Faculty Profiles - ITAGAKI NAHO

Information

写真a

ITAGAKI NAHO

Organization

Faculty of Information Science and Electrical Engineering Department of I&E Visionaries Professor
Center of Plasma Nono-interface Engineering （Concurrent）
School of Engineering Department of Electrical Engineering and Computer Science（Concurrent）
Graduate School of Information Science and Electrical Engineering Department of Electrical and Electronic Engineering（Concurrent）
Joint Graduate School of Mathematics for Innovation （Concurrent）

Homepage

http://plasma.ed.kyushu-u.ac.jp/inorganic/

External link

Research Areas

Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Electric and electronic materials

Degree

Ph.D

Research History

産業技術総合研究所キヤノン株式会社

産業技術総合研究所キヤノン株式会社

Research Interests・Research Keywords

Research theme： Fabrication of ultrafast switching devices using excitonic transistor

Keyword： excitonic devices, transistor

Research period： 2011.1
Research theme： Development of alternative rare metal materials for next generation electronic/photonic diveices

Keyword： alternative rare metal, electronic devices, photonic devices

Research period： 2010.4
Research theme： Development of novel fabrication method for oxide semiconductors

Keyword： oxide semiconductor

Research period： 2010.4

Awards

Best Poster Award, 2022 MRS Spring Meeting & Exhibit

2022.5 Material Research Society Epitaxial Growth of Atomically Flat Single-crystalline (ZnO)/_x /(InN)_1-/x/ Films on O-polar ZnO Substrates by Magnetron Sputtering
Best Poster Award, 2022 MRS Spring Meeting & Exhibit

2022.5 Material Research Society

　More details

Epitaxial Growth of Atomically Flat Single-crystalline (ZnO)/_x /(InN)_1-/x/ Films on O-polar ZnO Substrates by Magnetron Sputtering

researchmap
プラズマ・核融合学会九州・沖縄・山口支部第 25 回（令和3年度）支部大会講演奨励賞

2021.12 プラズマ・核融合学会逆Stranski-Krastanovモードを利用した単結晶ZnMgO薄膜のスパッタリング成膜
第45回（2018年秋季）応用物理学会講演奨励賞

2018.9 応用物理学会スパッタエピタキシーによるサファイア基板直上へのIn-rich (ZnO)x(InN)1-x膜の作製
第14回プラズマエレクトロニクス賞

2016.3 応用物理学会プラズマエレクトロニクス分科会 "Synthesis and characterization of ZnInON semiconductor: a ZnO-based compound with tunable band gap" N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani
さきがけ「太陽光と光電変換機能」研究領域　総括賞

2015.1 独立行政法人科学技術振興機構「太陽光と光電変換機能」研究領域さきがけ「太陽光と光電変換機能」領域の研究推進
プラズマ材料科学賞（奨励部門）

2013.8 学振 153委員会スパッタリングにおけるZnO膜の結晶成長制御とグリーンデバイスへの展開
Outstanding Poster Award

2013.8 the 9th Asian-European International Conference on Plasma Surface Engineering 2013 Time Evolution of Spatial Profile of Nanoparticle Amount in Reactive Plasmas
International Symposium on Sputtering and Plasma Processes 2013; Poster Award

2013.7 International Symposium on Sputtering and Plasma Processes Sputter deposition of single crystal ZnO films on 18% lattice mismatched c-Al2O3 substrates via nitrogen mediated
11th APCPST "Advanced Plasma Application Award"

2012.10 11th Asia Pacific Conference on Plasma Science adn Technology (APCPST) & 25th Symposium on Plasma Science for Materials (SPSM) "Zinc-Indium Oxynitride Thin Films for Multiple-Quantum–Well Solar Cells" N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani
Award for Encouragement of Research in Materials Science

2012.9 IUMRS-ICEM2012
IUMRS-ICEM2012 "Young Scientist Awards: Silver Award Winners"

2012.9 日本MRS "High Capacity Li Ion Battery Anodes Using Silicon Carbide Nanoparticles Produced by Double Multi-Hollow Discharge Plasma CVD" K. Kamataki, M. Shiratani, T. Ishihara, H. Nagano, Y. Morita, K. Kuwahara, G. Uchida, H. Seo, N. Itagaki, K. Koga
Best Poster Presentation Award

2012.3 th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials Interaction between amplitude modulated reactive plasmas and nanoparitcles grown in the plasmas
ISPlasma2012 "Best Presentation Award"

2012.3 ISPlasma2012 "Interaction between amplitude modulated reactive plasmas and nanoparitcles grown in the plasmas" KUNIHIRO KAMATAKI, KAZUNORI KOGA, GIICHIRO UCHIDA, NAHO ITAGAKI, HYUNWOONG SEO AND MASAHARU SHIRATANI

▼display all

Papers

Sputtering deposition of dense and low-resistive amorphous In2O3: Sn films under zone-T conditions of Thornton’s structural diagram Reviewed International coauthorship

Yoshiharu Wada, Wafaa Magdi, Keigo Takeda, Yuta Mido, Naoto Yamashita, Takamasa Okumura, Kunihiro Kamataki, Kazunori Koga, Masaru Hori, Masaharu Shiratani, and Naho Itagaki

Appl. Phys. Lett., 124 ( 24 ) 242101 2024.6 （ ISSN:0003-6951 eISSN:1077-3118 ）

　More details

Authorship：Corresponding author Language：English Publishing type：Research paper (scientific journal) Publisher：AIP Publishing

We have fabricated smooth-surfaced amorphous In2O3:Sn (a-ITO) films at a high temperature of 550 °C, far above the typical crystallization threshold of 150 °C for ITO films. This achievement has been made possible by intentionally introducing N2 into the sputtering atmosphere, which maintains a low N atom incorporation of only a few atomic percent within the films. Positioned within ZONE-T of the Thornton diagram (higher-temperature region characterized by high film density), our method allows the preparation of films with superior film density about 6.96 g/cm3, substantially exceeding the density of 6.58 g/cm3 for conventional a-ITO films fabricated under ZONE-1 (low-temperature region) and approaching the bulk crystal density of In2O3 at 7.12 g/cm3. The films also feature a high carrier density of 5 × 1020 cm−3 and a remarkably low resistivity of 3.5 × 10−4 Ω cm, comparable to those of polycrystalline films. The analysis via vacuum-ultraviolet absorption spectroscopy on N and O atom densities in the plasma suggests that amorphization is primarily caused not by N atoms incorporated in the films but by those temporally adsorbed on the film surface, inhibiting crystal nucleation before eventually desorbing. Our findings will pave the way not only for broader applications of a-ITO films but also for the design of other amorphous materials at temperatures beyond their crystallization points.

DOI： 10.1063/5.0211090

Web of Science

Scopus

researchmap
Sputter deposition of ZnO–AlN pseudo-binary amorphous alloys with tunable band gaps in the deep ultraviolet region Reviewed International coauthorship

Seiichi Urakawa,Wafaa Magdy,Yoshiharu Wada, Ryota Narishige,Kentaro Kaneshima, Naoto Yamashita,Takamasa Okumura,Kunihiro Kamataki,Kazunori Koga,Masaharu Shiratani,and Naho Itagaki

Mater. Res. Expres 11 ( 6 ) 065901 2024.6 （ eISSN:2053-1591 ）

　More details

Authorship：Corresponding author Language：English Publishing type：Research paper (scientific journal) Publisher：Materials Research Express

ZnO-AlN pseudo-binary amorphous alloys (a-ZAON hereinafter) with tunable band gaps in the deep ultraviolet (DUV) region have been synthesized using magnetron sputtering. The miscibility gap between ZnO and AlN has been overcome using room-temperature sputtering deposition, leveraging the rapid quenching abilities of sputtered particles to fabricate metastable but single-phase alloys. X-ray diffraction patterns and optical transmittance spectra revealed that the synthesized films with chemical composition ratios of [Zn]/([Zn] + [Al]) = 0.24-0.79 likely manifested as single-phase of a-ZAON films. Despite their amorphous structures, these films presented direct band gaps of 3.4-5.8 eV and thus high optical absorption coefficients (105 cm−1). Notably, the observed values adhered to Vegard’s law for crystalline ZnO-AlN systems, implying that the a-ZAON films were solid solution alloys with atomic-level mixing. Furthermore, atomic force microscopy analyses revealed smooth film surfaces with root-mean-square roughness of 0.8-0.9 nm. Overall, the wide-ranging band gap tunability, high absorption coefficients, amorphous structures, surface smoothness, and low synthesis temperatures of a-ZAON films position them as promising materials for use in DUV optoelectronic devices and power devices fabricated using large-scale glass and flexible substrates.

DOI： 10.1088/2053-1591/ad4f57

Web of Science

Scopus
Growth of single crystalline ZnO films on 18%-lattice-mismatched sapphire substrates using buffer layers with three-dimensional islands Reviewed International journal

Y. Nakamura, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

Cryst. Growth Des. 22 ( 6 ) 3770 - 3777 2022.5 （ ISSN:1528-7483 eISSN:1528-7505 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

Heteroepitaxial growth of single-crystalline zinc oxide (ZnO) films on a c-plane sapphire substrate is an important technology for electronics and optoelectronic devices. Recently, the inverted Stranski-Krastanov (SK) mode has been demonstrated, and it has realized the heteroepitaxial growth of ZnO films on a sapphire substrate by sputtering. In this mode, a 10 nm-thick buffer layer consisting of three-dimensional islands (3D buffer layers) initially forms and relaxes the strain, and then, a two-dimensional ZnO film (2D layer) grows involving small strain. To clarify the correlation between the structural properties of the 3D buffer layers and the 2D layer, we introduce a figure of merit (FOM) of ZnO films: the reciprocal of the product of the full width at half-maximum (FWHM) of the (002) and (101) planes of X-ray rocking curves (XRCs) and root-mean-square (RMS) roughness. We find that the FOM of the 2D layers correlates with the RMS roughness, the in-plane orientation, and the lateral correlation length ζ of the surfaces of the buffer layers. We observe a surprisingly high correlation coefficient of 0.97. Our results imply that on the buffer layers with larger ζ, adatoms more easily reach the thermodynamically favored lattice positions. Thus, high-quality single-crystalline ZnO films, where the (002) plane XRC-FWHM and the RMS roughness are 0.05° and 1.5 nm, respectively, are grown on the buffer layers with a large ζ of 13.7 nm. This finding provides a useful tool for understanding the mechanism of the inverted SK mode.

DOI： 10.1021/acs.cgd.2c00145

Web of Science

Scopus

researchmap
Performance comparison of nitrile-based liquid electrolytes on bifacial dye-sensitized solar cells under low-concentrated light Reviewed International journal

T. E. Putri, F. L. Chawarambwa, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

MRS Adv. 7 ( 21 ) 427 - 432 2022.4 （ ISSN:2731-5894 eISSN:2059-8521 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：MRS Advances

Abstract: Dye-sensitized solar cell (DSSC) has low power output and efficiency. Even though the low-concentrated light can increase the POUT and power conversion efficiency (PCE) of DSSC, the effect of increase in the cell temperature, particularly electrolyte evaporation, becomes a major concern. In this study, we compared and investigated the performance of acetonitrile (AN-50), propionitrile (PN-50), and 3-metoxy propionitrile (Z-100) as nitrile-based electrolyte under low-concentrated light. The results showed 4–8 times increase in JSC and POUT in all electrolytes. AN-50 demonstrated an improved performance under influence of 2 cm distance concave mirror concentrated light with the highest JSC = 74.21 mA/cm2, POUT = 24.53 mW/cm2, and η = 7.99%. However, the performance of cell with AN-50 and PN-50 started to degrade within 3 h of measurement. In contrast, Z-100 displayed performance stability during 4 days measurement even with the lowest JSC= 49.98 mA/cm2, POUT = 19.50 mW/cm2, and η = 6.35%. Graphical abstract: [Figure not available: see fulltext.]

DOI： 10.1557/s43580-022-00270-x

Web of Science

Scopus

researchmap
The Effects of Spin-Coating Rate on Surface Roughness, Thickness, and Electrochemical Properties of a Pt Polymer Counter Electrode Reviewed International journal

F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Advanced Engineering Forum 45 2022.4

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.4028/p-6l16rl

researchmap
Epitaxial Growth of Zn1-xMgxO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode Using Magnetron Sputtering Reviewed International journal

D. Takahashi, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

MRS Adv. 7 ( 20 ) 415 - 419 2022.2 （ ISSN:2731-5894 eISSN:2059-8521 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Springer Science and Business Media LLC

We have succeeded in epitaxial growth of high-quality Zn1−xMgxO films of x = 0.04–0.33 on 18%-lattice mismatched sapphire substrates using magnetron sputtering. The films have grown in inverted Stranski-Krastanov (inverted SK) mode, where a buffer layer consisting of three-dimensional islands initially forms and a relaxed two-dimensional layer subsequently grows on the buffer layer. The resultant films have flat surfaces with root-mean-square roughness of 0.43–0.75 nm and are of high-crystal qualities even for large Mg contents; the full widths at half maximum of (0002) x-ray rocking curves are 0.05° (x = 0.33) and 0.07° (x = 0.14). Furthermore, we observed that the optical absorption edge shifts continuously toward the shorter wavelength with increasing x, and the band gap has been tuned from 3.5 to 4.3 eV. These results show that the inverted SK mode is useful for fabricating high-quality Zn1−xMgxO films with wide-range tunability of band gaps. Graphical abstract: [Figure not available: see fulltext.]

DOI： 10.1557/s43580-022-00234-1

Web of Science

Scopus

researchmap

Other Link： https://link.springer.com/article/10.1557/s43580-022-00234-1/fulltext.html
Nanostructured Ge and GeSn Films by Highpressure He Plasma Sputtering for High-capacity Li ion Battery Anodes Reviewed International journal

G. Uchida, K. Nagai, Y. Habu, J. Hayashi, Y. Ikebe, M. Hiramatsu, R. Narishige, N. Itagaki, M. Shiratani, Y. Setsuhara

Sci. Rep. 12 ( 1 ) 1742 2022.2 （ ISSN:2045-2322 eISSN:2045-2322 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Springer Science and Business Media LLC

Abstract

We fabricated nanostructured Ge and GeSn films using He radio-frequency magnetron plasma sputtering deposition. Monodisperse amorphous Ge and GeSn nanoparticles of 30–40 nm size were arranged without aggregation by off-axis sputtering deposition in the high He-gas-pressure range of 0.1 Torr. The Ge film porosity was over 30%. We tested the charge/discharge cycle performance of Li-ion batteries with nanostructured Ge and GeSn anodes. The Ge anode with a dispersed arrangement of nanoparticles showed a Li-storage capacity of 565 mAh/g after the 60th cycle. The capacity retention was markedly improved by the addition of 3 at% Sn in Ge anode. The GeSn anode (3 at% Sn) achieved a higher capacity of 1128 mAh/g after 60 cycles with 92% capacity retention. Precise control of the nano-morphology and electrical characteristics by a single step procedure using low temperature plasma is effective for stable cycling of high-capacity Ge anodes.

DOI： 10.1038/s41598-022-05579-z

Web of Science

Scopus

PubMed

researchmap

Other Link： https://www.nature.com/articles/s41598-022-05579-z
Performances of Carbon Black-Titanium nitrate and Carbon Black-Titanium/Triton X-100 Composite Polymer Counter Electrodes for Dye-Sensitized Solar Cells Reviewed International journal

F. L. Chawarambwa, T. E. Putri, A. Pankaj, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Adv. Mater. Res. 1168 2022.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.4028/www.scientific.net/AMR.1168.35

researchmap
Improved luminescence performance of Yb3+-Er3+-Zn2+: Y2O3 phosphor and its application to solar cells Reviewed International journal

F. L. Chawarambwa, T. E. Putri, S. H. Hwang, P. Attri, K. Kamataki, N. Itagaki, K. Koga, D. Nakamura. M. Shiratani

Optical Materials 123 2022.1 （ ISSN:0925-3467 eISSN:1873-1252 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Optical Materials

Upconversion materials (UC) can convert low-energy photons into visible light and, therefore, can be incorporated in solar cells to increase the absorption of visible light. This study synthesized UC nanophosphors Yb3+, Er3+: Y2O3 and Yb3+, Er3+, Zn2+: Y2O3 by a simple co-precipitation method for application in dye-sensitized solar cells (DSSCs). The impact of the enhancement in the concentration of Zn2+ on the photoluminescence (PL) and color point of the synthesized nanophosphors was also investigated. The synthesized nanophosphors emitted intense red and weaker green emissions upon excitation at 980 nm. The incorporation of Zn2+ to the Yb3+, Er3+: Y2O3 nanophosphors leads to color tunability in the red and yellow regions. Furthermore, the synthesized nanophosphors were incorporated into the DSSC photoanode to form a TiO2-UC-based DSSC for converting near-infrared (NIR) into visible light. We observed that the TiO2-UC-based DSSC showed an enhancement ratio in current density and power conversion efficiency of 17.4% and 16.6%, respectively, compared to the bare TiO2-based DSSC. These results reveal that UC-based Yb3+, Er3+, Zn2+: Y2O3 nanophosphors are useful in improving the efficiency of DSSCs and in color tunability applications.

DOI： 10.1016/j.optmat.2021.111928

Web of Science

Scopus

researchmap
Plasma Treatment Effect on the Paramagnetic Species of Barley Seed Radical’s Intensity: An EPR study Reviewed International journal

P. Attri, T. Anan, R. Arita, T. Okumura, H. Tanaka, D. Yamashita, K. Matsuo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani, K. Kuchitsu, Y. Ishibashi

Plasma Medicine 2021.12

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1615/PlasmaMed.2020036353
Plasma Treatment Effect on the Paramagnetic Species of Barley Seed Radical’s Intensity: An EPR study Reviewed International journal

P. Attri, T. Anan, R. Arita, T. Okumura, H. Tanaka, D. Yamashita, K. Matsuo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani, K. Kuchitsu, Y. Ishibashi

Plasma Medicine 10 ( 3 ) 2021.12

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1615/PlasmaMed.2020036353
Morphological control of nanostructured Ge films in high Ar-gas-pressure plasma sputtering process for Li ion batteries Reviewed International journal

J.Hayashi, K. Nagai, Y.Habu, Y. Ikebe, M. Hiramatsu, R. Narishige, N. Itagaki, M. Shiratani, Y. Setsuhara, G. Uchida

Jpn. J. Appl. Phys. 61 ( SA ) 2021.12 （ ISSN:0021-4922 eISSN:1347-4065 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Japanese Journal of Applied Physics

We present a study on morphological control of nanostructured Ge films by the Ar gas pressure in plasma sputtering deposition. In the low Ar-gas-pressure range, aggregated islands of amorphous grains are formed on the film surface, while in the high-pressure range of 500 mTorr monodisperse nano-grains of about 30 nm in size are orderly arranged without aggregation. The film porosity shows a high value of over 10%. We tested the charge/discharge cycle performance of Li-ion batteries with nanostructured Ge films as anodes. The battery cell with an ordered arrangement structure maintained a high capacity of 434 mAh g-1 after 40 charge/discharge cycles, while that with an aggregated structure exhibited a rapid degradation of capacity to 5.08-183 mAh g-1. An ordered arrangement of Ge nano-grains with a high porosity, which is realized in a simple one-step procedure using high Ar-gas-pressure plasma sputtering, is effective for the stable cycling of high-capacity metal anodes.

