Composite Films Deposited by a Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method

Susumu Toko, Yoshinori Kanemitsu, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY   16 ( 10 )   10753 - 10757   2016.10

Effects of plasma irradiation using various feeding gases on growth of Raphanus sativus L.

Thapanut Sarinont, Takaaki Amano, Pankaj Attri, Kazunori Koga, Nobuya Hayashi, Masaharu Shiratani

ARCHIVES OF BIOCHEMISTRY AND BIOPHYSICS   605   129 - 140   2016.9

Surface Modification of Polymer Counter Electrode for Low Cost Dye-sensitized Solar Cells

Hyunwoong Seo, Min-Kyu Son, Shinji Hashimoto, Toshiyuki Takasaki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ELECTROCHIMICA ACTA   210   880 - 887   2016.8

Effect of Sulfur Doped TiO2 on Photovoltaic Properties of Dye-Sensitized Solar Cells

Hyunwoong Seo, Sang-Hun Nam, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Jin-Hyo Boo

ELECTRONIC MATERIALS LETTERS   12 ( 4 )   530 - 536   2016.7

Two-dimensional concentration distribution of reactive oxygen species transported through a tissue phantom by atmospheric-pressure plasma-jet irradiation

Toshiyuki Kawasaki, Akihiro Sato, Shota Kusumegi, Akihiro Kudo, Tomohiro Sakanoshita, Takuya Tsurumaru, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani

APPLIED PHYSICS EXPRESS   9 ( 7 )   2016.7

Correlation between SiH2/SiH and light-induced degradation of p-i-n hydrogenated amorphous silicon solar cells Reviewed

Kimitaka Keya, Takashi Kojima, Yoshihiro Torigoe, Susumu Toko, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   55 ( 7 )   2016.7

Correlation between SiH

Keya Kimitaka, Kojima Takashi, Torigoe Yoshihiro, Toko Susumu, Yamashita Daisuke, Seo Hyunwoong, Itagaki Naho, Koga Kazunori, Shiratani Masaharu

Jpn. J. Appl. Phys.   55 ( 7 )   07LE03   2016.6

Improvement of Charge Transportation in Si Quantum Dot-Sensitized Solar Cells Using Vanadium Doped TiO2

Hyunwoong Seo, Daiki Ichida, Shinji Hashimoto, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Sang-Hun Nam, Jin-Hyo Boo

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY   16 ( 5 )   4875 - 4879   2016.5

Effects of irradiation distance on supply of reactive oxygen species to the bottom of a Petri dish filled with liquid by an atmospheric O-2/He plasma jet

Toshiyuki Kawasaki, Shota Kusumegi, Akihiro Kudo, Tomohiro Sakanoshita, Takuya Tsurumaru, Akihiro Sato, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani

JOURNAL OF APPLIED PHYSICS   119 ( 17 )   2016.5

Polymer counter electrode of poly(3,4-ethylenedioxythiophene):Poly(4-styrenesulfonate) containing TiO2 nano-particles for dye-sensitized solar cells

Hyunwoong Seo, Min-Kyu Son, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JOURNAL OF POWER SOURCES   307   25 - 30   2016.3

Quantum Characterization of Si Nano-Particles Fabricated by Multi-Hollow Discharge Plasma Chemical Vapor Deposition

Hyunwoong Seo, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

SCIENCE OF ADVANCED MATERIALS   8 ( 3 )   636 - 639   2016.3

Effects of gas flow rate on deposition rate and number of Si clusters incorporated into a-Si:H films

Susumu Toko, Yoshihiro Torigoe, Kimitaka Keya, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   55 ( 1 )   2016.1

Simple method of improving harvest by nonthermal air plasma irradiation of seeds of Arabidopsis thaliana (L.)

Kazunori Koga, Sarinont Thapanut, Takaaki Amano, Hyunwoong Seo, Naho Itagaki, Nobuya Hayashi, Masaharu Shiratani

APPLIED PHYSICS EXPRESS   9 ( 1 )   2016.1

Effects of deposition rate and ion bombardment on properties of a-C:H films deposited by H-assisted plasma CVD method

Xiao Dong, Kazunori Koga, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Masaharu Shiratani, Yuichi Setsuhara, Makoto Sekine, Masaru Hori

JAPANESE JOURNAL OF APPLIED PHYSICS   55 ( 1 )   2016.1

Influence of ionic liquid and ionic salt on protein against the reactive species generated using dielectric barrier discharge plasma

Pankaj Attri, Thapanut Sarinont, Minsup Kim, Takaaki Amano, Kazunori Koga, Art E. Cho, Eun Ha Choi, Masaharu Shiratani

SCIENTIFIC REPORTS   5   2015.12

Gas Flow Rate Dependence of the Discharge Characteristics of a Plasma Jet Impinging Onto the Liquid Surface

Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

IEEE TRANSACTIONS ON PLASMA SCIENCE   43 ( 12 )   4081 - 4087   2015.12

Synthesis of Indium-Containing Nanoparticles in Aqueous Suspension Using Plasmas in Water for Evaluating Their Kinetics in Living Body

Takaaki Amano, Thapanut Sarinont, Kazunori Koga, Miyuki Hirata, Akiyo Tanaka, Masaharu Shiratani

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY   15 ( 11 )   9298 - 9302   2015.11

Structural alternation of tandem dye-sensitized solar cells based on mesh-type of counter electrode

Hyunwoong Seo, Shinji Hashimoto, Daiki Ichida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ELECTROCHIMICA ACTA   179   206 - 210   2015.10

