Updated on 2024/07/28

Information

 

写真a

 
SHIRATANI MASAHARU
 
Organization
Faculty of Information Science and Electrical Engineering Department of Electronics Professor
Center of Plasma Nono-interface Engineering (Joint Appointment)
School of Engineering Department of Electrical Engineering and Computer Science(Joint Appointment)
Graduate School of Information Science and Electrical Engineering Department of Electrical and Electronic Engineering(Joint Appointment)
Joint Graduate School of Mathematics for Innovation (Joint Appointment)
Title
Professor
Contact information
メールアドレス
Tel
0928023734
Profile
1)研究活動概要 プラズマプロセスは,半導体産業をはじめ様々な分野で広く使われている.今後さらに,有機,無機の様々な機能性薄膜材料や新しいデバイスの作製に応用されると考えられており,高精度のプロセス制御技術が求められている.当研究室では,新しいプラズマプロセス技術の開発とその応用について研究している.特に,長期的視野で重要なものを研究課題として選定している.主な課題として,次のような研究を行っている. 1.太陽光発電材料製造技術の研究 経済の発展と人口増加に伴う,エネルギー消費の増大と環境破壊の問題の解決が21世紀の最重要課題である.この解決には,クリーンな発電技術である太陽光発電が大きな役割を果たすと期待されており,太陽電池の高効率化と低コスト化が求められている.当研究室では,21世紀に主流となると考えられるアモルファスシリコン太陽電池の高効率化と低コスト化を実現する製造技術の研究を行っている.これまでに,種々の新しい製造技術の提案を行ってきており,その成果は国内外の研究者から注目されている. 2.微粒子を用いた新しいナノ構造デバイスの研究  ナノメートルサイズの微粒子は,サイズ効果,量子効果の発現が可能なため,これらの効果を利用した新しいナノ構造デバイスの創製が期待されている.この課題に対して,微粒子の結晶性・サイズ・位置の制御技術の開発を行っている.これまでに,青色発光を示すナノシリコン結晶微粒子の作製に成功している. 3.次世代大規模集積回路内配線技術の開発  高集積化が進むにつれて,集積回路内の配線長は長くなり21世紀初頭には,配線総延長は数kmを越えると予想されている.このため今後は,トランジスタより配線が集積回路の性能,歩留まり,信頼性を決めるようになる.このような観点から,プラズマCVD法による銅配線形成技術を開発中であり,既に高純度の銅をサブミクロン幅の溝に埋め込むことに成功している. これまでの研究成果に対して,1991,1996年度に電気学会優秀論文発表賞を,1998年度には日本学術振興会プラズマ材料科学賞を受賞した. 2)教育活動  学内においては学部では,プラズマエレクトロニクス,電磁気学I,電気情報工学卒業研究を,大学院では,プラズマプロセス基礎特論,ナノ集積システム工学演習,電子デバイス工学演習第一,電子デバイス工学演習第二,電子デバイス工学演習第三,電子デバイス工学特別研究を担当している.また,学外においてはサマースクール,講習会等の講師として,全国の大学院生,および社会人を対象とした教育も行っている.

Degree

  • Doctor of Engineering(Kyushu University, Japan)

Research Interests・Research Keywords

  • Research theme:plasma agriculture

    Keyword:low temperature plasma, germination rate enhancement, growth enhancement

    Research period: 2010.4 - 2028.6

  • Research theme:Research on third generation photovoltaics

    Keyword:third generation photovoltaics, multiple exciton generation

    Research period: 2008.10

  • Research theme:Development of deposition of low-k dielectrics for next generation LSI

    Keyword:low-k dielectrics

    Research period: 2002.1

  • Research theme:Study on particle formation mechanism due to interaction between plasma and carbon wall

    Keyword:plasma wall interactionl, nuclear fusion

    Research period: 2001.1

  • Research theme:Development of Cu interconnect in next generation LSI

    Keyword:Cu interconnect

    Research period: 1998.1

  • Research theme:Study on formation mechanism and control of particles in processing plasmas

    Keyword:processing plasma, particle

    Research period: 1987.1

  • Research theme:Study on high rate deposition of high quality materials for solar cells

    Keyword:amorphous silicon

    Research period: 1987.1

Awards

  • 2023 Plasma Materials Science Hall of Fame Prize

    2023.3  

  • ICRP Most Cited Paper Award

    2022.10  

  • 第12回 シリコンテクノロジー分科会論文賞

    2021.3   応用物理学会シリコンテクノロジー分科会   Real-time monitoring of surface passivationof crystalline silicon during growth of amorphous and epitaxial silicon layer

  • MRS-J貢献賞

    2019.11   日本MRS   日本MRSに多大な貢献した人を顕彰.