DOI： 10.35848/1347-4065/ac2b7b

Web of Science

Scopus
Performance Characteristics of Bifacial Dye-Sensitized Solar Cells with a V-Shaped Low-Concentrating Light System Reviewed International journal

T. E. Putri, F. L Chawarambwa, M. K. Son, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

ACS Appl. Energy Mater. 4 ( 12 ) 2021.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1021/acsaem.1c02774
Effects of concentrated light on the performance and stability of a quasi-solid electrolyte in dye-sensitized solar cells Reviewed International journal

F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Chem. Phys. Lett. 781 2021.10

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.cplett.2021.138986
Transport of Nanoparticles in Afterglow Region Using Multi-Hollow Discharge Plasma CVD Reviewed International journal

K. Koga, S. H. Hwang, P. Attri, K. Kamataki, N. Itagaki, M. Shiratani

Bull. Am. Phys. Soc. 66 ( 7 ) 2021.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Passivating antireflection coating of crystalline silicon using i/n a-Si:H/SiN trilayer Reviewed International journal

S. Nunomura, I. Sakata, A. Sato, M. Lozac’h, T. Misawa, N.Itagaki, M.Shiratani

J Phys Chem Solids 156 2021.9

　More details

Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.jpcs.2021.110127
Comparison between Ar+CH4 Cathode and Anode Coupled Capacitively Coupled Plasma Chemical Vapor Deposition of Hydrogenated Amorphous Carbon Films Reviewed International journal

S. H. Hwang, R. Iwamoto, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani

Thin Solid Films 729 2021.7

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2021.138701
Sputtering Growth of Metal Oxynitride Semiconductors for Excitonic Devices Reviewed International journal

R. Narishige, N. Itagaki, M. Shiratani

5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) 2021.5

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1109/EDTM50988.2021.9420921
Highly efficient and transparent counter electrode for application in bifacial solar cells Reviewed International journal

F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Chem. Phys. Lett. 768 2021.4

　More details

Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.cplett.2021.138369
Synthesis of Yb3+/Ho3+ co-doped Y2O3 nanoparticles and its application to dye sensitized solar cells Reviewed International journal

F. L. Chawarambwa, T. E. Putri, K. Kamataki, M. Shiratani, K. Koga, N. Itagaki, D. Nakamura

J. Mol. Struct. 1228 2021.3

　More details

Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.molstruc.2020.129479
Effects of Activated Carbon Counter Electrode On Bifacial Dye Sensitized Solar Cells (DSSCs) Reviewed International journal

T. E. Putri, Y. Hao, F. L. Chawarambwa, H. Seo, Min-Kyu Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Mater. Sci. Forum 1016 2021.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.4028/www.scientific.net/MSF.1016.863
Time of Flight Size Control of Carbon Nanoparticles Using Ar+CH4 Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method Reviewed International journal

S. H. Hwang, K. Koga, Y. Hao, P. Attri, T. Okumura, K. Kamataki, N. Itagaki, M. Shiratani, J-S. Oh, S. Takabayashi, T. Nakatani

Processes 9 ( 1 ) 2020.12

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.3390/pr9010002
Graphene-Si3N4 nanocomposite blended polymer counter electrode for low-cost dye-sensitized solar cells Reviewed International journal

F. L. Chawarambwa, T. E. Putri, M. K. Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Chem. Phys. Lett. 758 2020.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.cplett.2020.137920
Size and flux of carbon nanoparticles synthesized by Ar+CH4 multi-hollow plasma chemical vapor deposition Reviewed International journal

S. H. Hwang, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Diam Relat Mater 109 2020.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.diamond.2020.108050
Impact of surface morphologies of substrates on the epitaxial growth of magnetron sputtered (ZnO)x(InN)1-x films Reviewed International journal

R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

Jpn. J. Appl. Phys. 60 ( SA ) 2020.10

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.35848/1347-4065/abba0c
Low stress diamond-like carbon films containing carbon nanoparticles fabricated by combining rf sputtering and plasma chemical vapor deposition Reviewed International journal

S. H. Hwang, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani

Jpn. J. Appl. Phys. 59 ( 10 ) 2020.10

　More details

Language：English Publishing type：Research paper (scientific journal)
Growth of single crystalline films on lattice-mismatched substrates through 3D to 2D mode transition Reviewed International journal

N. Itagaki, Y. Nakamura, R. Narishige, K. Takeda, K. Kamataki, K. Koga, M. Hori, M. Shiratani

Sci. Rep. 10 2020.3

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1038/s41598-020-61596-w
Impact of radish sprouts seeds coat color on the electron paramagnetic resonance signals after plasma treatment Reviewed International journal

K. Koga, P. Attri, K. Kamataki, N. Itagaki, M. Shiratani, V. Mildaziene

Jpn. J. Appl. Phys. 59 ( SH ) 2020.3

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.35848/1347-4065/ab7698
Improved Nanoscale Al-doped ZnO with a ZnO Buffer Layer Fabricated by Nitrogen-mediated Crystallization for Flexible Optoelectronic Devices Reviewed International journal

I. Suhariadi, N. Itagaki, M. Shiratani

ACS Appl. Nano Mater. 3 2020.2

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1021/acsanm.9b02571
Identification and Suppression of Si-H2 Bond Formation at P/I Interface in a-Si:H Films Deposited by SiH4 Plasma CVD Reviewed International journal

K. Tanaka, H. Hara, S. Nagaishi, L. Shi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res. 14 2019.9

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1585/pfr.14.4406141
Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma Reviewed International journal

R. Zhou, K. Kamataki, H. Ohtomo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res. 14 2019.9

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1585/pfr.14.4406120
Effects of Gas Pressure on the Size Distribution and Structure of Carbon Nanoparticles Using Ar + CH4 Multi-Hollow Discharged Plasma Chemical Vapor Deposition Reviewed International journal

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res. 14 2019.9

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1585/pfr.14.4406115
Effect of Higher-Order Silane Deposition on Spatial Profile of Si-H2/Si-H Bond Density Ratio of a-Si:H Films Reviewed International journal

L. Shi, K. Tanaka, H. Hara, S. Nagaishi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res. 14 2019.9

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1585/pfr.14.4406144
Sputter Epitaxy of (ZnO)x(InN)1-x films on Lattice-mismatched Sapphire Substrate Reviewed International journal

N. Miyahara, S. Urakawa, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

MRS Adv. 4 ( 27 ) 1551 - 1556 2019.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1557/adv.2019.17
Effects of nitrogen impurity on zno crystal growth on Si substrates Reviewed International journal

S. Muraoka, L. Jiahao, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

MRS Adv. 4 ( 27 ) 1557 - 1563 2019.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1557/adv.2019.28
Photoluminescence of (ZnO)0.82 (InN)0.18 films: Incident light angle dependence Reviewed International journal

N. Miyahara, K. Iwasaki, D. Yamashita, D. Nakamura, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Mater. Sci. Forum 941 2099 - 2103 2018.12

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.4028/www.scientific.net/MSF.941.2099
Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas Reviewed International journal

R. Zhou, K. Mori, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Mater. Sci. Forum 941 2104 - 2108 2018.12

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.4028/www.scientific.net/MSF.941.2104
Effects of sputtering pressure on (ZnO)x(InN)1-x crystal film growth at 450ºC Reviewed International journal

N. Itagaki, K. Takeuchi, N. Miyahara, K. Imoto, H. Seo, K. Koga, M. Shiratani

Mater. Sci. Forum 941 2093 - 2098 2018.12

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.4028/www.scientific.net/MSF.941.2093
The effect of the H2/(H2+Ar) flow-rate ratio on hydrogenated amorphous carbon films grown using Ar/H2/C7H8 plasma chemical vapor deposition Reviewed International journal

T. Fang, K. Yamaki, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, K. Takenaka,Y. Setsuhara

Thin Solid Films 660 891 - 898 2018.8

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2018.02.035
Effects of gas velocity on deposition rate and amount of cluster incorporation into a-Si:H films fabricated by SiH4 plasma chemical vapor deposition Reviewed International journal

T. Kojima, S. Toko, K. Tanaka, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Plasma Fusion Res. 13 1406082 2018.6

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1585/pfr.13.1406082
Progress in photovoltaic performance of organic/inorganic hybrid solar cell based on optimal resistive Si and solvent modified poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate) junction Reviewed International journal

H. Seo, D. Sakamoto, H. Chou, N. Itagaki, K. Koga, M. Shiratani

Progress in Photovoltaics: Research and Applications 26 ( 2 ) 2018.2

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1002/pip.2961
色素増感太陽電池のポリマー対向電極における触媒反応の活性化 Invited

徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

信学技報 (IEICE Technical Report) 117 ( 334 ) 2017.12

　More details

Language：Japanese Publishing type：Research paper (scientific journal)
Low temperature rapid formation of Au-induced crystalline Ge films using sputtering deposition Reviewed International journal

S. Tanami, D. Ichida, S. Hashimoto, H. Seo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Thin Solid Films 641 2017.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2017.02.067
Hysteresis in volume fraction of clusters incorporated into a-Si:H films deposited by SiH4 plasma chemical vapor deposition Reviewed International journal

S. Toko, K. Keya, Y. Torigoe, T. Kojima, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Surf. Coat. Technol. 326 ( Part B ) 2017.10

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.surfcoat.2017.01.034
Performance enhancement of quantum dot-sensitized solar cells based on polymer nano-composite catalyst Reviewed International journal

H. Seo, C. V.V.M. Gopi, H.-J. Kim, N. Itagaki, K. Koga, M. Shiratani

Electrochimica Acta 249 2017.9

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.electacta.2017.08.030
Synthesis of Nanoparticles using Low Temperature Plasmas and Its Application to Solar Cells and Tracers in Living Body Reviewed International journal

K. Koga, H. Seo, A. Tanaka, N. Itagaki, M. Shiratani

ECS Transactions 77 ( 3 ) 2017.5

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1149/07703.0017ecst
低温プラズマによるナノ粒子の合成と太陽電池への応用

古閑一憲, 徐鉉雄, 板垣奈穂, 白谷正治

信学技報 (IEICE Technical Report) 117 ( 8 ) 2017.4

　More details

Language：Japanese Publishing type：Research paper (scientific journal)
Densities and surface reaction probabilities of oxygen and nitrogen atoms during sputter deposition of ZnInON on ZnO Reviewed International journal

K. Matsushima, T. Ide, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

IEEE Trans. Plasma Science 45 ( 2 ) 2017.2

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1109/TPS.2016.2632124
Effects of sputtering gas pressure dependence of surface morphology of ZnO films fabricated via nitrogen mediated crystallization Reviewed International journal

K. Iwasaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

MRS Adv. 2 ( 5 ) 2016.12

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1557/adv.2016.617
Blue Photoluminescence of (ZnO)0.92(InN)0.08 Reviewed International journal

K. Matsushima, K. Iwasaki, N. Miyahara, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

MRS Adv. 2 ( 5 ) 2016.12

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1557/adv.2016.625
Fluctuation of Position and Energy of a Fine Particle in Plasma Nanofabrication Reviewed International journal

M. Shiratani, M. Soejima, H. Seo, N. Itagaki, K. Koga

Materials Science Forum 879 2016.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.4028/www.scientific.net/MSF.879.1772
Optical Bandgap Energy of Si Nanoparticle Composite Films Deposited by a Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method Reviewed International journal

S. Toko, Y. Kanemitsu, H. Seo, N. Itagaki, K. Koga, M. Shiratani

J. Nanosci. Nanotechnol. 16 ( 10 ) 2016.10

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1166/jnn.2016.13233
Surface Modification of Polymer Counter Electrode for Low Cost Dye-sensitized Solar Cells Reviewed International journal

H. Seo, M. K. Son, S. Hashimoto, T. Takasaki, N. Itagaki, K. Koga, M. Shiratani

Electrochimica Acta 210 2016.8

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.electacta.2016.06.020
Effect of Sulfur Doped TiO2 on Photovoltaic Properties of Dye-Sensitized Solar Cells Reviewed International journal

H. Seo, S. H. Nam, N. Itagaki, K. Koga, M. Shiratani, and J.-H. Boo

Electron. Mater. Lett. 12 ( 4 ) 2016.7

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1007/s13391-016-4018-8
Correlation between SiH2/SiH and light-induced degradation of p–i–n hydrogenated amorphous silicon solar cells Reviewed International journal

K. Keya, T. Kojima, Y. Torigoe, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Jpn. J. Appl. Phys. 55 ( 7S2 ) 2016.7

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.55.07LE03
Optoelectronic properties of valence-statecontrolled amorphous niobium oxide Reviewed International journal

T. Onozato, T. Katase, A. Yamamoto, S. Katayama, K. Matsushima, N. Itagaki, H. Yoshida, H. Ohta

J. Phys.: Condens. Matter 28 ( 25 ) 2016.5

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1088/0953-8984/28/25/255001
Improvement of Charge Transportation in Si Quantum Dot-Sensitized Solar Cells Using Vanadium Doped TiO2 Reviewed International journal

H. Seo, D. Ichida, S. Hashimoto, N. Itagaki, K. Koga, M. Shiratani, S. H. Nam and J. H. Boo

J. Nanosci. Nanotechnol. 16 ( 5 ) 2016.5

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1166/jnn.2016.12210
Quantum Characterization of Si Nano-Particles Fabricated by Multi-Hollow Discharge Plasma Chemical Vapor Deposition Reviewed International journal

H. Seo, G. Uchida, N. Itagaki, K. Koga, and M. Shiratani

Sci. Adv. Mater. 8 ( 3 ) 2016.3

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1166/sam.2016.2520
Polymer Counter Electrode of Poly(3,4-ethylenedioxythiophene):poly(4-styrenesulfonate) Containing TiO2 Nano-particles for Dye-sensitized Solar Cells Reviewed International journal

H. Seo, M.-K. Son, N. Itagaki, K. Koga, M. Shiratani

Journal of Power Sources 307 2016.3

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.jpowsour.2015.12.112
Room Temperature Fabrication of (ZnO)x(InN)1-x films with Step-Terrace Structure by RF Magnetron Sputtering Reviewed International journal

K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

MRS Advances 1 ( 2 ) 2016.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1557/adv.2015.59
Effects of deposition rate and ion bombardment on properties of a-C:H films deposited by H-assisted plasma CVD method Reviewed International journal

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Jpn. J. Appl. Phys. 55 ( 1S ) 2016.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.55.01AA11
Effects of Gas Flow Rate on Deposition Rate and Amount of Si Clusters Incorporated into a-Si:H Films Reviewed International journal

S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, and M. Shiratani

Jpn. J. Appl. Phys. 55 ( 1S ) 2016.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.55.01AA19
Simple method of improving harvest by nonthermal air plasma irradiation of seeds of Arabidopsis thaliana (L.) Reviewed International journal

K. Koga, T. Sarinont, T. Amano, H. Seo, N. Itagaki, N. Hayashi, M. Shiratani

Appl. Phys. Express 9 ( 1 ) 2015.12

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/APEX.9.016201
水素プラズマとカーボン壁の相互作用で発生したダストに対するダスト除去フィルタのダスト除去性能評価

白谷正治, 古閑一憲, 立石瑞樹, 片山龍, 山下大輔, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 芦川直子, 時谷政行, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

九州大学超顕微解析研究センター報告 39 2015.12

　More details

Language：Japanese Publishing type：Research paper (scientific journal)
Synthesis of indium-containing nanoparticles using plasmas in water to study their effects on living body Reviewed International journal

T. Amano, K. Koga, T. Sarinont, H. Seo, N. Itagaki, M. Shiratani, S. Kitazaki, M. Hirata, Y. Nakatsu, A. Tanaka

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Attraction during binary collision of fine particles in Ar plasma Reviewed International journal

M. Soejima, T. Ito, D. Yamashita, N. Itagaki, H. Seo, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Cluster Incorporation into A-Si:H Films Deposited Using H 2 +SiH 4 Discharge Plasmas Reviewed International journal

S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Cross correlation analysis of plasma perturbation in amplitude modulated reactive dusty plasmas Reviewed International journal

T. Ito, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani, T. Kobayashi, S. Inagaki

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Deposition rate and etching rate due to neutral radicals and dust particles measured using QCMs together with a dust eliminating filter Reviewed International journal

R. Katayama, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, M. Tokitani, S. Masuzaki, K. Nishimura, A. Sagara, LHD Experimental Group

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Effects of Ambient Humidity on Plant Growth Enhancement by Atmospheric Air Plasma Irradiation to Plant Seeds Reviewed International journal

T. Sarinont, T. Amano, K. Koga, S. Kitazaki, N. Hayashi, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Effects of electrode structure on characteristics of multi-hollow discharges Reviewed International journal

Y. Torigoe, K. Keya, S. Toko, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Effects of N2 dilution on fabrication of Ge nanoparticles by rf sputtering Reviewed International journal

S. Hashimoto, S. Tanami, H. Seo, G. Uchida, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Laser trapped single fine particle as a probe of plasma parameters Reviewed International journal

D. Yamashita, M. Soejima, T. Ito, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Measurement of absolute density of N atom in sputtering plasma for epitaxial growth ZnO films via nitrogen mediated crystallization Reviewed International journal

T. Ide, K. Matsushima, T. Takasaki, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Measurements of absolute densities of nitrogen and oxygen atoms in sputtering plasma for fabrication of ZnInON films Reviewed International journal

K. Matsushima, T. Ide, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Measurements of nitrogen atom density in N2/Ar sputtering plasma for fabrication of high-mobility amorphous In2O3:Sn films Reviewed International journal

T. Takasaki, T. Ide, K. Matsushima, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Raman Spectroscopy of a-C:H Films Deposited Using Ar + H2+ C7H8 Plasma CVD Reviewed International journal

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Raman spectroscopy of PIN hydrogenated amorphous silicon solar cells Reviewed International journal

K. Keya, Y. Torigoe, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Simple Evaluation Method of Atmospheric Plasma Irradiation Dose using pH of Water Reviewed International journal

K. Koga, T. Sarinont, T. Amano, H. Seo, N. Itagaki, Y. Nakatsu, A. Tanaka, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Structural alternation of tandem dye-sensitized solar cells based on mesh-type of counter electrode Reviewed International journal

H. Seo, S. Hashimoto, D. Ichida, N. Itagaki, K. Koga and M. Shiratani

Electrochimica Acta 179 2015.10

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.electacta.2015.04.105
Substrate temperature dependence of Au-induced crystalline Ge film formation using sputtering deposition Reviewed International journal

S. Tanami, D. Ichida, D. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 68th GEC/9th ICRP/33rd SPP 60 ( 9 ) 2015.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Real-time mass measurement of dust particles deposited on vessel wall in a divertor simulator using quartz crystal microbalances Reviewed International journal

M. Tateishi, K. Koga, R. Katayama, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experiment Group

J. Nucl. Mater. 463 2015.8

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.jnucmat.2014.10.049
Fabrication of ZnInON/ZnO multi-quantum well solar cells Reviewed International journal

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Thin Solid Films 587 2015.7

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2015.01.012
Effects of cluster incorporation into hydrogenated amorphous silicon films in initial discharge phase on film stability Reviewed International journal

S. Toko, Y. Torigoe, W. Chen, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Thin Solid Films 587 2015.7

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2015.02.052
Effects of discharge voltage on the characteristics of a-C:H films prepared by H-assisted Plasma CVD method Reviewed International journal

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Trans. Mateｒ. Res. Soc. Jpn. 40 ( 2 ) 2015.7

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.14723/tmrsj.40.123
Fabrication of p-i-n solar cells utilizing ZnInON by RF magnetron sputtering Reviewed International journal

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Mat. Res. Soc. Symp. Proc. 1741 2015.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1557/opl.2015.248
ZnO-based semiconductors with tunable band gap for solar sell applications Invited Reviewed International journal

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Proc. SPIE photonics west 2015 9364 2015.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1117/12.2078114
Effects of morphology of buffer layers on ZnO/sapphire heteroepitaxial growth by RF magnetron sputtering Reviewed International journal

T. Ide, K. Matsushima, R. Shimizu, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Mat. Res. Soc. Symp. Proc. 1741 2015.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1557/opl.2015.87
Photovoltaic application of Si nanoparticles fabricated by multihollow plasma discharge CVD: Dye and Si co-sensitized solar cells Reviewed International journal

H. Seo, D. Ichida, S. Hashimoto, G. Uchida, N. Itagaki, K. Koga, and M. Shiratani

Jpn. J. Appl. Phys. 54 ( 1S ) 2015.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.54.01AD02
Synthesis and characterization of ZnInON semiconductor: a ZnO-based compound with tunable band gap Reviewed International journal

N. Itagaki, K. Matsushima, D. Yamashia, H. Seo, K. Koga, M. Shiratani

Mater. Res. Express 1 ( 3 ) 2014.9

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1088/2053-1591/1/3/036405
Growth mechanism of ZnO deposited by nitrogen mediated crystallization Reviewed International journal

I. Suhariadi, M. Shiratani, N. Itagaki

Mater. Res. Express 1 ( 3 ) 2014.9

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1088/2053-1591/1/3/036403
Performance enhancement of dye and Si quantum dot hybrid nanostructured solar cell with TiO2 barrier Reviewed International journal

H. Seo, D. Ichida, S. Hashimoto, G. Uchida, N. Itagaki, K. Koga, and M. Shiratani

Trans. Mateｒ. Res. Soc. Jpn. 39 ( 3 ) 2014.9

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.14723/tmrsj.39.321
Off-axis sputter deposition of ZnO films on c-sapphire substrates by utilizing nitrogen-mediated crystallization method Reviewed International journal

N. Itagaki, K. Kuwahara, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Opt. Engineering 53 ( 8 ) 2014.8

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1117/1.OE.53.8.087109
SiC Nanoparticle Composite Anode for Li-Ion Batteries Reviewed International journal

M. Shiratani, K. Kamataki, G. Uchida, K. Koga, H. Seo, N. Itagaki, T. Ishihara

Mat. Res. Soc. Symp. Proc. 1678 2014.7

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1557/opl.2014.742
Plasma etching of single fine particle trapped in Ar plasma by optical tweezers Reviewed International journal

T. Ito, K. Koga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida and M. Shiratani

J. Phys. : Conf. Series (SPSM26) 518 ( 1 ) 2014.6

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1088/1742-6596/518/1/012014
Contribution of H2 plasma etching to radial profile of amount of dust particles in a divertor simulator Reviewed International journal

M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura and A. Sagara, the LHD Experimental Group

