ISSP2013 Best Poster Award

2013年7月   12th International Symposium on Sputtering & Plasma Processes  

Advanced Plasma Application Award

2012年10月   11th Asia Pacific Conference on Plasma Science adn Technology (APCPST) & 25th Symposium on Plasma Science for Materials (SPSM)  

IUMRS-ICEM2012 "Young Scientist Awards: Silver Award Winners"

2012年9月  

Best Presentation Award

2012年3月   ISPlasma2012  

Invited Presentation Award

2008年6月   Interfinish 2008 World Congress and Exposition  

応用物理学会第3回プラズマエレクトロニクス賞

2005年3月   応用物理学会プラズマエレクトロニクス分科会  

第10回応用物理学会講演奨励賞

2001年5月   応用物理学会  

Possible impact of plasma oxidation on the structure of C-terminal domain of SARS-CoV-2 spike protein: a computational study 査読 国際誌

P. Attri, K. Koga, M. Shiratani

Jpn. J. Appl. Phys.   14 ( 2 )   2021年1月

Long-term response of Norway spruce to seed treatment with cold plasma: dependence of the effects on the genotype 査読 国際誌

Plasma Process Polym   2020年12月

Experimental identification of the reactive oxygen species transported into a liquid by plasma irradiation 査読 国際誌

T. Kawasaki, K. Koga, M. Shiratani

Jpn. J. Appl. Phys.   59 ( 11 )   2020年11月

Size and flux of carbon nanoparticles synthesized by Ar+CH4 multi-hollow plasma chemical vapor deposition 査読 国際誌

S. H. Hwang, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Diam Relat Mater   109   2020年11月

Graphene-Si3N4 nanocomposite blended polymer counter electrode for low-cost dye-sensitized solar cells 査読 国際誌

F. L. Chawarambwa, T. E. Putri, M. K. Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Chem. Phys. Lett.   758   2020年11月

Synthesis of Yb3+/Ho3+ co-doped Y2O3 nanoparticles and its application to dye sensitized solar cells 査読 国際誌

F. L. Chawarambwa, T. E. Putri, K. Kamataki, M. Shiratani, K. Koga, N. Itagaki, D. Nakamura

J. Mol. Struct.   2020年10月

Impact of surface morphologies of substrates on the epitaxial growth of magnetron sputtered (ZnO)x(InN)1-x films 査読 国際誌

R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

Jpn. J. Appl. Phys.   60 ( SA )   2020年10月

Cold plasma treatment of sunflower seeds modulates plant-associated microbiome and stimulates root and lateral organ growth 査読 国際誌

Front. Plant Sci.   11   2020年8月

Real-time monitoring of surface passivationof crystalline silicon during growth of amorphous and epitaxial silicon layer 査読 国際誌

S. Nunomura, I. Sakata, H. Sakakita, K. Koga, M. Shiratani

J. Appl. Phys.   128 ( 3 )   2020年7月

Cold plasma treatment of Arabidopsis thaliana (L.) seeds modulates plant-associated microbiome composition 査読 国際誌

Applied Physics Express   13   2020年5月

Growth of single crystalline films on lattice-mismatched substrates through 3D to 2D mode transition 査読 国際誌

N. Itagaki, Y. Nakamura, R. Narishige, K. Takeda, K. Kamataki, K. Koga, M. Hori, M. Shiratani

Sci. Rep.   10 ( 1 )   2020年3月

Effects of surrounding gas on plasma-induced downward liquid flow 査読 国際誌

T. Kawasaki, K. Nishida, G. Uchida, F. Mitsugi, K. Takenaka, K. Koga, Y. Setsuhara, M. Shiratani

Jpn. J. Appl. Phys.   59 ( SH )   2020年3月

Impact of radish sprouts seeds coat color on the electron paramagnetic resonance signals after plasma treatment 査読 国際誌

K. Koga, P. Attri, K. Kamataki, N. Itagaki, M. Shiratani, V. Mildaziene

Jpn. J. Appl. Phys.   59 ( SH )   2020年3月

Relationship between cold plasma treatment-induced changes in radish seed germination and phytohormone balance 査読 国際誌

L. D. Fomins, G. Pauzaite, R. Zukiene, V. Mildaziene, K. Koga, M. Shiratani

Jpn. J. Appl. Phys.   59   2020年2月

Dielectric barrier discharge plasma treatment-induced changes in sunflower seed germination, phytohormone balance, and seedling growth 査読 国際誌

R. Zukiene, Z. Nauciene, I. Januskaitiene, G. Pauzaite, V. Mildaziene, K. Koga, M. Shiratani

Appl. Phys. Express   12 ( 12 )   2019年11月

Identification and Suppression of Si-H2 Bond Formation at P/I Interface in a-Si:H Films Deposited by SiH4 Plasma CVD 査読 国際誌

K. Tanaka, H. Hara, S. Nagaishi, L. Shi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res.   14   2019年9月

Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma 査読 国際誌

R. Zhou, K. Kamataki, H. Ohtomo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res.   14   2019年9月

Effects of Gas Pressure on the Size Distribution and Structure of Carbon Nanoparticles Using Ar + CH4 Multi-Hollow Discharged Plasma Chemical Vapor Deposition 査読 国際誌

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res.   14   2019年9月

Effect of Higher-Order Silane Deposition on Spatial Profile of Si-H2/Si-H Bond Density Ratio of a-Si:H Films 査読 国際誌

L. Shi, K. Tanaka, H. Hara, S. Nagaishi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res.   14   2019年9月

Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes? 査読 国際誌

T. Iwase, Y. Kamaji, S. Y. Kang, K. Koga, N. Kuboi, M. Nakamura, N. Negishi, T. Nozaki, S. Nunomura, D. Ogawa, M. Omura, T. Shimizu, K. Shinoda, Y. Sonoda, H. Suzuki, K. Takahashi, T. Tsutsumi, K. Yoshikawa, T. Ishijima, K. Ishikawa

Jpn. J. Appl. Phys.   58   2019年6月

Effects of gas velocity on deposition rate and amount of cluster incorporation into a-Si:H films fabricated by SiH4 plasma chemical vapor deposition 査読 国際誌

T. Kojima, S. Toko, K. Tanaka, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res.   13   1406082   2018年6月

Dependence of CO2 Conversion to CH4 on CO2 Flow Rate in Helicon Discharge Plasma 査読 国際誌

S. Toko, R. Katayama, K. Koga, E. Leal-Quiros, M. Shiratani

Sci. Adv. Mater.   10 ( 5 )   2018年5月

Synthesis of Nanoparticles using Low Temperature Plasmas and Its Application to Solar Cells and Tracers in Living Body 査読 国際誌

K. Koga, H. Seo, A. Tanaka, N. Itagaki, M. Shiratani

ECS Transactions   77 ( 3 )   2017年5月

Plant Growth Enhancement of Seeds Immersed in Plasma Activated Water 査読 国際誌

T. Sarinont, R. Katayama, Y. Wada, K. Koga, M. Shiratani

MRS Adv.   2 ( 18 )   2017年2月

Response of Silkworm Larvae to Atmospheric Pressure Non-thermal Plasma Irradiation 査読 国際誌

T. Sarinont, Y. Wada, K. Koga, M. Shiratani

Plasma Medicine   6 ( 3-4 )   2017年1月

Effects of sputtering gas pressure dependence of surface morphology of ZnO films fabricated via nitrogen mediated crystallization 査読 国際誌

K. Iwasaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

MRS Adv.   2 ( 5 )   2016年12月

Blue Photoluminescence of (ZnO)0.92(InN)0.08 査読 国際誌

K. Matsushima, K. Iwasaki, N. Miyahara, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

MRS Adv.   2 ( 5 )   2016年12月

Fluctuation of Position and Energy of a Fine Particle in Plasma Nanofabrication 査読 国際誌

M. Shiratani, M. Soejima, H. Seo, N. Itagaki, K. Koga

Materials Science Forum   879   2016年11月

R&D status of agricultural applications of high voltage and plasma in Japan 招待 国際誌

M. Shiratani, T. Sarinont, K. Koga and N. Hayashi

Proc. Workshop on Application of Advanced Plasma Technologies in CE Agriculture   2016年4月

Quantum Characterization of Si Nano-Particles Fabricated by Multi-Hollow Discharge Plasma Chemical Vapor Deposition 査読 国際誌

H. Seo, G. Uchida, N. Itagaki, K. Koga, and M. Shiratani

Sci. Adv. Mater.   8 ( 3 )   2016年3月

Room Temperature Fabrication of (ZnO)x(InN)1-x films with Step-Terrace Structure by RF Magnetron Sputtering 査読 国際誌

K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

MRS Advances   1 ( 2 )   2016年1月

Plant Growth Response to Atmospheric Air Plasma Treatments of Seeds of 5 Plant Species 査読 国際誌

M. Shiratani, T. Sarinont, T. Amano, N. Hayashi, K. Koga

MRS Adv.   1 ( 18 )   2016年1月

Production of In, Au, and Pt nanoparticles by discharge plasmas in water for assessment of their bio-compatibility and toxicity 査読 国際誌

T. Amano, T. Sarinont, K. Koga, M. Hirata, A. Tanaka, M. Shiratani

MRS Adv.   1 ( 18 )   2016年1月

水素プラズマとカーボン壁の相互作用で発生したダストに対するダスト除去フィルタのダスト除去性能評価

白谷正治, 古閑一憲, 立石瑞樹, 片山龍, 山下大輔, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 芦川直子, 時谷政行, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

九州大学超顕微解析研究センター報告   39   2015年12月

Raman Spectroscopy of a-C:H Films Deposited Using Ar + H2+ C7H8 Plasma CVD 査読 国際誌

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015年10月

Discharge characteristics and hydrodynamics behaviors of atmospheric plasma jets produced in various gas flow patterns 査読 国際誌

Y. Setsuhara, G. Uchida, A. Nakajima, K. Takenaka, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015年10月

Gas flow rate dependence of the production of reactive oxygen species in liquid by a plasma-jet irradiation 査読 国際誌

G. Uchida, A. Nakajima, T. Kawasaki, K. Koga, K. Takenaka, M. Shiratani, Y. Setsuhara

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015年10月

Effects of Ambient Humidity on Plant Growth Enhancement by Atmospheric Air Plasma Irradiation to Plant Seeds 査読 国際誌

T. Sarinont, T. Amano, K. Koga, S. Kitazaki, N. Hayashi, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015年10月

Measurement of absolute density of N atom in sputtering plasma for epitaxial growth ZnO films via nitrogen mediated crystallization 査読 国際誌

T. Ide, K. Matsushima, T. Takasaki, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015年10月

Measurements of absolute densities of nitrogen and oxygen atoms in sputtering plasma for fabrication of ZnInON films 査読 国際誌

K. Matsushima, T. Ide, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015年10月

Measurements of nitrogen atom density in N2/Ar sputtering plasma for fabrication of high-mobility amorphous In2O3:Sn films 査読 国際誌

T. Takasaki, T. Ide, K. Matsushima, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP   60 ( 9 )   2015年10月

Fabrication of p-i-n solar cells utilizing ZnInON by RF magnetron sputtering 査読 国際誌

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Mat. Res. Soc. Symp. Proc.   1741   2015年3月

ZnO-based semiconductors with tunable band gap for solar sell applications 招待 査読 国際誌

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Proc. SPIE photonics west 2015   9364   2015年3月

Effects of morphology of buffer layers on ZnO/sapphire heteroepitaxial growth by RF magnetron sputtering 査読 国際誌

T. Ide, K. Matsushima, R. Shimizu, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Mat. Res. Soc. Symp. Proc.   1741   2015年2月

Effects of Atmospheric Air Plasma Irradiation to Seeds of Radish Sprouts on Chlorophyll and Carotenoids Concentrations in their Leaves 査読 国際誌

T. Sarinont, T. Amano, K. Koga, M. Shiratani, N. Hayashi

Mat. Res. Soc. Symp. Proc.   1723   2015年2月

Comparative Study on the Pulmonary Toxicity of Indium Hydroxide, Indium-Tin Oxide, and Indium Oxide Following Intratracheal Instillations into the Lungs of Rats 査読 国際誌

A. Tanaka, M. Hirata, N. Matsumura, K. Koga, M. Shiratani, Y. Kiyohara

Mat. Res. Soc. Symp. Proc.   1723   2015年2月

Multigeneration Effects of Plasma Irradiation to Seeds of Arabidopsis Thaliana and Zinnia on Their Growth 査読 国際誌

T. Sarinont, T. Amano, K. Koga, M. Shiratani, N. Hayashi

Mat. Res. Soc. Symp. Proc.   1723   2015年1月

反応性微粒子プラズマプロセスを用いたゲルマニウム結晶ナノ粒子含有膜の堆積と量子ドット太陽電池への応用 査読

内田儀一郎, 市田大樹, 徐鉉雄, 古閑一憲, 白谷正治

スマートプロセス学会誌   4 ( 1 )   2015年1月

SiC Nanoparticle Composite Anode for Li-Ion Batteries 査読 国際誌

M. Shiratani, K. Kamataki, G. Uchida, K. Koga, H. Seo, N. Itagaki, T. Ishihara

Mat. Res. Soc. Symp. Proc.   1678   2014年7月

Plasma etching of single fine particle trapped in Ar plasma by optical tweezers 査読 国際誌

T. Ito, K. Koga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida and M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014年6月

Control of the area irradiated by the sheet-type plasma jet in atmospheric pressure 査読 国際誌

T. Kawasaki, K. Kawano, H. Mizoguchi, Y. Yano, K. Yamashita, M. Sakai, G. Uchida, K. Koga, M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014年6月

Formation of carbon nanoparticle using Ar+CH4 high pressure nanosecond discharges 査読 国際誌

K. Koga, X. Dong, S. Iwashita, U. Czarnetzki and M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014年6月

Growth enhancement effects of radish sprouts: atmospheric pressure plasma irradiation vs. heat shock 査読 国際誌

T. Sarinont, T. Amano, S. Kitazaki, K. Koga, G. Uchida, M. Shiratani and N. Hayashi

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014年6月

Contribution of H2 plasma etching to radial profile of amount of dust particles in a divertor simulator 査読 国際誌

M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura and A. Sagara, the LHD Experimental Group