  • TOP DOWNLOADED ARTICLE 2017-2018

    2019.6   Plasma Processes and Polymers  

  • 応用物理学会支部貢献賞

    2018.12   応用物理学会九州支部   応用物理学会九州支部への顕著な貢献

  • 大阪大学接合科学共同利用・共同研究賞

    2017.6   大阪大学接合科学研究所   KI-デンプン試薬を用いた大気圧非平衡プラズマジェット照射による酸化反応の可視化研究(世界初)を共同研究で実施した.

  • 第14回プラズマエレクトロニクス賞

    2016.3   応用物理学会プラズマエレクトロニクス分科会   "Synthesis and characterization of ZnInON semiconductor: a ZnO-based compound with tunable band gap" N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

  • 第17回プラズマ材料科学賞基礎部門賞

    2015.12   日本学術振興会プラズマ材料科学第153委員会   新学術領域研究「プラズマとナノ界面の相 互作用に関する学術基盤の創成」を始めとするプラズマ材料科学に関する基礎研究の推進

  • ICMAP2014 Best Poster Presentation Award

    2014.7   International Conference of Microelectronics ans Plasma Technology 2014 (ICMAP2014)  

  • 第7回(2013年度)応用物理学会フェロー表彰

    2013.9   応用物理学会   プロセスプラズマの制御による新機能ナノ材料の合成に関する研究

  • The 9th Asian-European International Conference of Plasma Surface Engineering(AEPSE2013)/ Outstanding Poster Award

    2013.8   "Time evolution of spatial profile of nanoparticle amount in reactive plasmas" Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga and M. Shiratani

  • 平成24年度九州大学研究活動表彰

    2012.11   九州大学   研究活動に対する表彰

  • Advanced Plasma Application Award

    2012.10   11th Asia Pacific Conference on Plasma Science adn Technology (APCPST) & 25th Symposium on Plasma Science for Materials (SPSM)  

  • ISPlasma2012 "Best Presentation Award"

    2012.3   ISPlasma2012  

  • 平成23年度高温学会論文賞

    2011.3   社団法人高温学会   フレキシブルデバイス創製に向けたプラズマ−ソフトマテリアル相互作用の解析 趙研, 節原裕一, 竹中弘祐, 白谷正治, 関根誠, 堀勝

  • 平成22年九州大学研究活動表彰

    2010.5   九州大学   研究活動に対する表彰

  • 応用物理学会第8回APEX/JJAP編集貢献賞

    2010.4   応用物理学会   APEX/JJAP編集への貢献により受賞

  • 平成21年九州大学産学連携活動表彰

    2009.5   九州大学   産学連携活動に対する表彰

  • Invited Presentation Award at Interfinish 2008

    2008.6   Interfinish 2008 World Congress and Exposition   In recognition of your distinguished invited presentation entitled "Deposition profile control of plasma CVD films on nano-patterned substrates", the Intefinish 2008 Committee presents you with this Invited Presentation Award.

  • 応用物理学会第3回プラズマエレクトロニクス賞

    2005.3   応用物理学会プラズマエレクトロニクス分科会   高光安定性を示すアモルファスシリコンの作製に成功した.

  • 応用物理学会第2回プラズマエレクトロニクス賞

    2004.3   応用物理学会プラズマエレクトロニクス分科会  

  • 日本学術振興会第1回プラズマ材料科学賞

    1998.1   日本学術振興会  

  • 平成7年度電気学会論文発表賞A

    1996.3   電気学会  

  • 平成3年度電気学会論文発表賞B

    1992.4   電気学会  

  • 九州大学工学部電気工学教室宮崎賞

    1983.3   九州大学  

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Papers

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Books

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Presentations

  • 日本の大学から(招待講演) Invited

    白谷正治

    2024.1 

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    Event date: 2024.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学   Country:Japan  

  • Tuning Properties of Plasma Deposition Films in Unconventional Ways(Plenary) Invited International conference

