Updated on 2024/07/28

Information

 

写真a

 
KAMATAKI KUNIHIRO
 
Organization
Faculty of Information Science and Electrical Engineering Department of Electronics Associate Professor
Center of Plasma Nono-interface Engineering (Joint Appointment)
School of Engineering Department of Electrical Engineering and Computer Science(Joint Appointment)
Graduate School of Information Science and Electrical Engineering Department of Electrical and Electronic Engineering(Joint Appointment)
Joint Graduate School of Mathematics for Innovation (Joint Appointment)
Title
Associate Professor
Contact information
メールアドレス
Profile
【Research】 Effect of fluctuations in plasma, Active learning in science education. Research Field: ULSI, Solar cell, Rechargeable battery, science education 【Education】 Educational research and development of physics education. Kikan-Education Seminar interdisciplinary collaborative learning of social issues Scientific seminar for a small group of arts and science students

Degree

  • Ph.D.(Kyushu University, Japan)

Research Interests・Research Keywords

  • Research theme:Integrated study of general rules for film formation by plasma processes

    Keyword:Film Formation by Plasma Processes

    Research period: 2024.4 - 2029.3

  • Research theme:Elucidation and Application of Precise Control Mechanism of Plasma Process by Controlling Discharge Technique

    Keyword:Precise Control Mechanism of Plasma Process

    Research period: 2023.4 - 2026.3

  • Research theme:Mechanism of spatio-temporal structure fluctuation formation of sheath electric field using laser trapping particles in plasma

    Keyword:Mechanism of spatio-temporal structure fluctuation formation of sheath electric field

    Research period: 2020.4 - 2024.3

  • Research theme:New TVWs discharge method in reactive plasma

    Keyword:New TVWs discharge method in reactive plasma

    Research period: 2020.4 - 2023.3

  • Research theme:Machine learning in plasma process

    Keyword:machine learning, data science

    Research period: 2018.4 - 2020.3

  • Research theme:Growth and Behavior of nanoparticles in reactive plasma

    Keyword:Growth and Behavior of nanoparticles in reactive plasma

    Research period: 2018.4 - 2020.3

  • Research theme:Effect of scientific experimental lecture for first year students

    Keyword:Experiment, Science, First year education

    Research period: 2016.4

  • Research theme:Education of Experiments for first and second year undergraduates using PBL and AL methods.

    Keyword:Experiment, Science

    Research period: 2013.4

  • Research theme:High Capacity Li Ion Battery Anodes Using Silicon Carbide Nano-particles Produced by Double Multi-Hollow Discharge Plasma CVD

    Keyword:Lithium ion battery, Si carbide nano-particle,

    Research period: 2011.10

  • Research theme:Interaction dynamics between plasma fluctuation and nano-interface property.

    Keyword:nano-interface, dyanmics, plasma

    Research period: 2011.4 - 2013.3

  • Research theme:Interaction between plasma and dust particle in space

    Keyword:Interaction between plasma and dust particle

    Research period: 2010.4

  • Research theme:Plasma Fluctuation in Plasma Processing.

    Keyword:Fluctuation, Amplitude Modulation, Nano-particle property

    Research period: 2010.4

  • Research theme:plasma turbulence and structural formation

    Keyword:plasma, fluctuation, drift wave, interchange mode

    Research period: 2004.4 - 2010.3

Awards

  • AEPSE2019 "Young Scientist Awards: Gold Prize"

    2019.9   Organizing committee of AEPSE   AEPSE2019 "Young Scientist Awards: Gold Prize"

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    プラズマの新技術を開発し、その技術を用いてナノサイズのシリコン配合のリチウムイオン電池の電極の電気容量を、炭素のみの電極と比べ、12倍以上大きくすることに成功した。プラズマの新技術とは、シリコンのサイズを数ナノレベルにし、空間的に均一に分布できるものである。これらの技術は、著者らが、世界に先駆けて開発したものである。

  • "Advanced Plasma Application Award"

    2012.10   11th Asia Pacific Conference on Plasma Science adn Technology (APCPST) & 25th Symposium on Plasma Science for Materials (SPSM)   Advanced Plasma Application Award

  • IUMRS-ICEM2012 "Young Scientist Awards: Silver Award Winners"

    2012.9   IUMRS-ICEM2012 "Young Scientist Awards: Silver Award Winners"

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    プラズマの新技術を開発し、その技術を用いてナノサイズのシリコン配合のリチウムイオン電池の電極の電気容量を、炭素のみの電極と比べ、12倍以上大きくすることに成功した。プラズマの新技術とは、シリコンのサイズを数ナノレベルにし、空間的に均一に分布できるものである。これらの技術は、著者らが、世界に先駆けて開発したものである。

  • "Best Presentation Award"

    2012.3   ISPlasma2012   Best Presentation Award

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    プラズマ中の揺らぎと、ナノ粒子成長の関係を明らかにした世界初の内容。プラズマ中の特定の揺らぎの周波数と強度をコントロールすることで、ナノ粒子のサイズと密度を変化することができることを発見した。この発見は、より高品質なナノ粒子を生成する技術開発へとつながるものである。

  • 第11回プラズマ・核融合学会 九州沖縄山口支部大会講演奨励賞

    2007.12   プラズマ・核融合学会 九州沖縄山口支部  

Papers

  • Improving the efficiency of CO2 methanation using a combination of plasma and molecular sieves Reviewed International journal

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    Results in Surfaces and Interfaces   788 ( 15 )   2024.2

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.tsf.2023.140176

  • On-axis sputtering fabrication of Tm3Fe5O12 film with perpendicular magnetic anisotropy Reviewed International journal

    M. N. Agusutrisno, C. H. Marrows, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, N. Yamashita

    Thin Solid Films   967   2024.1

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.4028/p-6v9abP

  • Ion Trajectory Control in Processing Plasmas for Nano-Fabrication Reviewed International journal

    H. Otomo, I. Nagao, K. Kamataki, M. Shiratani

    Key eng. mater   134   2023.12

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/5.0160228

  • Prediction by a hybrid machine learning model for highmobility amorphous In2O3: Sn films fabricated by RF plasma sputtering deposition using a nitrogen-mediated amorphization method Reviewed International journal

    K. Kamataki, H. Ohtomo, N. Itagaki, C. F. Lesly, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

    J. Appl. Phys.   13   2023.10

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1038/s41598-023-43897-y

  • Influence of humidity on the plasma-assisted CO2 conversion Reviewed International journal

    P. Attri, T. Okumura, N. Takeuchi, K. Kamataki, K. Koga, M. Shiratani

    Plasma Process Polym   164   2023.10

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mssp.2023.107613

  • Evaluation of Interaction Between Substrate and Nanoparticles Deposited by Plasma Chemical Vapor Deposition Reviewed

    K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    Bull. Am. Phys. Soc.   2023.10

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1002/ppap.202300141

  • Health assessment of rice cultivated and harvested from plasma-irradiated seeds Reviewed International journal

    T. Okumura, H. Tanaka, T. Nakao, T. Anan, R. Arita, M. Shiraki, K. Shiraki, T. Miyabe, D. Yamashita, K. Matsuo, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani, S. Hosoda, A. Tanaka, Y. Ishibashi, K. Koga

    Sci. Rep.   2023.10

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    Language:English   Publishing type:Research paper (scientific journal)  

  • Low-temperature fabrication of silicon nitride thin films from a SiH4+N2 gas mixture by controlling SiNx nanoparticle growth in multi-hollow remote plasma chemical vapor deposition Reviewed International journal

    K. Kamataki, Y. Sasaki, I. Nagao, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    Mater Sci Semicond Process   62   2023.9

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/acebfb

  • Reaction kinetics studies for phenol degradation under the impact of different gas bubbles and pH using gas–liquid discharge plasma Reviewed International journal

    62   2023.8

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ace831

  • Control of Inhomogeneity and Magnetic Properties of ZnO:Co Films Grown by Magnetron Sputtering Using Nitrogen Reviewed International journal

    M. N. Agusutrisno, R. Narishige, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, N. Yamashita

    Mater Sci Semicond Process   11   2023.8

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.3389/fphy.2023.1211166

  • Silicon surface passivation with a-Si:H by PECVD: growth temperature effects on defects and band offset Reviewed International journal

    S. Nunomura, I. Sakata, T. Misawa, S. Kawai, K. Kamataki, K. Koga, M. Shiratani

    Jpn. J. Appl. Phys.   162   2023.8

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mssp.2023.107503

  • Improving the efficiency of Sabatier reaction through H2O removal with low-pressure plasma catalysis Reviewed International journal

    T. Hasegawa, S. Toko, K. Kamataki, K. Koga, M. Shiratani

    Jpn. J. Appl. Phys.   62   2023.8

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ace118

  • Plasma-assisted CO2 and N2 conversion to plant nutrient Reviewed International journal

    P. Attri, T. Okumura, N. Takeuchi, K. Kamataki, K. Koga, M. Shiratani

    Front. Phys.   62   2023.7

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/acdad9

  • Contribution of active species generated in plasma to CO2 methanation Reviewed International journal

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    Jpn. J. Appl. Phys.   62   2023.7

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/acc7ab

  • Effect of time-modulation bias on polysilicon gate etching Reviewed International journal

    M. Morimoto, M.Tanaka, K. Koga, M. Shiratani

    Jpn. J. Appl. Phys.   62   2023.5

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/acc66a

  • Silicon surface passivation with a-Si:H by PECVD : Growth temperature effects on defects and band offset Reviewed International journal

    Nunomura, Shota, SAKATA Isao, Misawa Tatsuya, Kawai Shinji, KAMATAKI Kunihiro, Koga Kazunori, SHIRATANI Masaharu

    Japanese Journal of Applied Physics   2023.5

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    Language:English   Publishing type:Research paper (scientific journal)  

  • Low-temperature fabrication of silicon nitride thin films from a SiH4+N2 gas mixture by controlling SiNx nanoparticle growth in multi-hollow remote plasma chemical vapor deposition Reviewed International journal

    Kunihiro Kamataki, Yusuke Sasaki, Iori Nagao, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani

    Materials Science in Semiconductor Processing   164   107613   2023.5

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mssp.2023.107613

  • Optical emission spectroscopy study in CO2 methanation with plasma Reviewed International journal

    S. Toko, T. Hasegawa, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    Jpn. J. Appl. Phys.   2023.4

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  • Control of inhomogeneity and magnetic properties of ZnO:Co films grown by magnetron sputtering using nitrogen Reviewed International journal

    M.N. Agusutrisno, Ryota Narishige, Kunihiro Kamataki, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoto Yamashita

    Materials Science in Semiconductor Processing   162   107503   2023.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mssp.2023.107503

  • Optical emission spectroscopy study in CO2 methanation with plasma Reviewed International journal

    Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani and Yuichi Setsuhara

    Japanese Journal of Applied Physics   62   SI1008   2023.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/acc66a

  • Role of insoluble atoms in the formation of a three-dimensional buffer layer in inverted Stranski–Krastanov mode Reviewed International journal

    38 ( 5 )   1178 - 1185   2023.1

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1557/s43578-022-00886-7

  • One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges Reviewed International journal

    Iori Nagao, K. Kamataki, A. Yamamoto, M. Otaka, Y. Yamamoto, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    MRS Advances   7 ( 31 )   911 - 917   2022.12

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1557/s43580-022-00417-w

  • Effects of substrate surface polarity on heteroepitaxial growth of pseudobinary ZnO_InN alloy films on ZnO substrates Reviewed International journal

    Ryota Narishige, Naoto Yamashita, Kunihiro Kamataki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Hisato Yabuta & Naho Itagaki

    Journal of Materials Research   38 ( 7 )   1803 - 1812   2022.11

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1557/s43578-022-00827-4

  • Plasma Synthesis of Silicon Nanoparticles: From Molecules to Clusters and Nanoparticle Growth Reviewed International journal

    SHOTA NUNOMURA, KUNIHIRO KAMATAKI, TAKEHIKO NAGAI, TATSUYA MISAWA, SHINJI KAWAI, KOSUKE TAKENAKA, GIICHIRO UCHIDA, AND KAZUNORI KOGA

    IEEE Open Journal of Nanotechnology   3   94-100   2022.9

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/OJNANO.2022.3209995

  • Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma Reviewed International journal

    Kunihiro Kamataki, Daiki Nagamatsu, Tao Yang, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Toshiaki Arima, Michihiro Otaka, Yuma Yamamoto, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani

    AIP Advances   12   085220   2022.8

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: https://doi.org/10.1063/5.0097691

  • Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma Reviewed International journal

    Michihiro Otaka, Toshiaki Arima, Jiansyun Lai, Kizuki Ikeda, Kunihiro Kamataki, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga & Masaharu Shiratani

    MRS Adv.   2022.7

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1557/s43580-022-00306-2

  • Detection of NO3- introduced in plasma-irradiated dry lettuce seeds using liquid chromatography-electrospray ionization quantum mass spectrometry (LC-ESI QMS) Reviewed International journal

    12 ( 1 )   12525   2022.7

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1038/s41598-022-16641-1

  • Raman spectral analysis of the as-deposited a-C:H films prepared by CH4 + Ar plasma CVD Reviewed International journal

    2022.7

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    DOI: https://doi.org/10.1557/s43580-022-00310-6

  • Treatment of organic wastewater by a combination of non-thermal plasma and catalyst: a review Reviewed International journal

    Pankaj Attri, Kazunori Koga, Takamasa Okumura, Fadzai L. Chawarambwa, Tika E. Putri, Yuichi Tsukada, Kunihiro Kamataki, Naho Itagaki & Masaharu Shiratani

    Reviews of Modern Plasma Physics   6 ( 17 )   2022.7

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    Language:English   Publishing type:Research paper (scientific journal)  

  • Effects of amplitude modulated capacitively coupled discharge Ar plasma on kinetic energy and angular distribution function of ions impinging on electrodes: particle-in-cell/Monte Carlo collision model simulation Reviewed International journal

    Kohei Abe, Kunihiro KAMATAKI, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho ITAGAKI, Kazunori Koga and Masaharu SHIRATANI

    Japanese Journal of Applied Physics   2022.6

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  • Growth of single crystalline ZnO films on 18%-lattice-mismatched sapphire substrates using buffer layers with three-dimensional islands Reviewed International journal

    Y. Nakamura, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

    Cryst. Growth Des.   22 ( 6 )   3770 - 3777   2022.5

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1557/s43580-022-00270-x

  • Growth of single crystalline ZnO films on 18%-lattice-mismatched sapphire substrates using buffer layers with three-dimensional islands Reviewed International journal

    Y. Nakamura, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

    Cryst. Growth Des.   22 ( 6 )   3770-3777   2022.5

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1021/acs.cgd.2c00145

  • The Effects of Spin-Coating Rate on Surface Roughness, Thickness, and Electrochemical Properties of a Pt Polymer Counter Electrode Reviewed International journal

    F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Advanced Engineering Forum   116845   1 - 13   2022.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.4028/p-6l16rl

  • The Effects of Spin-Coating Rate on Surface Roughness, Thickness, and Electrochemical Properties of a Pt Polymer Counter Electrode Reviewed International journal

    F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Advanced Engineering Forum   45   1-13   2022.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.4028/p-6l16rl

  • Performance comparison of nitrile-based liquid electrolytes on bifacial dye-sensitized solar cells under low-concentrated light Reviewed International journal

    T. E. Putri, F. L. Chawarambwa, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    MRS Adv.   7   427-432   2022.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1557/s43580-022-00270-x

  • Performance comparison of nitrile-based liquid electrolytes on bifacial dye-sensitized solar cells under low-concentrated light Reviewed International journal

    T. E. Putri, F. L. Chawarambwa, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    MRS Adv.   7   427 - 432   2022.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1557/s43580-022-00270-x

  • Epitaxial Growth of Zn1-xMgxO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode Using Magnetron Sputtering Reviewed International journal

    D. Takahashi, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    MRS Adv.   7   415 - 419   2022.2

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1557/s43580-022-00234-1

  • Epitaxial Growth of Zn1-xMgxO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode Using Magnetron Sputtering Reviewed International journal

    D. Takahashi, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    MRS Adv.   7   415-419   2022.2

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1557/s43580-022-00234-1

  • Effect of gas flow rate and discharge volume on CO2 methanation with plasma catalysis Reviewed International journal

    S. Toko, M. Ideguchi, T. Hasegawa, T. Okumura, K. Kamataki, K.Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    Jpn. J. Appl. Phys.   61   SI1002   2022.1

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  • Performances of Carbon Black-Titanium nitrate and Carbon Black-Titanium/Triton X-100 Composite Polymer Counter Electrodes for Dye-Sensitized Solar Cells Reviewed International journal

    F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Adv. Mater. Res.   1168   35 - 47   2022.1

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.4028/www.scientific.net/AMR.1168.35

  • Improved luminescence performance of Yb3+-Er3+-Zn2+: Y2O3 phosphor and its application to solar cells Reviewed International journal

    F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Optical Materials   123   111928   2022.1

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.optmat.2021.111928

  • Plasma Treatment Effect on the Paramagnetic Species of Barley Seed Radical’s Intensity: An EPR study Reviewed International journal

    10 ( 3 )   159 - 168   2021.12

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1615/PlasmaMed.2020036353

  • Performance Characteristics of Bifacial Dye-Sensitized Solar Cells with a V-Shaped Low-Concentrating Light System Reviewed International journal

    T. E. Putri, F. L Chawarambwa, M. K. Son, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    ACS Appl. Energy Mater.   4 ( 12 )   13410 - 13414   2021.11

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1021/acsaem.1c02774

  • Effects of concentrated light on the performance and stability of a quasi-solid electrolyte in dye-sensitized solar cells Reviewed International journal

    F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Chem. Phys. Lett.,   781   138986   2021.10

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.cplett.2021.138986

  • Comparison between Ar+CH4 Cathode and Anode Coupled Capacitively Coupled Plasma Chemical Vapor Deposition of Hydrogenated Amorphous Carbon Films Reviewed International journal

    S. H. Hwang, R. Iwamoto, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani

    Thin Solid Films   729   2021.7

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.tsf.2021.138701

  • Highly efficient and transparent counter electrode for application in bifacial solar cells Reviewed International journal

    F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Chem. Phys. Lett.   768   2021.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.cplett.2021.138369

  • Synthesis of Yb3+/Ho3+ co-doped Y2O3 nanoparticles and its application to dye sensitized solar cells Reviewed International journal

    F. L. Chawarambwa, T. E. Putri, K. Kamataki, M. Shiratani, K. Koga, N. Itagaki, D. Nakamura

    J. Mol. Struct.   1228   2021.3

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.molstruc.2020.129479

  • Effects of Activated Carbon Counter Electrode On Bifacial Dye Sensitized Solar Cells (DSSCs) Reviewed International journal

    T. E. Putri, Y. Hao, F. L. Chawarambwa, H. Seo, Min-Kyu Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Mater. Sci. Forum   1016   2021.1

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.4028/www.scientific.net/MSF.1016.863

  • Time of Flight Size Control of Carbon Nanoparticles Using Ar+CH4 Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method Reviewed International journal

    S. H. Hwang, K. Koga, Y. Hao, P. Attri, T. Okumura, K. Kamataki, N. Itagaki, M. Shiratani, J-S. Oh, S. Takabayashi, T. Nakatani

    Processes   9 ( 1 )   2020.12

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    DOI: 10.3390/pr9010002

  • Size and flux of carbon nanoparticles synthesized by Ar+CH4 multi-hollow plasma chemical vapor deposition Reviewed International journal

    S. H. Hwang, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Diam Relat Mater   109   2020.11

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    DOI: 10.1016/j.diamond.2020.108050

  • Graphene-Si3N4 nanocomposite blended polymer counter electrode for low-cost dye-sensitized solar cells Reviewed International journal

    F. L. Chawarambwa, T. E. Putri, M. K. Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Chem. Phys. Lett.   758   2020.11

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    DOI: 10.1016/j.cplett.2020.137920

  • Synthesis of Yb3+/Ho3+ co-doped Y2O3 nanoparticles and its application to dye sensitized solar cells Reviewed International journal

    F. L. Chawarambwa, T. E. Putri, K. Kamataki, M. Shiratani, K. Koga, N. Itagaki, D. Nakamura

    J. Mol. Struct.   2020.10

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    DOI: 10.1016/j.molstruc.2020.129479

  • Low stress diamond-like carbon films containing carbon nanoparticles fabricated by combining rf sputtering and plasma chemical vapor deposition Reviewed International journal

    S. H. Hwang, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani

    Jpn. J. Appl. Phys.   59 ( 10 )   2020.10

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    DOI: 10.35848/1347-4065/abbb20

  • Impact of surface morphologies of substrates on the epitaxial growth of magnetron sputtered (ZnO)x(InN)1-x films Reviewed International journal

    R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    Jpn. J. Appl. Phys.   60 ( SA )   2020.10

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    DOI: 10.35848/1347-4065/abba0c

  • Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma Reviewed International journal

    Ren Zhou, Kunihiro Kamataki, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunoni Koga and Masaharu Shiratani

    Journal of Plasma and Fusion Research   2019.7

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  • Study on Relationship between Growth of Nanoparticles and Plasma Fluctuation due to Amplitude Modulated Discharge Voltage in Capacitively Coupled Reactive Plasma International journal

    K. Kamataki, R. Zhou, H. Ohtomo, R. Iwamoto, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    Proc. of XXXIV ICPIG & ICRP-10   2019.7

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  • 基幹教育セミナーにおける学生の意識の変容:4学期制導入に伴う授業内容の変更とセミナーの意義に焦点を当てて Reviewed

    鎌滝晋礼, 小島健太郎,飯嶋裕治,内田竜也, 大河内豊, 大久保文哉, 斎藤新悟, 猿渡悦子, セビリア・アントン, 田中真理, 野瀬健, 川島啓二, 安永和央, 木村政伸

    基幹教育紀要   2019.3

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  • Amplitude Modulation Frequency Dependence of Growth of Nano-Particles in Reactive Plasma International journal

    K. Kamataki, R. Zhou, H. Ohtomo, R. Iwamoto, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    Proceedings of 36th Symposium on Plasma Processing (SPP36) / The 31th Symposium on Plasma Science for Materials (SPSM31)   2019.1

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  • Effects of nitrogen impurity on zno crystal growth on Si substrates Reviewed International journal

    S. Muraoka, L. Jiahao, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    MRS Adv.   4 ( 27 )   1557 - 1563   2019.1

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    DOI: 10.1557/adv.2019.28

  • Relationship between Amount of Nano-particles Incorporation into SiN Film and Properties of Film by SiH4+N2 Plasma Chemical Vapor Deposition International journal

    Kunihiro Kamataki, Shota Nagaishi, Yusuke Sasaki, Kazuma Tanaka, Hisayuki Hara, Daisuke Yamashita, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    Proceedings of 36th Symposium on Plasma Processing (SPP36) / The 31th Symposium on Plasma Science for Materials (SPSM31)   2019.1

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  • Effect of Plasma Fluctuation Frequency on Growth of Nanopariticles in Reactive Plasmas International journal

    K. Kamataki, R. Zhou, H. Ohtomo, D. Yamashita, N. Itagaki, K. Koga and M. Shiratani

    Proc. of the 3rd Asian Applied Physics Conference   2018.12

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  • 課題協学科目による初年次学生の動機づけと学習観への影響 : 1つの授業実践の事例から Reviewed

    鎌滝 晋礼

    基幹教育紀要   2017.3

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  • 初年次における文系学部学生への科学実験授業の影響と意義

    鎌滝 晋礼

    第65回九州地区大学一般教育研究協議会議事録   2017.2

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  • 科学実験を用いた課題解決型授業の展開

    鎌滝 晋礼

    第64回九州地区大学一般教育研究協議会議事録   2015.9

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  • 少人数クラスによる実験系学問分野におけるグループ学習の取組事例

    鎌滝晋礼

    第63回九州地区大学一般教育研究協議会議事録   2015.3

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  • Plasma etching of single fine particle trapped in Ar plasma by optical tweezers Reviewed International journal

    T. Ito, K. Koga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida and M. Shiratani

    J. Phys. : Conf. Series.(SPSM26)   518 ( 1 )   2014.6

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    DOI: 10.1088/1742-6596/518/1/012014

  • Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method Reviewed International journal

    D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

    J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

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    DOI: 10.1088/1742-6596/518/1/012002

  • Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency Reviewed International journal

    Y. Hashimoto, S. Toko, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

    J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

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    DOI: 10.1088/1742-6596/518/1/012007

  • Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD Reviewed International journal

    S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

    J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

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    DOI: 10.1088/1742-6596/518/1/012008

  • the LHD Experimental Group,Contribution of H2 plasma etching to radial profile of amount of dust particles in a divertor simulator Reviewed International journal

    M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura and A. Sagara

    J. Phys. : Conf. Series (SPSM26)   518 ( 1 )   2014.6

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    DOI: 10.1088/1742-6596/518/1/012009

  • Nanostructure Control of Si and Ge Quantum Dots Based Solar Cells Using Plasma Processes Reviewed International journal

    M. Shiratani, G. Uchida, H. Seo, D. Ichida, K. Koga, N. Itagaki, and K. Kamataki

    Materials Science Forum   783-786   2014.5

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    DOI: 10.4028/www.scientific.net/MSF.783-786.2022

  • SiC Nanoparticle Composite Anode for Li-Ion Batteries Reviewed International journal

    M. Shiratani, K. Kamataki, G. Uchida, K. Koga, H. Seo, N. Itagaki, T. Ishihara

    Mat. Res. Soc. Symp.   2014.4

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    DOI: http://dx.doi.org/10.1557/opl.2014.742

  • Study on the Crystal Growth Mechanism of ZnO Films Fabricated Via Nitrogen Mediated Crystallization Reviewed International journal

    I. Suhariadi, K. Oshikawa, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, and N. Itagaki

    JPS Conf. Proc. (12th Asia Pacific Physics Conference)   1   2014.3

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    DOI: 10.7566/JPSCP.1.015064

  • Combinatorial Plasma CVD of Si Nanoparticle Composite Films for Band Gap Control Reviewed International journal

    G. Uchida, Y. Kanemitsu, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    JPS Conf. Proc. (12th Asia Pacific Physics Conference)   1   2014.3

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    DOI: 10.7566/JPSCP.1.015080

  • Correlation between nanoparticle growth and plasma parameters in low pressure reactive VHF discharge plasmas Reviewed International journal

    M. Shiratani, Y. Morita, K. Kamataki, H. Seo, G. Uchida, N. Itagaki, K. Koga

    JPS Conf. Proc. (12th Asia Pacific Physics Conference)   1   2014.3

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    DOI: 10.7566/JPSCP.1.015083

  • Effects of H2 Gas Addition on Structure of Ge Nanoparticle Films Deposited by High-pressure RF Magnetron Sputtering Method Reviewed International journal

    G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    JPS Conf. Proc. (12th Asia Pacific Physics Conference)   1   2014.3