J. Phys. : Conf. Series (SPSM26) 518 ( 1 ) 2014.6

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1088/1742-6596/518/1/012009
Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD Reviewed International journal

S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

J. Phys. : Conf. Series (SPSM26) 518 ( 1 ) 2014.6

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1088/1742-6596/518/1/012008
Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method Reviewed International journal

D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

J. Phys. : Conf. Series (SPSM26) 518 ( 1 ) 2014.6

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1088/1742-6596/518/1/012002
Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency Reviewed International journal

Y. Hashimoto, S. Toko, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

J. Phys. : Conf. Series (SPSM26) 518 ( 1 ) 2014.6

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1088/1742-6596/518/1/012007
Emission spectroscopy of Ar + H-2+ C7H8 plasmas: C7H8 flow rate dependence and pressure dependence Reviewed International journal

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine and M. Hori

J. Phys. : Conf. Series (SPSM26) 518 ( 1 ) 2014.6

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1088/1742-6596/518/1/012010
Infrared Plasmonics via ZnO Reviewed International journal

J. W. Allen, M. S. Allen, D. C. Look, B. R. Wenner, N. Itagaki, K. Matsushima, I. Surhariadi

J. Nano Res. 28 2014.6

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.4028/www.scientific.net/JNanoR.28.109
スパッタリング成膜法による高品質酸化亜鉛薄膜の形成 Reviewed

板垣奈穂、古閑一憲、白谷正治

応用物理 83 ( 5 ) 2014.5

　More details

Language：Japanese Publishing type：Research paper (scientific journal)
Nanostructure Control of Si and Ge Quantum Dots Based Solar Cells Using Plasma Processes Reviewed International journal

M. Shiratani, G. Uchida, H. Seo, D. Ichida, K. Koga, N. Itagaki, and K. Kamataki

Materials Science Forum 783-786 2014.5

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.4028/www.scientific.net/MSF.783-786.2022
Performance dependence of Si quantum dot-sensitized solar cells on counter electrode Reviewed International journal

H. Seo, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Jpn. J. Appl. Phys. 53 ( 5S1 ) 2014.5

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.53.05FZ01
Study on the Crystal Growth Mechanism of ZnO Films Fabricated Via Nitrogen Mediated Crystallization Reviewed International journal

I. Suhariadi, K. Oshikawa, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, and N. Itagaki

Jpn. Phys. Soc. Conf. Proc (APPC12) 1 2014.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.7566/JPSCP.1.015064
Combinatorial Plasma CVD of Si Nanoparticle Composite Films for Band Gap Control Reviewed International journal

G. Uchida, Y. Kanemitsu, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Jpn. Phys. Soc. Conf. Proc (APPC12) 1 2014.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.7566/JPSCP.1.015080
Correlation between nanoparticle growth and plasma parameters in low pressure reactive VHF discharge plasmas Reviewed International journal

M. Shiratani, Y. Morita, K. Kamataki, H. Seo, G. Uchida, N. Itagaki, K. Koga

Jpn. Phys. Soc. Conf. Proc (APPC12) 1 2014.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.7566/JPSCP.1.015083
Deposition of Carbon Films on PMMA Using H-assisted Plasma CVD Reviewed International journal

X. Dong, R. Torigoe, K. Koga, G. Uchida, M. Shiratani, N. Itagaki, Y. Setsuhara, K. Takenaka, M. Sekine, .M. Hori

Jpn. Phys. Soc. Conf. Proc (APPC12) 1 2014.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.7566/JPSCP.1.015072
Effects of Grid DC Bias on Incorporation of Si Clusters into Amorphous Silicon Thin Films in Multi-Hollow Discharge Plasma CVD Reviewed International journal

S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

Jpn. Phys. Soc. Conf. Proc (APPC12) 1 2014.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.7566/JPSCP.1.015069
Effects of H2 Gas Addition on Structure of Ge Nanoparticle Films Deposited by High-pressure RF Magnetron Sputtering Method Reviewed International journal

G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Jpn. Phys. Soc. Conf. Proc (APPC12) 1 2014.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.7566/JPSCP.1.015082
Electrochemical impedance analysis on the additional layers for the enhancement on the performance of dye-sensitized solar cell Reviewed International journal

H. Seo, M. Son, S. Park, M. Jeong, H. Kim, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Thin Solid Films 554 2014.3

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2013.08.103
Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization Invited Reviewed International journal

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Proc. SPIE photonics west 2014 8987 2014.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1117/12.2041081
Spatial Profile of Flux of Dust Particles Generated due to Interaction between Hydrogen Plasmas and Graphite Target Reviewed International journal

M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

Jpn. Phys. Soc. Conf. Proc (APPC12) 1 2014.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.7566/JPSCP.1.015020
Substrate temperature dependence of hydrogen content of a-Si:H film deposited with a cluster-eliminating filter Reviewed International journal

Y. Hashimoto, S. Toko, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
A model for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas Reviewed International journal

M. Shiratani, K. Koga, K. Kamataki, S. Iwashita, Y. Morita, H. Seo, N. Itagaki, G. Uchida

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Analysis of fluctuation of Ar metastable density and nanoparticle amount in capacitively coupled discharges with amplitude modulation Reviewed International journal

Y. Morita, T. Ito, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Analysis on the photovoltaic property of Si quantum dot-sensitized solar cells Reviewed International journal

H. Seo, D. Ichida, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Int. J. Precision Eng. Manuf. 15 ( 2 ) 2014.2

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1007/s12541-014-0343-8
Combinatorial evaluation of optical properties of crystalline Si nanoparticle embedded Si films deposited by a multi-hollow discharge plasma CVD method Reviewed International journal

Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Coupling between radicals and nanoparticles in initial growth phase in reactive plasmas with amplitude modulation (Invited) Invited Reviewed International journal

K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Deposition of Crystalline Ge Nanoparticle Films Varying H2 Dilution Ratio Using High Pressure rf Magnetron Sputtering Reviewed International journal

S. Hashimoto, D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Effects of amplitude modulation on deposition of hydrogenated amorphous silicon films using multi-Hollow discharge plasma CVD method Reviewed International journal

Y. Torigoe, Y. Hashimoto, S. Toko, Y. Kim, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Epitaxial growth of ZnO films on sapphire substrates by magnetron sputtering: Effects of buffer layers prepared via nitrogen mediated crystallization Reviewed International journal

T. Ide, K. Matsushima, R. Shimizu, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Fabrication of In-rich ZnInON filmswith narrow band gap by RF magnetron sputtering Reviewed International journal

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Fabrication of SiC nanoparticles as high capacity electrodes for Li-ion batteries Reviewed International journal

G. Uchida, K. Kamataki, D. Ichida, Y. Morita, H. Seo, N. Itagaki, K. Koga, T. Ishihara, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Fabrication of size-controlled Ge nanoparticle films varying gas flow rate using high pressure rf magnetron sputtering method Reviewed International journal

D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Fine response of deposition rate of Si films deposited by multi-hollow discharge plasma CVD with amplitude modulation Reviewed International journal

S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Magnetron sputtering of low-resistive In2O3:Sn films with buffer layers fabricated via nitrogen mediated crystallization Reviewed International journal

K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Nanoparticle amount in reactive plasmas with amplitude modulation detected by twodimensional laser light scattering method Reviewed International journal

T. Ito, Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Pressure dependence of carbon film deposition using H-assisted plasma CVD Reviewed International journal

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, K. Takenaka, Y. Setsuhara, M. Sekine, M. Hori

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Quantum characterization and photovoltaic application of Si nano-particles fabricated by multi-hollow plasma discharge chemical vapor deposition Reviewed International journal

H. Seo, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Raman spectroscopy of a fine particle optically trapped in plasma Reviewed International journal

D. Yamashita, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Spatial profile of flux of dust particles in hydrogen helicon plasmas Reviewed International journal

M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Sputter Deposition of Ga-doped Zinc Oxide (GZO) Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization Reviewed International journal

T. Nakanishi, K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Sputtering fabrication of a novel widegap semiconductor ZnGaON for optoelectronic devices with wide bandgap for optical device Reviewed International journal

R. Shimizu, K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Study on nitrogen desorption behavior of sputtered ZnO for transparent conducting oxide Reviewed International journal

I. Suhariadi, K. Oshikawa, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Subacute toxicity of gallium arsenide, indium arsenide and arsenic trioxide following intermittent intrantracheal instillations to the lung of rats Reviewed International journal

A. Tanaka, M. Hirata, K. Koga, N. Itagaki, M. Shiratani, N. Hayashi, G. Uchida

Proc. 8th Int. Conf. Reactive Plasmas 2014.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas Reviewed International journal

M. Shiratani, K. Koga, K. Kamataki, S. Iwashita, G. Uchida, H. Seo, and N. Itagaki

Jpn. J. Appl. Phys. 53 ( 1 ) 2014.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.53.010201
The improvement on the performance of quantum dot-sensitized solar cells with functionalized Si Reviewed International journal

H. Seo, Y. Wang, M. Sato, G. Uchida, K. Koga, N. Itagaki, K. Kamataki, M. Shiratani

Thin Solid Films 546 2013.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2013.04.073
Characteristics of Crystalline Silicon/Si Quantum Dot/Poly(3,4-ethylenedioxythiophene) Hybrid Solar Cells Reviewed International journal

G. Uchida, Y. Wang, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Jpn. J. Appl. Phys. 52 ( 11S ) 2013.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.52.11NA05
Correlation between Volume Fraction of Silicon Clusters in Amorphous Silicon Films and Optical Emission Properties of Si and SiH Reviewed International journal

Y. Kim, K. Hatozaki, Y. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, H. Seo, K. Koga, and M. Shiratani

Jpn. J. Appl. Phys. 52 ( 11S ) 2013.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.52.11NA07
Effects of Nitrogen on Crystal Growth of Sputter-Deposited ZnO Films for Transparent Conducting Oxide Reviewed International journal

I. Suhariadi, K. Oshikawa, K. Kuwahara, K. Matsushima, D. Yamashita, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

Jpn. J. Appl. Phys. 52 ( 11S ) 2013.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.52.11NB03
Epitaxial Growth of ZnInON Films with Tunable Band Gap from 1.7 eV to 3.3 eV on ZnO Templates Reviewed International journal

K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

Jpn. J. Appl. Phys. 52 ( 11S ) 2013.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.52.11NM06
Flux Control of Carbon Nanoparticles Generated due to Interactions between Hydrogen Plasmas and Graphite Using DC-Biased Substrates Reviewed International journal

K. Koga, M. Tateishi, K. Nishiyama, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, Akiko Sagara, the LHD Experimental Group

Jpn. J. Appl. Phys. 52 ( 11S ) 2013.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.52.11NA08
Improvement on the Electron Transfer of Dye-Sensitized Solar Cell Using Vanadium Doped TiO2 Reviewed International journal

H. Seo, Y. Wang, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, S. Nam, J. Boo

Jpn. J. Appl. Phys. 52 ( 11S ) 2013.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.52.11NM02
Study on the Fabrication of Paint-Type Si Quantum Dot-Sensitized Solar Cells Reviewed International journal

H. Seo, M. Son, H. Kim, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Jpn. J. Appl. Phys. 52 ( 10S ) 2013.10

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.52.10MB07
Characteristics of photocurrent generation in the near-ultraviolet region in Si quantum-dot sensitized solar cells Reviewed International journal

G. Uchida, M. Sato, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Thin Solid Films 544 2013.10

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2013.04.111
ナノ材料のプラズマプロセシングの研究の現状と将来

白谷正治, 古閑一憲, 内田儀一郎, Hyunwoong Seo, 板垣奈穂, 岩下伸也

表面科学 34 ( 10 ) 2013.10

　More details

Language：Japanese Publishing type：Research paper (scientific journal)
Effects of nanoparticle incorporation on properties of microcrystalline films deposited using multi-hollow discharge plasma CVD Reviewed International journal

Y. Kim, T. Matsunaga, K. Nakahara, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Surf. Coat. Technol. 228 ( 1 ) 2013.8

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.surfcoat.2012.04.029
Effects of DC Substrate Bias Voltage on Dust Flux in the Large Helical Device Reviewed International journal

K. Koga, K. Nishiyama, Y. Morita, G. Uchida, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

J. Nucl. Mater. 438 2013.7

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.jnucmat.2013.01.154
Observation of nanoparticle growth process using a high speed camera International journal

Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga, and M. Shiratani

ISPC 21 Proceedings 2013.7

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Discharge power dependence of carbon dust flux in a divertor simulator Reviewed International journal

K. Nishiyama, Y. Morita, G. Uchida, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, and H. Kersten

J. Nucl. Mater. 438 2013.7

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.jnucmat.2013.01.169
Growth control of ZnO nano-rod with various seeds and photovoltaic application Reviewed International journal

H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

J. Phys. : Conference Series (11th APCPST) 441 ( 1 ) 2013.6

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1088/1742-6596/441/1/012029
Characterization of the energy flux toward the substrate during magnetron sputter deposition of ZnO thin films Reviewed International journal

S. Bornholdt, N. Itagaki, K. Kuwahara, H. Wulff, M. Shiratani and H. Kersten

Plasma Sources Sci. Technol. 22 ( 2 ) 2013.4

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1088/0963-0252/22/2/025019
Analysis on the effect of polysulfide electrolyte composition for higher performance of Si quantum dot-sensitized solar cells Reviewed International journal

H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Electrochimica Acta 95 ( 1 ) 2013.4

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.electacta.2013.02.026
Model for Thickness dependence of mobility and concentration in highly conductive ZnO Invited Reviewed International journal

D. C. Look, K. D. Leedy, A. Kiefer, B. Claflin, N. Itagaki, K. Matsushima, I. Surhariadi

Opt. Engineering 52 ( 3 ) 2013.3

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1117/1.OE.52.3.033801
Control of Deposition Profile and Properties of Plasma CVD Carbon Films Reviewed International journal

K. Koga, T. Urakawa, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani

Proc. 13th International Conference on Plasma Surface Engineering 2 ( 26 ) 2013.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Control of nanoparticle formation in reactive plasmas and its application to fabrication of green energy devices Invited Reviewed International journal

M. Shiratani, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga

Proc. 13th International Conference on Plasma Surface Engineering 2 ( 26 ) 2013.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Crystallinity control of sputtered ZnO films by utilizing buffer layers fabricated via nitrogen mediated crystallization: Effects of nitrogen flow rate Reviewed International journal

N. Itagaki, K. Oshikawa, K. Matsushima, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

Proc. 13th International Conference on Plasma Surface Engineering 2 ( 26 ) 2013.3

　More details

Language：English Publishing type：Research paper (international conference proceedings)
The reduction of charge recombination and performance enhancement by the surface modification of Si quantum dot-sensitized solar cell Reviewed International journal

H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Electrochimica Acta 87 ( 1 ) 2013.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.electacta.2012.09.087
Dust particle formation due to interaction between graphite and helicon deuterium plasmas Reviewed International journal

S. Iwashita, K. Nishiyama, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Fusion Engineering and Design 88 ( 1 ) 2013.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.fusengdes.2012.10.002
Effects of Hydrogen Dilution on ZnO Thin Films Fabricated via Nitrogen Mediated Crystallization Reviewed International journal

I. Suhariadi, K. Matsushima, K. Kuwahara, K. Oshikawa, D. Yamashita, H. Seo, G. Uchida, K. Kamtaki, K. Koga, M. Shiratani, S. Bornholdt, H. Kersten, Harm Wulff, N. Itagaki

Jpn. J. Appl. Phys. 52 ( 1S ) 2013.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.52.01AC08
High Amount Cluster Incorporation in Initial Si Film Deposition by SiH4 Plasma Chemical Vapor Deposition Reviewed International journal

Y. Kim, K. Hatozaki, Y. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, H. Seo, K. Koga, M. Shiratani

Jpn. J. Appl. Phys. 52 ( 1S ) 2013.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.52.01AD01
Improvement of Si Adhesion and Reduction of Electron Recombination for Si Quantum Dot-Sensitized Solar Cells Reviewed International journal

H. Seo, Y. Wang, M. Sato, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Jpn. J. Appl. Phys. 52 ( 1S ) 2013.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.7567/JJAP.52.01AD05
Sputter deposition of Epitaxial Zinc-Indium Oxynitride Films for Excitonic Transistors (Invited) Invited Reviewed International journal

N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

Proc. International Symposium on Dry Process 34 2012.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Control of radial density profile of nano-particle produced in reactive plasma by amplitude modulation of rf discharge voltage Reviewed International journal

K. Kamataki, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

Thin Solid Films 523 2012.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2012.07.059
Effects of crystalline nanoparticle incorporation on growth, structure, and properties of microcrystalline silicon films deposited by plasma CVD Reviewed International journal

Y. Kim, T. Matsunaga, K. Nakahara ,G. Uchida, K. Kamataki , N. Itagaki, H. Seo, K. Koga, M. Shiratani

Thin Solid Films 523 2012.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2012.06.023
ZnO:Al Thin Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization: Effects of N2/Ar Gas Flow Rate Ratio Reviewed International journal

I. Suhariadi, N. Itagaki, K. Kuwahara, K. Oshikawa, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, K. Nakahara, M. Shiratani

Trans. Mateｒ. Res. Soc. Jpn. 37 ( 2 ) 2012.6

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.14723/tmrsj.37.165
High quality epitaxial ZnO films grown on solid-phase crystallized buffer layers Reviewed International journal

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

Thin Solid Films 520 ( 14 ) 2012.5

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2011.10.136
The Optical Analysis and Application of Size-controllable Si Quantum Dots Fabricated by Multi-hollow Discharge Plasma Chemical Vapor Deposition Reviewed International journal

H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Mat. Res. Soc. Symp. Proc. 1426 2012.4

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1557/opl.2012.890
Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition Reviewed International journal

M. Shiratani, K. Hatozaki, Y. Hashimoto, Y. Kim, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga

Mat. Res. Soc. Symp. Proc. 1426 2012.4

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1557/opl.2012.1245
In situ analysis of size dispersion of nano-particles in reactive plasma using two dimentional laser light scattering method Reviewed International journal

K. Kamataki, Y. Morita, M. Shiratani, K. Koga, G. Uchida, N. Itagaki

Journal of Instrumentation 7 ( 4 ) 2012.4

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1088/1748-0221/7/04/C04017
In-situ Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances Reviewed International journal

Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Mat. Res. Soc. Symp. Proc. 1426 2012.4

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1557/opl.2012.839
Novel fabrication method for ZnO films via nitrogen-mediated crystallization (Invited) Invited Reviewed International journal

N. Itagaki, K. Kuwahara, K. Matsushima, K. Oshikawa

Proc. of SPIE photonics west 2012 8263 2012.1

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1117/12.911971
Combinatorial Deposition of Microcrystalline Silicon Films Using Multihollow Discharge Plasma Chemical Vapor Deposition Reviewed International journal

K. Koga, T. Matsunaga, Y. Kim, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, and M. Shiratani

Jpn. J. Appl. Phys. 51 ( 1 ) 2012.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1143/JJAP.51.01AD02
Deposition of cluster-free B-doped a-Si:H films using SiH4+B10H14 multi-hollow discharge plasma CVD Reviewed International journal

K. Koga, K. Nakahara, Y. Kim, T. Matsunaga, D.Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani

Jpn. J. Appl. Phys. 51 ( 1 ) 2012.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1143/JJAP.51.01AD03
Effect of nitridation of Si nano-particles on the performance of quantum-dot sensitized solar cells Reviewed International journal

G. Uchida, K. Yamamoto, M. Sato, Y. Kawashima, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Jpn. J. Appl. Phys. 51 ( 1 ) 2012.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1143/JJAP.51.01AD01
Zno films with buffer layers crystallized via nitrogen mediation: Effects of deposition temperature of buffer layers Reviewed International journal

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

Proc. PVSEC-21 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Collection of carbon dust particles formed due to plasma-wall interactions between high density H2 plasma and carbon wall onto substrates by applying local DC bias voltage International journal

K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, H. Kersten

Proc. Plasma Conf. 2011 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Deposition of cluster-free a-Si:H films using cluster eliminating filter International journal

K. Nakahara, K. Hatozaki, Y. Hashimoto, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Deposition of highly stable cluster-free a-Si:H films using fast gas flow multi-hollow discharge plasma CVD method International journal

K. Hatozaki, K. Nakahara, T. Matsunaga, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Effects of electrolyte on performance of quantum dot-sensitized solar cells using Si nanoparticles synthesized by multi-hollow discharge plasma CVD International journal

Y. Wang, M. Sato, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Effects of N2 gas addition to sputtering plasma on properties of epitaxial ZnO films International journal

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, Seo H., G. Uchida, K. Kamataki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Effects of nanoparticle incorporation on Si thin films deposited by plasma CVD International journal

M. Shiratani, Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga

Proc. Plasma Conf. 2011 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Influence of nano-particles on multi-hollow discharge plasma for microcrystalline silicon thin films deposition International journal