    2023.11 

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    Event date: 2023.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:BPEX   Country:Korea, Republic of  

  • Quantitative Analysis of Plasma Irradiation Dose to Seeds (Invited) Invited International conference

    M. Shiratani

    AEPSE 2023  2023.11 

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    Event date: 2023.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • An on-site plasma system for producing nitrogen fertilizers to increase crop yields in an environmentally friendly manner (Invited) Invited International conference

    M. Shiratani

    The 65th KVS Summer Annual Conference & IFFM 2023  2023.8 

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    Event date: 2023.8

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Ion Trajectory Control in Processing Plasmas for Nano-Fabrication(keynote) Invited International conference

    2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Venue:ウィーン工科大学   Country:Austria  

  • Analysis of the Correlation between Seeds Dormancy and Plasma Irradiation Effects on Seeds(Invited) Invited International conference

    M. Shiratani

    IWOPA4  2023.6 

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    Event date: 2023.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Plasma Agriculture: An Emerging Field (Invited) Invited International conference

    M. Shiratani

    IWOPA4  2023.6 

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    Event date: 2023.6

    Language:English   Presentation type:Public lecture, seminar, tutorial, course, or other speech  

    Country:Korea, Republic of  

  • Expanding plasma technologies for sustainable world(Plenary) Invited International conference

    2023.7 

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    Event date: 2023.5 - 2023.6

    Language:English   Presentation type:Oral presentation (general)  

    Venue:the Convention Centre in Strasbourg, France.   Country:France  

  • Tuning Mechanical Properties of Plasma CVD a-C:H films using Carbon Nanoparticles(Invited) Invited International conference

    M. Shiratani

    ICDDPS-4  2023.4 

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    Event date: 2023.4

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマ成膜の革新を目指して (招待講演) Invited

    白谷正治

    2023.3 

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  • 機械学習・量子アニーリングを活用したプラズマプロセスの解析と制御 (招待講演) Invited

    白谷正治, 鎌滝晋礼

    第70回応用物理学会 春季学術講演会  2023.3 

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:上智大学   Country:Japan  

  • Tuning Deposition Profiles and Stress of Plasma CVD Carbon Films (Award Commemorative Speech) Invited International conference

    M. Shiratani

    ISPlasma2023/IC-PLANTS2023  2023.3 

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    Event date: 2023.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Si系プラズマCVD研究の現状と展望 (招待講演) Invited

    白谷正治

    学振153プラズマ材料科学委員会 第161回研究会  2023.1 

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    Event date: 2023.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:TKP ガーデンシティ PREMIUM 京橋   Country:Japan  

  • Plasma deposition of nanostructure tuning films (Invited) Invited International conference

    15th International Conference on Plasma Science and Applications  2022.12 

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    Event date: 2022.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:India  

  • Plasma Agriculture: An Emerging Field (Invited) Invited International conference

    M. Shiratani

    ICPP 2022  2022.11 

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    Event date: 2022.11 - 2022.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Electric Field Vector Deduced from Balance of Forces Exerted on a Fine Particle Immersed in Discharge Plasma(Invited) Invited International conference

    M. Shiratani, T. Sato, K. Kamataki

    iPlasmaNano-XI 2022  2022.9 

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    Event date: 2022.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Spain  

  • Identification of key plasma process parameters using support vector machine(Invited) Invited International conference

    M. shiratani

    Second Meeting of the NTC Technical Committee on Emerging Plasma Nanotechnologies  2022.5 

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    Event date: 2022.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Dusty Plasma: Scientific and Technological Impacts(Invited) Invited International conference

    M. Shiratani

    5th Asia-Pacific Conference on Plasma Physics  2021.9 

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    Event date: 2021.9 - 2021.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマ農業の現在と将来(招待講演) Invited

    白谷正治

    名古屋大学プラズマ研究会60周年記念シンポジウム  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Novel methods for tuning film properties using nanostructures(Invited) Invited International conference

    M. Shiratani

    Plathinium 2021  2021.9 

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    Event date: 2021.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:France  

  • Ambient radiant energy source for powering IoT devices(Invited) Invited International conference

    M. Shiratani, F. L. Chawarambwa, T. E. Putri, K. Koga, K. Kamataki, M. Son, H. Seo

    Thermec2021  2021.6 

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    Event date: 2021.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Austria  

  • Sputtering Growth of Metal Oxynitride Semiconductors for Excitonic Devices(Invited) Invited International conference