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014年6月

Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD 査読 国際誌

S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014年6月

Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method 査読 国際誌

D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014年6月

Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency 査読 国際誌

Y. Hashimoto, S. Toko, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014年6月

Emission spectroscopy of Ar + H-2+ C7H8 plasmas: C7H8 flow rate dependence and pressure dependence 査読 国際誌

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine and M. Hori

J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014年6月

Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization 招待 査読 国際誌

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Proc. SPIE photonics west 2014   8987   2014年3月

Effects of Atmospheric Air Plasma Irradiation on pH of Water 査読 国際誌

T. Sarinont, K. Koga, S. Kitazaki, G. Uchida, N. Hayashi, M. Shiratani

JPS Conf. Proc.   1   2014年3月

Pressure dependence of carbon film deposition using H-assisted plasma CVD 査読 国際誌

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, K. Takenaka, Y. Setsuhara, M. Sekine, M. Hori

Proc. 8th Int. Conf. Reactive Plasmas   2014年2月

Effects of growth enhancement by plasma irradiation to seeds in water 査読 国際誌

T. Sarinont, K. Koga, S. Kitazaki, M. Shiratani, N. Hayashi

Proc. 8th Int. Conf. Reactive Plasmas   2014年2月

Long term growth of radish sprouts after atmospheric pressure DBD plasma irradiation to seeds 査読 国際誌

T. Amano, T. Sarinont, S. Kitazaki, N. Hayashi, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   2014年2月

Multi-generation evaluation of plasma growth enhancement to arabidopsis thaliana (Invited) 招待 査読 国際誌

K. Koga, T. Sarinont, S. Kitazaki, N. Hayashi, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   2014年2月

Visualization of oxidizing substances generated by atmospheric pressure non-thermal plasma jet with water 査読 国際誌

T. Kawasaki, K. Kawano, H. Mizoguchi, Y. Yano, K. Yamashita, M. Sakai, G. Uchida, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   2014年2月

Growth control of ZnO nano-rod with various seeds and photovoltaic application 査読 国際誌

H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

J. Phys. : Conference Series (11th APCPST)   441 ( 1 )   2013年6月

Control of nanoparticle formation in reactive plasmas and its application to fabrication of green energy devices 招待 査読 国際誌

M. Shiratani, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga

Proc. 13th International Conference on Plasma Surface Engineering   2 ( 26 )   2013年3月

Subacute pulmonary toxicity of copper indium gallium diselenide following intratracheal instillations into the lungs of rats 査読 国際誌

A. Tanaka, M. Hirata, M. Shiratani, K. Koga, Y. Kiyohara

Journal of Occupational Health   54 ( 3 )   2012年6月

The Optical Analysis and Application of Size-controllable Si Quantum Dots Fabricated by Multi-hollow Discharge Plasma Chemical Vapor Deposition 査読 国際誌

H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Mat. Res. Soc. Symp. Proc.   1426   2012年4月

Effects of Atmospheric Pressure Dielectric Barrier Discharge Plasma Irradiation on Yeast Growth 査読 国際誌

S. Kitazaki, K. Koga, M. Shiratani, N. Hayashi

Mat. Res. Soc. Symp. Proc.   1469   2012年4月

Influence of Atmospheric Pressure Torch Plasma Irradiation on Plant Growth 査読 国際誌

Y. Akiyoshi, N. Hayashi, S. Kitazaki, K. Koga and M. Shiratani

Mat. Res. Soc. Symp. Proc.   1469   2012年4月

Rapid Growth of Radish Sprouts Using Low Pressure O2 Radio Frequency Plasma Irradiation 査読 国際誌

S. Kitazaki, K. Koga, M. Shiratani, N. Hayashi

Mat. Res. Soc. Symp. Proc.   1469   2012年4月

Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition 査読 国際誌

M. Shiratani, K. Hatozaki, Y. Hashimoto, Y. Kim, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga

Mat. Res. Soc. Symp. Proc.   1426   2012年4月

In-situ Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances 査読 国際誌

Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Mat. Res. Soc. Symp. Proc.   1426   2012年4月

Self-organized carbon Mk formation on the top surface of fine trenches using a low temperature plasma anisotropic CVD for depositing fine organic structure 国際誌

K. Koga, T. Urakawa, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. Plasma Conf. 2011   2011年11月

Deposition of FeSi2 nano-particle film 国際誌

M. Sato, Y. Wang, K. Nakahara, T. Matsunaga, H. Seo, G. Uchida, K. Koga and M. Shiratani

Proc. Plasma Conf. 2011   2011年11月

Effects of substrate bias voltage on plasma anisotropic CVD of carbon using H-assisted plasma CVD reactor 国際誌

T. Urakawa, H. Matsuzaki, D. Yamashita, G. Uchida, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. Plasma Conf. 2011   2011年11月

Growth promotion characteristics of bread yeast by atmospheric pressure dielectric barrier discharge plasma irradiation 国際誌

S. Kitazaki, K. Koga, M. Shiratani, N. Hayashi

Proc. Plasma Conf. 2011   2011年11月

Production Process of Carbon Nanotube Coagulates 国際誌

T. Mieno, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   2011年11月

Influence of active oxygen species produced by atmospheric torch plasma on plant growth 査読 国際誌

N. Hayashi, Y. Akiyoshi, S. Kitazaki, K. Koga, M. Shiratani

Proc. Intern. Symp. on Dry Process   33   2011年11月

Optical emission spectroscopy of Ar+H2+ C7H8 discharges for anisotropic plasma CVD of carbon 査読 国際誌

T. Urakawa, H. Matsuzaki, D. Yamashita, G. Uchida, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. Intern. Symp. on Dry Process   33   2011年11月

Quantum dot-sensitized solar cells using nitridated si nanoparticles produced by double multi-hollow discharges 査読 国際誌

M. Sato, Y. Wang, K. Nakahara, T. Matsunaga, H. Seo, G. Uchida, K. Koga, M. Shiratani

Proc. PVSEC-21   2011年11月

Stable schottky solar cells using cluster-free a-si:h prepared by multi-hollow discharge plasma CVD 査読 国際誌

K. Hatozaki, K. Nakahara, G. Uchida, K. Koga, M. Shiratani

Proc. PVSEC-21   2011年11月

Deposition of highly stable cluster-free a-Si:H films using fast gas flow multi-hollow discharge plasma CVD method 国際誌

K. Hatozaki, K. Nakahara, T. Matsunaga, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   2011年11月

Performance enhancement of Si quantum dot-sensitized solar cells by surface modification using ZnO barrier layer 国際誌

Y. Wang, M. Sato, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Intern. Symp. on Dry Process   33   2011年11月

Surface nitridation of silicon nano-particles using double multi-hollow discharge plasma CVD 査読 国際誌

G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani

Physica Status Solidi (c)   8 ( 10 )   2011年10月

Deposition of cluster-free P-doped a-Si:H films using SiH4+PH3 multi-hollow discharge plasma CVD method 査読 国際誌

K. Koga, K. Nakahara, Y. Kim, Y. Kawashima, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani

Physica Status Solidi (c)   8 ( 10 )   2011年10月

Hybrid sensitized solar cells using Si nanoparticles and ruthenium dye 査読 国際誌

G. Uchida, Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani

Physica Status Solidi (c)   8 ( 10 )   2011年10月

Deposition profile control of carbon films on submicron wide trench substrate using H-assisted plasma CVD 国際誌

T. Urakawa, T. Nomura, H. Matsuzaki, D. Yamashita, G. Uchida, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

2011年7月

Generation and Surface Modification of Si nano-particles using SiH4/H2 and N2 multi-hollow discharges and their application to the third generation photovoltaics 招待 査読 国際誌

K. Koga, G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Kamataki, N. Itagaki, M. Shiratani

International Conference on Advances in Condensed and Nano Materials (ICACNM)   1393   2011年2月

マルチホロー放電プラズマＣＶＤによる量子ドット増感太陽電池用シリコンナノ結晶粒子の作製

内田儀一郎, 古閑一憲, 白谷正治

ケミカルエンジニヤリング   55 ( 12 )   947 - 954   2010年12月

Fluctuation Control for Plasma Nanotechnologies 査読 国際誌

M. Shiratani, K. Koga, G. Uchida, N. Itagaki, K. Kamataki

Proc. IEEE TENCON 2010   2010年11月

Growth Stimulation of Radish Sprouts Using Discharge Plasma 査読 国際誌

S. Kitazaki, D. Yamashita, H. Matsuzaki, G. Uchida, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010年11月

Photoluminescence of Si nanoparticles synthesized using multi-hollow discharge plasma CVD 査読 国際誌

Y. Kawashima, K. Yamamoto, M. Sato, T. Matsunaga, K. Nakahara, D. Yamashita, H. Matsuzaki, G. Uchida, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010年11月

Redox Characteristics of Amino Acids Using Low Pressure Water Vapor RF Plasma 査読 国際誌

Y. Akiyoshi, A. Nakahigashi, N. Hayashi, S. Kitazaki, Takuro Iwao, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010年11月

Substrate temperature dependence of feature profile of carbon films on substrate with submicron trenches 査読 国際誌

T. Nomura, T. Urakawa, Y. Korenaga, D. Yamashita, H. Matsuzaki, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010年11月

Cluster-Free B-Doped a-Si:H Films Deposited Using SiH4 + B10H14 Multi-Hollow Discharges 査読 国際誌

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010年11月

Deposition profiles of microcrystalline silicon films using multi-hollow discharge plasma CVD 査読 国際誌

T. Matsunaga, Y. Kawashima, K. Koga, K. Nakahara, W. M. Nakamura, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

Proc. IEEE TENCON 2010   2010年11月

Effects of Amplitude Modulation of rf Discharge Voltage on Growth of Nano-Particles in Reactive Plasma 査読 国際誌

K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

Proc. IEEE TENCON 2010   2010年11月

Effects of Ar addition on breakdown voltage in a Si(CH3)2(OCH3)2 RF discharge 査読 国際誌

G. Uchida, S. Nunomutra, H. Miyata, S. Iwashita, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010   2010年11月

Deposition rate enhancement of cluster-free P-doped a-Si:H films using multi-hollow discharge plasma CVD method 国際誌

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010年10月

Plasma parameter measurements of Ar+H2+C7H8 plasma in H-assisted plasma CVD reactor 国際誌

T. Nomura, T. Urakawa, Y. Korenaga, D. Yamashita, H. Matsuzaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010年10月

Redox Characteristics of Thiol of Plants Using Radicals Produced by RF Discharge 国際誌

A. Nakahigashi, Y. Akiyoshi, N. Hayashi, S. Kitazaki, K. Koga, M. Shiratani

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010年10月

Combinatorial deposition of microcrystalline Si films using multi-hollow discharge plasma CVD 国際誌

T. Matsunaga, Y. Kawashima, K. Koga, W. M. Nakamura, K. Nakahara, H. Matsuzaki, D. Yamashita, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010年10月

Quantum dot-sensitized solar cells using Si nanoparticles 査読 国際誌

Y. Kawashima, K. Nakahara, H. Sato, K. Koga, M. Shiratani, M. Kondo

35 ( 3 )   2010年9月

Si quantum dot-sensitized solar cells using Si nanoparticles produced by plasma CVD 査読 国際誌

Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

Proc. 35th IEEE Photovoltaic Specialists Conf.   2010年7月

Effects of hydrogen dilution on electron density in multi-hollow discharges with magnetic field for A-Si:H film deposition 査読 国際誌

K. Koga, Y. Kawashima, K. Nakahara, T. Matsunaga, W. M. Nakamura, M. Shiratani

Proc. 35th IEEE Photovoltaic Specialists Conf.   2010年7月

Deposition of cluster-free P-doped a-Si:H films using a multi-hollow discharge plasma CVD method 査読 国際誌

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 35th IEEE Photovoltaic Specialists Conf.   2010年7月

Synthesis of crystalline Si nanoparticles for Quantum dots-sensitized solar cells using multi-hollow discharge plasma CVD 国際誌

Y. Kawashima, K. Nakahara, H. Sato, K. Koga, M. Shiratani, M. Kondo

Proc. of the 27th symposium on plasma processing   ( B5-05 )   2010年2月

Control of deposition profile of hard carbon films on trenched substrates using H-assisted plasma CVD reactor 国際誌

T. Nomura, Y. Korenaga, H. Matsuzaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. of the 27th symposium on plasma processing   ( P1-39 )   2010年2月

Effects of gas residence time and H2 dilution on electron density in multi-hollow discharges of SiH4+ H2 国際誌

K. Koga, H. Sato, Y. Kawashima, W. M. Nakamura, M. Shiratani

Proc. of the 27th symposium on plasma processing   ( A5-06 )   2010年2月

In-situ Measurement of Production Process of Nanotube-Aggregates by the Laser-Mie Scattering (Dependence of Arc Condition and Gravity) 国際誌

T. Mieno, GuoDong Tan, S. Usuba, K. Koga, M. Shiratani

Proc. of the 27th symposium on plasma processing   ( P2-17 )   2010年2月

In-Situ Sampling of Dust Particles Produced Due to Interaction between Main Discharge Plasma and Inner Wall in LHD 国際誌

H. Miyata, S. Iwashita, YasuY. Yamada, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, LHD Experimental Group

Proc. of the 27th symposium on plasma processing   ( P1-14 )   2010年2月

Measurement of electron density in multi-hollow discharges with magnetic field 国際誌

H. Sato, Y. Kawashima, K. Nakahara, K. Koga, M. Shiratani

Proc. of the 27th symposium on plasma processing   ( A6-01 )   2010年2月

Observation of nano-particle transport in capacitively coupled radio frequency discharge plasma 国際誌

S. Iwashita, H. Miyata, YasuY. Yamada, H. Matsuzaki, K. Koga, M. Shiratani

Proc. of the 27th symposium on plasma processing   ( P1-13 )   2010年2月

Substrate temperature dependence of deposition profile of plasma CVD carbon films in trenches 査読 国際誌

J. Umetsu, K. Inoue, T. Nomura, H. Matsuzaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

J. Plasma Fusion Res.   8   2009年9月

Dust Particles formed owing to interactions between H2 or D2 helicon plasma, graphite 国際誌

H. Miyata, S. Iwashita, YasuY. Yamada, K. Koga, M. Shiratani

Proc. of 2009 International Symposium on Dry Process   2009年9月

Measurements of electron density in SiH4+H2 multi-hollow discharges using a frequency shift probe 国際誌