T. Matsunaga, Y. Kim, K. Koga, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Proc. Plasma Conf. 2011 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Low resistive ZnO:Al films with ZnO buffer layers fabricated by Ar/N2 magnetron sputtering International journal

N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, K. Kamataki, H. Seo, G. Uchida, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Performance enhancement of Si quantum dot-sensitized solar cells by surface modification using ZnO barrier layer International journal

Y. Wang, M. Sato, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Intern. Symp. on Dry Process 33 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Radical Flux Evaluation to Microcrystalline Silicon Films Deposited by Multi-Hollow Discharge Plasma CVD International journal

Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. Plasma Conf. 2011 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Self-organized carbon Mk formation on the top surface of fine trenches using a low temperature plasma anisotropic CVD for depositing fine organic structure International journal

K. Koga, T. Urakawa, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. Plasma Conf. 2011 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD International journal

K. Kamataki, K. Koga, G. Uchida, H. Seo, N. Itagaki, M. Shiratani

Proc. Plasma Conf. 2011 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Combinatorial study on effects of substatrate temperature of silicon film deposition using multi-hollow discharge plasma cvd Reviewed International journal

Y. Kim, T. Matsunaga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

Proc. PVSEC-21 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Defect density of cluster-free a-si:h films deposited by multi-hollow discharge plasma CVD Reviewed International journal

K. Nakahara, K. Hatozaki, M. Sato, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. PVSEC-21 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Effects of nano-particles on (220) crystal orientation of microcrystallite silicon thin films Reviewed International journal

T. Matsunaga, Y. Kim, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Proc. PVSEC-21 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Properties and performance of si quantum dot-sensitized solar cells with low temperature titania paste Reviewed International journal

Y. Wang, M. Sato, T. Matsunaga, N. Itagaki, H. Seo, G. Uchida, K. Koga, M. Shiratani

Proc. PVSEC-21 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Zinc oxide-based transparent conducting films with buffer layers fabricated via nitrogen-mediated crystallization Reviewed International journal

N. Itagaki, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

Proc. PVSEC-21 2011.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Surface nitridation of silicon nano-particles using double multi-hollow discharge plasma CVD Reviewed International journal

G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani

Physica Status Solidi (c) 8 ( 10 ) 2011.10

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1002/pssc.201001230
Deposition of cluster-free P-doped a-Si:H films using SiH4+PH3 multi-hollow discharge plasma CVD method Reviewed International journal

K. Koga, K. Nakahara, Y. Kim, Y. Kawashima, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani

Physica Status Solidi (c) 8 ( 10 ) 2011.10

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1002/pssc.201100229
Hybrid sensitized solar cells using Si nanoparticles and ruthenium dye Reviewed International journal

G. Uchida, Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani

Physica Status Solidi (c) 8 ( 10 ) 2011.10

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1002/pssc.201100166
Impacts of Amplitude Modulation of RF Discharge Voltage on the Growth of Nanoparticles in Reactive Plasma Reviewed International journal

K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, M. Shiratani

Appl. Phys. Express 4 ( 10 ) 2011.10

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1143/APEX.4.105001
Impacts of Plasma Fluctuations on Growth of Nano-Particles in Reactive Plasma International journal

K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

Proc. of International Conference on Phenomena in Ionized Gases（ICPIG） 2011 Conference 2011.9

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Comparison between silicon thin films with and without incorporating crystalline silicon nanoparticles into the film Reviewed International journal

K. Koga, Y. Kawashima, T. Matsunaga, M. Sato, K. Nakahara, W. M. Nakamura, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Thin Solid Films 519 ( 20 ) 2011.8

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2011.01.408
Combinatorial study of substrate temperature dependence on properties of silicon films deposited using multihollow discharge plasma CVD International journal

Y. Kim, T. Matsunaga, Y. Kawashima, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

Proc. of The 20th International Symposium on Plasma Chemistry （ISPC20） 2011.7

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Nano-factories in plasma: present status and outlook Reviewed International journal

M. Shiratani, K. Koga, S. Iwashita, G. Uchida, N. Itagaki, K. Kamataki

J. Phys. D: Appl. Phys. 44 ( 17 ) 2011.5

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1088/0022-3727/44/17/174038
Novel Fabrication Method for Transparent Conducting Oxide Films Utilizing Solid-Phase Crystallized Seed Layers Invited Reviewed International journal

N. Itagaki, K. Kuwahara, K. Nakahara

Proc. Int. Conf. Advances in Condensed and Nano Materials 2011 1393 2011.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1063/1.3653599
Generation and Surface Modification of Si nano-particles using SiH4/H2 and N2 multi-hollow discharges and their application to the third generation photovoltaics Invited Reviewed International journal

K. Koga, G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Kamataki, N. Itagaki, M. Shiratani

International Conference on Advances in Condensed and Nano Materials (ICACNM) 1393 2011.2

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1063/1.3653600
Novel fabrication method of ZnO films utilizing solid-phase crystallized seed layers Reviewed International journal

N. Itagaki, K. Kuwahara

Mat. Res. Soc. Symp. Proc. 1315 2011.1

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1557/opl.2011.709
Highly Conducting and Very Thin ZnO:Al Films with ZnO Buffer Layer Fabricated by Solid Phase Crystallization from Amorphous Phase Reviewed International journal

N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, G. Uchida, K. Koga, M. Shiratani

Appl. Phys. Express 4 ( 1 ) 2011.1

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1143/APEX.4.011101
Novel fabrication method for oxide semiconductors via atomic-additive mediated crystallization Invited Reviewed International journal

N. Itagaki

Proc. IEEE TENCON 2010 2010.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1109/TENCON.2010.5686461
Optical and Electrical Properties of Particle Composite Thin Films deposited in SiH4/H2 and N2 Multi-Hollow Discharges International journal

G. Uchida, M. Sato, Y. Kawashima, K. Yamamoto, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

Proc. of MNC2010 2010.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Substrate Temperature Dependence of Sticking Probability of SiOx-CH3 Nano-Particles International journal

H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. of International Symposium on Dry Process 2010.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Cluster-Free B-Doped a-Si:H Films Deposited Using SiH4 + B10H14 Multi-Hollow Discharges Reviewed International journal

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010 2010.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1109/TENCON.2010.5686686
Deposition profiles of microcrystalline silicon films using multi-hollow discharge plasma CVD Reviewed International journal

T. Matsunaga, Y. Kawashima, K. Koga, K. Nakahara, W. M. Nakamura, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

Proc. IEEE TENCON 2010 2010.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1109/TENCON.2010.5686679
Effects of Amplitude Modulation of rf Discharge Voltage on Growth of Nano-Particles in Reactive Plasma Reviewed International journal

K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

Proc. IEEE TENCON 2010 2010.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1109/TENCON.2010.5686456
Effects of Ar addition on breakdown voltage in a Si(CH3)2(OCH3)2 RF discharge Reviewed International journal

G. Uchida, S. Nunomutra, H. Miyata, S. Iwashita, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. IEEE TENCON 2010 2010.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1109/TENCON.2010.5686704
Fluctuation Control for Plasma Nanotechnologies Reviewed International journal

M. Shiratani, K. Koga, G. Uchida, N. Itagaki, K. Kamataki

Proc. IEEE TENCON 2010 2010.11

　More details

Language：English Publishing type：Research paper (international conference proceedings)

プラズマナノテクノロジーで最重要課題となっている揺らぎの制御に関する現状と将来を展望した論文。

DOI： 10.1109/TENCON.2010.5685920
Generation of nitridated silicon particles and their thin film deposition using double multi-hollow discharges International journal

G. Uchida, M. Sato, Y. Kawashima, K. Nakahara, K. Yamamoto, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma 55 ( 7 ) 2010.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Carbon dust particles generated due to H2 plasma-carbon wall interaction International journal

H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, G. Uchida, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, LHD experimental group

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma 55 ( 7 ) 2010.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Combinatorial deposition of microcrystalline Si films using multi-hollow discharge plasma CVD International journal

T. Matsunaga, Y. Kawashima, K. Koga, W. M. Nakamura, K. Nakahara, H. Matsuzaki, D. Yamashita, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma 55 ( 7 ) 2010.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Deposition rate enhancement of cluster-free P-doped a-Si:H films using multi-hollow discharge plasma CVD method International journal

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma 55 ( 7 ) 2010.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Si quantum dot-sensitized solar cells using Si nanoparticles produced by plasma CVD Reviewed International journal

Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

Proc. 35th IEEE Photovoltaic Specialists Conf. 2010.7

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1109/PVSC.2010.5617205
Deposition of cluster-free P-doped a-Si:H films using a multi-hollow discharge plasma CVD method Reviewed International journal

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Proc. 35th IEEE Photovoltaic Specialists Conf. 2010.7

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1109/PVSC.2010.5616514
Materials, Devices, and Circuits of Transparent Amorphous-Oxide Semiconductor Reviewed International journal

H. Kumomi, S. Yaginuma, H. Omura, A.Goyal, A. Sato, M. Watanabe, M. Shimada, N. Kaji, K. Takahashi, M. Ofuji, T. Watanabe, N. Itagaki, H. Shimizu, K. Abe, Y. Tateishi, H. Yabuta, T. Iwasaki, R. Hayashi, T. Aiba, M. Sano

J. Display Technol. 5 ( 12 ) 2009.12

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1109/JDT.2009.2025521
Favorable Elements for an Indium-based Amorphous-oxide TFT Channel: Study of In-X-O (X=B, Mg, Al, Si, Ti, Zn, Ga, Ge, Mo, Sn) Systems Reviewed International journal

A. Goyal, T. Iwasaki, N. Itagaki, T. Den, and H. Kumomi

Mat. Res. Soc. Symp. Proc 1109 2009.5

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Zn-In-O based thin-film transistors: Compositional dependence Reviewed International journal

N. Itagaki, T. Iwasaki, H. Kumomi, T. Den, K. Nomura, T. Kamiya, and H. Hosono

Phys. Stat. Sol. (a) 205 ( 8 ) 2008.8

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1002/pssa.200778909
Combinatorial approach to thin-film transistors using multicomponent semiconductor channels: An application to amorphous oxide semiconductors in In-Ga-Zn-O system Reviewed International journal

T. Iwasaki, N. Itagaki, T. Den, H. Kumomi, K. Nomura, T. Kamiya, and H. Hosono,

Appl. Phys. Lett. 90 ( 24 ) 2007.6

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1063/1.2749177
Guiding Principles for Obtaining High-Quality Microcrystalline Silicon Growth Rates Using SiH4/H2 Glow-Discharge Plasma Reviewed International journal

C. Niikura, N. Itagaki, Matsuda

Jpn. J. Appl. Phys. 46 ( 5A ) 2007.5

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1143/JJAP.46.3052
High rate growth of high-quality microcrystalline silicon films from plasma by interconnected multi-hollow cathode Reviewed International journal

C. Niikura, N. Itagaki, and Matsuda

Surf. Coat. Technol. 201 ( 9-11 ) 2007.2

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.surfcoat.2006.07.009
Guiding Principles for Preparing High Quality Microcrystalline Silicon at High Growth Rates Reviewed International journal

C. Niikura, N. Itagaki, and A. Matsuda

Trans. Mater. Res. Soc. Jpn. 31 ( 2 ) 2006.6

　More details

Language：English Publishing type：Research paper (scientific journal)
Combinatorial study on In-Ga-Zn-O semiconductor films as active-channel layers for thin-film transistor Reviewed International journal

T. Iwasaki, N. Itagaki, T. Den, H. Kumomi, K. Nomura, T. Kamiya, and H. Hosono

Mat. Res. Soc. Symp. Proc. 928 2006.6

　More details

Language：English Publishing type：Research paper (international conference proceedings)

DOI： 10.1557/PROC-0928-GG10-04
Electron temperature measurement in SiH4/H2 ECR plasma produced by 915 MHz microwaves Reviewed International journal

N. Itagaki, K. Sasaki, Y. Kawai

Thin Solid Films 506 2006.5

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2005.08.087
Characteristics of the plasma parameters in the fabrication of microcrystalline silicon thin films using 915 MHz ECR plasma Reviewed International journal

D. Ha Thang, K. Sasaki, H. Muta, N. Itagaki, and Y. Kawai

Thin Solid Films 506 2006.5

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2005.08.064
Production of low electron temperature ECR plasma Reviewed International journal

Y. Kawai, N. Itagaki, M. Koga, and H. Muta

Surf. Coat. Technol. 193 ( 1-3 ) 2005.4

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.surfcoat.2004.08.141
Production of high density VHF plasma using a cathode with interconnected multi holes Reviewed International journal

N. Itagaki, C. Niikura, A. Matsuda and M. Kondo

Proc. Plasma Sci. Symp. 2005 and the 22th Symp. on plasma processing 2005.1

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Investigation of the Plasma Parameters in 915 MHz ECR Plasma with SiH4/H2 Mixtures Reviewed International journal

H. Muta, D. Ha Thang, N. Itagaki, and Y. Kawai

Proc. Plasma Sci. Symp. 2005 and the 22th Symp. on plasma processing 2005.1

　More details

Language：English Publishing type：Research paper (international conference proceedings)
High-rate growth of microcrystalline silicon films using a high-density SiH4/H2 glow-discharge plasma Reviewed International journal

C. Niikura, N. Itagaki, M. Kondo, Y. Kawai, and Matsuda

Thin Solid Films 457 ( 1 ) 2004.6

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2003.12.041
Control of the electron temperature by varying the resonance zone width in ECR plasma Reviewed International journal

N. Itagaki, K. Muta, N. Ishii and Y. Kawai

Thin Solid Films 457 ( 1 ) 2004.6

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.tsf.2003.12.014
Generation of a low-electron-temperature ECR plasma using mirror magnetic field Reviewed International journal

H. Muta, N. Itagaki, M. Koga, and Y. Kawai

Surf. Coat. Technol. 174 2003.9

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/S0257-8972(03)00525-5
Electron-temperature dependence of nitrogen dissociation in 915 MHz ECR plasma Reviewed International journal

N. Itagaki, S. Iwata, K. Muta, A. Yonesu, S. Kawakami, N. Ishii and Y. Kawai

Thin Solid Films 435 ( 1 ) 2003.7

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/S0040-6090(03)00395-X
Relationship between the electron temperature and the power absorption profile in ECR plasma Reviewed International journal

N. Itagaki, K. Muta, N. Ishii and Y. Kawai

Proc. 16th Intern. Symp. on Plasma Chemistry 2003.6

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Electron-temperature control in 915 MHz electron cyclotron resonance plasma Reviewed International journal

N. Itagaki, S. Kawakami, N. Ishii and Y. Kawai

J. Vac. Sci. Technol., A 20 ( 6 ) 2002.11

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1116/1.1513791
Production of low-electron-temperature electron cyclotron resonance plasma with large area using 915MHz microwave Reviewed International journal

N. Itagaki, S. Kawakami, N. Ishii and Y. Kawai

Vacuum 66 ( 3-4 ) 2002.8

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/S0042-207X(02)00138-0
Numerical investigation of the production mechanism of a low-temperature electron cyclotron resonance plasma Reviewed International journal

H. Muta, N. Itagaki, and Y. Kawai

Vacuum 66 ( 3-4 ) 2002.8

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/S0042-207X(02)00130-6
Numerical investigation of a low-electron-temperature ECR plasma in Ar/N2 mixtures Reviewed International journal

H. Muta, M. Koga, N. Itagaki, and Y. Kawai

Surf. Coat. Technol. 171 ( 1-3 ) 2002.7

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/S0257-8972(03)00261-5
Behavior of the molecular dissociation in 915 MHz ECR nitrogen plasma Reviewed International journal

N. Itagaki, S. Iwata, K. Muta, A. Yonesu, S. Kawakami, N. Ishii and Y. Kawai

Proc. 5th Intern. Conf. Reactive Plasmas 1 2002.7

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Production of low electron temperature ECR plasma for thin film deposition Reviewed International journal

N. Itagaki, Y. Ueda, N. Ishii and Y. Kawai

Surf. Coat. Technol. 142-144 2001.7

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/S0257-8972(01)01204-X
Production of low electron temperature ECR plasma for plasma application Reviewed International journal

N. Itagaki, S. Kawakami, N. Ishii and Y. Kawai

Proc. XXV Intern. Conf. Phenomena in Ionized Gases 2001.7

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Production of low electron temperature ECR plasma for plasma processing Reviewed International journal

N. Itagaki, Y. Ueda, N. Ishii and Y. Kawai

Thin Solid Films 390 ( 1-2 ) 2001.6

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/S0040-6090(01)00920-8
Investigation of ECR plasma uniformity from the point of view of production & confinement Reviewed International journal

N. Itagaki, T. Yoshizawa, Y. Ueda and Y. Kawai

Thin Solid Films 386 ( 2 ) 2001.5

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/S0040-6090(00)01635-7
Production of low-electron-temperature electron cyclotron resonance plasma using nitrogen gas in the mirror magnetic field Reviewed International journal

N. Itagaki, Y. Ueda, N. Ishii and Y. Kawai

Jpn. J. Appl. Phys. 40 ( 4A ) 2001.4

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1143/JJAP.40.2489
Effect of magnetic-mirror confinement on electron temperature control in ECR plasma Reviewed International journal

N. Itagaki, Y. Ueda, N. Ishii and Y. Kawai

J. Plasma Fusion Res. 4 2001.2

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/S0257-8972(01)01204-X
Production of low-electron-temperature ECR plasma using 915 MHz microwave Reviewed International journal

N. Itagaki, S. Kawakami, N. Ishii and Y. Kawai

Proc. Plasma Sci. Symp. 2001 and the 18th Symp. on plasma processing 2001.1

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Plasma parameter measurements and deposition of a-Si:H thin films in pulsed ECR plasma Reviewed International journal

N. Itagaki, A. Fukuda, T. Yoshizawa, M. Shindo, Y. Ueda and Y. Kawai

Surf. Coat. Technol. 131 ( 1-3 ) 2000.9

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/S0257-8972(00)00758-1
Effect of nanoscale inhomogeneity on blocking temperature of ZnO:Co films fabricated by using nitrogen-mediated crystallization

Marlis N. Agusutrisno, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoto Yamashita

MRS Advances 2024.7 （ ISSN:2731-5894 eISSN:2059-8521 ）

　More details

Publishing type：Research paper (scientific journal) Publisher：Springer Science and Business Media LLC

Diluted magnetic semiconductors (DMS) have attracted interest for the potential applications of spintronic devices. The origin of the temperature dependence of their ferromagnetism has been debated and has not been concluded yet. A potential conclusion is that nanoscale inhomogeneity largely affects the temperature dependence of the magnetization in DMS even if the structure and compositions are not largely different. We examined this hypothesis by implementing nitrogen-mediated crystallization consisting of sputtering deposition of amorphous film and solid-phase crystallization by thermal annealing. A series of samples with different inhomogeneities were prepared by changing the annealing time. No significant changes in the composition and the structure were observed after annealing for various times, while significant enhancements were observed in the coercivity, blocking temperature, and grain size. These results provide clear understanding in the temperature dependence of the ferromagnetism in DMS and direct evidence of the potential conclusion on the long-lasting debate. Graphical abstract: (Figure presented.)

DOI： 10.1557/s43580-024-00907-z

Web of Science

Scopus

researchmap

Other Link： https://link.springer.com/article/10.1557/s43580-024-00907-z/fulltext.html
Large-scale fabrication of thulium iron garnet film with perpendicular magnetic anisotropy using RF magnetron sputtering

Marlis N. Agusutrisno, Sora Obinata, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoto Yamashita

Japanese Journal of Applied Physics 63 ( 7 ) 07SP06 - 07SP06 2024.7 （ ISSN:0021-4922 eISSN:1347-4065 ）

　More details

Publishing type：Research paper (scientific journal) Publisher：IOP Publishing

Abstract

Large-scale fabrication of thulium iron garnet (TmIG) films on gadolinium gallium garnet (GGG) substrates, with a total area of 25 cm2, has been demonstrated by rotating substrate holders during on-axis sputtering. By optimizing the growth parameters based on the pressure and flow rate of the oxygen ratio, a Tm/Fe ratio of 0.65 was obtained, which is close to the stoichiometry of TmIG. The increase in post-annealing temperature has induced the growth of the TmIG structure by the strain of the lattice constant mechanism. At the highest post-annealing temperature, the crystal structure of TmIG (444) and the perpendicular magnetic anisotropy (PMA) were obtained. This result demonstrates the potential method for large-scale fabrication of TmIG film with PMA.

