Updated on 2025/01/20

Information

 

写真a

 
INABA MASAFUMI
 
Organization
Faculty of Information Science and Electrical Engineering Department of Electrical Engineering Assistant Professor
School of Engineering Department of Electrical Engineering and Computer Science(Concurrent)
Graduate School of Information Science and Electrical Engineering Department of Electrical and Electronic Engineering(Concurrent)
Title
Assistant Professor
Contact information
メールアドレス
Tel
0928023771
Profile
Studying on sensing devices fabricated by dielectrophoretic phenomena.
Homepage

Research Areas

  • Nanotechnology/Materials / Nano/micro-systems

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Electric and electronic materials

Degree

  • Doctor of Engineering

Research History

  • Kyushu University Faculty of Information Science and Electrical Engineering Assistant Professor 

    2019.2 - Present

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  • Nagoya University 未来材料・システム研究所 日本学術振興会特別研究員 

    2017.4 - 2019.1

  • Waseda University 理工学術院 Research Assistant 

    2014.4 - 2017.3

Education

  • Waseda University   大学院先進理工学研究科   ナノ理工学専攻

    2014.4 - 2017.3

  • Waseda University   大学院先進理工学研究科   ナノ理工学専攻

    2012.4 - 2014.3

  • Waseda University   基幹理工学部   電気光システム学科

    2008.4 - 2012.3

Research Interests・Research Keywords

  • Research theme: Carbon nanotube

    Keyword: Carbon nanotube

    Research period: 2024

  • Research theme: Gas sensor

    Keyword: Gas sensor

    Research period: 2024

  • Research theme: Contact

    Keyword: Contact

    Research period: 2024

  • Research theme: Diamond

    Keyword: Diamond

    Research period: 2024

  • Research theme: Heat transfer sheet

    Keyword: Heat transfer sheet

    Research period: 2024

  • Research theme: Dielectrophoresis

    Keyword: Dielectrophoresis

    Research period: 2024

  • Research theme: Electron Device

    Keyword: Electron Device

    Research period: 2024

  • Research theme: Electrical alignment

    Keyword: Electrical alignment

    Research period: 2024

  • Research theme: diamond heat transfer sheet

    Keyword: diamond, heat transfer sheet

    Research period: 2019.2

  • Research theme: Sensing devices using dielectrophoresis

    Keyword: dielectrophoresis, sensor

    Research period: 2019.2

  • Research theme: Diamond semiconductor devices

    Keyword: diamond, device

    Research period: 2014.4

  • Research theme: Electrical properties of nanocarbon

    Keyword: nanocarbon

    Research period: 2011.4

Awards

  • パワーアカデミー萌芽研究優秀賞

    2021.3   パワーアカデミー   パワーアカデミー萌芽研究の研究助成における優れた研究成果報告に対して、受賞した。

  • 優秀ポスター賞

    2018.11   第32回ダイヤモンドシンポジウム   「真空ギャップゲート構造による2次元正孔ガスダイヤモンドデバイスの評価」を報告し、ダイヤモンドで全く新しい評価デバイスを考案し、実証実験を行ったことを評価された。

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    水素終端ダイヤモンドの表面の2次元正孔ガス層(2DHG)は、価電子帯上端付近に界面準位を持たず、変調効果が高いため、電界効果トランジスタのチャネル応用が盛んに研究されている。特に、ゲート絶縁膜兼パッシベーション膜として高温原子層堆積法によるアルミナ膜を用いることで、高耐圧、広い温度領域での安定動作が達成されているが、その移動度は80 cm2/Vs程度と、バルクで報告されている移動度に比べて極めて低い。移動度低下因子のうち、界面不純物の影響が支配的であることが指摘されている。本研究では、界面不純物の発生源であるゲート絶縁膜を、電荷の存在しない真空とするデバイスを考案し、その動作を検証した。

  • EMS賞

    2016.7   電子材料シンポジウム   ダイヤモンドの2次元正孔ガスを用いた縦型MOSFETデバイスを世界に先駆けて報告した。

Papers

  • Effect of the gravitational force on electrical alignment of diamond filler particles in polydimethylsiloxane-based heat-conduction sheets

    Masafumi Inaba, Yingchen Chen, Seiya Seike, Jun Hirotani, Michihiko Nakano, Junya Suehiro

    Diamond and Related Materials   146   2024.6   ISSN:0925-9635 eISSN:1879-0062

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Diamond and Related Materials  

    Heat-conduction sheets, a type of thermal interface material consisting of an elastomer matrix and thermally conducting fillers, require high thermal conductivity. Diamond particles with high thermal conductivity are a candidate for the filler in heat-conduction sheets. Electrical alignment is an effective method for filler alignment to achieve high thermal conductivity. In the alignment of filler particles in an elastomer matrix, the effect of the gravitational force is crucial and filler particles sedimented during polymerization lower the thermal conductivity. In this study, we investigated the effect of the gravitational force on the electrical alignment of diamond particles with diameters of tens of micrometers in a liquid polydimethylsiloxane matrix and their through-plane thermal conductivity. A system to alternate the gravitational direction to the samples was introduced, in which high-voltage electrodes were rotated during electrical alignment. We found that the gravitational force was related not only to particle sedimentation, but also to the tilt and thickness of the particle chains. By canceling the gravitational force, the particle chains formed ideally and the thermal conductivity of the heat-conduction sheets was enhanced. The thermal conductivity of the 60 wt% sample increased by a factor of ∼2.5 to 1.05 W m−1 K−1 by electrical alignment with rotating the electrodes. This gravity-cancellation method may expand the possibilities of the particle-alignment technique for the fabrication of composite materials.

    DOI: 10.1016/j.diamond.2024.111246

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  • NO2 gas response and recovery properties of ambipolar CNT-FETs with various CNT/CNT junctions

    Masafumi Inaba, Kaito Yagi, Naoki Asano, Haruka Omachi, Michihiko Nakano, Junya Suehiro

    AIP Advances   14 ( 3 )   2024.3   ISSN:2158-3226 eISSN:2158-3226

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:AIP Advances  

    <jats:p>Gas sensors based on ambipolar carbon nanotube (CNT) field-effect transistors with various amounts of CNTs were fabricated by dielectrophoretic assembly. The nitrogen dioxide (NO2) gas response and recovery properties of the transistors were measured to investigate the effect of CNT amount on gas response. For the device with a small amount of CNTs, responses from the CNT bulk and CNT/electrode contacts were observed. For devices with a large amount of CNTs, in which a network-like structure of CNTs was observed near the electrodes, an increased current in both electron and hole conduction regions was observed compared with that for the device with a small amount of CNTs. The increased current in the electron conduction region rapidly decreased during recovery. This response is consistent with that of CNT/CNT X-type contacts, which have a high resistance before NO2 adsorption. Equivalent circuits of CNT channels with CNT/CNT contacts were developed, allowing the transistor behavior to be qualitatively discussed. Evaluation of time constants revealed that CNT/electrode contacts and CNT/CNT X-type contacts exhibited high NO2 adsorption and desorption rates, respectively.</jats:p>

    DOI: 10.1063/5.0197182

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  • Effect of mixing ratio on NO2 gas sensor response with SnO2-decorated carbon nanotube channels fabricated by one-step dielectrophoretic assembly Reviewed International journal

    M. Inaba, T. Oda, M. Kono, N. Phansiri, T. Morita, S. Nakahara, M. Nakano, J. Suehiro

    SENSORS AND ACTUATORS B-CHEMICAL   344   2021.10

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.snb.2021.130257

  • Effect of mixing ratio on NO2 gas sensor response with SnO2-decorated carbon nanotube channels fabricated by one-step dielectrophoretic assembly Reviewed

    Masafumi Inaba, Takenori Oda, Masaki Kono, Nisarut Phansiri, Takahiro Morita, Shota Nakahara, Michihiko Nakano, Junya Suehiro

    Sensors and Actuators B: Chemical   344   130257 - 130257   2021.10

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    We fabricated nitrogen dioxide (NO2) gas sensors with p-type carbon nanotubes (CNTs) / n-type tin dioxide (SnO2) nanoparticle heterojunctions using one-step dielectrophoretic assembly and investigated the effect of CNT/SnO2 ratio on their NO2 gas detection properties. CNTs and SnO2 nanoparticles were mixed in various ratios, suspended in deionized water, and assembled by dielectrophoresis. The normalized response of fabricated CNT/SnO2 heterojunction gas sensors against 1 ppm NO2 was ∼80 in an N2 atmosphere and ∼20 in artificial air, where UV irradiation was used only for initialization. To reduce the effect of oxygen (O2), we also conducted continuous UV irradiation with various intensities during the initialization and gas detection. The CNT/SnO2 pn heterojunction gas sensor had a maximum normalized response of 19 for 1 ppm NO2 in artificial air, while that of the SnO2 sensor was 3. Furthermore, plotting the gas sensor response as a function of NO2 concentration reveals that the sensor detected an NO2 gas concentration as low as 20 ppb in artificial air.

    DOI: 10.1016/j.snb.2021.130257

  • Response properties of nitrogen dioxide gas sensors with tin oxide decorated carbon nanotube channel fabricated by two-step dielectrophoretic assembly Reviewed

    Masafumi Inaba, Masaki Kono, Takenori Oda, Nisarut Phansiri, Michihiko Nakano, Junya Suehiro

    AIP Advances   10 ( 5 )   055223 - 055223   2020.5

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    Language:Others   Publishing type:Research paper (scientific journal)  

    Gas sensors with carbon nanotubes (CNTs) and tin dioxide (SnO2) nanoparticles for nitrogen dioxide (NO2) detection are fabricated using a two-step dielectrophoretic (DEP) assembly method, and the NO2 gas detection properties are investigated. For the fabrication of the sensor, CNTs assemble between electrodes by a DEP force, followed by SnO2 nanoparticle decoration also by a DEP assembly method, and the assembled CNTs act as high electric field electrodes. The formed CNT/SnO2 gas sensors exhibit a sharp increase in resistance followed by a gradual decrease upon NO2 exposure. pn hetero-junctions are formed between the CNTs and the SnO2 nanoparticles, and the resistance shift of the depletion region in the CNTs at the pn hetero-junction induces the sharp increase in the resistance.

    DOI: 10.1063/5.0008188

  • Dielectrophoretic properties of submicron diamond particles in sodium chloride aqueous solution Reviewed

    Masafumi Inaba, Shohei Hayashi, Henan Li, Mikoto Kamimura, Michihiko Nakano, Junya Suehiro

    Japanese Journal of Applied Physics   59 ( 4 )   046502 - 046502   2020.4

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    Dielectrophoretic (DEP) manipulation of a diamond particle has potential application in the detection of DNA or other bio-molecules. We investigate the fundamental DEP and surface properties of submicron diamond particles. Diamond particles were dispersed in a NaCl solution and dropped on a castle-walled electrode. An AC electric field was applied to determine the DEP crossover frequency as a function of the solution conductivity. The surface conductance of the diamond particles was then evaluated from the parametrical fitting of the crossover frequencies. The diamond surface layer was shown to exhibit a rather high conductance, although bulk diamond is insulative.

    DOI: 10.35848/1347-4065/ab7baf

  • Dielectrophoretic properties of submicron diamond particles in sodium chloride aqueous solution Reviewed International journal

    Masafumi Inaba, Shohei Hayashi, Henan Li, Mikoto Kamimura, Michihiko Nakano and Junya Suehiro

    Japanese Journal of Applied Physics   59 ( 046502 )   1 - 5   2020.3

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    DOI: 10.35848/1347-4065/ab7baf

  • Correlation between the Carbon Nanotube Growth Rate and Byproducts in Antenna-Type Remote Plasma Chemical Vapor Deposition Observed by Vacuum Ultraviolet Absorption Spectroscopy Reviewed

    Masafumi Inaba, Takumi Ochiai, Kazuyoshi Ohara, Ryogo Kato, Tasuku Maki, Toshiyuki Ohashi, Hiroshi Kawarada

    Small   15 ( 48 )   2019.11

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    For sp2 or sp3 carbon material growth, it is important to investigate the precursors or intermediates just before growth. In this study, the density of ethylene (C2H4) outside the plasma discharge space and just before reaching the carbon nanotube (CNT) growth region is investigated by vacuum ultraviolet absorption spectroscopy for plasma discharge in an antenna-type remote plasma chemical vapor deposition with a CH4/H2 system, with which the growth of very long (≈0.5 cm) CNT forests is achieved. Single-wall CNT forests have the potential for application as electrodes in battery cells, vertical wiring for high current applications, and thermal interface materials. It is observed that the plasma discharge decomposes the CH4 source gas and forms C2Hx species, which reversibly reform to C2H4 in the plasma-off state. In addition, the density of the formed C2H4 has a strong correlation to the CNT growth rate. Therefore, the C2H4 density is a good indicator of the density of C2Hx species for CNT growth in the CH4/H2 plasma system.

    DOI: 10.1002/smll.201901504

  • Electrical property measurement of two-dimensional hole-gas layer on hydrogen-terminated diamond surface in vacuum-gap-gate structure Reviewed International journal

    Masafumi Inaba, Hiroshi Kawarada, Yutaka Ohno

    Applied Physics Letters   114 ( 25 )   2019.6

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    Hydrogen-terminated diamond metal-insulator-semiconductor field-effect transistors are candidates for power devices that require a high breakdown field and stable, high-frequency operation. A two-dimensional hole-gas layer can form on H-terminated diamond surfaces. To understand the electrical properties of bare H-terminated diamond surfaces, we investigate the surface impurities on a H-terminated diamond surface in a vacuum-gap gate structure, which uses a H-terminated diamond channel and a vacuum gap as gate dielectrics. To obtain a bare surface without surface adsorbate, the device is annealed in a vacuum. The transconductance is increased by removing adsorbates. The mobility and interface-state density at the H-terminated diamond surface with no adsorbates are 25 cm^2 V^-1 s^-1 and 1 × 10^12 cm^-2 eV^-1, respectively.

    DOI: 10.1063/1.5099395

  • Vertical-type two-dimensional hole gas diamond metal oxide semiconductor field-effect transistors Reviewed International journal

    Nobutaka Oi, Masafumi Inaba, Satoshi Okubo, Ikuto Tsuyuzaki, Taisuke Kageura, Shinobu Onoda, Atsushi Hiraiwa, Hiroshi Kawarada

    Scientific reports   8 ( 1 )   2018.12

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    Power semiconductor devices require low on-resistivity and high breakdown voltages simultaneously. Vertical-type metal-oxide-semiconductor field-effect transistors (MOSFETs) meet these requirements, but have been incompleteness in diamond. Here we show vertical-type p-channel diamond MOSFETs with trench structures and drain current densities equivalent to those of n-channel wide bandgap devices for complementary inverters. We use two-dimensional hole gases induced by atomic layer deposited Al2O3 for the channel and drift layers, irrespective of their crystal orientations. The source and gate are on the planar surface, the drift layer is mainly on the sidewall and the drain is the p+ substrate. The maximum drain current density exceeds 200 mA mm^-1 at a 12 μm source-drain distance. On/off ratios of over eight orders of magnitude are demonstrated and the drain current reaches the lower measurement limit in the off-state at room temperature using a nitrogen-doped n-type blocking layer formed using ion implantation and epitaxial growth.

    DOI: 10.1038/s41598-018-28837-5

  • Electrical contact properties between carbon nanotube ends and a conductive atomic force microscope tip Reviewed

    Masafumi Inaba, Kazuyoshi Ohara, Megumi Shibuya, Takumi Ochiai, Daisuke Yokoyama, Wataru Norimatsu, Michiko Kusunoki, Hiroshi Kawarada

    Journal of Applied Physics   123 ( 24 )   2018.6

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    Understanding the electrical contact properties of carbon nanotube (CNT) ends is important to use the high conductance of CNTs in the CNT on-axis direction in applications such as through-silicon via structures. In this study, we experimentally evaluated the contact resistivity between single-/multi-walled CNT ends and a metal nanoprobe using conductive atomic force microscopy (C-AFM). To validate the measured end contact resistivity, we compared our experimentally determined value with that obtained from numerical calculations and reported values for side contact resistivity. The contact resistivity normalized by the length of the CNT ends was 0.6-2.4 × 10^6 Ω nm for single-walled CNTs. This range is 1-2 orders of magnitude higher than that determined theoretically. The contact resistivity of a single-walled CNT end with metal normalized by the contact area was 2-3 orders of magnitude lower than that reported for the resistivity of a CNT sidewall/metal contact. For multi-walled CNTs, the measured contact resistivity was one order of magnitude higher than that of a CNT forest grown by remote plasma-enhanced chemical vapor deposition, whereas the contact resistivity of a top metal electrode was similar to that obtained for a single-walled CNT forest.

    DOI: 10.1063/1.5027849

  • Hydrogen-terminated diamond vertical-type metal oxide semiconductor field-effect transistors with a trench gate Reviewed International journal

    Masafumi Inaba, Tsubasa Muta, Mikinori Kobayashi, Toshiki Saito, Masanobu Shibata, Daisuke Matsumura, Takuya Kudo, Atsushi Hiraiwa, Hiroshi Kawarada

    Applied Physics Letters   109 ( 3 )   2016.7

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    The hydrogen-terminated diamond surface (C-H diamond) has a two-dimensional hole gas (2DHG) layer independent of the crystal orientation. A 2DHG layer is ubiquitously formed on the C-H diamond surface covered by atomic-layer-deposited-Al2O3. Using Al2O3 as a gate oxide, C-H diamond metal oxide semiconductor field-effect transistors (MOSFETs) operate in a trench gate structure where the diamond side-wall acts as a channel. MOSFETs with a side-wall channel exhibit equivalent performance to the lateral C-H diamond MOSFET without a side-wall channel. Here, a vertical-type MOSFET with a drain on the bottom is demonstrated in diamond with channel current modulation by the gate and pinch off.

    DOI: 10.1063/1.4958889

  • Contact Conductivity of Uncapped Carbon Nanotubes Formed by Silicon Carbide Decomposition Reviewed

    Masafumi Inaba, Chih Yu Lee, Kazuma Suzuki, Megumi Shibuya, Miho Myodo, Yu Hirano, Wataru Norimatsu, Michiko Kusunoki, Hiroshi Kawarada

    Journal of Physical Chemistry C   120 ( 11 )   6232 - 6238   2016.3

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    Understanding of the contact conductivity of carbon nanotubes (CNTs) will contribute to the further application of CNTs for electronic devices, such as thin film transistors whose channel or electrode is made of dispersed CNTs. In this study, we estimated the contact conductivity of a CNT/CNT interface from the in-plane conductivity of an uncapped CNT forest on SiC. Investigation of the electrical properties of dense CNT forests is also important to enable their electrical application. The in-plane conductivity of a dense CNT forest on silicon carbide normalized by its thickness was measured to be 50 S/cm, which is two to three orders of magnitude lower than the conductivity of a CNT yarn. It was also found that both the CNT cap region and the CNT bulk region exhibit in-plane conductivity. The contact conductivity of CNTs was estimated from the in-plane conductivity in the bulk region. Dense and uncapped CNT forest can be approximated by a conductive mesh, in which each conductive branch corresponds to the CNT/CNT contact conductance. The evaluated contact conductivity was in good agreement with that calculated from the tunneling effect.