Synthesis of indium-containing nanoparticles using plasmas in water to study their effects on living body Reviewed

T. Amano, K. Koga, T. Sarinont, H. Seo, N. Itagaki, M. Shiratani, S. Kitazaki, M. Hirata, Y. Nakatsu, A. Tanaka

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.158   2015.9

Attraction during binary collision of fine particles in Ar plasma Reviewed

M. Soejima, T. Ito, D. Yamashita, N. Itagaki, H. Seo, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   GT1.018   2015.9

Cluster Incorporation into A-Si:H Films Deposited Using H 2 +SiH 4 Discharge Plasmas Reviewed

S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   GT1.152   2015.9

Cross correlation analysis of plasma perturbation in amplitude modulated reactive dusty plasmas Reviewed

T. Ito, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani, T. Kobayashi, S. Inagaki

Proc. 68th GEC/9th ICRP/33rd SPP609   GT1.049   2015.9

Deposition rate and etching rate due to neutral radicals and dust particles measured using QCMs together with a dust eliminating filter Reviewed

R. Katayama, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, M. Tokitani, S. Masuzaki, K. Nishimura, A. Sagara, LHD Experimental Group

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.101   2015.9

Effects of electrode structure on characteristics of multi-hollow discharges Reviewed

Y. Torigoe, K. Keya, S. Toko, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.129   2015.9

Effects of N2 dilution on fabrication of Ge nanoparticles by rf sputtering Reviewed

S. Hashimoto, S. Tanami, H. Seo, G. Uchida, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.133   2015.9

Laser trapped single fine particle as a probe of plasma parameters” Reviewed

LW1.104   2015.9

Raman spectroscopy of PIN hydrogenated amorphous silicon solar cells Reviewed

K. Keya, Y. Torigoe, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.132   2015.9

Simple Evaluation Method of Atmospheric Plasma Irradiation Dose using pH of Water Reviewed

K. Koga, T. Sarinont, T. Amano, H. Seo, N. Itagaki, Y. Nakatsu, A. Tanaka, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.143   2015.9

Substrate temperature dependence of Au-induced crystalline Ge film formation using sputtering deposition Reviewed

S. Tanami, D. Ichida, D. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   GT1.149   2015.9

Real-time mass measurement of dust particles deposited on vessel wall in a divertor simulator using quartz crystal microbalances

Mizuki Tateishi, Kazunori Koga, Ryu Katayama, Daisuke Yamashita, Kunihiro Kamataki, Hyunwoong Seo, Naho Itagaki, Masaharu Shiratani, Naoko Ashikawa, Suguru Masuzaki, Kiyohiko Nishimura, Akio Sagara

JOURNAL OF NUCLEAR MATERIALS   463   865 - 868   2015.8

Fabrication of ZnInON/ZnO multi-quantum well solar cells

Koichi Matsushima, Ryota Shimizu, Tomoaki Ide, Daisuke Yamashita, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

THIN SOLID FILMS   587   106 - 111   2015.7

Effects of gas flow on oxidation reaction in liquid induced by He/O-2 plasma-jet irradiation

Atsushi Nakajima, Giichiro Uchida, Toshiyuki Kawasaki, Kazunori Koga, Thapanut Sarinont, Takaaki Amano, Kosuke Takenaka, Masaharu Shiratani, Yuichi Setsuhara

JOURNAL OF APPLIED PHYSICS   118 ( 4 )   2015.7

Effects of cluster incorporation into hydrogenated amorphous silicon films in initial discharge phase on film stability

Susumu Toko, Yoshihiro Torigoe, Weiting Chen, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   587   126 - 131   2015.7

Effects of discharge voltage on the characteristics of a-C:H films prepared by H-assisted Plasma CVD method Reviewed

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Trans. Mater. Res. Soc. Jpn.   40 ( 2 )   123-128 - 128   2015.7

Deposition of Carbon Films on PMMA Using H-assisted Plasma CVD Reviewed

X. Dong, R. Torigoe, K. Koga, G. Uchida, M. Shiratani, N. Itagaki, Y. Setsuhara, K. Takenaka, M. Sekine, M. Hori

Jpn. Phys. Soc. Conf. Proc (APPC12)   1   015072   2015.3

Photovoltaic application of Si nanoparticles fabricated by multihollow plasma discharge CVD: Dye and Si co-sensitized solar cells

Hyunwoong Seo, Daiki Ichida, Shinji Hashimoto, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   54 ( 1 )   2015.1

Dust Hour Glass in a Capacitive RF Discharge

Shinya Iwashita, Edmund Schuengel, Julian Schulze, Peter Hartmann, Zoltan Donko, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Uwe Czarnetzki

IEEE TRANSACTIONS ON PLASMA SCIENCE   42 ( 10 )   2672 - 2673   2014.10

Visualization of the Distribution of Oxidizing Substances in an Atmospheric Pressure Plasma Jet

Toshiyuki Kawasaki, Kota Kawano, Hiroshi Mizoguchi, Yuto Yano, Keisuke Yamashita, Miho Sakai, Takako Shimizu, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani

IEEE TRANSACTIONS ON PLASMA SCIENCE   42 ( 10 )   2482 - 2483   2014.10

Synthesis and characterization of ZnInON semiconductor: a ZnO-based compound with tunable band gap

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

MATERIALS RESEARCH EXPRESS   1 ( 3 )   2014.9

Off-axis sputter deposition of ZnO films on c-sapphire substrates by utilizing nitrogen-mediated crystallization method Reviewed

Naho Itagaki, Kazunari Kuwahara, Koichi Matsushima, Daisuke Yamashita, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani

OPTICAL ENGINEERING   53 ( 8 )   87109   2014.8

Plasma induced long-term growth enhancement of Raphanus sativus L. using combinatorial atmospheric air dielectric barrier discharge plasmas

Satoshi Kitazaki, Thapanut Sarinont, Kazunori Koga, Nobuya Hayashi, Masaharu Shiratani

CURRENT APPLIED PHYSICS   14   S149 - S153   2014.7

Performance dependence of Si quantum dot-sensitized solar cells on counter electrode

Hyunwoong Seo, Daiki Ichida, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 5 )   2014.5

Electrochemical impedance analysis on the additional layers for the enhancement on the performance of dye-sensitized solar cell

Hyunwoong Seo, Min-Kyu Son, Songyi Park, Myeongsoo Jeong, Hee-Je Kim, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   554   122 - 126   2014.3

Analysis on the Photovoltaic Property of Si Quantum Dot-Sensitized Solar Cells

Hyunwoong Seo, Daiki Ichida, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING   15 ( 2 )   339 - 343   2014.2

Performance enhancement of dye and Si quantum dot hybrid nanostructured solar cell with TiO2 barrier Reviewed

H. Seo, D. Ichida, S. Hashimoto, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Trans. Mater. Res. Soc. Jpn.   39 ( 3 )   321 - 324   2014.1

Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas

Masaharu Shiratani, Kazunori Koga, Kunihiro Kamataki, Shinya Iwashita, Giichiro Uchida, Hyunwoong Seo, Naho Itagaki

JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 1 )   2014.1

A model for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas Reviewed

M. Shiratani, K. Koga, K. Kamataki, S. Iwashita, Y. Morita, H. Seo, N. Itagaki, G. Uchida

Proc. 8th Int. Conf. Reactive Plasmas   4B-PM-O1   2014.1

Analysis of fluctuation of Ar metastable density and nanoparticle amount in capacitively coupled discharges with amplitude modulation Reviewed

Y. Morita, T. Ito, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   5P-AM-S02-P1   2014.1

Combinatorial evaluation of optical properties of crystalline Si nanoparticle embedded Si films deposited by a multi-hollow discharge plasma CVD method Reviewed

Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   6P-AM-S08-P35   2014.1

Coupling between radicals and nanoparticles in initial growth phase in reactive plasmas with amplitude modulation Reviewed

K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   3B-WS-14   2014.1

Deposition of Crystalline Ge Nanoparticle Films Varying H2 Dilution Ratio Using High Pressure rf Magnetron Sputtering Reviewed

S. Hashimoto, D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   6P-AM-S08-P32   2014.1

Effects of amplitude modulation on deposition of hydrogenated amorphous silicon films using multi-Hollow discharge plasma CVD method Reviewed

Y. Torigoe, Y. Hashimoto, S. Toko, Y. Kim, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   6P-AM-S08-P36   2014.1

Epitaxial growth of ZnO films on sapphire substrates by magnetron sputtering: Effects of buffer layers prepared via nitrogen mediated crystallization Reviewed

T. Ide, K. Matsushima, R. Shimizu, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   4P-PM-S08-P10   2014.1

Fabrication of In-rich ZnInON filmswith narrow band gap by RF magnetron sputtering Reviewed

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   5P-PM-S08-P02   2014.1

Fabrication of SiC nanoparticles as high capacity electrodes for Li-ion batteries Reviewed

G. Uchida, K. Kamataki, D. Ichida, Y. Morita, H. Seo, N. Itagaki, K. Koga, T. Ishihara, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   4C-PM-O1   2014.1

Fabrication of size-controlled Ge nanoparticle films varying gas flow rate using high pressure rf magnetron sputtering method Reviewed

D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   6P-AM-S08-P33   2014.1

Fine response of deposition rate of Si films deposited by multi-hollow discharge plasma CVD with amplitude modulation Reviewed

S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   5P-AM-S05-P17   2014.1

Magnetron sputtering of low-resistive In2O3:Sn films with buffer layers fabricated via nitrogen mediated crystallization Reviewed

K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   5P-PM-S08-P07   2014.1

Nanoparticle amount in reactive plasmas with amplitude modulation detected by twodimensional laser light scattering method Reviewed

T. Ito, Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   5P-AM-SPD-P01   2014.1

Raman spectroscopy of a fine particle optically trapped in plasma”, Proc. 8th Int. Conf. Reactive Plasmas Reviewed

5P-AM-S05-P23   2014.1

Spatial profile of flux of dust particles in hydrogen helicon plasmas”, Proc. 8th Int. Conf. Reactive Plasmas Reviewed

5P-AM-S05-P21   2014.1

Sputter Deposition of Ga-doped Zinc Oxide (GZO) Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization Reviewed

T. Nakanishi, K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   5P-AM-S05-P19   2014.1

Sputtering fabrication of a novel widegap semiconductor ZnGaON for optoelectronic devices with wide bandgap for optical device Reviewed

R. Shimizu, K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   5P-PM-S08-P03   2014.1

Study on nitrogen desorption behavior of sputtered ZnO for transparent conducting oxide Reviewed

I. Suhariadi, K. Oshikawa, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   5P-PM-S08-P05   2014.1

Subacute toxicity of gallium arsenide, indium arsenide and arsenic trioxide following intermittent intrantracheal instillations to the lung of rats Reviewed

A. Tanaka, M. Hirata, K. Koga, N. Itagaki, M. Shiratani, N. Hayashi, G. Uchida

Proc. 8th Int. Conf. Reactive Plasmas   5P-AM-S2-P35   2014.1

Substrate temperature dependence of hydrogen content of a-Si:H film deposited with a cluster-eliminating filter Reviewed