    M. Shiratani

    EDTM2021  2021.4 

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    Event date: 2021.4

    Language:English   Presentation type:Oral presentation (general)  

    Country:China  

  • c-Si表面パッシベーションにおけるプラズマ誘起欠陥とバンド構造(招待講演) Invited

    白谷 正治

    第68回応用物理学会春季学術講演会  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • プラズマナノテクノロジーの学術変革(招待講演) Invited

    白谷正治

    応用物理学会プラズマエレクトロニクス分科会30周年記念シンポジウム  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Applications of Low Temperature Plasma to Agriculture in Preharvest Stage (Invited) Invited International conference

    M. Shiratani, P.Attri, T. Okumura, K. Koga

    ICMAP 2020 & ISFM 2020  2021.1 

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    Event date: 2021.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • 低温低圧プラズマ触媒法による二酸化炭素の資源化(招待講演) Invited

    第1回低温プラズマ科学研究センター(cLPS)公開シンポジウム  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Materials processing with low pressure plasma:present issues and possible solutions (Invited) Invited International conference

    白谷正治

    2020.8 

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    Event date: 2020.8

    Language:English   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • ESR Measurements of Plasma Irradiated Seed (Invited) Invited International conference

    the 1st international symposium on applied plasma science and engineering for agro and bio applications  2020.1 

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    Event date: 2020.1 - 2020.2

    Language:English   Presentation type:Oral presentation (general)  

    Country:Thailand  

  • Methane production for energy storage using low temperature plasma (Invited) Invited International conference

    M. Shiratani, M. Ideguchi, A. Yamamoto, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga

    7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020, 4th International Symposium on Energy Research and Application  2020.1 

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    Event date: 2020.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • プラズマ照射した種籾の圃場栽培試験

    古閑一憲, 佐藤僚哉, 吉田知晃, 有田涼, 田中颯, 廣松真弥, 鎌滝晋礼, 板垣奈穂, 白谷正治

    第36回プラズマ・核融合学会年会  2019.12 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:中部大学   Country:Japan  

  • Metabolomics Approach for Studying Effects of Atmospheric Air Plasma Irradiation to Seeds (Keynote) Invited International conference

    K. Koga, M. Shiratani, V. Mildaziene

    29th Annual Meeting of MRS-J  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Impact of Atmospheric Pressure Plasma Irradiation to Seeds on Agricultural Productivity International conference

    K. Koga, M. Shiratani

    3rd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2019)  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:China  

  • Rate Limiting Factors of Low Pressure Plasma-catalytic CO2 Methanation Process International conference

    K. Koga, A. Yamamoto, K. Kamataki, N. Itagaki, M. Shiratani

    AVS 66th International Symposium & Exhibition  2019.10 

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    Event date: 2019.10

    Language:English   Presentation type:Oral presentation (general)  

  • Non-equilibrium nanoparticle composite film process using reactive plasmas (Invited) Invited International conference

    K. Koga, M. Shiratani

    Advanced Metallization Conference 2019: 29th Asian Session (ADMETA Plus 2019)  2019.10 

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    Event date: 2019.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Ar+CH4プラズマCVDを用いて堆積した水素化アモルファスカーボン薄膜の堆積特性に対する電極基板間距離依存性

    古閑一憲, Sung Hwa Hwang, 鎌滝晋礼, 板垣奈穂, 白谷正治

    2019年度(第72回)電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州工業大学   Country:Japan  

  • Plasmas - from Laboratory to Table - (Invited) Invited International conference

    K. Koga, M. Shiratani

    The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)  2019.9 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Synthesis and deposition of a-C:H nanoparticles using reactive plasmas with a fast gas flow International conference

    K. Koga, S. H. Hwang, K. Kamataki, N. Itagaki, M. Shiratani

    The Korea-Japan Workshop on Dust Particles in Plasmas  2019.8 

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    Event date: 2019.8

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Sputter deposition of wide bandgap (ZnO)x(AlN)1-x alloys: a new material system with tunable bandgap International conference

    S. Urakawa, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Growth Mechanism of Carbon Nanoparticles In Multi-Hollow Discharge Plasma Chemical Vapor Deposition (Invited) Invited International conference

    K. Koga, S. H. Hwang, K. Kamataki, N. Itagaki M. Shiratani

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • マルチホロー放電プラズマCVD法による高品質SiN膜の低温(100度)形成