    DOI: 10.1021/acs.jpcc.5b11815

  • Very low Schottky barrier height at carbon nanotube and silicon carbide interface Reviewed International journal

    Masafumi Inaba, Kazuma Suzuki, Megumi Shibuya, Chih Yu Lee, Yoshiho Masuda, Naoya Tomatsu, Wataru Norimatsu, Atsushi Hiraiwa, Michiko Kusunoki, Hiroshi Kawarada

    Applied Physics Letters   106 ( 12 )   2015.3

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    Electrical contacts to silicon carbide with low contact resistivity and high current durability are crucial for future SiC power devices, especially miniaturized vertical-type devices. A carbon nanotube (CNT) forest formed by silicon carbide (SiC) decomposition is a densely packed forest, and is ideal for use as a heat-dissipative ohmic contact in SiC power transistors. The contact resistivity and Schottky barrier height in a Ti/CNT/SiC system with various SiC dopant concentrations were evaluated in this study. Contact resistivity was evaluated in relation to contact area. The Schottky barrier height was calculated from the contact resistivity. As a result, the Ti/CNT/SiC contact resistivity at a dopant concentration of 3 × 10^18 cm-3 was estimated to be ∼1.3 × 10^-4 Ω cm2 and the Schottky barrier height of the CNT/SiC contact was in the range of 0.40-0.45 eV. The resistivity is relatively low for SiC contacts, showing that CNTs have the potential to be a good ohmic contact material for SiC power electronic devices.

    DOI: 10.1063/1.4916248

  • Effect of electrically aligned polycrystalline diamond flakes on the through-plane thermal conductivity of heat conduction sheets

    Masafumi Inaba, Seiya Seike, Yingchen Chen, Soichiro Ichiki, Yoshihiko Kubota, Shinya OHMAGARI, Michihiko Nakano, Junya Suehiro

    Functional Diamond   4 ( 1 )   2024.10   ISSN:2694-1112 eISSN:2694-1120

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    DOI: 10.1080/26941112.2024.2423643

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  • Manipulation of Cells Using Phenomena Induced by Electrostatic Field

    NAKANO Michihiko, INABA Masafumi, SUEHIRO Junya

    The Journal of The Institute of Electrical Engineers of Japan   144 ( 10 )   631 - 635   2024.10   ISSN:13405551 eISSN:18814190

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    Language:Japanese   Publisher:The Institute of Electrical Engineers of Japan  

    <p>1.はじめに</p><p>静電界による細胞操作として,誘電泳動について紹介する。“誘電泳動”は英語で“dielectrophoresis(DEP)”と書く。電気泳動“electrophoresis”に誘電体“dielectric”の“di-”を付け加えた語であり,液体媒体中,とりわけ誘電率が大きな水中に存在する誘電体微粒子や細胞などに</p>

    DOI: 10.1541/ieejjournal.144.631

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  • Fundamental Study on Novel Biological Indicator Using DNA-labeled Microbeads for Evaluating Nonthermal Plasma Sterilization

    Michihiko Nakano, Takamasa Okumura, Masafumi Inaba, Pankaj Attri, Kazunori Koga, Masaharu Shiratani, Junya Suehiro

    IEEE Sensors Letters   8 ( 8 )   2024.8   ISSN:2475-1472

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    Nonthermal atmospheric-pressure discharge plasma is considered important for sterilization. Reactive species, such as active oxygen species, radicals, and nitrate ions, generated by the discharge plasma damage the target bacterial cell wall/membrane and DNA. Several plasma sterilization methods have been proposed, including dielectric barrier discharge (DBD). To achieve effective sterilization, it is necessary to evaluate their characteristics using many parameters. This letter aims to demonstrate a proof-of-concept of a novel biological indicator for plasma sterilization. A biological indicator is used to verify sterilization outcomes. We employ DNA-labeled microbeads as biological indicators for the rapid visualization of plasma sterilization. This is based on our recently developed method for visual detection of DNA molecules. If plasma-derived factors cause the degradation of the DNA attached to the microbeads, this can be confirmed by visualization. Herein, we present the correlation between sterilization and visualization in the case of DBD. This method offers a rapid evaluation of plasma sterilization because it easily and quickly determines the sterilization capability of the plasma.

    DOI: 10.1109/LSENS.2024.3420437

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  • Selective visual detection of multiplex PCR amplicon using magnetic microbeads

    Michihiko Nakano, Masafumi Inaba, Junya Suehiro

    Biosensors and Bioelectronics: X   18   2024.6   ISSN:2590-1370

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Biosensors and Bioelectronics: X  

    Nucleic acid amplification tests (NATs), such as genetic tests using polymerase chain reaction (PCR), are sensitive methods for detecting pathogens and food contamination. The rapid, easy, and inexpensive detection of amplicons, DNA, or RNA is key to realizing on-site NATs. We have previously developed a novel amplicon detection method using magnetic microbeads based on the hydrophobicity of DNA in deionized water. In this study, we aimed to expand the method for the detection of multiplex DNA amplicons. Tagged primers and probes for selective attachment were used to detect amplicons from two strawberry pathogens. The amplicon-labeled magnetic microbeads were placed in the round-bottom well of a hydrophilic glass substrate. The attachment of amplicons to the magnetic microbeads changed their surface from hydrophilic to hydrophobic. The magnetized microbeads concentrated at the bottom when the substrate was placed on a permanent magnet, and the concentrated microbeads were easily recognizable by the naked eye. Microbeads without amplicons were adsorbed over a broad area of the bottom of the glass well owing to their hydrophilicity. The appropriate tag probe was attached to specific amplicons for detection, and each amplicon from multiplex PCR was selectively detected within approximately 15 min. Notably, this method requires no electric power and contributes to the realization of on-site NAT detection. This study presents a simple and rapid method for the selective detection of multiplex PCR amplicons using DNA–DNA hybridization.

    DOI: 10.1016/j.biosx.2024.100461

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  • Quantitative evaluation of dielectrophoretic separation efficiency of cancer exosomes based on fluorescence imaging

    Ryu Nakabayashi, Rie Koyama, Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    Japanese Journal of Applied Physics   63 ( 3 )   2024.3   ISSN:0021-4922 eISSN:1347-4065

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    Language:Others   Publishing type:Research paper (scientific journal)   Publisher:Japanese Journal of Applied Physics  

    <jats:title>Abstract</jats:title>
    <jats:p>Liquid biopsies for cancer diagnosis using exosomes have been studied. Separating cancer cell-derived exosomes from a sample mixture is crucial, especially when they do not dominate the sample at an early stage of cancer. A method based on their electrical properties could provide a simpler separation than immune-affinity methods. We have identified the differences in electrical properties of cancerous exosomes from those of normal ones, suggesting the possibility for their dielectrophoresis (DEP) based separation. This study separated cancerous exosomes from a mixture of normal exosomes. The DEP of fluorescence-labeled exosomes suspended in aqueous media with varying electrical conductivities was investigated. The observed DEP was quantitatively evaluated using the normalization method accounting for the fluorescence fading effect. The results showed that the cancerous exosomes were preferentially concentrated under the appropriate conditions. This suggests that DEP can enable the selective capture of cancer exosomes without chemical labeling.</jats:p>

    DOI: 10.35848/1347-4065/ad2657

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  • Effect of GaN cap layer towards ohmic contact of open-gate Cr AlGaN/GaN high electron mobility transistor

    Fauzi, N; Firdaus, A; Falina, S; Mohammad, SM; Inaba, M; Kawarada, H; Syamsul, M

    INTERNATIONAL JOURNAL OF NANOTECHNOLOGY   21 ( 4-5 )   226 - 235   2024   ISSN:1475-7435 eISSN:1741-8151

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    Publisher:International Journal of Nanotechnology  

    Metal-organic chemical vapour deposition (MOCVD) was used to grow AlGaN/GaN high electron mobility transistor (HEMT) on a sapphire substrate with different thicknesses of the GaN cap layer from 1.5 nm to 2.5 nm for open-gate chromium (Cr) AlGaN/GaN HEMT structures. High-resolution X-ray diffraction (HRXRD) was utilised to investigate the structural characteristics of the materials. A non-annealing technique was used to reduce the negatively impacted on the electrical properties is bad for the function of the device. The use of the GaN cap layer improved the performance of the devices as the resistance decreased with increasing the thickness of the GaN cap layer. Here we demonstrate the comparison between different thicknesses of GaN cap layers to improve the resistivity of the device.

    DOI: 10.1504/IJNT.2024.141755

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  • Demonstration of New Microelectrode Design to Enhance Sensitivity of Dielectrophoretic Impedance Measurement Reviewed

    Michihiko Nakano, Masafumi Inaba, Tomoko Murakami, Maho Sakurai, Junya Suehiro

    IEEE Sensors Letters   7 ( 8 )   1 - 4   2023.8   ISSN:2475-1472 eISSN:2475-1472

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical and Electronics Engineers (IEEE)  

    Dielectrophoretic impedance measurement (DEPIM) is a method using a microelectrode for measuring a target suspended in a solution by combining dielectrophoretic (DEP) trapping of the target and simultaneous measurement of impedance varied with the trapping. DEPIM can be utilized to detect bacteria and viruses without any chemical additive since DEPIM efficiency depends on the DEP trapping dominated by the microelectrode shape. This letter aims to demonstrate a new microelectrode design to increase bacteria detection efficiency instead of the conventional interdigitated microelectrode. The microelectrode having a serpentine gap as a sinusoidal waveform profile was proposed. The new microelectrode was compared with the interdigitated one in numerical simulation and experiments. The numerical simulation demonstrates that the serpentine microelectrode traps all the targets in a laminar flow in a microchannel. In contrast, the interdigitated one placed parallel to the microchannel does not because the target flowing away from the edges of the microelectrode cannot be trapped. The experiments using three kinds of bacteria were carried out. It was demonstrated that the serpentine microelectrode represented a sensitivity 104 times higher than the interdigitated one when a small amount of the sample solution was tested for a short time (1 min).

    DOI: 10.1109/lsens.2023.3297315

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  • Electrical Properties of GaN Cap Layer for AlGaN/GaN HEMT Reviewed

    Mohamad Hasnan Abdull Hamid, Rahil Izzati Mohd Asri, Mohammad Nuzaihan, Masafumi Inaba, Zainuriah Hassan, Hiroshi Kawarada, Shaili Falina, Mohd Syamsul

    Key Engineering Materials   947   3 - 8   2023.5   ISSN:10139826 eISSN:1662-9795

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    Metal organic chemical vapor deposition (MOCVD) was used to grow AlGaN/GaN HEMT on a sapphire substrate with a 3.0 nm GaN cap and a sample without a GaN cap. High resolution X-ray diffraction (HRXRD) was utilized to investigate the structural characteristics of the materials. The relationship between the electrical properties and two-dimensional electron gas (2DEG) I-V and Hall Effect measurement. The I-V measurement was used to investigate the resistance properties of AlGaN/GaN heterostructures. Hall Effect measurement was used to quantify electron mobility and sheet carrier concentration in both samples. The sample with a 3.0 nm GaN cap exhibited excellent electrical properties with 436.8 Ω/sq sheet resistivity and possessed a high value of sheet carrier concentration 3.46E+14 per cm<sup>2</sup>.

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  • Quantitative Evaluation of Dielectrophoretic Captured Fluorescent-labeled Exosomes

    Nakabayashi, R; Koyama, R; Inaba, M; Nakano, M; Suehiro, J

    2023 IEEE SENSORS   2023   ISSN:1930-0395 ISBN:979-8-3503-0387-2

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    Exosomes derived from cells have great potential as a biomarker for early-stage cancer diagnosis. Recently, we demonstrated the separation of exosomes derived from cancer and normal cells, respectively, utilizing dielectrophoresis (DEP). In the separation, the exosomes were labeled with fluorescent dyes to observe by an optical microscope. In this report, an evaluation method of the exosome concentration based on the fluorescence intensity was proposed. The evaluation method includes the effect of the photobleaching of fluorescent dye to improve the accuracy. The photobleaching property was experimentally investigated in order to obtain a calibration equation. The proposed method was applied to the quantitative evaluation of DEP-captured exosomes.

    DOI: 10.1109/SENSORS56945.2023.10325029

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  • Comparison between modulations of contact and channel potential in nitrogen dioxide gas response of ambipolar carbon nanotube field-effect transistors Invited Reviewed International journal

    S. Nakahara, T. Morita, H. Omachi, M. Inaba, M. Nakano, J. Suehiro

    AIP ADVANCES   12 ( 12 )   2022.12

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    DOI: 10.1063/5.0124891

  • Comparison between modulations of contact and channel potential in nitrogen dioxide gas response of ambipolar carbon nanotube field-effect transistors

    Shota Nakahara, Takahiro Morita, Haruka Omachi, Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    AIP Advances   12 ( 12 )   125302 - 125302   2022.12

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    Carbon nanotubes (CNTs) are promising materials for gas sensing because of their large specific area and high sensitivity to charge differentiation. In CNT-based field-effect transistors (FETs) for gas sensing, both CNT potential modulation in the channels and Schottky barrier height modulation at the CNT/metal electrode contact influence the current properties. However, researchers have not used Schottky barrier height modulation for gas detection. To investigate and compare the effects of Schottky barrier height modulation and CNT channel potential modulation on NO2 gas exposure, we fabricated ambipolar CNT FETs by the dielectrophoretic assembly. We exposed CNT FET gas sensors to N2 gas containing 100-ppb NO2 and observed two different responses in the electric properties: a steady current shift in the positive direction in the hole-conduction region because of the channel potential modulation, and an abrupt decrease in transconductance in the electron-conduction region because of the Schottky barrier modulation. The CNT channels and CNT/metal contact both contributed to the sensor response, and the modulation rate of the Schottky barrier was higher than that of the CNT potential shift in the channel.

    DOI: 10.1063/5.0124891

  • 新たに樹立した抗c-Kit抗体はニワトリ胚の発生中の腸におけるカハール介在細胞の形態を可視化する(Newly raised anti-c-Kit antibody visualizes morphology of interstitial cells of Cajal in the developing gut of chicken embryos)

    Yagasaki Rei, Shikaya Yuuki, Kawachi Teruaki, Inaba Masafumi, Takase Yuta, Takahashi Yoshiko

    Development, Growth & Differentiation   64 ( 8 )   446 - 454   2022.10   ISSN:0012-1592

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    ニワトリc-Kitタンパク質の716番から728番のアミノ酸残基からなる部分ペプチドに対するポリクローナル抗体をウサギで作製し、その特異性をウェスタンブロッティング解析と免疫細胞化学染色の両方で検証した。抗ニワトリc-Kit抗体と抗α平滑筋アクチン(αSMA)抗体との共染色により、ニワトリ後腸の輪状筋層と縦走筋層に存在するカハール介在細胞(ICC)を可視化することに成功した。分化初期段階のICCと平滑筋細胞の共通前駆細胞はαSMAとc-Kitの両方が陽性であり、後期段階では分化したICCと平滑筋細胞はそれぞれc-KitとαSMAのみを発現していた。粘膜下層から輪状筋層まで放射状に伸びる新規のICC集団も発見した。さらに、抗ニワトリc-Kit抗体は、透明化した後腸における個々のICCを描出した。以上より、本研究で作製した抗ニワトリc-Kit抗体は、ニワトリ胚の蠕動運動の研究を促進することが期待された。

  • High-sensitivity room temperature p-doped and undoped GaN thin film resistive gas sensor Reviewed International journal

    M. Hasnan, R.I.M. Asri, Z. Hassan, S.A.A. Abdalmohammed, M. Nuzaihan, M. Inaba, S. Falina and M. Syamsul

    International Journal of Nanotechnology   19 ( 2-5 )   418 - 429   2022.7   ISSN:1475-7435 eISSN:1741-8151

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    The behaviour and performance of p-doped GaN and undoped GaN thin film in the presence of methanol gas were studied. GaN thin films were grown using metal organic chemical vapour deposition (MOCVD), which were then fabricated into resistive sensors. Gas-sensing characterisation with the in-house gas chamber demonstrates that the resistive sensors based on undoped and p-doped GaN exhibit high sensitivity and fast response to methanol vapour in less than a minute, as well as excellent stability in room temperature operations. Without high temperature measurements, both undoped and p-doped GaN resistive sensors exhibit significant resistance variation and response over time when exposed to methanol, albeit with distinct properties. Here we demonstrate the comparison between the two and their sensing capabilities of both p-doped GaN and undoped GaN thin film resistive sensors.

    DOI: 10.1504/ijnt.2022.124520

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  • Characterization of Extra-Cellular Vesicle Dielectrophoresis and Estimation of Its Electric Properties Invited Reviewed International journal

    H. Chen, T. Yamakawa, M. Inaba, M, Nakano, J. Suehiro

    Sensors   22 ( 9 )   3279   2022.4

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    DOI: 10.3390/s22093279

  • Characterization of Extra-Cellular Vesicle Dielectrophoresis and Estimation of Its Electric Properties Reviewed

    Hao Chen, Tsubasa Yamakawa, Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    Sensors   22 ( 9 )   2022.4

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    Dielectrophoresis (DEP) refers to a type of electrical motion of dielectric particles. Because DEP is caused by particle polarization, it has been utilized to characterize particles. This study investigated the DEP of three types of exosomes, namely bovine milk, human breast milk, and human breast cancer exosomes. Exosomes are kinds of extracellular vesicles. The crossover frequencies of the exosomes were determined by direct observation of their DEPs. Consequently, bovine and human milk exosomes showed similar DEP properties, whereas the cancer exosomes were significantly different from the others. The membrane capacitance and conductivity of the exosomes were estimated using determined values. A significant difference was observed between bovine and human milk exosomes on their membrane capacitance. It was revealed that the membrane capacitances of human breast milk and human breast cancer exosomes were almost identical to those of their host cells and the conductivity of the exosomes were much lower than that of the host cell. Based on these results, DEP separation of the human breast milk and cancer exosomes was demonstrated. These results imply that DEP can be utilized to separate and identify cancer exosomes rapidly. Additionally, our method can be utilized to estimate the electric property of other types of extracellular vesicles.

    DOI: 10.3390/s22093279

  • RAPID DETECTION OF DNASE I BY DIELECTROPHORESIS AND IMPEDANCE MEASUREMENT OF DNA-LABELED MICROBEADS

    Nakano M., Shigemoto M., Inaba M., Suehiro J.

    MicroTAS 2022 - 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences   673 - 674   2022   ISBN:9781733419048

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    DNase I has been considered a biomarker for early diagnosing myocardial infarction. This study demonstrated a novel DNase I detection utilizing DNA-labeled microbeads. The DNA on the dielectric microbeads was cleaved by DNase I. Then, the microbeads were applied to dielectrophoresis (DEP)-based impedance measurement. Because the microbead's DEP depends on the amount of the attached DNA, the DNase I cleavage decreases the DEP force to trap them on a microelectrode, resulting in the decrease of the conductance change. As a result, the method detected 10-6 U of DNase I in a 40 µl reaction solution within 30 min.