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    DOI: 10.7566/JPSCP.1.015082

  • Spatial Profile of Flux of Dust Particles Generated due to Interaction between Hydrogen Plasmas and Graphite Target Reviewed International journal

    M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

    JPS Conf. Proc. (12th Asia Pacific Physics Conference)   1   2014.3

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    DOI: 10.7566/JPSCP.1.015020

  • Effects of Grid DC Bias on Incorporation of Si Clusters into Amorphous Silicon Thin Films in Multi-Hollow Discharge Plasma CVD Reviewed International journal

    S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    JPS Conf. Proc. (12th Asia Pacific Physics Conference)   1   2014.3

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    DOI: 10.7566/JPSCP.1.015069

  • Analysis on the photovoltaic property of Si quantum dot-sensitized solar cells Reviewed International journal

    H. Seo, D. Ichida, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    International Journal of Precision Engineering and Manufacturing   15 ( 2 )   2014.2

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    DOI: 10.1007/s12541-014-0343-8

  • Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas Reviewed International journal

    M. Shiratani, K. Koga, K. Kamataki, S. Iwashita, G. Uchida, H. Seo, and N. Itagaki

    Jpn. J. Appl. Phys.   53 ( 1 )   2014.1

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    DOI: 10.7567/JJAP.53.010201

  • The improvement on the performance of quantum dot-sensitized solar cells with functionalized Si Reviewed International journal

    H. Seo, Y. Wang, M. Sato, G. Uchida, K. Koga, N. Itagaki, K. Kamataki, M. Shiratani

    Thin Solid Films   546   2013.11

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    DOI: 10.1016/j.tsf.2013.04.073

  • Characteristics of Crystalline Silicon/Si Quantum Dot/Poly(3,4-ethylenedioxythiophene) Hybrid Solar Cells Reviewed International journal

    G. Uchida, Y. Wang, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Jpn. J. Appl. Phys.   52   2013.11

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    DOI: 10.7567/JJAP.52.11NA05

  • Correlation between Volume Fraction of Silicon Clusters in Amorphous Silicon Films and Optical Emission Properties of Si and SiH Reviewed International journal

    Y. Kim, K. Hatozaki, Y. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, H. Seo, K. Koga, and M. Shiratani

    Jpn. J. Appl. Phys.   52   2013.11

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    DOI: 10.7567/JJAP.52.11NA07

  • Flux Control of Carbon Nanoparticles Generated due to Interactions between Hydrogen Plasmas and Graphite Using DC-Biased Substrates Reviewed International journal

    K. Koga, M. Tateishi, K. Nishiyama, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, Akiko Sagara, the LHD Experimental Group

    Jpn. J. Appl. Phys.   52   2013.11

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    DOI: 10.7567/JJAP.52.11NA08

  • Epitaxial Growth of ZnInON Films with Tunable Band Gap from 1.7 eV to 3.3 eV on ZnO Templates Reviewed International journal

    K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    Jpn. J. Appl. Phys.   52   2013.11

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    DOI: 10.7567/JJAP.52.11NM06

  • Characteristics of Photocurrent Generation in the Near-Ultraviolet Region in Si Quantum-Dot Sensitized Solar Cells Reviewed International journal

    G. Uchida, M. Sato, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Thin Solid Films   544   2013.10

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    DOI: 10.1016/j.tsf.2013.04.111

  • Effects of nanoparticle incorporation on properties of microcrystalline films deposited using multi-hollow discharge plasma CVD Reviewed International journal

    Y. Kim, T. Matsunaga, K. Nakahara, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

    Surf. Coat. Technol.   228 ( 1 )   2013.8

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    DOI: 10.1016/j.surfcoat.2012.04.029

  • Observation of nanoparticle growth process using a high speed camera International journal

    Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga, and M. Shiratani

    ISPC 21 Proceedings   2013.7

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  • Discharge Power Dependence of Carbon Dust Flux in a Divertor Simulator Reviewed International journal

    K. Nishiyama, Y. Morita, G. Uchida, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, and H. Kersten

    Journal of Nuclear Materials   438   2013.7

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    DOI: 10.1016/j.jnucmat.2013.01.169

  • Effects of DC Substrate Bias Voltage on Dust Flux in the Large Helical Device Reviewed International journal

    K. Koga, K. Nishiyama, Y. Morita, G. Uchida, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

    Journal of Nuclear Materials   438   2013.7

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    DOI: 10.1016/j.jnucmat.2013.01.154

  • Growth control of ZnO nano-rod with various seeds and photovoltaic application Reviewed International journal

    H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    J. Phys. : Conference Series   441 ( 1 )   2013.6

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    DOI: 10.1088/1742-6596/441/1/012029

  • Analysis on the effect of polysulfide electrolyte composition for higher performance of Si quantum dot-sensitized solar cells Reviewed International journal

    H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Electrochimica Acta   95 ( 1 )   2013.4

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    DOI: 10.1016/j.electacta.2013.02.026

  • Effects of Hydrogen Dilution on ZnO Thin Films Fabricated via Nitrogen Mediated Crystallization Reviewed International journal

    I. Suhariadi, K. Matsushima, K. Kuwahara, K. Oshikawa, D. Yamashita, H. Seo, G. Uchida, K. Kamtaki, K. Koga, M. Shiratani, S. Bornholdt, H. Kersten, Harm Wulff, N. Itagaki

    Jpn. J. Appl. Phys.   52 ( 1 )   2013.1

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    DOI: 10.7567/JJAP.52.01AC08

  • The reduction of charge recombination and performance enhancement by the surface modification of Si quantum dot-sensitized solar cell Reviewed International journal

    H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Electrochimica Acta   87 ( 1 )   2013.1

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    DOI: 10.1016/j.electacta.2012.09.087

  • Improvement of Si Adhesion and Reduction of Electron Recombination for Si Quantum Dot-Sensitized Solar Cells Reviewed International journal

    H. Seo, Y. Wang, M. Sato, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Jpn. J. Appl. Phys.   52 ( 1 )   2013.1

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    DOI: 10.7567/JJAP.52.01AD05

  • High Amount Cluster Incorporation in Initial Si Film Deposition by SiH4 Plasma Chemical Vapor Deposition Reviewed International journal

    Y. Kim, K. Hatozaki, Y. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, H. Seo, K. Koga, M. Shiratani

    Jpn. J. Appl. Phys.   52 ( 1 )   2013.1

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    DOI: 10.7567/JJAP.52.01AD01

  • Control of radial density profile of nano-particle produced in reactive plasma by amplitude modulation of rf discharge voltage Reviewed International journal

    K. Kamataki, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

    Thin Solid Films   523   2012.11

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    DOI: 10.1016/j.tsf.2012.07.059

  • Effects of crystalline nanoparticle incorporation on growth, structure, and properties of microcrystalline silicon films deposited by plasma CVD Reviewed International journal

    Y. Kim, T. Matsunaga, K. Nakahara ,G. Uchida, K. Kamataki , N. Itagaki, H. Seo, K. Koga, M. Shiratani

    Thin Solid Films   523   2012.11

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    DOI: 10.1016/j.tsf.2012.06.023

  • Sputter deposition of Epitaxial Zinc-Indium Oxynitride Films for Excitonic Transistors (Invited) Invited International journal

    N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

    Proc. of International Symposium on Dry Process   34   2012.11

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  • ZnO:Al Thin Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization: Effects of N2/Ar Gas Flow Rate Ratio Reviewed International journal

    I. Suhariadi, N. Itagaki, K. Kuwahara, K. Oshikawa, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, K. Nakahara, M. Shiratani

    Transactions of the Materials Research Society of Japan   37 ( 2 )   2012.6

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    DOI: 10.14723/tmrsj.37.165

  • High quality epitaxial ZnO films grown on solid-phase crystallized buffer layers Reviewed International journal

    K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

    Thin Solid Films   520 ( 14 )   2012.5

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    DOI: 10.1016/j.tsf.2011.10.136

  • In situ analysis of size dispersion of nano-particles in reactive plasma using two dimentional laser light scattering method Reviewed International journal

    K. Kamataki, Y. Morita, M. Shiratani, K. Koga, G. Uchida, N. Itagaki

    Journal of Instrumentation   7 ( 4 )   2012.4

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    DOI: 10.1088/1748-0221/7/04/C04017

  • Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition Reviewed International journal

    M. Shiratani, K. Hatozaki, Y. Hashimoto, Y. Kim, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga

    Mat. Res. Soc. Symp. Proc.   1426   2012.4

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    DOI: 10.1557/opl.2012.1245

  • In-situ Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances Reviewed International journal

    Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Mat. Res. Soc. Symp. Proc.   1426   2012.4

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    DOI: 10.1557/opl.2012.839

  • The Optical Analysis and Application of Size-controllable Si Quantum Dots Fabricated by Multi-hollow Discharge Plasma Chemical Vapor Deposition Reviewed International journal

    H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Mat. Res. Soc. Symp. Proc.   1426   2012.4

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    DOI: 10.1557/opl.2012.890

  • 理系日本人学生の実験授業における日本簿の英語教育によるハイブリッド授業の試み

    鎌滝晋礼

    第60回九州地区大学一般教育研究協議会議事録   2012.3

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  • Combinatorial Deposition of Microcrystalline Silicon Films Using Multihollow Discharge Plasma Chemical Vapor Deposition Reviewed International journal

    K. Koga, T. Matsunaga, Y. Kim, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, and M. Shiratani

    Jpn. J. Appl. Phys.   51 ( 1 )   2012.1

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    DOI: 10.1143/JJAP.51.01AD02

  • Deposition of cluster-free B-doped a-Si:H films using SiH4+B10H14 multi-hollow discharge plasma CVD Reviewed International journal

    K. Koga, K. Nakahara, Y. Kim, T. Matsunaga, D.Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani

    Jpn. J. Appl. Phys.   51 ( 1 )   2012.1

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    DOI: 10.1143/JJAP.51.01AD03

  • Effect of nitridation of Si nano-particles on the performance of quantum-dot sensitized solar cells Reviewed International journal

    G. Uchida, K. Yamamoto, M. Sato, Y. Kawashima, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Jpn. J. Appl. Phys.   51 ( 1 )   2012.1

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    DOI: 10.1143/JJAP.51.01AD01

  • Dynamics of global transport and turbulence noise force - an experimental analysis on plasma turbulence International journal

    Y. Nagashima, S. Itoh, S. Inagaki, H. Arakawa, N. Kasuya, A. Fujisawa, K. Kamataki, T. Yamada, S. Shinohara, S. Oldenburger, M. Yagi, Y. Takase, P. H. Diamond, and K. Itoh

    Proc. of Plasma Conference 2011   25   2011.11

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  • Self-organized carbon Mk formation on the top surface of fine trenches using a low temperature plasma anisotropic CVD for depositing fine organic structure International journal

    K. Koga, T. Urakawa, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

    Proc. of Plasma Conference 2011 (PLASMA2011)   2011.11

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  • Effects of nanoparticle incorporation on Si thin films deposited by plasma CVD International journal

    M. Shiratani, Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga

    Proc. of Plasma Conference 2011 (PLASMA2011)   2011.11

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  • Low resistive ZnO:Al films with ZnO buffer layers fabricated by Ar/N2 magnetron sputtering International journal

    N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, K. Kamataki, H. Seo, G. Uchida, K. Koga, M. Shiratani

    Proc. of Plasma Conference 2011 (PLASMA2011)   2011.11

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  • Deposition of cluster-free a-Si:H films using cluster eliminating filter International journal

    K. Nakahara, K. Hatozaki, Y. Hashimoto, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

    Proc. of Plasma Conference 2011 (PLASMA2011)   2011.11

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  • Radical Flux Evaluation to Microcrystalline Silicon Films Deposited by Multi-Hollow Discharge Plasma CVD International journal

    Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

    Proc. of Plasma Conference 2011 (PLASMA2011)   2011.11

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  • Collection of carbon dust particles formed due to plasma-wall interactions between high density H2 plasma and carbon wall onto substrates by applying local DC bias voltage International journal

    K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, H. Kersten

    Proc. of Plasma Conference 2011 (PLASMA2011)   2011.11

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  • Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD International journal

    K. Kamataki, K. Koga, G. Uchida, H. Seo, N. Itagaki, M. Shiratani

    Proc. of Plasma Conference 2011 (PLASMA2011)   2011.11

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  • Influence of nano-particles on multi-hollow discharge plasma for microcrystalline silicon thin films deposition International journal

    T. Matsunaga, Y. Kim, K. Koga, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

    Proc. of Plasma Conference 2011 (PLASMA2011)   2011.11

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  • Effects of N2 gas addition to sputtering plasma on properties of epitaxial ZnO films International journal

    K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, Seo H., G. Uchida, K. Kamataki, K. Koga, M. Shiratani

    Proc. of Plasma Conference 2011 (PLASMA2011)   2011.11

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  • Combinatorial study on effects of substatrate temperature of silicon film deposition using multi-hollow discharge plasma cvd Reviewed International journal

    Y. Kim, T. Matsunaga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

    Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21)   2011.11

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  • Defect density of cluster-free a-si:h films deposited by multi-hollow discharge plasma CVD Reviewed International journal

    K. Nakahara, K. Hatozaki, M. Sato, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

    Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21)   2011.11

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  • Zinc oxide-based transparent conducting films with buffer layers fabricated via nitrogen-mediated crystallization Reviewed International journal

    N. Itagaki, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

    Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21)   2011.11

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  • Zno films with buffer layers crystallized via nitrogen mediation: Effects of deposition temperature of buffer layers Reviewed International journal

    K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

    Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21)   2011.11

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  • Effects of nano-particles on (220) crystal orientation of microcrystallite silicon thin films Reviewed International journal

    T. Matsunaga, Y. Kim, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

    Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21)   2011.11

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  • 文系学生に対する科学教育の取り組みと意義 Reviewed

    鎌滝晋礼

    大学の物理教育   17 ( 3 )   2011.11

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  • Hybrid sensitized solar cells using Si nanoparticles and ruthenium dye Reviewed International journal

    G. Uchida, Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani

    Physica Status Solidi (c)   8 ( 10 )   2011.10

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    DOI: 10.1002/pssc.201100166

  • Impacts of Amplitude Modulation of RF Discharge Voltage on the Growth of Nanoparticles in Reactive Plasma Reviewed International journal

    K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, M. Shiratani

    Applied Physics Express   4 ( 10 )   2011.10

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    DOI: 10.1143/APEX.4.105001

  • Deposition of cluster-free P-doped a-Si:H films using SiH4+PH3 multi-hollow discharge plasma CVD method Reviewed International journal

    K. Koga, K. Nakahara, Y. Kim, Y. Kawashima, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani

    Physica Status Solidi (c)   8 ( 10 )   2011.10

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    DOI: 10.1002/pssc.201100229

  • Surface nitridation of silicon nano-particles using double multi-hollow discharge plasma CVD Reviewed International journal

    G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani

    Physica Status Solidi (c)   8 ( 10 )   2011.10

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    DOI: 10.1002/pssc.201001230

  • Impacts of Plasma Fluctuations on Growth of Nano-Particles in Reactive Plasma International journal

    K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

    2011.9

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  • Comparison between silicon thin films with and without incorporating crystalline silicon nanoparticles into the film Reviewed International journal

    K. Koga, Y. Kawashima, T. Matsunaga, M. Sato, K. Nakahara, W. M. Nakamura, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

    Thin Solid Films   519 ( 20 )   2011.8

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    DOI: 10.1016/j.tsf.2011.01.408

  • Non-Gaussian properties of global momentum and particle fluxes in a cylindrical laboratory plasma Reviewed International journal

    Y. Nagashima, S. Itoh, S. Inagaki, H. Arakawa, N. Kasuya, A. Fujisawa, K. Kamataki, T. Yamada, S. Shinohara, S. Oldenburger, M. Yagi, Y. Takase, P. H. Diamond, and K. Itoh

    Physics of Plasma   18   2011.7

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    DOI: 10.1063/1.3601767

  • Combinatorial study of substrate temperature dependence on properties of silicon films deposited using multihollow discharge plasma CVD International journal

    Y. Kim, T. Matsunaga, Y. Kawashima, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

    2011.7

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  • Nano-factories in plasma: present status and outlook Reviewed International journal

    M. Shiratani, K. Koga, S. Iwashita, G. Uchida, N. Itagaki, K. Kamataki

    Journal of Physics D: Applied Physics   44 ( 17 )   2011.5

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    DOI: 10.1088/0022-3727/44/17/174038

  • Development of radially movable multichannel Reynolds stress probe system for a cylindrical laboratory plasma Reviewed International journal

    Y. Nagashima, S. Inagaki, K. Kamakaki, H. Arakawa, T. Yamada, S. Shinohara, Y. Kawai, M. Yagi, A. Fujisawa, S. Itoh, K. Itoh, and Y. Takase

    Rev. Sci. Instrum.   82   2011.3

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  • Generation and Surface Modification of Si nano-particles using SiH4/H2 and N2 multi-hollow discharges and their application to the third generation photovoltaics Invited Reviewed International journal

    K. Koga, G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Kamataki, N. Itagaki, M. Shiratani

    International Conference on Advances in Condensed and Nano Materials (ICACNM)   1393   2011.2

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    DOI: 10.1063/1.3653600

  • ECRH Superposition on Linear Cylindrical Helicon Plasma in LMD-U Reviewed

    K. Kamataki, K. Itoh, S. Itoh, A. Fujisawa, S. Inagaki, Y. Nagashima, M. Yagi, T. Yamada

    Journal of Plasma and Fusion Research   5   2010.12

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  • Nonlinear mode couplings in a cylindrical magnetized plasma Reviewed

    T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, S. Shinohara, N.Kasuya, K. Terasaka, K. Kamataki, H. Arakawa, M. Yagi, A. Fujisawa, K. Itoh

    Journal of Plasma and Fusion Research   5   2010.12

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  • Probability Density Function of Density Fluctuations in Cylindrical Helicon Plasma Reviewed

    H. Arakawa, S. Inagaki, Y. Nagashima, T. Yamada, K. Kamataki, T. Kobayashi, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, K. Itoh, S. Itoh

    Journal of Plasma and Fusion Research   5   2010.12

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  • Bi-spectral analysis of density and potential flucutuations in a high neutral density cylindrical plasma Reviewed

    T. Kobayashi, S. Inagaki, H. Arakawa, K. Kamataki, Y. Nagashima, T. Yamada, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, S. Itoh, K. Itoh

    Journal of Plasma and Fusion Research   5   2010.12

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  • Observation of Quasi-Two-Dimensional Nonlinear Interactions in a Drift-Wave Streamer Reviewed International journal

    T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, N. Kasuya, K. Kamataki, H. Arakawa, T.Kobayashi, M. Yagi, A. Fujisawa, and K. Itoh

    Physical Review Letter   105   2010.11

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  • Fluctuation Control for Plasma Nanotechnologies Reviewed International journal

    M. Shiratani, K. Koga, G. Uchida, N. Itagaki, K. Kamataki

    IEEE Region 10 Conference on TENCON 2010   2010.11

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    DOI: 10.1109/TENCON.2010.5685920

  • Effects of Amplitude Modulation of rf Discharge Voltage on Growth of Nano-Particles in Reactive Plasma Reviewed International journal

    K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

    IEEE Region 10 Conference on TENCON 2010   2010.11

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    DOI: 10.1109/TENCON.2010.5686456

  • Effects of Ar addition on breakdown voltage in a Si(CH3)2(OCH3)2 RF discharge Reviewed International journal

    G. Uchida, S. Nunomutra, H. Miyata, S. Iwashita, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    IEEE Region 10 Conference on TENCON 2010   2010.11

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    DOI: 10.1109/TENCON.2010.5686704

  • Substrate Temperature Dependence of Sticking Probability of SiOx-CH3 Nano-Particles International journal

    H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

    Proc. of International Symposium on Dry Process   2010.11

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  • Optical and Electrical Properties of Particle Composite Thin Films deposited in SiH4/H2 and N2 Multi-Hollow Discharges International journal

    G. Uchida, M. Sato, Y. Kawashima, K. Yamamoto, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

    2010.11

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  • Carbon dust particles generated due to H2 plasma-carbon wall interaction International journal

    H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, G. Uchida, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, LHD experimental group

    Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010.10

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  • Deposition rate enhancement of cluster-free P-doped a-Si:H films using multi-hollow discharge plasma CVD method International journal

    K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010.10

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  • Combinatorial deposition of microcrystalline Si films using multi-hollow discharge plasma CVD International journal

    T. Matsunaga, Y. Kawashima, K. Koga, W. M. Nakamura, K. Nakahara, H. Matsuzaki, D. Yamashita, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

    Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010.10

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  • Generation of nitridated silicon particles and their thin film deposition using double multi-hollow discharges International journal

    G. Uchida, M. Sato, Y. Kawashima, K. Nakahara, K. Yamamoto, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma   55 ( 7 )   2010.10

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  • Bifurcation of the plasma turbulence on LMD-U Reviewed International journal

    H. Arakawa, S. Inagaki, Y. Nagashima, T. Yamada, K. Kamataki, T. Kobayashi, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, S. -I Itoh and K. Itoh

    Plasma Phys. Controlled Fusion   51 ( 10 )   2010.9

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  • Deposition of cluster-free P-doped a-Si:H films using a multi-hollow discharge plasma CVD method Reviewed International journal

    K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Proc. of 35th IEEE Photovoltaic Specialists Conference   2010.7

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    DOI: 10.1109/PVSC.2010.5616514

  • Si quantum dot-sensitized solar cells using Si nanoparticles produced by plasma CVD Reviewed International journal

    Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

    Proc. 35th IEEE Photovoltaic Specialists Conf.   2010.7

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    DOI: 10.1109/PVSC.2010.5617205

  • 理系日本人学生の実験授業における日本語と英語によるハイブリッド授業の試み

    鎌滝晋礼

    大学教育   ( 16 )   2010.6

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  • Study of Amplitude Correlation Technique in a Cylindrical Magnetized Plasma Reviewed

    T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, K. Kamataki, H. Arakawa, M. Yagi, A. Fujisawa, K. Itoh

    Journal of the Physical Society of Japan   79   2010.6

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  • Two-dimensional bi-spectral analysis of drift wave turbulence in a cylindrical plasma Reviewed International journal

    T.Yamada, S. Itoh, S. Inagaki, Y.Nagashima, S. Shinohara, N.Kasuya, K.Terasaka, K.Kamataki, H. Arakawa, M. Yagi, A. Fujisawa, K. Itoh

    Phys. Plasma   17   2010.5

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  • ECRH Superposition on Linear Cylindrical Helicon Plasma in LMD-U Reviewed

    K. Kamataki, K. Itoh, S. Itoh, A. Fujisawa, S. Inagaki, Y. Nagashima, M. Yagi, T. Yamada

    Journal of Plasma and Fusion Research, 5, S2046, 2010.   5   S2046-1 - 5   2010.4

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  • Statistical Analysis Technique for Estimation of Causal Relationship in Plasma Turbulence Reviewed

    K. Kamataki, K. Itoh, S. Itoh, A. Fujisawa, S. Inagaki, Y. Nagashima, M. Yagi, T. Yamada

    Journal of the Physical Society of Japan   79 ( 2 )   2010.2

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  • Observations of abrupt changes in the fluctuation spectrum on LMD-U Reviewed International journal

    H. Arakawa, K. Kamataki, S. Inagaki, T. Maruta, Y. Nagashima, T. Yamada, S. Shinohara, K. Terasaka, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, S. Itoh, K. Itoh

    Plasma Phys. Controlled Fusion   51 ( 8 )   2009.8

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  • Measurement of Nonlinear Mode Couplings in the Large Mirror Device-Upgrade Reviewed

    T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, S. Shinohara, T. Maruta, K. Terasaka, K. Kamataki, N. Kasuya, M. Yagi, Y. Kawai, A. Fujisawa, K. Itoh

    Journal of Plasma and Fusion Research   8   2009.8

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  • Dynamics of Drift and Flute Modes in Linear Cylindrical ECR Plasma Reviewed

    K. Kamataki, S. Itoh, Y Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh.

    Journal of Plasma and Fusion Research   8   2009.8

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  • Reynolds Stress Measurements for Investigation of Nonlinear Processes of Turbulence in the Large Mirror Device and in the Large Mirror Device-Upgrade Reviewed

    Y. Nagashima, S. Itoh, K. Itoh, A. Fujisawa, S. Inagaki, Y. Kawai, S. Shinohara, M. Fukao, T. Yamada, K. Terasaka, T. Maruta, K. Kamataki, H. Arakawa, M. Yagi, N. Kasuya, G. R. Tynan, P. H. Diamond, Y. Takase

    Journal of Plasma and Fusion Research   8   2009.8

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  • Observation of Zonal Flow Type Oscillation in Linear Cylindrical ECR Plasma Reviewed

    K. Kamataki, S. Itoh, Y Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh

    Journal of Plasma and Fusion Research   3   2008.8

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  • Sheared flow generation and mode suppression in a magnetized linear cylindrical plasma Reviewed International journal

    H. Tsuchiya, S. Itoh, A. Fujisawa, K. Kamataki, S. Shinohara, M. Yagi, Y. Kawai, A. Komori, K.Itoh

    Plasma Phys. Control. Fusion   50 ( 5 )   2008.5

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  • Investigation of Competitive Oscillations between Drift Mode and Flute Mode in Linear Cylindrical ECR Plasma Reviewed International journal

    K. Kamataki, S. Itoh, Y Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh

    Plasma Phys. Control. Fusion   50   2008.3

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  • Coexistence of Collisional Drift and Flute Wave Instabilities in Bounded Linear ECR Plasma Reviewed

    K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, M. Yagi, K. Itoh, S. Itoh

    Journal of the Physical Society of Japan   76 ( 5 )   2007.5

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  • Observation of Competition between Drift Instability and Flute Instability in a Bounded Linear ECR Plasma Reviewed

    K. Kamataki, Y Nagashima, S. Shinohara, Y. Kawai, S. Inagaki, M. Yagi, K. Itoh, S. Itoh

    Journal of Plasma and Fusion Research   2   2007.5

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  • Impact of radish sprouts seeds coat color on the electron paramagnetic resonance signals after plasma treatment Reviewed International journal

    K. Koga, P. Attri, K. Kamataki, N. Itagaki, M. Shiratani, V. Mildaziene

    Jpn. J. Appl. Phys.   59 ( SH )   2020.3

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    DOI: 10.35848/1347-4065/ab7698

  • Growth of single crystalline films on lattice-mismatched substrates through 3D to 2D mode transition Reviewed International journal

    N. Itagaki, Y. Nakamura, R. Narishige, K. Takeda, K. Kamataki, K. Koga, M. Hori, M. Shiratani

    Sci. Rep.   10   2020.3

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1038/s41598-020-61596-w

  • Effect of Higher-Order Silane Deposition on Spatial Profile of Si-H2/Si-H Bond Density Ratio of a-Si:H Films Reviewed International journal