K. Nakahara, Y. Kawashima, H. Sato, K. Koga, M. Shiratani

Proc. of 2009 International Symposium on Dry Process   2009年9月

Measurements of Surface Temperature of a-Si:H Films in Silane Multi-Hollow Discharge with IR Thermometer 国際誌

H. Sato, Y. Kawashima, K. Koga, M. Shiratani

Proc. of 2009 International Symposium on Dry Process   2009年9月

Porosity Control of Nano-Particle Composite Porous Low Dielectric Films using Pulse RF Discharges with Amplitude Modulation 国際誌

S. Iwashita, H. Miyata, K. Koga, H. Matsuzaki, M. Shiratani, M. Akiyama

Proc. of 2009 International Symposium on Dry Process   2009年9月

Pressure, aspect ratio dependence of deposition profile of carbon films on trench substrates deposited by plasma CVD 国際誌

T. Nomura, Y. Korenaga, J. Umetsu, H. Matsuzaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. of 2009 International Symposium on Dry Process   2009年9月

Synthesis of Si nanoparticles for multiple exciton generation solar cells using multi-hollow discharge plasma CVD 国際誌

Y. Kawashima, H. Sato, K. Koga, M. Shiratani, M. Kondo

Proc. of 2009 International Symposium on Dry Process   2009年9月

Toward plasma nano-factories 国際誌

M. Shiratani, K. Koga

Proc. of 2nd International Conference on Advanced Plasma Technologies (iCAPT-II) with 1st International Plasma Nanoscience Symposium (iPlasmaNano-I)   2009年9月

A comparison of dust particles produced due to interaction between graphite and plasma: LHD vs helicon discharges 査読 国際誌

S. Iwashita, H. Miyata, K. Koga, M. Shiratani, N. Ashikawa, K. Nishimura, A. Sagara, the LHD experimental group

J. Plasma Fusion Res.   8   2009年9月

Control of Three Dimensional Transport of Nano-blocks by Amplitude Modulated Pulse RF Discharges using an Electrode with Needles 査読 国際誌

S. Iwashita, H. Miyata, H. Matsuzaki, K. Koga, M. Shiratani

J. Plasma Fusion Res.   8   2009年9月

Dependence of volume fraction of clusters on deposition rate of a-Si:H films deposited using a multi-hollow discharge plasma CVD method 査読 国際誌

H. Sato, Y. Kawashima, M. Tanaka, K. Koga, W. M. Nakamura, M. Shiratani

J. Plasma Fusion Res.   8   2009年9月

Detection of nano-particles formed in cvd plasma using a two-dimensional photon-counting laser-light-scattering method 査読 国際誌

H. Miyahara, S. Iwashita, H. Miyata, H. Matsuzaki, K. Koga, M. Shiratani

J. Plasma Fusion Res.   8   2009年9月

Optical Emission Spectroscopy of a Magnetically Enhanced Multi-hollow Discharge Plasma for a-Si:H Deposition 査読 国際誌

W. M. Nakamura, Y. Kawashima, M. Tanaka, H. Sato, J. Umetsu, H. Miyahara, H. Matsuzaki, K. Koga, M. Shiratani

J. Plasma Fusion Res.   8   2009年9月

Plasma CVD of Nano-particle Composite Porous SiOCH Films 国際誌

M. Shiratani, S. Iwashita, H. Miyata, K. Koga, H. Matsuzaki, M. Akiyama

Proc. of 19th International Symposium on Plasma Chemistry   2009年7月

Characterization of Dust Particles Ranging in Size from 1 nm to 10 µm Collected in the LHD 査読 国際誌

4   34 - 34   2009年4月

Nano-block manipulation using pulse RF discharges with amplitude modulation combined with a needle electrode

S. Iwashita, H. Miyata, H. Matsuzaki, K. Koga, M. Shiratani

Proc. of PSS2009/SPP26   2009年2月

Characteristics of dust particles produced due to interaction between hydrogen plasma, graphite

S. Iwashita, H. Miyata, K. Koga, M. Shiratani, N. Ashikawa, A. Sagara, K. Nisimura

Proc. of PSS2009/SPP26   2009年2月

Conductivity of nc-Si films depsited using multi-hollow discharge plasma CVD method

K. Koga, Y. Kawashima, W. M. Nakamura, H. Sato, M. Tanaka, M. Shiratani, M. Kondo

Proc. of PSS2009/SPP26   2009年2月

Deposition profile of toluene plasma CVD carbon films in trenches

J. Umetsu, K. Inoue, T. Nomura, H. Matsuzaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. of PSS2009/SPP26   2009年2月

Effects of magnetic fields on multi-hollow discharges for thin film silicon solar cells

Nakamura W. M., Sato H., Koga K., Shiratani M.

Proc. of PSS2009/SPP26   2009年2月

High Rate Deposition of a-Si:H Depositied using a Low Gas Pressure Multi-hollow Discharge Plasma CVD Method

K. Koga, W. M. Nakamura, H. Sato, M. Tanaka, H. Miyahara, M. Shiratani

Proc. of PSS2009/SPP26   2009年2月

Plasma CVD of Nano-particle Composite Porous Films of k=1.4-2.9, Young’s Modulus above 10 GPa 査読 国際誌

2008年12月

Deposition profile of plasma CVD carbon films in trenches 査読 国際誌

J. Umetsu, K. Inoue, T. Nomura, H. Matsuzaki, K. Koga, Y. Setsuhara, M. Shiratani, M. Sekine, M. Hori

Proc. of 30th International Symposium on Dry Process   2008年12月

Rapid transport of nano-particles in amplitude modulated rf discharges for depositing porous ultra-low-k films 査読 国際誌

S. Iwashita, K. Koga, M. Morita, M. Shiratani

J. Phys. : Conference Series   100 ( 6 )   2008年8月

Cluster incorporation control for a-Si:H film deposition 査読 国際誌

W. M. Nakamura, K. Koga, H. Miyahara, M. Shiratani

J. Phys. : Conference Series   100 ( 8 )   2008年8月

Optical emission spectroscopic study on H-assisted plasma for anisotropic deposition of Cu films 査読 国際誌

J. Umetsu, K. Koga, K. Inoue, M. Shiratani

J. Phys. : Conference Series   100 ( 6 )   2008年8月

Nanoparticle-Suppressed Plasma CVD for Depositing Stable a-Si:H Films 査読 国際誌

M. Shiratani, W. M. Nakamura, H. Miyahara, K. Koga

Digest of Technical Papers of the Fifteenth International Workshop on Active-Matrix Flatpanel Displays, Devices (AM-FPD 08)   2008年7月

Rapid transport of nano-particles having a fractional elemental charge on average in capacitively coupled rf discharges by amplitude modulating discharge voltage 招待 査読 国際誌

M. Shiratani, S. Iwashita, K. Koga, S. Nunomura

Faraday Discussions   137   2008年1月

VHF discharge sustained in a small hole 査読 国際誌

K. Koga, W. M. Nakamura, and M. Shiratani

Proc. 28th Intern. Conf. on Phenomena in Ionized Gases   2007年7月

Transport of nano-particles in pulsed AM RF discharges

S. Iwashita, K. Koga, M. Shiratani

Proc. the 24th Symp. on Plasma Processing   2007年1月

In-situ sampling of dust generated in LHD and its analysis

M. Shiratani, S. Kiridoshi, K. Koga, S. Iwashita, N. Ashikawa, K. NIshimura, A. Sagara, A. Komori, LHD Experimental Group

Proc. the 24th Symp. on Plasma Processing   2007年1月

Stability of a-Si:H deposited using multi-hollow plasma CVD

K. Koga, W. M. Nakamura, D. Shimokawa, M. Shiratani

Proc. the 24th Symp. on Plasma Processing   2007年1月

Fabrication of nanoparticle composite porous films having ultra-low dielectric constant 査読 国際誌

S. Nunomura, K. Koga, M. Shiratani, Y. Watanabe, Y. Morisada, N. Matsuki, and S. Ikeda

Jpn. J. Appl. Phys.   44 ( 50 )   2005年12月

Highly stable a-Si:H films deposited by using multi-hollow plasma chemical vapor deposition 査読 国際誌

K. Koga, T. Inoue, K. Bando, S. Iwashita, M. Shiratani, and Y. Watanabe

Jpn. J. Appl. Phys.   44 ( 48 )   2005年11月

Production of crystalline Si nano-particles using VHF discharges and their properties 査読 国際誌

M. Shiratani, T. Kakeya, K. Koga, Y. Watanabe, and M. Kondo

30 ( 1 )   2005年3月

Preparation of high-quality a-Si:H using cluster-suppressed plasma CVD method and its prospects 招待 査読 国際誌

Y. Watanabe, M. Shiratani, K. Koga

30 ( 1 )   2005年3月

Carbon particle formation due to interaction between H2 plasma and carbon fiber composite wall 査読 国際誌

K. Koga, R. Uehara, Y. Kitaura, M. Shiratani, Y. Watanabe, A. Komori

IEEE Trans. Plasma Science   32 ( 2 )   2004年2月

Effects of Excitation Frequency and H2 Dilution on Cluster Generation in Silane High-Frequency Discharges 査読 国際誌

M. Shiratani, K. Koga, A. Harikai, T. Ogata, and Y. Watanabe

MRS Symp. Proc.   762   2003年4月

シランプラズマ中のクラスタ成長と薄膜形成

白谷正治, 古閑一憲, 尾形隆則, 掛谷知秀, 鹿口直斗, 渡辺征夫

信学技報   103 ( 6 )   2003年4月

Anisotropic Plasma Chemical Vapor Deposition of Copper Films in Trenches 査読 国際誌

K. Takenaka, M. Onishi, M. Takeshita, T. Kinoshita, K. Koga, M. Shiratani, and Y. Watanabe

MRS Symp. Proc.   766   2003年4月

Anisotropic Deposition of Copper by H-Assisted Plasma Chemical Vapor Deposition 査読 国際誌

K. Takenaka, M. Shiratani, M. Onishi, M. Takeshita, T. Kinoshita, K. Koga, and Y. Watanabe

Matr. Sci. Semiconductor Processing   5 ( 2 )   2003年2月

ナノクラスタ制御プラズマCVDと高品質，光安定a-Si:H太陽電池への応用

白谷正治, 古閑一憲, 渡辺征夫

アモルファスセミナーテキスト   2002年11月

Formation of nano-particles in microgravity plasma 査読 国際誌

M. Shiratani, K. Koga, Y. Watanabe

Journal of Japan Society of Microgravity Application   19   2002年10月

Anisotropic deposition of copper by plasma CVD method 国際誌

K. Takenaka, M. Onishi, M. Takenaka, T. Kinoshita, K. Koga, M. Shiratani, Y. Watanabe

Proc. Intern. Symp. on Dry Process   2002年10月

Nucleation and subsequent growth of clusters in reactive plasma (invited lecture paper) 査読 国際誌

Y. Watanabe, M. Shiratani, K. Koga

Plasma Sources Sci. Technol.   11   2002年8月

Correlation between Si cluster amount in silane HF discharges and quality of a-Si:H films 国際誌

M. Shiratani, M. Kai, K. Imabeppu, K. Koga, Y. Watanabe

Proc. ESCANPIG16/ICRP5 Joint Meeting   2002年7月

Anisotropic deposition of Cu with H-assisted plasma CVD 国際誌

K. Takenaka, H. J. Jin, M. Onishi, K. Koga, M. Shiratani, Y. Watanabe

Proc. ESCANPIG16/ICRP5 Joint Meeting   2002年7月

Conformal deposition of pure Cu films in trenches by H-assisted plasma CVD using Cu(EDMDD)2 国際誌

K. Takenaka, H. J. Jin, M. Onishi, K. Koga, M. Shiratani, Y. Watanabe, T. Shingen

Proc. ESCANPIG16/ICRP5 Joint Meeting   2002年7月

Suppression methods of cluster growth in silane discharges and their application to deposition of super high quality a-Si:H films 国際誌

K. Koga, K. Imabeppu, M. Kai, A. Harikai, M. Shiratani, Y. Watanabe

Proc. Intern. Workshop on Information and Electrical Engineering (IWIE2002)   2002年5月

Deposition of Cu films in trenches for LIS interconnects by H-assisted plasma CVD method 国際誌

K. Takenaka, M. Onishi, T. Kinoshita, K. Koga, M. Shiratani, Y. Watanabe, T. Shingen

Proc. Intern. Workshop on Information and Electrical Engineering (IWIE2002)   2002年5月

Clustering phenomena in low-pressure reactive plasma: basis and applications (invited lecture paper) 査読 国際誌

Y. Watanabe, A. Harikai, K. Koga, M. Shiratani

Pure Appl. Chem.   74 ( 3 )   2002年3月

In-situ measurement of size and density of particles in sub-nm to nm size range 国際誌

K. Koga, M. Shiratani, Y. Watanabe

Proc. Nano-technology Workshop   2002年2月

Deposition of high-quality Si films by suppressing cluster growth in SiH4 high-frequency discharges 国際誌

M. Shiratani, K. Koga, Y. Watanabe

Proc. Nano-technology Workshop   2002年2月

プロセスプラズマ中のクラスタ - アモルファスシリコン太陽電池製造用プラズマ中のクラスター 査読

白谷正治, 古閑一憲, 渡辺征夫

( 5 )   2002年1月

クラスタ制御プラズマCVD法によるSi薄膜の高品質化

渡辺征夫, 古閑一憲, 白谷正治

シリコンテクノロジー   ( 37 )   2002年1月

Deposition of pure copper thin films by H-assisted plasma CVD using a new Cu complex Cu(EDMDD)2 国際誌

K. Takenaka, H. J. Jin, M. Onishi, K. Koga, M. Shiratani, Y. Watanabe

Proc. Intern. Symp. on Dry Process   2001年11月

Cluster-less plasma CVD reactor and its application to a-Si:H film deposition 査読 国際誌

M. Shiratani, K. Koga, Y. Watanabe

Mat. Res. Soc. Symp. Proc.   2001年7月

Behavior of a particle injected in ion sheath of electropositive and electronegative gas discharges 国際誌

M. Shiratani, A. Toyozawa, K. Koga, Y. Watanabe

Proc. Intern. Conf. on Phenomena in Ionized Gases   2001年7月

Clustering phenomena in low-pressure reactive plasma: base and applications (invited) 国際誌