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  • 高周波沿面放電によるSF6中CF4のCOへの変換と検出

    劉 栩林, Phansiri Nisarut, 稲葉 優文, 中野 道彦, 末廣 純也, 里 秀文

    電気関係学会九州支部連合大会講演論文集   2021   270 - 271   2021.9

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    Detection of CO converted from CF4 in SF6 by high frequency surface discharge

    DOI: 10.11527/jceeek.2021.0_270

  • Indirect detection of residual CF4 in gas-insulated switchgear via conversion under dielectric barrier discharge Reviewed International journal

    N. Phansiri, X. Liu, K Miwa, M. Inaba, M, Nakano, J. Suehiro, H. Sato

    Int. J. Plasma Environ. Sci. Technol.   15 ( 2 )   2021.8

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    DOI: 10.34343/ijpest.2021.15.e02010

  • Indirect detection of residual CF4 in gas-insulated switchgear via conversion under dielectric barrier discharge Reviewed

    Nisarut Phansiri, Xulin Liu, Kohei Miwa, Masafumi Inaba, Michihiko Nakano, Junya Suehiro, Hidefumi Sato

    International Journal of Plasma Environmental Science and Technology   15   2021.8

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    In this paper, a new diagnosis method for SF6 gas-insulated switchgear (GIS) is proposed based on decomposition gas analysis. We focus on residual CF4 gas in GIS, which is a decomposition gas generated in GIS via partial or arc discharge. Unlike other decomposition gases, which can be removed by the gas absorbent, CF4 accumulates during in-service operation, enabling trend-based GIS condition monitoring. Because direct CF4 detection using commercially available gas sensors is difficult, we propose a novel indirect detection method in which CF4 is converted into CO and CO2 by a dielectric barrier discharge (DBD). A DBD-treated artificial gas mixture composed of CF4, O2, and SF6 was analyzed via Fourier transform infrared spectroscopy (FTIR). It was found that CO and CO2 are simultaneously generated when the CF4 gas concentration is higher than 100 ppm, which is close to the target CF4 concentration for GIS diagnosis. To demonstrate rapid, simple, and on-site diagnostic capabilities, a commercial electrochemical CO gas sensor was employed to detect DBD-converted CO gas. The CO concentration quantified by the calibrated gas sensor was almost identical to that obtained via FTIR. As the CF4-to-CO conversion rate is expected to improve with an optimum DBD reactor design, the proposed scheme could be applicable to GIS diagnosis.

    DOI: 10.34343/ijpest.2021.15.e02010

  • Detection of SARS-CoV-2 Gene by Microbeads Dielectrophoresis-based DNA Detection Method Invited Reviewed International journal

    M. Nakano, M. Inaba, J. Suehiro

    IEEJ Trans. Sens. Micromachines   141 ( 7 )   233 - 236   2021.7

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    DOI: 10.1541/ieejsmas.141.233

  • Detection of SARS-CoV-2 Gene by Microbeads Dielectrophoresis-based DNA Detection Method

    Michihiko Nakano, Masafumi Inaba, Junya Suehiro

    IEEJ Transactions on Sensors and Micromachines   141 ( 7 )   233 - 236   2021.7

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    Nucleic amplification tests (NATs) are sensitive and specific methods to diagnose infectious diseases. Real-time polymerase chain reaction (PCR) is the gold standard, but it requires expensive apparatus and regents because of fluorescent detection. This study performed a combination of a conventional PCR and microbeads dielectrophoresis (DEP)-based DNA detection method to detect the SARS-CoV-2 gene quantitatively. SARS-CoV-2 is a virus causing COVID-19 and has caused the pandemic worldwide. In the microbeads DEP-based DNA detection method, the amplified DNA, amplicon, is attached to microbeads, the amplicon-labeled microbeads are detected by dielectrophoretic impedance measurement. As a result, the technique demonstrated that same sensitivity as that of real-time PCR. Our method enables the cheap diagnosis of infectious disease instead of expensive real-time PCR.

    DOI: 10.1541/ieejsmas.141.233

  • Rapid and low-cost amplicon visualization for nucleic acid amplification tests using magnetic microbeads dagger Invited Reviewed International journal

    M. Nakano, M. Inaba, J. Suehiro

    ANALYST   146   2818 - 2824   2021.5

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    DOI: 10.1039/d0an02349c

  • A New Scheme for Residual CF4 Detection in Gas-Insulated Switchgear Using Plasma-induced CF4 Decomposition into CO2 Reviewed International journal

    N. Phansiri, D. Maenosono, M. Inaba, M. Nakano, J. Suehiro, H. Sato

    2020 8th International Conference on Condition Monitoring and Diagnosis (CMD)   2020.10

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    DOI: 10.1109/CMD48350.2020.9287294

  • Application of 2DHG Diamond p-FET in Cascode With Normally-OFF Operation and a Breakdown Voltage of Over 1.7 kV Reviewed

    Te Bi, Junxiong Niu, Nobutaka Oi, Masafumi Inaba, Toshio Sasaki, Hiroshi Kawarada

    IEEE Transactions on Electron Devices   67 ( 10 )   4006 - 4009   2020.10

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    DOI: 10.1109/ted.2020.3019020

  • A New Scheme for Residual CF4 Detection in Gas-Insulated Switchgear Using Plasma-induced CF4 Decomposition into CO2 Reviewed

    Nisarut Phansiri, Daichi Maenosono, Masafumi Inaba, Michihiko Nakano, Junya Suehiro, Hidefumi Sato

    2020 8th International Conference on Condition Monitoring and Diagnosis (CMD)   2020.10

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    DOI: 10.1109/cmd48350.2020.9287294

  • Application of 2DHG Diamond p-FET in Cascode with Normally-off Operation and Breakdown Voltage of Over 1.7 kV Reviewed International journal

    T. Bi, J. Niu, N. Oi, M. Inaba, T. Sasaki, H. Kawarada

    IEEE Transaction on Electron Devices   67 ( 10 )   4006 - 4009   2020.9

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    DOI: 10.1109/TED.2020.3019020

  • 誘電体バリア放電によるSF6中CF4のCOへの変換と検出

    劉 栩林, Phansiri Nisarut, 稲葉 優文, 中野 道彦, 末廣 純也, 里 秀文

    電気関係学会九州支部連合大会講演論文集   2020   292 - 293   2020.9

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    Detection of CO converted from CF4 in SF6 by dielectric barrier discharge

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  • Response properties of nitrogen dioxide gas sensors with tin oxide decorated carbon nanotube channel fabricated by two-step dielectrophoretic assembly Reviewed International journal

    M. Inaba, M. Kono, T. Oda, N. Phansiri, M. Nakano, J. Suehiro

    AIP Advances   10   055223   2020.5

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    Gas sensors with carbon nanotubes (CNTs) and tin dioxide (SnO2) nanoparticles for nitrogen dioxide (NO2) detection are fabricated using a two-step dielectrophoretic (DEP) assembly method, and the NO2 gas detection properties are investigated. For the fabrication of the sensor, CNTs assemble between electrodes by a DEP force, followed by SnO2 nanoparticle decoration also by a DEP assembly method, and the assembled CNTs act as high electric field electrodes. The formed CNT/SnO2 gas sensors exhibit a sharp increase in resistance followed by a gradual decrease upon NO2 exposure. pn hetero-junctions are formed between the CNTs and the SnO2 nanoparticles, and the resistance shift of the depletion region in the CNTs at the pn hetero-junction induces the sharp increase in the resistance.

    DOI: 10.1063/5.0008188

  • Over 12000 A/cm2 and 3.2 mΩcm2 Miniaturized Vertical-Type Two-Dimensional Hole Gas Diamond MOSFET Reviewed

    Masayuki Iwataki, Nobutaka Oi, Kiyotaka Horikawa, Shotaro Amano, Jun Nishimura, Taisuke Kageura, Masafumi Inaba, Atsushi Hiraiwa, Hiroshi Kawarada

    IEEE Electron Device Letters   41 ( 1 )   111 - 114   2020.1

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    We present a miniaturized vertical-type two-dimensional hole gas (2DHG) diamond metal-oxide-semiconductor field-effect transistor (MOSFET) by adopting a gate-source overlapping structure. We developed a 2μm-wide trench and disposed a part of the gate electrode to overlap the Al2O3 insulator film on the source electrode to eliminate the space between source and gate electrode. We obtained the maximum drain current density of ID =12800 A/cm2 at VDS =-50 V and the specific on-resistance of RON =3.2 m}Ω cm2 at VDS =-10 V and confirmed their improvement by the miniaturization of devices and reduction of source to gate resistance. In addition, the drain current on/off ratio was 7 orders magnitude even at 200 °C with the formation of a highly concentrated, thick nitrogen-doped layer as the current blocking layer.

    DOI: 10.1109/LED.2019.2953693

  • Over 12000 A/cm2 and 3.2 m$Omega$ cm2 Miniaturized Vertical-Type Two-Dimensional Hole Gas Diamond MOSFET Reviewed

    Masayuki Iwataki, Nobutaka Oi, Kiyotaka Horikawa, Shotaro Amano, Jun Nishimura, Taisuke Kageura, Masafumi Inaba, Atsushi Hiraiwa, Hiroshi Kawarada

    IEEE Electron Device Letters   41 ( 1 )   111 - 114   2020.1

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    We present a miniaturized vertical-type two-dimensional hole gas (2DHG) diamond metal-oxide-semiconductor field-effect transistor (MOSFET) by adopting a gate-source overlapping structure. We developed a 2-mu m-wide trench and disposed a part of the gate electrode to overlap the Al2O3 insulator film on the source electrode to eliminate the space between source and gate electrode. We obtained the maximum drain current density of I-D = 12800 A/cm(2) at V-DS = -50 V and the specific on-resistance of R-ON = 3.2 mcm(2) at V-DS = -10 V and confirmed their improvement by the miniaturization of devices and reduction of source to gate resistance. In addition, the drain current on/off ratio was 7 orders magnitude even at 200 degrees C with the formation of a highly concentrated, thick nitrogen-doped layer as the current blocking layer.

    DOI: 10.1109/led.2019.2953693

  • DNA-induced changes in traveling wave dielectrophoresis velocity of microparticles Reviewed

    Michihiko Nakano, Zhenhao Ding, Masafumi Inaba, Junya Suehiro

    AIP Advances   10 ( 1 )   015236 - 015236   2020.1

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    © 2020 Author(s). Electrokinetic motion of dielectric microparticles is used in various applications, as the dielectrophoresis (DEP) of the microparticles depends on their polarization in an electric field. This polarization, given by the Clausius-Mossotti (CM) factor, depends on a particle's surface conductance. This study demonstrates that DNA can induce changes to the nature of the traveling-wave DEP (twDEP) force on a microparticle. As DNA molecules have electric charges on their phosphate backbones, attaching these molecules to the surface of a microparticle increases its surface conductance, resulting in a change in the imaginary part of the CM factor. We conducted image-based analysis of the twDEP velocity of ensembles of microparticles labeled with DNA in the range of 100-10 000 molecules per microparticle. Our experiments revealed that, in addition to being proportional to the number of DNA molecules on a particle, the twDEP velocity of sparsely labeled microparticles (∼100 DNA molecules per microparticle) can be distinguished from that of a bare one, suggesting that the twDEP velocity measurement can be utilized as a DNA detection method.

    DOI: 10.1063/1.5129725

  • DNA-induced changes in traveling wave dielectrophoresis velocity of microparticles Reviewed International journal

    M. Nakano, Z. Ding, M. Inaba, J. Suehiro

    AIP Advances   10 ( 1 )   015236   2020.1

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    DOI: 10.1063/1.5129725

  • Simple microfluidic device for detecting the negative dielectrophoresis of DNA labeled microbeads Reviewed

    Michihiko Nakano, Zhenhao Ding, Kenya Matsuda, Jingwen Xu, Masafumi Inaba, Junya Suehiro

    Biomicrofluidics   13 ( 6 )   2019.11

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    We propose a new microfluidic device that can be used to determine the change in the negative dielectrophoresis (n-DEP) of dielectric microbeads when a small amount of DNA is attached to them. We previously proposed a DNA detection method based on changes in the DEP of microbeads induced by the attachment of DNA. When target DNA is attached to the microbeads having n-DEP property, the DEP changes from negative to positive. This occurs because electric charges of the DNA increase the surface conductance of the microbeads. Thus, only the DNA-labeled microbeads are attracted to a microelectrode by positive DEP. The trapped DNA-labeled microbeads can be counted by dielectrophoretic impedance measurements. A large amount of DNA (approximately 105 DNA molecules) is required to change the DEP from negative to positive. Even though this method can be combined with DNA amplification, reducing the amount of DNA required can help us to shorten the reaction time. In this study, we aimed to detect DNA less than 105 DNA molecules by determining the change in the n-DEP change. To achieve this, we proposed a simple microfluidic device consisting of a single microchannel and a single pair of microelectrodes. Numerical simulations revealed that the device can identify the slight change in the n-DEP of the microbeads corresponding to the attachment of a small amount of DNA. In practical experiments, the fabricated device distinguished 10-1000 DNA molecules per microbead. This method represents a fast and easy method of DNA detection when combined with DNA amplification techniques.

    DOI: 10.1063/1.5124419

  • Simple microfluidic device for detecting the negative dielectrophoresis of DNA labeled microbeads Reviewed

    Michihiko Nakano, Zhenhao Ding, Kenya Matsuda, Jingwen Xu, Masafumi Inaba, Junya Suehiro

    Biomicrofluidics   13 ( 6 )   064109 - 064109   2019.11

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    DOI: 10.1063/1.5124419

  • Point‐Arc Remote Plasma Chemical Vapor Deposition for High‐Quality Single‐Crystal Diamond Selective Growth Reviewed

    Wenxi Fei, Masafumi Inaba, Haruka Hoshino, Ikuto Tsuyusaki, Sora Kawai, Masayuki Iwataki, Hiroshi Kawarada

    physica status solidi (a)   216 ( 21 )   1900227 - 1900227   2019.11

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    DOI: 10.1002/pssa.201900227

  • 誘電泳動集積法で作製したSnO2ガスセンサのCF4応答における再現性調査

    Phansiri Nisarut, 前之園 大地, 稲葉 優文, 中野 道彦, 里 秀文, 末廣 純也

    電気関係学会九州支部連合大会講演論文集   2019   325 - 326   2019.9

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    Reproducibility of CF4 detection characteristics of SnO2 gas sensor fabricated by dielectrophoresis

    DOI: 10.11527/jceeek.2019.0_325

  • Correlation between the Carbon Nanotube Growth Rate and Byproducts in Antenna‐Type Remote Plasma Chemical Vapor Deposition Observed by Vacuum Ultraviolet Absorption Spectroscopy Invited Reviewed

    Masafumi Inaba, Takumi Ochiai, Kazuyoshi Ohara, Ryogo Kato, Tasuku Maki, Toshiyuki Ohashi, Hiroshi Kawarada

    Small   1901504 - 1901504   2019.7

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    Correlation between the Carbon Nanotube Growth Rate and Byproducts in Antenna‐Type Remote Plasma Chemical Vapor Deposition Observed by Vacuum Ultraviolet Absorption Spectroscopy

    DOI: 10.1002/smll.201901504

  • Normally-OFF Two-Dimensional Hole Gas Diamond MOSFETs Through Nitrogen-Ion Implantation Reviewed

    Nobutaka Oi, Takuya Kudo, Masafumi Inaba, Satoshi Okubo, Shinobu Onoda, Atsushi Hiraiwa, Hiroshi Kawarada

    IEEE Electron Device Letters   40 ( 6 )   933 - 936   2019.6

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    Normally-OFF Two-Dimensional Hole Gas Diamond MOSFETs Through Nitrogen-Ion Implantation
    Diamond is a promising material for power applications owing to its excellent physical properties. Two-dimensional hole gas (2DHG) diamond metal-oxide-semiconductor field-effect transistors (MOSFETs) with hydrogen-terminated (C-H) channel have high current densities and high breakdown fields but often show normally-ON operation. From the viewpoint of safety, normally-OFF operation is required for power applications. In this letter, we used ion implantation to form a shallow and thin nitrogen-doped layer below the C-H channel region, which realized normally OFF operation. Nitrogen-ion implanted length is fixed at 5 or 10 mu m. Nitrogen is a deep donor (1.7 eV) and the nitrogen-doped layer prevents hole accumulation near the surface. The threshold voltage was as high as -2.5 V and no obvious dependence on the threshold voltage of nitrogenion implanted length is observed. The breakdown field was 2.7 MV/cm at room temperature. Of 64 devices with a common gate length, 75% showed normally-OFF operation. We confirmed the threshold voltage shift by a thin and shallow nitrogen-doped layer formed by ion implantation.

    DOI: 10.1109/led.2019.2912211

  • Electrical property measurement of two-dimensional hole-gas layer on hydrogen-terminated diamond surface in vacuum-gap-gate structure Reviewed

    Masafumi Inaba

    Applied Physics Letters   114 ( 25 )   253504 - 253504   2019.6

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    DOI: 10.1063/1.5099395

  • Point-Arc Remote Plasma Chemical Vapor Deposition for High-Quality Single-Crystal Diamond Selective Growth Reviewed International journal

    Wenxi Fei, Masafumi Inaba, Haruka Hoshino, Ikuto Tsuyusaki, Sora Kawai, Masayuki Iwataki, Hiroshi Kawarada

    Physica Status Solidi (A) Applications and Materials Science   2019.6

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    Selective growth techniques are believed to be the most effective approaches in the fabrication of diamond devices. Herein, the contamination from antenna and mask damage that causes poor performance in electronic applications is overcome with a high-quality diamond film on Ib (100) substrate, obtained by utilizing point-arc remote microwave plasma chemical vapor deposition (MPCVD). Scanning electron microscope (SEM) images and energy dispersive X-ray (EDX) mapping suggest that the diamond nucleation and selective growth occurred only in unmasked regions. Crystalline quality is evaluated by Raman spectra. Mo concentration from the antenna is detected with secondary ion mass spectroscopy (SIMS) at only a background level in the selectively grown diamond, indicating that the films are free of contaminant from the antenna, at three orders of magnitude lower than the impurity concentration in films selectively grown by typical hot filament CVD. Moreover, the moderate growth rate (approximately 50 nm h−1) enables high reproducibility, which is of great importance for the precise control thickness of the selective growth layer, and thus the proposed method offers significant potential for the architecture modification of diamond devices.

    DOI: 10.1002/pssa.201900227

  • Normally-OFF Two-Dimensional Hole Gas Diamond MOSFETs Through Nitrogen-Ion Implantation Reviewed

    Nobutaka Oi, Takuya Kudo, Masafumi Inaba, Satoshi Okubo, Shinobu Onoda, Atsushi Hiraiwa, Hiroshi Kawarada

    IEEE Electron Device Letters   40 ( 6 )   933 - 936   2019.6

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    Diamond is a promising material for power applications owing to its excellent physical properties. Two-dimensional hole gas (2DHG) diamond metal-oxide-semiconductor field-effect transistors (MOSFETs) with hydrogen-terminated (C-H) channel have high current densities and high breakdown fields but often show normally- ON operation. From the viewpoint of safety, normally- OFF operation is required for power applications. In this letter, we used ion implantation to form a shallow and thin nitrogen-doped layer below the C-H channel region, which realized normally- OFF operation. Nitrogen-ion implanted length is fixed at 5 or 10 \mu \text{m}. Nitrogen is a deep donor (1.7 eV) and the nitrogen-doped layer prevents hole accumulation near the surface. The threshold voltage was as high as -2.5 V and no obvious dependence on the threshold voltage of nitrogen-ion implanted length is observed. The breakdown field was 2.7 MV/cm at room temperature. Of 64 devices with a common gate length, 75% showed normally- OFF operation. We confirmed the threshold voltage shift by a thin and shallow nitrogen-doped layer formed by ion implantation.