    L. Shi, K. Tanaka, H. Hara, S. Nagaishi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Plasma Fusion Res.   14   2019.9

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1585/pfr.14.4406144

  • Identification and Suppression of Si-H2 Bond Formation at P/I Interface in a-Si:H Films Deposited by SiH4 Plasma CVD Reviewed International journal

    K. Tanaka, H. Hara, S. Nagaishi, L. Shi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Plasma Fusion Res.   14   2019.9

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1585/pfr.14.4406141

  • Sputter Epitaxy of (ZnO)x(InN)1-x films on Lattice-mismatched Sapphire Substrate Reviewed International journal

    N. Miyhaara, S. Urakawa, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    MRS Advances   2019.7

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  • Effects of Gas Pressure on Size Distribution and Structure of Carbon Nanoparticles Using Ar + CH4 Multi-Hollow Discharged Plasma Chemical Vapor Deposition Reviewed International journal

    Sung Hwa Hwang, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    Journal of Plasma and Fusion Research   2019.7

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  • 科学的思考力育成のための文系学生に対する科学実験の展開

    鎌滝 晋礼

    日本科学教育学会年会論文集   2016.8

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    Language:Japanese   Publishing type:Research paper (other academic)  

  • アクティブ・ラーニングを取り入れた科学実験・工作

    鎌滝 晋礼

    日本物理学会第71回年次大会予稿集   2016.3

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  • 社会的責任養成としての科学実験

    鎌滝 晋礼

    学教育学会2015年度課題研究集会予稿集   2015.11

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    Language:Japanese   Publishing type:Research paper (other academic)  

  • 学生に社会問題の意識を向上させる実験授業展開

    鎌滝 晋礼

    物理教育学会年会物理教育研究大会予稿集   2015.8

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  • Real-time mass measurement of dust particles deposited on vessel wall in a divertor simulator using quartz crystal microbalances Reviewed International journal

    M. Tateishi, K. Koga, R. Katayama, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experiment Group

    Journal of Nuclear Materials   463   865 - 868   2015.8

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  • Competition behavior between drift instability and flute instability in bounded linear ECR plasma Reviewed International journal

    K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, M. Yagi, K. Itoh, S. Itoh

    Proc. of 34th European Physical Society (EPS) Conferences on Plasma Physics   31 ( 1 )   2007.6

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    Language:English   Publishing type:Research paper (international conference proceedings)  

  • Observation of the Drift Wave Instability in Bounded ECR Plasma Reviewed International journal

    K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, M. Yagi, K. Itoh, S. Itoh

    Proc. of 33rd European Physical Society (EPS) Conferences on Plasma Physics   14   2006.6

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    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1016/j.rsurfi.2024.100204

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Books

  • 授業を活性化する科学実験ハンドブック

    淵田吉男, 藤原智子,小島健太郎, 鎌滝晋礼, 山田秀人, 徳田誠, 佐藤文( Role: Joint author)

    (株)ミドリ印刷  2012.3 

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    Language:Japanese   Book type:General book, introductory book for general audience

Presentations

  • Prediction of Plasma CVD Process Data of a-Si:H Films via Machine Learning

    Kunihiro Kamataki, F. L. Charawambwa, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    ISPC25(25th International Symposium on Plasma Chemistry)  2023.5 

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    Event date: 2023.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマプロセスにおける機械学習の活用~ITO薄膜のスパッタ製膜プロセスを例に~

    鎌滝 晋礼, F. L. Chawarambwa, 板垣 奈穂, 古閑 一憲, 白谷 正治

    令和4年度 LHD におけるプラズマ・壁相作用に関する研究会  および 静岡大学「放射科学が切り拓くグリーン・エネルギー超領域科学研究」研究会   2023.3 

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  • 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(3)

    鎌滝 晋礼, 佐藤 斗真,富田 健太郎,Pan Yiming, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治

    第70回応用物理学会春季学術講演会  2023.3 

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:上智大学, 東京, 日本   Country:Japan  

  • 自然災害被災地訪問による認識の変容に関する研究 東日本大震災の体験を通じて

    田中真里、鎌滝晋礼

    日本発達心理学会第34回大会  2023.3 

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:立命館大学   Country:Japan  

  • Developing Prediction of Key Process Parameters and Sputtering Conditions for Amorphous and high Mobility ITO/In2O3 Films via Machine Learning

    Kunihiro Kamataki, Yuta Mido, Iori Nagao, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    AFM2023(7th International Conference on Advances in Functional Materials)  2023.1 

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    Event date: 2023.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Electric field measurements in Ar plasma using a fine charged particle trapped with laser tweezers

    Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    23rd Workshop on Fine Particle Plasmas  2022.12 

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    Event date: 2022.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Electric fields measurement using an optical trapped charged particle in Ar plasma(invited) Invited

    Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    The 32nd Annual Meeting of MRS-J  2022.12 

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    Event date: 2022.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Measurement of the charge on single fine particles in plasma

    Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    The 32nd Annual Meeting of MRS-J  2022.12 

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    Event date: 2022.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマCVDにおける成膜とナノ粒子成長 International conference

    第38回 九州・山口プラズマ研究会  2022.11 

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    Event date: 2022.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:鹿児島、日本   Country:Japan  

  • Control of Growth of Nano-particles and Properties of SiO2 Films with Amplitude Modulated Discharge in TEOS-PECVD(Plenary) Invited International conference

    Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Yuma Yamamoto, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani

    AAPPS-DPP2022 (6th Asia-Pacific Conference on Plasma Physics)  2022.10 

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    Event date: 2022.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Measurements of strength and fluctuation of 2D electric fields in plasmas using a fine particle trapped with laser tweezers(invited) Invited International conference

    Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    GEC2022/ICRP-11(The 75th Annual Gaseous Electronics Conference/the 11th International Conference on Reactive Plasmas)  2022.10 

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    Event date: 2022.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(2)

    鎌滝 晋礼, 佐藤 斗真,富田 健太郎,Pan Yiming, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治

    第83回応用物理学会秋季学術講演会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東北大学, 宮城県, 日本   Country:Japan  

  • Impact of amplitude modulated discharge on suppression of nanoparticles growth in TEOS/O2/Ar capacitively coupled plasma International conference

    Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Yuma Yamamoto, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani

    The 22nd International Vacuum Congress (IVC-22)  2022.9 

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    Event date: 2022.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of amplitude modulated rf discharge on properties of SiO2 films deposited by TEOS/O2/Ar plasma-enhanced chemical vapor deposition International conference

    Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Yuma Yamamoto, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani

    9th International Symposium on Control of Semiconductor Interfaces (ISCSI-IX)  2022.9 

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    Event date: 2022.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Development of measurement of two-dimensional distribution of strength of electrical field with high spatial resolution using optical trapped particle in plasma International conference

    Kunihiro Kamataki, Sakyo Okunaga, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    2022 MRS (Material Research society) Spring Meeting  2022.5 

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    Event date: 2022.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  • 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(1)

    鎌滝 晋礼, 奥永 冴京,佐藤 斗真,富田 健太郎,Pan Yiming, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治

    第69回応用物理学会春季学術講演会  2022.3 

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    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:ハイブリッド   Country:Japan  

  • 光捕捉微粒子による超高感度電場計測-電場強度と電場揺動計測-

    鎌滝 晋礼, 奥永 冴京,佐藤 斗真,富田 健太郎,Pan Yiming, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治

    令和3年度東北大学電気通信研究所共同プロジェクト研究会  2022.2 

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    Event date: 2022.2

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Investigation of relationship between growth of nanoparticle and plasma generation due to amplitude modulated discharge voltage in TEOS plasma International conference

    Kunihiro. Kamataki, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani

    SPP-39/SPSM34(39th Symposium on Plasma Processing/34th Symposium on Plasma Science for Materials)  2022.1 

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    Event date: 2022.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Investigation of 2D electric field measurements in Ar plasmas using a fine particle trapped with laser tweezers International conference

    Kunihiro Kamataki, Sakyo Okunaga, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    MRM2021(Material Research Meeting)  2021.12 

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    Event date: 2021.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Investigation of growth suppression mechanism of nanoparticles through amplitude modulation discharge method in TEOS plasma International conference

    Kunihiro Kamataki, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)  2021.12 

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    Event date: 2021.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Better step coverage of TEOS-PECVD SiO2 films realized by amplitude modulation of RF discharge voltage International conference

    K. Kamataki, K. Abe, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani, S. Tahara, Y. Mizokami, Y. Miyata, K. Tabuchi, T. Tanikuni, S. Hiyama, K. Nagahata

    DPS 2021 (42nd International Symposium on Dry Process)  2021.11 

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    Event date: 2021.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Study on measurement of strength and fluctuation of electrical field using optical trapped particle in Ar plasma (invited) Invited International conference

    Kunihiro KAMATAKI, Sakyo OKUNAGA, Toma SATO, Kentaro TOMITA, Pan YIMIN, Daisuke YAMASHITA, Takamasa OKUMURA, Naho ITAGAKI, Kazunori KOGA, Masaharu SHIRATANI

    AAPPS-DPP2021(5th Asia-Pacific Conference on Plasma Physics)  2021.9 

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    Event date: 2021.9 - 2021.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Predictive analytics in plasma process using machine learning tools and techniques (invited) Invited International conference

    Kunhiro KAMATAKI, Chen Feiyu, Tao Yang, Sakyo Okunaga, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    1st Workshop on Artificial Intelligence in Plasma Science - Satellite Workshop of EU-Japan Joint Symposium on Plasma Processing  2021.9 

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    Event date: 2021.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 振幅変調放電プラズマ中の光捕捉微粒子の挙動に関する研究

    鎌滝 晋礼, 奥永 冴京,佐藤 斗真,富田 健太郎,Pan Yiming, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治

    第82回応用物理学会秋季学術講演会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • SiH4+N2 プラズマによる SiNx の低温高品質成膜 Invited

    鎌滝晋礼 , 佐々木勇輔 , 奥村賢直 ,板垣奈穂 ,古閑一憲 ,白谷正治

    応用物理学会 シリコンテクノロジー分科会 第227回 研究集会  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

    半導体デバイス高性能化に伴い,例えば、半導体の素子が高層化すればするほど、またフレキシブル基板への成膜などの場合、下地への熱ダメージを低減する必要があり、膜質を担保したままの低温成膜技術が求められている。SiNやSiO2は半導体の保護膜としてよく使われている。従来、SiN膜は、プラズマCVDにおいて300-400 ℃の高い基板温度で製膜されてきた。これは、低基板温度では、表面反応が遅く、低窒化度、高水素量の膜となり, 高品質膜を作製することが困難であるためである。本研究は、SiH4+N2プラズマを用いて気相中のナノ粒子の成長を制御することで、低基板温度(100 ℃)でも高窒化及び膜中水素量の低い高品質なSiN膜を作製することに成功した。

  • Arプラズマ中の光捕捉微粒子への作用力の研究

    鎌滝晋礼,奥永冴京, 岩本 亮介, 富田 健太郎, P.Yiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷 正治

    第68回応用物理学会春季学術講演会  2021.3 

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • プラズマCVDによるアモルファスシリコン成膜におけるプラズマプロセスへの機械学習の適用

    鎌滝晋礼

    第36回九州・山口プラズマ研究会  2020.11 

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    Event date: 2020.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Relations among spatial profiles of plasma parameters, growth of nanoparticles in reactive plasma and properties of fabricated thin films International conference

    K. Kamataki

    4th Asia Pacific Conference on Plasma Physics  2020.10 

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    Event date: 2020.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Relations among spatial profiles of plasma parameters, growth of nanoparticles in reactive plasma and properties of fabricated thin films(invited) Invited International conference

    Kunihiro Kamataki, Tomoaki Yoshida, Yusuke Sasaki, Kohei Abe, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani

    AAPPS-DPP2020 e-conference  2020.10 

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    Event date: 2020.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Information on electric field deduced using a fine particle trapped with laser tweezers in Ar plasma International conference

    K. Kamataki, S. Okunaga, K. Tomita, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    The 73rd Annual Gaseous Electronics Conference  2020.10 

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    Event date: 2020.10

    Language:English   Presentation type:Oral presentation (general)  

  • 低温環境下におけるプラズマCVDによる高品質保護膜の作製

    鎌滝晋礼, 吉田知晃, 佐々木勇輔, 阿部滉平, 岩本亮介, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    日本物理学会 2020年秋季大会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Future prospects of Plasma-nano interface (Invited) Invited

    K. Kamataki

    2020.8 

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    Event date: 2020.8

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 低温成膜における反応性プラズマ中のナノ粒子制御

    鎌滝晋礼, 吉田知晃, 阿部滉平, 佐々木勇輔, 永石翔大, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

    日本物理学会第75回年次大会(2020年)  2020.3 

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  • 光ピンセットによるプラズマ中捕捉微粒⼦の揺動スペクトル解析

    鎌滝晋礼, 奥永冴京, 岩本亮介, 富田健太郎, 山下⼤輔, 板垣奈穂, 古閑一憲, 白谷正治

    第67回応用物理学会春季学術講演会  2020.3 

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:上智大学   Country:Japan  

  • Low temperature fabrication of passivation films by plasma enhanced CVD Invited International conference

    K. Kamataki, Y. Sasaki, S. Nagaishi, T. Yoshida, K. Abe, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020, 4th International Symposium on Energy Research and Application  2020.1 

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    Event date: 2020.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Developing Prediction of Amorphization Condition Models from Sputter Deposition Experimental Results by Machine Learning Method International conference

    K. Kamataki, R. Iwamoto, S. Okunaga, S. Muraoka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    2019.12 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Investigation of Impact of Plasma Fluctuation Driven by Amplitude Modulated VHF Discharge on Growth of Nanoparticles in Reactive Plasma (Invited) Invited International conference

    K. Kamataki, R. Iwamoto, H. Tanaka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    2019.12 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 反応性プラズマにおけるナノ粒子生成制御(招待講演) Invited

    鎌滝晋礼, 永石翔大, 佐々木勇輔, 原尚志, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

    第36回プラズマ・核融合学会年会  2019.11 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:中部大学   Country:Japan  

  • Low Temperature Fabrication of High Nitriding Degree of SiN films by Multi-Hollow Discharge SiH4+N2 Plasma CVD International conference

    K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    41st International Symposium on Dry Process (DPS2019)  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Precision control of nanoparticle property in reactive plasma ~ Low Temperature Fabrication of Low Hydrogen Content SiN films in a Multi-Hollow Discharge Plasma CVD ~

    K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    2019.11 

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    Event date: 2019.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Challenges and Opportunities in Dye Sensitized Solar Cells Using DBD Plasma Treated Upconversion Nanoparticles (Invited) Invited International conference

    K. Kamataki, F. L. Chawarambwa, K. Koga, M. Shiratani

    236th ECS Meeting  2019.10 

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    Event date: 2019.10

    Language:English   Presentation type:Oral presentation (general)  

  • AM変調反応性プラズマにおけるナノ粒子成長揺動に関する時空間情報解析

    鎌滝 晋礼, 田中 颯, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治

    2019年第80回応用物理学会秋季学術講演会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:北海道大学   Country:Japan  

  • Developing Prediction of Key Plasma Processing Parameter from Small Data of Experimental Results by Machine Learning Method International conference

    K. Kamataki, R. Iwamoto, S. Okunaga, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)  2019.9 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Investigation of Spatiotemporal Structure of Fluctuation Related with Nanoparticle Growth in Amplitude-Modulated VHF Discharge Reactive Plasma International conference

    K. Kamataki, R. Iwamoto, H. Tanaka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)  2019.9 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Low Temperature Fabrication of Low Hydrogen Content SiN films in a Multi-Hollow Discharge Plasma CVD International conference

    K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Study on Relationship between Growth of Nanoparticles and Plasma Fluctuation due to Amplitude Modulated Discharge Voltage in Capacitively Coupled Reactive Plasma International conference

    K. Kamataki, R. Zhou, H. Ohtomo, R. Iwamoto, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Predictive insight based on grey box analysis of plasma process data Invited International conference

    K. Kamataki, M. Shiratani

    2nd International Conference on Data Driven Plasma Science (2nd ICDDPS)  2019.5 

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    Event date: 2019.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:France  

  • 反応性プラズマにおけるナノ粒子成長における変調レベル依存性

    鎌滝晋礼, 周靭, 大友洋, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

    日本物理学会第74回年次大会(2019年)  2019.3 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • Spatio-temporal structure of growth of nano-particles with without amplitude modulation in reactive plasmas International conference

    K. Kamataki, Y. Morita, K. Koga, G. Uchida, N. Itagaki, H. Seo, M. Shiratani

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013)  2013.1 

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    Event date: 2013.1 - 2013.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • 放電電力変調反応性プラズマにおけるナノ粒子成長の時空間構造の観測

    鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 白谷正治

    プラズマ・核融合学会 第29回年会  2012.11 

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    Event date: 2012.11

    Presentation type:Oral presentation (general)  

    Venue:春日クローバープラザ   Country:Japan  

  • プラズマプロセスにおける揺らぎのダイナミックス

    鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, H. Seo, 白谷正治

    九州山口プラズマ研究会、応物新領域研究会  2012.11 

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    Event date: 2012.11

    Presentation type:Oral presentation (general)  

    Venue:由布院倶楽部   Country:Japan  

  • High Capacity Li Ion Battery Anodes Using Silicon Carbide Nanoparticles Produced by Double Multi-Hollow Discharge Plasma CVD International conference

    K. Kamataki, M. Shiratani, T. Ishihara, H. Nagano, Y. Morita, K. Kuwahara, G. Uchida, H. Seo, N. Itagaki, K. Koga

    2012.9 

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    Event date: 2012.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition International conference

    M. Shiratani, K. Nakahara, K. Hatozaki, Y. Hashimoto, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga

    2012 MRS Spring Meeting  2012.4 

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    Event date: 2012.4

    Presentation type:Oral presentation (general)  

    Country:United States  

  • Interaction between amplitude modulated plasmas and nanoparitcles growth in the plasmas International conference

    K. Kamataki, K. Koga, G. Uchida, N. Itagaki, H. Seo, M. Shiratani

    4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012)  2012.3 

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    Event date: 2012.3

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • 反応性プラズマにおけるナノ粒子生成に対する放電電力摂動の効果

    鎌滝晋礼, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治

    プラズマ・核融合学会 第15回九州・沖縄・山口支部大会  2011.12 

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    Event date: 2011.12

    Presentation type:Oral presentation (general)  

    Venue:大分大学工学部   Country:Japan  

  • Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD International conference

    K. Kamataki, K. Koga, G. Uchida, H. Seo, N. Itagaki, M. Shiratani

    Plasma Conference 2011 (PLASMA2011)  2011.11 

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    Event date: 2011.11

    Presentation type:Oral presentation (general)  

    Country:Japan  

    Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD

  • Impacts of Plasma Fluctuations in Reactive Plasmas (Invited) Invited International conference

    K. Kamataki, K. Koga, G. Uchida, N. Itagaki, M. Shiratani

    BIT's 1st Annual World Congress of Nano-S&T  2011.10 

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    Event date: 2011.10

    Presentation type:Oral presentation (general)  

    Country:China  

  • プラズマCVD中におけるナノ粒子成長に対するプラズマ揺らぎの効果

    鎌滝晋礼, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治

    プラズマエレクトロニクス分科会20周年(研究会創設25周年)記念特別シンポジウム  2011.10 

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    Event date: 2011.10

    Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  • Two dimensional laser light scattering to deduce size and density of nanoparticles in plasmas (Invited) Invited International conference

    M. Shiratani, K. Kamataki, K. Koga, G. Uchida

    Laser Aided Plasma Diagnostic conference (LAPD15)  2011.10 

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    Event date: 2011.10

    Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • 理系日本人学生の実験授業における日本語と英語のハイブリッド授業の試み

    鎌滝晋礼

    第60回九州地区大学一般教育研究協議会  2011.10 

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    Event date: 2011.10

    Presentation type:Oral presentation (general)  

    Venue:佐賀大学   Country:Japan  

  • 高周波放電のAM変調によるナノ粒子サイズ分布の制御

    白谷正治, 鎌滝晋礼, 西山雄士, 古閑一憲, 内田儀一郎, 板垣奈穂

    平成23年度(第64回)電気関係学会九州支部連合大会  2011.9 

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    Event date: 2011.9

    Presentation type:Oral presentation (general)  

    Venue:佐賀大学   Country:Japan  

  • Deposition of quantum dot thin films using Si nanoparticles with surface nitridation (Invited) Invited International conference

    M. Shiratani, K. Yamamoto, M. Sato, Y. Kawashima, K. Nakahara, K. Kamataki, N. Itagaki, G. Uchida, K. Koga

    The 8th Asian-European International Conference on Plasma Surface Engineering (AEPSE2011)  2011.9 

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    Event date: 2011.9

    Presentation type:Oral presentation (general)  

    Country:China  

  • Frontier science of interactions between plasmas and nano‐interfaces (Plenary) Invited International conference

    2011.9 

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    Event date: 2011.9

    Presentation type:Oral presentation (general)  

    Venue:Hotel Salinera Strunjan   Country:Slovenia  

  • Impacts of Plasma Fluctuations on Growth of Nano-Particles in Reactive Plasmas International conference

    K. Kamataki , H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

    2011.8 

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    Event date: 2011.8 - 2011.9

    Presentation type:Oral presentation (general)  

    Country:Ireland  

  • Fluctuation Control towards Ultimate Plasma Nanotechnologies (Keynote) Invited International conference

    M. Shiratani, K. Koga, G. Uchida, N. Itagaki, K. Kamataki

    2011.7 

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    Event date: 2011.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Control of radial density profile of nano-particle produced in reactive plasma by amplitude modulation of rf discharge voltage International conference

    K. Kamataki, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

    2011.7 

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    Event date: 2011.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • 反応性プラズマ中のナノ粒子成長に対する気相揺らぎの効果

    鎌滝晋礼, 宮田大嗣, 古閑一憲, 内田儀一郎, 山下大輔, 松崎秀文, 白谷正治

    第58回応用物理学関係連合講演会  2011.3 

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    Event date: 2011.3

    Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  • Investigation of Interaction between of Growth of Nano Particles and Plasma Fluctuations in Plasma CVD

    K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

    2010.12 

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    Event date: 2010.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマCVD中のナノ粒子成長に対するプラズマ揺動の影響

    鎌滝晋礼, 宮田大嗣, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部 第14回 支部大会  2010.12 

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    Event date: 2010.12

    Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • Effects of Amplitude Modulation of rf Discharge Voltage on Growth of Nano-Particles in Reactive Plasmas International conference

    K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

    International technical conference of IEEE Region 10  2010.11 

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    Event date: 2010.11

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Manipulation of Nano-objects Uusing Plasmas for a Plasma Nano-factory (Invited) Invited International conference

    M. Shiratani, K. Koga, G.u Uchida, N. Itagaki, K. Kamataki

    The 11th Asia Pacific Physics Conference (APPC11)  2010.11 

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    Event date: 2010.11

    Presentation type:Oral presentation (general)  

    Country:China  

  • 反応性プラズマ中のナノ粒子成長に対する電力摂動の効果

    鎌滝晋礼, 宮田大嗣, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治

    第71回応用物理学会学術講演会  2010.9 

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    Event date: 2010.9

    Presentation type:Oral presentation (general)  

    Venue:長崎大学   Country:Japan  

  • 基礎プラズマと反応性プラズマにおけるプラズマ揺動制御に関する研究 (招待講演) Invited

    鎌滝晋礼

    第37回西日本放電懇談会  2010.8 

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    Event date: 2010.8

    Presentation type:Oral presentation (general)  

    Venue:武雄東洋館   Country:Japan  

  • Plasma Fluctuations in Pristine and Reactive Plasmas (Invited) Invited International conference

    K. Kamataki

    The 11th International Workshop on Advanced Plasma Processing and Diagnostics  2010.7 

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    Event date: 2010.7

    Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Plasma Fluctuation International conference

    K. Kamataki

    2010 International Workshop on Plasma Application  2010.6 

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    Event date: 2010.6

    Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  • LMD-UにおけるECRH重畳ヘリコンプラズマにおける揺動スペクトルの変化

    鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝

    プラズマ核融合学会 九州・山口・沖縄支部第13回支部大会  2009.12 

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    Presentation type:Oral presentation (general)  

    Venue:山口大学   Country:Japan  

  • 直線ECRプラズマ中のドリフト波励起実験I

    鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、伊藤公孝、伊藤早苗

    日本物理学会 2005年秋季大会  2005.9 

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    Presentation type:Oral presentation (general)  

    Venue:同志社大学   Country:Japan  

  • Experiment on Drift Wave Excitation in Linear ECR Plasma International conference

    K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, K. Itoh, S. Itoh

    2005.10 

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    Presentation type:Oral presentation (general)  

    Country:United States  

  • The Excitation of Drift Wave Instability in Bounded ECR plasma International conference

    K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, M. Yagi, K. Itoh, S. Itoh

    2005.12 

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    Presentation type:Oral presentation (general)  

    Country:Japan  

  • 境界のある直線ECRプラズマにおける衝突性ドリフト波不安定性

    鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗

    プラズマ核融合学会 九州・山口・沖縄支部第9回支部大会  2005.12 

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    Presentation type:Oral presentation (general)  

    Venue:長崎大学   Country:Japan  

  • 直線ECRプラズマ中のドリフト波励起実験Ⅱ

    鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗

    日本物理学会 第61回年次大会  2006.3 

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    Presentation type:Oral presentation (general)  

    Venue:愛媛大学   Country:Japan  

  • Observation of the Drift Wave Instability in Bounded ECR Plasma International conference

    K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, M. Yagi, K. Itoh, S. Itoh

    33rd European Physical Society (EPS) Conferences on Plasma Physics  2006.6 

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    Presentation type:Oral presentation (general)  

    Country:Italy  

  • 直線ECRプラズマ中のドリフト波励起実験

    鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗

    RIAMフォーラム 2006  2006.6 

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    Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • 直線ECRプラズマ中のドリフト波励起実験Ⅲ

    鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗

    日本物理学会 2006年秋季大会  2006.9 

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    Presentation type:Oral presentation (general)  

    Venue:千葉大学   Country:Japan  

  • Collisional Drift and Flute Wave Instabilities in Bounded Linear ECR Plasma – Identification and Stabilization International conference

    2006.10 

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    Venue:Fukuoka   Country:Japan  

  • 境界のある直線ECRプラズマにおける衝突性ドリフト波不安定性とフルート不安定性の共存

    鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗

    プラズマ核融合学会 九州・山口・沖縄支部第10回支部大会  2006.12 

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    Venue:九州大学   Country:Japan  

  • 直線ECRプラズマにおける衝突性ドリフト波不安定性とフルート波不安定性の共存現象

    鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗

    日本物理学会 2007年春季大会  2007.3 

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    Venue:鹿児島大学   Country:Japan  

  • 直線ECRプラズマにおけるドリフト不安定性とフルート不安定性の競合的振る舞い

    鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗

    日本物理学会 2007年年次大会  2007.9 

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    Venue:北海道大学   Country:Japan  