Y. Watanabe, M. Shiratani, K. Koga

Proc. Intern. Symp. on Plasma Chemistry   2001年7月

Deposition of super high quality a-Si:H thin films using cluster-suppressed plasma CVD reactor 国際誌

K. Koga, T. Sonoda, N. Shikatani, M. Shiratani, Y. Watanabe

Proc. Intern. Conf. on Phenomena in Ionized Gases   2001年7月

Development of H-assisted plasma CVD reactor for Cu interconnects 国際誌

M. Shiratani, H. J. Jin, K. Takenaka, K. Koga, T. Kinoshita, Y. Watanabe

Proc. Intern. Conf. on Phenomena in Ionized Gases   2001年7月

Nucleation and subsequent growth of clusters in reactive plasma (invited) 国際誌

Y. Watanabe, M. Shiratani, K. Koga

Proc. Intern. Conf. on Phenomena in Ionized Gases   2001年7月

Formation kinetics and control of dust particles in capacitively-coupled reactive plasma (invited) 査読 国際誌

Y. Watanabe, M. Shiratani, K. Koga

Phys. Scripta   T89   2001年1月

Behavior of a particle injected in ion sheath 国際誌

M. Shiratani, A. Toyozawa, K. Koga, Y. Watanabe

Proc. of Plasma Science Symp. 2001/ 18th Symp. on Plasma Processing   2001年1月

Development of cluster-suppressed plasma CVD reactor for high quality a-Si:H film deposition 国際誌

M. Shiratani, T. Sonoda, N. Shikatani, K. Koga, Y. Watanabe

Proc. of Plasma Science Symp. 2001/ 18th Symp. on Plasma Processing   2001年1月

Effects of H2 dilution and excitation frequency on initial growth of clusters in silane plasma 国際誌

K. Koga, K. Tanaka, M. Shiratani, Y. Watanabe

Proc. Plasma Science Symp. 2001/ 18th Symp. on Plasma Processing   2001年1月

H assisted control of quality and conformality in Cu film deposition using plasma CVD method 国際誌

M. Shiratani, H. J. Jin, K. Takenaka, K. Koga, T. Kinoshita, Y. Watanabe

Proc. Advanced Metallization Conf. 2000   2001年1月

Measurements of surface reaction probability of SiH3 国際誌

M. Shiratani, N. Shiraishi, K. Koga, Y. Watanabe

Proc. of Plasma Science Symp. 2001/ 18th Symp. on Plasma Processing   2001年1月

Plasma CVD method for Cu interconnects in ULSI (invited) 国際誌

M. Shiratani, K. Koga, Y. Watanabe

Proc. of Plasma Science Symp. 2001/ 18th Symp. on Plasma Processing   2001年1月

Methods of suppressing cluster growth in silane rf discharges 査読 国際誌

M. Shiratani, S. Maeda, Y. Matsuoka, K. Tanaka, K. Koga, Y. Watanabe

Mat. Res. Soc. Symp. Proc.   2000年7月

Deposition of smooth thin Cu films in deep submicron trench by plasma CVD reactor with H atom source 査読 国際誌

H. J. Jin, M. Shiratani, Y. Nakatake, K. Koga, T. Kinoshita, Y. Watanabe

Mat. Res. Soc. Symp. Proc.   2000年7月

Propagation characteristics of ion acoustic waves in an Ar/SF6 plasma 査読 国際誌

R. Ichiki, M. Shindo, S. Yoshimura, K. Koga, Y. Kawai

J. Phys. Soc. Jpn.   69 ( 6 )   2000年6月

Filling subquater-micron trench structure with high-purity copper using plasma reactor with H atom source 査読

H. J. Jin, M. Shiratani, Y. Nakatake, K. Koga, T. Kinoshita, Y. Watanabe

Res. Rep. ISEE Kyushu Univ.   5 ( 1 )   2000年3月

Growth processes of particles up to nanometer size in high-frequency SiH4 plasma 査読 国際誌

Y. Watanabe, M. Shiratani, T. Fukuzawa, K. Koga

Jour. Technical Phys.   41 ( 1 )   2000年1月

Observation of Asymmetric Sheath Structure in Multi-Component Plasma Containing Negative Ions 査読 国際誌

K. Koga, H. Naitou, Y. Kawai

J. Plasma Fusion Res.   2   1999年12月

Observation of Local Structures in Asymmetric Ion Sheath 査読 国際誌

K. Koga, H. Naitou, Y. Kawai

J. Phys. Soc. Jpn.   68 ( 5 )   1999年5月

Behavior of the Ion Sheath Instability in a Negative Ion Plasma 査読 国際誌

K. Koga, Y. Kawai

Jpn. J. Appl. Phys.   38 ( 3A )   1999年3月

Growth control of Marchantia polymorpha gemmae using nonthermal plasma irradiation

Shoko Tsuboyama, Takamasa Okumura, Pankaj Attri, Kazunori Koga, Masaharu Shiratani, Kazuyuki Kuchitsu

Scientific Reports   14 ( 1 )   2024年2月

Improving the efficiency of CO2 methanation using a combination of plasma and molecular sieves

Susumu Toko, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

Results in Surfaces and Interfaces   100204 - 100204   2024年2月

Influence of humidity on the plasma-assisted CO<inf>2</inf> conversion

Pankaj Attri, Takamasa Okumura, Nozomi Takeuchi, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

Plasma Processes and Polymers   21 ( 1 )   2024年1月

プラズマ触媒作用を用いた二酸化炭素還元反応の促進に関する基礎研究

13 ( 1 )   31 - 36   2024年1月

On-axis sputtering fabrication of Tm3Fe5O12 film with perpendicular magnetic anisotropy

Marlis Nurut Agusutrisno, Christopher H. Marrows, Kunihiro Kamataki, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoto Yamashita

Thin Solid Films   788   140176 - 140176   2024年1月

Health assessment of rice cultivated and harvested from plasma-irradiated seeds

Takamasa Okumura, Hayate Tanaka, Takumi Nakao, Teruki Anan, Ryo Arita, Masaki Shiraki, Kayo Shiraki, Tomoyuki Miyabe, Daisuke Yamashita, Kayo Matsuo, Pankaj Attri, Kunihiro Kamataki, Naoto Yamashita, Naho Itagaki, Masaharu Shiratani, Satoshi Hosoda, Akiyo Tanaka, Yushi Ishibashi, Kazunori Koga

Scientific Reports   13 ( 1 )   2023年12月

Reaction kinetics studies for phenol degradation under the impact of different gas bubbles and pH using gas-liquid discharge plasma

A. El-Tayeb, Takamasa Okumura, Pankaj Attri, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics   62 ( SN )   2023年11月

Contribution of active species generated in plasma to CO<inf>2</inf> methanation

Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

Japanese Journal of Applied Physics   62 ( SL )   2023年9月

Single-step fabrication of fibrous Si/Sn composite nanowire anodes by high-pressure He plasma sputtering for high-capacity Li-ion batteries 査読

Giichiro Uchida, Kodai Masumoto, Mikito Sakakibara, Yumiko Ikebe, Shinjiro Ono, Kazunori Koga, Takahiro Kozawa

Scientific Reports   13 ( 1 )   2023年9月

Influence of electric potential-induced by atmospheric pressure plasma on cell response

Takamasa Okumura, Chia-Hsing Chang, Kazunori Koga, Masaharu Shiratani, Takehiko Sato

Scientific Reports   13 ( 1 )   2023年9月

Improving the efficiency of Sabatier reaction through H₂O removal with low-pressure plasma catalysis

Taiki Hasegawa, Susumu Toko, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics   62 ( SL )   SL1028 - SL1028   2023年8月

Optical emission spectroscopy study in CO<inf>2</inf> methanation with plasma

Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

Japanese Journal of Applied Physics   62   2023年7月

Instant switching control between two types of plasma-driven liquid flows 査読

Toshiyuki Kawasaki, Kecheng Shen, Heping Shi, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics_Rapid Communication   62 ( 6 )   060904-1 - 060904-4   2023年6月

Editorial: Prospects of plasma generated species interaction with organic and inorganic materials

Pankaj Attri, Kazunori Koga, Hirofumi Kurita, Kenji Ishikawa, Masaharu Shiratani

Frontiers in Physics   10   2023年1月

Role of insoluble atoms in the formation of a three-dimensional buffer layer in inverted Stranski–Krastanov mode

38 ( 5 )   1178 - 1185   2023年1月

One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges

Iori Nagao, Kunihiro Kamataki, Akihiro Yamamoto, Michihiro Otaka, Yuma Yamamoto, Daisuke Yamashita, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

MRS Advances   7 ( 31 )   911 - 917   2022年12月

Effects of substrate surface polarity on heteroepitaxial growth of pseudobinary ZnO–InN alloy films on ZnO substrates

38 ( 7 )   1803 - 1812   2022年11月

Raman spectral analysis of the as-deposited a-C:H films prepared by CH4+ Ar plasma CVD

Shinjiro Ono, Sung Hwa Hwang, Takamasa Okumura, Kunihiro Kamataki, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Jun-Seok Oh, Susumu Takabayashi, Tatsuyuki Nakatani

MRS ADVANCES   7 ( 30 )   718 - 722   2022年11月

Effects of amplitude modulated capacitively coupled discharge Ar plasma on kinetic energy and angular distribution function of ions impinging on electrodes: particle-in-cell/Monte Carlo collision model simulation

Kohei Abe, Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics   61 ( 10 )   106003 - 106003   2022年9月

Detection of NO3− introduced in plasma-irradiated dry lettuce seeds using liquid chromatography-electrospray ionization quantum mass spectrometry (LC-ESI QMS)

12 ( 1 )   2022年7月

Treatment of organic wastewater by a combination of non-thermal plasma and catalyst: a review

Pankaj Attri, Kazunori Koga, Takamasa Okumura, Fadzai L. Chawarambwa, Tika E. Putri, Yuichi Tsukada, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani

Reviews of Modern Plasma Physics   6 ( 1 )   2022年7月

Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma

Michihiro Otaka, Toshiaki Arima, Jiansyun Lai, Kizuki Ikeda, Kunihiro Kamataki, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

MRS Advances   7 ( 31 )   918 - 922   2022年7月

Growth of Single-Crystalline ZnO Films on 18%-Lattice-Mismatched Sapphire Substrates Using Buffer Layers with Three-Dimensional Islands

Yuta Nakamura, Naoto Yamashita, Kunihiro Kamataki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

Crystal Growth & Design   22 ( 6 )   3770 - 3777   2022年6月

Performance comparison of nitrile-based liquid electrolytes on bifacial dye-sensitized solar cells under low-concentrated light

Tika E. Putri, Fadzai L. Chawarambwa, Pankaj Attri, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

MRS Advances   7 ( 21 )   427 - 432   2022年5月

Epitaxial growth of Zn1−xMgxO films on sapphire substrates via inverted Stranski-Krastanov mode using magnetron sputtering

2022年2月

Outcomes of Pulsed Electric Fields and Nonthermal Plasma Treatments on Seed Germination and Protein Functions

Pankaj Attri, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Douyan Wang, Katsuyuki Takahashi, Koichi Takaki

Agronomy   12 ( 2 )   2022年2月

Functional nitrogen science based on plasma processing: quantum devices, photocatalysts and activation of plant defense and immune systems

Toshiro Kaneko, Hiromitsu Kato, Hideaki Yamada, Muneaki Yamamoto, Tomoko Yoshida, Pankaj Attri, Kazunori Koga, Tomoyuki Murakami, Kazuyuki Kuchitsu, Sugihiro Ando, Yasuhiro Nishikawa, Kentaro Tomita, Ryo Ono, Tsuyohito Ito, Atsushi M. Ito, Koji Eriguchi, Tomohiro Nozaki, Takayoshi Tsutsumi, Kenji Ishikawa

Japanese Journal of Applied Physics   61 ( SA )   SA0805 - SA0805   2022年1月

Effect of gas flow rate and discharge volume on CO2 methanation with plasma catalysis 査読

Susumu Toko, Masashi Ideguchi, Taiki Haseagawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

Japanese Journal of Applied Physics   2022年1月

Improved luminescence performance of Yb³⁺-Er³⁺-Zn²⁺: Y<inf>2</inf>O<inf>3</inf> phosphor and its application to solar cells

Fadzai Lesley Chawarambwa, Tika Erna Putri, Sung Hwa Hwang, Pankaj Attri, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Daisuke Nakamura, Masaharu Shiratani

Optical Materials   123   2022年1月

Impact of seed color and storage time on the radish seed germination and sprout growth in plasma agriculture

Pankaj Attri, Kenji Ishikawa, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Vida Mildaziene

Scientific Reports   11 ( 1 )   2021年12月

Performance Characteristics of Bifacial Dye-Sensitized Solar Cells with a V-Shaped Low-Concentrating Light System

Tika E. Putri, Fadzai L. Chawarambwa, Min Kyu Son, Pankaj Attri, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ACS Applied Energy Materials   4 ( 12 )   13410 - 13414   2021年12月

Impact of Reactive Oxygen and Nitrogen Species Produced by Plasma on Mdm2–p53 Complex

22 ( 17 )   9585 - 9585   2021年9月

Comparison between Ar+CH4 Cathode and Anode Coupled Capacitively Coupled Plasma Chemical Vapor Deposition of Hydrogenated Amorphous Carbon Films 査読 国際誌

S. H. Hwang, R. Iwamoto, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani

Thin Solid Films   729   2021年7月

Highly efficient and transparent counter electrode for application in bifacial solar cells

Fadzai Lesley Chawarambwa, Tika Erna Putri, Pankaj Attri, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

Chemical Physics Letters   768   2021年4月

Impact of atmospheric pressure plasma treated seeds on germination, morphology, gene expression and biochemical responses

Pankaj Attri, Kazunori Koga, Takamasa Okumura, Masaharu Shiratani

Japanese Journal of Applied Physics   60 ( 4 )   2021年4月

Possible impact of plasma oxidation on the structure of the C-terminal domain of SARS-CoV-2 spike protein: A computational study

Pankaj Attri, Kazunori Koga, Masaharu Shiratani

Applied Physics Express   14 ( 2 )   2021年2月

Alterations of DNA Methylation Caused by Cold Plasma Treatment Restore Delayed Germination of Heat-Stressed Rice (Oryza sativa L.) Seeds 査読 国際誌