    DOI: 10.1109/LED.2019.2912211

  • Carbon 1s X-ray photoelectron spectra of realistic samples of hydrogen-terminated and oxygen-terminated CVD diamond (111) and (001) Reviewed

    Shozo Kono, Taisuke Kageura, Yuya Hayashi, Sung Gi Ri, Tokuyuki Teraji, Daisuke Takeuchi, Masahiko Ogura, Hideyuki Kodama, Atsuhito Sawabe, Masafumi Inaba, Atsushi Hiraiwa, Hiroshi Kawarada

    Diamond and Related Materials   93   105 - 130   2019.3

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    Key factors in C 1s photoelectron spectroscopy for realistic samples of single crystal diamonds are remarked. Basic equations for angle-dependent photoelectron spectroscopy applied to single crystal diamond samples are described in Appendix A. Carbon 1s photoelectron spectroscopic works so far reported for hydrogen-terminated and oxygen-terminated diamond (001) and (111) samples were reviewed placing special attention on surface C 1s components with reference to the key factors. The results showed diversity in C 1s photoelectron spectra so far reported. We had three specific subjects of the study in C 1s XPS; the first is that we have reconfirmed the phenomenon that surface conductive layers resumed when smooth non-doped CVD C(111)-O samples were annealed in vacuum [Diam.Rela.Mate.18(2009)206]. A single C 1s XPS surface component was found for a smooth C(111)-O sample before the vacuum-anneal, which was attributed to surface carbon atoms in C–O–H bonding. The second subject is that dependence of C 1s XPS spectra on surface sensitivity has been measured for all the samples with different surface roughness of C(001)-O, C(111)-O, C(001)-H, and C(111)-H. The results were converted to the energy difference between the Fermi-level (Ef) and valence band maximum (Ev) on the probing depth from the surface. All the samples showed downward bending of Ev toward the surface. For the C(001)-H samples, this was a reconfirmation of previous work [Surf.Sci.604(2010)1148]. For the C(001)-H and C(111)-H samples, various degrees of downward band bending toward surface were observed and analyzed with two-dimensional band simulation. It was concluded that another source of holes such as shallow acceptors is present in a deeper region of the surface in addition to holes very close to surface caused by the charge-transfer-doping. The third subject is that C 1s XPS spectra for superconducting C(111)-O samples showed a lattice distortion of ~9 monolayers near the surface.

    DOI: 10.1016/j.diamond.2019.01.017

  • Carbon 1s X-ray photoelectron spectra of realistic samples of hydrogen-terminated and oxygen-terminated CVD diamond (111) and (001) Reviewed

    Shozo Kono, Taisuke Kageura, Yuya Hayashi, Sung-Gi Ri, Tokuyuki Teraji, Daisuke Takeuchi, Masahiko Ogura, Hideyuki Kodama, Atsuhito Sawabe, Masafumi Inaba, Atsushi Hiraiwa, Hiroshi Kawarada

    Diamond and Related Materials   93   105 - 130   2019.3

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    Carbon 1s X-ray photoelectron spectra of realistic samples of hydrogen-terminated and oxygen-terminated CVD diamond (111) and (001)
    © 2019 Elsevier B.V. Key factors in C 1s photoelectron spectroscopy for realistic samples of single crystal diamonds are remarked. Basic equations for angle-dependent photoelectron spectroscopy applied to single crystal diamond samples are described in Appendix A. Carbon 1s photoelectron spectroscopic works so far reported for hydrogen-terminated and oxygen-terminated diamond (001) and (111) samples were reviewed placing special attention on surface C 1s components with reference to the key factors. The results showed diversity in C 1s photoelectron spectra so far reported. We had three specific subjects of the study in C 1s XPS; the first is that we have reconfirmed the phenomenon that surface conductive layers resumed when smooth non-doped CVD C(111)-O samples were annealed in vacuum [Diam.Rela.Mate.18(2009)206]. A single C 1s XPS surface component was found for a smooth C(111)-O sample before the vacuum-anneal, which was attributed to surface carbon atoms in C–O–H bonding. The second subject is that dependence of C 1s XPS spectra on surface sensitivity has been measured for all the samples with different surface roughness of C(001)-O, C(111)-O, C(001)-H, and C(111)-H. The results were converted to the energy difference between the Fermi-level (Ef) and valence band maximum (Ev) on the probing depth from the surface. All the samples showed downward bending of Ev toward the surface. For the C(001)-H samples, this was a reconfirmation of previous work [Surf.Sci.604(2010)1148]. For the C(001)-H and C(111)-H samples, various degrees of downward band bending toward surface were observed and analyzed with two-dimensional band simulation. It was concluded that another source of holes such as shallow acceptors is present in a deeper region of the surface in addition to holes very close to surface caused by the charge-transfer-doping. The third subject is that C 1s XPS spectra for superconducting C(111)-O samples showed a lattice distortion of ~9 monolayers near the surface.

    DOI: 10.1016/j.diamond.2019.01.017

  • Enhancement of the electron transfer rate in carbon nanotube flexible electrochemical sensors by surface functionalization Reviewed

    Keita Nishimura, Takuya Ushiyama, Nguyen Xuan Viet, Masafumi Inaba, Shigeru Kishimoto, Yutaka Ohno

    Electrochimica Acta   295   157 - 163   2019.2

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    Thin films of single-walled carbon nanotubes (SWNTs) possess high potential for use in flexible electrochemical sensors in wearable medical devices. However, the electrochemical activity of such materials is not yet fully understood. We studied the enhancement in electrochemical activity of SWNT-based flexible electrochemical sensors. To exclude the effect of surface contaminations from the fabrication processes on the electrochemical activity, we introduced the dry process for high-quality and clean SWNT film formation and the clean device fabrication process with a protective layer. So-fabricated SWNT electrodes exhibited a low electron transfer rate. Electrochemical functionalization with an H2SO4 solution successfully enhanced the electrochemical activity of the SWNT electrode for the inner sphere probes such as [Fe(CN)6]4−/3−. This method is quite gentle and controllable, but also effective at increasing the electron transfer rate without either degrading the potential window. We found out that there was a correlation between the electron transfer rate and the amount of defects evaluated from Raman scattering spectroscopy. XPS analysis showed that the functionalization process introduced C–O and C[dbnd]O species, suggesting that these species constituted active sites for inner sphere probes. The electrochemical functionalization was also effective for enhancing the limit of detection in dopamine detection with the flexible SWNT electrode. The limit of detection was ∼100 nM for functionalized electrode whereas it was ∼1 μM for as-fabricated electrodes.

    DOI: 10.1016/j.electacta.2018.10.147

  • Enhancement of the electron transfer rate in carbon nanotube flexible electrochemical sensors by surface functionalization Reviewed

    Keita Nishimura, Takuya Ushiyama, Nguyen Xuan Viet, Masafumi Inaba, Shigeru Kishimoto, Yutaka Ohno

    Electrochimica Acta   295   157 - 163   2019.2

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    DOI: 10.1016/j.electacta.2018.10.147

  • Lithographically engineered shallow nitrogen-vacancy centers in diamond for external nuclear spin sensing Reviewed

    Ryosuke Fukuda, Priyadharshini Balasubramanian, Itaru Higashimata, Godai Koike, Takuma Okada, Risa Kagami, Tokuyuki Teraji, Shinobu Onoda, Moriyoshi Haruyama, Keisuke Yamada, Masafumi Inaba, Hayate Yamano, Felix M. Stürner, Simon Schmitt, Liam P. McGuinness, Fedor Jelezko, Takeshi Ohshima, Takahiro Shinada, Hiroshi Kawarada, Wataru Kada, Osamu Hanaizumi, Takashi Tanii, Junichi Isoya

    New Journal of Physics   20 ( 8 )   2018.8

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    The simultaneous control of the number and position of negatively charged nitrogen-vacancy (NV) centers in diamond was achieved. While single near-surface NV centers are known to exhibit outstanding capabilities in external spin sensing, trade-off relationships among the accuracy of the number and position, and the coherence of NV centers have made the use of such engineered NV centers difficult. Namely, low-energy nitrogen implantation with lithographic techniques enables the nanoscale position control but results in degradation of the creation yield and the coherence property. In this paper, we show that low-energy nitrogen ion implantation to a 12C (99.95%)-enriched homoepitaxial diamond layer using nanomask is applicable to create shallow NV centers with a sufficiently long coherence time for external spin sensing, at a high creation yield. Furthermore, the NV centers were arranged in a regular array so that 40% lattice sites contain single NV centers. The XY8-k measurements using the individual NV centers reveal that the created NV centers have depths from 2 to 12 nm, which is comparable to the stopping range of nitrogen ions implanted at 2.5 keV. We show that the position-controlled NV centers are capable of external spin sensing with a ultra-high spatial resolution.

    DOI: 10.1088/1367-2630/aad997

  • Lithographically engineered shallow nitrogen-vacancy centers in diamond for external nuclear spin sensing Reviewed

    Ryosuke Fukuda, Priyadharshini Balasubramanian, Itaru Higashimata, Godai Koike, Takuma Okada, Risa Kagami, Tokuyuki Teraji, Shinobu Onoda, Moriyoshi Haruyama, Keisuke Yamada, Masafumi Inaba, Hayate Yamano, Felix M Stürner, Simon Schmitt, Liam P McGuinness, Fedor Jelezko, Takeshi Ohshima, Takahiro Shinada, Hiroshi Kawarada, Wataru Kada, Osamu Hanaizumi, Takashi Tanii, Junichi Isoya

    New Journal of Physics   20 ( 8 )   083029 - 083029   2018.8

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    DOI: 10.1088/1367-2630/aad997

  • Vertical-type two-dimensional hole gas diamond metal oxide semiconductor field-effect transistors Reviewed

    Nobutaka Oi, Masafumi Inaba, Satoshi Okubo, Ikuto Tsuyuzaki, Taisuke Kageura, Shinobu Onoda, Atsushi Hiraiwa, Hiroshi Kawarada

    Scientific Reports   8 ( 1 )   2018.7

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    Vertical-type two-dimensional hole gas diamond metal oxide semiconductor field-effect transistors
    Power semiconductor devices require low on-resistivity and high breakdown voltages simultaneously. Vertical-type metal-oxide-semiconductor field-effect transistors (MOSFETs) meet these requirements, but have been incompleteness in diamond. Here we show vertical-type p-channel diamond MOSFETs with trench structures and drain current densities equivalent to those of n-channel wide bandgap devices for complementary inverters. We use two-dimensional hole gases induced by atomic layer deposited Al2O3 for the channel and drift layers, irrespective of their crystal orientations. The source and gate are on the planar surface, the drift layer is mainly on the sidewall and the drain is the p(+) substrate. The maximum drain current density exceeds 200 mA mm(-1) at a 12 mu m source-drain distance. On/off ratios of over eight orders of magnitude are demonstrated and the drain current reaches the lower measurement limit in the off-state at room temperature using a nitrogen-doped n-type blocking layer formed using ion implantation and epitaxial growth.

    DOI: 10.1038/s41598-018-28837-5

  • Role of Carboxyl and Amine Termination on a Boron-Doped Diamond Solution Gate Field Effect Transistor (SGFET) for pH Sensing Reviewed

    Shaili Falina, Sora Kawai, Nobutaka Oi, Hayate Yamano, Taisuke Kageura, Evi Suaebah, Masafumi Inaba, Yukihiro Shintani, Mohd Syamsul, Hiroshi Kawarada

    Sensors   18 ( 7 )   2178 - 2178   2018.7

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    Role of Carboxyl and Amine Termination on a Boron-Doped Diamond Solution Gate Field Effect Transistor (SGFET) for pH Sensing

    DOI: 10.3390/s18072178

  • Role of carboxyl and amine termination on a boron-doped diamond solution gate field effect transistor (SGFET) for PH sensing Reviewed

    Shaili Falina, Sora Kawai, Nobutaka Oi, Hayate Yamano, Taisuke Kageura, Evi Suaebah, Masafumi Inaba, Yukihiro Shintani, Mohd Syamsul, Hiroshi Kawarada

    Sensors (Switzerland)   18 ( 7 )   2018.7

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    In this paper, we report on the effect of carboxyl-and amine terminations on a boron-doped diamond surface (BDD) in relation to pH sensitivity. Carboxyl termination was achieved by anodization oxidation in Carmody buffer solution (pH 7). The carboxyl-terminated diamond surface was exposed to nitrogen radicals to generate an amine-terminated surface. The pH sensitivity of the carboxyl-and amine-terminated surfaces was measured from pH 2 to pH 12. The pH sensitivities of the carboxyl-terminated surface at low and high pH are 45 and 3 mV/pH, respectively. The pH sensitivity after amine termination is significantly higher—the pH sensitivities at low and high pH are 65 and 24 mV/pH, respectively. We find that the negatively-charged surface properties of the carboxyl-terminated surface due to ionization of –COOH causes very low pH detection in the high pH region (pH 7–12). In the case of the amine-terminated surface, the surface properties are interchangeable in both acidic and basic solutions; therefore, we observed pH detection at both low and high pH regions. The results presented here may provide molecular-level understanding of surface properties with charged ions in pH solutions. The understanding of these surface terminations on BDD substrate may be useful to design diamond-based biosensors.

    DOI: 10.3390/s18072178

  • Electrical contact properties between carbon nanotube ends and a conductive atomic force microscope tip Reviewed

    Masafumi Inaba, Kazuyoshi Ohara, Megumi Shibuya, Takumi Ochiai, Daisuke Yokoyama, Wataru Norimatsu, Michiko Kusunoki, Hiroshi Kawarada

    Journal of Applied Physics   123 ( 24 )   244502   2018.6

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    Electrical contact properties between carbon nanotube ends and a conductive atomic force microscope tip
    Understanding the electrical contact properties of carbon nanotube (CNT) ends is important to use the high conductance of CNTs in the CNT on-axis direction in applications such as through-silicon via structures. In this study, we experimentally evaluated the contact resistivity between single-/multi-walled CNT ends and a metal nanoprobe using conductive atomic force microscopy (C-AFM). To validate the measured end contact resistivity, we compared our experimentally determined value with that obtained from numerical calculations and reported values for side contact resistivity. The contact resistivity normalized by the length of the CNT ends was 0.6-2.4 x 10(6) Omega nm for single-walled CNTs. This range is 1-2 orders of magnitude higher than that determined theoretically. The contact resistivity of a single-walled CNT end with metal normalized by the contact area was 2-3 orders of magnitude lower than that reported for the resistivity of a CNT sidewall/metal contact. For multi-walled CNTs, the measured contact resistivity was one order of magnitude higher than that of a CNT forest grown by remote plasma-enhanced chemical vapor deposition, whereas the contact resistivity of a top metal electrode was similar to that obtained for a single-walled CNT forest. Published by AIP Publishing.

    DOI: 10.1063/1.5027849

  • Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001) Reviewed

    S. Kono, T. Sasaki, Masafumi Inaba, A. Hiraiwa, H. Kawarada

    Diamond and Related Materials   80   93 - 98   2017.11

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    The sheet resistance (Rsk) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that Rsk is about ~ 200 times larger than the sheet resistance, Rsh, in the open areas without Au-electrodes. The specific contact resistance, RC, of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, RC is suggested to be of the order of 1 × 10− 3 – 1 × 10− 4 Ωcm2.

    DOI: 10.1016/j.diamond.2017.09.020

  • Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001) Reviewed

    S. Kono, T. Sasaki, M. Inaba, A. Hiraiwa, H. Kawarada

    Diamond and Related Materials   80   93 - 98   2017.11

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    DOI: 10.1016/j.diamond.2017.09.020

  • Vertical edge graphite layer on recovered diamond (001) after high-dose ion implantation and high-temperature annealing Reviewed

    Masafumi Inaba, Akinori Seki, Kazuaki Sato, Tomoyoshi Kushida, Taisuke Kageura, Hayate Yamano, Atsushi Hiraiwa, Hiroshi Kawarada

    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS   254 ( 9 )   e201700040   2017.9

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    A vertical edge graphite layer (VEG) fabricated on a diamond (001) substrate and the recovery of the crystallinity of the diamond substrate following high-dose ion implantation and high-temperature annealing (HTA) was investigated. The Al ions were implanted into the diamond (001) surface at 773K (500 degrees C), followed by HTA at 1973 K (1700 degrees C). The graphite edges were vertically oriented, but each domain was randomly rotated in the in-plane direction, which was confirmed via multiple cross-sectional transmission electron microscopy images obtained from different directions rotated 2, 5, 10, and 158 around the [001] axis. The Raman and photoluminescence exhibited no significant peaks. The initial sp(2) structure state of the VEG was nucleated in an early stage of the HTA and the surface diamond was subsequently reconstructed, which was confirmed using stopping-and-range-of-ions-in-matter calculations and Rutherford backscattering/channeling (RBS-C) measurements. The RBS-C spectra indicate that the crystal is maintained after hot implantation and is recovered by HTA. This VEG structure may be useful for ohmic contact with diamond electrical devices. (C) 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

    DOI: 10.1002/pssb.201700040

  • Vertical edge graphite layer on recovered diamond (001) after high-dose ion implantation and high-temperature annealing Reviewed

    Masafumi Inaba, Akinori Seki, Kazuaki Sato, Tomoyoshi Kushida, Taisuke Kageura, Hayate Yamano, Atsushi Hiraiwa, Hiroshi Kawarada

    Physica Status Solidi (B) Basic Research   254 ( 9 )   2017.9

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    A vertical edge graphite layer (VEG) fabricated on a diamond (001) substrate and the recovery of the crystallinity of the diamond substrate following high-dose ion implantation and high-temperature annealing (HTA) was investigated. The Al ions were implanted into the diamond (001) surface at 773 K (500 °C), followed by HTA at 1973 K (1700 °C). The graphite edges were vertically oriented, but each domain was randomly rotated in the in-plane direction, which was confirmed via multiple cross-sectional transmission electron microscopy images obtained from different directions rotated 2, 5, 10, and 15° around the [001] axis. The Raman and photoluminescence exhibited no significant peaks. The initial sp2 structure state of the VEG was nucleated in an early stage of the HTA and the surface diamond was subsequently reconstructed, which was confirmed using stopping-and-range-of-ions-in-matter calculations and Rutherford backscattering/channeling (RBS-C) measurements. The RBS-C spectra indicate that the crystal is maintained after hot implantation and is recovered by HTA. This VEG structure may be useful for ohmic contact with diamond electrical devices.

    DOI: 10.1002/pssb.201700040

  • Threshold voltage control of electrolyte solution gate field-effect transistor by electrochemical oxidation Reviewed

    Takuro Naramura, Masafumi Inaba, Sho Mizuno, Keisuke Igarashi, Eriko Kida, Shaili Falina Mohd Sukri, Yukihiro Shintani, Hiroshi Kawarada

    APPLIED PHYSICS LETTERS   111 ( 1 )   013505   2017.7

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    Diamond electrolyte solution-gate-field effect transistors (SGFETs) are suitable for applications as chemical ion sensors because of their wide potential window and good physical and chemical stabilities. In this study, we fabricated an anodically oxidized diamond SGFET from a full hydrogen-terminated diamond SGFET and demonstrated control of the device threshold voltage by irreversible anodic oxidation. The applied anodic bias voltage (V-AO) was varied gradually from low to high (1.1-1.7 V). As the anodic oxidation proceeded, the threshold voltage shifted to more negative values with no degradation of hole mobility. Thus, anodic oxidation is a useful method for controlling the threshold voltage of diamond SGFETs. Published by AIP Publishing.