DOI： 10.35848/1347-4065/ad5aff

Web of Science

Scopus

researchmap

Other Link： https://iopscience.iop.org/article/10.35848/1347-4065/ad5aff/pdf
Response of lettuce seeds undergoing dormancy break and early senescence to plasma irradiation

Okumura, T; Anan, T; Shi, HP; Attri, P; Kamataki, K; Yamashita, N; Itagaki, N; Shiratani, M; Ishibashi, Y; Koga, K; Mildaziene, V

APPLIED PHYSICS EXPRESS 17 ( 5 ) 2024.5 （ ISSN:1882-0778 eISSN:1882-0786 ）

　More details

Publisher：Applied Physics Express

This study reports the response of lettuce seeds undergoing dormancy breaking and early senescence to DBD plasma irradiation. A heat map of germination percentages at 12 h reveals that dormancy has broken at 39 days' storage, and that one minute of plasma irradiation enhances germination in dormant seeds. Plasma irradiation does not affect those seeds where dormancy has already broken. Early senescence via storage was estimated using ESR measurements and the molecular modification of quercetin. This study reveals that lettuce seed susceptibility to plasma irradiation depends on storage duration and conditions, with dormancy state as a critical variable modulating the impact of plasma irradiation.

DOI： 10.35848/1882-0786/ad3798

Web of Science

Scopus
On-axis sputtering fabrication of Tm3Fe5O12 film with perpendicular magnetic anisotropy Reviewed International journal

M. N. Agusutrisno, C. H. Marrows, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, N. Yamashita

Thin Solid Films 788 ( 15 ) 140176 - 140176 2024.1 （ ISSN:0040-6090 eISSN:1879-2731 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

Thulium iron garnet, Tm3Fe5O12 with perpendicular magnetic anisotropy is fabricated using an on-axis sputtering technique followed by annealing, whereas previous reports have used unusual off-axis geometries. Stoichiometric Tm3Fe5O12 is obtained after the modification of the deposition conditions involving the position of the substrate relative to the cathode, which affects both the chemical and structural properties. The effective perpendicular magnetic anisotropy of 8.6 kJ/m3 is well in line with the results of previous studies using pulse laser deposition and off-axis sputtering. A maze domain pattern is observed, and the domain-wall energy is evaluated as 0.69 mJ/m2.

DOI： 10.1016/j.tsf.2023.140176

Web of Science

Scopus

researchmap
Prediction by a hybrid machine learning model for highmobility amorphous In2O3: Sn films fabricated by RF plasma sputtering deposition using a nitrogen-mediated amorphization method Reviewed International journal

K. Kamataki, H. Ohtomo, N. Itagaki, C. F. Lesly, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

J. Appl. Phys. 134 ( 16 ) 2023.10 （ ISSN:0021-8979 eISSN:1089-7550 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Journal of Applied Physics

In this study, we developed a hybrid machine learning technique by combining appropriate classification and regression models to address challenges in producing high-mobility amorphous In2O3:Sn (a-ITO) films, which were fabricated by radio-frequency magnetron sputtering with a nitrogen-mediated amorphization method. To overcome this challenge, this hybrid model that was consisted of a support vector machine as a classification model and a gradient boosting regression tree as a regression model predicted the boundary conditions of crystallinity and experimental conditions with high mobility for a-ITO films. Based on this model, we were able to identify the boundary conditions between amorphous and crystalline crystallinity and thin film deposition conditions that resulted in a-ITO films with 27% higher mobility near the boundary than previous research results. Thus, this prediction model identified key parameters and optimal sputtering conditions necessary for producing high-mobility a-ITO films. The identification of such boundary conditions through machine learning is crucial in the exploration of thin film properties and enables the development of high-throughput experimental designs.

DOI： 10.1063/5.0160228

Web of Science

Scopus

researchmap
Evaluation of Interaction Between Substrate and Nanoparticles Deposited by Plasma Chemical Vapor Deposition Reviewed

K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

Bull. Am. Phys. Soc. 2023.10

　More details

Language：English Publishing type：Research paper (scientific journal)
Health assessment of rice cultivated and harvested from plasma-irradiated seeds Reviewed International journal

T. Okumura, H. Tanaka, T. Nakao, T. Anan, R. Arita, M. Shiraki, K. Shiraki, T. Miyabe, D. Yamashita, K. Matsuo, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani, S. Hosoda, A. Tanaka, Y. Ishibashi, K. Koga

Sci. Rep. 13 ( 1 ) 17450 2023.10 （ ISSN:2045-2322 eISSN:2045-2322 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Scientific Reports

This study provides the health effects assessment of rice cultivated from plasma-irradiated seeds. The rice (Oryza sativa L.) cultivated from seeds with plasma irradiation showed a growth improvement (slope-ratios of with plasma to without plasma were 1.066, 1.042, and 1.255 for tiller, and earing, and ripening periods, respectively) and an 4% increase in yield. The cultivated rice was used for repeated oral administrations to mice for 4-week period. Distilled water and rice cultivated from seeds without plasma irradiation were also used as control. The weights of the lung, kidney, liver, and spleen, with corresponding average values of 0.22 g, 0.72 g, 2.1 g, and 0.17 g for w/ plasma group and 0.22 g, 0.68 g, 2.16 g, and 0.14 g for w/o plasma group, respectively, showing no effect due to the administration of rice cultivated from plasma-irradiated seeds. Nutritional status, liver function, kidney function, and lipid, neutral fat profiles, and glucose metabolism have no significant difference between with and without plasma groups. These results show no obvious subacute effects were observed on rice grains cultivated and harvested from the mother plant that experienced growth improvement by plasma irradiation. This study provides a new finding that there is no apparent adverse health effect on the grains harvested from the plasma-irradiated seeds.

DOI： 10.1038/s41598-023-43897-y

Web of Science

Scopus

PubMed

researchmap
Evaluation of Interaction Between Substrate and Nanoparticles Deposited by Plasma Chemical Vapor Deposition Reviewed

K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

Bull. Am. Phys. Soc. 2023.10

　More details

Language：English

researchmap
Low-temperature fabrication of silicon nitride thin films from a SiH4+N2 gas mixture by controlling SiNx nanoparticle growth in multi-hollow remote plasma chemical vapor deposition Reviewed International journal

K. Kamataki, Y. Sasaki, I. Nagao, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Mater Sci Semicond Process 164 2023.9 （ ISSN:1369-8001 eISSN:1873-4081 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Materials Science in Semiconductor Processing

High-quality amorphous silicon nitride (SiNx) thin films were fabricated by the controlled growth of nanoparticles during SiH4+N2 multi-hollow remote plasma chemical vapor deposition (CVD) at low substrate temperature 100 °C. Measurements from quartz crystal microbalances showed that a higher amount of nanoparticle incorporation in the SiNx film corresponded to a higher ratio of N/Si in the film, implying that the nanoparticles were nitrided in the plasma phase. We controlled the size of the nanoparticles by tuning the gas flow ratio of N2/SiH4 and the total gas flow rate. Transmission electron microscopy and energy-dispersive X-ray spectroscopy showed that smaller nanoparticles in the plasma led to a higher ratio of N/Si in the film and a lower hydrogen content. We attribute these results to the low heat capacity and large specific surface area of the nanoparticles, which enabled active chemical reactions on their surface in the plasma.

DOI： 10.1016/j.mssp.2023.107613

Web of Science

Scopus

researchmap
Control of Inhomogeneity and Magnetic Properties of ZnO:Co Films Grown by Magnetron Sputtering Using Nitrogen Reviewed International journal

M. N. Agusutrisno, R. Narishige, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, N. Yamashita

Mater Sci Semicond Process 162 2023.8 （ ISSN:1369-8001 eISSN:1873-4081 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Materials Science in Semiconductor Processing

We experimentally report the control of structural inhomogeneity and magnetic properties of Co-doped ZnO films using nitrogen mediated-crystallization. The ZnO:CoN were grown on a silicon substrate at room temperature by RF-magnetron sputtering using nitrogen and followed by a post-annealing treatment for 3 hours at 400 °C, 600 °C, 800 °C and 1000 °C in the air. This method induces changes in inhomogeneity properties comprised by microstructure and stoichiometry of each film, which are confirmed by X-ray diffraction, thermal desorption, and X-ray fluorescence measurements. The difference in inhomogeneity has led to the transformation in the magnetic properties. Films annealed at 400 °C, which showed the highest inhomogeneity, exhibited superparamagnetic-ferromagnetic properties. In contrast, all the other films exhibited diamagnetic properties. Increasing the post-annealing temperature above 400 °C reduces inhomogeneities indicated by improved grain size, decreased impurities, and lattice parameters and stoichiometry of ZnO:CoN films approached those of pure ZnO. Our present results will contribute to control the inhomogeneity of ZnO:Co films to improve magnetic properties at room temperature.

DOI： 10.1016/j.mssp.2023.107503

Web of Science

Scopus

researchmap
Stress reduction of a-C:H films with inserting submonolayer of carbon nanoparticles

Shiratani Masaharu, Ono Shinjiro, Eri Manato, Okumura Takamasa, Kamataki Kunihiro, Yamashita Naoto, Kiyama Haruki, Itagaki Naho, Koga Kazunori

Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2023 ( 0 ) 1Ga06 2023 （ eISSN:24348589 ）

　More details

Language：English Publisher：The Japan Society of Vacuum and Surface Science

Amorphous carbon (a-C(:H)) thin films have been studied in a wide range of fields as protective films for automotive parts, hard masks for semiconductor device fabrication, and biocompatible films for medical devices due to their excellent characteristics. In particular, mechanical properties (film stress and fracture toughness) related to film delamination are important because they are related to the durability of the films, which in turn are related to film stress and adhesion strength. Recently, we have shown that the introduction of carbon nanoparticles (CNPs) between two layers of a-C:H thin films reduces film stress[1]. In this study, we evaluated other properties of the CNP-inserted sample and examined the effect of CNPs on the mechanical properties of the film toward the practical stage.Sandwich structure films were fabricated using a capacitively coupled plasma-enhanced chemical vapor deposition (PECVD) system [1]. Ar and CH4 gases were introduced from the top at 19 sccm and 2.6 sccm, respectively. The thickness of the first and second layers was 154 nm. For the nanoindentation test, a nanoindentation tester (ENT-1100a) was employed and a Berkovich indenter was used.The load-unloading curve by nano-indentation showed a typical curve at 5 mN, and a step in the curve occurred at over 8 mN, and SEM images of the indentation showed that the membrane peeled off in a circular shape when the step occurred. EDS analysis of the peel scar revealed that the peel occurred at the interface between the first and second layers. In addition, the fracture toughness of the film was determined from the SEM images of the delamination traces and the load-unloading curve at the time of step generation, and it decreased with increasing Cp in the region where the film stress was constant for the CNP coverage. These results suggest that CNP coverage has a negative correlation with fracture toughness and that there is an optimum value for improving mechanical properties. Other properties will be discussed in detail in the presentation.[1] S.H. Hwang et al., Jpn. J. Appl. Phys. 59 100906, (2020).

DOI： 10.14886/jvss.2023.0_1ga06

CiNii Research
One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges Reviewed International journal

I. Nagao, K. Kamataki, A. Yamamoto, M. Otaka, Y. Yamamoto, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS Adv. 7 ( 31 ) 911 - 917 2022.12 （ ISSN:2731-5894 eISSN:2059-8521 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Springer Science and Business Media LLC

We have investigated the effects of amplitude modulation (AM) discharges especially in differences of AM frequency on plasma parameters such as electric field, electron density, electron temperature, ion energy distribution function (IEDF), and ion angular distribution function (IADF) of capacitively coupled AM discharge Ar plasma using a Particle-in-cell/Monte Carlo collision (PIC-MCC) model. The electron density and the kinetic energy of ions incident on the grounded electrode oscillate periodically with the AM frequency. The oscillation amplitude of the electron density in the central plasma region between the electrodes decreases with increasing the AM frequency above 5 kHz. On the other hand, the peak energy of IEDF decreases with increasing the AM frequency above 500 kHz. Thus, the AM frequency is a good tuning knob to control such plasma parameters.

DOI： 10.1557/s43580-022-00417-w

Web of Science

Scopus

researchmap

Other Link： https://link.springer.com/article/10.1557/s43580-022-00417-w/fulltext.html
Effects of substrate surface polarity on heteroepitaxial growth of pseudobinary ZnO–InN alloy films on ZnO substrates Reviewed International journal

R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki

J. Mater. Res. 38 ( 7 ) 1803 - 1812 2022.11 （ ISSN:0884-2914 eISSN:2044-5326 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Springer Science and Business Media LLC

(ZnO)X(InN)1-X films have been epitaxially grown on 0.9%-lattice-mismatched ZnO substrates at 450 °C by sputtering. Films fabricated on O-polar substrates exhibit higher crystal quality and smoother surface. The full width at half-maximum of (0002) rocking curve and the root-mean-square roughness (Rq) of a 30-nm-thick film on O-polar surface are 0.21° and 2.71 nm, respectively, whereas those on Zn-polar one are 0.32° and 4.30 nm, respectively. Rq on O-polar surface further decreases to 0.73 nm as the thickness decreases to 10 nm, where we successfully obtained atomically flat single-crystalline films having atomically sharp interface with the substrates. High-resolution transmission electron microscopy revealed the Stranski–Krastanov (layer plus island) growth for O-polar case and just 3D islanding mode growth for Zn-polar one. All the results indicate the much longer migration length of adatoms on O-polar surface during the film growth, enabling adatoms to reach their thermodynamically favored positions even at low substrate temperature. Graphical abstract: [Figure not available: see fulltext.]

DOI： 10.1557/s43578-022-00827-4

Web of Science

Scopus

researchmap

Other Link： https://link.springer.com/article/10.1557/s43578-022-00827-4/fulltext.html
Amorphous In-Ga-Mg-O Thin Films Formed by RF Magnetron Sputtering: Optical, Electrical Properties and Thin-Film-Transistor Characteristics Reviewed International journal

H. Yabuta, N. Itagaki, T. Ekino, Y. Shigesato

IEEE Open Journal of Nanotechnology 3 149 - 152 2022.11 （ eISSN:2644-1292 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Institute of Electrical and Electronics Engineers (IEEE)

We report on optical and electrical properties of amorphous In-Ga-Mg-O (a-IGMO) films and characteristics of a-IGMO channel thin-film transistors which went through the reductive post-annealing process. Optical band-gap energies of a-IGMO films were larger than that of amorphous In-Ga-Zn-O (a-IGZO) films. Carrier density and Hall mobility of a-IGMO films with the reductive post-annealing were almost the same degree as those of a-IGZO films. Although the reductive annealing with the SiNx underlayer makes an a-IGZO film degenerate semiconductor and its TFT inoperative, a-IGMO TFTs successfully operated after this reductive process. Break-junction tunnelling spectroscopy which was applicable not to a-IGMO but to a-IGZO with the reductive process showed a noticeable density of state character in the vicinity of the Fermi level for a-IGZO, which is consistent with its property.

DOI： 10.1109/OJNANO.2022.3222850

Web of Science

Scopus

researchmap
Plasma irradiation-introduced RONS amount into plant seeds and their response analysis Reviewed International journal

T. Okumura, T. Anan, P. Attri, Y. Tsukada, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English Publishing type：Research paper (scientific journal)
Role of short-lived nitrogen species generated at low-pressure RF plasma on the germination and seedling growth Reviewed International journal

K. Koga, P. Attri, T. Okumura, T. Anan, T. Nakao, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Measurements of strength and fluctuation of 2D electric fields in plasmas using a fine particle trapped with laser tweezers Reviewed International journal

K. Kamataki, T. Sato, K. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Effects of amplitude modulation discharge on behavior of oxygen ions in Ar/O2 capacitively coupled plasma studied by particle-in-cell/Monte Carlo collision model Reviewed International journal

I. Nagao, A. Yamamoto, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Control of magnetic transition of ZnO: Co grown by RF-sputter using post-annealing Reviewed International journal

A. M. Nurut, N. Yamashita, K. Kamataki, K. Koga, N. Itagaki, M. Shiratani

ICIEE 2022.10 （ ISBN:9781665486224 ）

　More details

Language：English Publishing type：Research paper (international conference proceedings) Publisher：2022 International Conference on Informatics Electrical and Electronics, ICIEE 2022 - Proceedings

Ferromagnetic semiconductor has attracted much attention for the application of spintronic devices, which will bring next generation of the information technology. Cobalt-doped Zinc Oxides (ZnO: Co) is strong candidate of this material group. The ZnO: Co films were grown on a silicon substrate (100) at room temperature by radio-frequency (rf) sputtering deposition and followed by post-Annealing treatment for 3 hours at 400°C and 800°C in the air. The transition from paramagnetic to ferromagnetic occurs after annealing at 400°C, and the properties return to paramagnetic like as-deposition when the temperature rises to 800°C. The XRD measurement of ZnO: Co films exhibited a wurtzite structure in the (002) plane and was free from secondary phases. Then, post-Annealing at 400°C due to shift peak and decrease oxygen element, meanwhile the crystallinity significantly up to 800°C.

DOI： 10.1109/ICIEE55596.2022.10010108

Scopus

researchmap
Pressure dependence on spatio-temporal distribution of excitation rates of Ar 2p1 and Ne 2p1 in Ar and Ar/Ne capacitively coupled plasmas Reviewed International journal

M. Otaka, T. Arima, J. Lai, K. Ikeda, K. Kamataki, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Effect of plasma irradiation on germination of lettuce seeds with fluctuating dormancy Reviewed International journal

T. Anan, T. Nakao, T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Plasma induced conversion of CO2 with water to useful compounds Reviewed International journal

P. Attri, T. Okumura, K. Koga, K. Kamataki, N. Itagaki, M. Shiratani, N. Takeuchi

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Sputter epitaxy of Mg-doped ZnO films on sapphire substrates using inverted Stranski-Krastanov mode Reviewed International journal

M. Shiratani, D. Takahashi, N. Yamashita, N. Itagaki

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Process analysis of cracking aC: H/CNP/aC: H sandwich films under stress using nanoindentation Reviewed International journal

S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English Publishing type：Research paper (international conference proceedings)
Sputter epitaxy of Mg-doped ZnO films on sapphire substrates using inverted Stranski-Krastanov mode Reviewed International journal

M. Shiratani, D. Takahashi, N. Yamashita, N. Itagaki

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English

researchmap
Role of short-lived nitrogen species generated at low-pressure RF plasma on the germination and seedling growth Reviewed International journal

K. Koga, P. Attri, T. Okumura, T. Anan, T. Nakao, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English

researchmap
Process analysis of cracking aC: H/CNP/aC: H sandwich films under stress using nanoindentation Reviewed International journal

S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English

researchmap
Pressure dependence on spatio-temporal distribution of excitation rates of Ar 2p1 and Ne 2p1 in Ar and Ar/Ne capacitively coupled plasmas Reviewed International journal

M. Otaka, T. Arima, J. Lai, K. Ikeda, K. Kamataki, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English

researchmap
Plasma irradiation-introduced RONS amount into plant seeds and their response analysis Reviewed International journal

T. Okumura, T. Anan, P. Attri, Y. Tsukada, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English

researchmap
Plasma induced conversion of CO2 with water to useful compounds Reviewed International journal

P. Attri, T. Okumura, K. Koga, K. Kamataki, N. Itagaki, M. Shiratani, N. Takeuchi

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English

researchmap
Measurements of strength and fluctuation of 2D electric fields in plasmas using a fine particle trapped with laser tweezers Reviewed International journal

K. Kamataki, T. Sato, K. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English

researchmap
Effects of amplitude modulation discharge on behavior of oxygen ions in Ar/O2 capacitively coupled plasma studied by particle-in-cell/Monte Carlo collision model Reviewed International journal

I. Nagao, A. Yamamoto, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English

researchmap
Effect of plasma irradiation on germination of lettuce seeds with fluctuating dormancy Reviewed International journal

T. Anan, T. Nakao, T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Bull. Am. Phys. Soc. 2022.10

　More details

Language：English

researchmap
Effects of amplitude modulated capacitively coupled discharge Ar plasma on kinetic energy and angular distribution function of ions impinging on electrodes:particle-in-cell/Monte Carlo collision model simulation Reviewed International journal

K. Abe, K. Kamataki, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K . Koga, M. Shiratani

Jpn. J. Appl. Phys. 61 ( 10 ) 106003 - 106003 2022.9 （ ISSN:0021-4922 eISSN:1347-4065 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：IOP Publishing

Abstract

We investigated the effects of amplitude modulated (AM) capacitively coupled Ar discharge plasma on the ion energy distribution function (IEDF) and the ion angular distribution function (IADF) incident on electrodes using the particle-in-cell/Monte Carlo collision model. For AM discharge, the electron density and electron temperature and the kinetic energy and angle of ions incident on the ground electrode change periodically with AM frequency, whereas ones for continuous wave discharge are almost constant. For AM discharge, the plasma had hysteresis characteristics. The peak energy of IEDF varies from 53 to 135 eV and the FWHM of IADF varies from 1.82 to 3.34 degrees for gas pressure 10mTorr, the peak-to-peak input voltage 400 V and AM level of 50%. The variation width of the peak energy of IEDF and FWHM of IADF increases with the AM level. These effects of AM method discharge are more noticeable at lower pressures. Thus, the AM discharge offers a way to control simultaneously IEDF and IADF, which opens a new avenue for plasma processes such as an ALD-like PECVD.