C. Suriyasak, K. Hatanaka, H. Tanaka, T. Okumura, D. Yamashita, P. Attri, K. Koga, M. Shiratani, N. Hamaoka, Y. Ishibashi

ACS Agric. Sci. Technol.   1 ( 1 )   2021年2月

Impact of surface morphologies of substrates on the epitaxial growth of magnetron-sputtered (ZnO) x (InN)1-x films

Ryota Narishige, Kentaro Kaneshima, Daisuke Yamashita, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

Japanese Journal of Applied Physics   60 ( SA )   SAAB02 - SAAB02   2021年1月

Time of Flight Size Control of Carbon Nanoparticles Using Ar+CH4 Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method

Sung Hwa Hwang, Kazunori Koga, Yuan Hao, Pankaj Attri, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani, Jun-Seok Oh, Susumu Takabayashi, Tatsuyuki Nakatani

Processes   9 ( 1 )   2 - 2   2020年12月

Experimental identification of the reactive oxygen species transported into a liquid by plasma irradiation

Toshiyuki Kawasaki, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics   59 ( 11 )   110502 - 110502   2020年11月

Low-stress diamond-like carbon films containing carbon nanoparticles fabricated by combining rf sputtering and plasma chemical vapor deposition

Sung-Hwa Hwang, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Tatsuyuki Nakatani, Masaharu Shiratani

Japanese Journal of Applied Physics   59 ( 10 )   100906 - 100906   2020年10月

Plasma agriculture from laboratory to farm: A review

Pankaj Attri, Kenji Ishikawa, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani

Processes   8 ( 8 )   2020年8月

Influence of osmolytes and ionic liquids on the Bacteriorhodopsin structure in the absence and presence of oxidative stress: A combined experimental and computational study 査読

Pankaj Attri, Jamoliddin Razzokov, Maksudbek Yusupov, Kazunori Koga, Masaharu Shiratani, Annemie Bogaerts

International Journal of Biological Macromolecules   148   657 - 665   2020年4月

Progress in photovoltaic performance of organic/inorganic hybrid solar cell based on optimal resistive Si and solvent modified poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate) junction

Hyunwoong Seo, Daisuke Sakamoto, Hakutatsu Chou, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

Progress in Photovoltaics: Research and Applications   26 ( 2 )   145 - 150   2020年2月

Effect of hydrogen dilution on the silicon cluster volume fraction of a hydrogenated amorphous silicon film prepared using plasma-enhanced chemical vapor deposition 査読

Yeonwon Kim, Kazunori Koga, Masaharu Shiratani

Current Applied Physics   20 ( 1 )   191 - 195   2020年1月

Local supply of reactive oxygen species into a tissue model by atmospheric-pressure plasma-jet exposure 査読

Toshiyuki Kawasaki, Fumiaki Mitsugi, Kazunori Koga, Masaharu Shiratani

Journal of Applied Physics   125   2019年6月

Controlling feeding gas temperature of plasma jet with Peltier device for experiments with fission yeast 査読

Shinji Yoshimura, Mitsutoshi Aramaki, Yoko Otsubo, Akira Yamashita, Kazunori Koga

Japanese Journal of Applied Physics   58 ( SE )   SEEG03 - SEEG03   2019年6月

Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development 査読

Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

Japanese Journal of Applied Physics   58 ( SE )   SE0804 - SE0804   2019年6月

Progress and perspectives in dry processes for nanoscale feature fabrication: toward intelligent processes and virtual product development 査読

Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

Japanese Journal of Physics   Vol. 58   pp. SE0804(21pp)   2019年5月

大気圧非平衡He プラズマジェットと溶液との相互作用に関する可視化研究 招待

内田 儀一郎, 竹中 弘祐, 川崎 敏之, 古閑 一憲, 白谷 正治, 節原 裕一

スマートプロセス学会誌   8 ( 2 )   58 - 63   2019年3月

Sputter Epitaxy of (ZnO)x(InN)1-x films on Lattice-mismatched Sapphire Substrate 査読

Nanoka Miyahara, Seichi Urakawa, Daisuke Yamashita, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

MRS Advances   2019年1月

Spatial correlation between density fluctuations of high energy electrons and nanoparticles in amplitude modulated capactively coupled plasma 査読

R. Zhou, K. Mori, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

J. Phys.: Conf. Ser.   2019年1月

Room-temperature fabrication of amorphous In2O3:Sn films with high electron mobility via nitrogen mediated amorphization 査読

K. Imoto, H. Wang, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

J. Phys.: Conf. Ser.   2019年1月

Effects of nitrogen impurity on zno crystal growth on Si substrates 査読

Soichiro Muraoka, Lyu Jiahao, Daisuke Yamashita, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

MRS Advances   2019年1月

Photoluminescence of (ZnO)0.82(InN)0.18 films -Incident light angle dependence- 査読

N. Miyahara, K. Iwasaki, D. Yamashita, D. Nakamura, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Mater. Sci. Forum   941   2099 - 2103   2018年12月

Impact of Gamma rays and DBD plasma treatments on wastewater treatment

Pankaj Attri, Fumiyoshi Tochikubo, Ji Hoon Park, Eun Ha Choi, Kazunori Koga, Masaharu Shiratani

Scientific Reports   8 ( 1 )   2018年12月

Cross correlation analysis of fluctuation of interactions between nanoparticles and low pressure reactive plasmas 査読

R. Zhou, K. Mori, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Mater. Sci. Forum   941   2104 - 2108   2018年12月

Effects of sputtering pressure on (ZnO)<inf>x</inf>(InN)<inf>1-x</inf> crystal film growth at 450?C 査読

N. Itagaki, K. Takeuchi, N. Miyahara, K. Imoto, H. Seo, K. Koga, M. Shiratani

Mater. Sci. Forum   941   2093 - 2098   2018年12月

Particle behavior and its contribution to film growth in a remote silane plasma

Yeonwon Kim, Kazunori Koga, Masaharu Shiratani

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films   36 ( 5 )   2018年9月

The effect of the H<inf>2</inf>/(H<inf>2</inf> + Ar) flow-rate ratio on hydrogenated amorphous carbon films grown using Ar/H<inf>2</inf>/C<inf>7</inf>H<inf>8</inf>plasma chemical vapor deposition

660   891 - 898   2018年8月

Low-Pressure Methanation of CO₂ Using a Plasma–Catalyst System

10 ( 8 )   1087 - 1090   2018年8月

Transportation of reactive oxygen species in a tissue phantom after plasma irradiation

Toshiyuki Kawasaki, Gouya Kuroeda, Ryuhei Sei, Masaaki Yamaguchi, Reishi Yoshinaga, Riho Yamashita, Hikaru Tasaki, Kazunori Koga, Masaharu Shiratani

Japanese Journal of Applied Physics   57 ( 1 )   2018年1月

色素増感太陽電池のポリマー対向電極における触媒反応の活性化 査読

徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

信学技報   117   27 - 29   2017年11月

低温プラズマによるナノ粒子の合成と太陽電池への応用 査読

古閑一憲, 徐鉉雄, 板垣奈穂, 白谷正治

信学技報   117   5 - 8   2017年11月

Low temperature rapid formation of Au-induced crystalline Ge films using sputtering deposition

Sota Tanami, Daiki Ichida, Shinji Hashimoto, Hyunwoong Seo, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   641   59 - 64   2017年11月

Hysteresis in volume fraction of clusters incorporated into a-Si:H films deposited by SiH 4 plasma chemical vapor deposition

Susumu Toko, Yoshihiro Torigoe, Kimitaka Keya, Takashi Kojima, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

Surface and Coatings Technology   326   388 - 394   2017年10月

Extension of the operational regime of the LHD towards a deuterium experiment

Y. Takeiri, T. Morisaki, M. Osakabe, M. Yokoyama, S. Sakakibara, H. Takahashi, Y. Nakamura, T. Oishi, G. Motojima, S. Murakami, K. Ito, A. Ejiri, S. Imagawa, S. Inagaki, M. Isobe, S. Kubo, S. Masamune, T. Mito, I. Murakami, K. Nagaoka, K. Nagasaki, K. Nishimura, M. Sakamoto, R. Sakamoto, T. Shimozuma, K. Shinohara, H. Sugama, K. Y. Watanabe, J. W. Ahn, N. Akata, T. Akiyama, N. Ashikawa, J. Baldzuhn, T. Bando, E. Bernard, F. Castejon, H. Chikaraishi, M. Emoto, T. Evans, N. Ezumi, K. Fujii, H. Funaba, M. Goto, T. Goto, D. Gradic, Y. Gunsu, S. Hamaguchi, H. Hasegawa, Y. Hayashi, C. Hidalgo, T. Higashiguchi, Y. Hirooka, Y. Hishinuma, R. Horiuchi, K. Ichiguchi, K. Ida, T. Ido, H. Igami, K. Ikeda, S. Ishiguro, R. Ishizaki, A. Ishizawa, A. Ito, Y. Ito, A. Iwamoto, S. Kamio, K. Kamiya, O. Kaneko, R. Kanno, H. Kasahara, D. Kato, T. Kato, K. Kawahata, G. Kawamura, M. Kisaki, S. Kitajima, W. H. Ko, M. Kobayashi, S. Kobayashi, T. Kobayashi, K. Koga, A. Kohyama, R. Kumazawa, J. H. Lee, D. Lopez-Bruna, R. Makino, S. Masuzaki, Y. Matsumoto, H. Matsuura, O. Mitarai, H. Miura, J. Miyazawa, N. Mizuguchi, C. Moon, S. Morita, T. Moritaka, K. Mukai, T. Muroga, S. Muto, T. Mutoh, T. Nagasaka, Y. Nagayama, N. Nakajima, Y. Nakamura, H. Nakanishi, H. Nakano, M. Nakata, Y. Narushima, D. Nishijima, A. Nishimura, S. Nishimura, T. Nishitani, M. Nishiura, Y. Nobuta, H. Noto, M. Nunami, T. Obana, K. Ogawa, S. Ohdachi, M. Ohno, N. Ohno, H. Ohtani, M. Okamoto, Y. Oya, T. Ozaki, B. J. Peterson, M. Preynas, S. Sagara, K. Saito, H. Sakaue, A. Sanpei, S. Satake, M. Sato, T. Saze, O. Schmitz, R. Seki, T. Seki, I. Sharov, A. Shimizu, M. Shiratani, M. Shoji, C. Skinner, R. Soga, T. Stange, C. Suzuki, Y. Suzuki, S. Takada, K. Takahata, A. Takayama, S. Takayama, Y. Takemura, Y. Takeuchi, H. Tamura, N. Tamura, H. Tanaka, K. Tanaka, M. Tanaka, T. Tanaka, Y. Tanaka, S. Toda, Y. Todo, K. Toi, M. Toida, M. Tokitani, T. Tokuzawa, H. Tsuchiya, T. Tsujimura, K. Tsumori, S. Usami, J. L. Velasco, H. Wang, T. -H. Watanabe, T. Watanabe, J. Yagi, M. Yajima, H. Yamada, I. Yamada, O. Yamagishi, N. Yamaguchi, Y. Yamamoto, N. Yanagi, R. Yasuhara, E. Yatsuka, N. Yoshida, M. Yoshinuma, S. Yoshimura, Y. Yoshimura

NUCLEAR FUSION   57 ( 10 )   2017年10月

Impact of an ionic liquid on protein thermodynamics in the presence of cold atmospheric plasma and gamma rays

Pankaj Attri, Minsup Kim, Eun Ha Choi, Art E. Cho, Kazunori Koga, Masaharu Shiratani

PHYSICAL CHEMISTRY CHEMICAL PHYSICS   19 ( 37 )   25277 - 25288   2017年10月

Performance enhancement of quantum dot-sensitized solar cells based on polymer nano-composite catalyst

Hyunwoong Seo, Chandu V. V. M. Gopi, Hee-Je Kim, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ELECTROCHIMICA ACTA   249   337 - 342   2017年9月

The protective action of osmolytes on the deleterious effects of gamma rays and atmospheric pressure plasma on protein conformational changes

Pankaj Attri, Minsup Kim, Thapanut Sarinont, Eun Ha Choi, Hyunwoong Seo, Art E. Cho, Kazunori Koga, Masaharu Shiratani

SCIENTIFIC REPORTS   7   2017年8月

低温プラズマによるナノ粒子の合成と太陽電池への応用 (有機エレクトロニクス)

古閑 一憲, 徐 鉉雄, 板垣 奈穂, 白谷 正治

電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   117 ( 8 )   5 - 8   2017年4月

Densities and Surface Reaction Probabilities of Oxygen and Nitrogen Atoms During Sputter Deposition of ZnInON on ZnO

Koichi Matsushima, Tomoaki Ide, Keigo Takeda, Masaru Hori, Daisuke Yamashita, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

IEEE TRANSACTIONS ON PLASMA SCIENCE   45 ( 2 )   323 - 327   2017年3月

Influence of plasma irradiation on silkworm

Akira Yonesu, Kazunori Koga, Masaharu Shiratani, Nobuya Hayashi

Plasma Medicine   7   313 - 320   2017年1月

ホッとひといき プラズマのほどよい刺激で植物がスクスク育つ

古閑 一憲

応用物理   86 ( 1 )   55 - 58   2017年1月

Effects of nonthermal plasma jet irradiation on the selective production of H2O2 and NO2- in liquid water

Giichiro Uchida, Atsushi Nakajima, Taiki Ito, Kosuke Takenaka, Toshiyuki Kawasaki, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

JOURNAL OF APPLIED PHYSICS   120 ( 20 )   2016年11月

Optical Bandgap Energy of Si Nanoparticle Composite Films Deposited by a Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method

Susumu Toko, Yoshinori Kanemitsu, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY   16 ( 10 )   10753 - 10757   2016年10月

Effects of plasma irradiation using various feeding gases on growth of Raphanus sativus L.