    永石翔大, 佐々木勇輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    令和元年度日本表面真空学会 九州支部学術講演会(九州表面・真空研究会2019)  2019.6 

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    Event date: 2019.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡大学   Country:Japan  

  • Deposition of Carbon Nanoparticles Using Multi-Hollow Discharge Plasma CVD for Synthesis of Carbon Nanoparticle Composite Films International conference

    K. Koga, S. H. Hwang, T. Nakatani, J. S. Oh, K. Kamataki, N. Itagaki, M.Shiratani

    46th International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2019)  2019.5 

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    Event date: 2019.5

    Language:English   Presentation type:Oral presentation (general)  

  • 微粒子プラズマにおける2体衝突運動の顕微高速観察

    古閑一憲, 大友洋, 真銅雅子, 鎌滝晋礼, 板垣奈穂, 白谷正治

    日本物理学会第74回年次大会(2019年)  2019.3 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • Spatial Profile of RONS Dose Supplied by a Scalable DBD Device International conference

    K. Koga, Y. Wada, R. Sato, R. Shimada, D. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani, T. Kawasaki

    The 3rd Asian Applied Physics Conference  2018.12 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • カイワレ大根種皮の色素に対するプラズマ照射の効果

    古閑一憲, 嶋田凌太郎, 和田陽介, 佐藤僚哉, 山下大輔, 鎌滝晋礼, 板垣奈穂, 白谷正治, Vida Mildaziene

    第35回プラズマ・核融合学会年会  2018.12 

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    Event date: 2018.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:大阪大学   Country:Japan  

  • Innovative Agricultural Productivity Improvement Using Atmospheric Pressure Plasmas (Invited) Invited International conference

    K. Koga, M. Shiratani

    2018 MRS Fall Meeting & Exhibit  2018.11 

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    Event date: 2018.11

    Language:English   Presentation type:Oral presentation (general)  

  • Evaluation of Amount of RONS Transport and Absorption of Seeds International conference

    K. Koga, Y. Wada, R. Sato, D. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani

    2018 MRS Fall Meeting & Exhibit  2018.11 

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    Event date: 2018.11

    Language:English   Presentation type:Oral presentation (general)  

  • 反応性プラズマとナノ粒子相互作用ゆらぎネットワーク解析

    古閑一憲

    第34回九州・山口プラズマ研究会  2018.11 

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    Event date: 2018.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:シーサイドホテル屋久島, 鹿児島   Country:Japan  

  • Synthesis of Hydrogenated Amorphous Carbon Nanoparticles using High-Pressure CH4+Ar Plasmas and Their Deposition International conference

    K. Koga, S. H. Hwang, K. Kamataki, N. Itagaki, T. Nakatani, M. Shiratani

    AVS 65th International Symposium & Exhibition  2018.10 

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    Event date: 2018.10

    Language:English   Presentation type:Oral presentation (general)  

  • プラズマ中二体微粒子の衝突解析による相互作用揺らぎの研究

    古閑一憲, 大友洋, 周靭, 山下大輔, 鎌滝晋礼, 板垣奈穂, 白谷正治

    2018年第79回応用物理学会秋季学術講演会  2018.9 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋国際会議場   Country:Japan  

  • Siネットワーク秩序性に対する製膜前駆体の効果

    古閑一憲, 田中和真, 原尚志, 石榴, 中野慎也, 山下大輔, 鎌滝晋礼, 板垣奈穂, 白谷正治

    2018年第79回応用物理学会秋季学術講演会  2018.9 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋国際会議場   Country:Japan  

  • Effects of cluster deposition on spatial profile of Si-Hx bond density in a-Si:H films International conference

    K. Koga, K. Tanaka, H. Hara, S. Nagaishi, D. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani

    2018 International Conference on Solid State Devices and Materials (SSDM2018)  2018.9 

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    Event date: 2018.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Challenge to precise control of chemical bond configuration in plasma CVD films International conference

    K. Koga, M. Shiratani

    RUB Japan Science Days 2018  2018.7 

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    Event date: 2018.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Germany  

  • Control of synthesis and deposition of nanoparticles using a multi-hollow discharge plasma CVD International conference

    K. Koga, M. Shiratani

    Workshop "Plasma surface interaction for technological applications"  2018.6 

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    Event date: 2018.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Germany  