DOI： 10.35848/1347-4065/ac7626

Web of Science

Scopus

researchmap

Other Link： https://iopscience.iop.org/article/10.35848/1347-4065/ac7626/pdf
Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma

Kamataki Kunihiro, Nagamatsu Daiki, Yang Tao, Abe Kohei, Yamamoto Akihiro, Nagao Iori, Arima Toshiaki, Otaka Michihiro, Yamamoto Yuma, Yamashita Daisuke, Okumura Takamasa, Yamashita Naoto, Itagaki Naho, Koga Kazunori, Shiratani Masaharu

AIP Advances 12 ( 8 ) 2022.8 （ eISSN:21583226 ）

　More details

Language：English Publisher：AIP Publishing

CiNii Research
Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma Reviewed International journal

K. Kamataki, D. Nagamatsu, T. Yang, K. Abe, A. Yamamoto, I. Nagao, T. Arima, M. Otaka, Y. Yamamoto, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

AIP Adv. 12 2022.8

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1063/5.0097691
Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma Reviewed International journal

K. Kamataki, D. Nagamatsu, T. Yang, K. Abe, A. Yamamoto, I. Nagao, T. Arima, M. Otaka, Y. Yamamoto, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

AIP Adv 12 2022.8

　More details

Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1063/5.0097691
Detection of NO3− introduced in plasma-irradiated dry lettuce seeds using liquid chromatography-electrospray ionization quantum mass spectrometry (LC-ESI QMS) Reviewed International journal

T. Okumura, P. Attri, K. Kamataki, N. Yamashita, Y. Tsukada, N. Itagaki, M. Shiratani, Y. Ishibashi, K. Kuchitsu, K. Koga

Sci. Rep. 12 ( 1 ) 12525 2022.7 （ ISSN:2045-2322 eISSN:20452322 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Springer Science and Business Media LLC

Abstract

Discharge plasma irradiates seeds with reactive oxygen and nitrogen species (RONS). However, RONS introduced in seeds by plasma irradiation have not been successfully detected thus far. This study provides experimental evidence that nitrate ion NO3− is introduced in lettuce seeds as RONS upon irradiation with atmospheric-pressure air dielectric barrier discharge plasma. Plasma irradiation for 5 min promotes seed germination. The components of the plasma-irradiated seeds were examined using electrospray ionization quantum mass spectrometry (ESI QMS), which revealed that the plasma irradiation introduced an ion with a mass of 62 m/z in detectable amounts. This ion was identified as NO3− by liquid chromatography (LC), multiple wavelength detector (MWD), and LC-ESI QMS. A one-dimensional simulation at electron temperature Te = 1 eV, electron density Ne = 1013/m3, and gas temperature Tg = 300 K indicated the introduction of NO3−, involving nitric oxide NO. NO3− is one of the most important ions that trigger signal transduction for germination when introduced in seeds. The scanning electron microscopy (SEM) images revealed that there was no change on the surface of the seeds after plasma irradiation. Plasma irradiation is an effective method of introducing NO3− in seeds in a dry process without causing damage.

DOI： 10.1038/s41598-022-16641-1

Web of Science

Scopus

PubMed

CiNii Research

researchmap

Other Link： https://www.nature.com/articles/s41598-022-16641-1
Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma Reviewed International journal

M. Otaka, T. Arima, J. Lai, K. Ikeda, K. Kamataki, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS Adv. 7 ( 31 ) 918 - 922 2022.7 （ ISSN:2731-5894 eISSN:2059-8521 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Springer Science and Business Media LLC

We investigated the Ar mixture ratio dependence of the high-energy electron behaviors in capacitively coupled Ar+Ne plasmas using Optical Emission Spectroscopy (OES) and Phase-Resolved Optical Emission Spectroscopy (PROES) methods. OES measurements showed that optical emission intensities of Ar and Ne decreased as Ar mixture ratio increased, which implied decreases in the excitation rates of Ar and Ne. The spatio-temporal distribution of the Ar I 2p1 excitation rate was measured using the PROES method. These measurements showed the Ar I 2p1 excitation rate decreased as the Ar mixture ratio increased, which was consistent with the OES results. These results implied that the collision frequency between electrons and neutral particles increased with increase in Ar mixture ratio. In addition, the sheath expansion width in one RF cycle became small with increasing Ar mixture ratio, which led to a weakening of the effect of stochastic heating and a decrease of the electron temperature.

DOI： 10.1557/s43580-022-00306-2

Web of Science

Scopus

researchmap

Other Link： https://link.springer.com/article/10.1557/s43580-022-00306-2/fulltext.html
Treatment of organic wastewater by a combination of non-thermal plasma and catalyst: a review Reviewed International journal

P. Attri, K. Koga, T. Okumura, F. L. Chawarambwa, T. E. Putri, Y. Tsukada, K. Kamataki, N. Itagaki, M. Shiratani

Rev. Mod. Plasma Phys 6 ( 1 ) 2022.7 （ ISSN:2367-3192 eISSN:2367-3192 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：Springer Science and Business Media LLC

Recently, non-thermal plasma technology has been frequently used for wastewater treatment. Plasma technology uses the effect of high-energy electrons, reactive species, ultraviolet light, free radicals, and pyrolysis to treat wastewater. Although in many cases, only the use of non-thermal plasma alone is not successful in degrading the complex organic wastes. This might be because of complexity in wastewater or not appropriate plasma device for wastewater treatment, or improper use of plasma-generated species that plays a critical role in organic waste degradation. To increase the degradation efficiency and reduce treatment time, the combination of non-thermal plasma and catalysts (homogeneous and heterogeneous) improves pollutant removal. This review includes the different non-thermal plasma systems and their action on decolorizing or degradation of dyes, degradation of phenolic pollutants, and degradation of pharmaceutical products, including antibiotics and other volatile organic solvents (VOC’s) with and without catalyst. Finally, probable mechanisms and suggestions to improve the wastewater treatment using non-thermal plasma were put forward. This review aims to help researchers understand the role of treatment time, feed gases, and catalysts on the degradation of organic wastes and looks forward to all possible developments in this field.

DOI： 10.1007/s41614-022-00077-1

Web of Science

Scopus

researchmap

Other Link： https://link.springer.com/article/10.1007/s41614-022-00077-1/fulltext.html
Raman spectral analysis of the as-deposited aC: H films prepared by CH4+ Ar plasma CVD Reviewed International journal

S. Ono, S. H. Hwang, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, J. S. Oh, S. Takabayashi, T. Nakatani

MRS Adv. 7 ( 30 ) 718 - 722 2022.7 （ ISSN:2731-5894 eISSN:2059-8521 ）

　More details

Language：English Publishing type：Research paper (scientific journal) Publisher：SPRINGER HEIDELBERG

Applicability of precise Raman spectral analysis of a-C:H films deposited using a plasma chemical vapor deposition (CVD) method has been discussed based on the sensitivity to initial conditions in peak separation. The spectral analysis offers to deconvolute the spectra into five peaks, while the as-deposited films prepared by plasma CVD is difficult to the five-peak separation. We found the peak position and the peak height ratio of the D-band to the G(+)-band can be employed to discuss the structure of the as-deposited films. We examined the structural difference between the films deposited at the powered electrode and that at grounded electrode. We found graphene nanoribbon-like structures may be formed in the films deposited on the grounded substrate. This result suggests that the substrate position is an important factor to form the graphene nanoribbon-like structure.

DOI： 10.1557/s43580-022-00310-6

Web of Science

Scopus

researchmap
The effect of visual cognition on the fear caused by pain recall

Itagaki, N; Iramina, K; Nakada, Y

2022 14TH BIOMEDICAL ENGINEERING INTERNATIONAL CONFERENCE (BMEICON 2022) 2022 （ ISSN:2334-3052 ISBN:978-1-6654-8903-4 ）

　More details

DOI： 10.1109/BMEiCON56653.2022.10012108

Web of Science

▼display all

Books

可視領域でバンドギャップチューニング可能な新材料ZIONの開発と太陽電池への応用（太陽光と光電変換機能―異分野融合から生まれる次世代太陽電池―）

板垣奈穂（Role：Joint author）

シーエムシー出版 2016.2

　More details

Responsible for pages：第1章, 2 Language：Japanese Book type：Scholarly book

Presentations

Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In2O3:Sn by Sputtering Combined with Solid Phase Crystallization International conference

N. Itagaki, Z. Shen, Y. Wada, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani

MRM2023/IUMRS-ICA2023 2023.12

　More details

Event date： 2023.12

Language：English Presentation type：Oral presentation (general)

Venue：国立京都国際会館 Country：Japan
Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In2O3:Sn by Sputtering Combined with Solid Phase Crystallization International conference

N. Itagaki, Z. Shen, Y. Wada, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani

MRM2023/IUMRS-ICA2023 2023.12

　More details

Event date： 2023.12

Language：English

Venue：国立京都国際会館 Country：Japan

researchmap
Fabrication of ZnO based transparent conducting oxides by sputtering combined with solid phase crystallization : a way to meet the future demand for transparent electrodes Invited International conference

N. Itagaki, Y. Wada, H. Yabuta, M. Shiratani

AAPPS-DPP2023 2023.11

　More details

Event date： 2023.11

Language：English Presentation type：Oral presentation (general)

Venue：ポートメッセ名古屋 Country：Japan
Fabrication of ZnO based transparent conducting oxides by sputtering combined with solid phase crystallization : a way to meet the future demand for transparent electrodes Invited International conference

N. Itagaki, Y. Wada, H. Yabuta, M. Shiratani

AAPPS-DPP2023 2023.11

　More details

Event date： 2023.11

Language：English

Venue：ポートメッセ名古屋 Country：Japan

researchmap
スパッタだからできる薄膜の結晶性・モフォロジー制御 Invited

板垣奈穂

化学工学会第54回秋季大会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
スパッタだからできる薄膜の結晶性・モフォロジー制御 Invited

板垣奈穂

化学工学会第54回秋季大会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：福岡大学 Country：Japan

researchmap
Structural Control of Sputter Deposited Films Using Impurities Invited International conference

N. Itagaki

International C+Nano Convergence Technology Symposium (ICTS) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Structural Control of Sputter Deposited Films Using Impurities Invited International conference

N. Itagaki

International C+Nano Convergence Technology Symposium (ICTS) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：オンライン

researchmap
不純物でスパッタ膜のモフォロジーを制御する～アモルファスからエピ膜まで～ (招待講演) Invited

板垣奈穂

第78回CVD研究会 2022.12

　More details

Event date： 2022.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
不純物でスパッタ膜のモフォロジーを制御する～アモルファスからエピ膜まで～ (招待講演) Invited

板垣奈穂

第78回CVD研究会 2022.12

　More details

Event date： 2022.12

Language：Japanese

Venue：京都大学 Country：Japan

researchmap
Sputtering Growth of Single-Crystalline ZnO Based Semiconducting Films on Large Lattice-Mismatched Substrates (Invited) Invited International conference

N. Itagaki

International Workshop on Magnetron Sputter Epitaxy (IWMSE) 2022.11

　More details

Event date： 2022.11

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Sputtering Growth of Single-Crystalline ZnO Based Semiconducting Films on Large Lattice-Mismatched Substrates (Invited) Invited International conference

N. Itagaki

International Workshop on Magnetron Sputter Epitaxy (IWMSE) 2022.11

　More details

Event date： 2022.11

Language：English

Venue：オンライン Country：Japan

researchmap
Structural Control of Sputter Deposited Films beyond the Thornton Diagram Using Impurities (keynote) Invited International conference

N. Itagaki

AAPPS-DPP 2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Structural Control of Sputter Deposited Films beyond the Thornton Diagram Using Impurities (keynote) Invited International conference

N. Itagaki

AAPPS-DPP 2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：オンライン Country：Japan

researchmap
Fabrication of Low-Resistive Amorphous In2O3 :Sn Films at 600°C by Magnetron Sputtering Using Nitrogen International conference

N. Itagaki, Y. Mido, Z. Shen, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani

9th International Symposium on Control of Semiconductor Interfaces 2022.9

　More details

Event date： 2022.9

Language：English Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Fabrication of Low-Resistive Amorphous In2O3 :Sn Films at 600°C by Magnetron Sputtering Using Nitrogen International conference

N. Itagaki, Y. Mido, Z. Shen, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani

9th International Symposium on Control of Semiconductor Interfaces 2022.9

　More details

Event date： 2022.9

Language：English

Venue：名古屋大学 Country：Japan

researchmap
不純物で薄膜モフォロジーを制御する～アモルファスからエピ膜まで～ (招待講演) Invited

板垣奈穂

日本学術振興会 R025先進薄膜界面機能創成委員会　リトリート学習会 2022 2022.7

　More details

Event date： 2022.7

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
不純物で薄膜モフォロジーを制御する～アモルファスからエピ膜まで～ (招待講演) Invited

板垣奈穂

日本学術振興会 R025先進薄膜界面機能創成委員会リトリート学習会 2022 2022.7

　More details

Event date： 2022.7

Language：Japanese

Venue：オンライン Country：Japan

researchmap
Development of New Oxynitride Semiconductors with Tunable Band Gaps Using Magnetron Sputtering(Invited) Invited International conference

N. Itagaki

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Inverted Stranski-Krastanov Growth of ZnO Based Semiconductors for Excitonic Devices(Invited) Invited International conference

N. Itagaki

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Sputtering Deposition with Impurities: Another Key Parameter to Control Film Structures(Invited) Invited International conference

N. Itagaki

MRS fall meeting 2021 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Sputter epitaxy of ZnO based oxide/oxynitride semiconductors for excitonic transistors(Invited) Invited International conference

N.　Itagaki

5th Asia-Pacific Conference on Plasma Physics 2021.10

　More details

Event date： 2021.9 - 2021.10

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
非晶質ZnON膜からの固相結晶化ZnO膜の形成とシード層としての効果(招待講演) Invited

板垣奈穂, 沈志遠, 御堂雄大, 薮田久人

第82回応用物理学会秋季学術講演会 2021.9

　More details

Event date： 2021.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
スパッタエピタキシー法を駆使したZnO系新材料の開発(招待講演) Invited

板垣奈穂

第68回応用物理学会春季学術講演会 2021.3

　More details

Event date： 2021.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Sputter epitaxy through “inverse” SK mode for a new class of excitonic devices (Invited) Invited International conference

N. Itagaki

4th Asia Pacific Conference on Plasma Physics 2020.10

　More details

Event date： 2020.10

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
A novel semiconductor ZION for excitonic devices (Invited) Invited

N. Itagaki

Satellite meeting of AAPPS-DPP2020：Workshop on cutting-edge of plasma applications 2020.8

　More details

Event date： 2020.8

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Sputtering Deposition with Impurities: Another Key Parameter to Control Film Structures (Invited) Invited International conference

N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

Materials Research Meeting 2019 (MRM2019） 2019.12

　More details

Event date： 2019.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Symposia Country：Japan
ZnO Based Semiconductors for Excitonic Devices (Invited) Invited International conference

N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

Materials Research Meeting 2019 (MRM2019） 2019.12

　More details

Event date： 2019.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Symposia Country：Japan
Inverse Stranski-Krastanov growth: a method for growth of single crystalline films beyond lattice-matching condition (Invited) Invited International conference

N. Itagaki

Satellite Workshop of XXXIV ICPIG & ICRP-10 "New trends of plasma processes for thin films and related materials for the deep discussion on new trends of plasma processes" 2019.7

　More details

Event date： 2019.7

Language：English Presentation type：Oral presentation (general)

Venue：Sapporo Education and Culture Hall Country：Japan
Sputter Epitaxy of ZnO Based Compounds for Excitonic Devices Invited International conference

N. Itagaki, K. Imoto, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani

28th Annual Meeting of MRS-Japan 2018 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Kitakyushu International Conference Center Country：Japan
Sputter Epitaxy of compound semiconductors via inverse Stranski-Krastanov mode: A method of single crystalline film growth beyond lattice matchins condition Invited International conference

N. Itagaki, K. Imoto, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani

28th Annual Meeting of MRS-Japan 2018 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Kitakyushu International Conference Center Country：Japan
Sputter Epitaxy via Inverse Stranski-Krastanov Growth Mode: A Method of Single Crystal Growth beyond Lattice Matching Condition International conference

N. Itagki, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani

AVS Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2018) 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Waikoloa Beach Marriott Resort & Spa, Waikoloa Beach, Hawaii, USA
Sputter epitaxy of high quality (ZnO)x(InN)1-x: a new semiconducting material for excitonic devices (Invited) Invited International conference

N. Itagki, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani

2nd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018) 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：The Kanazawa Chamber of Commerce and Industry & Ishikawa Prefectural Bunkyo Hall Country：Japan
Inverse Stranski-Krastanov Growth of Single Crystalline Films: A New Mode of Heteroepitaxy for Large Lattice Mismatched System (Invited) Invited International conference

N. Itagaki, M. Shiratani

10th International Conference on Processing & Manufacturing of Advanced Materials Processing, Fabrication, Properties, Applications (THERMEC 2018) 2018.7

　More details

Event date： 2018.7

Language：English Presentation type：Oral presentation (general)

Venue：Paris Country：France
格子整合条件を超えて原子平坦表面を実現する新規スパッタエピタキシー技術の開発～ZnO on sapphireを例に～（招待講演） Invited

板垣奈穂, 岩崎和也, 古閑一憲, 白谷正治

第65回応用物理学会春季学術講演会 2018.3

　More details

Event date： 2018.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan

A New Approach to Sputter Epitaxy for Growth of Thin Films with Atomically-Flat Surface on Large Lattice Mismatched Substrates
Excitonic devices for on-chip optical interconnects International conference

N. Itagaki

Joint workshop btw SKKU and Kyushu University Emerging materials and devices 2018.1

　More details

Event date： 2018.1

Language：English Presentation type：Oral presentation (general)

Venue：Kyushu University Country：Japan
Fabrication of High-Mobility Nanocrystal-Free a-In2O3:Sn Films by Magnetron Sputtering with Impurity-Mediated Amorphization Method Invited International conference

N. Itagaki, H. Wang, D. Yamashita, H. Seo, K. Koga, M. Shiratani

27th annual meeting of MRS-J 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
逆SKモードを利用した超高品質スパッタエピタキシー（招待講演） Invited

板垣奈穂

Plasma Conference 2017 2017.11

　More details

Event date： 2017.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：姫路商工会議所 Country：Japan
不純物添加スパッタリング法による高移動度・ナノ結晶フリー a-In2O3:Sn薄膜の作製

板垣奈穂, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
Fabrication of High-Mobility Amorphous In2O3:Sn Films by RF Magnetron Sputtering with Impurity-Mediated Amorphization Method (Keynote) Invited International conference

N. Itagaki, T. Takasaki, H. Wang, D. Yamashita, H. Seo, K. Koga, M. Shiratani

International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017) 2017.8

　More details

Event date： 2017.8 - 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto University, Kyoto Country：Japan
Inverse Stranski-Krastanov Growth of Single Crystalline ZnO-Based Semiconductors on Lattice Mismatched Substrates (Invited) Invited International conference

N. Itagaki, K. Iwasaki, D. Yamashita, H. Seo, K. Koga, M. Shiratani

International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017) 2017.8

　More details

Event date： 2017.8 - 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto University, Kyoto Country：Japan
Inverse Stranski-Krastanov Growth of Pit-Free Single Crystalline ZnO Films on Lattice Mismatched Substrates International conference

N. Itagaki, K. Iwasaki, D. Yamashita, H. Seo, K. Koga, M. Shiratani

29th International Conference on Defects in Semiconductors (ICDS2017) 2017.8

　More details

Event date： 2017.7 - 2017.8

Language：English Presentation type：Oral presentation (general)

Venue：Matsue, Shimane Country：Japan
不純物添加スパッタリングによる高移動度アモルファスITOの作製（招待講演） Invited

板垣奈穂

プラズマ材料科学第 153委員会　第130回研究会　プラズマを用いた新奇プロセス・新規材料創製 2017.4

　More details

Event date： 2017.4

Language：Japanese Presentation type：Oral presentation (general)

Venue：なごやサイエンスパーク　サイエンス交流プラザ Country：Japan
スパッタエピタキシー法を用いた高品質単結晶薄膜の形成（招待講演） Invited

板垣奈穂

プラズマ核融合学会第29回専門講習会「スパッタ技術の現状と展望」 2017.1

　More details

Event date： 2017.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Sputtering growth of (ZnO)x(InN)1-x semiconductor: a ZnO-based compound with bandgap tunability over the entire visible spectrum (Invited) Invited International conference

N. Itagaki, K. Matsushima, D. Ymashita, H. Seo, K. Koga, M. Shiratani

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
バンドギャップチューニング可能なZnO系新半導体材料の開発（プラズマエレクトロニクス賞受賞記念講演） Invited