  • 直線ECRプラズマにおけるドリフトモードとフルートモードの周期的競合

    鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝

    プラズマ核融合学会 九州・山口・沖縄支部第11回支部大会  2007.12 

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    Venue:宮崎公立大学   Country:Japan  

  • 直線ECRプラズマにおけるドリフト不安定性とフルート不安定性の競合的振る舞い・Ⅱ

    鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝

    日本物理学会 2008年第63回年次大会  2008.3 

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    Venue:近畿大学   Country:Japan  

  • 直線ECRプラズマ装置におけるドリフトモードとフルートモードの競合的関係

    鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝

    第11回若手科学者によるプラズマ研究会  2008.3 

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    Venue:日本原子力研究開発機構, 那珂   Country:Japan  

  • Investigation of Competitive Oscillations between Drift Mode and Flute Mode in Linear Cylindrical ECR Plasma International conference

    K. Kamataki, S. Itoh, Y. Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh

    2nd ITER International Summer School (IISS2008) In conjunction with the 47th Summer School of JSPF for Young Plasma Scientists  2008.7 

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    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Dynamics of Drift and Flute Modes in Linear Cylindrical ECR Plasma International conference

    K. Kamataki, S. Itoh, Y. Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh

    14th International Congress on Plasma Physics (ICPP2008)  2008.9 

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    Presentation type:Oral presentation (general)  

    Country:Japan  

  • 直線ECRプラズマにおける帯状流型振動

    鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝

    プラズマ核融合学会 九州・山口・沖縄支部第12回支部大会  2008.12 

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    Venue:九州大学   Country:Japan  

  • 直線円筒形ECRプラズマにおけるゾーナルフロー型振動の観測

    鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝

    日本物理学会 2009年第64回年次大会  2009.3 

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    Presentation type:Oral presentation (general)  

    Venue:立教学院   Country:Japan  

  • ECRH Superposition on Linear Cylindrical Helicon Plasma in LMD-U International conference

    K. Kamataki, K. Itoh, S. Itoh, A. Fujisawa, S. Inagaki, Y. Nagashima, M. Yagi, T. Yamada

    19th International Toki Conference (ITC19)  2009.12 

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    Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマスパッタによる高移動度アモルファスITO成膜におけるハイブリッド機械学習モデル

    鎌滝晋礼, 板垣奈穂, 山下大輔, 奥村賢直, 山下尚人, 古閑一憲, 白谷正治

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date: 2024.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京都市大学   Country:Japan  

  • Large-Scale Fabrication of Tm3 Fe5 O12 Film with Perpendicular Magnetic Anisotropy Using Magnetron Sputtering International conference

    A. M. Nurut, S. Obinata, T. Okumura, K. Kamataki, K. Koga, N. Itagaki, M. Shiratani, N. Yamashita

    ISPlasma  2024.3 

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    Event date: 2024.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • イネ種皮のプラズマ起因化学種透過性の二次元分布解析

    史合平, 奥村賢直, P. Attri, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date: 2024.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京都市大学   Country:Japan  

  • プラズマ照射によるシロイヌナズナ種皮の物質透過性変化

    奥村賢直, 古閑一憲, アタリパンカジ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 南原英司

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date: 2024.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京都市大学   Country:Japan  

  • 大気圧プラズマを用いた窒素固定における電極温度の効果

    中尾匠, 奥村賢直, パンカジアタリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 古閑一憲

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date: 2024.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京都市大学   Country:Japan  

  • プラズマを用いた CO2 のメタン化におけるモレキュラーシーブの活用

    都甲将, 奥村賢直, 鎌滝晋礼, 竹中弘祐, 古閑一憲, 白谷正治, 節原裕一

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date: 2024.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京都市大学   Country:Japan  

  • CxHy+ArプラズマCVDを用いた水素化アモルファスカーボン膜の堆積特性に対するガス圧力の効果

    小野晋次郎, 恵利眞人, 奥村賢直, 山下尚人, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date: 2024.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京都市大学   Country:Japan  

  • Sputtering deposition of low resistive 30-nm-thick ZnO:Al films on seed layers grown via solid phase crystallization of fractionally crystallized ZnON films International conference

    Y. Wada, S. Zhiyuan, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki

    ISPlasma  2024.3 

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    Event date: 2024.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Deposition of carbon nanoparticles fabricated by multi-hollow discharge plasma CVD on DC biased substrates International conference

    K. Koga, S. Ono, M. Eri, S. H. Hwang, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M.Shiratani

    ISPlasma  2024.3 

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    Event date: 2024.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Molecular structure analysis of DBD plasma irradiated DMPO by LC-MS International conference

    T. Okumura, H. Shi, P.Attri, D. Yamasita, K. Kamataki, N.Yamasita, N. Itagaki, K. Koga, M. Shiratan

    ISPlasma  2024.3 

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    Event date: 2024.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Influence of CO and H2O2 in plasma agriculture International conference

    P. Attri, T. Okumura, K. Koga, K. Kamataki, M. Shiratani

    ISPlasma  2024.3 

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    Event date: 2024.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Nitrogen Fixation to Leaf Mold Using Air Plasma and Evaluation of Phenotype Response of Sugarcane to Nitrogen-Fixed Fertilizer International conference

    T.Nakao, T. Okumura, P. Attri, D. Yamashita, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani, K. Koga

    ISPlasma  2024.3 

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    Event date: 2024.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマスパッタによる高品質アモルファスITO薄膜形成のためのハイブリッド機械学習モデル(招待講演) Invited

    鎌滝晋礼,板垣 奈穂,山下 大輔, 奥村 賢直,山下 尚人, 古閑 一憲, 白谷 正治

    2024.1 

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    Event date: 2024.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学   Country:Japan  

  • Predictions for High Quality Amorphous ITO(In2O3:Sn) Film Formation via Hybrid Machine Learning Model (Invited) Invited International conference

    K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

    ICTS  2024.1 

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    Event date: 2024.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Effects of Carbon Nanoparticle Interposed between Two Hydrogenated Amorphous Carbon Films on Surface Morphology of a-C:H Film

    S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    2023.12 

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    Event date: 2023.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Enhancement of The Coercivity and Blocking Temperature of Co doped ZnO films by RF sputtering Using Nitrogen International conference

    M. N. Agusutrisno, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, N. Yamashita

    MRM2023/IUMRS-ICA2023  2023.12 

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    Event date: 2023.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Analysis of Plasma Processes using Machine Learning and Quantum Computing International conference

    M. Shiratani, K. Kamataki

    MRM2023/IUMRS-ICA2023  2023.12 

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    Event date: 2023.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Evaluation of Elastic Parameters of a-C:H Film with Carbon Nanoparticles Using Nanoindentation Method International conference

    K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    MRM2023/IUMRS-ICA2023  2023.12 

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    Event date: 2023.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Hybrid machine learning model prediction for high mobility amorphous ITO films fabricated by RF plasma sputtering International conference

    K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

    MRM2023/IUMRS-ICA2023  2023.12 

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    Event date: 2023.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In2O3:Sn by Sputtering Combined with Solid Phase Crystallization International conference

    N. Itagaki, Z. Shen, Y. Wada, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani

    MRM2023/IUMRS-ICA2023  2023.12 

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    Event date: 2023.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Catalytic ability of Cu and Ni in methanation with plasma catalysis International conference

    S. Toko, T. Okumura, K. Kamataki, K. Takenaka, K. Koga, M. Shiratani, Y. Setsuhara

    MRM2023/IUMRS-ICA2023  2023.12 

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    Event date: 2023.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • クメンを用いた二周波容量結合プラズマ CVD 法による a-C:H 膜の製膜特性

    恵利眞人, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷 正治

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date: 2023.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:山口KDDI維新ホール   Country:Japan  

  • PECVD を用いた a-C:H 成膜における添加希ガス種における成膜機構の違い

    池田築, 大高真寛,大友洋,脇田大地,頼建勲,鎌滝晋礼, 山下大輔,奥村賢直,山下尚人,板垣奈穂,古閑一憲, 白谷正治, 進藤崇央,松土龍夫

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date: 2023.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:山口KDDI維新ホール   Country:Japan  

  • 任意波形放電による水素化アモルファスカーボン成膜:イオンフラックスが膜質に与える影響

    脇田大地,大高真寛,池田築,頼建勲,大友洋,鎌滝晋礼,山下直人,板垣奈穂,古閑一憲,白谷正治,進藤崇央,松土龍夫

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date: 2023.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:山口KDDI維新ホール   Country:Japan  

  • 逆 Stranski-Krastanov モードによるサファイア基板上への(ZnO)x(InN)1-x 膜のエピタキシャル成長:バッファー層のモフォロジーの影響

    畑昌太朗,中野祐太郎,成重椋太,山下尚人,鎌滝晋礼,奥村賢直,古閑一憲,白谷正治,木山治樹,板垣奈穂

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date: 2023.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:山口KDDI維新ホール   Country:Japan  

  • 逆 Stranski-Krastanov モードを利用した異なるオフ角を有するサファイア基板上への(ZnO)x(InN)1-x 膜の成長

    中野祐太郎,成重椋太,山下尚人,鎌滝晋礼,奥村賢直,古閑一憲,白谷正治,木山治樹,板垣奈穂

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date: 2023.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:山口KDDI維新ホール   Country:Japan  

  • 放電電圧変調波形が高周波容量結合プラズマに与える影響:PIC-MCC シミュレーション

    長尾伊織,山本祐馬,佐藤優志,鎌滝晋礼,山下尚人, 奥村賢直,木山治樹,板垣奈穂,古閑一憲,白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date: 2023.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:山口KDDI維新ホール   Country:Japan  

  • 水と大気圧プラズマの相互作用による二酸化炭素分解

    乙部響, P. Attri,奥村賢直, 史合平, 中尾匠,日高直哉, 鎌滝晋礼,山下大輔,板垣奈穂,古閑一憲,白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date: 2023.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:山口KDDI維新ホール   Country:Japan  

  • TEOS-PECVD における発光分光計測を用いたSiO2 薄膜膜質推定についての研究

    佐藤優志, 山本祐馬, F. W. Sukuma, 長尾伊織, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date: 2023.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:山口KDDI維新ホール   Country:Japan  

  • 空気プラズマを用いた窒素固定に対する放電電力密度の効果

    中尾匠, 奥村賢直, パンカジアタリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 古閑一憲

    第40回 プラズマ・核融合学会 年会  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:アイーナ・いわて県民情報交流センター   Country:Japan  

  • Effect of the plasma-generated reactive species on protein folding

    P. Attri, T. Okumura, K. Koga, K. Kamataki, M. Shiratani

    2023.11 

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    Event date: 2023.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマ中に浮遊する微粒子の帯電量の新評価法

    井口恒聖, 佐藤斗真, 鎌滝晋礼, P. Yiming, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治, 富田健太郎

    2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学伊都キャンパス   Country:Japan  

  • TEOS-PECVD によるSiO2成膜におけるプラズマ発光強度と膜質の関係

    山本祐馬, 佐藤優志, 長尾伊織, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学伊都キャンパス   Country:Japan  

  • 任意電圧波形放電による容量結合プラズマにおける重畳周波数の効果:PIC-MCCモデル

    頼 建勳, 鎌滝 晋礼, 山下 大輔, 奥村 賢直, 山下 尚人, 板垣 奈穂, 古閑 一憲, 白谷 正治

    2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学伊都キャンパス   Country:Japan  

  • Sputtering deposition of single crystalline ZnO films on sapphire substrates via inverted Stranski-Krastanov mode: effects of thickness of 3D island buffer layer

    H. Otsuyama, R. Mitsuishi, T. Yunoue, K. Yataka, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    2023.11 

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    Event date: 2023.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Comparative study of deposition characteristics of different precursors for plasma CVD International conference

    S. Ono, M. Eri, T. Okumura, K. Kunihiro, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    DPS2023  2023.11 

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    Event date: 2023.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Quantitative Analysis of Electric Field Intensity Generated by Scalable Dielectric Barrier Discharge Electrodes for Irradiating to Plant Seeds International conference

    K. Koga, T. Okumura, T. Nakao, K. Kamataki, N. Yamashita, N. Itagaki, P. Attri, M. Shiratani

    DPS2023  2023.11 

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    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Combining machine learning of classification and regression models for predicting high quality amorphous ITO films fabricated by RF plasma sputtering International conference

    K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

    DPS2023  2023.11 

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    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Plasma effect on the enzyme structure: Experimental and simulation studies

    P. Attri,T. Okumura, K. Koga, K. Kamataki, M. Shiratani

    2023.11 

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    Event date: 2023.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 大量処理のためのプラズマ照射による土壌への窒素固定化の最適化

    中尾 匠,奥村 賢,アタリ パンカジ,山下 大輔,鎌滝 晋礼,山下 尚人,板垣 奈穂,白谷 正治,古閑 一憲

    第33回日本MRS年次大会  2023.11 

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:横浜市産業貿易センタービル   Country:Japan  

  • 液体クロマトグラフィー質量分析法を用いたプラズマ被照射物からの亜硝酸塩および硝酸塩の同時検出法の開発

    日高 直哉,奥村 賢直,アタリ パンカジ,鎌滝 晋礼,山下 尚人,板垣 奈穂,古閑 一憲,白谷 正治

    第33回日本MRS年次大会  2023.11 

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:横浜市産業貿易センタービル   Country:Japan  

  • スケーラブル誘電体バリア放電プラズマを照射したDMPOの質量分析

    乙部 響,史 合平,奥村 賢直,阿南 輝樹,アタリ パンカジ,山下 大輔,鎌滝 晋礼,山下 尚人,板垣 奈穂,古閑 一憲,白谷 正治

    第33回日本MRS年次大会  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:横浜市産業貿易センタービル   Country:Japan  

  • 質量分析を用いたプラズマ照射イネ種子における分子修飾解析

    史 合平,奥村 賢直,パンカジ アトリ,山下 大輔,鎌滝 晋礼,山下 尚人,板垣 奈穂,古閑 一憲,白谷 正治

    第33回日本MRS年次大会  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:横浜市産業貿易センタービル   Country:Japan  

  • Predictions for High Mobility Amorphous ITO(In2O3:Sn) Films via Hybrid Machine Learning Model International conference

    K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

    AAPPS-DPP2023  2023.11 

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    Event date: 2023.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Highly sensitive electric field vector measurements using an optically trapped fine particle International conference

    Global Plasma Forum in Aomori  2023.10 

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    Event date: 2023.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Controlling the synthesis, transport, and surface coverage of carbon nanoparticles using plasma CVD International conference

    S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani

    Global Plasma Forum in Aomori  2023.10 

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    Event date: 2023.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Evaluation of carbon nanoparticle adhesion on substrate surface deposited by plasma CVD International conference

    K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    Global Plasma Forum in Aomori  2023.10 

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    Event date: 2023.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Evaluation of Interaction Between Substrate and Nanoparticles Deposited by Plasma Chemical Vapor Deposition International conference

    K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N.Yamashita, N. Itagaki, M. Shiratani

    GEC  2023.10 

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    Event date: 2023.10

    Language:English   Presentation type:Oral presentation (general)  

  • プラズマ照射による窒素固定肥料へのサトウキビの表現型応答解析

    中尾匠, 奥村賢直, パンカジアタリ, 古閑一憲, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール他   Country:Japan  

  • 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(4)

    鎌滝晋礼, 佐藤斗真, 井口恒聖, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール他   Country:Japan  

  • ZnON膜からの固相結晶化ZnO膜の形成と透明導電膜シード層としての効果:ZnON膜の結晶化度の影響

    和田義晴, 沈志遠, 薮田久人, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール他   Country:Japan  

  • 逆Stranski-Krastanovモードを用いたサファイア基板上へのZnO単結晶膜成長:MgOバッファー層の効果

    湯上貴文, 矢高功太郎, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲, 白谷正治, 板垣奈穂

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール他   Country:Japan  

  • サファイア基板上への原子ステップを有するZn1-xMgxO薄膜の形成:3次元島バッファー層の形成温度の影響

    矢高功太郎, 湯上貴文, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール他   Country:Japan  

  • ZnOおよびScAlMgO4ステップ基板上への(ZnO)x(InN)1-x膜の室温エピタキシャル成長

    成重椋太, 中野祐太朗, 山下尚人, 鎌滝晋礼, 奥村賢直, 木山治樹, 古閑一憲, 白谷正治, 薮田久人, 板垣奈穂

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール他   Country:Japan  

  • 逆Stranski-Krastanovモードによる格子不整合基板上への原子平坦 (ZnO)x(InN)1-x 膜の成長

    中野祐太郎, 成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 木山治樹, 薮田久人, 板垣奈穂

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール他   Country:Japan  

  • 質量分析を用いたプラズマ照射DMPOの分子修飾解析

    史合平, 奥村賢直, P. Attri, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール他   Country:Japan  

  • サンドウィッチ構造 a-C:H 膜の剥離と強度に対する 膜界面に堆積したナノ粒子の効果

    小野晋次郎, 恵利眞人, 奥村賢直, 鎌滝晋礼, 山下尚人, 木山治樹, 板垣奈穂, 古閑一憲, 白谷正治

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール他   Country:Japan  

  • 任意波形放電を用いた水素化アモルファスカーボン膜の膜質制御

    大高真寛,大友洋, 池田築, 頼建勲, 脇田大地, 鎌滝晋礼, 山下直人, 板垣奈穂, 古閑一憲, 白谷正治, 進藤崇央, 田中諭志, 松土龍夫

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール他   Country:Japan  

  • プラズマを用いたCO2の水素還元における選択性の制御

    都甲将, 奥村賢直, 鎌滝晋礼, 竹中弘祐, 古閑一憲, 白谷正治, 節原裕一

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール他   Country:Japan  

  • 質量分析を用いたプラズマ照射イネ種子における変動分子の組織別解析

    史合平, 奥村賢直, A. Pankaj, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    2023年度(第76回)電気・情報関係学会九州支部連合大会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:崇城大学   Country:Japan  

  • 大気圧空気プラズマによる硝酸態窒素固定量に対する放電電力密度依存性

    中尾匠, 奥村賢直, A. Pankaj, 古閑一憲, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治

    2023年度(第76回)電気・情報関係学会九州支部連合大会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:崇城大学   Country:Japan  

  • Measurement of electric field, UV photons, and long-lifetime reactive species generated by atmospheric pressure air plasma for plasma bio applications International conference

    T. Okumura, S. Tsuboyama, Y. Tagawa, T. Nakao, T. Anan, H. Tanaka, K. Kamataki, N. Yamashita, N. Itagaki, P. Attri, K. Koga, M. Shiratani, K. Kuchitsu

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Effects of tailored voltage waveform discharges on deposition of hydrogenated amorphous carbon films by CH4/Ar capacitively coupled plasma International conference

    M. Otaka, H. Otomo, K. Ikeda, J. Lai, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, T. Shindo, S. Tanaka, T. Matsudo

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Optical tweezers technique for electric field strength and fluctuation measurements in plasma using a fine particle International conference

    T. Sato, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Control of ion trajectory in high aspect ratio trenches by using amplitude modulated rf discharges International conference

    I. Nagao, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Investigation of particle charge and interparticle interaction in a plasma International conference

    K. Kamataki, T. Sato, K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Coverage control of carbon nanoparticles on substrate using capacitively coupled plasma chemical vapor deposition International conference

    K. Koga, S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Sputter epitaxy of atomically flat (ZnO)x(InN)1-x films on sapphire substrates using ZnO(N) buffer layers fabricated by Ar/N2 discharges International conference

    Y. Nakano, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, H. Kiyama, H. Yabuta, N. Itagaki

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Deposition characteristics of cumene plasma CVD for high-speed deposition of high-density a-C:H films International conference

    S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Relation between Spatial Distribution of Optical Emission Intensity and SiO2 Film Property in TEOS-PECVD International conference

    Y. Yamamoto, I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Effects of Ne mixing on plasma enhanced chemical vapor deposition of a-C:H films using CH4/Ar/Ne capacitively coupled discharges International conference

    K. Ikeda, M. Otaka, H. Otomo, T. Arima, J. Lai, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani, T. Shindo, S. Tanaka, T. Matsudo

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Sputter epitaxy of Zn1-xMgxO films on lattice-mismatched sapphire substrates utilizing ZnO(N)/MgO buffer layers fabricated by Ar/N2 and Ar/O2 discharges International conference

    T. Yunoue, K. Yataka, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Pseudomorphic growth of (ZnO)x(InN)1-x films on ZnO substrates by magnetron sputtering using Ar/N2/O2 discharges International conference

    R. Narishige, Y. Nakano, N. Yamashita, K. Kamataki, T. Okumura, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Sputter deposition of low resistive 30-nm-thick ZnO:Al films using ZnO seed layers grown via solid-phase crystallization International conference

    Y. Wada, Z. Shen, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Effects of lower discharge frequency on ion energy distribution function in dual frequency plasma studied by particle-in-cell/Monte Carlo method International conference

    J. Lai, T. Arima, M. Otaka, K. Ikeda, I. Nagao, K. Kamataki, D. Yamashita, N. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Netherlands  

  • Ion Trajectory Control in Processing Plasmas for Nano-Fabrication(keynote) Invited International conference

    2023.7 

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    Event date: 2023.7

    Language:English   Presentation type:Oral presentation (general)  

    Venue:ウィーン工科大学   Country:Austria  

  • プラズマ中帯電微粒子の相互作用に関する研究

    井口恒聖, 佐藤斗真, 鎌滝晋礼, 富田健太郎, P. Yiming, 山下尚人, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    2023年度日本表面真空学会 九州支部学術講演会  2023.6 

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    Event date: 2023.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:アルカス佐世保   Country:Japan  

  • ナノ粒子を用いた膜界面の形状ゆらぎによる膜応力低減

    小野晋次郎, 恵利眞人, 奥村賢直, 鎌滝晋礼, 山下尚人, 木山治樹, 板垣奈穂, 古閑一憲, 白谷正治

    2023年度日本表面真空学会 九州支部学術講演会  2023.6 

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    Event date: 2023.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:アルカス佐世保   Country:Japan  

  • Plasma-induced CO2 conversion: Experimental and Computational study International conference

    P. Attri, T. Okumura, K. Koga, N. Takeuchi, K. Kamataki, M. Shiratani

    ISPC25  2023.5 

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    Event date: 2023.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Prediction of Plasma CVD Process Data of a-Si:H Films via Machine Learning International conference

    K. Kamataki, F. L. Chawarambwa, D. Yamashita, N. Yamashita, T.Okumura, N. Itagaki, K.Koga, M. Shiratani

    ISPC25  2023.5 

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    Event date: 2023.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of sputtering of a-C:H films on the chemical composition International conference

    M. Shiratani, K. Ikeda, M. Otaka, S. Ono, T. Okumura, K. Koga, K. Kamataki

    ISPC25  2023.5 

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    Event date: 2023.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • High Throughput Deposition of Hydrogenated Amorphous Carbon Films using High-Pressure Ar+CH4 Plasmas International conference

    ICMCTF2021  2021.4 

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    Event date: 2021.4

    Language:English   Presentation type:Oral presentation (general)  

  • プラズマを用いてカーボンナノ粒子層を含むミルフィーユ型 a-C:H 膜の機械的特性

    古閑一憲, 黄成和, Y.Hao, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 白谷正治

    第68回応用物理学会春季学術講演会  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • マグネトロンスパッタリング法による(ZnO)x(InN)1-x膜のエピタキシャル成長:基板の面極性の影響

    成重椋太, 金島健太郎, 浦川 聖一, 山下大輔, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂

    応用物理学会プラズマエレクトロニクス分科会30周年記念シンポジウム  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • ナノ粒子取り込みによる SiNx の低温プラズマ CVD 製膜

    佐々木勇輔, 吉田知晃, 阿部滉平, 山本晃大, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    応用物理学会プラズマエレクトロニクス分科会30周年記念シンポジウム  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 任意波形励起プラズマ CVD 法による a-C:H 膜質の制御

    岩本亮介, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, 進藤崇央, 田中諭志, 松土龍夫

    応用物理学会プラズマエレクトロニクス分科会30周年記念シンポジウム  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • プラズマCVD中飛行時間によるカーボンナノ粒子サイズ制御

    古閑一憲, S. H. Hwang, Y. Hao, P. Attir, 奥村賢直,鎌滝晋礼,板垣奈穂, 白谷正治

    日本物理学会第76回年次大会  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Electric Field Measurements in Ar plasmas using a Fine Particle Trapped with Optical Tweezers International conference

    S. Okunaga, K. Kamataki, K. Tomita, P. Yimin, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ISPlasma2021/IC-PLANTS2021  2021.3 

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    Event date: 2021.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 調湿レタス種子の発芽に及ぼす大気圧プラズマ照射の影響

    奥村 賢直, 阿南 輝樹, 田中 颯, 有田 涼, 山下 大輔, アトリ パンカジ, 鎌滝 晋礼, 板垣 奈穂, 古閑 一憲, 白谷 正治, 藤本 祉史, 熊内 雅人, 松井 英享, 石橋 勇志

    2021.1 

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    Event date: 2021.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Sputter deposition of ZnAlO films with tunable bandgaps from 3.4 to 6.1 eV International conference

    ICMAP 2020 & ISFM 2020  2021.1 

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    Event date: 2021.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Effects of surface polarity of ZnO substrates on epitaxial growth of magnetron sputtered (ZnO)x(InN)1-x films International conference

    R. Narishige, K. Kaneshima, S. Urakawa, D. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

    ICMAP 2020 & ISFM 2020  2021.1 

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    Event date: 2021.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Sputter deposition of low resistive amorphous In2O3:Sn films using nitrogen mediate amorphization method: Effects of nitrogen flow rate International conference

    Y. Mido, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    ICMAP 2020 & ISFM 2020  2021.1 

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    Event date: 2021.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Structural and Optical Properties of ZnMgO Films on Sapphire Substrates Fabricated by Sputter Epitaxy International conference

    D. Takahashi, Y. Nakamura, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    ICMAP 2020 & ISFM 2020  2021.1 

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    Event date: 2021.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Impact of surface morphologies of 3D island layers on the single crystal growth of magnetron sputtered ZnO films International conference

    Y. Nakamura, M. Kikuchi, D. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagak

    ICMAP 2020 & ISFM 2020  2021.1 

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    Event date: 2021.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Growth of high-quality (ZnO)x(InN)1-x films by RF magnetron sputtering using a two-step growth process International conference

    K. Kaneshima, S. Urakawa, R. Narishige, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    ICMAP 2020 & ISFM 2020  2021.1 

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    Event date: 2021.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Low temperature fabrication of SiO2 films using capacitively coupled TEOS plasma International conference

    Y. Sasaki, T. Yoshida, K. Abe, K. Yamamoto, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    The 21st Workshop on Fine Particle Plasmas  2020.12 