    DOI: 10.1063/1.4991364

  • Threshold voltage control of electrolyte solution gate field-effect transistor by electrochemical oxidation Reviewed

    Takuro Naramura, Masafumi Inaba, Sho Mizuno, Keisuke Igarashi, Eriko Kida, Shaili Falina Mohd Sukri, Yukihiro Shintani, Hiroshi Kawarada

    Applied Physics Letters   111 ( 1 )   2017.7

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    Diamond electrolyte solution-gate-field effect transistors (SGFETs) are suitable for applications as chemical ion sensors because of their wide potential window and good physical and chemical stabilities. In this study, we fabricated an anodically oxidized diamond SGFET from a full hydrogen-terminated diamond SGFET and demonstrated control of the device threshold voltage by irreversible anodic oxidation. The applied anodic bias voltage (VAO) was varied gradually from low to high (1.1-1.7 V). As the anodic oxidation proceeded, the threshold voltage shifted to more negative values with no degradation of hole mobility. Thus, anodic oxidation is a useful method for controlling the threshold voltage of diamond SGFETs.

    DOI: 10.1063/1.4991364

  • Effect of a radical exposure nitridation surface on the charge stability of shallow nitrogen-vacancy centers in diamond Reviewed

    Taisuke Kageura, Kanami Kato, Hayate Yamano, Evi Suaebah, Miki Kajiya, Sora Kawai, Masafumi Inaba, Takashi Tanii, Moriyoshi Haruyama, Keisuke Yamada, Shinobu Onoda, Wataru Kada, Osamu Hanaizumi, Tokuyuki Teraji, Junichi Isoya, Shozo Kono, Hiroshi Kawarada

    Applied Physics Express   10 ( 5 )   2017.5

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    A nitridation process of a diamond surface with nitrogen radical exposure far from the radio-frequency plasma for the stabilization of a negatively charged nitrogen-vacancy (NV%) centers near the surface is presented. At a nitrogen coverage of as high as 0.9 monolayers, high average Rabi contrasts of 0.40 + 0.06 and 0.46 + 0.03 have been obtained for single NV% centers formed by shallow nitrogen implantation with acceleration voltages of 1 and 2 keV, respectively. This indicates that nitrogen termination by a radical exposure process produces an electric charge state suitable for single NV% centers near the surface compared with the states obtained for alternatively terminated surfaces.

    DOI: 10.7567/APEX.10.055503

  • Effect of a radical exposure nitridation surface on the charge stability of shallow nitrogen-vacancy centers in diamond Reviewed

    Taisuke Kageura, Kanami Kato, Hayate Yamano, Evi Suaebah, Miki Kajiya, Sora Kawai, Masafumi Inaba, Takashi Tanii, Moriyoshi Haruyama, Keisuke Yamada, Shinobu Onoda, Wataru Kada, Osamu Hanaizumi, Tokuyuki Teraji, Junichi Isoya, Shozo Kono, Hiroshi Kawarada

    APPLIED PHYSICS EXPRESS   10 ( 5 )   055503   2017.5

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    A nitridation process of a diamond surface with nitrogen radical exposure far from the radio-frequency plasma for the stabilization of a negatively charged nitrogen-vacancy (NV%) centers near the surface is presented. At a nitrogen coverage of as high as 0.9 monolayers, high average Rabi contrasts of 0.40 +/- 0.06 and 0.46 +/- 0.03 have been obtained for single NV% centers formed by shallow nitrogen implantation with acceleration voltages of 1 and 2 keV, respectively. This indicates that nitrogen termination by a radical exposure process produces an electric charge state suitable for single NV- centers near the surface compared with the states obtained for alternatively terminated surfaces. (C) 2017 The Japan Society of Applied Physics

    DOI: 10.7567/APEX.10.055503

  • Charge state stabilization of shallow nitrogen vacancy centers in diamond by oxygen surface modification Reviewed

    Hayate Yamano, Sora Kawai, Kanami Kato, Taisuke Kageura, Masafumi Inaba, Takuma Okada, Itaru Higashimata, Moriyoshi Haruyama, Takashi Tanii, Keisuke Yamada, Shinobu Onoda, Wataru Kada, Osamu Hanaizumi, Tokuyuki Teraji, Junichi Isoya, Hiroshi Kawarada

    Japanese Journal of Applied Physics   56 ( 4 )   2017.4

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    We investigated the charge state stability and coherence properties of near-surface single nitrogen vacancy (NV) centers in 12C-enriched diamond for potential use in nanoscale magnetic field sensing applications. The stability of charge states in negatively charged NV centers (NV-) was evaluated using one of the pulsed optically detected magnetic resonance measurements, Rabi oscillation measurements. During the accumulation of Rabi oscillations, an unstable shallow NV- was converted to a neutral state. As a result, the contrast of Rabi oscillations degraded, depending on charge state stability. We stabilized the NV- state of very shallow NV centers (∼2.6 ± 1.1nm from the surface) created by 1.2 keV nitrogen ion implantation by diamond surface modification, UV/ozone exposure, and oxygen annealing. This improvement indicates that we can suppress the upward surface band bending and surface potential fluctuations through Fermi level pinning originating from oxygen-terminated diamond surfaces.

    DOI: 10.7567/JJAP.56.04CK08

  • Charge state stabilization of shallow nitrogen vacancy centers in diamond by oxygen surface modification Reviewed

    Hayate Yamano, Sora Kawai, Kanami Kato, Taisuke Kageura, Masafumi Inaba, Takuma Okada, Itaru Higashimata, Moriyoshi Haruyama, Takashi Tanii, Keisuke Yamada, Shinobu Onoda, Wataru Kada, Osamu Hanaizumi, Tokuyuki Teraji, Junichi Isoya, Hiroshi Kawarada

    Japanese Journal of Applied Physics   56 ( 4 )   04CK08   2017.4

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    We investigated the charge state stability and coherence properties of near-surface single nitrogen vacancy (NV) centers in 12C-enriched diamond for potential use in nanoscale magnetic field sensing applications. The stability of charge states in negatively charged NV centers (NV-) was evaluated using one of the pulsed optically detected magnetic resonance measurements, Rabi oscillation measurements. During the accumulation of Rabi oscillations, an unstable shallow NV- was converted to a neutral state. As a result, the contrast of Rabi oscillations degraded, depending on charge state stability. We stabilized the NV- state of very shallow NV centers (∼2.6 ± 1.1nm from the surface) created by 1.2 keV nitrogen ion implantation by diamond surface modification, UV/ozone exposure, and oxygen annealing. This improvement indicates that we can suppress the upward surface band bending and surface potential fluctuations through Fermi level pinning originating from oxygen-terminated diamond surfaces.

    DOI: 10.7567/JJAP.56.04CK08

  • Normally-Off C-H Diamond MOSFETs with Partial C-O Channel Achieving 2-kV Breakdown Voltage Reviewed

    Yuya Kitabayashi, Takuya Kudo, Hidetoshi Tsuboi, Tetsuya Yamada, Dechen Xu, Masanobu Shibata, Daisuke Matsumura, Yuya Hayashi, Mohd Syamsul, Masafumi Inaba, Atsushi Hiraiwa, Hiroshi Kawarada

    IEEE Electron Device Letters   38 ( 3 )   363 - 366   2017.3

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    Diamond has unique physical properties, which show great promise for applications in the next generation power devices. Hydrogen-terminated (C-H) diamond metal-oxide-semiconductor field-effect transistors (MOSFETs) often have normally-on operation in devices, because the C-H channel features a p-type inversion layer; however, normally-off devices are preferable in power MOSFETs from the viewpoint of fail safety. We fabricated hydrogen-terminated (C-H) diamond MOSFETs using a partially oxidized (partial C-O) channel. The fabricated MOSFETs showed a high breakdown voltage of over 2 kV at room temperature and normally-off characteristics with a gate threshold voltage Vth of -2.5 - 4 V.

    DOI: 10.1109/LED.2017.2661340

  • Normally-Off C-H Diamond MOSFETs With Partial C-O Channel Achieving 2-kV Breakdown Voltage Reviewed

    Yuya Kitabayashi, Takuya Kudo, Hidetoshi Tsuboi, Tetsuya Yamada, Dechen Xu, Masanobu Shibata, Daisuke Matsumura, Yuya Hayashi, Mohd Syamsul, Masafumi Inaba, Atsushi Hiraiwa, Hiroshi Kawarada

    IEEE ELECTRON DEVICE LETTERS   38 ( 3 )   363 - 366   2017.3

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    Language:English   Publishing type:Research paper (scientific journal)  

    Diamond has unique physical properties, which show great promise for applications in the next generation power devices. Hydrogen-terminated (C-H) diamond metal-oxide-semiconductor field-effect transistors (MOSFETs) often have normally-on operation in devices, because the C-H channel features a p-type inversion layer; however, normally-off devices are preferable in power MOSFETs from the viewpoint of fail safety. We fabricated hydrogen-terminated (C-H) diamond MOSFETs using a partially oxidized ( partial C-O) channel. The fabricated MOSFETs showed a high breakdown voltage of over 2 kV at room temperature and normally-off characteristics with a gate threshold voltage V-th of -2.5-- 4 V.

    DOI: 10.1109/LED.2017.2661340

  • Durability-enhanced two-dimensional hole gas of C-H diamond surface for complementary power inverter applications Reviewed

    Hiroshi Kawarada, Tetsuya Yamada, Dechen Xu, Hidetoshi Tsuboi, Yuya Kitabayashi, Daisuke Matsumura, Masanobu Shibata, Takuya Kudo, Masafumi Inaba, Atsushi Hiraiwa

    Scientific reports   7   2017.2

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    Complementary power field effect transistors (FETs) based on wide bandgap materials not only provide high-voltage switching capability with the reduction of on-resistance and switching losses, but also enable a smart inverter system by the dramatic simplification of external circuits. However, p-channel power FETs with equivalent performance to those of n-channel FETs are not obtained in any wide bandgap material other than diamond. Here we show that a breakdown voltage of more than 1600 V has been obtained in a diamond metal-oxide-semiconductor (MOS) FET with a p-channel based on a two-dimensional hole gas (2DHG). Atomic layer deposited (ALD) Al 2 O 3 induces the 2DHG ubiquitously on a hydrogen-terminated (C-H) diamond surface and also acts as both gate insulator and passivation layer. The high voltage performance is equivalent to that of state-of-the-art SiC planar n-channel FETs and AlGaN/GaN FETs. The drain current density in the on-state is also comparable to that of these two FETs with similar device size and V B.

    DOI: 10.1038/srep42368

  • Durability-enhanced two-dimensional hole gas of C-H diamond surface for complementary power inverter applications Reviewed

    Hiroshi Kawarada, Tetsuya Yamada, Dechen Xu, Hidetoshi Tsuboi, Yuya Kitabayashi, Daisuke Matsumura, Masanobu Shibata, Takuya Kudo, Masafumi Inaba, Atsushi Hiraiwa

    SCIENTIFIC REPORTS   7   42368   2017.2

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    Complementary power field effect transistors (FETs) based on wide bandgap materials not only provide high-voltage switching capability with the reduction of on-resistance and switching losses, but also enable a smart inverter system by the dramatic simplification of external circuits. However, p-channel power FETs with equivalent performance to those of n-channel FETs are not obtained in any wide bandgap material other than diamond. Here we show that a breakdown voltage of more than 1600 V has been obtained in a diamond metal-oxide-semiconductor (MOS) FET with a p-channel based on a two-dimensional hole gas (2DHG). Atomic layer deposited (ALD) Al2O3 induces the 2DHG ubiquitously on a hydrogen-terminated (C-H) diamond surface and also acts as both gate insulator and passivation layer. The high voltage performance is equivalent to that of state-of-the-art SiC planar n-channel FETs and AlGaN/GaN FETs. The drain current density in the on-state is also comparable to that of these two FETs with similar device size and V-B.

    DOI: 10.1038/srep42368

  • Polycrystalline boron-doped diamond with an oxygen-terminated surface channel as an electrolyte-solution-gate field-effect transistor for pH sensing Reviewed

    Yukihiro Shintani, Shoji Ibori, Keisuke Igarashi, Takuro Naramura, Masafumi Inaba, Hiroshi Kawarada

    ELECTROCHIMICA ACTA   212   10 - 15   2016.9

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    A polycrystalline boron-doped diamond (BDD) electrolyte solution-gate field effect transistor (SGFET) for use as a pH sensorwas developed. The polycrystalline diamond films with a boron-doped layer possessed semiconducting properties that were comparable to hydrogen-terminated non-doped diamond. The hydrogen-terminated BDD surface was successfully transferred to a partially oxygen-terminated surface by ozone exposure, and its SGFET current-voltage (I-V) characteristics were evaluated with bias voltages within the potential window of diamond. The drain-source current(Ids)-drain-source voltage(Vds) characteristics showed pinch-off and saturation. In addition, they stably operated in electrolyte solutions with pH values from 2 to 12. The transfer characteristics exhibited a pH sensitivity of approximately 30 mV/ pH, which is comparable with the pH sensitivity of the conventional oxygen-terminated nondoped SGFET and the single-crystal BDD SGFET investigated in our previous work. Furthermore, the BDD SGFET exhibited improved long-term stability, and the coefficient of variation (CV) of Ids for 10 months was up to 10%. (C) 2016 Elsevier Ltd. All rights reserved.

    DOI: 10.1016/j.electacta.2016.06.104

  • Polycrystalline boron-doped diamond with an oxygen-terminated surface channel as an electrolyte-solution-gate field-effect transistor for pH sensing Reviewed

    Yukihiro Shintani, Shoji Ibori, Keisuke Igarashi, Takuro Naramura, Masafumi Inaba, Hiroshi Kawarada

    Electrochimica Acta   212   10 - 15   2016.9

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    A polycrystalline boron-doped diamond (BDD) electrolyte solution-gate field effect transistor (SGFET) for use as a pH sensor was developed. The polycrystalline diamond films with a boron-doped layer possessed semiconducting properties that were comparable to hydrogen-terminated non-doped diamond. The hydrogen-terminated BDD surface was successfully transferred to a partially oxygen-terminated surface by ozone exposure, and its SGFET current–voltage (I–V) characteristics were evaluated with bias voltages within the potential window of diamond. The drain-source current(Ids)–drain-source voltage(Vds) characteristics showed pinch-off and saturation. In addition, they stably operated in electrolyte solutions with pH values from 2 to 12. The transfer characteristics exhibited a pH sensitivity of approximately 30 mV/pH, which is comparable with the pH sensitivity of the conventional oxygen-terminated non-doped SGFET and the single-crystal BDD SGFET investigated in our previous work. Furthermore, the BDD SGFET exhibited improved long-term stability, and the coefficient of variation (CV) of Ids for 10 months was up to 10%.

    DOI: 10.1016/j.electacta.2016.06.104

  • Diamond MOSFETs using 2D hole gas with 1700V breakdown voltage

    H. Kawarada, T. Yamada, D. Xu, Y. Kitabayashi, M. Shibata, D. Matsumura, M. Kobayashi, T. Saito, T. Kudo, Masafumi Inaba, A. Hiraiwa

    28th International Symposium on Power Semiconductor Devices and ICs, ISPSD 2016 Proceedings of the 2016 28th International Symposium on Power Semiconductor Devices and ICs, ISPSD 2016   483 - 486   2016.7

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    More than 1600V breakdown voltages have been obtained in hydrogen terminated (C-H) diamond planar p-channel MOSFETs with gate-drain distance of 16-22 μm. The drain current density exceeds 100mA/mm in the FETs. The blocking voltage and drain current characteristics are comparable to those of n-channel AlGaN/GaN FETs and planar SiC MOSFETs in a similar device size. Atomic layer deposited Al2O3 works as gate insulator and passivation layer. It also induces the 2 dimensional hole gas ubiquitously on C-H diamond surface not only in planar, but in a trench gate structure. The first diamond vertical MOSFET has also operated using the trench structure.

    DOI: 10.1109/ISPSD.2016.7520883

  • Hydrogen-terminated diamond vertical-type metal oxide semiconductor field-effect transistors with a trench gate Reviewed

    Masafumi Inaba, Tsubasa Muta, Mikinori Kobayashi, Toshiki Saito, Masanobu Shibata, Daisuke Matsumura, Takuya Kudo, Atsushi Hiraiwa, Hiroshi Kawarada

    APPLIED PHYSICS LETTERS   109 ( 3 )   033503   2016.7

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    The hydrogen-terminated diamond surface (C-H diamond) has a two-dimensional hole gas (2DHG) layer independent of the crystal orientation. A 2DHG layer is ubiquitously formed on the C-H diamond surface covered by atomic-layer-deposited-Al2O3. Using Al2O3 as a gate oxide, C-H diamond metal oxide semiconductor field-effect transistors (MOSFETs) operate in a trench gate structure where the diamond side-wall acts as a channel. MOSFETs with a side-wall channel exhibit equivalent performance to the lateral C-H diamond MOSFET without a side-wall channel. Here, a vertical-type MOSFET with a drain on the bottom is demonstrated in diamond with channel current modulation by the gate and pinch off. Published by AIP Publishing.

    DOI: 10.1063/1.4958889

  • Diamond MOSFETs using 2D hole gas with 1700V breakdown voltage Reviewed

    H. Kawarada, T. Yamada, D. Xu, Y. Kitabayashi, M. Shibata, D. Matsumura, M. Kobayashi, T. Saito, T. Kudo, M. Inaba, A. Hiraiwa

    Proceedings of the International Symposium on Power Semiconductor Devices and ICs   2016-   483 - 486   2016.7

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    More than 1600V breakdown voltages have been obtained in hydrogen terminated (C-H) diamond planar p-channel MOSFETs with gate-drain distance of 16-22 μm. The drain current density exceeds 100mA/mm in the FETs. The blocking voltage and drain current characteristics are comparable to those of n-channel AlGaN/GaN FETs and planar SiC MOSFETs in a similar device size. Atomic layer deposited Al2O3 works as gate insulator and passivation layer. It also induces the 2 dimensional hole gas ubiquitously on C-H diamond surface not only in planar, but in a trench gate structure. The first diamond vertical MOSFET has also operated using the trench structure.

    DOI: 10.1109/ISPSD.2016.7520883

  • Contact Conductivity of Uncapped Carbon Nanotubes Formed by Silicon Carbide Decomposition Reviewed

    Masafumi Inaba, Chih-Yu Lee, Kazuma Suzuki, Megumi Shibuya, Miho Myodo, Yu Hirano, Wataru Norimatsu, Michiko Kusunoki, Hiroshi Kawarada

    JOURNAL OF PHYSICAL CHEMISTRY C   120 ( 11 )   6232 - 6238   2016.3

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    Understanding of the contact conductivity of carbon nanotubes (CNTs) will contribute to the further application of CNTs for electronic devices, such as thin film transistors whose channel or electrode is made of dispersed CNTs. In this study, we estimated the contact conductivity of a CNT/CNT interface from the in-plane conductivity of an uncapped CNT forest on SiC. Investigation of the electrical properties of dense CNT forests is also important to enable their electrical application. The in-plane conductivity of a dense CNT forest on silicon carbide normalized by its thickness was measured to be SO S/cm, which is two to three orders of magnitude lower than the conductivity of a CNT yarn. It was also found that both the CNT cap region and the CNT bulk region exhibit in-plane conductivity. The contact conductivity of CNTs was estimated from the in-plane conductivity in the bulk region. Dense and uncapped CNT forest can be approximated by a conductive mesh, in which each conductive branch corresponds to the CNT/CNT contact conductance. The evaluated contact conductivity was in good agreement with that calculated from the tunneling effect.