板垣奈穂, 松島宏一, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治

第77回応用物理学会秋季学術講演会 2016.9

　More details

Event date： 2016.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：朱鷺メッセ, 新潟 Country：Japan
Plasma surface interactions of single crystal ZnO during sputtering in Ar+O2+N2 International conference

N. Itagaki and M. Shiratani

Workshop on Plasma surface interaction for technological applications 2016.7

　More details

Event date： 2016.7

Language：English Presentation type：Oral presentation (general)

Venue：University of Kiel Country：Germany
Inverse SK mode of epitaxial film growth and its application to solar cells (Invited) Invited International conference

N. Itagaki

The 3rd Korea-Japan Joint Symposium on Advanced Solar Cells 2016.2

　More details

Event date： 2016.2

Language：English Presentation type：Oral presentation (general)

Venue：Welli Hilli Park, Kangwon Province Country：Korea, Republic of
可視領域でバンドギャップチューニング可能な新材料ZIONの開発（招待講演） Invited

板垣奈穂

固体化学の新しい指針を探る研究会第78回定例研究会 2015.10

　More details

Event date： 2015.10

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
Single Crystal Growth On Large Lattice-Mismatched Substrates By Using Buffer Layers With Fine Grains (Invited) Invited International conference

N. Itagaki

The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015) 2015.9

　More details

Event date： 2015.9

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Sputtering growth of single-crystalline ZnO films on c-sapphire substrates by using impurity-mediated crystallization method: Effects of surface morphology of buffer layers International conference

N. Itagaki, T. Ide, K. Matsushima, T. Takasaki, D. Yamashita, H. Seo, K. Koga, Masaharu Shiratani

2015 E-MRS Spring Meeting and Exhibit 2015.5

　More details

Event date： 2015.5

Language：English Presentation type：Oral presentation (general)

Venue：Congress Center (Grand Palais), Lille Country：France
High-mobility amorphous In2O3:Sn films prepared by sputter deposition with nitrogen-mediated amorphization method International conference

N. Itagaki, T. Takasaki, T. Nakanishi, D. Yamashita, H. Seo, K. Koga, M. Shiratani

7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterial/8th International Conference on Plasma Nanotechnology and Science (ISPlasma2015/IC-PLANTS2015) 2015.3

　More details

Event date： 2015.3

Language：English Presentation type：Oral presentation (general)

Venue：Nagoya University Country：Japan
可視領域でバンドギャップチューニング可能なZnO系新材料の開発（招待講演） Invited

板垣奈穂, 松島宏一, 井手智章, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治

第62回応用物理学会春季学術講演会 2015.3

　More details

Event date： 2015.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東海大学 Country：Japan
ZnO-based semiconductors with tunable band gap for 3rd generation solar sells (Invited) Invited International conference

N. Itagaki

International Society for Optics and Photonics, Photonics West 2015 2015.2

　More details

Event date： 2015.2

Language：English Presentation type：Oral presentation (general)

Venue：The Moscone Center, San Francisco
不純物添加結晶化法による高品質ZnO薄膜の形成（招待講演） Invited

板垣奈穂

学振166委員会　第66回研究会 2015.1

　More details

Event date： 2015.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：アイビーホール青学会館、東京 Country：Japan
ZnO-based semiconductors with tunable band gap for solar cell application (Invited) Invited International conference

Naho Itagaki

2015 Japan-Korea Joint Symposium on Advanced Solar Cells 2015.1

　More details

Event date： 2015.1

Language：English Presentation type：Oral presentation (general)

Venue：TKP HAKATAEKIMAE Meeting Room, Fukuoka Country：Japan
Sputtering Growth of ZnO-based semiconductors with Band Gap Tunability over the Entire Visible Spectrum (Invited) Invited International conference

N. Itagaki

Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2014) 2014.12

　More details

Event date： 2014.12

Language：English Presentation type：Oral presentation (general)

Venue：Hapuna Beach Prince Hotel, Hawaii
Sputtering Growth of Pseudobinary ZnO-InN Alloys with Tunable Band Gap for Application in Multi-Quantum Well Solar Cells International conference

N. Itagaki, K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani

2014 MRS Fall Meeting 2014.12

　More details

Event date： 2014.11 - 2014.12

Language：English Presentation type：Oral presentation (general)

Venue：Hynes Convention Center, Boston
スパッタリング成膜法による高品質酸化亜鉛薄膜の形成

板垣奈穂, 古閑一憲, 白谷正治

第30回　九州・山口プラズマ研究会 2014.11

　More details

Event date： 2014.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：ラグナガーデンホテル、沖縄 Country：Japan
Synthesize of ZnO-based Semiconductor with Tunable Band Gap and Its Application in Multi-Quantum-Well Solar Cells International conference

N. Itagaki, K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, and M. Shiratani

6th World Conferenceon Photovoltaic Energy Conversion 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto International Conference Center Country：Japan
Non-Equilibrium and Extreme State -High-mobility amorphous In2O3:Sn films prepared via nitrogen-mediated amorphization- International conference

N. Itagaki, T. Nakanishi, I. Suhariadi, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Plasma Conference 2014 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Toki Messe, Niigata Country：Japan

Non-equilibrium and extreme state: high-mobility amorphous In2O3:Sn films prepared via nitrogen-mediated amorphization
Sputteing Growth of High-Quality ZnO-based Semiconductors for Optoelectronic Applications (Invited) Invited International conference

N. Itagaki

American Vacuum Society 61st International Symposium and Exhibition (AVS) 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Baltimore, Maryland
超高効率太陽電池への挑戦～量子効果を利用した新型太陽電池の実現に向けて～（招待講演） Invited

板垣奈穂

第25回精密加工プロセス研究会講演会 2014.10

　More details

Event date： 2014.10

Language：Japanese Presentation type：Oral presentation (general)

Venue：リファレンス駅東ビル Country：Japan
c面サファイア基板上への単結晶ZnO膜の形成 : 格子不整合系ヘテロエピタキシーにおける成長初期過程の表面形態の影響

板垣奈穂, 井出智章, 松島宏一, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治

第75回応用物理学会秋季学術講演会 2014.9

　More details

Event date： 2014.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：北海道大学 Country：Japan
Fabrication of Pseudo-binary ZnO-InN Alloys with Tunable Bandgap by Low-Temperature Magnetron Sputtering (Invited) Invited International conference

N. Itagaki

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Crystal Growth Control of Sputter-Deposited ZnO Films by Nitrogen-Mediated Crystallization Method International conference

N. Itagaki, I. Suhariadi, D. Yamashita, H. Seo, K. Koga, M. Shiratani

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Sputter-Deposition of Pseudobinary ZnO-InN Alloys with Tunable Bandgap for Photovoltaic Application (Invited) Invited International conference

N. Itagaki, K. Matsushima, R. Shimizu, and T. Ide

International Conference on Microelectronics and Plasma Technology 2014 (ICMAP2014) 2014.7

　More details

Event date： 2014.7

Language：English Presentation type：Oral presentation (general)

Venue：Gunsan Saemangeum Convention Center, Gunsan Country：Korea, Republic of
Novel oxynitride semiconductors for photovoltaic applications (太陽電池のための新規酸窒化物材料の探索) Invited

板垣奈穂

36th Seminar of Photovoltaic Power Generation Project (第36回平成26年度太陽光発電プロジェクト講演会 ) 2014.5

　More details

Event date： 2014.5

Language：English Presentation type：Oral presentation (general)

Venue：宮崎大学 Country：Japan
Sputtering growth of ZnO-based semiconductors using ZnON buffer layers for optoelectronic applications (Invited) Invited International conference

N. Itagaki

The International Symposium on Plasma-Nano Materials and Processes 2014.4

　More details

Event date： 2014.4

Language：English Presentation type：Oral presentation (general)

Venue：The Riverside Hotel, Seoul Country：Korea, Republic of
不純物添加結晶化法を用いた高品質ZnO薄膜のスパッタリング成膜」 -格子不整合基板上への単結晶膜の作製から極薄透明導電膜の作製まで- (招待講演) Invited

板垣奈穂

スパッタリングおよびプラズマプロセス技術部会（SP部会）第137回定例研究会 2014.3

　More details

Event date： 2014.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：機械振興会館 Country：Japan
Sputtering growth of single-crystalline ZnO-based semiconductors on lattice mismatched substrates (Invited) Invited International conference

N. Itagaki, K. Matsushima, I. Suhariadi, D. Yamashita, H. Seo, G. Uchida, K. Koga, M. Shiratani

International Society for Optics and Photonics, Photonics West 2014 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：The Moscone Center, San Francisco
新規酸窒化物半導体を用いたピエゾ電界誘起量子井戸型太陽電池の創製

板垣奈穂

第2回「太陽光と光電変換機能」領域公開シンポジウム 2013.12

　More details

Event date： 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：UDXギャラリーネクスト, 東京 Country：Japan
ZnInON系太陽電池材料の探索 (招待講演) Invited

板垣奈穂

第5回薄膜太陽電池セミナー 2013.11

　More details

Event date： 2013.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan

ZnInON semiconductors for photovoltaic application
不純物添加結晶化法による酸化亜鉛の高品質成長と新規２次元材料への展開

板垣奈穂

第29回九州山口プラズマ研究会 2013.11

　More details

Event date： 2013.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：クレドホテル臼杵 Country：Japan

Sputtering growth of ZnO based two-dimensional materials by utilizing impurity-mediated crystallization method
Crystallinity Control of Sputtered ZnO:Al Transparent Conducting Films by Utilizing Buffer Layers Fabricated via Nitrogen Mediated Crystallization International conference

N. Itagaki, K. Oshikawa, I. Suhariadi, K. Matsushima, D. Yamashita, H. Seo, G. Uchida, K. Koga, M. Shiratani

Solid State Devices and Materials 2013 (SSDM) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Hilton Fukuoka Sea Hawk Country：Japan
Synthesis and Characterization of Oxynitride Semiconductor ZnInON with Tunable Bandgap

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Kamataki, G.Uchida, K. Koga, M. Shiratani

The 26th Symposium on Plasma Science for Materials (SPSM-26) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Centennial Hall Kyushu University School of Medicine Country：Japan
Band-Gap Engineering of ZnO Based Semiconductors Deposited by Sputtering International conference

N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

2013 JSAP-MRS Joint Symposia 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Doshisha University Country：Japan
Novel Approach to Sputtering Growth of Single Crystalline Oxide Semiconductors for Optoelectronic Applications (Invited) Invited International conference

N. Itagaki

The 9th Asian-European International Conference on Plasma Surface Engineering　(AEPSE2013) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
グリーン時代を切り拓く革新的エレクトロニクス材料の創製～極低消費電力トランジスタおよび次世代型太陽電池の実現に向けて～

板垣奈穂

2013年度先端サマーセミナー（第5回研究活動交流会） 2013.8

　More details

Event date： 2013.8

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Novel Application of Ar/N2 Discharges to Sputtering Growth of High Quality Oxide Semiconductors (Invited) Invited International conference

N. Itagaki

The XXXI edition of the International Conference on Phenomena in Ionized Gases (ICPIG) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Granada Country：Spain
Sputter Deposition of Single Crystal ZnO Films on 18% Lattice mismatched c-Al2O3 Substrates via Nitrogen Mediated Crystallization International conference

N. Itagaki, K. Kuwahara, I. Suhariadi, K. Oshikawa, K. Matsushima, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, and M. Shiratani

International Symposium on Sputtering and Plasma Processes (ISSP2013) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto Research Park Country：Japan
Sputter Deposition of Semiconductor-Grade ZnO Based Materials on Lattice Mismatched Substrates (Invited) Invited International conference

N. Itagaki, K. Kuwahara, K. Matsushima, K. Oshikawa, and I. Suarihadi

The Collaborative Conference on Materials Research 2013 2013.6

　More details

Event date： 2013.6

Language：English Presentation type：Oral presentation (general)

Venue：Jeju Country：Korea, Republic of
スパッタリングにおけるZnNOx膜の初期成長制御とグリーンデバイスへの展開 (招待講演) Invited

板垣奈穂

第112回研究会（153委員会,154委員会,131委員会合同研究会）プラズマ材料科学に基づいた薄膜形成と新プロセスの創出 2013.6

　More details

Event date： 2013.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
高効率太陽電池の実現に向けた新規酸窒化物半導体ZnInONのバンドギャップエンジニアリング

板垣奈穂, 松島宏一, 桑原和成, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

第10回　「次世代の太陽光発電システム」シンポジウム 2013.5

　More details

Event date： 2013.5

Language：Japanese Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan
スパッタ法によるC面サファイア基板上への原子平坦ZnO薄膜の作製

板垣奈穂, 桑原和成, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

2013年第60回応用物理学会春季学術講演会 2013.3

　More details

Event date： 2013.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
Sputter deposition of zinc-indium oxynitride semiconductors with narrow bandgap for excitonic transistors International conference

N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.2

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
Sputter deposition of atomically-flat ZnO films on lattice mismatched substrates via nitrogen mediated crystallization (Invited) Invited International conference

N. Itagaki, K. Kuwahara, I. Suhariadi, K. Oshikawa, K. Matsushima, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

The 16th International Workshop on Advanced Plasma Processing and Diagnostics 2013.1

　More details

Event date： 2013.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：自然科学研究機構岡崎コンファレンスセンター Country：Japan
Epitaxial Growth of ZnO Based Semiconductors via Impurity-Additive Mediated Crysallization International conference

N. Itagaki, K. Kuwahara, K. Matsushima, T. Hirose, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

2012 MRS Fall Meeting 2012.11

　More details

Event date： 2012.11

Language：English Presentation type：Oral presentation (general)

Venue：Hynes Convention Center
Sputter deposition of Epitaxial Zinc-Indium Oxynitride Films for Excitonic Transistors International conference

N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

The 34th International Symposium on Dry Process 2012.11

　More details

Event date： 2012.11

Language：English Presentation type：Oral presentation (general)

Venue：The University of Tokyo Country：Japan
Zinc-Indium Oxynitride Thin Films for Multiple-Quantum–Well Solar Cells International conference

N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

Asia-Pacific Conference on Plasma Science and Technology　(11th APCPST) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
Zinc-Indium Oxynitride Semiconductors for Piezo-Electric-Field Effect MQW Solar Cells International conference

N. Itagaki, K. Matsushima, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, K. Koga, M. Shiratani

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
Crystallinity control of sputtered ZnO films by utilizing buffer layers fabricated via nitrogen mediated crystallization: Effects of nitrogen flow rate International conference

N. Itagaki, I. Suhariadi, K. Kuwahara, K. Oshikawa, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

13th International Conference on Plasma Surface Engineering (PSE2012) 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：Garmisch-Partenkirchen Country：Germany
高効率量子井戸型太陽電池のための新規酸窒化物半導体薄膜の作製

板垣奈穂、松島宏一、桑原和成、押川晃一郎、I. Suhariadi、山下大輔、徐鉉雄、鎌滝晋礼、内田儀一郎、古閑一憲、白谷正治

第9回「次世代の太陽光発電システム」シンポジウム 2012.5

　More details

Event date： 2012.5 - 2012.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：京都テルサ Country：Japan
Piezo-electric-field effect MQW solar cells based on novel oxynitride semiconductors

N. Itagaki

日本化学会第92春季年会(2012) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：慶應義塾大学 Country：Japan
窒素添加結晶化バッファー層によるZnO:Al 薄膜の結晶性制御：窒素供給量の影響

板垣奈穂, I. Suhariadi, 桑原和成, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

第59回応用物理学関係連合講演会 2012.3

　More details

Event date： 2012.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan
Novel fabrication method for ZnO films via nitrogen-mediated crystallization (Invited) Invited International conference

N. Itagaki, K. Kuwahara, K. Matsushima, K. Oshikawa

SPIE (International society for optics and photonics) photonics west 2012 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Oral presentation (general)

Venue：The Moscone Center, San Francisco
Zinc oxide-based transparent conducting films with buffer layers fabricated via nitrogen-mediated crystallization International conference

N. Itagaki, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21) 2011.12

　More details

Event date： 2011.11 - 2011.12

Language：English Presentation type：Oral presentation (general)

Venue：Pacifico Yokohama Country：Japan
Ar/N2マグネトロンスパッタによる低抵抗ZnO:Al膜の作製 International conference

板垣奈穂, 桑原和成, 中原賢太, 山下大輔, 鎌滝晋礼, 徐鉉雄, 内田儀一郎, 古閑一憲, 白谷正治

Plasma Conference 2011 (PLASMA2011) 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan

Low resistive ZnO:Al films with ZnO buffer layers fabricated by Ar/N2 magnetron sputtering
窒素添加結晶化法による超均一・低抵抗酸化亜鉛薄膜の作製

板垣奈穂, 桑原和成, 中原賢太, 山下大輔, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

第27回九州・山口プラズマ研究会（兼応用物理学会九州支部シンポジウム「プラズマ計測とその応用　ナノプロセスから環境まで」） 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：かんぽの宿柳川, 福岡 Country：Japan
Spatial distribution of resistivity of ZnO:Al thin films fabricated on solid-phase crystallized seed layers International conference

N. Itagaki, K. Kuwahara, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

European Material Research Society 2011 Fall Meeting (E-MRS) 2011.9

　More details

Event date： 2011.9

Language：English Presentation type：Oral presentation (general)

Venue：Warsaw University of Technology Country：Poland
ZnO:Al薄膜の抵抗率の面内均一性に対する固相結晶化シード層の効果

板垣奈穂, 桑原和成, 山下大輔, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

第72回応用物理学会学術講演会 2011.9

　More details

Event date： 2011.8 - 2011.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：山形大学 Country：Japan
Fabrication of high quality ZnO films via nitrogen-mediated crystallization International conference

N. Itagaki, K. Kuwahara, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

第24回プラズマ材料科学シンポジウム (SPSM-24） 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
Fabrication of highly conducting ZnO:Al films utilizing solid-phase crystallized seed layer International conference

N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

European Materials Research Society 2011 Spring Meeting 2011.5

　More details

Event date： 2011.5

Language：English Presentation type：Oral presentation (general)

Venue：Congress Center, Nice Country：France
固相結晶化シード層を用いた酸化亜鉛系透明導電膜の作製

板垣奈穂, 桑原和成, 中原賢太, 山下大輔, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

第58回応用物理学関係連合講演会 2011.3

　More details

Event date： 2011.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
Novel fabrication method for transparent conducting oxide films utilizing solid-phase crystallized seed layers (Invited) Invited International conference

N. Itagaki, K. Kuwahara, and K. Nakahara

Ｉnternational Conference on Advances in Condensed and Nano Materials-2011(ICACNM-2011) 2011.2

　More details

Event date： 2011.2

Language：English Presentation type：Oral presentation (general)

Venue：Panjab University Country：India
Solid phase crystallization of ZnO films via nitrogen-atom mediation International conference

N. Itagaki, K. Kuwahara

2010 MRS Fall Meeting 2010.11

　More details

Event date： 2010.11 - 2010.12

Language：English Presentation type：Oral presentation (general)

Venue：Boston
Novel fabrication method for oxide semiconductors via atomic-additive mediated crystallization (Invited) Invited International conference

N. Itagaki

International technical conference of IEEE Region 10 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan

高い電気伝導度と可視光透明性を有する酸化亜鉛（ZnO)はタッチパネルや太陽電池等に欠かせない透明導電膜材料として期待されている。しかし、その性能はレアメタル系材料に比べて低く、本格的な実用化には到っていない。本講演では、申請者が提案する新しい手法により、超低抵抗率を有するレアメタル代替透明導電膜材料を実現したことを報告する。本提案の作製技術は、次の２つの特長を有する。
１．非晶質ZnON（酸窒化亜鉛）膜をアニールし、ZnOを固相結晶化させることで、結晶核密度の制御されたＺｎＯ薄膜を作製する。非晶質相からのＺｎＯ固相結晶化に成功した例は本研究が世界で初めてである。
２．１．で作製した固相結晶化上にZnOを形成することにより、結晶成長初期における核発生が抑制されるため、結晶性に優れたZnO膜を形成することが出来る。これにより従来に比べ抵抗率が一桁低いZnO膜の作製に成功した。
　本研究の成果はZnO透明導電膜実用化のブレークスルーにつながるだけでなく、他の酸化物にも応用可能な、新しい手法として発展すると期待される。
アモルファス相からの固相結晶化による酸化亜鉛薄膜の作製

板垣奈穂, 桑原和成, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

第26回九州・山口プラズマ研究会 2010.11

　More details

Event date： 2010.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：山陽館, 大分 Country：Japan
Fabrication of a-ZnON films by Ar/N2 sputtering for solid-phase crystallization of ZnO International conference

N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani

63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas (ICRP) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：Paris Country：France
窒素原子を介した固相結晶化法による酸化亜鉛薄膜の作製

板垣奈穂, 桑原和成, 中原賢太, 山下大輔, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

第71回応用物理学会学術講演会 2010.9

　More details

Event date： 2010.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan
公募で勝つには-私の経験

板垣奈穂

第37回西日本放電懇談会 2010.8

　More details

Event date： 2010.8

Language：Japanese Presentation type：Oral presentation (general)