Y. Hashimoto, S. Toko, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   6P-AM-S08-P37   2014.1

Combinatorial Plasma CVD of Si Nanoparticle Composite Films for Band Gap Control Reviewed

G. Uchida, Y. Kanemitsu, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

JPS Conf. Proc   1   15080   2014.1

Correlation between nanoparticle growth and plasma parameters in low pressure reactive VHF discharge plasmas Reviewed

M. Shiratani, Y. Morita, K. Kamataki, H. Seo, G. Uchida, N. Itagaki, K. Koga

JPS Conf. Proc   1   15083   2014.1

Effects of Grid DC Bias on Incorporation of Si Clusters into Amorphous Silicon Thin Films in Multi-Hollow Discharge Plasma CVD Reviewed

S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

JPS Conf. Proc   1   15069   2014.1

Effects of H2 Gas Addition on Structure of Ge Nanoparticle Films Deposited by High-pressure RF Magnetron Sputtering Method Reviewed

G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

JPS Conf. Proc   1   15082   2014.1

Spatial Profile of Flux of Dust Particles Generated due to Interaction between Hydrogen Plasmas and Graphite Target Reviewed

M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

JPS Conf. Proc   1   15020   2014.1

Study on the Crystal Growth Mechanism of ZnO Films Fabricated Via Nitrogen Mediated Crystallization Reviewed

I. Suhariadi, K. Oshikawa, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

JPS Conf. Proc   1   15064   2014.1

Nanostructure control of Si and Ge quantum dots based solar cells using plasma processes

Masaharu Shiratani, Giichiro Uchida, Hyun Woong Seo, Daiki Ichida, Kazunori Koga, Naho Itagaki, Kunihiro Kamataki

Materials Science Forum   783-786   2022 - 2027   2014.1

スパッタリング成膜法による高品質酸化亜鉛薄膜の形成 Invited Reviewed

板垣奈穂, 古閑一憲, 白谷正治

応用物理   83   385 - 389   2014.1

The improvement on the performance of quantum dot-sensitized solar cells with functionalized Si

Hyunwoong Seo, Yuting Wang, Muneharu Sato, Giichiro Uchida, Kazunori Koga, Naho Itagaki, Kunihiro Kamataki, Masaharu Shiratani

THIN SOLID FILMS   546   284 - 288   2013.11

Characteristics of Crystalline Silicon/Si Quantum Dot/Poly(3,4-ethylenedioxythiophene) Hybrid Solar Cells

Giichiro Uchida, Yuting Wang, Daiki Ichida, Hyunwoong Seo, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 11 )   2013.11

Correlation between Volume Fraction of Silicon Clusters in Amorphous Silicon Films and Optical Emission Properties of Si* and SiH*

Yeonwon Kim, Kosuke Hatozaki, Yuji Hashimoto, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 11 )   2013.11

Effects of Nitrogen on Crystal Growth of Sputter-Deposited ZnO Films for Transparent Conducting Oxide

Iping Suhariadi, Kouichiro Oshikawa, Kazunari Kuwahara, Kouichi Matsushima, Daisuke Yamashita, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 11 )   2013.11

Epitaxial Growth of ZnInON Films with Tunable Band Gap from 1.7 to 3.3 eV on ZnO Templates

Koichi Matsushima, Tadafumi Hirose, Kazunari Kuwahara, Daisuke Yamashita, Giichiro Uchida, Hyunwoong Seo, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 11 )   2013.11

Flux Control of Carbon Nanoparticles Generated due to Interactions between Hydrogen Plasmas and Graphite Using DC-Biased Substrates

Kazunori Koga, Mizuki Tateishi, Katsushi Nishiyama, Giichiro Uchida, Kunihiro Kamataki, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Masaharu Shiratani, Naoko Ashikawa, Suguru Masuzaki, Kiyohiko Nishimura, Akio Sagara

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 11 )   2013.11

Improvement on the electron transfer of dye-sensitized solar cell using vanadium doped TiO2

Hyunwoong Seo, Yuting Wang, Daiki Ichida, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Sang-Hun Nam, Jin-Hyo Boo

Japanese Journal of Applied Physics   52 ( 11 )   2013.11

Study on the Fabrication of Paint-Type Si Quantum Dot-Sensitized Solar Cells

Hyunwoong Seo, Min-Kyu Son, Hee-Je Kim, Yuting Wang, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 10 )   2013.10

Extension of operation regimes and investigation of three-dimensional currentless plasmas in the Large Helical Device