Thapanut Sarinont, Takaaki Amano, Pankaj Attri, Kazunori Koga, Nobuya Hayashi, Masaharu Shiratani

ARCHIVES OF BIOCHEMISTRY AND BIOPHYSICS   605   129 - 140   2016年9月

Surface Modification of Polymer Counter Electrode for Low Cost Dye-sensitized Solar Cells

Hyunwoong Seo, Min-Kyu Son, Shinji Hashimoto, Toshiyuki Takasaki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ELECTROCHIMICA ACTA   210   880 - 887   2016年8月

Effect of Sulfur Doped TiO2 on Photovoltaic Properties of Dye-Sensitized Solar Cells

Hyunwoong Seo, Sang-Hun Nam, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Jin-Hyo Boo

ELECTRONIC MATERIALS LETTERS   12 ( 4 )   530 - 536   2016年7月

Two-dimensional concentration distribution of reactive oxygen species transported through a tissue phantom by atmospheric-pressure plasma-jet irradiation

Toshiyuki Kawasaki, Akihiro Sato, Shota Kusumegi, Akihiro Kudo, Tomohiro Sakanoshita, Takuya Tsurumaru, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani

APPLIED PHYSICS EXPRESS   9 ( 7 )   2016年7月

Correlation between SiH2/SiH and light-induced degradation of p-i-n hydrogenated amorphous silicon solar cells 査読

Kimitaka Keya, Takashi Kojima, Yoshihiro Torigoe, Susumu Toko, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   55 ( 7 )   2016年7月

Correlation between SiH

Keya Kimitaka, Kojima Takashi, Torigoe Yoshihiro, Toko Susumu, Yamashita Daisuke, Seo Hyunwoong, Itagaki Naho, Koga Kazunori, Shiratani Masaharu

Jpn. J. Appl. Phys.   55 ( 7 )   07LE03   2016年6月

Improvement of Charge Transportation in Si Quantum Dot-Sensitized Solar Cells Using Vanadium Doped TiO2

Hyunwoong Seo, Daiki Ichida, Shinji Hashimoto, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Sang-Hun Nam, Jin-Hyo Boo

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY   16 ( 5 )   4875 - 4879   2016年5月

Effects of irradiation distance on supply of reactive oxygen species to the bottom of a Petri dish filled with liquid by an atmospheric O-2/He plasma jet

Toshiyuki Kawasaki, Shota Kusumegi, Akihiro Kudo, Tomohiro Sakanoshita, Takuya Tsurumaru, Akihiro Sato, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani

JOURNAL OF APPLIED PHYSICS   119 ( 17 )   2016年5月

Polymer counter electrode of poly(3,4-ethylenedioxythiophene):Poly(4-styrenesulfonate) containing TiO2 nano-particles for dye-sensitized solar cells

Hyunwoong Seo, Min-Kyu Son, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JOURNAL OF POWER SOURCES   307   25 - 30   2016年3月

Quantum Characterization of Si Nano-Particles Fabricated by Multi-Hollow Discharge Plasma Chemical Vapor Deposition

Hyunwoong Seo, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

SCIENCE OF ADVANCED MATERIALS   8 ( 3 )   636 - 639   2016年3月

Effects of gas flow rate on deposition rate and number of Si clusters incorporated into a-Si:H films

Susumu Toko, Yoshihiro Torigoe, Kimitaka Keya, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   55 ( 1 )   2016年1月

Simple method of improving harvest by nonthermal air plasma irradiation of seeds of Arabidopsis thaliana (L.)

Kazunori Koga, Sarinont Thapanut, Takaaki Amano, Hyunwoong Seo, Naho Itagaki, Nobuya Hayashi, Masaharu Shiratani

APPLIED PHYSICS EXPRESS   9 ( 1 )   2016年1月

Effects of deposition rate and ion bombardment on properties of a-C:H films deposited by H-assisted plasma CVD method

Xiao Dong, Kazunori Koga, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Masaharu Shiratani, Yuichi Setsuhara, Makoto Sekine, Masaru Hori

JAPANESE JOURNAL OF APPLIED PHYSICS   55 ( 1 )   2016年1月

Influence of ionic liquid and ionic salt on protein against the reactive species generated using dielectric barrier discharge plasma

Pankaj Attri, Thapanut Sarinont, Minsup Kim, Takaaki Amano, Kazunori Koga, Art E. Cho, Eun Ha Choi, Masaharu Shiratani

SCIENTIFIC REPORTS   5   2015年12月

Gas Flow Rate Dependence of the Discharge Characteristics of a Plasma Jet Impinging Onto the Liquid Surface

Giichiro Uchida, Atsushi Nakajima, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara

IEEE TRANSACTIONS ON PLASMA SCIENCE   43 ( 12 )   4081 - 4087   2015年12月

Synthesis of Indium-Containing Nanoparticles in Aqueous Suspension Using Plasmas in Water for Evaluating Their Kinetics in Living Body

Takaaki Amano, Thapanut Sarinont, Kazunori Koga, Miyuki Hirata, Akiyo Tanaka, Masaharu Shiratani

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY   15 ( 11 )   9298 - 9302   2015年11月

Structural alternation of tandem dye-sensitized solar cells based on mesh-type of counter electrode

Hyunwoong Seo, Shinji Hashimoto, Daiki Ichida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ELECTROCHIMICA ACTA   179   206 - 210   2015年10月

Synthesis of indium-containing nanoparticles using plasmas in water to study their effects on living body 査読

T. Amano, K. Koga, T. Sarinont, H. Seo, N. Itagaki, M. Shiratani, S. Kitazaki, M. Hirata, Y. Nakatsu, A. Tanaka

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.158   2015年9月

Attraction during binary collision of fine particles in Ar plasma 査読

M. Soejima, T. Ito, D. Yamashita, N. Itagaki, H. Seo, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   GT1.018   2015年9月

Cluster Incorporation into A-Si:H Films Deposited Using H 2 +SiH 4 Discharge Plasmas 査読

S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   GT1.152   2015年9月

Cross correlation analysis of plasma perturbation in amplitude modulated reactive dusty plasmas 査読

T. Ito, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani, T. Kobayashi, S. Inagaki

Proc. 68th GEC/9th ICRP/33rd SPP609   GT1.049   2015年9月

Deposition rate and etching rate due to neutral radicals and dust particles measured using QCMs together with a dust eliminating filter 査読

R. Katayama, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, M. Tokitani, S. Masuzaki, K. Nishimura, A. Sagara, LHD Experimental Group

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.101   2015年9月

Effects of electrode structure on characteristics of multi-hollow discharges 査読

Y. Torigoe, K. Keya, S. Toko, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.129   2015年9月

Effects of N2 dilution on fabrication of Ge nanoparticles by rf sputtering 査読

S. Hashimoto, S. Tanami, H. Seo, G. Uchida, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.133   2015年9月

Laser trapped single fine particle as a probe of plasma parameters” 査読

LW1.104   2015年9月

Raman spectroscopy of PIN hydrogenated amorphous silicon solar cells 査読

K. Keya, Y. Torigoe, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.132   2015年9月

Simple Evaluation Method of Atmospheric Plasma Irradiation Dose using pH of Water 査読

K. Koga, T. Sarinont, T. Amano, H. Seo, N. Itagaki, Y. Nakatsu, A. Tanaka, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   LW1.143   2015年9月

Substrate temperature dependence of Au-induced crystalline Ge film formation using sputtering deposition 査読

S. Tanami, D. Ichida, D. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP609   GT1.149   2015年9月

Real-time mass measurement of dust particles deposited on vessel wall in a divertor simulator using quartz crystal microbalances

Mizuki Tateishi, Kazunori Koga, Ryu Katayama, Daisuke Yamashita, Kunihiro Kamataki, Hyunwoong Seo, Naho Itagaki, Masaharu Shiratani, Naoko Ashikawa, Suguru Masuzaki, Kiyohiko Nishimura, Akio Sagara

JOURNAL OF NUCLEAR MATERIALS   463   865 - 868   2015年8月

Fabrication of ZnInON/ZnO multi-quantum well solar cells

Koichi Matsushima, Ryota Shimizu, Tomoaki Ide, Daisuke Yamashita, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

THIN SOLID FILMS   587   106 - 111   2015年7月

Effects of gas flow on oxidation reaction in liquid induced by He/O-2 plasma-jet irradiation

Atsushi Nakajima, Giichiro Uchida, Toshiyuki Kawasaki, Kazunori Koga, Thapanut Sarinont, Takaaki Amano, Kosuke Takenaka, Masaharu Shiratani, Yuichi Setsuhara

JOURNAL OF APPLIED PHYSICS   118 ( 4 )   2015年7月

Effects of cluster incorporation into hydrogenated amorphous silicon films in initial discharge phase on film stability

Susumu Toko, Yoshihiro Torigoe, Weiting Chen, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   587   126 - 131   2015年7月

Effects of discharge voltage on the characteristics of a-C:H films prepared by H-assisted Plasma CVD method 査読

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Trans. Mater. Res. Soc. Jpn.   40 ( 2 )   123-128 - 128   2015年7月

Deposition of Carbon Films on PMMA Using H-assisted Plasma CVD 査読

X. Dong, R. Torigoe, K. Koga, G. Uchida, M. Shiratani, N. Itagaki, Y. Setsuhara, K. Takenaka, M. Sekine, M. Hori

Jpn. Phys. Soc. Conf. Proc (APPC12)   1   015072   2015年3月

Photovoltaic application of Si nanoparticles fabricated by multihollow plasma discharge CVD: Dye and Si co-sensitized solar cells

Hyunwoong Seo, Daiki Ichida, Shinji Hashimoto, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   54 ( 1 )   2015年1月

Dust Hour Glass in a Capacitive RF Discharge

Shinya Iwashita, Edmund Schuengel, Julian Schulze, Peter Hartmann, Zoltan Donko, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Uwe Czarnetzki

IEEE TRANSACTIONS ON PLASMA SCIENCE   42 ( 10 )   2672 - 2673   2014年10月

Visualization of the Distribution of Oxidizing Substances in an Atmospheric Pressure Plasma Jet

Toshiyuki Kawasaki, Kota Kawano, Hiroshi Mizoguchi, Yuto Yano, Keisuke Yamashita, Miho Sakai, Takako Shimizu, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani

IEEE TRANSACTIONS ON PLASMA SCIENCE   42 ( 10 )   2482 - 2483   2014年10月

Synthesis and characterization of ZnInON semiconductor: a ZnO-based compound with tunable band gap

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

MATERIALS RESEARCH EXPRESS   1 ( 3 )   2014年9月

Off-axis sputter deposition of ZnO films on c-sapphire substrates by utilizing nitrogen-mediated crystallization method 査読

Naho Itagaki, Kazunari Kuwahara, Koichi Matsushima, Daisuke Yamashita, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani

OPTICAL ENGINEERING   53 ( 8 )   87109   2014年8月

Plasma induced long-term growth enhancement of Raphanus sativus L. using combinatorial atmospheric air dielectric barrier discharge plasmas

Satoshi Kitazaki, Thapanut Sarinont, Kazunori Koga, Nobuya Hayashi, Masaharu Shiratani

CURRENT APPLIED PHYSICS   14   S149 - S153   2014年7月

Performance dependence of Si quantum dot-sensitized solar cells on counter electrode

Hyunwoong Seo, Daiki Ichida, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 5 )   2014年5月

Electrochemical impedance analysis on the additional layers for the enhancement on the performance of dye-sensitized solar cell

Hyunwoong Seo, Min-Kyu Son, Songyi Park, Myeongsoo Jeong, Hee-Je Kim, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   554   122 - 126   2014年3月

Analysis on the Photovoltaic Property of Si Quantum Dot-Sensitized Solar Cells

Hyunwoong Seo, Daiki Ichida, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING   15 ( 2 )   339 - 343   2014年2月

Performance enhancement of dye and Si quantum dot hybrid nanostructured solar cell with TiO2 barrier 査読

H. Seo, D. Ichida, S. Hashimoto, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Trans. Mater. Res. Soc. Jpn.   39 ( 3 )   321 - 324   2014年1月

Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas

Masaharu Shiratani, Kazunori Koga, Kunihiro Kamataki, Shinya Iwashita, Giichiro Uchida, Hyunwoong Seo, Naho Itagaki

JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 1 )   2014年1月

A model for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas 査読

M. Shiratani, K. Koga, K. Kamataki, S. Iwashita, Y. Morita, H. Seo, N. Itagaki, G. Uchida

Proc. 8th Int. Conf. Reactive Plasmas   4B-PM-O1   2014年1月

Analysis of fluctuation of Ar metastable density and nanoparticle amount in capacitively coupled discharges with amplitude modulation 査読

Y. Morita, T. Ito, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   5P-AM-S02-P1   2014年1月

Combinatorial evaluation of optical properties of crystalline Si nanoparticle embedded Si films deposited by a multi-hollow discharge plasma CVD method 査読

Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   6P-AM-S08-P35   2014年1月

Coupling between radicals and nanoparticles in initial growth phase in reactive plasmas with amplitude modulation 査読

K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   3B-WS-14   2014年1月

Deposition of Crystalline Ge Nanoparticle Films Varying H2 Dilution Ratio Using High Pressure rf Magnetron Sputtering 査読

S. Hashimoto, D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   6P-AM-S08-P32   2014年1月

Effects of amplitude modulation on deposition of hydrogenated amorphous silicon films using multi-Hollow discharge plasma CVD method 査読

Y. Torigoe, Y. Hashimoto, S. Toko, Y. Kim, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   6P-AM-S08-P36   2014年1月

Epitaxial growth of ZnO films on sapphire substrates by magnetron sputtering: Effects of buffer layers prepared via nitrogen mediated crystallization 査読

T. Ide, K. Matsushima, R. Shimizu, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   4P-PM-S08-P10   2014年1月

Fabrication of In-rich ZnInON filmswith narrow band gap by RF magnetron sputtering 査読

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   5P-PM-S08-P02   2014年1月

Fabrication of SiC nanoparticles as high capacity electrodes for Li-ion batteries 査読

G. Uchida, K. Kamataki, D. Ichida, Y. Morita, H. Seo, N. Itagaki, K. Koga, T. Ishihara, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   4C-PM-O1   2014年1月

Fabrication of size-controlled Ge nanoparticle films varying gas flow rate using high pressure rf magnetron sputtering method 査読

D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   6P-AM-S08-P33   2014年1月

Fine response of deposition rate of Si films deposited by multi-hollow discharge plasma CVD with amplitude modulation 査読

S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   5P-AM-S05-P17   2014年1月

Magnetron sputtering of low-resistive In2O3:Sn films with buffer layers fabricated via nitrogen mediated crystallization 査読

K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   5P-PM-S08-P07   2014年1月

Nanoparticle amount in reactive plasmas with amplitude modulation detected by twodimensional laser light scattering method 査読