    DOI: 10.1021/acs.jpcc.5b11815

  • Ohmic contact for silicon carbide by carbon nanotubes

    Masafumi Inaba, Kazuma Suzuki, Yu Hirano, Wataru Norimatsu, Michiko Kusunoki, Hiroshi Kawarada

    16th International Conference on Silicon Carbide and Related Materials, ICSCRM 2015 Silicon Carbide and Related Materials 2015   561 - 564   2016.1

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    The electrical contact properties of silicon carbide (SiC) and carbon nanotubes (CNTs) were measured by conductive atomic force microscopy (C-AFM). A CNT forest was synthesized by SiC surface decomposition. Trenches, which electrically separate the conduction area, were fabricated using a focused ion beam (FIB) without a cover layer, and the resistance of each island was measured by C-AFM. From the dependence of the resistance on the CNT forest island size, the contact resistance between the CNTs and the SiC substrate was measured. By varying the dopant density in the SiC substrate, the Schottky barrier height was evaluated to be ~0.5 eV. This is slightly higher than a previously reported result obtained from a similar setup with a metal covering the CNT forest. We assumed that the damaged region existed in the islands, which is due to the trench formation by the FIB. The commensurate barrier height was obtained with the length of the damaged region assumed to be ~3 μm. Here, we could estimate the resistivity of a CNT/SiC interface without a cover layer. This indicates that a CNT forest on SiC is useful as a brief contact electrode.

    DOI: 10.4028/www.scientific.net/MSF.858.561

  • Large-current-controllable carbon nanotube field-effect transistor in electrolyte solution Reviewed

    Miho Myodo, Masafumi Inaba, Kazuyoshi Ohara, Ryogo Kato, Mikinori Kobayashi, Yu Hirano, Kazuma Suzuki, Hiroshi Kawarada

    Applied Physics Letters   106 ( 21 )   2015.5

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    Large-current-controllable carbon nanotube field-effect transistors (CNT-FETs) were fabricated with mm-long CNT sheets. The sheets, synthesized by remote-plasma-enhanced CVD, contained both single- and double-walled CNTs. Titanium was deposited on the sheet as source and drain electrodes, and an electrolyte solution was used as a gate electrode (solution gate) to apply a gate voltage to the CNTs through electric double layers formed around the CNTs. The drain current came to be well modulated as electrolyte solution penetrated into the sheets, and one of the solution gate CNT-FETs was able to control a large current of over 2.5 A. In addition, we determined the transconductance parameter per tube and compared it with values for other CNT-FETs. The potential of CNT sheets for applications requiring the control of large current is exhibited in this study.

    DOI: 10.1063/1.4921454

  • Large-current-controllable carbon nanotube field-effect transistor in electrolyte solution Reviewed

    Miho Myodo, Masafumi Inaba, Kazuyoshi Ohara, Ryogo Kato, Mikinori Kobayashi, Yu Hirano, Kazuma Suzuki, Hiroshi Kawarada

    APPLIED PHYSICS LETTERS   106 ( 21 )   213503 - 213503   2015.5

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    Large-current-controllable carbon nanotube field-effect transistors (CNT-FETs) were fabricated with mm-long CNT sheets. The sheets, synthesized by remote-plasma-enhanced CVD, contained both single-and double-walled CNTs. Titanium was deposited on the sheet as source and drain electrodes, and an electrolyte solution was used as a gate electrode (solution gate) to apply a gate voltage to the CNTs through electric double layers formed around the CNTs. The drain current came to be well modulated as electrolyte solution penetrated into the sheets, and one of the solution gate CNT-FETs was able to control a large current of over 2.5 A. In addition, we determined the transconductance parameter per tube and compared it with values for other CNT-FETs. The potential of CNT sheets for applications requiring the control of large current is exhibited in this study. (C) 2015 AIP Publishing LLC.

    DOI: 10.1063/1.4921454

  • Very low Schottky barrier height at carbon nanotube and silicon carbide interface Reviewed

    Masafumi Inaba, Kazuma Suzuki, Megumi Shibuya, Chih-Yu Lee, Yoshiho Masuda, Naoya Tomatsu, Wataru Norimatsu, Atsushi Hiraiwa, Michiko Kusunoki, Hiroshi Kawarada

    APPLIED PHYSICS LETTERS   106 ( 12 )   123501 - 123501   2015.3

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    Electrical contacts to silicon carbide with low contact resistivity and high current durability are crucial for future SiC power devices, especially miniaturized vertical-type devices. A carbon nanotube (CNT) forest formed by silicon carbide (SiC) decomposition is a densely packed forest, and is ideal for use as a heat-dissipative ohmic contact in SiC power transistors. The contact resistivity and Schottky barrier height in a Ti/CNT/SiC system with various SiC dopant concentrations were evaluated in this study. Contact resistivity was evaluated in relation to contact area. The Schottky barrier height was calculated from the contact resistivity. As a result, the Ti/CNT/SiC contact resistivity at a dopant concentration of 3 x 10(18) cm(-3) was estimated to be similar to 1.3 x 10(-4) Omega cm(2) and the Schottky barrier height of the CNT/SiC contact was in the range of 0.40-0.45 eV. The resistivity is relatively low for SiC contacts, showing that CNTs have the potential to be a good ohmic contact material for SiC power electronic devices. (C) 2015 AIP Publishing LLC.

    DOI: 10.1063/1.4916248

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Books

  • Microtubules : methods and protocols

    Inaba Hiroshi

    Humana Press  2022    ISBN:9781071619827

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    Language:English  

    CiNii Books

  • Carbon Nanotube Forests on SiC: Structural and Electrical Properties

    Masafumi Inaba, Wataru Norimatsu, Michiko Kusunoki, Hiroshi Kawarada(Role:Joint author)

    Springer, Singapore  2019.9 

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    Responsible for pages:Novel Structured Metallic and Inorganic Materials pp605-620   Language:English   Book type:Scholarly book

    DOI: https://doi.org/10.1007/978-981-13-7611-5_40

Presentations

  • 新規熱伝導性フィラーの開発と電界整列による放熱シートの機能付加 Invited

    稲葉優文

    九州大学 新技術説明会  2023.10 

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    Event date: 2023.10

    Language:Japanese   Presentation type:Public lecture, seminar, tutorial, course, or other speech  

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  • 新規熱伝導性フィラーの開発と電界整列による放熱シートの機能付加 Invited

    稲葉優文

    九州大学 新技術説明会  2023.10 

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    Event date: 2023.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:JST東京本部別館1Fホール(東京・市ケ谷)   Country:Japan  

  • 電界整列による放熱シート材の高性能化の可能性 Invited

    稲葉 優文

    セミナー「高熱伝導樹脂の設計とフィラー配向、複合化技術」  2024.6 

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    Event date: 2024.6

    Language:Japanese   Presentation type:Public lecture, seminar, tutorial, course, or other speech  

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  • 新規熱伝導性フィラーの開発と電界整列による放熱シートの機能付加 Invited

    稲葉 優文

    2024.5 

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    Event date: 2024.5

    Language:Japanese   Presentation type:Public lecture, seminar, tutorial, course, or other speech  

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  • 電界整列ダイヤモンド鎖の密度を意図的に変化させた熱分布伝熱シートの作製

    市来 宗一郎, 清家 清弥, 稲葉 優文, 中野 道彦, 末廣 純也

    2024年第71回応用物理学会春季学術講演会  2024.3 

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    Event date: 2024.3 - 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京都市大学世田谷キャンパス, 東京都世田谷区   Country:Japan  

  • 乳がん細胞と大腸がん細胞由来エクソソームの誘電泳動特性の違い

    中林 龍・高山理衣・稲葉優文・中野道彦・末廣純也

    令和6年電気学会全国大会  2024.3 

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    Event date: 2024.3 - 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:徳島大学常三島キャンパス, 徳島県徳島市   Country:Japan  

  • 電界整列による放熱シートの高熱伝導率化 Invited

    稲葉優文

    セミナー「放熱シートの設計と熱伝導性の向上」(主催:技術情報協会)  2024.3 

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    Event date: 2024.3

    Language:Japanese   Presentation type:Public lecture, seminar, tutorial, course, or other speech  

    Venue:オンライン   Country:Japan  

  • 電界整列による放熱シートの高熱伝導率化 Invited

    稲葉 優文

    セミナー「放熱シートの設計と熱伝導性の向上」  2024.3 

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    Event date: 2024.3

    Language:Japanese   Presentation type:Public lecture, seminar, tutorial, course, or other speech  

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  • 電界整列による放熱シートの機能付加と新規熱伝導性フィラーの開発 Invited

    稲葉優文

    セミナー「パワーモジュールに向けた高放熱材料の開発動向・評価と要求特性」(主催:AndTech)  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Public lecture, seminar, tutorial, course, or other speech  

    Venue:オンライン   Country:Japan  

  • 電界整列による放熱シートの機能付加と新規熱伝導性フィラーの開発 Invited

    稲葉 優文

    セミナー「パワーモジュールに向けた高放熱材料の開発動向・評価と要求特性」  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Public lecture, seminar, tutorial, course, or other speech  

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  • Quantitative evaluation of dielectrophoretic separation efficiency of cancer exosomes based on fluorescence imaging International conference

    Ryu Nakabayashi, Rie Koyama, Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    MNC 2023  2023.11 

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    Event date: 2023.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Keio Plaza Hotel, Sapporo, Hokkaido   Country:Japan  

  • 電界整列多結晶ダイヤモンドフレークの伝熱シートフィラーへの応用

    清家清弥, 市来宗一郎, 大曲新矢, 稲葉優文, 中野道彦, 末廣純也

    第37回ダイヤモンドシンポジウム  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学湘南キャンパス, 神奈川県平塚市   Country:Japan  

  • ナノダイヤモンド粒子の誘電泳動集積の蛍光観察

    浅野尚紀, 稲葉優文, 中野道彦, 末廣純也

    第37回ダイヤモンドシンポジウム  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学湘南キャンパス, 神奈川県平塚市   Country:Japan  

  • 電界整列ダイヤモンド粒子をフィラーに用いた意図的熱伝導率分布を有する伝熱シートの作製

    市来宗一郎, 清家清弥, 稲葉優文, 中野道彦, 末廣純也

    第37回ダイヤモンドシンポジウム  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学湘南キャンパス, 神奈川県平塚市   Country:Japan  

  • ダイヤモンドフィラーを電界整列した伝熱シートに対する重力の影響

    稲葉優文, 清家清弥, 市来宗一郎, 中野道彦, 末廣純也

    第37回ダイヤモンドシンポジウム  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学湘南キャンパス, 神奈川県平塚市   Country:Japan  

  • エクソソームの誘電泳動特性に与える影響の評価

    高山 理衣, 中林 龍, 稲葉 優文, 中野 道彦, 末廣 純也

    第40回「センサ・マイクロマシンと応用システム」シンポジウム  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール, 熊本県熊本市   Country:Japan  

  • DNA 結合微粒子の誘電泳動特性変化に基づく DNA 分解酵素検出法の検討

    旭 航希, 稲葉 優文, 中野 道彦, 末廣 純也

    第40回「センサ・マイクロマシンと応用システム」シンポジウム  2023.11 

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    Event date: 2023.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール, 熊本県熊本市   Country:Japan  

  • Device and composite applications of electrical manipulation of particles: dielectrophoresis and electrical alignment Invited International conference

    Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    Design & Engineering by Joint Inverse Innovation for Materials Architecture (DEJI2MA-3)  2023.10 

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    Event date: 2023.10

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Waseda University, Shinjuky-ku, Toky   Country:Japan  

  • ダイヤモンドフィラーの沈降を抑制した伝熱シートの熱伝導特性

    稲葉優文, 清家清弥, 中野道彦, 末廣純也

    2023年第84回応用物理学会秋季学術講演会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:熊本城ホール, 熊本県熊本市   Country:Japan  

  • Fabrication of polycrystalline diamond flakes and their electric field alignment behavior International conference

    Seiya Seike, Shinya Ohmagari, Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    33rd International Conference on Diamond and Carbon Materials  2023.9 

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    Event date: 2023.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Palau de Congressos de Palma, Mallorca   Country:Spain  

  • Fast gas response for NO2 at carbon nanotubes/electrode contact of ambipolar field-effect transistors International conference

    Masafumi Inaba, Kaito Yagi, Haruka Omachi, Michihiko Nakano, Junya Suehiro

    33rd International Conference on Diamond and Carbon Materials  2023.9 

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    Event date: 2023.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Palau de Congressos de Palma, Mallorca   Country:Spain  

  • NO2 gas response properties of ambipolar CNT-FETs with various conditions of CNT-CNT junctions International conference

    Kaito Yagi, Naoki Asano, Haruka Omachi, Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    33rd International Conference on Diamond and Carbon Materials  2023.9 

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    Event date: 2023.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Palau de Congressos de Palma, Mallorca   Country:Spain  

  • Electrical alignment of diamond filler particles in polydimethylsiloxane-based heat-conduction sheets with canceling the effect of gravitational force International conference

    Masafumi Inaba, Seiya Seike, Michihiko Nakano, Junya Suehiro

    33rd International Conference on Diamond and Carbon Materials  2023.9 

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    Event date: 2023.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Palau de Congressos de Palma, Mallorca   Country:Spain  

  • CNTの集積量によるCNT-FETのNO2ガス応答変化のメカニズムに関する理論的検討

    八木凱斗, 大町遼, 稲葉優文, 中野道彦, 末廣純也

    2023年度(第76回) 電気・情報関係学会九州支部連合大会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue: 崇城大学, 熊本県熊本市   Country:Japan  

  • 蛍光顕微鏡を用いた蛍光ナノダイヤモンド粒子の誘電泳動集積の観察

    浅野尚紀, 稲葉優文, 中野道彦, 末廣純也

    2023年度(第76回) 電気・情報関係学会九州支部連合大会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue: 崇城大学, 熊本県熊本市   Country:Japan  

  • 多結晶ダイヤモンドフレークのサイズ制御法の検討

    清家清弥, 市来宗一郎, 大曲新矢, 稲葉優文, 中野道彦, 末廣純也

    2023年度(第76回) 電気・情報関係学会九州支部連合大会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue: 崇城大学, 熊本県熊本市   Country:Japan  

  • フィラーを電界整列した伝熱シートの熱伝導率のフィラー濃度依存性

    市来宗一郎, 清家清弥, 稲葉優文, 中野道彦, 末廣純也

    2023年度(第76回) 電気・情報関係学会九州支部連合大会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue: 崇城大学, 熊本県熊本市   Country:Japan  

  • エクソソームの誘電泳動特性に与える蛍光染色の影響

    髙山理衣, 中林龍, 稲葉優文, 中野道彦, 末廣純也

    2023年度(第76回) 電気・情報関係学会九州支部連合大会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue: 崇城大学, 熊本県熊本市   Country:Japan  

  • 誘電泳動を利用したヒト乳がん細胞由来エクソソームの分離の実証

    中林龍, 髙山理衣, 稲葉優文, 中野道彦, 末廣純也

    2023年度(第76回) 電気・情報関係学会九州支部連合大会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue: 崇城大学, 熊本県熊本市   Country:Japan  

  • 微粒子誘電泳動を用いたDNA分解酵素の検出における反応時間の影響

    旭航希, 稲葉優文, 中野道彦, 末廣純也

    2023年度(第76回) 電気・情報関係学会九州支部連合大会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue: 崇城大学, 熊本県熊本市   Country:Japan  

  • Effects of decollation density on NO2 gas-response in CNT/SnO2 hybrid gas sensors fabricated by dielectrophoretic assembly

    Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    第 65 回 フラーレン・ナノチューブ・グラフェン総合シンポジウム  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:西新プラザ, 福岡県福岡市   Country:Japan  

  • Separation of normal and cancer cell-derived exosomes based on their dielectrophoretic properties International conference

    Ryu Nakabayashi, Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    Biosensors 2023  2023.6 

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    Event date: 2023.6

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Busan   Country:Korea, Republic of  

  • 多結晶ダイヤモンドフレークの作製と電界整列

    清家 清弥, 陳 映晨, 大曲 新矢, 稲葉 優文, 中野 道彦, 末廣 純也

    第 70 回応用物理学会春季学術講演会  2023.3 

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:上智大学四谷キャンパス, 東京都千代田区   Country:Japan  

  • ヒト 由来エクソソームの誘電泳動特性の評価

    中林 龍, 髙山 理衣, 稲葉 優文, 中野 道彦, 末廣純也

    令和 5 年 電気学会全国大会  2023.3 

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学東山キャンパス, 愛知県名古屋市   Country:Japan  

  • Nitrogen dioxide gas response rate at contact and channel in ambipolar carbon nanotube field-effect transistors,

    Masafumi Inaba, Shota Nakahara, Haruka Omachi, Michihiko Nakano, Junya Suehiro

    第 64 回 フラーレン・ナノチューブ・グラフェン総合シンポジウム  2023.3 

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学東山キャンパス, 愛知県名古屋市   Country:Japan  

  • Effects of amount and metal/semiconducting ratio of CNT on ambipolar CNT-FET gas sensor response to NO2

    Kaito Yagi, Shota Nakahara, Naoki Asano, Haruka Omachi, Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    第 64 回 フラーレン・ナノチューブ・グラフェン総合シンポジウム  2023.3 

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学東山キャンパス, 愛知県名古屋市   Country:Japan  

  • 誘電泳動を利用したヒト乳がん細胞由来エクソソームの分離

    中林 龍, 髙山 理衣, 稲葉 優文, 中野 道彦, 末廣 純也

    2023 年度(第 24 回)静電気学会春季講演会  2023.3 

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学大岡山キャンパス, 東京都目黒区   Country:Japan  

  • Novel Biological Indicator using DNA-labeled Microparticles for Non-thermal Plasma Sterilization International conference

    M. Nakano, T. Okumura, M. Inaba, P. Atrri, K. Koga, M. Shiratani, J. Suehiro

    第 32 回 日本MRS 年次大会  2022.12 

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    Event date: 2022.12

    Language:English   Presentation type:Oral presentation (general)  

    Venue:産業貿易センター,神奈川県横浜市   Country:Japan  

  • 多結晶ダイヤモンドフレークの作製と電界整列挙動

    清家清弥, 陳映晨, 大曲新矢, 稲葉優文, 中野道彦, 末廣純也

    第36回ダイヤモンドシンポジウム  2022.11 

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    Event date: 2022.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:慶應義塾大学矢上キャンパス, 神奈川県横浜市   Country:Japan  

  • 誘電泳動集積を用いて作製した両極性CNT-FETガスセンサの電子伝導領域におけるNO2高速応答

    中原正太, 八木凱斗, 大町遼, 稲葉優文, 中野道彦, 末廣純也

    第36回ダイヤモンドシンポジウム  2022.11 

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    Event date: 2022.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:慶應義塾大学矢上キャンパス, 神奈川県横浜市   Country:Japan  

  • 微粒子誘電泳動 DNA 検出法を用いたDNA 分解酵素の定量検出の検討

    重本 真, 稲葉 優文, 中野 道彦, 末廣 純也

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11 

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    Event date: 2022.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:アスティとくしま, 徳島県徳島市   Country:Japan  

  • Mechanism of NO2 detection of ambipolar carbon nanotube field-effect transistors fabricated by dielectrophoretic assembly

    S. Nakahara, K. Yagi, H. Omachi, M. Inaba, M. Nakano, and J. Suehiro

    第 41 回電子材料シンポジウム  2022.10 

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    Event date: 2022.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:THE KASHIHARA, 奈良県橿原市   Country:Japan  