O. Kaneko, H. Yamada, S. Inagaki, M. Jakubowski, S. Kajita, S. Kitajima, Kobayashi, K. Koga, T. Morisaki, S. Morita, T. Mutoh, S. Sakakibara, Y. Suzuki, H. Takahashi, K. Tanaka, K. Toi, Y. Yoshimura, T. Akiyama, Y. Asahi, N. Ashikawa, H. Chikaraishi, A. Cooper, D. S. Darrow, E. Drapiko, P. Drewelow, X. Du, A. Ejiri, M. Emoto, T. Evans, N. Ezumi, K. Fujii, T. Fukuda, H. Funaba, M. Furukawa, D. A. Gates, M. Goto, T. Goto, W. Guttenfelder, S. Hamaguchi, M. Hasuo, T. Hino, Y. Hirooka, K. Ichiguchi, K. Ida, H. Idei, T. Ido, H. Igami, K. Ikeda, S. Imagawa, T. Imai, M. Isobe, M. Itagaki, T. Ito, K. Itoh, S. Itoh, A. Iwamoto, K. Kamiya, T. Kariya, H. Kasahara, N. Kasuya, D. Kato, T. Kato, K. Kawahata, F. Koike, S. Kubo, R. Kumazawa, D. Kuwahara, S. Lazerson, H. Lee, S. Masuzaki, S. Matsuoka, H. Matsuura, A. Matsuyama, C. Michael, D. Mikkelsen, O. Mitarai, T. Mito, J. Miyazawa, G. Motojima, K. Mukai, A. Murakami, I. Murakami, S. Murakami, T. Muroga, S. Muto, K. Nagaoka, K. Nagasaki, Y. Nagayama, N. Nakajima, H. Nakamura, Y. Nakamura, H. Nakanishi, H. Nakano, T. Nakano, K. Narihara, Y. Narushima, K. Nishimura, S. Nishimura, M. Nishiura, Y. M. Nunami, T. Obana, K. Ogawa, S. Ohdachi, N. Ohno, N. Ohyabu, T. Oishi, M. Okamoto, A. Okamoto, M. Osakabe, Y. Oya, T. Ozaki, N. Pablant, B. J. Peterson, A. Sagara, K. Saito, R. Sakamoto, H. Sakaue, M. Sasao, K. Sato, M. Sato, K. Sawada, R. Seki, T. Seki, V. Sergeev, S. Sharapov, I. Sharov, A. Shimizu, T. Shimozuma, M. Shiratani, M. Shoji, S. Sudo, H. Sugama, C. Suzuki, K. Takahata, Y. Takeiri, Y. Takemura, M. Takeuchi, H. Tamura, N. Tamura, H. Tanaka, T. Tanaka, M. Tingfeng, Y. Todo, M. Tokitani, K. Tokunaga, T. Tokuzawa, H. Tsuchiya, K. Tsumori, Y. Ueda, L. Vyacheslavov, K. Y. Watanabe, T. Watanabe, T. H. Watanabe, B. Wieland, I. Yamada, S. Yamada, S. Yamamoto, N. Yanagi, R. Yasuhara, M. Yokoyama, N. Yoshida, S. Yoshimura, T. Yoshinaga, M. Yoshinuma, A. Komori

NUCLEAR FUSION   53 ( 10 )   2013.10

Characteristics of photocurrent generation in the near-ultraviolet region in Si quantum-dot sensitized solar cells

Giichiro Uchida, Muneharu Sato, Hyunwoong Seo, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   544   93 - 98   2013.10

Crystallinity control of sputtered ZnO films by utilizing buffer layers fabricated via nitrogen mediated crystallization: Effects of nitrogen flow rate

N. Itagaki, K. Oshikawa, K. Matsushima, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

Proc. 13th International Conference on Plasma Surface Engineering   26   84 - 87   2013.9

クラスタ抑制法を用いた高光安定アモルファスシリコンPIN太陽電池の作製

古閑 一憲, 橋本 優史, 金 淵元, 都甲 将, 徐 鉉雄, 板垣 奈穗, 白谷 正治, 内田 儀一郎

電気学会研究会資料. PST, プラズマ研究会   2013 ( 74 )   13 - 17   2013.9

Control of Deposition Profile and Properties of Plasma CVD Carbon Films

K. Koga, T. Urakawa, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani

Proc. 13th International Conference on Plasma Surface Engineering   26   136 - 139   2013.9

Effects of nanoparticle incorporation on properties of microcrystalline films deposited using multi-hollow discharge plasma CVD

Yeonwon Kim, Takeaki Matsunaga, Kenta Nakahara, Hyunwoong Seo, Kunihiro Kamataki, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

SURFACE & COATINGS TECHNOLOGY   228   S550 - S553   2013.8

Observation of nanoparticle growth process using a high speed camera Reviewed

Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proceedings of 21st International Symposium on Plasma Chemistry   264   2013.8

Mass density control of carbon films deposited by H-assisted plasma CVD method

Tatsuya Urakawa, Hidehumi Matsuzaki, Daisuke Yamashita, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara, Makoto Sekine, Masaru Hori

SURFACE & COATINGS TECHNOLOGY   228   S15 - S18   2013.8

Effects of DC substrate bias voltage on dust flux in the Large Helical Device

Kazunori Koga, Katsushi Nishiyama, Yasuhiko Morita, Giichiro Uchida, Daisuke Yamashita, Kunihiro Kamataki, Hyunwoong Seo, Naho Itagaki, Masaharu Shiratani, Naoko Ashikawa, Suguru Masuzaki, Kiyohiko Nishimura, Akio Sagara

JOURNAL OF NUCLEAR MATERIALS   438   S727 - S730   2013.7

Discharge power dependence of carbon dust flux in a divertor simulator

Katsushi Nishiyama, Yasuhiko Morita, Giichiro Uchida, Daisuke Yamashita, Kunihiro Kamataki, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoko Ashikawa, Suguru Masuzaki, Kiyohiko Nishimura, Akio Sagara, Sven Bornholdt, Holger Kersten

JOURNAL OF NUCLEAR MATERIALS   438   S788 - S791   2013.7

Transport control of dust particles via the electrical asymmetry effect: experiment, simulation and modelling

Shinya Iwashita, Edmund Schuengel, Julian Schulze, Peter Hartmann, Zoltan Donko, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Uwe Czarnetzki

JOURNAL OF PHYSICS D-APPLIED PHYSICS   46 ( 24 )   2013.6

Analysis on the effect of polysulfide electrolyte composition for higher performance of Si quantum dot-sensitized solar cells