T. Ito, Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   5P-AM-SPD-P01   2014年1月

Raman spectroscopy of a fine particle optically trapped in plasma”, Proc. 8th Int. Conf. Reactive Plasmas 査読

5P-AM-S05-P23   2014年1月

Spatial profile of flux of dust particles in hydrogen helicon plasmas”, Proc. 8th Int. Conf. Reactive Plasmas 査読

5P-AM-S05-P21   2014年1月

Sputter Deposition of Ga-doped Zinc Oxide (GZO) Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization 査読

T. Nakanishi, K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   5P-AM-S05-P19   2014年1月

Sputtering fabrication of a novel widegap semiconductor ZnGaON for optoelectronic devices with wide bandgap for optical device 査読

R. Shimizu, K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   5P-PM-S08-P03   2014年1月

Study on nitrogen desorption behavior of sputtered ZnO for transparent conducting oxide 査読

I. Suhariadi, K. Oshikawa, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas   5P-PM-S08-P05   2014年1月

Subacute toxicity of gallium arsenide, indium arsenide and arsenic trioxide following intermittent intrantracheal instillations to the lung of rats 査読

A. Tanaka, M. Hirata, K. Koga, N. Itagaki, M. Shiratani, N. Hayashi, G. Uchida

Proc. 8th Int. Conf. Reactive Plasmas   5P-AM-S2-P35   2014年1月

Substrate temperature dependence of hydrogen content of a-Si:H film deposited with a cluster-eliminating filter 査読

Y. Hashimoto, S. Toko, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas   6P-AM-S08-P37   2014年1月

Combinatorial Plasma CVD of Si Nanoparticle Composite Films for Band Gap Control 査読

G. Uchida, Y. Kanemitsu, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

JPS Conf. Proc   1   15080   2014年1月

Correlation between nanoparticle growth and plasma parameters in low pressure reactive VHF discharge plasmas 査読

M. Shiratani, Y. Morita, K. Kamataki, H. Seo, G. Uchida, N. Itagaki, K. Koga

JPS Conf. Proc   1   15083   2014年1月

Effects of Grid DC Bias on Incorporation of Si Clusters into Amorphous Silicon Thin Films in Multi-Hollow Discharge Plasma CVD 査読

S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

JPS Conf. Proc   1   15069   2014年1月

Effects of H2 Gas Addition on Structure of Ge Nanoparticle Films Deposited by High-pressure RF Magnetron Sputtering Method 査読

G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

JPS Conf. Proc   1   15082   2014年1月

Spatial Profile of Flux of Dust Particles Generated due to Interaction between Hydrogen Plasmas and Graphite Target 査読

M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

JPS Conf. Proc   1   15020   2014年1月

Study on the Crystal Growth Mechanism of ZnO Films Fabricated Via Nitrogen Mediated Crystallization 査読

I. Suhariadi, K. Oshikawa, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

JPS Conf. Proc   1   15064   2014年1月

Nanostructure control of Si and Ge quantum dots based solar cells using plasma processes

Masaharu Shiratani, Giichiro Uchida, Hyun Woong Seo, Daiki Ichida, Kazunori Koga, Naho Itagaki, Kunihiro Kamataki

Materials Science Forum   783-786   2022 - 2027   2014年1月

スパッタリング成膜法による高品質酸化亜鉛薄膜の形成 招待 査読

板垣奈穂, 古閑一憲, 白谷正治

応用物理   83   385 - 389   2014年1月

The improvement on the performance of quantum dot-sensitized solar cells with functionalized Si

Hyunwoong Seo, Yuting Wang, Muneharu Sato, Giichiro Uchida, Kazunori Koga, Naho Itagaki, Kunihiro Kamataki, Masaharu Shiratani

THIN SOLID FILMS   546   284 - 288   2013年11月

Characteristics of Crystalline Silicon/Si Quantum Dot/Poly(3,4-ethylenedioxythiophene) Hybrid Solar Cells

Giichiro Uchida, Yuting Wang, Daiki Ichida, Hyunwoong Seo, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 11 )   2013年11月

Correlation between Volume Fraction of Silicon Clusters in Amorphous Silicon Films and Optical Emission Properties of Si* and SiH*

Yeonwon Kim, Kosuke Hatozaki, Yuji Hashimoto, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 11 )   2013年11月

Effects of Nitrogen on Crystal Growth of Sputter-Deposited ZnO Films for Transparent Conducting Oxide

Iping Suhariadi, Kouichiro Oshikawa, Kazunari Kuwahara, Kouichi Matsushima, Daisuke Yamashita, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 11 )   2013年11月

Epitaxial Growth of ZnInON Films with Tunable Band Gap from 1.7 to 3.3 eV on ZnO Templates

Koichi Matsushima, Tadafumi Hirose, Kazunari Kuwahara, Daisuke Yamashita, Giichiro Uchida, Hyunwoong Seo, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 11 )   2013年11月

Flux Control of Carbon Nanoparticles Generated due to Interactions between Hydrogen Plasmas and Graphite Using DC-Biased Substrates

Kazunori Koga, Mizuki Tateishi, Katsushi Nishiyama, Giichiro Uchida, Kunihiro Kamataki, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Masaharu Shiratani, Naoko Ashikawa, Suguru Masuzaki, Kiyohiko Nishimura, Akio Sagara

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 11 )   2013年11月

Improvement on the electron transfer of dye-sensitized solar cell using vanadium doped TiO2

Hyunwoong Seo, Yuting Wang, Daiki Ichida, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Sang-Hun Nam, Jin-Hyo Boo

Japanese Journal of Applied Physics   52 ( 11 )   2013年11月

Study on the Fabrication of Paint-Type Si Quantum Dot-Sensitized Solar Cells

Hyunwoong Seo, Min-Kyu Son, Hee-Je Kim, Yuting Wang, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 10 )   2013年10月

Extension of operation regimes and investigation of three-dimensional currentless plasmas in the Large Helical Device

O. Kaneko, H. Yamada, S. Inagaki, M. Jakubowski, S. Kajita, S. Kitajima, Kobayashi, K. Koga, T. Morisaki, S. Morita, T. Mutoh, S. Sakakibara, Y. Suzuki, H. Takahashi, K. Tanaka, K. Toi, Y. Yoshimura, T. Akiyama, Y. Asahi, N. Ashikawa, H. Chikaraishi, A. Cooper, D. S. Darrow, E. Drapiko, P. Drewelow, X. Du, A. Ejiri, M. Emoto, T. Evans, N. Ezumi, K. Fujii, T. Fukuda, H. Funaba, M. Furukawa, D. A. Gates, M. Goto, T. Goto, W. Guttenfelder, S. Hamaguchi, M. Hasuo, T. Hino, Y. Hirooka, K. Ichiguchi, K. Ida, H. Idei, T. Ido, H. Igami, K. Ikeda, S. Imagawa, T. Imai, M. Isobe, M. Itagaki, T. Ito, K. Itoh, S. Itoh, A. Iwamoto, K. Kamiya, T. Kariya, H. Kasahara, N. Kasuya, D. Kato, T. Kato, K. Kawahata, F. Koike, S. Kubo, R. Kumazawa, D. Kuwahara, S. Lazerson, H. Lee, S. Masuzaki, S. Matsuoka, H. Matsuura, A. Matsuyama, C. Michael, D. Mikkelsen, O. Mitarai, T. Mito, J. Miyazawa, G. Motojima, K. Mukai, A. Murakami, I. Murakami, S. Murakami, T. Muroga, S. Muto, K. Nagaoka, K. Nagasaki, Y. Nagayama, N. Nakajima, H. Nakamura, Y. Nakamura, H. Nakanishi, H. Nakano, T. Nakano, K. Narihara, Y. Narushima, K. Nishimura, S. Nishimura, M. Nishiura, Y. M. Nunami, T. Obana, K. Ogawa, S. Ohdachi, N. Ohno, N. Ohyabu, T. Oishi, M. Okamoto, A. Okamoto, M. Osakabe, Y. Oya, T. Ozaki, N. Pablant, B. J. Peterson, A. Sagara, K. Saito, R. Sakamoto, H. Sakaue, M. Sasao, K. Sato, M. Sato, K. Sawada, R. Seki, T. Seki, V. Sergeev, S. Sharapov, I. Sharov, A. Shimizu, T. Shimozuma, M. Shiratani, M. Shoji, S. Sudo, H. Sugama, C. Suzuki, K. Takahata, Y. Takeiri, Y. Takemura, M. Takeuchi, H. Tamura, N. Tamura, H. Tanaka, T. Tanaka, M. Tingfeng, Y. Todo, M. Tokitani, K. Tokunaga, T. Tokuzawa, H. Tsuchiya, K. Tsumori, Y. Ueda, L. Vyacheslavov, K. Y. Watanabe, T. Watanabe, T. H. Watanabe, B. Wieland, I. Yamada, S. Yamada, S. Yamamoto, N. Yanagi, R. Yasuhara, M. Yokoyama, N. Yoshida, S. Yoshimura, T. Yoshinaga, M. Yoshinuma, A. Komori

NUCLEAR FUSION   53 ( 10 )   2013年10月

Characteristics of photocurrent generation in the near-ultraviolet region in Si quantum-dot sensitized solar cells

Giichiro Uchida, Muneharu Sato, Hyunwoong Seo, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   544   93 - 98   2013年10月

Crystallinity control of sputtered ZnO films by utilizing buffer layers fabricated via nitrogen mediated crystallization: Effects of nitrogen flow rate

N. Itagaki, K. Oshikawa, K. Matsushima, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

Proc. 13th International Conference on Plasma Surface Engineering   26   84 - 87   2013年9月

クラスタ抑制法を用いた高光安定アモルファスシリコンPIN太陽電池の作製

古閑 一憲, 橋本 優史, 金 淵元, 都甲 将, 徐 鉉雄, 板垣 奈穗, 白谷 正治, 内田 儀一郎

電気学会研究会資料. PST, プラズマ研究会   2013 ( 74 )   13 - 17   2013年9月

Control of Deposition Profile and Properties of Plasma CVD Carbon Films

K. Koga, T. Urakawa, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani

Proc. 13th International Conference on Plasma Surface Engineering   26   136 - 139   2013年9月

Effects of nanoparticle incorporation on properties of microcrystalline films deposited using multi-hollow discharge plasma CVD

Yeonwon Kim, Takeaki Matsunaga, Kenta Nakahara, Hyunwoong Seo, Kunihiro Kamataki, Giichiro Uchida, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

SURFACE & COATINGS TECHNOLOGY   228   S550 - S553   2013年8月

Observation of nanoparticle growth process using a high speed camera 査読

Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proceedings of 21st International Symposium on Plasma Chemistry   264   2013年8月

Mass density control of carbon films deposited by H-assisted plasma CVD method

Tatsuya Urakawa, Hidehumi Matsuzaki, Daisuke Yamashita, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara, Makoto Sekine, Masaru Hori

SURFACE & COATINGS TECHNOLOGY   228   S15 - S18   2013年8月

Effects of DC substrate bias voltage on dust flux in the Large Helical Device

Kazunori Koga, Katsushi Nishiyama, Yasuhiko Morita, Giichiro Uchida, Daisuke Yamashita, Kunihiro Kamataki, Hyunwoong Seo, Naho Itagaki, Masaharu Shiratani, Naoko Ashikawa, Suguru Masuzaki, Kiyohiko Nishimura, Akio Sagara

JOURNAL OF NUCLEAR MATERIALS   438   S727 - S730   2013年7月

Discharge power dependence of carbon dust flux in a divertor simulator

Katsushi Nishiyama, Yasuhiko Morita, Giichiro Uchida, Daisuke Yamashita, Kunihiro Kamataki, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoko Ashikawa, Suguru Masuzaki, Kiyohiko Nishimura, Akio Sagara, Sven Bornholdt, Holger Kersten

JOURNAL OF NUCLEAR MATERIALS   438   S788 - S791   2013年7月

Transport control of dust particles via the electrical asymmetry effect: experiment, simulation and modelling

Shinya Iwashita, Edmund Schuengel, Julian Schulze, Peter Hartmann, Zoltan Donko, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Uwe Czarnetzki

JOURNAL OF PHYSICS D-APPLIED PHYSICS   46 ( 24 )   2013年6月

Analysis on the effect of polysulfide electrolyte composition for higher performance of Si quantum dot-sensitized solar cells

Hyunwoong Seo, Yuting Wang, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ELECTROCHIMICA ACTA   95   43 - 47   2013年4月

ナノ材料のプラズマプロセシングの研究の現状と将来 招待 査読

白谷 正治, 古閑 一憲, 内田 儀一郎, Hyunwoong SEO, 板垣 奈穂, 岩下 伸也

表面科学   34 ( 10 )   520 - 527   2013年1月

H-2/N-2 Plasma Etching Rate of Carbon Films Deposited by H-Assisted Plasma Chemical Vapor Deposition

Tatsuya Urakawa, Ryuhei Torigoe, Hidefumi Matsuzaki, Daisuke Yamashita, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara, Keigo Takeda, Makoto Sekine, Masaru Hori

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 1 )   2013年1月

Dust particle formation due to interaction between graphite and helicon deuterium plasmas

Shinya Iwashita, Katsushi Nishiyama, Giichiro Uchida, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

FUSION ENGINEERING AND DESIGN   88 ( 1 )   28 - 32   2013年1月

Effects of Hydrogen Dilution on ZnO Thin Films Fabricated via Nitrogen-Mediated Crystallization

Iping Suhariadi, Koichi Matsushima, Kazunori Kuwahara, Koichi Oshikawa, Daisuke Yamashita, Hyunwoong Seo, Giichiro Uchida, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Sven Bornholdt, Holger Kersten, Harm Wulff, Naho Itagaki

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 1 )   2013年1月

High Amount Cluster Incorporation in Initial Si Film Deposition by SiH4 Plasma Chemical Vapor Deposition

Yeonwon Kim, Kosuke Hatozaki, Yuji Hashimoto, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 1 )   2013年1月

Improvement of Si Adhesion and Reduction of Electron Recombination for Si Quantum Dot-Sensitized Solar Cells

Hyunwoong Seo, Yuting Wang, Muneharu Sato, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 1 )   2013年1月

The reduction of charge recombination and performance enhancement by the surface modification of Si quantum dot-sensitized solar cell