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    Event date: 2020.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Study on Film Deposition Process using Spatial Profiles of Plasma Parameters and Nanoparticles in Reactive Plasma International conference

    K. Kamataki, T. Yoshida, Y. Sasaki, K. Abe, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    The 21st Workshop on Fine Particle Plasmas  2020.12 

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    Event date: 2020.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • ITO薄膜のスパッタ製膜プロセスへの機械学習の適用

    陳飛宇, 岩本亮介, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • PIC-MCCMを用いたCCPにおけるIEDに関する研究

    阿部滉平, 陶陽, 岩本亮介, 佐々木勇輔, 吉田知晃, 山下大輔, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • レタス種子の発芽特性に及ぼす調湿・プラズマ照射時間依存性

    阿南輝樹, 田中颯, 有田涼, 山下大輔, 奥村賢直, アトリ パンカジ, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, 石橋勇志, 藤本祉史, 熊内雅人, 松井英享

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • アルゴンプラズマ中光捕捉微粒子への作用力の校正

    奥永 冴京, 鎌滝 晋礼, 富田 健太郎, Pan Yiming, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治,

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • PECVD における任意電圧波形を用いた a-C:H 成膜

    永松大樹, 岩本亮介, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 進藤崇央, 田中諭志, 松土龍夫

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • CCPにおける径方向電場Eyの計測の試み

    陶陽, 岩本亮介, 阿部滉平, 鎌滝晋礼, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • スパッタエピタキシー法による(ZnO)X(InN)1-X膜の作製: 高温バッファー層の効果

    寺澤寛, 金島健太郎, 成重椋太, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Ar/N2スパッタリングによるサファイア基板上へのZnO単結晶成長:O-poorバッファー層の効果

    松本翔剛, 髙橋大智, 中村優太, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Ar+CH4 マルチホロー放電プラズマCVDで作製したカーボンナノ粒子のフラックスに対する熱泳動力の効果

    郝源, 𠮷川大智, 黄成和, 古閑一憲, 白谷正治, 鎌滝晋礼, 板垣奈穂, 奥村賢直

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • プラズマ CVD におけるナノ粒子成長とプラズマ生成の関係

    吉田知晃, 阿部滉平, 佐々木勇輔, 山本晃大, 山下大輔, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • TEOSプラズマCVDを用いたSiO2膜の形成:基板バイアス電圧依存性

    山本晃大, 吉田智晃, 阿部滉平, 佐々木勇輔, 山下大輔, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 容量結合プラズマCVD法によるSiO2膜の低温製膜

    佐々木勇輔, 吉田知晃, 阿部滉平, 山本晃大, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 容量結合プラズマ触媒法によるサバティエ反応:圧力依存性

    長谷川大樹, 出口雅志, 都甲将, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Impact of Plasma Treatment on the binding of C-terminal Domain of SARS-CoV-2 Spike Protein with Human Angiotensin-Converting Enzyme 2 (hACE2) International conference

    P. Attri, K. Koga, T. Okumura, K. Kamataki, N. Itagaki, M. Shiratani

    2020.12 

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    Event date: 2020.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Nitric Acid Generation by Pulsed Needle-water Discharge Plasma International conference

    H. Tanaka, R. Kogawa, Y. Oba, M. Fujita, T. Okumura, P. Attri, K. Koga, M. Shiratani, K. Kamataki, N. Itagaki

    2020.12 

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    Event date: 2020.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Impact of Plasma Treatment Time on the Barley Seeds using Electron Paramagnetic Resonance International conference

    K. Koga, P. Attri, T. Anan, R. Arita, H. Tanaka, T. Okumura, D. Yamashita, K. Matsuo, K. Kanataki, N. Itagaki, M. Shiratani, Y. Ishibashi

    2020.12 

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    Event date: 2020.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Growth of Rice Cultivated in Field from Plasma-irradiated Seeds and Its Health Assessment for rats International conference

    T. Okumura, H. Tanaka, R. Arita, D. Yamashita, K. Matsuo, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    2020.12 

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    Event date: 2020.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマ触媒法を用いたCO2のCH4化反応におけるプラズマ発光強度の空間分布

    出口雅志, 山下大輔, 都甲将, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第37回 プラズマ・核融合学会 年会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:愛媛大学   Country:Japan  

  • プラズマCVDにおけるナノ粒子成長とプラズマ生成の関係

    白谷正治, 古閑一憲, 鎌滝晋礼, 吉田知晃, 佐々木勇輔, 阿部滉平

    第37回 プラズマ・核融合学会 年会  2020.12 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:愛媛大学   Country:Japan  

  • Sputter deposition of low resistive amorphous In2O3:Sn films using impurity mediate amorphization method: Effects of substrate temperature International conference

    Y. Midou, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    The 5t h Asian Applied Physics Conference (Asian-APC)  2020.11 

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    Event date: 2020.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマ触媒メタン化におけるメタン収率とプラズマ発光強度空間分布の関係

    出口雅志,長谷川 大樹,山下 大輔,鎌滝 晋礼,板垣 奈穂,古閑 一憲,白谷 正治,都甲 将,寒川 誠二

    2020年(令和2年度 )応用物理学会九州支部学術講演会  2020.11 

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    Event date: 2020.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Effect of Concave Concentrator and Plane Reflector Mirror to Increase Efficiency of Bifacial Dye-Sensitized Solar Cells International conference

    T. E. Putri, F. L. Chawarambwa, H. Seo, Min-Kyu Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    The 5t h Asian Applied Physics Conference (Asian-APC)  2020.11 

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    Event date: 2020.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of substrate surface polarity on epitaxial growth of magnetron sputtered (ZnO)x(InN)1-xfilms International conference

    R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki,T. Okumura, K. Koga, M. Shiratani, N. Itagaki

    The 5t h Asian Applied Physics Conference (Asian-APC)  2020.11 

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    Event date: 2020.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Bandgap Tuning of ZnMgO Films on Sapphire Substrates Fabricated by Sputter Epitaxy International conference

    D. Takahashi, Y. Nakamura, S. Urakawa, D. Yamashita,T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    The 5t h Asian Applied Physics Conference (Asian-APC)  2020.11 

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    Event date: 2020.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Development of Highly Efficient and Stable Quasi-Solid Electrolytes for Dye-Sensitized solar Cells International conference

    F. L. Chawarambwa, K. Kamataki , K. Koga , M. Shiratani

    The 5t h Asian Applied Physics Conference (Asian-APC)  2020.11 

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    Event date: 2020.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Role of seed coat color and harvest year on growth enhancement by plasma irradiation to seeds International conference

    K. Koga, P. Attri, K. Ishikawa, T. Okumura, K. Matsuo, D. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani, V. Mildaziene

    The 73rd Annual Gaseous Electronics Conference  2020.10 

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    Event date: 2020.10

    Language:English   Presentation type:Oral presentation (general)  

  • マルチホロー放電プラズマ CVDを用いて作製したカーボンナノ粒子輸送量に対する電極基板間距離の効果

    古閑一憲, S. H. Hwang, 奥村賢直, Y. Hao, 山下大輔, 松尾かよ, 板垣奈穂, 鎌滝晋礼, 白谷正治

    2020年度(第73回)電気・情報関係学会九州支部連合大会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • プラズマ触媒反応系における触媒のCO2生成反応への影響

    都甲将, 寒川誠二, 出口雅志, 鎌滝晋礼, 古閑一憲, 白谷正治

    第81回応用物理学会秋季学術講演会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 高温障害を持つイネ種子の発芽特性へ及ぼす誘電体バリア放電プラズマ照射の影響

    奥村 賢直, 石橋 勇志, C. Suriyasak, 田中 颯, 佐藤 僚哉, 有田 涼, 廣松 真弥, 古閑 一憲, P. Attri, 松尾 かよ, 山下 大輔, 板垣 奈穂, 鎌滝 晋礼,白谷 正治

    第81回応用物理学会秋季学術講演会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 光ピンセットによる捕捉微粒子を用いたアルゴンプラズマの等電場面計測

    奥永冴京, 岩本亮介, 鎌滝晋礼, 富田健太郎, PanYiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

    第81回応用物理学会秋季学術講演会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • メタンプラズマCVDを用いたホローカーボンナノ粒子のワンステップ作製

    Y. Hao, S. H. Hwang, 古閑一憲, 鎌滝晋礼, 板垣奈穂, 中谷達行, 白谷正治

    第81回応用物理学会秋季学術講演会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • プラズマCVDを用いたa-Si:H堆積薄膜中のSi-H/Si-H2結合形成の活性化エネルギー

    古閑一憲, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 白谷正治

    日本物理学会 2020年秋季大会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • プラズマCVD技術文献のテキストマイニングを用いた単語のインパクトの解析

    古閑一憲, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 白谷正治, 谷口雄太, 池田大輔

    第81回応用物理学会秋季学術講演会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • プラズマと薄膜のナノ界面相互作用による結合形成の活性化エネルギー評価

    古閑一憲, 原尚志, 鎌滝晋礼, 板垣奈穂, 白谷正治

    日本物理学会第75回年次大会(2020年)  2020.3 

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  • ⾼温障害を持つイネ種⼦の発芽特性に対するプラズマ照射の効果

    古閑⼀憲, 石橋勇志, S. Chetphilin, 田中颯, 佐藤僚哉, 有田涼, 廣松真弥, 石川健治, P. Attri, 松尾かよ, 山下⼤輔, 板垣奈穂, 鎌滝晋礼, 白谷正治

    第67回応用物理学会春季学術講演会  2020.3 

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:上智大学   Country:Japan  

  • ⾮平衡プラズマを⽤いたサイズ制御したカーボンナノ粒⼦の連続作 製と堆積

    古閑⼀憲, 黄成和, 石川健治, P. Attri, 松尾かよ, 山下⼤輔, 板垣奈穂, 鎌滝晋礼, 白谷正治

    第67回応用物理学会春季学術講演会  2020.3 

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:上智大学   Country:Japan  

  • プラズマ照射したカイワレ種⼦の吸⽔の時間推移評価

    石川健治, P. Attri, 奥村賢直, 古閑⼀憲, 有田涼, 佐藤僚哉, 田中颯, 廣松真弥, 松尾かよ, 山下大輔, 鎌滝晋礼, 板垣奈穂, 堀勝, 白谷正治

    第67回応用物理学会春季学術講演会  2020.3 

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:上智大学   Country:Japan  

  • Effects of substrates on the epitaxial growth of (ZnO)x(InN)1-x films International conference

    R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    ISPlasma2020/IC-PLANTS2020  2020.3 

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    Event date: 2020.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Methane production for energy storage using low temperature plasma (Invited) Invited International conference

    M. Shiratani, M. Ideguchi, A. Yamamoto, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga

    7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020, 4th International Symposium on Energy Research and Application  2020.1 

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    Event date: 2020.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Effects of Activated Carbon Counter Electrode On Bifacial Dye Sensitized Solar Cells (DSSCs) International conference

    T. E. Putri, Y. Hao, F. L. Chawarambwa, H. Seo, Min-Kyu Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020, 4th International Symposium on Energy Research and Application  2020.1 

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    Event date: 2020.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Si3N4/Carbon based PEDOT:PSS Counter Electrode for low-cost Dye-Sensitized Solar Cells International conference

    F. L. Chawarambwa, T. E. Putri, Y. Hao, H. Seo, Min-Kyu Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020, 4th International Symposium on Energy Research and Application  2020.1 

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    Event date: 2020.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • プラズマ照射したカイワレダイコン種子の発芽促進機構-吸水時の種子内ラジカル動態-

    有田涼, 田中颯, 廣松真弥, 佐藤僚哉, 松尾かよ, 山下大輔, 板垣奈穂, 鎌滝晋礼, Pankaj Attri, 石川健治, 古閑一憲, 白谷正治

    プラズマ・核融合学会九州・沖縄・山口支部 第23回支部大会  2019.12 

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    Event date: 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:B-ConPlaza, 別府   Country:Japan  

  • イネ種子に対するプラズマ照射効果のフィールドテスト

    田中颯, 有田涼, 廣松真弥, 佐藤僚哉, 松尾かよ, 山下大輔, 板垣奈穂, 鎌滝晋礼, Pankaj Attri, 石川健治, 古閑一憲, 白谷正治

    プラズマ・核融合学会九州・沖縄・山口支部 第23回支部大会  2019.12 

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    Event date: 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:B-ConPlaza, 別府   Country:Japan  

  • レタス幼苗重量分布に対する種子エイジングとプラズマ照射の効果

    廣松真弥, 有田涼, 田中颯, 佐藤僚哉, 松尾かよ, 山下大輔, 板垣奈穂, 鎌滝晋礼, Pankaj Attri, 石川健治, 古閑一憲, 白谷正治

    プラズマ・核融合学会九州・沖縄・山口支部 第23回支部大会  2019.12 

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    Event date: 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:B-ConPlaza, 別府   Country:Japan  

  • パルス変調プラズマ触媒法による二酸化炭素のメタン化

    出口雅志, 山本瑛久, 山下大輔, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

    プラズマ・核融合学会九州・沖縄・山口支部 第23回支部大会  2019.12 

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    Event date: 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:B-ConPlaza, 別府   Country:Japan  

  • 光ピンセットによる微粒子トラップを用いたアルゴンプラズマ電場の精密測定

    奥永冴京, 岩本亮介, 鎌滝晋礼, 富田健太郎, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

    プラズマ・核融合学会九州・沖縄・山口支部 第23回支部大会  2019.12 

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    Event date: 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:B-ConPlaza, 別府   Country:Japan  

  • 反応性プラズマのAM変調における発光強度分布

    阿部滉平, 吉田知晃, 佐々木勇輔, 山下大輔, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

    プラズマ・核融合学会九州・沖縄・山口支部 第23回支部大会  2019.12 

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    Event date: 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:B-ConPlaza, 別府   Country:Japan  

  • TEOS プラズマ CVD による SiO2製膜と膜質の温度勾配依存性

    吉田知晃, 阿部滉平, 佐々木勇輔, 山下大輔, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

    プラズマ・核融合学会九州・沖縄・山口支部 第23回支部大会  2019.12 

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    Event date: 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:B-ConPlaza, 別府   Country:Japan  

  • Measurements of Electrostatic Potential in RF Ar Plasma Using an Optically Trapped Fine Particle International conference

    M. Shiratani, R. Iwamoto, S. Okunaga, K. Kamataki, N. Itagaki, K. Koga

    20th Workshop on Fine Particle Plasmas  2019.12 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of high nitriding and low hydrogen content SiN films at 100°C by controlling cluster formation in plasma International conference

    2019.12 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (general)  

    Venue:National Institute of Fusion Science, Gifu   Country:Japan  

  • Tuning Parameters of Indium Tin Oxide Sputter Processing via Bayesian Optimization International conference

    R. Iwamoto, S. Okunaga, S. Muraoka, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    20th Workshop on Fine Particle Plasmas  2019.12 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Sputtering Deposition with Impurities: Another Key Parameter to Control Film Structures (Invited) Invited International conference

    N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

    2019.12 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of higher-order silane molecules on Si-H2 bond and Si-H bond densities in a-Si:H films International conference

    H. Hara, Y. Hao, K. Abe, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    2019.12 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Pulse Bias Voltage on Characteristics of a-C:H Film Deposited by High Pressure Ar+CH4 Plasma CVD Process International conference

    S. H. Hwang, R. Iwamoto, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    2019.12 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • ZnO Based Semiconductors for Excitonic Devices (Invited) Invited International conference

    N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

    2019.12 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマ照射した種籾の圃場栽培試験

    古閑一憲, 佐藤僚哉, 吉田知晃, 有田涼, 田中颯, 廣松真弥, 鎌滝晋礼, 板垣奈穂, 白谷正治

    第36回プラズマ・核融合学会年会  2019.12 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:中部大学   Country:Japan  

  • 不純物添加アモルファス化法による低抵抗アモルファスITO膜の作製: 基板温度の影響

    村岡宗一郎, 山下大輔, 鎌滝普礼, 古閑一憲, 白谷正治, 板垣奈穂

    第36回プラズマ・核融合学会年会  2019.11 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:中部大学   Country:Japan  

  • Sputter deposition of wide-gap amorphous ZnAlON films with tunable bandgaps from 3.4 to 4.2 eV

    S. Urakawa, K. Kaneshima, D. Yamashita, K. Kamataki, D. Nakamura, K. Koga, M. Shiratani, N. Itagaki

    2019.11 

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    Event date: 2019.11 - 2019.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 気相中のクラスター生成制御による低温低水素SiN膜の作製

    永石翔大, 佐々木勇輔, 鎌滝晋礼, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

    第36回プラズマ・核融合学会年会  2019.11 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:中部大学   Country:Japan  

  • スパッタエピタキシーによるサファイア基板上への単結晶ZnO膜の成長

    中村優太, 村岡宗一郎, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    第36回プラズマ・核融合学会年会  2019.11 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:中部大学   Country:Japan  

  • (ZnO)x(InN)1-x膜のスパッタエピタキシーにおける基板温度の影響

    金島健太郎, 宮原奈乃華, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    第36回プラズマ・核融合学会年会  2019.11 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:中部大学   Country:Japan  

  • マルチホロー放電プラズマCVD法を用いて高ガス流速で製膜することによるa-Si:H膜の面内に局所的に存在する高密度Si-H2結合の抑制

    原尚志, HAO Yuan, 阿部滉平, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第36回プラズマ・核融合学会年会  2019.11 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:中部大学   Country:Japan  

  • ベイズ的最適化による高移動度アモルファスITO/In2O3成膜条件の探索

    岩本亮介, 鎌滝晋礼, 村岡宗一郎, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

    第36回プラズマ・核融合学会年会  2019.12 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:中部大学   Country:Japan  

  • 低温低圧プラズマと触媒を用いた二酸化炭素のメタン化率とCO発光強度の相関

    山本瑛久, 出口雅史, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第36回プラズマ・核融合学会年会  2019.12 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:中部大学   Country:Japan  

  • Fabrication of dye sensitized solar cells with up and down conversion nano-particles International conference

    F. L. Chawarambwa, K. Kamataki, H. Seo, N. Itagaki, K. Koga, M. Shiratani

    29th Annual Meeting of MRS-J  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effect of Plasma Irradiation to Seeds of Lactuca Sativa on Histogram of Fresh Weight of Their Seedling International conference

    R. Sato, M. Hiromatsu, K. Matsuo, T. Yoshida, R. Arita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    29th Annual Meeting of MRS-J  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Substrate position dependence of characteristics of a-C:H films fabricated by Ar+CH4 plasma International conference

    S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    The 4th Asian Applied Physics Conference  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Development of Carbon Based Counter Electrodes for Dye Sensitized Solar Cells International conference

    F. L. Chawarambwa, K. Kamataki, K. Koga, M. Shiratani

    The 4th Asian Applied Physics Conference  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Machine Learning Analysis for Prediction of Key Plasma Process Parameters International conference

    R. Iwamoto, S. Okunaga, K. Kamataki, H. Hara, K. Koga, M. Shiratani

    The 4th Asian Applied Physics Conference  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Sputter deposition of amorphous ZnAlON films with tunable bandgap International conference

    S. Urakawa, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    The 4th Asian Applied Physics Conference  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Surface morphology of single-crystal ZnO films on sapphire substrates fabricated by sputter epitaxy *Yuta Nakamura, Soichiro Muraoka, Kunihiro K International conference

    Y. Nakamura, S. Muraoka, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    The 4th Asian Applied Physics Conference  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Substrate temperature on Crystal Quality of (ZnO)x(InN)1-x Films Fabricated by Sputter Epitaxy International conference

    K. Kaneshima, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    The 4th Asian Applied Physics Conference  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Sputter Epitaxy of (ZnO)x(InN)1-x films for Excitonic Transistors International conference

    R. Narishige, N. Miyahara, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    The 4th Asian Applied Physics Conference  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of DC Pulse Bias on Deposition Characteristics of a-C:H Films Deposited by High Pressure Ar+CH4 Plasma CVD International conference

    S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    41st International Symposium on Dry Process (DPS2019)  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of low resistive amorphous In2O3:Sn films using impurity mediate amorphization method: Effects of substrate temperature International conference

    S. Muraoka, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    41st International Symposium on Dry Process (DPS2019)  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Pressure on Characteristics of a-Si:H Films Desosited using Multi-Hollow Discharge Plasma CVD International conference

    Y. Hao, H. Hara, K. Abe, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    3rd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2019)  2019.11 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:China  

  • Development of a Sensitive Electric Field Probe in Ar plasmas using Optically Trapped Fine Particles International conference

    K. Tomita, S. Okunaga, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    72nd Gaseous Electronics Conference  2019.10 

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    Event date: 2019.10 - 2019.11

    Language:English   Presentation type:Oral presentation (general)  

  • Spatial inhomogeneous distribution of high Si-H2 bond density in a-Si:H films deposited by MHPCVD International conference

    H. Hara, Y. Hao, K. Abe, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    72nd Gaseous Electronics Conference  2019.10 

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    Event date: 2019.10 - 2019.11

    Language:English   Presentation type:Oral presentation (general)  

  • Effects of Discharge Power on Deposition Cutoff of Carbon Nanoparticles Synthesized by High Pressure Ar+CH4 Multi-hollow Discharge Plasma CVD International conference

    S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    72nd Gaseous Electronics Conference  2019.10 

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    Event date: 2019.10 - 2019.11

    Language:English   Presentation type:Oral presentation (general)  

  • Rate Limiting Factors of Low Pressure Plasma-catalytic CO2 Methanation Process International conference

    K. Koga, A. Yamamoto, K. Kamataki, N. Itagaki, M. Shiratani

    AVS 66th International Symposium & Exhibition  2019.10 

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    Event date: 2019.10

    Language:English   Presentation type:Oral presentation (general)  

  • Ar+CH4プラズマCVDを用いて堆積した水素化アモルファスカーボン薄膜の堆積特性に対する電極基板間距離依存性

    古閑一憲, Sung Hwa Hwang, 鎌滝晋礼, 板垣奈穂, 白谷正治

    2019年度(第72回)電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州工業大学   Country:Japan  

  • 吸水したカイワレダイコン種子内ラジカル計測

    吉田 知晃, 佐藤 僚哉, 山下 大輔, 鎌瀧 晋礼, 板垣 奈穂, 古閑 一憲, 白谷 正治

    2019年第80回応用物理学会秋季学術講演会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:北海道大学   Country:Japan  

  • プラズマ生成前駆体制御による単分散ナノ粒子合成

    古閑 一憲, 鎌滝 晋礼, 白谷 正治

    2019年第80回応用物理学会秋季学術講演会  2019.9 

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:北海道大学   Country:Japan  

  • (ZnO)x(InN)1-x膜スパッタエピタキシー:表面モルフォロジーの時間発展の観察

    金島 健太郎, 宮原 奈乃華, 浦川 聖一, 山下 大輔, 鎌滝 晋礼, 古閑 一憲, 白谷 正治

    2019年第80回応用物理学会秋季学術講演会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:北海道大学   Country:Japan  

  • Synthesis of Si-nanoparticles using low temperature plasmas and its application to DSSCs International conference

    F. L. Chawarambwa, M. Shiratani, K. Koga, K. Kamataki, H. Seo

    The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)  2019.9 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Effects of cluster incorporation in SiN films International conference

    S. Nagaishi, Y. Sasaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)  2019.9 

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    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • High Rate Deposition of Carbon Films Using High Pressure CH4 Plasma CVD International conference

    S. H. Hwang, R. Iwamoto, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)  2019.9 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Ultra-sensitive Plasma Potential Measurements by using an Optically Trapped Fine Particle International conference

    M. Shiratani, R. Iwamoto, K. Kamataki, N. Itagaki, K. Koga

    The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)  2019.9 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Synthesis and deposition of a-C:H nanoparticles using reactive plasmas with a fast gas flow International conference

    K. Koga, S. H. Hwang, K. Kamataki, N. Itagaki, M. Shiratani

    The Korea-Japan Workshop on Dust Particles in Plasmas  2019.8 

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    Event date: 2019.8

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Low Temperature Fabrication of Low Hydrogen Content SiN films by Multi Hollow Discharge SiH4+N2 Plasma CVD International conference

    Y. Sasaki, S. Nagaishi, H. Hara, S. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    The Korea-Japan Workshop on Dust Particles in Plasmas  2019.8 

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    Event date: 2019.8

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Advanced Methods of Thin Film Fabrication using Plasmas (Invited) Invited International conference

    M. Shiratani, K. Kamataki, K. Koga, N. Itagaki

    28th International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS28)  2019.8 

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    Event date: 2019.8

    Language:English   Presentation type:Oral presentation (general)  

    Country:France  

  • Sputter deposition of wide bandgap (ZnO)x(AlN)1-x alloys: a new material system with tunable bandgap International conference

    S. Urakawa, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Influence of DC Substrate Bias Voltage on Deposition of Carbon Nanoparticles Produced by Ar+CH4 Multi-Hollow Discharge Plasma CVD method International conference

    S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, J. S. Oh, T. Nakatani

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Position fluctuation of a fine particle trapped optically in Ar plasma International conference

    M. Shiratani, K. Tomita, H. Ohtomo, R. Iwamoto, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Growth Mechanism of Carbon Nanoparticles In Multi-Hollow Discharge Plasma Chemical Vapor Deposition (Invited) Invited International conference

    K. Koga, S. H. Hwang, K. Kamataki, N. Itagaki M. Shiratani

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • SiH4 gas velocity dependence of deposition rate and Si-H2 bond density of a-Si:H films deposited by multi-hollow discharge plasma CVD method International conference

    H. Hara, S. Nagaishi, R. Iwamoto, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Sputter Epitaxy of (ZnO)x(InN)1-x Films on Sapphire Substrates International conference

    N. Miyahara, S. Urakawa, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Prediction of Sputtering Conditions for Amorphous and Low Resistive ITO/In2O3 Films via Machine Learning International conference

    R. Iwamoto, K. Kamataki, S. Muraoka, N. Miyahara, D. Yamashita, D. Ikeda, K. Koga, N. Itagaki, M. Shiratani

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Influence of Seed Coat Color on Reactive Species in Plasma Irradiated Seeds of Radish Sprouts International conference

    K. Koga, K. Kamataki, N. Itagaki, M. Shiratani, V. Mildaziene

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10)  2019.7 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • マルチホロー放電プラズマCVD法による高品質SiN膜の低温(100度)形成

    永石翔大, 佐々木勇輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    令和元年度日本表面真空学会 九州支部学術講演会(九州表面・真空研究会2019)  2019.6 

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    Event date: 2019.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡大学   Country:Japan  

  • RFマグネトロンスパッタリングによる可変バンドギャップ半導体(ZnO)x(AlN)1-xの創成

    浦川聖市, 宮原奈乃華, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    令和元年度日本表面真空学会 九州支部学術講演会(九州表面・真空研究会2019)  2019.6 

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    Event date: 2019.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡大学   Country:Japan  

  • Deposition of Carbon Nanoparticles Using Multi-Hollow Discharge Plasma CVD for Synthesis of Carbon Nanoparticle Composite Films International conference