Hyunwoong Seo, Yuting Wang, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ELECTROCHIMICA ACTA   95   43 - 47   2013.4

ナノ材料のプラズマプロセシングの研究の現状と将来 Invited Reviewed

白谷 正治, 古閑 一憲, 内田 儀一郎, Hyunwoong SEO, 板垣 奈穂, 岩下 伸也

表面科学   34 ( 10 )   520 - 527   2013.1

H-2/N-2 Plasma Etching Rate of Carbon Films Deposited by H-Assisted Plasma Chemical Vapor Deposition

Tatsuya Urakawa, Ryuhei Torigoe, Hidefumi Matsuzaki, Daisuke Yamashita, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara, Keigo Takeda, Makoto Sekine, Masaru Hori

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 1 )   2013.1

Dust particle formation due to interaction between graphite and helicon deuterium plasmas

Shinya Iwashita, Katsushi Nishiyama, Giichiro Uchida, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

FUSION ENGINEERING AND DESIGN   88 ( 1 )   28 - 32   2013.1

Effects of Hydrogen Dilution on ZnO Thin Films Fabricated via Nitrogen-Mediated Crystallization

Iping Suhariadi, Koichi Matsushima, Kazunori Kuwahara, Koichi Oshikawa, Daisuke Yamashita, Hyunwoong Seo, Giichiro Uchida, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Sven Bornholdt, Holger Kersten, Harm Wulff, Naho Itagaki

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 1 )   2013.1

High Amount Cluster Incorporation in Initial Si Film Deposition by SiH4 Plasma Chemical Vapor Deposition

Yeonwon Kim, Kosuke Hatozaki, Yuji Hashimoto, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 1 )   2013.1

Improvement of Si Adhesion and Reduction of Electron Recombination for Si Quantum Dot-Sensitized Solar Cells

Hyunwoong Seo, Yuting Wang, Muneharu Sato, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 1 )   2013.1

The reduction of charge recombination and performance enhancement by the surface modification of Si quantum dot-sensitized solar cell

Hyunwoong Seo, Yuting Wang, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ELECTROCHIMICA ACTA   87   213 - 217   2013.1

Sputter deposition of Epitaxial Zinc-Indium Oxynitride Films for Excitonic Transistors Reviewed

N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

Proc. International Symposium on Dry Process   34   97 - 98   2012.11

Growth Control of Dry Yeast Using Scalable Atmospheric-Pressure Dielectric Barrier Discharge Plasma Irradiation

Satoshi Kitazaki, Kazunori Koga, Masaharu Shiratani, Nobuya Hayashi

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 11 )   2012.11

Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Kunihiro Kamataki, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Daisuke Yamashita, Hidefumi Matsuzaki, Masaharu Shiratani

THIN SOLID FILMS   523   76 - 79   2012.11

Effects of crystalline nanoparticle incorporation on growth, structure, and properties of microcrystalline silicon films deposited by plasma chemical vapor deposition

Yeonwon Kim, Takeaki Matsunaga, Kenta Nakahara, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   523   29 - 33   2012.11

High quality epitaxial ZnO films grown on solid-phase crystallized buffer layers

Kazunari Kuwahara, Naho Itagaki, Kenta Nakahara, Daisuke Yamashita, Giichiro Uchida, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   520 ( 14 )   4674 - 4677   2012.5

In situ analysis of size distribution of nano-particles in reactive plasmas using two dimensional laser light scattering method

K. Kamataki, Y. Morita, M. Shiratani, K. Koga, G. Uchida, N. Itagaki

JOURNAL OF INSTRUMENTATION   7   2012.4

ZnO:Al Thin Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization: Effects of N2/Ar Gas Flow Rate Ratio Reviewed

I. Suhariadi, N. Itagaki, K. Kuwahara, K. Oshikawa, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, K. Nakahara, M. Shiratani

Trans. Mater. Res. Soc. Jpn.   37 ( 2 )   165 - 168   2012.1

Pulmonary Toxicity of Indium Tin Oxide and Copper Indium Gallium Diselenide

Akiyo Tanaka, Miyuki Hirata, Kazunori Koga, Makiko Nakano, Kazuyuki Omae, Yutaka Kiyohara

MRS Proceedings   1469   2012.1

Growth Enhancement of Radish Sprouts Induced by Low Pressure O-2 Radio Frequency Discharge Plasma Irradiation

Satoshi Kitazaki, Kazunori Koga, Masaharu Shiratani, Nobuya Hayashi

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 1 )   2012.1

Combinatorial Deposition of Microcrystalline Silicon Films Using Multihollow Discharge Plasma Chemical Vapor Deposition

Kazunori Koga, Takeaki Matsunaga, Yeonwon Kim, Kenta Nakahara, Daisuke Yamashita, Hidefumi Matsuzaki, Kunihiro Kamataki, Giichiro Uchida, Naho Itagaki, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 1 )   2012.1

Deposition of Cluster-Free B-doped Hydrogenated Amorphous Silicon Films Using SiH4+B10H14 Multi-Hollow Discharge Plasma Chemical Vapor Deposition

Kazunori Koga, Kenta Nakahara, Yeon-Won Kim, Takeaki Matsunaga, Daisuke Yamashita, Hidefumi Matsuzaki, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 1 )   2012.1

Effect of Nitridation of Si Nanoparticles on the Performance of Quantum-Dot Sensitized Solar Cells

Giichiro Uchida, Kosuke Yamamoto, Muneharu Sato, Yuki Kawashima, Kenta Nakahara, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 1 )   2012.1