Hyunwoong Seo, Yuting Wang, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

ELECTROCHIMICA ACTA   87   213 - 217   2013年1月

Sputter deposition of Epitaxial Zinc-Indium Oxynitride Films for Excitonic Transistors 査読

N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

Proc. International Symposium on Dry Process   34   97 - 98   2012年11月

Growth Control of Dry Yeast Using Scalable Atmospheric-Pressure Dielectric Barrier Discharge Plasma Irradiation

Satoshi Kitazaki, Kazunori Koga, Masaharu Shiratani, Nobuya Hayashi

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 11 )   2012年11月

Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Kunihiro Kamataki, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Daisuke Yamashita, Hidefumi Matsuzaki, Masaharu Shiratani

THIN SOLID FILMS   523   76 - 79   2012年11月

Effects of crystalline nanoparticle incorporation on growth, structure, and properties of microcrystalline silicon films deposited by plasma chemical vapor deposition

Yeonwon Kim, Takeaki Matsunaga, Kenta Nakahara, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   523   29 - 33   2012年11月

High quality epitaxial ZnO films grown on solid-phase crystallized buffer layers

Kazunari Kuwahara, Naho Itagaki, Kenta Nakahara, Daisuke Yamashita, Giichiro Uchida, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

THIN SOLID FILMS   520 ( 14 )   4674 - 4677   2012年5月

In situ analysis of size distribution of nano-particles in reactive plasmas using two dimensional laser light scattering method

K. Kamataki, Y. Morita, M. Shiratani, K. Koga, G. Uchida, N. Itagaki

JOURNAL OF INSTRUMENTATION   7   2012年4月

ZnO:Al Thin Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization: Effects of N2/Ar Gas Flow Rate Ratio 査読

I. Suhariadi, N. Itagaki, K. Kuwahara, K. Oshikawa, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, K. Nakahara, M. Shiratani

Trans. Mater. Res. Soc. Jpn.   37 ( 2 )   165 - 168   2012年1月

Pulmonary Toxicity of Indium Tin Oxide and Copper Indium Gallium Diselenide

Akiyo Tanaka, Miyuki Hirata, Kazunori Koga, Makiko Nakano, Kazuyuki Omae, Yutaka Kiyohara

MRS Proceedings   1469   2012年1月

Growth Enhancement of Radish Sprouts Induced by Low Pressure O-2 Radio Frequency Discharge Plasma Irradiation

Satoshi Kitazaki, Kazunori Koga, Masaharu Shiratani, Nobuya Hayashi

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 1 )   2012年1月

Combinatorial Deposition of Microcrystalline Silicon Films Using Multihollow Discharge Plasma Chemical Vapor Deposition

Kazunori Koga, Takeaki Matsunaga, Yeonwon Kim, Kenta Nakahara, Daisuke Yamashita, Hidefumi Matsuzaki, Kunihiro Kamataki, Giichiro Uchida, Naho Itagaki, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 1 )   2012年1月

Deposition of Cluster-Free B-doped Hydrogenated Amorphous Silicon Films Using SiH4+B10H14 Multi-Hollow Discharge Plasma Chemical Vapor Deposition

Kazunori Koga, Kenta Nakahara, Yeon-Won Kim, Takeaki Matsunaga, Daisuke Yamashita, Hidefumi Matsuzaki, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 1 )   2012年1月

Effect of Nitridation of Si Nanoparticles on the Performance of Quantum-Dot Sensitized Solar Cells

Giichiro Uchida, Kosuke Yamamoto, Muneharu Sato, Yuki Kawashima, Kenta Nakahara, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 1 )   2012年1月

Impacts of Amplitude Modulation of RF Discharge Voltage on the Growth of Nanoparticles in Reactive Plasmas

Kunihiro Kamataki, Hiroshi Miyata, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Masaharu Shiratani

APPLIED PHYSICS EXPRESS   4 ( 10 )   2011年10月

Comparison between silicon thin films with and without incorporating crystalline silicon nanoparticles into the film

Kazunori Koga, Takeaki Matsunaga, William Makoto Nakamura, Kenta Nakahara, Yuuki Kawashima, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani

THIN SOLID FILMS   519 ( 20 )   6896 - 6898   2011年8月

Redox Characteristics of Thiol Compounds Using Radicals Produced by Water Vapor Radio Frequency Discharge

Nobuya Hayashi, Akari Nakahigashi, Masaaki Goto, Satoshi Kitazaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 8 )   2011年8月

Nano-factories in plasma: present status and outlook

Masaharu Shiratani, Kazunori Koga, Shinya Iwashita, Giichiro Uchida, Naho Itagaki, Kunihiro Kamataki

JOURNAL OF PHYSICS D-APPLIED PHYSICS   44 ( 17 )   2011年5月

Zno films with buffer layers crystallized via nitrogen mediation: Effects of deposition temperature of buffer layers

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

Proc. PVSEC-21   4D-2P-11   2011年1月

Highly Conducting and Very Thin ZnO:Al Films with ZnO Buffer Layer Fabricated by Solid Phase Crystallization from Amorphous Phase

Naho Itagaki, Kazunari Kuwahara, Kenta Nakahara, Daisuke Yamashita, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani

APPLIED PHYSICS EXPRESS   4 ( 1 )   2011年1月

Combinatorial study of substrate temperature dependence on properties of silicon films deposited using multihollow discharge plasma CVD 査読

Y. Kim, T. Matsunaga, Y. Kawashima, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

POL08   2011年1月

Impacts of Plasma Fluctuations on Growth of Nano-Particles in Reactive Plasma

K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

D13-318   2011年1月

Collection of carbon dust particles formed due to plasma-wall interactions between high density H2 plasma and carbon wall onto substrates by applying local DC bias voltage

K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, H. Kersten

Proc. Plasma Conf. 2011   24P094-O   2011年1月

Deposition of cluster-free a-Si:H films using cluster eliminating filter

K. Nakahara, K. Hatozaki, Y. Hashimoto, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   24P010-O   2011年1月

Effects of electrolyte on performance of quantum dot-sensitized solar cells using Si nanoparticles synthesized by multi-hollow discharge plasma CVD

Y. Wang, M. Sato, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   23P013-O   2011年1月

Effects of N2 gas addition to sputtering plasma on properties of epitaxial ZnO films

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, Seo H, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   24P008-O   2011年1月

Effects of nanoparticle incorporation on Si thin films deposited by plasma CVD

M. Shiratani, Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga

Proc. Plasma Conf. 2011   24G06   2011年1月

Influence of nano-particles on multi-hollow discharge plasma for microcrystalline silicon thin films deposition

T. Matsunaga, Y. Kim, K. Koga, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Proc. Plasma Conf. 2011   24P015-O   2011年1月

Low resistive ZnO:Al films with ZnO buffer layers fabricated by Ar/N2 magnetron sputtering

N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, K. Kamataki, H. Seo, G. Uchida, K. Koga

Proc. Plasma Conf. 2011   24G6   2011年1月

Radical Flux Evaluation to Microcrystalline Silicon Films Deposited by Multi-Hollow Discharge Plasma CVD

Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011   24P011-O   2011年1月

Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD

K. Kamataki, K. Koga, G. Uchida, H. Seo, N. Itagaki, M. Shiratani

Proc. Plasma Conf. 2011   24P014-O   2011年1月

Combinatorial study on effects of substatrate temperature of silicon film deposition using multi-hollow discharge plasma cvd

Y. Kim, T. Matsunaga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

Proc. PVSEC-21   3D-2P-09   2011年1月

Defect density of cluster-free a-si:h films deposited by multi-hollow discharge plasma CVD

K. Nakahara, K. Hatozaki, M. Sato, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. PVSEC-21   3D-2P-20   2011年1月

Effects of nano-particles on (220) crystal orientation of microcrystallite silicon thin films

T. Matsunaga, Y. Kim, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Proc. PVSEC-21   4D-2P-16   2011年1月

Properties and performance of si quantum dot-sensitized solar cells with low temperature titania paste

Y. Wang, M. Sato, T. Matsunaga, N. Itagaki, H. Seo, G. Uchida, K. Koga, M. Shiratani

Proc. PVSEC-21   3D-5P-09   2011年1月

Zinc oxide-based transparent conducting films with buffer layers fabricated via nitrogen-mediated crystallization

N. Itagaki, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

Proc. PVSEC-21   4D-2P-10   2011年1月

High rate deposition of highly stable a-Si:H films using multi-hollow discharges for thin films solar cells

William Makoto Nakamura, Hidefumi Matsuzaki, Hiroshi Sato, Yuuki Kawashima, Kazunori Koga, Masaharu Shiratani

SURFACE & COATINGS TECHNOLOGY   205   S241 - S245   2010年12月

低圧プラズマによる酸化還元反応および植物成長への影響

林 信哉, 中東 朱里, 秋吉 雄介, 北崎 訓, 古閑 一憲, 白谷 正治

電気学会研究会資料. PST, プラズマ研究会   2010 ( 65 )   33 - 36   2010年12月

High rate deposition of cluster-suppressed amorphous silicon films deposited using a multi-hollow discharge plasma CVD

Kazunori Koga, Hiroshi Sato, Yuuki Kawashima, William M. Nakamura, Masaharu Shiratani

Materials Research Society Symposium Proceedings   1210   217 - 222   2010年12月

Deposition of a-Si: H Films with High Stability against Light Exposure by Reducing Deposition of Nanoparticles Formed in SiH4 Discharges

Kazunori Koga, Masaharu Shiratani, Yukio Watanabe

Industrial Plasma Technology: Applications from Environmental to Energy Technologies   247 - 257   2010年10月

Nanoblock Assembly Using Pulse RF Discharges with Amplitude Modulation

Shinya Iwashita, Hiroshi Miyata, Kazunori Koga, Masaharu Shiratani

Industrial Plasma Technology: Applications from Environmental to Energy Technologies   377 - 383   2010年10月

Deposition profile control of carbon films on patterned substrates using a hydrogen-assisted plasma CVD method

Takuya Nomura, Kazunori Koga, Kazunori Koga, Masaharu Shiratani, Masaharu Shiratani, Yuichi Setsuhara, Yuichi Setsuhara, Makoto Sekine, Makoto Sekine, Masaru Hori, Masaru Hori

Materials Research Society Symposium Proceedings   1222   203 - 207   2010年8月

Review of pulmonary toxicity of indium compounds to animals and humans

Akiyo Tanaka, Miyuki Hirata, Yutaka Kiyohara, Makiko Nakano, Kazuyuki Omae, Masaharu Shiratani, Kazunori Koga

THIN SOLID FILMS   518 ( 11 )   2934 - 2936   2010年3月

Substrate Temperature Dependence of Sticking Probability of SiOx-CH3 Nano-Particles

H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. of International Symposium on Dry Process   43 - 44   2010年1月

Carbon dust particles generated due to H2 plasma-carbon wall interaction 査読

H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, G. Uchida, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, LHD experimental group

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   CTP.00114   2010年1月

Generation of nitridated silicon particles and their thin film deposition using double multi-hollow discharges 査読

G. Uchida, M. Sato, Y. Kawashima, K. Nakahara, K. Yamamoto, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   CTP.00093   2010年1月

Optical and Electrical Properties of Particle Composite Thin Films deposited in SiH4/H2 and N2 Multi-Hollow Discharges

G. Uchida, M. Sato, Y. Kawashima, K. Yamamoto, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

Proc. of MNC2010   12D-11-66   2010年1月

P-type sp(3)-bonded BN/n-type Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method

Shojiro Komatsu, Yuhei Sato, Daisuke Hirano, Takuya Nakamura, Kazunori Koga, Atsushi Yamamoto, Takahiro Nagata, Toyohiro Chikyo, Takayuki Watanabe, Takeo Takizawa, Katsumitsu Nakamura, Takuya Hashimoto, Masaharu Shiratani

JOURNAL OF PHYSICS D-APPLIED PHYSICS   42 ( 22 )   2009年11月

Two-dimensional spatial profile of volume fraction of nanoparticles incorporated into a-Si : H films deposited by plasma CVD

William Makoto Nakamura, Hiroomi Miyahara, Hiroshi Sato, Hidefumi Matsuzaki, Kazunori Koga, Masaharu Shiratani

IEEE TRANSACTIONS ON PLASMA SCIENCE   36 ( 4 )   888 - 889   2008年8月

Discharge power dependence of H<inf>α</inf>intensity and electron density of Ar + H<inf>2</inf>discharges in H-assisted plasma CVD reactor

202 ( 22-23 )   5659 - 5662   2008年8月

Nanoparticle coagulation in fractionally charged and charge fluctuating dusty plasmas

Shota Nunomura, Masaharu Shiratani, Kazunori Koga, Michio Kondo, Yukio Watanabe

PHYSICS OF PLASMAS   15 ( 8 )   2008年8月

Temperature Dependence of Dielectric Constant of Nanoparticle Composite Porous Low-k Films Fabricated by Pulse Radio Frequency Discharge with Amplitude Modulation

Shinya Iwashita, Michihito Morita, Hidefumi Matsuzaki, Kazunori Koga, Masaharu Shiratani

JAPANESE JOURNAL OF APPLIED PHYSICS   47 ( 8 )   6875 - 6878   2008年8月

Growth Control of Clusters in Reactive Plasmas and Application to High-Stability a-Si: H Film Deposition

Yukio Watanabe, Masaharu Shiratani, Kazunori Koga

Advanced Plasma Technology   227 - 242   2008年4月

Transport of nano-particles in capacitively coupled rf discharges without and with amplitude modulation of discharge voltage

Kazunori Koga, Shinya Iwashita, Masaharu Shiratani

JOURNAL OF PHYSICS D-APPLIED PHYSICS   40 ( 8 )   2267 - 2271   2007年4月

Single step method to deposit Si quantum dot films using H-2+SiH4VHF discharges and electron mobility in a Si quantum dot solar cell

Masaharu Shiratani, Kazunori Koga, Soichiro Ando, Toshihisa Inoue, Yukio Watanabe, Shota Nunomura, Michio Kondo

SURFACE & COATINGS TECHNOLOGY   201 ( 9-11 )   5468 - 5471   2007年2月

A device for trapping nano-particles formed in processing plasmas for reduction of nano-waste

Shinya Iwashita, Kazunori Koga, Masaharu Shiratani

SURFACE & COATINGS TECHNOLOGY   201 ( 9-11 )   5701 - 5704   2007年2月