  • CNTの半導体・金属比率とCNT-FETのNO2ガス応答の関係

    八木凱斗, 中原正太, 大町遼, 稲葉優文, 中野道彦, 末廣純也

    2022年第83回応用物理学会秋季学術講演会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東北大学川内北キャンパス, 宮城県仙台市   Country:Japan  

  • 植物病原菌のmultiplex PCR検出における目視判定手法の検討

    中野 道彦, 稲葉 優文, 末廣 純也

    2022年第83回応用物理学会秋季学術講演会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東北大学川内北キャンパス, 宮城県仙台市   Country:Japan  

  • CNT-FET型ガスセンサ応答のゲート電圧スイープ方向依存性

    中原正太, 八木凱斗, 大町遼, 稲葉優文, 中野道彦, 末廣純也

    2022年第83回応用物理学会秋季学術講演会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東北大学川内北キャンパス, 宮城県仙台市   Country:Japan  

  • CNT-FETのNO2応答にCNTの半導体・金属比率が与える影響

    八木凱斗, 中原正太, 大町遼, 稲葉優文, 中野道彦, 末廣純也

    2022年度(第75回) 電気・情報関係学会九州支部連合大会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • シリコーンおよびアクリル樹脂によるダイヤモンドフィラーの電界整列挙動への影響の検討

    陳 映晨, 清家清弥・稲葉優文, 中野道彦, 末廣純也

    2022年度(第75回) 電気・情報関係学会九州支部連合大会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • ダイヤモンドフィラーのアクリル溶媒とシリコーン溶媒における誘電泳動特性

    清家清弥, 陳 映晨, 稲葉優文, 中野道彦, 末廣純也

    2022年度(第75回) 電気・情報関係学会九州支部連合大会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 微粒子誘電泳動を用いたDNA分解酵素の検出における結合DNA長の影響

    重本 真, 稲葉優文, 中野道彦, 末廣純也

    2022年度(第75回) 電気・情報関係学会九州支部連合大会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • ヒト乳がん由来エクソソームの誘電泳動分離の検討

    中林 龍, 稲葉優文, 中野道彦, 末廣純也

    2022年度(第75回) 電気・情報関係学会九州支部連合大会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • オンサイトGIS設備診断を目指した小型高周波沿面放電装置を用いたCF4間接検出法

    浦郷幹太, 稲葉優文, 中野道彦, 末廣純也, 里 秀文, 宇都宮清司

    2022年度(第75回) 電気・情報関係学会九州支部連合大会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 誘電泳動集積法を用いて作製したCNT-FETガスセンサの正孔や電子伝導とNO2応答速度の関係

    中原正太, 八木凱斗, 大町遼, 稲葉優文, 中野道彦, 末廣純也

    2022年度(第75回) 電気・情報関係学会九州支部連合大会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • GIS設備診断のための高周波沿面放電を利用したSF6中CF4のCOへの変換とガスセンサによる検出

    浦郷幹太, 稲葉優文, 中野道彦, 末廣純也, 里 秀文, 宇都宮清司

    令和4年 電気学会 電力・エネルギー部門大会  2022.9 

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福井大学文京キャンパス, 福井県福井市   Country:Japan  

  • A proposal to measure diamond particle conductance using dielectrophoresis International conference

    Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    15th International Conference on New Diamond and Nano Carbons (NDNC) 2022  2022.6 

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    Event date: 2022.6

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Kanazawa Bunka Hall, Kanazawa   Country:Japan  

  • Effect of Medium's Viscosity on Suppressing Sedimentation of Diamond Fillers in acrylic solvent during Electric Field Alignment International conference

    Yingchen Chen, Mikoto Kamimura, Seiya Seike, Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    15th International Conference on New Diamond and Nano Carbons (NDNC) 2022  2022.6 

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    Event date: 2022.6

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Kanazawa Bunka Hall, Kanazawa   Country:Japan  

  • Effects of NO2 Gas Adsorption to CNT/Electrode Contacts on Gas Response of CNT-FETs International conference

    Shota Nakahara, Takahiro Morita, Takuya Okamoto, Haruka Omachi, Masafumi Inaba, Michihiko Nakano, Junya Suehiro

    15th International Conference on New Diamond and Nano Carbons (NDNC) 2022  2022.6 

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    Event date: 2022.6

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Kanazawa Bunka Hall, Kanazawa   Country:Japan  

  • CNT/電極コンタクトへのNO2ガス吸着がCNT-FET型ガスセンサ応答に与える影響

    中原 正太, 森田 貴大, 岡本 拓也, 大町 遼, 稲葉 優文, 中野 道彦, 末廣 純也

    第69回 応用物理学会 春季学術講演会  2022.3 

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    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 等温DNA増幅法と微粒子誘電泳動を組み合わせた核酸増幅検査用試作デバイスの性能評価

    黄 怡, 吉田 諒, 田中 凌仁, 稲葉 優文, 中野 道彦, 末廣 純也

    令和4年電気学会全国大会  2022.3 

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    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 電界整列ダイヤモンドフィラー伝熱シート作製におけるフィラー沈降の抑制方法の検討

    陳 映晨, 神村 尊, 清家 清弥, 稲葉 優文, 中野 道彦, 末廣 純也

    令和4年電気学会全国大会  2022.3 

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    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 微粒子誘電泳動DNA検出法を用いたDNA分解酵素検出の検討

    重本 真, 柴垣 有希, 稲葉 優文, 中野 道彦, 末廣 純也

    令和4年電気学会全国大会  2022.3 

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    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 高周波沿面放電プラズマによるSF6中CF4のCOとCO2への変換と検出

    劉 栩林, 浦郷 幹太, 稲葉 優文, 中野 道彦, 末廣 純也, 里 秀文, 宇都宮 清司

    誘電・絶縁材料/放電・プラズマ・パルスパワー/高電圧 合同研究会  2022.1 

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    Event date: 2022.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 電界整列ダイヤモンドフィラー伝熱シート作製におけるフィラー沈降の抑制と熱伝導率向上の検討

    陳 映晨, 神村 尊, 清家 清弥, 稲葉 優文, 中野 道彦, 末廣 純也

    誘電・絶縁材料/放電・プラズマ・パルスパワー/高電圧 合同研究会  2022.1 

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    Event date: 2022.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 誘電泳動集積法により作製したカーボンナノチューブ/SnO2ハイブリッドガスセンサのNO2応答

    稲葉優文,中野道彦,末廣純也

    第35回ダイヤモンドシンポジウム  2021.11 

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    Event date: 2021.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 等温DNA増幅法と微粒子誘電泳動による検出を組み合わせた小型デバイスの検討

    吉田 諒, 末廣 純也, 中野 道彦, 稲葉 雅文, 重本 真, 陳晧, 黄 怡

    第38回 「センサ・マイクロマシンと応用システム」シンポジウム  2021.11 

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    Event date: 2021.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 電界整列伝熱コンポジットシート作製におけるフィラー粒子沈降による熱伝導率への影響抑制の検討

    神村 尊, 陳 映晨, 清家 清弥, 稲葉 優文, 中野 道彦, 末廣 純也

    電気・情報関係学会九州支部第74回連合大会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 微粒子誘電泳動を用いたDNA分解酵素の検出

    重本 真, 柴垣 有希, 稲葉 優文, 中野 道彦, 末廣 純也

    電気・情報関係学会九州支部第74回連合大会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • エクソソームの誘電泳動特性関する基礎検討

    陳 皓, 山川 翼, 稲葉 優文, 中野 道彦, 末廣 純也

    電気・情報関係学会九州支部第74回連合大会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • DNA増幅と微粒子誘電泳動を用いたDNA検出を行うデバイスの検討:等温DNA増幅法の組み込み

    吉田 諒, 陳 晧, 重本 真, 黄 怡, 稲葉 優文, 中野 道彦, 末廣 純也

    電気・情報関係学会九州支部第74回連合大会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 等温DNA増幅法と微粒子誘電泳動を組み合わせた新型コロナウイルス遺伝子の検出

    黄 怡, 吉田 諒, 田中 凌仁, 稲葉 優文, 中野 道彦, 末廣 純也

    電気・情報関係学会九州支部第74回連合大会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 誘電泳動集積による両極性カーボンナノチューブ電界効果トランジスタの電子伝導領域におけるNO2応答

    中原 正太, 森田 貴大, 岡本 拓也, 大町 遼, 稲葉 優文, 中野 道彦, 末廣 純也

    電気・情報関係学会九州支部第74回連合大会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • カーボンナノチューブ電界効果トランジスタ型NO2ガスセンサにおける電極-カーボンナノチューブコンタクトの影響

    森田 貴大, 中原正太, 岡本 拓也, 大町 遼, 稲葉 優文, 中野 道彦, 末廣 純也

    電気・情報関係学会九州支部第74回連合大会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 高周波沿面放電によるSF6中CF4のCOへの変換と検出

    劉 栩林, Nisarut Phansiri, 稲葉 優文, 中野 道彦, 末廣 純也, 里 秀文

    電気・情報関係学会九州支部第74回連合大会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 電界整列ナノコンポジット伝熱シートにおけるアクリル母材の粘度の熱伝導率への影響

    陳 映晨, 神村 尊, 清家 清弥, 稲葉 優文, 中野 道彦, 末廣 純也

    電気・情報関係学会九州支部第74回連合大会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 誘電泳動集積法を用いて作製した両極性CNTFETの電子伝導領域におけるNO2応答

    中原 正太, 森田 貴大, 岡本 拓也, 大町 遼, 稲葉 優文, 中野 道彦, 末廣 純也

    2021年第82回応用物理学会秋季学術講演会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 電界整列伝熱シート作製におけるフィラー粒子沈降が熱伝導率へ与える影響抑制の検討

    神村 尊, 陳 映晨, 稲葉 優文, 中野 道彦, 末廣 純也

    令和3年 電気学会基礎・材料・共通部門大会  2021.9 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • Diamond particle alignment by AC electric field application for thermal conductivity enhancement of heat conduction sheets International conference

    Masafumi Inaba, Shohei Hayashi, Henan Li, Mikoto Kamimura, Jun Hirotani, Michihiko Nakano, Junya Suehiro

    2021 14th International Conference on New Diamond and Nano Carbons (NDNC)  2021.6 

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    Event date: 2021.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  • 誘電泳動法を用いて作製した両極性カーボンナノチューブ電界効果トランジスタのNO2ガス応答

    森田 貴大, 中原 正太, 大町 遼, 稲葉 優文, 中野 道彦, 末廣 純也

    第68回 応用物理学会春季学術講演会  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 電界整列法によるダイヤモンドフィラー伝熱シートに関する熱伝導率向上の検討

    神村 尊, 李 赫男, 稲葉 優文, 中野 道彦, 末廣 純也

    令和3年電気学会全国大会  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 誘電泳動集積法を用いたFET型両極性カーボンナノチューブガスセンサのNO2に対する応答

    中原 正太, 森田 貴大, 大町 遼, 稲葉 優文, 中野 道彦, 末廣 純也

    令和3年電気学会全国大会  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • リポソームの誘電泳動特性に関する基礎検討

    陳 皓, 吉田 諒, 山川 翼, 稲葉 優文, 中野 道彦, 末廣 純也

    令和3年電気学会全国大会  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 粒子誘電泳動 DNA 検出法の自動化とその効果

    吉田 諒, 陳 晧, 重本 真, 稲葉 優文, 中野 道彦, 末廣 純也

    令和3年電気学会全国大会  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • フィラーに微粒子ダイヤモンドを用いた高熱伝導・高絶縁・フレキシブルな伝熱シートの開発

    稲葉 優文

    パワーアカデミー研究助成 2021年成果報告会  2021.3 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • GIS設備診断のための誘電体バリア放電によるCF4からCOへの変換

    Nisarut Phansiri, 三輪 航平, 稲葉 優文, 中野 道彦, 里 秀文, 末廣 純也

    誘電体・絶縁材料/放電・プラズマ・パルスパワー/高電圧 合同研究会  2021.1 

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    Event date: 2021.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 電界整列法によるダイヤモンドフィラー伝熱シートに関する母材と熱伝導率向上の検討

    神村 尊, 李 赫男, 稲葉 優文, 中野 道彦, 末廣 純也

    誘電体・絶縁材料/放電・プラズマ・パルスパワー/高電圧 合同研究会  2021.1 

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    Event date: 2021.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • ダイヤモンド微粒子を電界整列させた伝熱シートの熱伝導率評価

    稲葉 優文, 李 赫男, 神村 尊, 中野 道彦, 末廣 純也

    第34回ダイヤモンドシンポジウム  2021.1 

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    Event date: 2021.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • SnO2/カーボンナノチューブ同時集積NO2ガスセンサ特性の混合比依存性

    小田 剛士, 稲葉 優文, 中野 道彦, 末廣 純也

    第37回センサ・マイクロマシンと応用システムシンポジウム  2020.10 

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    Event date: 2020.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • A New Scheme for Residual CF4 Detection in Gas-Insulated Switchgear Using Plasma-induced CF4 Decomposition into CO2 International conference

    Nisarut Phansiri, Daichi Maenosono, Masafumi Inaba, Michihiko Nakano, Junya Suehiro, Hidefumi Sato

    2020 8th International Conference on Condition Monitoring and Diagnosis (CMD)  2020.10 

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    Event date: 2020.10

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  • 微粒子誘電泳動DNA検出法による新型コロナウイルス遺伝子の検出

    中野 道彦, 稲葉 優文, 末廣 純也

    第37回センサ・マイクロマシンと応用システムシンポジウム  2020.10 

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    Event date: 2020.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • フロー式1step誘電泳動集積法を用いたSnO2/カーボンナノチューブガスセンサのNO2検出特性

    小田 剛士, 稲葉 優文, 中野 道彦, 末廣 純也

    第73回電気・情報関係学会九州支部連合大会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • CF4 conversion into CO2 by dielectric barrier discharge for indirect CF4 detection in gas-insulated switchgear

    Nisarut Phansiri, 劉 栩林, 稲葉 優⽂, 中野 道彦, 末廣 純也, ⾥ 秀⽂

    第73回電気・情報関係学会九州支部連合大会  2020.9 

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    Event date: 2020.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • DNA増幅と微粒子誘電泳動を用いたワンチップDNA検出デバイス

    吉田 諒, 陳 晧, 末廣 純也, 中野 道彦, 稲葉 優文

    第73回電気・情報関係学会九州支部連合大会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • リポソームの誘電泳動特性の数値計算解析

    陳 皓, 吉田 諒, 稲葉 優文, 中野 道彦, 末廣 純也

    第73回電気, 情報関係学会九州支部連合大会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 誘電体バリア放電によるSF6中CF4のCOへの変換と検出

    劉 栩林, Nisarut Phansiri, 稲葉 優文, 中野 道彦, 末廣 純也, 里 秀文

    第73回電気・情報関係学会九州支部連合大会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 電界整列法で作製したダイヤモンドフィラー複合伝熱シートの熱伝導特性シミュレーション

    神村 尊, 李 赫男, 稲葉 優文, 中野 道彦, 末廣 純也

    第73回電気・情報関係学会九州支部連合大会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • アクリル樹脂シートに混合したダイヤモンド微粒子の電界整列と熱伝導特性への影響

    李 赫男, 神村 尊, 稲葉 優文, 中野 道彦, 末廣 純也

    第73回電気・情報関係学会九州支部連合大会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • CNT-FETガスセンサを用いたNO2検出における電流ヒステリシス特性と感度向上への応用

    森田 貴大, 稲葉 優文, 末廣 純也, 中野 道彦

    第73回電気・情報関係学会九州支部連合大会  2020.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  • 電界整列を⽤いたダイヤモンド微粒⼦複合伝熱シートの熱伝導特性の向上

    李 赫男, 林 将平, 稲葉 優文, 中野 道彦, 末廣 純也

    令和2年電気学会全国大会  2020.3 

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京電機大学北千住キャンパス   Country:Japan  

  • 誘電泳動集積を用いて作製したCNT/SnO2センサの集積時間によるNO2検出特性の変化

    小田 剛士, 河野 雅紀, 稲葉 優文, 中野 道彦, 末廣 純也

    令和2年電気学会全国大会  2020.3 

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京電機大学北千住キャンパス   Country:Japan  

  • Detection of Residual CF4 in Gas-insulated Switchgear Using a SnO2 Gas Sensor with Application of Partial Discharge

    Nisarut Phansiri, Daichi Maenosono, Masafumi Inaba, Junya Suehiro, Hidefumi Sato

    令和2年電気学会全国大会  2020.3 

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    Event date: 2020.3

    Language:English   Presentation type:Oral presentation (general)  

    Venue:東京電機大学北千住キャンパス   Country:Japan  

  • ダイヤモンド微粒子フィラーの電界整列が複合材料の熱伝導特性に及ぼす影響

    李 赫男, 林 将平, 稲葉 優文, 中野 道彦, 末廣 純也

    誘電体・絶縁材料/放電・プラズマ・パルスパワー/高電圧 合同研究会  2020.1 

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    Event date: 2020.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:三菱電機健康保険組合 湯布郷館, 大分県由布市湯布院町   Country:Japan  

  • Decomposition Products of CF4/SF6 Gas Mixture Generated by Partial Discharge Using a SnO2 Gas Sensor Fabricated by Dielectrophoresis

    Nisarut Phansiri, 前之園 大地, 稲葉 優文, 中野 道彦, 里 秀文, 末廣 純也

    誘電体・絶縁材料/放電・プラズマ・パルスパワー/高電圧 合同研究会  2020.1 

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    Event date: 2020.1

    Language:English   Presentation type:Oral presentation (general)  

    Venue:三菱電機健康保険組合 湯布郷館, 大分県由布市湯布院町   Country:Japan  

  • 誘電泳動集積法により作製したCNT-FETガスセンサのNO2曝露ガス応答におけるオンオフ比向上の効果

    尾崎 圭祐, 行部 晃生, 稲葉 優文, 中野 道彦, 末廣 純也

    第36回「センサ・マイクロマシンと応用システム」シンポジウム  2019.11 

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    Event date: 2019.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:アクトシティ浜松 (静岡県浜松市)   Country:Japan  

  • ダイヤモンド微粒子の誘電泳動による電気的特性調査

    林 将平, 李 赫男, 稲葉 優文, 中野 道彦, 末廣 純也

    第33回ダイヤモンドシンポジウム  2019.11 

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    Event date: 2019.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学(東京都目黒区)   Country:Japan  

  • ダイヤモンド微粒子の誘電泳動による物性調査

    林 将平, 李 赫男, 稲葉 優文, 中野 道彦, 末廣 純也

    第72回電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州工業大学 戸畑キャンパス, 福岡県北九州市   Country:Japan  

  • Reproducibility of CF4 detection characteristics of SnO2 gas sensor fabricated by dielectrophoresis

    Nisarut Phansiri, 前之園 大地, 稲葉 優文, 中野 道彦, 里 秀文, 末廣 純也

    第72回電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:九州工業大学 戸畑キャンパス, 福岡県北九州市   Country:Japan  

  • ガス圧力がSnO2ガスセンサのCF4応答に及ぼす影響

    前之園 大地, Nisarut Phansiri, 稲葉 優文, 中野 道彦, 里 秀文, 末廣 純也

    第72回電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州工業大学 戸畑キャンパス, 福岡県北九州市   Country:Japan  

  • 誘電泳動集積法により作製したCNT-FETガスセンサを用いたNO2検出における電流ヒステリシスの影響

    行部 晃生, 尾崎 圭祐, 稲葉 優文, 中野道彦, 末廣純也

    第72回電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州工業大学 戸畑キャンパス, 福岡県北九州市   Country:Japan  