Impacts of Amplitude Modulation of RF Discharge Voltage on the Growth of Nanoparticles in Reactive Plasmas

Kunihiro Kamataki, Hiroshi Miyata, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Masaharu Shiratani

APPLIED PHYSICS EXPRESS   4 ( 10 )   2011.10

Comparison between silicon thin films with and without incorporating crystalline silicon nanoparticles into the film

Kazunori Koga, Takeaki Matsunaga, William Makoto Nakamura, Kenta Nakahara, Yuuki Kawashima, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani

THIN SOLID FILMS   519 ( 20 )   6896 - 6898   2011.8

Redox Characteristics of Thiol Compounds Using Radicals Produced by Water Vapor Radio Frequency Discharge

Nobuya Hayashi, Akari Nakahigashi, Masaaki Goto, Satoshi Kitazaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 8 )   2011.8

Nano-factories in plasma: present status and outlook

Masaharu Shiratani, Kazunori Koga, Shinya Iwashita, Giichiro Uchida, Naho Itagaki, Kunihiro Kamataki

JOURNAL OF PHYSICS D-APPLIED PHYSICS   44 ( 17 )   2011.5

Zno films with buffer layers crystallized via nitrogen mediation: Effects of deposition temperature of buffer layers

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

Proc. PVSEC-21   4D-2P-11   2011.1

Highly Conducting and Very Thin ZnO:Al Films with ZnO Buffer Layer Fabricated by Solid Phase Crystallization from Amorphous Phase

Naho Itagaki, Kazunari Kuwahara, Kenta Nakahara, Daisuke Yamashita, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani

APPLIED PHYSICS EXPRESS   4 ( 1 )   2011.1

Combinatorial study of substrate temperature dependence on properties of silicon films deposited using multihollow discharge plasma CVD Reviewed

Y. Kim, T. Matsunaga, Y. Kawashima, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

POL08   2011.1

Impacts of Plasma Fluctuations on Growth of Nano-Particles in Reactive Plasma

K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

D13-318   2011.1

Collection of carbon dust particles formed due to plasma-wall interactions between high density H2 plasma and carbon wall onto substrates by applying local DC bias voltage

K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, H. Kersten

Proc. Plasma Conf. 2011   24P094-O   2011.1

Deposition of cluster-free a-Si:H films using cluster eliminating filter

K. Nakahara, K. Hatozaki, Y. Hashimoto, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   24P010-O   2011.1

Effects of electrolyte on performance of quantum dot-sensitized solar cells using Si nanoparticles synthesized by multi-hollow discharge plasma CVD

Y. Wang, M. Sato, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   23P013-O   2011.1

Effects of N2 gas addition to sputtering plasma on properties of epitaxial ZnO films

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, Seo H, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   24P008-O   2011.1

Effects of nanoparticle incorporation on Si thin films deposited by plasma CVD

M. Shiratani, Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga

Proc. Plasma Conf. 2011   24G06   2011.1

Influence of nano-particles on multi-hollow discharge plasma for microcrystalline silicon thin films deposition

T. Matsunaga, Y. Kim, K. Koga, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Proc. Plasma Conf. 2011   24P015-O   2011.1

Low resistive ZnO:Al films with ZnO buffer layers fabricated by Ar/N2 magnetron sputtering

N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, K. Kamataki, H. Seo, G. Uchida, K. Koga

Proc. Plasma Conf. 2011   24G6   2011.1

Radical Flux Evaluation to Microcrystalline Silicon Films Deposited by Multi-Hollow Discharge Plasma CVD

Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   24P011-O   2011.1

Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD

K. Kamataki, K. Koga, G. Uchida, H. Seo, N. Itagaki, M. Shiratani

Proc. Plasma Conf. 2011   24P014-O   2011.1

Combinatorial study on effects of substatrate temperature of silicon film deposition using multi-hollow discharge plasma cvd

Y. Kim, T. Matsunaga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

Proc. PVSEC-21   3D-2P-09   2011.1

Defect density of cluster-free a-si:h films deposited by multi-hollow discharge plasma CVD

K. Nakahara, K. Hatozaki, M. Sato, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. PVSEC-21   3D-2P-20   2011.1

Effects of nano-particles on (220) crystal orientation of microcrystallite silicon thin films

T. Matsunaga, Y. Kim, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Proc. PVSEC-21   4D-2P-16   2011.1

Properties and performance of si quantum dot-sensitized solar cells with low temperature titania paste

Y. Wang, M. Sato, T. Matsunaga, N. Itagaki, H. Seo, G. Uchida, K. Koga, M. Shiratani

Proc. PVSEC-21   3D-5P-09   2011.1

Zinc oxide-based transparent conducting films with buffer layers fabricated via nitrogen-mediated crystallization

N. Itagaki, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

Proc. PVSEC-21   4D-2P-10   2011.1

High rate deposition of highly stable a-Si:H films using multi-hollow discharges for thin films solar cells

William Makoto Nakamura, Hidefumi Matsuzaki, Hiroshi Sato, Yuuki Kawashima, Kazunori Koga, Masaharu Shiratani

SURFACE & COATINGS TECHNOLOGY   205   S241 - S245   2010.12

低圧プラズマによる酸化還元反応および植物成長への影響

林 信哉, 中東 朱里, 秋吉 雄介, 北崎 訓, 古閑 一憲, 白谷 正治

電気学会研究会資料. PST, プラズマ研究会   2010 ( 65 )   33 - 36   2010.12

High rate deposition of cluster-suppressed amorphous silicon films deposited using a multi-hollow discharge plasma CVD