    K. Koga, S. H. Hwang, T. Nakatani, J. S. Oh, K. Kamataki, N. Itagaki, M.Shiratani

    46th International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2019)  2019.5 

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    Event date: 2019.5

    Language:English   Presentation type:Oral presentation (general)  

  • Fluctuation Level Dependence on Growth of Nano-Particles in Amplitude Modulated rf Discharge International conference

    Kunihiro Kamataki, Ren Zhou, Hiroshi Ohtomo, Ryosuke Iwamoto, Daisuke Yamashita, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    ISPlasma2019  2019.3 

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    Event date: 2019.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 反応性プラズマにおけるナノ粒子成長における変調レベル依存性

    鎌滝 晋礼,周 靭, 大友 洋, 岩本 亮介, 山下 大輔,板垣 奈穂,古閑 一憲,白谷 正治

    日本物理学会第74回年次大会  2019.3 

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    Event date: 2019.3

    Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • プラズマ中の光捕捉微粒子に働く力の揺らぎ検出

    白谷正治, 大友洋, 鎌滝晋礼, 板垣奈穂, 古閑一憲

    日本物理学会第74回年次大会(2019年)  2019.3 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • 微粒子プラズマにおける2体衝突運動の顕微高速観察

    古閑一憲, 大友洋, 真銅雅子, 鎌滝晋礼, 板垣奈穂, 白谷正治

    日本物理学会第74回年次大会(2019年)  2019.3 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • スパッタエピタキシーによるサファイア基板上(ZnO)x(InN)1-x薄膜の2段階成長

    宮原 奈乃華、浦川 聖市、山下 大輔、鎌滝 晋礼、古閑 一憲、白谷 正治、板垣 奈穂

    第66回応用物理学会春季学術講演会  2019.3 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学   Country:Japan  

  • 反応性プラズマにおける相互作用揺らぎの時空間構造の周波数依存性

    鎌滝 晋礼、周 靭、大友 洋、山下 大輔、板垣 奈穂、古閑 一憲、白谷 正治

    第66回応用物理学会春季学術講演会  2019.3 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学   Country:Japan  

  • Arプラズマ中の光捕捉微粒子を用いたシース近傍電界計測法の開発

    富田 健太郎、大友 洋、鎌滝 晋礼、板垣 奈穂、古閑 一憲、白谷 正治

    第66回応用物理学会春季学術講演会  2019.3 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学   Country:Japan  

  • ダウン/アップコンバージョンナノ粒子を用いた色素増感太陽電池の特性改善

    Chawarambwa Fadzai、張 博辰、鎌滝 晋礼、板垣 奈穂、古閑 一憲、白谷 正治、徐 鉉雄

    第66回応用物理学会春季学術講演会  2019.3 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学   Country:Japan  

  • Deposition Control of Carbon Nanoparticles Synthesized by Using Ar + CH4 Multi-Hollow Discharge Plasma CVD Method

    S. H Hwang, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

    2019.3 

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    Event date: 2019.3

    Presentation type:Oral presentation (general)  

    Country:Japan  

    Deposition Control of Carbon Nanoparticles Synthesized by Using Ar + CH4 Multi-Hollow Discharge Plasma CVD Method

  • プラズマに関する学生実験が受講者の動機付けに与える影響

    鎌滝 晋礼、大友 洋、山下大輔、板垣 奈穂、古閑 一憲、白谷 正治

    第66回応用物理学会春季学術講演会  2019.3 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学   Country:Japan  

  • 高ガス流速下におけるシランプラズマ中で発生した粒子の堆積とその膜質への影響

    田中 和真、石 榴、原 尚志、永石 翔大、山下 大輔、鎌滝 晋礼、板垣 奈穂、古閑 一憲、白谷 正治

    第66回応用物理学会春季学術講演会  2019.3 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学   Country:Japan  

  • Frequency Dependence of Spatial Profile of Interaction Fluctuation between Plasma and Nanoparticles in Reactive Plasma Invited International conference

    Kunihiro Kamataki, Ren Zhou, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    6th Korea-Japan Joint Symposium /3rd International Symposium on Energy Research and Application  2019.2 

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    Event date: 2019.2

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of film deposition precursors on FWHM into a-Si:H thin films deposited by plasma CVD International conference

    Kazuma Tanaka, Hisayuki Hara, Liu Shi, Shota Nagaishi, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    6th Korea-Japan Joint Symposium on Advanced Solar Cells 2019  2019.2 

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    Event date: 2019.2

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of clusters and higher-order silanes (HOSs) on surface roughness and Si-H2 bond density in a-Si:H films deposited by SiH4 plasma CVD International conference

    Hisayuki Hara, Kazuma Tanaka, Liu Shi, Shota Nagaishi, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    6th Korea-Japan Joint Symposium on Advanced Solar Cells 2019  2019.2 

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    Event date: 2019.2

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Cluster Incorporation Amount and Film Composition of SiN Films Fabricated by Multi-Hollow Discharge Plasma CVD Method International conference

    Shota Nagaishi,Yusuke Sasaki, Kazuma Tanaka, Hisayuki Hara, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    6th Korea-Japan Joint Symposium on Advanced Solar Cells 2019  2019.2 

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    Event date: 2019.2

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Amplitude Modulation Frequency Dependence of Growth of Nano-Particles in Reactive 52 Plasma International conference

    Kunihiro Kamataki, Ren Zhou, Hiroshi Ohtomo, Ryosuke Iwamoto, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    SPP36/SPSM31  2019.1 

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    Event date: 2019.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Relationship between Amount of Nano-particles Incorporation into SiN Film and Properties of Film by SiH4+N2 Plasma Chemical Vapor Deposition International conference

    Kunihiro Kamataki, Shota Nagaishi, Yusuke Sasaki, Kazuma Tanaka, Hisayuki Hara, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    SPP36/SPSM31  2019.1 

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    Event date: 2019.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Growth of Nano-Particles in Reactive Plasma using Amplitude Modulated rf Discharge Voltage

    K.Kamataki, R.Zhou, H.Ohtomo, R. Iwamoto, D.Yamashita, N.Itagaki, K.Koga, M. Shiratani

    2018.12 

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    Event date: 2018.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Size and Structure Control of Carbon Nano-particles Synthesized by Multi-hollow Discharge Plasma CVD Method International conference

    S. H Hwang, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

    28th Annual Meeting of MRS-Japan 2018  2018.12 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of film deposition precursors on Raman intensity ITA/ITO of a-Si:H thin films fabricated by plasma CVD method International conference

    Kazuma Tanaka, Hisayuki Hara,Shota Nagaishi, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    28th Annual Meeting of MRS-Japan 2018  2018.12 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of cluster-eliminating filter and gas velocity on SiH2 bond formation in a-Si:H films deposited by MHDPCVD method International conference

    Hisayuki Hara, Kazuma Tanaka, Shota Nagaishi, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    28th Annual Meeting of MRS-Japan 2018  2018.12 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of N2, O2 gas composition ratio and humidity in plasma on plasma induced plant growth enhancement International conference

    Y. Wada, R. Sato, R. Shimada, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

    27th Annual Meeting of MRS-Japan 2018  2018.12 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Deposition Rate and Cluster Incorporation Amount of SiN Films Fabricated by a Multi-Hollow Discharge Plasma CVD Method International conference

    Shota Nagaishi,Yusuke Sasaki, Kazuma Tanaka, Hisayuki Hara, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    28th Annual Meeting of MRS-Japan 2018  2018.12 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of high-mobility amorphous In2O3:Sn films via nitrogen-mediated amorphization: effects of target-substrate distance International conference

    K. Imoto, D.Yamashita, K.Kamataki, K.Koga, M.Shiratani and N.Itagaki

    28th Annual Meeting of MRS-Japan 2018  2018.12 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of DC Bias Voltage on Deposition of Carbon Nano Particles Synthesized by Ar + CH4 Multi-Hollow Discharge Plasma International conference

    S. H Hwang, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

    The 3rd Asian Applied Physics Conference  2018.12 

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    Event date: 2018.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Time evolution of amount of cluster incorporation into SiNx films and electron temperature of CVD Plasma International conference

    Shota Nagaishi,Yusuke Sasaki, Kazuma Tanaka, Hisayuki Hara, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    The 3rd Asian Applied Physics Conference  2018.12 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effect of Plasma Fluctuation Frequency on Growth of Nanopariticles in Reactive Plasmas

    K.Kamataki,R.Zhou,H.Ohtomo,D.Yamashita,N.Itagaki,K.Koga,M. Shiratani

    The 3rd Asian Applied Physics Conference  2018.12 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Gas velocity dependence of Si-H2 bond density and surface roughness of a-Si:H films deposited by multi-hollow plasma CVD International conference

    Hisayuki Hara, Kazuma Tanaka, Shota Nagaishi, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    The 3rd Asian Applied Physics Conference  2018.12 

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    Event date: 2018.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマCVDによるSiN製膜時のクラスターの混入が膜物性へ与える影響

    永石翔大, 佐々木勇輔, 田中和真, 原尚志, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第35回プラズマ・核融合学会年会  2018.12 

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    Presentation type:Oral presentation (general)  

    Venue:大阪大学   Country:Japan  

  • プラズマCVD法で作製したa-Si:H薄膜のSiネットワーク秩序性評価

    田中和真, 原尚志, 石榴, 中野慎也, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第35回プラズマ・核融合学会年会  2018.12 

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    Event date: 2018.12

    Presentation type:Oral presentation (general)  

    Venue:大阪大学   Country:Japan  

  • フラックス制御スパッタによるIn-rich (ZnO)x(InN)1-x膜のヘテロエピタキシー

    宮原奈乃華, 山下大輔, 鎌滝晋礼, 中村大輔, 古閑一憲, 白谷正治, 板垣奈穂

    第35回プラズマ・核融合学会年会  2018.12 

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    Event date: 2018.12

    Presentation type:Oral presentation (general)  

    Venue:大阪大学   Country:Japan  

  • RFマグネトロンスパッタ法を用いたSi(111)基板上でのZnO結晶成長における窒素不純物の効果

    村岡宗一郎、呂佳豪、山下大輔、鎌滝晋礼、古閑一憲、白谷正治、板垣奈穂

    第35回プラズマ・核融合学会年会  2018.12 

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    Presentation type:Oral presentation (general)  

    Venue:大阪大学   Country:Japan  

  • 反応性プラズマ中のナノ粒子量揺らぎの構造解析

    周靭,鎌滝晋礼,大友洋,山下大輔,板垣奈穂,古閑一憲,白谷正治

    第35回プラズマ・核融合学会年会  2018.12 

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    Presentation type:Oral presentation (general)  

    Venue:大阪大学   Country:Japan  

  • 反応性プラズマにおけるプラズマ揺らぎとラジカルとナノ粒子成長の関係

    鎌滝晋礼, 周靭, 大友洋,山下大輔,板垣奈穂,古閑一憲,白谷正治

    第35回プラズマ・核融合学会年会  2018.12 

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    Presentation type:Oral presentation (general)  

    Venue:大阪大学   Country:Japan  

  • Arプラズマ中微粒子の相互作用の評価

    大友 洋,周 靭,山下 大輔,鎌滝 晋礼,板垣 奈穂,古閑 一憲,白谷 正治

    第35回プラズマ・核融合学会年会  2018.12 

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    Event date: 2018.12

    Presentation type:Oral presentation (general)  

    Venue:大阪大学   Country:Japan  

  • Ar/N2スパッタリングによる低抵抗アモルファスITO膜の作製:ターゲット-基板間距離の影響

    井本 幸希,山下 大輔, 鎌滝 晋礼, 古閑 一憲, 白谷 正治, 板垣 奈穂

    第35回プラズマ・核融合学会年会  2018.12 

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    Event date: 2018.12

    Presentation type:Oral presentation (general)  

    Venue:大阪大学   Country:Japan  

  • 高速ガス流マルチホロー放電プラズマの発光分光計測

    原尚志, 田中和真, 石榴, 中野慎也, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第35回プラズマ・核融合学会年会  2018.12 

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    Event date: 2018.12

    Presentation type:Oral presentation (general)  

    Venue:大阪大学   Country:Japan  

  • Growth Kinetics of Carbon Nano Particles Generated in an Ar/CH4 Multi-Hollow Discharge Plasmas

    H. Sung Hwa, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    2018.12 

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    Event date: 2018.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Sputter Epitaxy via Inverse Stranski-Krastanov Growth Mode: A Method of Single Crystal Growth beyond Lattice Matching Condition International conference

    Naho Itagki, Daisuke Yamashita, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

    AVS Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2018)  2018.12 

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    Event date: 2018.12

    Presentation type:Oral presentation (general)  

  • Effects of nitrogen impurity on sputtering growth of ZnO films on Si(111) substrates International conference

    S. Miuraoka, J. Lyu, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    2018 MRS Fall Meeting & Exhibit  2018.11 

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    Event date: 2018.11

    Presentation type:Oral presentation (general)  

  • プラズマCVDにおけるプラズマ揺らぎとナノ粒子成長の関係

    鎌滝晋礼、周靭、大友洋、岩本亮介、山下大輔、板垣奈穂、古閑一憲、白谷正治

    第34回 九州・山口プラズマ研究会  2018.11 

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    Event date: 2018.11

    Presentation type:Oral presentation (general)  

    Venue:屋久島   Country:Japan  

  • Sputter deposition of low resistive amorphous In2O3:Sn films using nitrogen-mediated amorphization method: Effects of target-substrate distance International conference

    K. Imoto, N. Miyahara, D.Yamashita, K.Kamataki, K.Koga, M.Shiratani and N.Itagaki

    40th International Symposium on Dry Process (DPS2018)  2018.11 

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    Event date: 2018.11

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Motion analysis of inter-particle interactions of three fine particles in Ar plasma International conference

    H.Ohtomo, R.Zhou, D.Yamashita, K.Kamataki, N.Itagaki, K.Koga, and M.Shiratani

    40th International Symposium on Dry Process (DPS2018)  2018.11 

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    Event date: 2018.11

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Gas Pressure on Size of Carbon Nanoparticles Prepared by Methane Plasma Process International conference

    H. Sung Hwa, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    2st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)  2018.11 

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    Event date: 2018.11

    Presentation type:Oral presentation (general)  

  • Suppression of HOS molecules incorporation in a-Si:H films fabricated by plasma CVD International conference

    K. Tanaka, H. Hara, L. Shi, S. Nagaishi, S. Nakano, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    2st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)  2018.11 

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    Event date: 2018.11

    Presentation type:Oral presentation (general)  

  • Sputter epitaxy of high quality (ZnO)x(InN)1-x: a new semiconducting material for excitonic devices International conference

    Naho Itagki, Nanoka Miyahara, Daisuke Yamashita, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani

    2st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)  2018.11 

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    Event date: 2018.11

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Spatial-Structure of Density Fluctuation of Nanoparticles in Amplitude Modulated Capactively Coupled Plasma International conference

    Ren Zhou, Kunihiro Kamataki, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    2st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)  2018.11 

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    Event date: 2018.11

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Impact of Amplitude Modulation of RF Discharge Voltage on the Spatial Profile of Nanoparticle Characteristics in Reactive Plasma Invited International conference

    Kunihiro Kamataki, Ren Zhou, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunori Koga and Masaharu ShirataniKazunori Koga, Masaharu Shiratani

    2st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)  2018.11 

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    Event date: 2018.11

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • SiH4+N2マルチホロー放電プラズマCVDによる SiN製膜時の膜へのクラスターの取り込み

    永石翔大, 佐々木勇輔, 田中和真, 原尚志, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    放電/プラズマ・パルスパワー合同研究会  2018.10 

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    Event date: 2018.10

    Presentation type:Oral presentation (general)  

    Venue:大分大学   Country:Japan  

  • Challenge for big data analysis in plasma process Invited International conference

    K. Kamataki, K.Koga, M. Shiratani

    2018 Korea Physics Society (KPS) Fall Meeting  2018.10 

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    Event date: 2018.10 - 2019.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Effects of Plasma Fluctuation on Size Dispersion of Nano-Particles in Reactive Plasma Invited International conference

    Kunihiro Kamataki, Ren Zhou, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunori Koga and Masaharu Shiratani

    28th Annual Meeting MRS-J  2018.10 

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    Event date: 2018.10 - 2019.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • スパッタエピタキシーによるサファイア基板直上へのIn-rich (ZnO)x(InN)1-x 膜の作製

    宮原奈乃華, 山下大輔, 鎌滝晋礼, 中村大輔, 古閑一憲, 白谷正治, 板垣奈穂

    第79回応用物理学会秋季学術講演会  2018.9 

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    Event date: 2018.9

    Presentation type:Oral presentation (general)  

    Venue:名古屋国際会議場   Country:Japan  

  • CH4+Arマルチホロー放電プラズマで生成したカーボンナノ粒子の基板堆積に対するガス流量の影響

    第79回応用物理学会秋季学術講演会  2018.9 

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    Event date: 2018.9

    Presentation type:Oral presentation (general)  

    Venue:名古屋国際会議場   Country:Japan  

  • AL型授業における学習観の変容(学習動機と理解度に注目して)〜初年次教育における物理授業を一例として〜

    鎌滝晋礼

    日本教育心理学会第60回総会  2018.9 

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    Event date: 2018.9

    Presentation type:Oral presentation (general)  

    Venue:慶応大学   Country:Japan  

  • Effects of CH4 Concentration on Size of Carbon Nano-Particles Formed in Multi-hollow Discharge Plasma International conference

    H. Sung Hwa, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    6th UK-Japan Engineering Education League Workshop 2018  2018.9 

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    Event date: 2018.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Improvement of Si network order of a-Si:H thin films by suppressing incorporation of HOS molecules International conference

    S. Nakano, K. Tanaka, H. Hara, L. Shi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    6th UK-Japan Engineering Education League Workshop 2018  2018.9 

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    Event date: 2018.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • プラズマ科学に関する研究&プラズマ科学を用いた教育

    鎌滝晋礼

    第45回西日本放電懇談会  2018.8 

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    Event date: 2018.8

    Presentation type:Oral presentation (general)  

    Venue:日田市   Country:Japan  

  • Analysis of Inter-particle Interactions of Two Fine Particles in Ar Plasma International conference

    Hiroshi Ohtomo, Ren Zhou, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani

    JP-KO dust workshop 2018  2018.7 

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    Event date: 2018.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of gas velocity dependence of Si-H2 bond density at P/I interface of a-Si:H layered films deposited by multi-hollow discharge plasma CVD. International conference

    Hisayuki HARA, Kazuma TANAKA, Syota NAGAISHI, Susumu TOKO, Daisuke YAMASHITA, Hyunwoog SEO, Naho ITAGAKI, Kunihiro KAMATAKI, Kazunori KOGA, Masaharu SHIRATANI

    Workshop "Plasma surface interaction for technological applications"  2018.6 

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    Event date: 2018.6

    Presentation type:Oral presentation (general)  

  • SiH4 gas flow rate dependence of Si-H2 bond density at P/I interface in aSi:H solar cells fabricated by plasma CVD International conference

    Hisayuki HARA, Kazuma TANAKA, Syota NAGAISHI, Susumu TOKO, Daisuke YAMASHITA, Hyunwoog SEO, Naho ITAGAKI, Kunihiro KAMATAKI, Kazunori KOGA, Masaharu SHIRATANI

    29th Symposium on Plasma Physics and Technology (SPPT)  2018.6 

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    Event date: 2018.6

    Presentation type:Oral presentation (general)  

  • a‐Si:H 薄膜への高次シラン取り込みとSiネットワーク秩序性の関係

    田中和真, 原尚志, 石榴, 永石翔大, 中野慎也, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    平成30年度九州表面・真空研究会2018(兼第23回九州薄膜表面研究会)  2018.6 

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    Event date: 2018.6

    Presentation type:Oral presentation (general)  

    Venue:九州工業大学   Country:Japan  

  • A deep insight of plasma-nanoparticle interaction International conference

    Kazunori Koga, Kunihiro Kamataki, Naho Itagaki and Masaharu Shiratani

    19th International Congress on Plasma Physics  2018.6 

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    Event date: 2018.6

    Presentation type:Oral presentation (general)  

    Country:Canada  

  • 知識伝達型授業における部分的AL導入の効果〜初年次教育における物理授業を一例として〜

    鎌滝晋礼

    日本物理学会第73回年次大会  2018.3 

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    Event date: 2018.3

    Presentation type:Oral presentation (general)  

    Venue:東京理科大学   Country:Japan  

  • 初年次学生における電磁気学の理解を深めるプラズマ実験授業

    鎌滝晋礼

    第66回九州地区大学教育研究協議会  2017.9 

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    Event date: 2017.9 - 2018.9

    Presentation type:Oral presentation (general)  

    Venue:福岡工業大学   Country:Japan  

  • 科学実験が文系学部学生の専門教育課程に与える影響

    鎌滝晋礼

    大学教育学会第39回大会  2017.6 

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    Event date: 2017.6

    Presentation type:Oral presentation (general)  

    Venue:広島大学   Country:Japan  

  • Active Learning based on Science Experiments to Improve Scientific Literacy International conference

    KAMATAKI KUNIHIRO

    The ICPE 2016 : 18th International Conference on Physics Education  2016.9 

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    Event date: 2016.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Singapore  

  • 初年次における文系学部学生への科学実験授業の影響

    鎌滝 晋礼

    第65回九州地区大学一般教育研究協議会  2016.9 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:鹿児島大学(鹿児島県)   Country:Japan  

  • 科学的思考力育成のための文系学生に対する科学実験の展開

    鎌滝 晋礼

    日本科学教育学会第 40 回年会  2016.8 

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    Event date: 2016.8

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:ホルトホール大分(大分県)   Country:Japan  

  • アクティブ・ラーニングに取り入れた科学実験・工作

    鎌滝晋礼

    日本物理学会 第71回年次大会  2016.3 

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    Event date: 2016.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東北学院大学・泉キャンパス(宮城)   Country:Japan  

    近年、「アクティブ・ラーニング(以下AL)」をキーワードとして、より具体的な形で大学教育の質的転換が唱えられている。そのような中「これからALが大学教育界に広がり深まるときに、どのような躓きの石」(AL失敗事例)を取りまとめたハンドブックが出され、グループワークがうまく機能しない原因として、学生の主体性や協調性の欠如等が挙げられている。このグループワークをうまく機能させるために様々な取組がなされる中、本取組は、グループワーク(特に議論から発表まで)をより機能させるための科学実験及び工作の役割について検証することを目的とする。単に座学の授業形式よりも、理科の実験授業に協同学習を導入した場合の方が、実験内容に関する学習効果が高いことが言われており、科学実験の有用性をALに活かしたいと考える。

  • 社会的責任養成としての科学実験

    鎌滝晋礼

    大学教育学会2015年度課題研究集会  2015.11 

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    Event date: 2015.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:岩手医科大学矢巾キャンパス・岩手大学(岩手)   Country:Japan  

    大学1年生に対して、社会問題の意識を高め、社会的責任を養成し、21世紀型スキルの向上を目的に、科学実験を中心の協同学習授業を展開した。静電気や放電に関する実験を中心とした協同学習により、電気に対する知識だけでなく、日本の今のエネルギー問題を自分たちの問題であるとより自覚させ、将来のエネルギー問題を解決していくにはどのようにしたらよいかという主体性を学生に持たせることができた。科学実験を用いることで、21世紀型スキルの中の市民としての社会的責任などの「態度・指向性」、ならびに「統合的な学習経験と創造的思考力」の向上につながったことの関係性を検証する。

  • 科学実験を用いた課題解決型授業の展開

    鎌滝晋礼

    第64回九州地区大学一般教育研究協議会  2015.9 

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    Event date: 2015.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本学園大学(熊本)   Country:Japan  

  • 学生に社会問題の意識を向上させる実験授業展開

    鎌滝晋礼

    日本物理教育学会 第32回物理教育研究大会  2015.8 

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    Event date: 2015.8

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学(福岡)   Country:Japan  

  • Effects of hydrogen dilution on stability of a-Si:H films in silane hydrogen mixture multi-hollow discharge plasmas International conference

    Y. Torigoe, S. Toko, K. Keya, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

    2015 Japan-Korea Joint Symposium on Advanced Solar Cells  2015.1 

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    Event date: 2015.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of hydrogen dilution on stability of a-Si:H films in silane hydrogen mixture multi-hollow discharge plasmas International conference

    Y. Torigoe, S. Toko, K. Keya, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

    2015 Japan-Korea Joint Symposium on Advanced Solar Cells  2015.1 

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    Event date: 2015.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • マルチホロー放電プラズマCVD法で作製したナノ結晶シリコン薄膜を用いた光学バンドギャップ制御 International conference

    金光善徳, 古閑一憲, 山下大輔, 鎌滝普礼, 徐鉉雄, 板垣奈穂, 白谷正治

    プラズマ・核融合学会九州・沖縄・山口支部 第18回支部大会  2014.12 

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    Event date: 2014.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡   Country:Japan  

  • プラズマ・壁相互作用により発生したダストの容器壁堆積のその場検出 International conference

    立石瑞樹, 片山龍, 古閑一憲, 山下大輔, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 時谷政行 増崎貴, 西村清彦, 相良明男, LHD実験グループ

    プラズマ・核融合学会九州・沖縄・山口支部 第18回支部大会  2014.12 

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    Event date: 2014.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡   Country:Japan  

  • LHD内バイアス基板への長期ダスト堆積実験 International conference

    片山龍, 立石瑞樹, 古閑一憲, 山下大輔, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 時谷政行, 増崎貴, 西村清彦 相良明男, LHD実験グループ

    プラズマ・核融合学会九州・沖縄・山口支部 第18回支部大会  2014.12 

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    Event date: 2014.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡   Country:Japan  

  • RFマグネトロンスパッタリングと金薄膜触媒を用いた低温高速層交換Ge結晶成長 International conference

    市田大樹, 橋本慎史, 内田儀一郎, 徐鉉雄, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    プラズマ・核融合学会九州・沖縄・山口支部 第18回支部大会  2014.12 

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    Event date: 2014.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡   Country:Japan  

  • Evaluaion of Si-H2 bond formation of a-Si:H film using cluster eliminating filter International conference

    2014.12 

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    Event date: 2014.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  • 基板の光学特性に対するダスト堆積の影響 International conference

    片山龍, 立石瑞樹, 古閑一憲, 山下大輔, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

    2014.11 

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    Event date: 2014.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:新潟   Country:Japan  

  • 水素プラズマとグラファイト壁相互作用により発生したダストのその場測定 International conference

    立石瑞樹, 片山龍, 古閑一憲, 山下大輔, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

    2014.11 

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    Event date: 2014.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:新潟   Country:Japan  

  • RFスパッタリングと触媒金属を用いたGe結晶薄膜の作製 International conference

    市田大樹, 橋本慎史, 内田儀一郎, 徐鉉雄, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    2014.11 