  • 誘電泳動集積法により作製したCNT-FETガスセンサのオン電流向上による高感度NO2検出

    尾崎 圭祐, 行部 晃生, 稲葉 優文, 中野 道彦, 末廣 純也

    第72回電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州工業大学 戸畑キャンパス, 福岡県北九州市   Country:Japan  

  • 空気由来酸素がSnO2ナノ粒子修飾カーボンナノチューブガスセンサのNO2応答に及ぼす影響

    河野 雅紀, 小田 剛士, 稲葉 優文, 中野 道彦, 末廣 純也

    第72回電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州工業大学 戸畑キャンパス, 福岡県北九州市   Country:Japan  

  • NO2検出におけるSnO2ナノ粒子修飾カーボンナノチューブガスセンサのSnO2修飾量の影響

    小田 剛士, 河野 雅紀, 稲葉 優文, 中野 道彦, 末廣 純也

    第72回電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州工業大学 戸畑キャンパス, 福岡県北九州市   Country:Japan  

  • 微粒子誘電泳動法を用いたチップ型DNA検出装置における等温遺伝子増幅

    福島 光彦, 寺野 裕貴, 稲葉 優文, 中野 道彦, 末廣 純也

    第72回電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州工業大学 戸畑キャンパス, 福岡県北九州市   Country:Japan  

  • DNAハイブリダイゼーションによる微粒子の誘電泳動特性の変化

    徐 鏡雯 , 稲葉 優文, 中野 道彦, 末廣 純也

    第72回電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州工業大学 戸畑キャンパス, 福岡県北九州市   Country:Japan  

  • アクリル溶媒中におけるダイヤモンド微粒子の高電界整列挙動観察

    李 赫男, 林 将平, 稲葉 優文, 中野 道彦, 末廣 純也

    第72回電気・情報関係学会九州支部連合大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州工業大学 戸畑キャンパス, 福岡県北九州市   Country:Japan  

  • 微粒子ダイヤモンドの誘電泳動特性

    稲葉 優文, 林 将平, 李 赫男, 中野 道彦, 末廣 純也

    第80回 応用物理学会秋季学術講演会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:北海道大学札幌キャンパス(北海道札幌市)   Country:Japan  

  • SnO2ガスセンサのCF4応答にガス圧力が及ぼす影響

    前之園大地, Phansiri Nisarut, 稲葉優文, 中野道彦, 里秀文, 末廣純也

    令和元年電力エネルギー部門大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:広島県広島市、広島工業大学五日市キャンパス   Country:Japan  

  • ダイヤモンド微粒子の誘電泳動特性評価

    #林 将平, #李 赫男, @稲葉 優文, @中野 道彦, @末廣 純也

    令和元年基礎・材料・共通部門大会  2019.9 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:岩⼿⼤学上⽥キャンパス (岩⼿県盛岡市)   Country:Japan  

  • 誘電泳動集積法によって作製した半導体型カーボンナノチューブチャネルFET型ガスセンサのNO2ガス応答

    @稲葉 優文, #行部 晃生, #尾崎 圭祐, @中野 道彦, @末廣 純也

    令和元年度E部門総合研究会  2019.7 

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    Event date: 2019.7

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学すずかけ台キャンパス, 神奈川県横浜市   Country:Japan  

  • 1 step誘電泳動集積法を用いて作製したSnO₂ナノ粒子修飾CNTガスセンサのNO₂検出特性

    #小田 剛士, #河野 雅紀, @稲葉 優文, @中野 道彦, @末廣 純也

    令和元年度E部門総合研究会  2019.7 

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    Event date: 2019.7

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学すずかけ台キャンパス, 神奈川県横浜市   Country:Japan  

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MISC

  • ライフサイエンス分野における誘電泳動の最新成果

    中野 道彦, 稲葉 優文, 末廣 純也

    電気泳動 第64巻   2020.2

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    Language:Japanese   Publishing type:Article, review, commentary, editorial, etc. (scientific journal)  

  • 真空ギャップゲート構造による2次元正孔ガス伝導層の評価

    稲葉 優文, 川原田洋, 大野雄高

    NEW DIAMOND 136   2020.1

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    Language:Japanese   Publishing type:Article, review, commentary, editorial, etc. (scientific journal)  

  • ダイヤまでのより道

    稲葉 優文

    NEW DIAMOND 129   2018.4

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    Language:Japanese  

Industrial property rights

Patent   Number of applications: 3   Number of registrations: 0
Utility model   Number of applications: 0   Number of registrations: 0
Design   Number of applications: 0   Number of registrations: 0
Trademark   Number of applications: 0   Number of registrations: 0

Professional Memberships

  • Filler Society of Japan

    2024.4 - Present

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  • The Japan Society of Applied Physics

  • The Institute of Electrical Engineers of Japan

  • Japan New Diamond Forum

  • The Fullerenes, Nanotubes and Graphene Research Society

  • Kyushu Power Academy

  • Filler Society of Japan

  • Japan New Diamod Forum

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  • The Fullerenes, Nanotubes and Graphene Research Society

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  • THE JAPAN SOCIETY OF APPLIED PHYSICS

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  • THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN

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Committee Memberships

  • 第41回電子材料シンポジウム   Steering committee member   Domestic

    2022.3 - 2023.3   

  • ニューダイヤモンドフォーラム   Steering committee member   Domestic

    2021.5 - 2024.5   

  • ニューダイヤモンドフォーラム   若手の会 委員   Domestic

    2021.5 - 2024.5   

  • 第40回電子材料シンポジウム   Steering committee member   Domestic

    2021.3 - 2023.3   

  • ダイヤモンド・DLC関連若手会   Organizer   Domestic

    2020.2 - 2022.3   

Academic Activities

  • Screening of academic papers

    Role(s): Peer review

    2023

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    Type:Peer review 

    Number of peer-reviewed articles in foreign language journals:3

  • Program Committee member International contribution

    15th International Conference on New Diamond and Nano Carbons (NDNC) 2022  ( Kanazawa Bunka Hall, Kanazawa, Ishikawa Japan ) 2022.6

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    Type:Competition, symposium, etc. 

    Number of participants:200

  • 座長

    第62回フラーレン・ナノチューブ・グラフェン総合シンポジウム  ( Japan ) 2022.3

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    Type:Competition, symposium, etc. 

  • 幹事

    第10回フラーレン・ナノチューブグラフェン若手研究会  ( Japan ) 2021.3

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    Type:Competition, symposium, etc. 

  • 幹事

    第1回ダイヤモンド・DLC関連若手研究会  ( Japan ) 2020.11

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    Type:Competition, symposium, etc. 

  • 座長

    電気・情報関係学会九州支部第73回連合大会  ( Japan ) 2020.9

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    Type:Competition, symposium, etc. 

  • プログラム編集委員

    電気・情報関係学会九州支部第73回連合大会  ( Japan ) 2020.9

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    Type:Competition, symposium, etc. 

  • Screening of academic papers

    Role(s): Peer review

    2020

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    Type:Peer review 

    Number of peer-reviewed articles in foreign language journals:7

  • 座長

    電気・情報関係学会九州支部第72回連合大会  ( Japan ) 2019.9

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    Type:Competition, symposium, etc. 

  • プログラム編集委員

    電気・情報関係学会九州支部第72回連合大会  ( Japan ) 2019.9

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    Type:Competition, symposium, etc. 

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Research Projects

  • Establishment of spatio-temporal heat transport control by van der Waals materials

    Grant number:23K26139  2023.4 - 2027.3

    Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (B)

    廣谷 潤, 劉 麗君, 杉目 恒志, 稲葉 優文

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    Grant type:Scientific research funding

    本研究では、電子状態密度変調による時間的な熱伝導変調の可能性とメカニズム解明を学術的問いに設定し、高キャリア密度ナノ原子層材料MXeneを題材として熱伝導の自在制御の可能性を探求する。さらに、磁場による材料構造制御、材料表面の化学結合制御、原子層材料間のインターカレーションなどを変化させることで、実デバイス応用を鑑みた原子層材料と半導体材料、絶縁材料などの様々な積層構造の違いにおける空間的な熱伝導率計測にチャレンジする。

    CiNii Research

  • ファンデルワールス材料で拓く熱輸送の時空間制御技術の確立

    Grant number:JP23H01445  2023 - 2026

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (B)

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    Authorship:Coinvestigator(s)  Grant type:Scientific research funding

  • 両極性カーボンナノチューブFETを用いた超高速・高感度NO2検出

    2023

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    Grant type:Donation

  • ダイヤモンドフレークの創成と放熱材料応用

    2023

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    Grant type:Donation

  • 1枚で熱分布を作り出す熱配線シートの開発

    2023

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    Grant type:Donation

  • Development of homogenous dielectrophoretic assembly method and its application to semiconducting carbon nanotube gas sensors

    Grant number:22K04185  2022.4 - 2025.3

    Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (C)

    稲葉 優文

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    Grant type:Scientific research funding

    誘電泳動力は不平等電界により発生する駆動力で、微粒子の配向・集積のリアルタイムモニタリングが可能な手法である。申請者のグループでは誘電泳動力により集積した半導体微粒子をセンシング材料としたガスセンサに関する研究を遂行しているが、不平等電界による誘電泳動集積では、微粒子が不均質に集積される問題があった。本研究では、不平等電界によって生じる誘電泳動場を巨視的に均質に制御する“均質誘電泳動集積”技術基盤を構築し、微粒子集積に対する影響を、センサデバイスの特性比較を通して評価することを目的とする。

    CiNii Research

  • 均質誘電泳動法の開発と半導体カーボンナノチューブガスセンサへの応用

    Grant number:JP22K04185  2022 - 2024

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (C)

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    Authorship:Principal investigator  Grant type:Scientific research funding

  • ダイヤモンドフィラーを用いたフレキシブル伝熱シートの内部構造と熱伝導特性向上

    2022

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    Grant type:Donation

  • 広域誘電泳動集積技術の開発とスピンゼーベック発電素子への応用

    2022

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    Grant type:Donation

  • 広域誘電泳動集積によるスピンゼーベック発電素子の開発

    2022

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    Grant type:Donation

  • カーボンナノチューブ電界効果トランジスタによるダイナミックレンジNO2ガスセンサの開発と応答原理解明

    2022

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    Grant type:Donation

  • 研究助成/光の不平等電界による低次元半導体微粒子の配向技術の確立

    2021

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    Grant type:Donation

  • 絶縁・フレキシブル・高熱伝導なダイヤモンド複合伝熱シート

    Grant number:JP20K14777  2020 - 2021

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Early-Career Scientists

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    Authorship:Principal investigator  Grant type:Scientific research funding

  • AlGaN/GaN High-Electron-Mobility Transistor (HEMT) for SARS-CoV-2(COVID-19) Rapid Detection

    2020 - 2021

    AUN/SEED-Net Special Program for Research against COVID-19 (SPRAC)

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    Authorship:Coinvestigator(s)  Grant type:Contract research

  • 研究助成/ダイヤモンド微粒子の誘電泳動技術の確立とフレキシブル伝熱シートへの応用

    2020

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    Grant type:Donation

  • 研究助成/フィラーに微粒子ダイヤモンドを用いた、高熱伝導・高絶縁・フレキシブルな伝熱シートの開発

    2019

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    Grant type:Donation

  • 研究助成/フレキシブル伝熱シートの高熱伝導率化と内部構造評価

    2019

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    Grant type:Donation

  • 量子コンピューティングに向けたダイヤモンドオンチップ光回路に関する研究

    Grant number:18K13787  2018 - 2019

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Early-Career Scientists

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    Authorship:Principal investigator  Grant type:Scientific research funding

  • 2次元正孔ガスを用いたダイヤモンドMOSFETのチャネル移動度向上

    Grant number:17J08746  2017 - 2018

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for JSPS Fellows

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    Authorship:Principal investigator  Grant type:Scientific research funding

  • 2次元正孔ガスを用いたダイヤモンドMOSFETのチャネル移動度向上

    2017 - 2018

    Japan Society for the Promotion of Science  Research Fellowships for Young Scientists

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    Authorship:Principal investigator  Grant type:Joint research

  • ダイヤモンド上に形成された垂直配向グラファイトとその電極応用

    2016

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    Grant type:Donation

  • ダイヤモンド表面キャリアによる電子スピン制御とその生体分子核スピン観測への応用

    Grant number:26220903  2014 - 2018

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (S)

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    Authorship:Coinvestigator(s)  Grant type:Scientific research funding

  • クローニングによるSiC上のジグザグ型カーボンナノチューブ・フォレストの長尺化

    Grant number:26630136  2014 - 2015

    Grants-in-Aid for Scientific Research  Grant-in-Aid for challenging Exploratory Research

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    Authorship:Coinvestigator(s)  Grant type:Scientific research funding

  • ダイヤモンド表面近傍の電子スピン制御による単一核スピンの観測

    Grant number:26249043  2014

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (A)

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    Authorship:Coinvestigator(s)  Grant type:Scientific research funding

  • 絶縁・フレキシブル・高熱伝導なダイヤモンド複合伝熱シート

    Grant number:20K14777 

    稲葉 優文

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    Grant type:Scientific research funding

    絶縁体中最高の熱伝導率を持つダイヤモンドをフィラーとして柔軟な樹脂中に複合し、電界整列法によりフィラーを整列させることで、フレキシブル、高熱伝導率、電気絶縁性の伝熱シートを作製する。また、ダイヤモンドの量子センシング技術を応用し、伝熱シート内部の構造を3次元にマッピングして評価する技術の開発に挑戦し、伝熱シート内部の熱輸送路のミクロな構造が全体の熱伝導に与える影響を詳細に調査する。

    CiNii Research

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Educational Activities

  • 学生実験の指導を担当する。

Class subject

  • 電気情報工学基礎実験

    2023.10 - 2024.3   Second semester

  • 電気情報工学実験Ⅱ(AB)

    2023.10 - 2024.3   Second semester

  • 電気情報工学実験Ⅱ(EC・EE)

    2023.10 - 2024.3   Second semester

  • 電気情報工学基礎実験

    2022.10 - 2023.3   Second semester

  • 電気情報工学実験Ⅱ(AB)

    2022.10 - 2023.3   Second semester

  • 電気情報工学実験Ⅱ

    2021.10 - 2022.3   Second semester

  • 電気情報工学基礎実験

    2021.10 - 2022.3   Second semester

  • 電気情報工学実験Ⅱ

    2020.10 - 2021.3   Second semester

  • 電気情報工学基礎実験

    2020.10 - 2021.3   Second semester

  • 電気情報工学基礎実験

    2019.10 - 2020.3   Second semester

  • 電気情報工学実験Ⅱ

    2019.10 - 2020.3   Second semester

  • 日韓共同理工系学部留学生予備教育コース(物理)

    2019.10 - 2020.3   Second semester

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FD Participation

  • 2023.4   Role:Participation   Title:【シス情FD】若手教員による研究紹介⑧

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2023.3   Role:Participation   Title:【シス情FD】独・蘭・台湾での産学連携を垣間見る-Industy 4.0・量子コンピューティング・先端半導体-

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2022.11   Role:Participation   Title:【工学・シス情】教職員向け知的財産セミナー(FD)

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2022.7   Role:Participation   Title:【シス情FD】若手教員による研究紹介⑤

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2022.6   Role:Participation   Title:【シス情FD】電子ジャーナル等の今後について

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2022.5   Role:Participation   Title:【シス情FD】若手教員による研究紹介④「量子コンピュータ・システム・アーキテクチャの研究~道具になることを目指して~」

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2022.4   Role:Participation   Title:【シス情FD】第4期中期目標・中期計画等について

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2022.1   Role:Participation   Title:【シス情FD】シス情関連の科学技術に対する国の政策動向(に関する私見)

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2021.12   Role:Participation   Title:【シス情FD】企業出身教員から見た大学

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2021.11   Role:Participation   Title:【シス情FD】若手教員による研究紹介 及び 研究費獲得のポイント等について③

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2021.10   Role:Participation   Title:【シス情FD】熊本高専と九大システム情報との交流・連携に向けて ー 3年半で感じた高専の実像 ー

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2021.9   Role:Participation   Title:博士後期課程の充足率向上に向けて

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2021.7   Role:Participation   Title:若手教員による研究紹介 及び 科研取得のポイント、その他について ②

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2021.6   Role:Speech   Title:若手教員による研究紹介 及び 科研取得のポイントについて ①

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2021.5   Role:Participation   Title:先導的人材育成フェローシップ事業(情報・AI分野)について

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2020.11   Role:Participation   Title:マス・フォア・イノベーション卓越大学院について

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2020.10   Role:Participation   Title:2020年度 ユニバーシティ・デザイン・ワークショップの報告

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2020.9   Role:Participation   Title:電気情報工学科総合型選抜(AO入試)について

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2019.10   Role:Participation   Title:電子ジャーナルの現状と今後の動向に関する説明会

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2019.6   Role:Participation   Title:8大学情報系研究科長会議の報告

    Organizer:[Undergraduate school/graduate school/graduate faculty]

  • 2019.4   Role:Participation   Title:平成31年度 第1回全学FD(新任教員の研修)

    Organizer:University-wide

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Visiting, concurrent, or part-time lecturers at other universities, institutions, etc.

  • 2019  早稲田大学/理工学術院  Classification:Part-time lecturer  Domestic/International Classification:Japan 

    Semester, Day Time or Duration:不定期

  • 2018  早稲田大学/理工学術院  Classification:Part-time lecturer  Domestic/International Classification:Japan 

    Semester, Day Time or Duration:前期、木曜4,5限

Other educational activity and Special note

  • 2019  Coaching of Students' Association  電気電子工学課程企業見学会

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    とりまとめ・引率

Social Activities

  • 中学生の科学実験教室2023(静電気・雷を体感しよう! ~放電装置の作製と実験~)

    システム情報科学研究院,KDDI 財団 福岡県教育委員会,福岡市教育委員会,糸島市教育委員会  伊都キャンパス  2023.8

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    Audience:General, Scientific, Company, Civic organization, Governmental agency

    Type:Lecture

  • 中学生の科学実験教室2022(静電気・雷を体感しよう! ~放電装置の作製と実験~)

    システム情報科学研究院,KDDI 財団 福岡県教育委員会,福岡市教育委員会,糸島市教育委員会  伊都キャンパス  2022.8

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    Audience:General, Scientific, Company, Civic organization, Governmental agency

    Type:Lecture

  • 中学生の科学実験教室2021(静電気・雷を体感しよう! ~放電装置の作製と実験~)

    システム情報科学研究院,KDDI 財団 福岡県教育委員会,福岡市教育委員会,糸島市教育委員会  オンライン  2021.8

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    Audience:General, Scientific, Company, Civic organization, Governmental agency

    Type:Lecture

  • 中学生の科学実験教室2020(見て!触って!感じる。静電気を体験しよう)

    システム情報科学研究院,KDDI 財団 福岡県教育委員会,福岡市教育委員会,糸島市教育委員会  オンライン  2020.8

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    Audience:General, Scientific, Company, Civic organization, Governmental agency

    Type:Lecture

  • 中学生の科学実験教室2019(見て!触って!感じる。静電気を体験しよう)

    システム情報科学研究院,KDDI 財団 福岡県教育委員会,福岡市教育委員会,糸島市教育委員会  伊都キャンパス  2019.8

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    Audience:General, Scientific, Company, Civic organization, Governmental agency

    Type:Lecture

  • オープンキャンパス

    高校生  2019.8

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    Audience:Infants, Schoolchildren, Junior students, High school students

    Type:Other

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