Kazunori Koga, Hiroshi Sato, Yuuki Kawashima, William M. Nakamura, Masaharu Shiratani

Materials Research Society Symposium Proceedings   1210   217 - 222   2010.12

Deposition of a-Si: H Films with High Stability against Light Exposure by Reducing Deposition of Nanoparticles Formed in SiH4 Discharges

Kazunori Koga, Masaharu Shiratani, Yukio Watanabe

Industrial Plasma Technology: Applications from Environmental to Energy Technologies   247 - 257   2010.10

Nanoblock Assembly Using Pulse RF Discharges with Amplitude Modulation

Shinya Iwashita, Hiroshi Miyata, Kazunori Koga, Masaharu Shiratani

Industrial Plasma Technology: Applications from Environmental to Energy Technologies   377 - 383   2010.10

Deposition profile control of carbon films on patterned substrates using a hydrogen-assisted plasma CVD method

Takuya Nomura, Kazunori Koga, Kazunori Koga, Masaharu Shiratani, Masaharu Shiratani, Yuichi Setsuhara, Yuichi Setsuhara, Makoto Sekine, Makoto Sekine, Masaru Hori, Masaru Hori

Materials Research Society Symposium Proceedings   1222   203 - 207   2010.8

Review of pulmonary toxicity of indium compounds to animals and humans

Akiyo Tanaka, Miyuki Hirata, Yutaka Kiyohara, Makiko Nakano, Kazuyuki Omae, Masaharu Shiratani, Kazunori Koga

THIN SOLID FILMS   518 ( 11 )   2934 - 2936   2010.3

Substrate Temperature Dependence of Sticking Probability of SiOx-CH3 Nano-Particles

H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. of International Symposium on Dry Process   43 - 44   2010.1

Carbon dust particles generated due to H2 plasma-carbon wall interaction Reviewed

H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, G. Uchida, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, LHD experimental group

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   CTP.00114   2010.1

Generation of nitridated silicon particles and their thin film deposition using double multi-hollow discharges Reviewed

G. Uchida, M. Sato, Y. Kawashima, K. Nakahara, K. Yamamoto, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   CTP.00093   2010.1

Optical and Electrical Properties of Particle Composite Thin Films deposited in SiH4/H2 and N2 Multi-Hollow Discharges

G. Uchida, M. Sato, Y. Kawashima, K. Yamamoto, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

Proc. of MNC2010   12D-11-66   2010.1

P-type sp(3)-bonded BN/n-type Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method

Shojiro Komatsu, Yuhei Sato, Daisuke Hirano, Takuya Nakamura, Kazunori Koga, Atsushi Yamamoto, Takahiro Nagata, Toyohiro Chikyo, Takayuki Watanabe, Takeo Takizawa, Katsumitsu Nakamura, Takuya Hashimoto, Masaharu Shiratani

JOURNAL OF PHYSICS D-APPLIED PHYSICS   42 ( 22 )   2009.11

Two-dimensional spatial profile of volume fraction of nanoparticles incorporated into a-Si : H films deposited by plasma CVD

William Makoto Nakamura, Hiroomi Miyahara, Hiroshi Sato, Hidefumi Matsuzaki, Kazunori Koga, Masaharu Shiratani

IEEE TRANSACTIONS ON PLASMA SCIENCE   36 ( 4 )   888 - 889   2008.8

Discharge power dependence of H<inf>α</inf>intensity and electron density of Ar + H<inf>2</inf>discharges in H-assisted plasma CVD reactor

202 ( 22-23 )   5659 - 5662   2008.8

Nanoparticle coagulation in fractionally charged and charge fluctuating dusty plasmas

Shota Nunomura, Masaharu Shiratani, Kazunori Koga, Michio Kondo, Yukio Watanabe

PHYSICS OF PLASMAS   15 ( 8 )   2008.8

Temperature Dependence of Dielectric Constant of Nanoparticle Composite Porous Low-k Films Fabricated by Pulse Radio Frequency Discharge with Amplitude Modulation

Shinya Iwashita, Michihito Morita, Hidefumi Matsuzaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   47 ( 8 )   6875 - 6878   2008.8

Growth Control of Clusters in Reactive Plasmas and Application to High-Stability a-Si: H Film Deposition

Yukio Watanabe, Masaharu Shiratani, Kazunori Koga

Advanced Plasma Technology   227 - 242   2008.4

Transport of nano-particles in capacitively coupled rf discharges without and with amplitude modulation of discharge voltage

Kazunori Koga, Shinya Iwashita, Masaharu Shiratani

JOURNAL OF PHYSICS D-APPLIED PHYSICS   40 ( 8 )   2267 - 2271   2007.4

Single step method to deposit Si quantum dot films using H-2+SiH4VHF discharges and electron mobility in a Si quantum dot solar cell

Masaharu Shiratani, Kazunori Koga, Soichiro Ando, Toshihisa Inoue, Yukio Watanabe, Shota Nunomura, Michio Kondo

SURFACE & COATINGS TECHNOLOGY   201 ( 9-11 )   5468 - 5471   2007.2

A device for trapping nano-particles formed in processing plasmas for reduction of nano-waste

Shinya Iwashita, Kazunori Koga, Masaharu Shiratani

SURFACE & COATINGS TECHNOLOGY   201 ( 9-11 )   5701 - 5704   2007.2

Species responsible for Si-H-2 bond formation in a-Si : H films deposited using silane high frequency discharges

M Shiratani, K Koga, N Kaguchi, K Bando, Y Watanabe

THIN SOLID FILMS   506   17 - 21   2006.5