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    Event date: 2014.10 - 2014.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:新潟   Country:Japan  

  • Modulation frequency dependence of bispectrum of laser light scattering intensity from nanoparticles formed in reactive plasmas International conference

    T. Ito, D. Yamashita, H. Seo, K. KamatakiI, N. Itagaki, K. Koga, M. Shiratani

    67th Annual Gaseous Electronics Conference  2014.11 

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    Event date: 2014.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  • Development of an in-situ Detection Method of Dust Particles Deposited on Vessel Wall Using Quartz Crystal Microbalances International conference

    M. Tateishi, R. Katayama, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara and LHD Experimental Group

    15th Workshop on Fine Particle Plasmas  2014.10 

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    Event date: 2014.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Size-controlled Ge Nanoparticle Synthesis and Their Application to Quantum-dot Solar Cells International conference

    G. Uchida, D. Ichida, H. Seo, S. Hashimoto, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    15th Workshop on Fine Particle Plasmas  2014.10 

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    Event date: 2014.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Single Fine Particle Trapped in Ar Plasma by Optical Tweezers International conference

    M. Shiratani, T. Ito, M. Soejima, K. Koga, D. Yamashita, K. Kamataki, N. Itagaki

    15th Workshop on Fine Particle Plasmas  2014.10 

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    Event date: 2014.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Dust Deposition on Optical Characteristics of Mirrors Installed on First Wall in LHD International conference

    R. Katayama, M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, LHD Experimental Group

    15th Workshop on Fine Particle Plasmas  2014.10 

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    Event date: 2014.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of Ge films for applying solar cells using RF magnetron sputtering and gold film catalyst International conference

    D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Global Photovoltaic Conference 2014  2014.11 

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    Event date: 2014.10 - 2014.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Effects of amplitude modulated VHF discharge on coupling between plasmas and nanoparticles International conference

    K. Koga, T. Ito, K. Kamataki, H. Seo, N. Itagaki, and M. Shiratani

    24th International Toki Conference  2014.11 

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    Event date: 2014.10 - 2014.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  • Characteristics of cluster eliminating filter for plasma CVD

    Y. Torigoe, S. Toko, W. Chen, D. Yamashita, H. Seo, K. Kamataki, K. Koga, M. Shiratani

    2014.9 

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    Event date: 2014.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • 酸窒化物半導体ZnInONを用いた量子井戸型太陽電池の作製

    松島宏一, 清水僚太, 井手智章, 山下大輔, 鎌滝晋礼, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

    第75回応用物理学会秋季学術講演会  2014.9 

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    Event date: 2014.9

    Presentation type:Oral presentation (general)  

    Venue:名古屋   Country:Japan  

  • 少人数クラスによる実験系学問分野におけるグループ学習の取組事例

    鎌滝 晋礼

    第63回 九州地区大学一般教育研究協議会  2014.9 

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    Event date: 2014.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • Epitaxial growth of In-rich ZnInON films by RF magnetron sputtering International conference

    K. Matsuhima, R. Shimizu, T. Ide, D. Yamashita, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    15th IUMRS-International Conference in Asia  2014.8 

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    Event date: 2014.8

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Spatiotemporal Analysis of Nanoparticle Growth in Amplitude Modulated Reactive Plasmas for Understanding Interactions between Plasmas and Nanomaterials International conference

    K. Koga, Y. Morita, T. Ito, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani

    15th IUMRS-International Conference in Asia  2014.8 

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    Event date: 2014.8

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Raman spectroscopy of optically trapped single fine particle in plasmas International conference

    T. Ito, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    15th IUMRS-International Conference in Asia  2014.8 

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    Event date: 2014.8

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Hysteresis of Cluster Amount in Multi-Hollow Discharge Plasma CVD Method International conference

    S. Toko, Y. Hasahimoto, Y. Kanemitsu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    15th IUMRS-International Conference in Asia  2014.8 

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    Event date: 2014.8

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Substrate Temperature on Defect Density of Ge Nanoparticle Films International conference

    D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    15th IUMRS-International Conference in Asia  2014.8 

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    Event date: 2014.8

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Real Time Deposition Measurement of Dust Particles Generated by Plasma-Wall Interaction International conference

    M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura

    15th IUMRS-International Conference in Asia  2014.8 

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    Event date: 2014.8

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Si QD/PEDOT:PSS Hybrid Solar Cells Using Si Nanoparticles Fabricated by Multi-Hollow Plasma CVD International conference

    S. Hashimoto, D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    15th IUMRS-International Conference in Asia  2014.8 

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    Event date: 2014.8

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Quartz crystal microbalance measurements for in-situ evaluation of dust inventory in fusion devices International conference

    K. Koga, M. Tateishi, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

    26th Symposium on Plasma Physics and Technology  2014.6 

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    Event date: 2014.6

    Presentation type:Oral presentation (general)  

    Country:Czech Republic  

  • Dust collection with dc-biased substrates in large helical device International conference

    M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

    21th International Conference on Plasma Surface Interactions (PSI2014)  2014.5 

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    Event date: 2014.5

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Real time mass measurement of dust particles deposited on vessel wall using quartz crystal microbalances in a divertor simulator International conference

    K. Koga, M. Tateishi, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

    21th International Conference on Plasma Surface Interactions (PSI2014)  2014.5 

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    Event date: 2014.5

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Si/SiC coreshell nanoparticle composite anode for Li ion batteries International conference

    M. Shiratani, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga

    2014 MRS Spring Meeting  2014.4 

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    Event date: 2014.4

    Presentation type:Oral presentation (general)  

    Country:Armenia  

  • ナノ粒子含有振幅変調放電プラズマ中のAr準安定原子密度

    白谷正治, 古閑一憲, 森田康彦, 伊東鉄平, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂

    日本物理学会 第69回年次大会  2014.3 

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    Event date: 2014.3

    Presentation type:Oral presentation (general)  

    Venue:東海大学   Country:Japan  

  • 空間積分データを用いた 条件付き仕分けによる乱流実験解析

    永島芳彦, 伊藤早苗, 稲垣滋, 鎌滝晋礼, 荒川弘之,糟谷直宏, 矢木雅敏,藤澤彰英, 伊藤公孝

    日本物理学会 第69回年次大会  2014.3 

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    Event date: 2014.3

    Presentation type:Oral presentation (general)  

    Venue:東海大学   Country:Japan  

  • 反応性プラズマ中のナノ粒子成長とプラズマ揺らぎ

    白谷正治, 古閑一憲, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂

    2014年 第61回応用物理学会春季学術講演会  2014.3 

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    Event date: 2014.3

    Presentation type:Oral presentation (general)  

    Venue:青山学院大学   Country:Japan  

  • シランプラズマ中のクラスター量に対する振幅変調放電の効果

    都甲将, 橋本優史, 金光善徳, 鳥越祥宏, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    2014年 第61回応用物理学会春季学術講演会  2014.3 

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    Event date: 2014.3

    Presentation type:Oral presentation (general)  

    Venue:青山学院大学   Country:Japan  

  • プラズマ中に光捕捉した単一微粒子を用いたプラズマと界面の相互作用評価

    伊東鉄平, 森田康彦, 岩下伸也, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

    2014年 第61回応用物理学会春季学術講演会  2014.3 

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    Event date: 2014.3

    Presentation type:Oral presentation (general)  

    Venue:青山学院大学   Country:Japan  

  • 水素原子源付きプラズマCVDで作製した炭素薄膜の堆積速度:圧力と電極間距離への依存性

    董ショウ, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

    2014年 第61回応用物理学会春季学術講演会  2014.3 

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    Event date: 2014.3

    Presentation type:Oral presentation (general)  

    Venue:青山学院大学   Country:Japan  

  • 反応性プラズマにおけるナノ粒子成長のバイスペクトル解析

    森田康彦, 伊東鉄平, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 古閑一憲 , 白谷正治

    2014年 第61回応用物理学会春季学術講演会  2014.3 

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    Event date: 2014.3

    Presentation type:Oral presentation (general)  

    Venue:青山学院大学   Country:Japan  

  • RFマグネトロンスパッタリング法による高In組成ZnInON膜の作製

    松島宏一, 清水僚太, 井手智章, 山下大輔, 鎌滝晋礼, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

    2014年 第61回応用物理学会春季学術講演会  2014.3 

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    Event date: 2014.3

    Presentation type:Oral presentation (general)  

    Venue:青山学院大学   Country:Japan  

  • プラズマ CVD で作成したGe半導体薄膜の光電特性

    市田大樹, 橋本慎史, 内田儀一郎, 徐鉉雄, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    平成26年度九州表面・真空研究会2014(兼第19回九州薄膜表面研究会)  2014.6 

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    Event date: 2014.3 - 2014.6

    Presentation type:Oral presentation (general)  

    Venue:福岡教育大学   Country:Japan  

  • Transport of fine particles produced by interactions between H2 plasmas and carbon wall International conference

    M. Tateishi, K. Koga, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterial/7th International Conference on Plasma Nanotechnology and Science  2014.3 

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    Event date: 2014.3

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of Qunatum-Dot Sensitized Solar Cells Using Ge Nanoparticle Films Deposited by High Pressure Rf Magnetron Sputtering Method International conference

    D. Ichida, S. Hashimoto, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterial/7th International Conference on Plasma Nanotechnology and Science  2014.3 

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    Event date: 2014.3

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Amplitude Modulation of Discharge Voltage on Volume Fraction of Clusters in Si Thin Films Depoisted by Multi-Hollow Discharge Plasma CVD International conference

    S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterial/7th International Conference on Plasma Nanotechnology and Science  2014.3 

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    Event date: 2014.3

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Si nano-particles: Its quantum characteristics and application for photovoltaics (Invited) Invited International conference

    H. Seo, D. Ichida, S. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

    2014 Japan-Korea Joint Symposium on Advanced Solar Cells  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Photocurrent generation of quantum-dot sensitized solar cells using group-IV semiconductor nanoparticle films (Invited) Invited International conference

    G. Uchida, D. Ichida, S. Hashimoto, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

    18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics  2014.2 

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    Event date: 2014.2

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Band gap control of nc-Si thin films deposited multi-hollow discharge plasma CVD International conference

    Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics  2014.2 

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    Event date: 2014.2

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Bispectrum analysis of nanoparticle growth in reactive dusty plasmas International conference

    Y. Morita, T. Ito, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics  2014.2 

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    Event date: 2014.2

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Coupling between radicals in plasmas and nanoparticle growth in initial growth phase in reactive plasmas with amplitude modulation International conference

    K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida and M. Shiratani

    18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics  2014.2 

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    Event date: 2014.2

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Effects of Amplitude Modulation of Discharge Voltage on Cluster Amount in Downstream Region of Multi-Hollow Silane Discharge Plasmas Studied by Laser Light Scattering Method International conference

    S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    2014 Japan-Korea Joint Symposium on Advanced Solar Cells  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Amplitude Modulation on Stability of Hydrogenated Amorphous Silicon Films Deposited using Multi-Hollow Discharge Plasma CVD Method International conference

    Y. Torigoe,Y. Hashimoto, S. Toko, D. Yamashita, N. Itagaki, H. Seo, K. Kamataki, K. Koga, M. Shiratani

    2014 Japan-Korea Joint Symposium on Advanced Solar Cells  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Hydrogen Dilution on Structure of Ge Quantum Dot Film Deposited by Using High Pressure rf Sputtering International conference

    S. Hashimoto, D. Ichida, K. Kamataki, H. Seo, G. Uchida, N. Itagaki,, K. Koga, M. Shiratani

    18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics  2014.2 

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    Event date: 2014.2

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Evaluation of Interactions between Plasmas and Interface using Optically Trapped Single Fine Particle International conference

    T. Ito, Y. Morita, K. Koga, G. Uchida, N. Itagaki, H. Seo, K. Kamataki, and M. Shiratani

    18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics  2014.2 

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    Event date: 2014.2

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Fabrication of highly stable a-Si:H solar cells by suppressing cluster incorporation (Invited) Invited International conference

    K. Koga, Y. Hashimoto, S. Toko, D. Yamashita, Y. Torigoe, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, and M. Shiratani

    2014 Japan-Korea Joint Symposium on Advanced Solar Cells  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of InN-rich ZnInON films for photovoltaic appplications by RF magnetron sputtering International conference

    K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    2014 Japan-Korea Joint Symposium on Advanced Solar Cells  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of Size-controlled Ge Nanoparticle Films Using High Pressure RF Sputtering Method for Quantum Dot Solar Cell International conference

    D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics  2014.2 

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    Event date: 2014.2

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Flux Control of Dust Particles Generated due to Interactions between Graphite Wall and H2 Plasmas using DC Biased Substrates International conference

    M. Tateishi, K. Koga, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

    18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics  2014.2 

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    Event date: 2014.2

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Magnetron sputtering of In2O3:Sn films with buffer layers fabricated via nitrogen mediated crystallization International conference

    K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics  2014.2 

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    Event date: 2014.2

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Selective removal of clusters in silane plasmas by cluster eliminating filter International conference

    Y. Hashimoto, Y. Torigoe, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

    18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics  2014.2 

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    Event date: 2014.2

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Substrate temperature dependence of hydrogen content of a-Si:H film deposited with a cluster-eliminating filter International conference

    Y. Hashimoto, S. Toko, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Coupling between radicals and nanoparticles in initial growth phase in reactive plasmas with amplitude modulation (Invited) Invited International conference

    K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida, M. Shiratani

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • A model for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas International conference

    M. Shiratani, K. Koga, K. Kamataki, S. Iwashita, Y. Morita, H. Seo, N. Itagaki, G. Uchida

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of SiC nanoparticles as high capacity electrodes for Li-ion batteries International conference

    G. Uchida, K. Kamataki, D. Ichida, Y. Morita, H. Seo, N. Itagaki, K. Koga, T. Ishihara, M. Shiratani

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Analysis of fluctuation of Ar metastable density and nanoparticle amount in capacitively coupled discharges with amplitude modulation International conference

    Y. Morita, T. Ito, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of In-rich ZnInON filmswith narrow band gap by RF magnetron sputtering International conference

    K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fine response of deposition rate of Si films deposited by multi-hollow discharge plasma CVD with amplitude modulation International conference

    S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Magnetron sputtering of low-resistive In2O3:Sn films with buffer layers fabricated via nitrogen mediated crystallization International conference

    K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Nanoparticle amount in reactive plasmas with amplitude modulation detected by twodimensional laser light scattering method International conference

    T. Ito, Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Raman spectroscopy of a fine particle optically trapped in plasma International conference

    D. Yamashita, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Spatial profile of flux of dust particles in hydrogen helicon plasmas International conference

    M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Combinatorial evaluation of optical properties of crystalline Si nanoparticle embedded Si films deposited by a multi-hollow discharge plasma CVD method International conference

    Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Deposition of Crystalline Ge Nanoparticle Films Varying H2 Dilution Ratio Using High Pressure rf Magnetron Sputtering International conference

    S. Hashimoto, D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of amplitude modulation on deposition of hydrogenated amorphous silicon films using multi-Hollow discharge plasma CVD method International conference

    Y. Torigoe, Y. Hashimoto, S. Toko, Y. Kim, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of size-controlled Ge nanoparticle films varying gas flow rate using high pressure rf magnetron sputtering method International conference

    D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31)  2014.2 

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    Event date: 2014.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Nanoparticle composite plasma CVD films Fundamental and applications (Invited) Invited International conference

    M. Shiratani, K. Koga, G. Uchida, N. Itagaki, H. Seo, K. Kamataki

    The 9th EU-Japan Joint Symposium on Plasma Processing  2014.1 

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    Event date: 2014.1

    Presentation type:Oral presentation (general)  

    Country:Slovenia  

  • マルチホロー放電プラズマCVDにおけるa-Si:H膜中クラスター混入量に対する振幅変調放電の効果

    都甲将, 橋本優史, 金光善徳, 鳥越祥宏, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部第17回支部大会  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Venue:佐世保工業高等専門学校   Country:Japan  

  • スパッタリング法による狭ギャップ半導体ZnInON膜の高品質結晶成長

    松島宏一, 清水僚太, 山下大輔, 鎌滝晋礼, 徐鉉雄, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

    プラズマ・核融合学会 九州・沖縄・山口支部第17回支部大会  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Venue:佐世保工業高等専門学校   Country:Japan  

  • マグネトロンスパッタ法による窒素添加結晶化バッファー層を用いた低抵抗In2O3:Sn薄膜の作製

    押川晃一郎, 板垣奈穂, 白谷正治, 古閑一憲, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 山下大輔, I. Suhariadi

    プラズマ・核融合学会 九州・沖縄・山口支部第17回支部大会  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Venue:佐世保工業高等専門学校   Country:Japan  

  • プラズマを用いたⅣ族半導体ナノ粒子膜の堆積とそのデバイス応用 (Invited) Invited

    内田儀一郎, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第16回プラズマエレクトロニクス分科会 プラズマ新領域研究会  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Venue:大学利用施設UNITY, 神戸   Country:Japan  

  • Transport of Carbon Dust Particles Produced by Interactions between H2 Plasmas and Graphite Target

    M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, LHD Experimental Group

    14th Workshop on Fine Particle Plasmas  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Correlation between Plasma Fluctuation and Nanoparticle Amount in Initial Growth Phase in Reactive Plasmas with Amplitude Modulation

    K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida, M. Shiratani

    14th Workshop on Fine Particle Plasmas  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Time evolution of spatial profile of nanoparticle amount in amplitude modulated capacitively coupled reactive plasmas

    2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Venue:Yokohama Port Opening Plaza   Country:Japan  

  • Magnetron sputtering of low-resistive transparent conductive oxide films with double buffer layers fabricated via nitrogen mediated crystallization

    23rd Annual Meeting of MRS-JAPAN 2013  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Morphological Characterization of ZnO Thin Films Fabricated via Nitrogen Mediated Crystallization: Effects of Substrate Temperature

    I. Suhariadi, K. Oshikawa, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    23rd Annual Meeting of MRS-JAPAN 2013  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Deposition of Ge nanoparticle composite films and their application to solar cells

    G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    23rd Annual Meeting of MRS-JAPAN 2013  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of Amplitude Modulation of Discharge Voltage of Multi-Hollow Silane Discharges on Amount of Clusters Formed in the Discharges

    S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitsu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    23rd Annual Meeting of MRS-JAPAN 2013  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Quantum dot sensitized solar cells using group IV semiconductor nanoparticles (Invited) Invited International conference

    K. Koga, G. Uchida, D. Ichida, S. Hashimoto, H. Seo, K. Kamataki, N. Itagaki, and M. Shiratani

    2013 EMN Fall Meeting  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Country:United States  

  • ナノ粒子成長に対するプラズマ摂動周波数の効果

    古閑一憲, 森田康彦, 岩下伸也, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 白谷正治

    プラズマ・核融合学会 第30回年会  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Venue:東京工業大学   Country:Japan  

  • 水素プラズマとグラファイト壁の相互作用により発生するダスト粒子の輸送

    立石瑞樹, 古閑一憲, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

    プラズマ・核融合学会 第30回年会  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Venue:東京工業大学   Country:Japan  

  • Nanostructure control of Si-based solar cells using plasma CVD (Invited) Invited International conference

    M. Shiratani, G. Uchida, H. Seo, D. Ichida, K. Koga, N. Itagaki, K. Kamataki

    THERMEC 2013  2013.12 

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    Event date: 2013.12

    Presentation type:Oral presentation (general)  

    Country:United States  

  • 反応性プラズマ中で発生するナノ粒子量の時空間分布

    伊東鉄平, 森田康彦, 岩下伸也, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

    平成25年度応用物理学会九州支部学術講演会  2013.12 

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    Event date: 2013.11 - 2013.12

    Presentation type:Oral presentation (general)  

    Venue:長崎大学   Country:Japan  

  • RFマグネトロンスパッタリング法を用いて作製したGeナノ粒子膜の特性

    橋本慎史, 市田大樹, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    平成25年度応用物理学会九州支部学術講演会  2013.12 

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    Event date: 2013.11 - 2013.12

    Presentation type:Oral presentation (general)  

    Venue:長崎大学   Country:Japan  

  • 振幅変調マルチホロー放電プラズマCVD法を用いた 水素化アモルファスシリコン薄膜の作製

    鳥越祥宏, 橋本優史, 都甲将, 金淵元, 山下大輔, 徐鉉雄, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

    平成25年度応用物理学会九州支部学術講演会  2013.12 

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    Event date: 2013.11 - 2013.12

    Presentation type:Oral presentation (general)  

    Venue:長崎大学   Country:Japan  

  • Control of plasma CVD films containing group IV nanoparticles (Invited) Invited International conference

    M. Shiratani, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga

    International Conference on Surface Engineering (ICSE 2013)  2013.11 

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    Event date: 2013.11

    Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Deposition of Size-controlled Ge Nanoparticle Film by Highpressure rf Magnetron Sputtering for Quantum Dot Solar Cells International conference

    D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    AVS 60th International Symposium and Exhibition  2013.10 

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    Event date: 2013.10 - 2013.11

    Presentation type:Symposium, workshop panel (public)  

    Country:United States  

  • Photocurrent Generation Characteristics of Ge Quantum-Dot Solar Cells International conference

    G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    AVS 60th International Symposium and Exhibition  2013.10 

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    Event date: 2013.10 - 2013.11

    Presentation type:Symposium, workshop panel (public)  

    Country:United States  

  • PS+TF-MoA11 Two-dimensional Growth of Novel ZnO based Semiconductor ZnInON with Tunable Bandgap by Magnetron Sputtering International conference

    K. Matsushima, R. Shimizu, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    AVS 60th International Symposium and Exhibition  2013.10 

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    Event date: 2013.10 - 2013.11

    Presentation type:Symposium, workshop panel (public)  

    Country:United States  

  • Deposition of Ge Nanoparticle Films and Their Application to Ge Quantum-dot Sensitized Solar Cells International conference

    K. Koga, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani

    The 23rd International Photovoltaic Science and Engineering Conference  2013.11 

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    Event date: 2013.10 - 2013.11

    Presentation type:Oral presentation (general)  

    Country:Taiwan, Province of China  

  • Selective Removal of Clusters in Silane Plasmas Using Cluster Eliminating Filter International conference

    Y. Hashimoto, S. Toko, Y. Kim, D. Yamashita, G. Uchida, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

    The 23rd International Photovoltaic Science and Engineering Conference  2013.10 

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    Event date: 2013.10 - 2013.11

    Presentation type:Oral presentation (general)  

    Country:Taiwan, Province of China  

  • The performance enhancement of dye and quantum dot hybrid nanostructured solar cell with barrier coating International conference

    H. Seo, Y. Wang, D. Ichida, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Taiwan Associatoin for Coatings and Thin Films Technology  2013.10 

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    Event date: 2013.10

    Presentation type:Oral presentation (general)  

    Country:Taiwan, Province of China  

  • Cluster incorporation during amplitude modulated VHF discharge silane plasmas International conference

    S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    66th Annual Gaseous Electronics Conference  2013.10 

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    Event date: 2013.9 - 2013.10

    Presentation type:Oral presentation (general)  

    Country:United States  

  • Ar/N2 Magnetron Sputtering Discharges to Control Growth of Transparent Conducting Oxide Films International conference

    K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

    66th Annual Gaseous Electronics Conference  2013.10 

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    Event date: 2013.9 - 2013.10

    Presentation type:Oral presentation (general)  

    Country:United States  

  • ナノ粒子含有プラズマ系におけるナノ粒子成長

    白谷正治, 森田康彦, 岩下伸也, 古閑一憲, 内田儀一郎, 板垣奈穂, H. Seo, 鎌滝晋礼

    日本物理学会2013年秋季大会  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Venue:徳島大学(常三島キャンパス)   Country:Japan  

  • マルチホロー放電プラズマCVD法で堆積したSiナノ粒子膜の光学的バンドギャップ制御

    金光善徳, 内田儀一郎, 市田大樹, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第7回プラズマエレクトロニクスインキュベーションホール  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Venue:国立中央青少年交流の家, 静岡   Country:Japan  

  • Effects of H2 plasma etching on carbon nanoparticles formed due to interactions betweengraphite target and H2 Plasmas

    M. Tateishi, K. Koga, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

    2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • ハイスピードカメラを用いたナノ粒子成長プロセスの観測

    伊東鉄平, 森田康彦, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

    第7回プラズマエレクトロニクスインキュベーションホール  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Venue:国立中央青少年交流の家, 静岡   Country:Japan  

  • Photocarrier generation in quantum-dot sensitized solar cells using Ge nanoparticle films International conference

    G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    Solid State Devices and Materials 2013 (SSDM)  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Synthesis and Characterization of Oxynitride Semiconductor ZnInON with Tunable Bandgap

    N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Kamataki, G.Uchida, K. Koga, M. Shiratani

    The 26th Symposium on Plasma Science for Materials (SPSM-26)  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Amplitude modulation frequency dependence of nanoparticle amount in plasmas

    Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    The 26th Symposium on Plasma Science for Materials (SPSM-26)  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Carbon Nanostructure formed by high pressure methane plasmas

    K. Koga, S. Iwashita, G. Uchida, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani, U. Czarnetzki

    The 26th Symposium on Plasma Science for Materials (SPSM-26)  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Dependence of Volume Fraction of Si Clusters in Films on Amplitude Modulation Frequencyin Multi-Hollow Discharge Plasma CVD Method

    S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    The 26th Symposium on Plasma Science for Materials (SPSM-26)  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of filter gap of cluster eliminating filter on cluster eliminating efficiency

    Y. Hashimoto, S. Toko, Y. Kim, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    The 26th Symposium on Plasma Science for Materials (SPSM-26)  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of H2 plasma etching on carbon nanoparticles formed due to interactions betweengraphite target and H2 Plasmas

    M. Tateishi, K. Koga, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

    The 26th Symposium on Plasma Science for Materials (SPSM-26)  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of RF power on structure of Ge nanoparticle films deposited by high-pressure RFmagnetron sputtering method

    D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    The 26th Symposium on Plasma Science for Materials (SPSM-26)  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Plasma Etching of Single Fine Particle Trapped By Optical Tweezers

    M. Shiratani, D. Yamashita, K. Koga, K. Kamataki, N. Itagaki, G. Uchida

    The 26th Symposium on Plasma Science for Materials (SPSM-26)  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Production of SiC nanoparticles for Li-ion battery applications by using a high pressuremulti-hollow discharge plasma CVD

    G. Uchida, D. Ichida, Y. Kanemitsu, H. Seo, K. Kamataki, N. Itagaki, K. Koga, T. Ishihara, M. Shiratani

    The 26th Symposium on Plasma Science for Materials (SPSM-26)  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • 反応性プラズマにおけるナノ粒子量空間分布の変調周波数依存性

    森田康彦, 岩下伸也, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

    第74回応用物理学会秋季学術講演会  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Venue:同志社大学   Country:Japan  