  • High energy leverage method on growth enhancement of bio-mass plants using plasma seed treatment International conference

    K. Koga, Y. Wada, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

    7th International Conference on Plasma Medicine (ICPM-7)  2018.6 

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    Event date: 2018.6

    Language:English   Presentation type:Oral presentation (general)  

  • A deep insight of plasma-nanoparticle interaction Invited International conference

    K. Koga, K. Kamataki, N. Itagaki, M. Shiratani

    19th International Congress on Plasma Physics  2018.6 

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    Event date: 2018.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Canada  

  • 水素原子源付プラズマCVD法に任意電圧波形を併用したa-C:H薄膜の堆積

    古閑一憲, 山木健司, 方トウジュン, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

    第65回応用物理学会春季学術講演会  2018.3 

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    Event date: 2018.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

  • 大気圧空気誘電体バリア放電プラズマを照射したカイワレ種子の電子スピン共鳴分光

    古閑一憲, 和田陽介, 佐藤僚哉, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

    第65回応用物理学会春季学術講演会  2018.3 

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    Event date: 2018.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

  • 任意電圧波形を用いたC7H8+Ar+H2プラズマ生成

    古閑一憲, 山木健司, 方トウジュン, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

    平成30年電気学会全国大会  2018.3 

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    Event date: 2018.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • Effects of RONS Dose on Plasma Induced Growth Enhancement of Radish Sprout International conference

    K. Koga, Y. Wada, R. Sato, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

    2nd International Workshop On Plasma Agriculture (IWOPA2)  2018.3 

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    Event date: 2018.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Plasma Enhanced Carbon Recycling for Large-Scale Introduction of Solar Cells to Energy Supply Chain Invited International conference

    K. Koga, Y. Wada, R. Sato, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

    5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application  2018.2 

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    Event date: 2018.2

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Towards ultra-high capacity batteries International conference

    K. Koga, G. Uchida, M. Shiratani

    Joint workshop btw SKKU and Kyushu University Emerging materials and devices  2018.1 

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    Event date: 2018.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • A new insight into nanoparticle-plasma interactions (Invited) Invited International conference

    K. Koga, K. Mori, R. Zhou, H. Seo, N. Itagaki, M. Shiratani

    JP-KO dust workshop  2017.12 

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    Event date: 2017.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Evaluation of coupling among interaction fluctuations in nanoparticle growth in reactive plasmas International conference

    K. Koga, K. Mori, R. Zhou, H. Seo, N. Itagaki, M. Shiratani

    18th Workshop on Fine Particle Plasmas  2017.12 

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    Event date: 2017.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Deposition of High Quality Silicon Thin Films Utilizing Nanoparticles Trapped in Plasmas International conference

    K. Koga, T. Kojima, S. Toko, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

    27th annual meeting of MRS-J  2017.12 

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    Event date: 2017.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Number Density of Seeds on Plasma Induced Plant Growth Enhancement International conference

    K. Koga, Y. Wada, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

    27th annual meeting of MRS-J  2017.12 

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    Event date: 2017.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Gas Flow Velocity on Plant Growth of Radish Sprout International conference

    K. Koga, Y. Wada, R. Sato, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

    The 2nd Asian Applied Physics Conference (Asian-APC)  2017.12 

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    Event date: 2017.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 植物種子へのプラズマ照射効果による成長促進とその機序(シンポジウム講演) Invited

    古閑一憲, 白谷正治

    2017.11 

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    Event date: 2017.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:姫路商工会議所   Country:Japan  

  • Development of a fine particle transport analyzer for processing plasmas International conference

    K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

    The 39th International Symposium on Dry Process (DPS 2017)  2017.11 

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    Event date: 2017.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 反応性プラズマを用いた物質機能の初期階層形成

    古閑一憲

    第33回九州・山口プラズマ研究会  2017.11 

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    Event date: 2017.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:長崎にっしょうかん   Country:Japan  

  • Surface-driven CH4 generation from CO2 in Low-pressure Non-thermal Plasma International conference

    K. Koga, S. Toko, S. Tanida, M. Shiratani

    American Vacuum Society 64th International Symposium and Exhibition (AVS64)  2017.10 

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    Event date: 2017.10 - 2017.11

    Language:English   Presentation type:Oral presentation (general)  