  • RFマグネトロンスパッタリング法による高移動度ワイドギャップ半導体ZnInON膜の作製-Ar分圧依存性-

    松島宏一, 清水僚太, 山下大輔, 鎌滝晋礼, 徐鉉雄, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

    第74回応用物理学会秋季学術講演会  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Venue:同志社大学   Country:Japan  

  • マルチホロー放電プラズマからのクラスター流出量のガス流速依存性

    都甲将, 金淵元, 橋本優史, 金光善徳, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第74回応用物理学会秋季学術講演会  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Venue:同志社大学   Country:Japan  

  • Band-Gap Engineering of ZnO Based Semiconductors Deposited by Sputtering International conference

    N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

    2013 JSAP-MRS Joint Symposia  2013.9 

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    Event date: 2013.9

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • RFスパッタリング法を用いた結晶Geナノ粒子膜の堆積

    市田大樹, 内田儀一郎, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第74回応用物理学会秋季学術講演会  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Venue:同志社大学   Country:Japan  

  • シラン放電プラズマ初期のクラスター発生と膜への取り込み

    橋本優史, 都甲将, 金淵元, 山下大輔, 内田儀一郎, 徐鉉雄, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

    第74回応用物理学会秋季学術講演会  2013.9 

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    Event date: 2013.9

    Presentation type:Oral presentation (general)  

    Venue:同志社大学   Country:Japan  

  • Effects of amplitude modulation of rf discharge voltage on silane plasmas in initial phase International conference

    Y. Kim, S. Toko, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

    Dry Process Symposium 2013  2013.8 

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    Event date: 2013.8

    Presentation type:Symposium, workshop panel (public)  

    Country:Korea, Republic of  

  • Contribution of ionic deposition precursors to Si thin film deposition International conference

    S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    Dry Process Symposium 2013  2013.8 

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    Event date: 2013.8

    Presentation type:Symposium, workshop panel (public)  

    Country:Korea, Republic of  

  • Deposition of Ge nanoparticle films by high-pressure rf magnetron sputtering method for quantum dot solar cells International conference

    G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    2013.8 

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    Event date: 2013.8

    Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Characteristics of GeSn nanoparticle films deposition by high-pressure rf magnetron sputtering method International conference

    D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    2013.8 

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    Event date: 2013.8

    Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Tuning Size Distribution of Nanoparticles Formed in Reactive Plasmas using Plasma Parameter Modulation International conference

    M. Shiratani, Y. Morita, S. Iwashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, and K. Koga

    2013.8 

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    Event date: 2013.8

    Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Time evolution of spatial profile of nanoparticle amount in reactive plasmas International conference

    Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga and M. Shiratani

    2013.8 

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    Event date: 2013.8

    Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  • Observation of nanoparticle growth process using high speed camera International conference

    Y. Morita, K. Koga, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, D. Yamashita and M. Shiratani

    21st International Symposium on Plasma Chemistry (ISPC21)  2013.8 

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    Event date: 2013.8

    Presentation type:Symposium, workshop panel (public)  

    Country:Australia  

  • Coreshell nanoparticles generated by plasma CVD and their applications to Li ion batteries International conference

    M. Shiratani, Y. Morita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, and K. Koga

    21st International Symposium on Plasma Chemistry (ISPC21)  2013.8 

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    Event date: 2013.8

    Presentation type:Symposium, workshop panel (public)  

    Country:Australia  

  • Transport of nanoparticles produced in reactive plasmas using a positively-biased collector International conference

    Y. Morita, K. Koga, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, and M. Shiratani

    The 12th Asia Pacific Physics Conference (APPC12)  2013.7 

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    Event date: 2013.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of grid DC bias on incorporation of Si clusters into amorphous silicon films by multi-hollow discharge plasma CVD International conference

    S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    The 12th Asia Pacific Physics Conference (APPC12)  2013.7 

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    Event date: 2013.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of plasma incident angle of dust production due to interactions between hydrogen plasmas and carbon wall International conference

    M. Tateishi, K. Koga, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group d, S. Bornholdte, H. Kersten

    The 12th Asia Pacific Physics Conference (APPC12)  2013.7 

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    Event date: 2013.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Study on the crystal growth mechanism of ZnO films fabricated via nitrogen mediated crystallization International conference

    I. Suhariadi, K. Oshikawa, H. Seo, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

    The 12th Asia Pacific Physics Conference (APPC12)  2013.7 

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    Event date: 2013.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Combinatorial plasma CVD of Si nanoparticle composite films for band gap control International conference

    Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    The 12th Asia Pacific Physics Conference (APPC12)  2013.7 

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    Event date: 2013.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Correlation between nanoparticle growth and plasma parameters in low pressure reactive VHF discharge plasmas International conference

    M. Shiratani, Y. Morita, K. Kamataki, H. Seo, G. Uchida, N. Itagaki, K. Koga

    The 12th Asia Pacific Physics Conference (APPC12)  2013.7 

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    Event date: 2013.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of H2 gas addition on structure of Ge nanoparticle films deposited by high-pressure rf magnetron sputtering method International conference

    D. Ichida, G. Uchida, H. Seo, K. Kamatakia, N. Itagaki, K. Koga, M. Shiratani

    The 12th Asia Pacific Physics Conference (APPC12)  2013.7 

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    Event date: 2013.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • High Pressure Nonthermal Methane Plasmas for Nanoparticle Production International conference

    K. Koga, S. Iwashita, G. Uchida, D. Yamashita, N. Itagaki, K. Kamataki, M. Shiratani, U. Czarnetzki

    The 12th Asia Pacific Physics Conference (APPC12)  2013.7 

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    Event date: 2013.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Infrared Laser Manipulation of Single Fine Particle Levitated at Plasma/Sheath Boundary International conference

    D. Yamashita, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani

    The 12th Asia Pacific Physics Conference (APPC12)  2013.7 

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    Event date: 2013.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Sputter Deposition of Single Crystal ZnO Films on 18% Lattice mismatched c-Al2O3 Substrates via Nitrogen Mediated Crystallization International conference

    N. Itagaki, K. Kuwahara, I. Suhariadi, K. Oshikawa, K. Matsushima, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, and M. Shiratani

    International Symposium on Sputtering and Plasma Processes (ISSP2013)  2013.7 

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    Event date: 2013.7

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Analysis on the paint-type Si quantum dot-sensitized solar cells International conference

    H. Seo, Y. Wang, D. Ichida, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    International Symposium on Green Manufacturing and Applecations  2013.6 

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    Event date: 2013.6

    Presentation type:Oral presentation (general)  

    Country:United States  

  • Control of nanostructure of plasma CVD Si thin films (Invited) Invited International conference

    M. Shiratani, K. Koga, G. Uchida, N. Itagaki, H. Seo, and K. Kamataki

    Japan-Australia Workshop on Gaseous Electronics and Its Applications (JAWS25)  2013.6 

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    Event date: 2013.6

    Presentation type:Symposium, workshop panel (public)  

    Country:Australia  

  • Volume fraction of clusters in Si thin films in initial deposition phase of plasma CVD International conference

    S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

    The 17th International Workshop on Advanced Plasma Processing and Diagnostics  2013.5 

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    Event date: 2013.5

    Presentation type:Symposium, workshop panel (public)  

    Country:Korea, Republic of  

  • Advance in quantum dot-sensitized solar cells using group IV semiconductor nano-particles (Invited) Invited International conference

    H. Seo, D. Ichida, S. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

    The 17th International Workshop on Advanced Plasma Processing and Diagnostics  2013.5 

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    Event date: 2013.5

    Presentation type:Symposium, workshop panel (public)  

    Country:Korea, Republic of  

  • Advanced plasma sources and processes for energy harvesting devices (Invited) Invited International conference

    M. Shiratani, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, and K. Koga

    The 17th International Workshop on Advanced Plasma Processing and Diagnostics  2013.5 

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    Event date: 2013.5

    Presentation type:Symposium, workshop panel (public)  

    Country:Korea, Republic of  

  • Dust flux control in high density hydrogen plasmas using DC biased substrates International conference

    M. Tateishi, K. Koga, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

    The 17th International Workshop on Advanced Plasma Processing and Diagnostics  2013.5 

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    Event date: 2013.5

    Presentation type:Symposium, workshop panel (public)  

    Country:Korea, Republic of  

  • 高効率太陽電池の実現に向けた新規酸窒化物半導体ZnInONのバンドギャップエンジニアリング

    板垣奈穂, 松島宏一, 桑原和成, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

    第10回 「次世代の太陽光発電システム」シンポジウム  2013.5 

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    Event date: 2013.5

    Presentation type:Oral presentation (general)  

    Venue:石川県立音楽堂   Country:Japan  

  • Nanostructure of plasma CVD films containing nanoparticles (Invited) Invited International conference

    M. Shiratani, K. Koga, G. Uchida, N. Itagaki, H. Seo, K. Kamataki

    International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2013)  2013.4 

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    Event date: 2013.4 - 2013.5

    Presentation type:Oral presentation (general)  

    Country:United States  

  • Siナノ粒子膜を用いたSi/PEDOT:PSS太陽電池の特性評価

    内田儀一郎, 王玉亭, 市田大樹, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    2013年第60回応用物理学会春季学術講演会  2013.3 

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    Event date: 2013.3

    Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  • RFマグネトロンスパッタリング法による高移動度ワイドギャップ半導体ZnInONの作製

    松島宏一, 桑原和成, 廣瀬忠史, 山下大輔, 鎌滝晋礼, 徐鉉雄, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

    2013年第60回応用物理学会春季学術講演会  2013.3 

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    Event date: 2013.3

    Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  • スパッタ法によるC面サファイア基板上への原子平坦ZnO薄膜の作製

    板垣奈穂, 桑原和成, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

    2013年第60回応用物理学会春季学術講演会  2013.3 

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    Event date: 2013.3

    Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  • 振幅変調放電プラズマ中のナノ粒子成長初期におけるナノ粒子量の時空間分布

    古閑一憲, 森田康彦, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 白谷正治

    2013年第60回応用物理学会春季学術講演会  2013.3 

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    Event date: 2013.3

    Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  • Silicon cluster volume fraction of silicon thin films prepared by multi-hollow plasma discharge CVD

    2013.3 

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    Event date: 2013.3

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fluctuation in Plasma Processes (Invited) Invited International conference

    M. Shiratani, K. Kamataki, Y. Morita, K. Koga, G. Uchida, N. Itagaki, H. Seo

    The 6th International Conference on Plasma Nanotechnology and Science (IC-PLANTS 2013)  2013.2 

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    Event date: 2013.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Sputter deposition of zinc-indium oxynitride semiconductors with narrow bandgap for excitonic transistors International conference

    N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013)  2013.2 

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    Event date: 2013.1 - 2013.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Substrate temperature dependence of silcion cluster volume fraction in silicon thin films measured with quartz crystal microbalances International conference

    Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013)  2013.1 

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    Event date: 2013.1 - 2013.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Time evolution of nanoparticle size in reactive plasmas: comparison between theory and experiments International conference

    M. Shiratani, K. Kamataki, Y. Morita, G. Uchida, H. Seo, N. Itagaki, K. Koga

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013)  2013.1 

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    Event date: 2013.1 - 2013.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Cycle characteristics of lithium ion batteries using Si/SiC core-shell nanoparticle anode International conference

    Y. Morita, K. Kamataki, G. Uchida, Y. Kim, H. Seo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, H. Nagano, T. Ishihara

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013)  2013.2 

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    Event date: 2013.1 - 2013.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Dependence of Voc of a-Si:H solar cells on distance between discharge and substrate International conference

    Y. Hashimoto, K. Hatozaki, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013)  2013.2 

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    Event date: 2013.1 - 2013.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Effects of deposition temperature on properties of epitaxial ZnInON films for solar cells International conference

    K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, and N. Itagaki

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013)  2013.2 

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    Event date: 2013.1 - 2013.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Energy conversion efficincy of Si nanoparticle/PEDOT:PSS qunatum-dot solar cells International conference

    G. Uchida, Y. Wang, H. Seo, D. Ichida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013)  2013.2 

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    Event date: 2013.1 - 2013.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Evaluation of etching effects due to H+ ions on dust transport using local bias potential International conference

    K. Nishiyama, M. Tateishi, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and The LHD Experimental Group

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013)  2013.2 

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    Event date: 2013.1 - 2013.2

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • The fabrication of paint-type Si quantum dot-sensitized solar cells and ZnS post-treatment (Invited) Invited International conference

    H. Seo, Y. wang, D. Ichida, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

    The 16th International Workshop on Advanced Plasma Processing and Diagnostics  2013.1 

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    Event date: 2013.1

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Deposition rate dependence of silicon cluster volume fraction in silicon thin films deposited by multi-hollow plasma discharge CVD International conference

    Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

    The 16th International Workshop on Advanced Plasma Processing and Diagnostics  2013.1 

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    Event date: 2013.1

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Fabrication of epitaxial ZnInON films for MQW solar cells by RF magnetron sputtering International conference

    K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    The 16th International Workshop on Advanced Plasma Processing and Diagnostics  2013.1 

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    Event date: 2013.1

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Sputter deposition of atomically-flat ZnO films on lattice mismatched substrates via nitrogen mediated crystallization (Invited) Invited International conference

    N. Itagaki, K. Kuwahara, I. Suhariadi, K. Oshikawa, K. Matsushima, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

    The 16th International Workshop on Advanced Plasma Processing and Diagnostics  2013.1 

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    Event date: 2013.1

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • Tuning nanostructures of plasma CVD films (Plenary) Invited International conference

    M. Shiratani, K. Koga, G. Uchida, N. Itagaki, H. Seo, K. Kamataki

    The 16th International Workshop on Advanced Plasma Processing and Diagnostics  2013.1 

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    Event date: 2013.1

    Presentation type:Symposium, workshop panel (public)  

    Country:Japan  

  • 反応性プラズマ中の微粒子成長速度の時空間相関

    白谷正治, 鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, 徐鉉雄

    第30回プラズマプロセシング研究会(SPP-30)  2013.1 

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    Event date: 2013.1

    Presentation type:Oral presentation (general)  

    Venue:アクトシティ浜松・研修交流センター   Country:Japan  

  • Siナノ粒子/PEDOT:PSSを用いた量子ドット太陽電池の作製

    市田大樹, 王玉亭, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第30回プラズマプロセシング研究会(SPP-30)  2013.1 

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    Event date: 2013.1

    Presentation type:Oral presentation (general)  

    Venue:アクトシティ浜松・研修交流センター   Country:Japan  

  • ダブルマルチホロープラズマCVDを用いたリチウムイン電池用SiCナノ粒子膜のコンビナトリアル生成

    森田康彦, 鎌滝晋礼, 内田儀一郎, 金淵元, 徐鉉雄, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治, 永野裕己, 石原達己

    第30回プラズマプロセシング研究会(SPP-30)  2013.1 

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    Event date: 2013.1

    Presentation type:Oral presentation (general)  

    Venue:アクトシティ浜松・研修交流センター   Country:Japan  

  • マルチホロー放電プラズマCVDで堆積したSiナノ粒子含有膜のバンドギャップ制御

    金光善徳, 内田儀一郎, 市田大樹, 王玉亭, 波戸崎浩介, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第30回プラズマプロセシング研究会(SPP-30)  2013.1 

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    Event date: 2013.1

    Presentation type:Oral presentation (general)  

    Venue:アクトシティ浜松・研修交流センター   Country:Japan  

  • Etching Effects of Hydrogen Ions on Dust Collection Using Local Bias Potential International conference

    K. Nishiyama, M. Tateishi, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

    2013 International Symposium on Information Science and Electrical Engineering  2013.1 

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    Event date: 2013.1

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • 反応性プラズマ中でのナノ粒子成長の時空間分布

    森田康彦, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部第16回支部大会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • SiH4マルチホロー放電プラズマの発光分光計測

    橋本優史, 波戸崎浩介, 金淵元, 山下大輔, 内田儀一郎, 徐鉉雄, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部第16回支部大会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • スパッタリング法による高効率量子井戸型太陽電池のための狭バンドギャップ酸窒化物半導体の作製

    廣瀬忠史, 松島宏一, 桑原和成, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

    プラズマ・核融合学会 九州・沖縄・山口支部第16回支部大会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • マルチホロー放電プラズマCVDで堆積したSiナノ粒子含有膜の光学特性

    金光善徳, 内田儀一郎, 市田大樹, 王玉亭, 波戸崎浩介, 徐鉉雄, 鎌滝普礼, 板垣奈穂, 古閑一憲, 白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部第16回支部大会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • マルチホロー放電プラズマCVD法を用いたSiナノ粒子膜の堆積と有機・無機ハイブリッド型太陽電池への応用

    市田大樹, 王玉亭, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部第16回支部大会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • 重水素ヘリコンプラズマとグラファイト壁の相互作用により発生したダストの捕集

    古閑一憲, 岩下伸也, 西山雄士, 立石瑞樹, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

    プラズマ・核融合学会 九州・沖縄・山口支部第16回支部大会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • 大型ヘリカル装置の主放電時に発生するダストの局所バイアス電圧を用いた除去

    西山雄士, 立石瑞樹, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

    プラズマ・核融合学会 九州・沖縄・山口支部第16回支部大会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • 反応性プラズマとナノ構造の相互作用の長距離相関モデル

    白谷正治, 鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, 徐鉉雄

    プラズマ・核融合学会 九州・沖縄・山口支部第16回支部大会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  • Application of Si nanoparticles to energy devices: quantum-dot solar cells and Li ion batteris (Invited) Invited International conference

    G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga, T. Ishihara, and M. Shiratani

    The 69th IUVSTA Workshop  2012.12 

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    Event date: 2012.12

    Presentation type:Symposium, workshop panel (public)  

    Country:Slovenia  

  • SiC/Si nanoparticle anode of lithium ion batteries fabricated using double multi-hollow plasma CVD

    Y. Morita, K. Kamataki, G. Uchida, Y. Kim, H. Seo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, H. Nagano, T. Ishihara

    2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • A simplified model of a relationship between plasma fluctuation and size distribution of nanoparticles formed in reactive plasmas

    M. Shiratani, Y. Morita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga

    2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Dust Collection on DC Biased Substrates during Glow Discharges in the Large Helical Device

    K. Nishiyama, M. Tateishi, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagar2, and the LHD Experimental Group

    2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Dust particle formation due to interaction between deuterium helicon plasmas and graphite wall

    M. Tateishi, S. Iwashita, K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

    2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • 低温スパッタリング法による高効率量子井戸型太陽電池のための新規酸窒化物半導体ZnInONの形成

    松島宏一, 桑原和成, 廣瀬忠史, 山下大輔, 鎌滝晋礼, 徐鉉雄, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

    平成24年度応用物理学会九州支部学術講演会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:佐賀大学   Country:Japan  

  • Si ナノ粒子/PEDOT:PSS 量子ドット太陽電池のエネルギー変換効率

    市田大樹, 王玉亭, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    平成24年度応用物理学会九州支部学術講演会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:佐賀大学   Country:Japan  

  • ヘリコンプラズマ装置における捕集基板上ダストへのエッチング効果の考察

    立石瑞樹, 西山雄士, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

    平成24年度応用物理学会九州支部学術講演会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:佐賀大学   Country:Japan  

  • 窒素添加結晶化バッファー層を用いた低抵抗ZnO:Al薄膜の作製: バッファー層形成時における酸素供給量の効果

    押川晃一郎, I. Suhariadi, 桑原和成, 山下 大輔, 徐 鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

    平成24年度応用物理学会九州支部学術講演会  2012.12 

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    Event date: 2012.12

    Presentation type:Oral presentation (general)  

    Venue:佐賀大学   Country:Japan  

  • グラファイトと重水素プラズマの相互作用で発生したダスト捕集

    古閑一憲, 岩下伸也, 西山雄士, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

    プラズマ・核融合学会 第29回年会  2012.11 

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    Event date: 2012.11

    Presentation type:Oral presentation (general)  

    Venue:春日クローバープラザ   Country:Japan  

  • ダイバータシミュレータで発生したカーボンダストの生成と輸送の放電電力の効果

    西山雄士, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ, S. Bornholdt, H. Kersten

    プラズマ・核融合学会 第29回年会  2012.11 

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    Event date: 2012.11

    Presentation type:Oral presentation (general)  

    Venue:春日クローバープラザ   Country:Japan  

  • 局所バイアス電圧印加基板で捕集したカーボンダスト量に対する水素プラズマエッチングの効果

    立石瑞樹, 西山雄士, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

    プラズマ・核融合学会 第29回年会  2012.11 

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    Event date: 2012.11

    Presentation type:Oral presentation (general)  

    Venue:春日クローバープラザ   Country:Japan  

  • Epitaxial Growth of ZnO Based Semiconductors via Impurity-Additive Mediated Crysallization International conference

    N. Itagaki, K. Kuwahara, K. Matsushima, T. Hirose, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

    2012 MRS Fall Meeting  2012.11 

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    Event date: 2012.11

    Presentation type:Oral presentation (general)  

    Country:United States  

  • Sputter deposition of Epitaxial Zinc-Indium Oxynitride Films for Excitonic Transistors International conference

    N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

    The 34th International Symposium on Dry Process  2012.11 

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    Event date: 2012.11

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Long-range correlation of nanoparticle growth in in low pressure reactive VHF discharge plasmas International conference

    M. Shiratani, K. Kamataki, Y. Morita, H. Seo, N. Itagaki, G. Uchida, K. Koga

    54th Annual Meeting of the APS Division of Plasma Physics (DPP)  2012.10 

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    Event date: 2012.10 - 2012.11

    Presentation type:Oral presentation (general)  

    Country:United States  

  • Sputter deposition of atomically smooth ZnO films with buffer layers crystallized via nitrogen mediation International conference

    K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, K. Koga, M. Shiratani, N. Itagaki

    AVS 59th International Symposium & Exhibition  2012.11 

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    Event date: 2012.10 - 2012.11

    Presentation type:Oral presentation (general)  

    Country:United States  

  • Photocarrier generation in Si quantum-dot sensitized solar cells International conference

    G. Uchida, H. Seo, Y. Wang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    AVS 59th International Symposium & Exhibition  2012.10 

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    Event date: 2012.10 - 2012.11

    Presentation type:Oral presentation (general)  

    Country:United States  

  • Epitaxial Growth of ZnInON Films for Piezo-Electric-Field Effect MQW Solar Cells International conference

    K. Matsushima, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    AVS 59th International Symposium & Exhibition  2012.11 

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    Event date: 2012.10 - 2012.11

    Presentation type:Oral presentation (general)  

    Country:United States  

  • SiH4/H2 and CH4 multi-hollow discharge plasma CVD of SiC nano-composite anode for high charge-discharge capacity lithium ion batteries International conference

    Y. Morita, K. Kamataki, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani

    AVS 59th International Symposium & Exhibition  2012.11 

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    Event date: 2012.10 - 2012.11

    Presentation type:Oral presentation (general)  

    Country:United States  

  • Impacts of plasma fluctuation on growth of nanoparticles in low pressure reactive VHF discharge plasmas International conference

    M. Shiratani, K. Kamataki, Y. Morita, H. Seo, N. Itagaki, G. Uchida, K. Koga

    65th Annual Gaseous Electronics Conference (GEC)  2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:United States  

  • Control of Dust Flux in LHD and in a Divertor Simulator International conference

    K. Koga, K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

    (IAEA) 24th Fusion Energy Conference  2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:United States  

  • Measurements of amount of Si clusters incorporated during film deposition using quartz crystal microbalances International conference

    Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Growth Control Of ZNO Nano-Rod With Various Seeds And Photovoltaic Application International conference

    H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Temporal Evolution Of Number Density Of Ar Metastable Atoms In Dusty Plasmas International conference

    G. Uchida, N. Sadegh, K. Kamataki, H. Seo, N. Itagaki, K. Koga, M. Shiratani

    2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Control of size distribution of nanoparticles produced in reactive plasmas International conference

    M. Shiratani, K. Kamataki, Y. Morita, K. Koga, G. Uchida, H. Seo, D. Yamashita, N. Itagaki

    2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Fabrication of epitaxial ZnInON films for solar cell application by N2/Ar sputtering International conference

    K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • High capacity lithium ion batteries using SiC nanoparticles International conference

    Y. Morita, K. Kamataki, G. Uchida, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani, H. Nagano, T. Ishihara

    2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Sputter deposition of epitaxial ZnO films: effects of O2 partial pressure International conference

    K. Kuwahara, K. Matsushima, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, K. Koga, M. Shiratani, N. Itagaki

    2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Temperature dependence of fill factor of a-Si:H Schottky cells International conference

    Y. Hashimoto, K. Hatozaki, Y. Kim, D. Yamashita, G. Uchida, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

    2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Time evolution of diameter of laser trapped single dust particle in plasmas International conference

    D. Yamashita, K. Koga, S. Kitazaki, K. Kamataki, G. Uchida, N. Itagaki, M. Shiratani

    2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Zinc-Indium Oxynitride Thin Films for Multiple-Quantum–Well Solar Cells International conference

    Asia-Pacific Conference on Plasma Science and Technology (11th APCPST)  2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Venue:京都大学   Country:Japan  

  • Fabrication of ZnO Buffer Layers via Nitrogen-Mediated Crystallization for ZnO:Al Transparent Conducting Oxide: Effects of Oxygen Addition International conference

    I. Suhariadi, K. Oshikawa, K. Kuwahara, K. Matsushima, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, N. Itagaki, M. Shiratani

    2012.10 

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    Event date: 2012.10

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Zinc-Indium Oxynitride Semiconductors for Piezo-Electric-Field Effect MQW Solar Cells International conference

    N. Itagaki, K. Matsushima, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, K. Koga, M. Shiratani

    2012.9 

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    Event date: 2012.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • A Theoretical Model of a Relationship between Plasma Fluctuation and Nanostructure Fluctuation International conference

    M. Shiratani, Y. Morita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga

    2012.9 

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    Event date: 2012.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • In-situ Measurements of Size Distribution of Nanoparticles Formed in Reactive Plasmas Using a Laser Light Scattering Method International conference

    M. Shiratani, K. Kamataki, Y. Morita, G. Uchida, H. Seo, N. Itagaki, K. Koga

    2012.9 

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    Event date: 2012.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • An infrared laser trap of a single dust particle for study of plasma-surface interactions International conference

    G. Uchida, K. Koga, D. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani

    2012.9 

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    Event date: 2012.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Deposition of Si quantum-dot thin films for solar cell applications using multi-hollow discharge plasma CVD International conference

    G. Uchida, M. Sato, H. Seo, Y. Wang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    2012.9 

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    Event date: 2012.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances International conference

    Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    2012.9 

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    Event date: 2012.9

    Presentation type:Oral presentation (general)  

    Country:Japan  

  • Selective deposition of nanoparticles to valleys of texture substrates International conference

    Y. Morita, K. Kamataki, G. Uchida, D. Yamashita, N. Itagaki, H. Seo, K. Koga, M. Shiratani

    2012.9 

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    Event date: 2012.9

    Presentation type:Oral presentation (general)  

    Country:Japan