  • 火星上CO2のCH4資源化のための低温低圧プラズマ触媒プロセス

    古閑一憲, 都甲将, 谷田知史, 白谷正治, 細田聡史, 星野健

    第61回宇宙科学技術連合講演会  2017.10 

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    Event date: 2017.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:朱鷺メッセ, 新潟   Country:Japan  

  • スケーラブルDBDプラズマのRONS照射量に対する空気流れの効果

    古閑一憲, 和田陽介, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

    平成29年度(第70回)電気・情報関係学会九州支部連合大会  2017.9 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:琉球大学   Country:Japan  

  • Hysteresis in Plasma CVD: a new path for high quality film deposition Invited International conference

    K. Koga, S. Toko, M. Shiratani

    11th Asian-European International Conference on Plasma Surface Engineering (AEPSE2017)  2017.9 

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    Event date: 2017.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • プラズマ照射した種籾への催芽処理の効果

    古閑一憲, 和田陽介, 徐鉉雄, 板垣奈穂, 白谷正治, 橋本昌隆, 小島昌治

    第78回応用物理学会秋季学術講演会  2017.9 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡国際会議場, 福岡国際センター   Country:Japan  

  • Synthesis of Nanoparticles Using Low Temperature Plasmas and Its Application to Solar Cells and Tracers in Living Body (Invited) Invited International conference

    K. Koga, H. Seo, A. Tanaka, N. Itagaki, M. Shiratani

    231st Meeting of Electrochemical Society (ECS)  2017.5 

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    Event date: 2017.5 - 2017.6

    Language:English   Presentation type:Oral presentation (general)  

  • 低温プラズマによるナノ粒子の合成と太陽電池への応用

    古閑一憲, 徐鉉雄, 板垣奈穂, 白谷正治

    電子情報通信学会有機エレクトロニクス研究会  2017.4 

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    Event date: 2017.4

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:龍郷町生涯学習センター(鹿児島県奄美大島)   Country:Japan  

  • Corrational study of fluctuation of coupling between plasmas and nanoparticles International conference

    K. Koga, K. Mori, H. Seo, N. Itagaki, M. Shiratani

    9th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 10th International Conference on Plasma Nanotechnology and Science (ISPlasma2017/IC-PLANTS2017)  2017.3 

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    Event date: 2017.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Long-term evaluation of In nanoparticle transport in living body International conference

    K. Koga, A. Tanaka, M. Hirata, T. Amano, T. Sarinont, H. Seo, N. Itagaki, M. Shiratani

    9th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 10th International Conference on Plasma Nanotechnology and Science (ISPlasma2017/IC-PLANTS2017)  2017.3 

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    Event date: 2017.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Comparision of Gamma irradation and scalable DBD on the declorization of Dyes International conference

    K. Koga, P. Attri, T. Sarinont, H. Seo, N. Itagaki, M. Shiratani

    9th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 10th International Conference on Plasma Nanotechnology and Science (ISPlasma2017/IC-PLANTS2017)  2017.3 

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    Event date: 2017.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 九州大学における反応性プラズマ精密制御CVD法の紹介(招待講演) Invited

    古閑一憲

    第1回産学共同研究検討会  2017.1 

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    Event date: 2017.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • Time evolution of cross-correlation between two fluctuations of couplings between plasmas and nanoparticles in amplitude modulated discharges International conference

    K. Koga, K. Mori, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

    17th Workshop on Fine Particle Plasmas and JAPAN-KOREA Workshop on Dust Particles 2016  2016.12 

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    Event date: 2016.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Dependence of amount of plasma activated water on growth enhancement of radish sprout International conference

    K. Koga, T. Sarinont, R. Katayama, Y. Wada, H. Seo, N. Itagaki, M. Shiratani

    26th annual meeting of MRS-J  2016.12 

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    Event date: 2016.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Comparative study on death of cells irradiated by non-thermal plasma, X-ray, and UV International conference

    K. Koga, T. Amano, T. Sarinont, R. Katayama, Y. Wada, H. Seo, N. Itagaki, M. Shiratani, A. Tanaka, Y. Nakatsu, T. Kondo

    The 1st Asian Applied Physics Conference (Asian-APC)  2016.12 

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    Event date: 2016.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 小型ダスト飛跡分析装置を用いたミラー上ダスト堆積抑制の検討

    古閑一憲, 片山龍, 方韜鈞, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男

    第33回プラズマ・核融合学会年会  2016.12 

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    Event date: 2016.11 - 2016.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東北大学   Country:Japan  

  • プラズマCVDを用いた高効率低劣化Si薄膜太陽電池の作製(招待講演) Invited

    古閑一憲

    第33回プラズマ・核融合学会年会  2016.11 

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    Event date: 2016.11 - 2016.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東北大学   Country:Japan  

  • プラズマとナノ粒子の相互作用ゆらぎの2次元空間構造の時間発展

    古閑一憲, 森研人, 徐鉉雄, 板垣奈穂, 白谷正治

    第33回プラズマ・核融合学会年会  2016.11 

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    Event date: 2016.11 - 2016.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東北大学   Country:Japan  

  • プラズマ計測・診断 -反応性プラズマ中微粒子を中心として- (招待講演) Invited

    古閑一憲

    第27回プラズマエレクトロニクス講習会  2016.11 

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    Event date: 2016.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京大学   Country:Japan  

  • Control of Plant Growth by RONS Produced Using Nonthermal Atmospheric Air Plasma International conference

    K. Koga, T. Sarinont, M. Shiratani

    American Vacuum Society 63rd International Symposium and Exhibition (AVS63)  2016.11 

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    Event date: 2016.11

    Language:English   Presentation type:Oral presentation (general)  

  • Comparative study of non-thermal atmospheric pressure discharge plasmas for life science applications International conference

    K. Koga, R. Katayama, T. Sarinont, H. Seo, N. Itagaki, P. Attri, E. L. Quiros, .A. Tanaka, M. Shiratani

    69th Annual Gaseous Electronics Conference (GEC2016)  2016.10 

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    Event date: 2016.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Germany  

  • 火星上でのロケット燃料生成を目的とした低温低圧放電プラズマによるサバティエ反応

    古閑一憲, 都甲将, 白谷正治

    第60回宇宙科学技術連合講演会  2016.9 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:函館アリーナ   Country:Japan  

  • Time development of response of cells irradiated by non-thermal atmospheric air plasma International conference

    K. Koga, T. Amano, Y. Nakatsu, H. Seo, N. Itagaki, A. Tanaka, T. Kondo, M. Shiratani

    6th International Conference on Plasma Medicine (ICPM6)  2016.9 

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    Event date: 2016.9

    Language:English   Presentation type:Oral presentation (general)  

  • Nitrite concentration of plants grown from seeds irradiated by air dielectric barrier discharge plasmas International conference

    K. Koga, T. Sarinont, P. Attri, M. Shiratani

    20th International Vacuum Congress (IVC-20)  2016.8 

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    Event date: 2016.8

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • QCMを用いたLHD内ダスト堆積量のその場測定

    古閑一憲, 片山龍, 方韜鈞, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男, LHD実験グループ

    第11回核融合エネルギー連合講演会  2016.7 

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    Event date: 2016.7

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • プラズマ中微粒子を用いたプラズマポテンシャルゆらぎの評価

    古閑一憲, 添島雅大, 伊藤鉄平, 徐鉉雄, 板垣奈穂, 白谷正治

    日本物理学会第71回年次大会  2016.3 

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    Event date: 2016.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東北学院大学   Country:Japan  

  • 「プラズマ材料科学の未来を語る」(低圧非平衡プラズマプロセス) (招待講演) Invited

    古閑一憲

    第125回研究会 APSPT9-SPSM28サテライトミーティング『プラズマ材料科学の未来を語る』  2016.2 

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    Event date: 2016.2

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:JR博多シティ会議室   Country:Japan  

  • 振幅変調反応性高周波放電中のナノ粒子量のバイスペクトル解析

    古閑一憲

    応用力学研究所共同研究報告会  2016.2 

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    Event date: 2016.2

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学応用力学研究所   Country:Japan  

  • 大気圧非平衡プラズマの基礎 (招待講演) Invited

    古閑一憲

    プラズマ・核融合学会第28回専門講習会「プラズマ医療の現状と展望」  2016.1 

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    Event date: 2016.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • Potential fluctuation evaluation using binary collision of fine particles suspended in plasmas (Invited) Invited

    K. Koga and M. Shiratani

    2015.12 

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    Event date: 2015.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 液中プラズマを用いたAuとPtナノ粒子の簡易作製法

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