Venue：東洋館, 佐賀 Country：Japan
Combinatorial sputtering of oxynitride semiconductors (Invited) Invited International conference

N. Itagaki

2010 International Workshop on Plasma Applications 2010.6

　More details

Event date： 2010.6

Language：English Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Amorphous Oxide Semiconductor Based TFTs: Their Current Situation and Issues (Invited) Invited International conference

N. Itagaki, S. Yaginuma, H. Omura, A. Goyal, A. Sato, M. Watanabe, M. Shimada, N. Kaji, K. Takahashi, M. Ofuji, T. Watanabe, H. Shimizu, K. Abe, Y. Tateishi, H. Yabuta, T. Iwasaki, R. Hayashi, T. Aiba, M. Sano and H. Kumomi

第19回日本MRS学術シンポジウム（English Session） 2009.12

　More details

Event date： 2009.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜, 神奈川 Country：Japan
In-X-O (X=B,Mg,Al,Si,Ti,Ga,Ge,Mo,Sn) をチャネル層に用いたTFTとその特性の元素X依存性

板垣奈穂, Amita Goyal, 岩崎達哉, 田透, 雲見日出也

第69回応用物理学会学術講演会 2008.9

　More details

Event date： 2008.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan
Zn-In-O based thin-film transistors: Compositional dependence International conference

N. Itagaki, T. Iwasaki, T. Den, H. Kumomi, K. Nomura, T. Kamiya, and H. Hosono

European Material Research Society 2007 Spring Meeting 2007.6

　More details

Event date： 2007.6

Language：English Presentation type：Oral presentation (general)

Venue：Stasbourg Country：France
In-Ga-Zn-O 系薄膜を用いた電界効果トランジスタとその組成依存性

板垣奈穂, 岩崎達哉, 田透, 雲見日出也, 野村研二, 神谷利夫, 細野秀雄

第53回応用物理学関係連合講演会 2006.3

　More details

Event date： 2006.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：武蔵工業大学, 東京 Country：Japan
マルチホロー型カソードを用いた高密度VHFプラズマの生成と診断

板垣奈穂, 新倉ちさと, 松田彰久, 近藤道雄

第65回応用物理学会学術講演会 2004.9

　More details

Event date： 2004.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北学院大, 宮城 Country：Japan
Electron-Temperature Measurement in SiH4/H2 ECR Plasma Produced by 915MHz Microwaves International conference

N. Itagaki, K. Sasaki and Y. Kawai

7th Asia Pacific Conf. Plasma Sci. Technol. and 17th Symp. Plasma Sci. Mater. 2004.6

　More details

Event date： 2004.6

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka Country：Japan
Production of Electron-Temperature-Controllable ECR Plasma for Thin Film Deposition International conference

N. Itagaki, K. Muta, N. Ishii and Y. Kawai

50th American Vacuum Soc. Int’l Symp. 2003.11

　More details

Event date： 2003.11

Language：English Presentation type：Oral presentation (general)

Venue：Baltimore
Relationship between the plasma parameter and the microwave power absorption in ECR plasma International conference

N. Itagaki, K. Muta, Y. Kawai, N. Ishii

American Phys. Soc. 45st Annual Meet. Division of Plasma Phys. 2003.11

　More details

Event date： 2003.11

Language：English Presentation type：Oral presentation (general)

Venue：Albuquerque
Electron Temperature Control in ECR Plasma by Varying the Resonance Zone Width International conference

N. Itagaki, K. Muta, N. Ishii and Y. Kawai

Asian European Int’l Conf. Plasma Surface Engineering 2003.9

　More details

Event date： 2003.9

Language：English Presentation type：Oral presentation (general)

Venue：JeJu Country：Korea, Republic of
Control of the electron temperature by varying the resonance zone width in ECR plasma International conference

N. Itagaki, H. Muta, N. Ishii and Y. Kawai

16th Symposium on Plasma Science for Materials 2003.6

　More details

Event date： 2003.6

Language：English Presentation type：Oral presentation (general)

Venue：Tokyo Country：Japan
Relationship between the electron temperature and the power absorption profile in ECR plasma International conference

N. Itagaki, K. Muta, N. Ishii and Y. Kawai

16th Int’l. Symp. Plasma Chemistry 2003.6

　More details

Event date： 2003.6

Language：English Presentation type：Oral presentation (general)

Venue：Taormina Country：Italy
ECRプラズマにおける共鳴幅変化による電子温度制御

板垣奈穂, 牟田浩司, 河合良信

第 50回応用物理学関係連合講演会 2003.3

　More details

Event date： 2003.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川大学, 神奈川 Country：Japan
Behaviour of N2 Dissociation in ECR Plasma International conference

N. Itagaki, S, Iwata, K. Muta, Y. Kawai, A. Yonesu, S. Kawakami, N. Ishii

4th Cross Straits Symp. Mater.,Energy and Environmental Sci. 2002.11

　More details

Event date： 2002.11

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka Country：Japan
915MHz ECRプラズマにおける電子温度のパワー吸収分布依存性

板垣奈穂, 牟田浩司, 河合良信

プラズマ・核融合学会第19回年会 2002.11

　More details

Event date： 2002.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：愛知県犬山市 Country：Japan
915MHz ECRプラズマの窒素解離特性

板垣奈穂, 河合良信, 米須章, 川上聡, 石井信雄

プラズマ科学のフロンティア研究会 2002.10

　More details

Event date： 2002.10

Language：Japanese Presentation type：Oral presentation (general)

Venue：核融合科学研究所, 岐阜 Country：Japan
Behavior of the molecular dissociation in 915 MHz ECR nitrogen plasma International conference

N. Itagaki, S. Iwata, K. Muta, A. Yonesu, S. Kawakami, N. Ishii, Y. Kawai

16th European Conf. Atomic & Molecular Phys. Ionized Gases & 5th Int’l Conf. Reactive Plasmas 2002.7

　More details

Event date： 2002.7

Language：English Presentation type：Oral presentation (general)

Venue：Grenoble Country：France
Electron-temperature dependence of nitrogen dissociation in 915 MHz ECR plasma International conference

N. Itagaki, S. Iwata, K. Muta, A. Yonesu, S. Kawakami, N. Ishii, Y. Kawai

6th Asian-European International Conference on Plasma Surface Engineering 2002.7

　More details

Event date： 2002.7

Language：English Presentation type：Oral presentation (general)

Venue：JeJu Country：Korea, Republic of
915 MHz ECRプラズマにおける窒素解離特性の電子温度依存性

板垣奈穂、岩田真治、牟田浩二、米須明、川上聡、石井信雄、河合良信

第49回応用物理学関係連合講演会 2002.3

　More details

Event date： 2002.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東海大学, 神奈川 Country：Japan
915MHz ECRプラズマにおける電子温度制御

板垣奈穂, 川上聡, 石井信雄, 河合良信

プラズマ・核融合学会第18回年会 2001.11

　More details

Event date： 2001.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：春日市, 福岡 Country：Japan
Electron-temperature control in 915 MHz electron cyclotron resonance plasma International conference

N. Itagaki, Y. Kawai, S. Kawakami, N. Ishii

48th American Vacuum Soc. Int’l Symp. 2001.10

　More details

Event date： 2001.10

Language：English Presentation type：Oral presentation (general)

Venue：San Francisco
Production of low electron temperature ECR plasma for plasma application International conference

N. Itagaki, S. Kawakami, N. Ishii, Y. Kawai

Int’l Conf. Phenomena in Ionized Gases 2001.7

　More details

Event date： 2001.7

Language：English Presentation type：Oral presentation (general)

Venue：Nagoya Country：Japan
Production of low-electron temperature ECR plasma with large area using 915 MHz microwave International conference

N. Itagaki, S. Kawakami, N. Ishii, Y. Kawai

6th Int’l Symp. Sputtering and Plasma Processes 2001.6

　More details

Event date： 2001.6

Language：English Presentation type：Oral presentation (general)

Venue：Kanazawa Country：Japan
Effect of Magnetic-Mirror Confinement on Electron Temperature Control in ECR Plasma International conference

N. Itagaki, Y. Ueda, N. Ishii and Y. Kawai

11th Int. Toki Conf. on Plasma Phys．and Control．Nucl. Fusion 2000.12

　More details

Event date： 2000.12

Language：English Presentation type：Oral presentation (general)

Venue：Toki, Gifu Country：Japan
ECRプラズマの低電子温度化に対する窒素ガス添加効果

板垣奈穂, 上田洋子, 石井信雄, 河合良信

平成12年度応用物理学会九州支部講演会 2000.12

　More details

Event date： 2000.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本大学, 熊本 Country：Japan
Production of Low Electron Temperature ECR Plasma for Plasma Processing International conference

N. Itagaki, Y.Ueda and Y. Kawai

5th Asia-Pacific Conference on Plasma Science & Technology and 13th Symposium on Plasma Science for Materials 2000.9

　More details

Event date： 2000.9

Language：English Presentation type：Oral presentation (general)

Venue：Dalian Country：China
Production of low electron temperature ECR plasma for thin film deposition International conference

N. Itagaki, Y. Ueda, N. Ishii and Y. Kawai

Int’l Conf. Plasma Surface Engineering 2000.9

　More details

Event date： 2000.9

Language：English Presentation type：Oral presentation (general)

Venue：Garmisch-Paetenkirchen Country：Germany
低電子温度ECRプラズマ生成への試み

板垣奈穂, 上田洋子, 河合良信, 石井信雄

第47回応用物理学関係連合講演会 2000.3

　More details

Event date： 2000.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学, 東京 Country：Japan
Control of the Electron Temperature in an ECR Plasma for Thin Film Deposition International conference

N. Itagaki, A. Fukuda, Y. Ueda, N.Ishii and Y. Kawai

American Phys. Soc. 41st Annual Meet. Division of Plasma Phys. 1999.11

　More details

Event date： 1999.11

Language：English Presentation type：Oral presentation (general)

Venue：Seattle
Plasma parameter measurements and deposition of a-Si:H thin films in pulsed ECR plasma International conference

N. Itagaki, A. Fukuda, T. Yoshizawa, M. Shindo, Y. Ueda and Y. Kawai

Asian European Int’l Conf. Plasma Surface Engineering 1999.9

　More details

Event date： 1999.9

Language：English Presentation type：Oral presentation (general)

Venue：Beijing Country：China
Investigation of ECR plasma uniformity from the point of view of production & confinement International conference

N. Itagaki, T. Yoshizawa, Y. Ueda, Y. Kawai

12th Symposium on Plasma Science for Materials 1999.6

　More details

Event date： 1999.6

Language：English Presentation type：Oral presentation (general)

Venue：Tokyo University Country：Japan
スパッタエピタキシーによる新規酸窒化物半導体材料の作製とエキシトンデバイスへの応用(招待講演) Invited

板垣奈穂

第134回フロンティア材料研究所講演会 2021.1

　More details

Event date： - 2021.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学フロンティア材料研究所 Country：Japan
Predictions for High Quality Amorphous ITO(In2O3:Sn) Film Formation via Hybrid Machine Learning Model Invited International conference

K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

ICTS 2024.1

　More details

Event date： 2024.8

Language：English Presentation type：Oral presentation (general)

Country：Korea, Republic of
Predictions for High Quality Amorphous ITO(In2O3:Sn) Film Formation via Hybrid Machine Learning Model Invited International conference

K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

ICTS 2024.1

　More details

Event date： 2024.8

Language：English

Country：Korea, Republic of

researchmap
プラズマスパッタによる高移動度アモルファスITO成膜におけるハイブリッド機械学習モデル

鎌滝晋礼, 板垣奈穂, 山下大輔, 奥村賢直, 山下尚人, 古閑一憲, 白谷正治

第71回応用物理学会春季学術講演会 2024.3

　More details

Event date： 2024.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京都市大学 Country：Japan
Large-Scale Fabrication of Tm3 Fe5 O12 Film with Perpendicular Magnetic Anisotropy Using Magnetron Sputtering International conference

A. M. Nurut, S. Obinata, T. Okumura, K. Kamataki, K. Koga, N. Itagaki, M. Shiratani, N. Yamashita

ISPlasma 2024.3

　More details

Event date： 2024.3

Language：English Presentation type：Oral presentation (general)

Venue：東京都市大学 Country：Japan
イネ種皮のプラズマ起因化学種透過性の二次元分布解析

史合平, 奥村賢直, P. Attri, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第71回応用物理学会春季学術講演会 2024.3

　More details

Event date： 2024.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京都市大学 Country：Japan
プラズマ照射によるシロイヌナズナ種皮の物質透過性変化

奥村賢直, 古閑一憲, アタリパンカジ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 南原英司

第71回応用物理学会春季学術講演会 2024.3

　More details

Event date： 2024.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京都市大学 Country：Japan
大気圧プラズマを用いた窒素固定における電極温度の効果

中尾匠, 奥村賢直, パンカジアタリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 古閑一憲

第71回応用物理学会春季学術講演会 2024.3

　More details

Event date： 2024.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京都市大学 Country：Japan
CxHy+ArプラズマCVDを用いた水素化アモルファスカーボン膜の堆積特性に対するガス圧力の効果

小野晋次郎, 恵利眞人, 奥村賢直, 山下尚人, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第71回応用物理学会春季学術講演会 2024.3

　More details

Event date： 2024.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京都市大学 Country：Japan
CxHy+ArプラズマCVDを用いた水素化アモルファスカーボン膜の堆積特性に対するガス圧力の効果

小野晋次郎, 恵利眞人, 奥村賢直, 山下尚人, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第71回応用物理学会春季学術講演会 2024.3

　More details

Event date： 2024.3

Language：Japanese

Venue：東京都市大学 Country：Japan

researchmap
大気圧プラズマを用いた窒素固定における電極温度の効果

中尾匠, 奥村賢直, パンカジアタリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 古閑一憲

第71回応用物理学会春季学術講演会 2024.3

　More details

Event date： 2024.3

Language：Japanese

Venue：東京都市大学 Country：Japan

researchmap
プラズマ照射によるシロイヌナズナ種皮の物質透過性変化

奥村賢直, 古閑一憲, アタリパンカジ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 南原英司

第71回応用物理学会春季学術講演会 2024.3

　More details

Event date： 2024.3

Language：Japanese

Venue：東京都市大学 Country：Japan

researchmap
プラズマスパッタによる高移動度アモルファスITO成膜におけるハイブリッド機械学習モデル

鎌滝晋礼, 板垣奈穂, 山下大輔, 奥村賢直, 山下尚人, 古閑一憲, 白谷正治

第71回応用物理学会春季学術講演会 2024.3

　More details

Event date： 2024.3

Language：Japanese

Venue：東京都市大学 Country：Japan

researchmap
イネ種皮のプラズマ起因化学種透過性の二次元分布解析

史合平, 奥村賢直, P. Attri, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第71回応用物理学会春季学術講演会 2024.3

　More details

Event date： 2024.3

Language：Japanese

Venue：東京都市大学 Country：Japan

researchmap
Large-Scale Fabrication of Tm3 Fe5 O12 Film with Perpendicular Magnetic Anisotropy Using Magnetron Sputtering International conference

A. M. Nurut, S. Obinata, T. Okumura, K. Kamataki, K. Koga, N. Itagaki, M. Shiratani, N. Yamashita

ISPlasma 2024.3

　More details

Event date： 2024.3

Language：English

Venue：東京都市大学 Country：Japan

researchmap
Sputtering deposition of low resistive 30-nm-thick ZnO:Al films on seed layers grown via solid phase crystallization of fractionally crystallized ZnON films International conference

Y. Wada, S. Zhiyuan, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki

ISPlasma 2024.3

　More details

Event date： 2024.3

Language：English Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Deposition of carbon nanoparticles fabricated by multi-hollow discharge plasma CVD on DC biased substrates International conference

K. Koga, S. Ono, M. Eri, S. H. Hwang, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M.Shiratani

ISPlasma 2024.3

　More details

Event date： 2024.3

Language：English Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Molecular structure analysis of DBD plasma irradiated DMPO by LC-MS International conference

T. Okumura, H. Shi, P.Attri, D. Yamasita, K. Kamataki, N.Yamasita, N. Itagaki, K. Koga, M. Shiratan

ISPlasma 2024.3

　More details

Event date： 2024.3

Language：English Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Nitrogen Fixation to Leaf Mold Using Air Plasma and Evaluation of Phenotype Response of Sugarcane to Nitrogen-Fixed Fertilizer International conference

T.Nakao, T. Okumura, P. Attri, D. Yamashita, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani, K. Koga

ISPlasma 2024.3

　More details

Event date： 2024.3

Language：English Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Deposition of carbon nanoparticles fabricated by multi-hollow discharge plasma CVD on DC biased substrates International conference

K. Koga, S. Ono, M. Eri, S. H. Hwang, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M.Shiratani

ISPlasma 2024.3

　More details

Event date： 2024.3

Language：English

Venue：名古屋大学 Country：Japan

researchmap
Sputtering deposition of low resistive 30-nm-thick ZnO:Al films on seed layers grown via solid phase crystallization of fractionally crystallized ZnON films International conference

Y. Wada, S. Zhiyuan, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki

ISPlasma 2024.3

　More details

Event date： 2024.3

Language：English

Venue：名古屋大学 Country：Japan

researchmap
Nitrogen Fixation to Leaf Mold Using Air Plasma and Evaluation of Phenotype Response of Sugarcane to Nitrogen-Fixed Fertilizer International conference

T.Nakao, T. Okumura, P. Attri, D. Yamashita, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani, K. Koga

ISPlasma 2024.3

　More details

Event date： 2024.3

Language：English

Venue：名古屋大学 Country：Japan

researchmap
Molecular structure analysis of DBD plasma irradiated DMPO by LC-MS International conference

T. Okumura, H. Shi, P.Attri, D. Yamasita, K. Kamataki, N.Yamasita, N. Itagaki, K. Koga, M. Shiratan

ISPlasma 2024.3

　More details

Event date： 2024.3

Language：English

Venue：名古屋大学 Country：Japan

researchmap
プラズマスパッタによる高品質アモルファスITO薄膜形成のためのハイブリッド機械学習モデル Invited

鎌滝晋礼，板垣奈穂，山下大輔, 奥村賢直，山下尚人, 古閑一憲, 白谷正治

SPP-41 2024.1

　More details

Event date： 2024.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
プラズマスパッタによる高品質アモルファスITO薄膜形成のためのハイブリッド機械学習モデル Invited

鎌滝晋礼, 板垣奈穂, 山下大輔, 奥村賢直, 山下尚人, 古閑一憲, 白谷正治

SPP-41 2024.1

　More details

Event date： 2024.1

Language：Japanese

Venue：東京工業大学 Country：Japan

researchmap
Effects of Carbon Nanoparticle Interposed between Two Hydrogenated Amorphous Carbon Films on Surface Morphology of a-C:H Film

S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

第39回九州･山口プラズマ研究会 2023.12

　More details

Event date： 2023.12

Language：English Presentation type：Oral presentation (general)

Venue：国立京都国際会館 Country：Japan
Enhancement of The Coercivity and Blocking Temperature of Co doped ZnO films by RF sputtering Using Nitrogen International conference

M. N. Agusutrisno, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, N. Yamashita

MRM2023/IUMRS-ICA2023 2023.12

　More details

Event date： 2023.12

Language：English Presentation type：Oral presentation (general)

Venue：国立京都国際会館 Country：Japan
Evaluation of Elastic Parameters of a-C:H Film with Carbon Nanoparticles Using Nanoindentation Method International conference

K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

MRM2023/IUMRS-ICA2023 2023.12

　More details

Event date： 2023.12

Language：English Presentation type：Oral presentation (general)

Venue：国立京都国際会館 Country：Japan
Hybrid machine learning model prediction for high mobility amorphous ITO films fabricated by RF plasma sputtering International conference

K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

MRM2023/IUMRS-ICA2023 2023.12

　More details

Event date： 2023.12

Language：English Presentation type：Oral presentation (general)

Venue：国立京都国際会館 Country：Japan
Effects of Carbon Nanoparticle Interposed between Two Hydrogenated Amorphous Carbon Films on Surface Morphology of a-C:H Film

S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

第39回九州･山口プラズマ研究会 2023.12

　More details

Event date： 2023.12

Language：English

Venue：国立京都国際会館 Country：Japan

researchmap
Hybrid machine learning model prediction for high mobility amorphous ITO films fabricated by RF plasma sputtering International conference

K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

MRM2023/IUMRS-ICA2023 2023.12

　More details

Event date： 2023.12

Language：English

Venue：国立京都国際会館 Country：Japan

researchmap
Evaluation of Elastic Parameters of a-C:H Film with Carbon Nanoparticles Using Nanoindentation Method International conference

K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

MRM2023/IUMRS-ICA2023 2023.12

　More details

Event date： 2023.12

Language：English

Venue：国立京都国際会館 Country：Japan

researchmap
Enhancement of The Coercivity and Blocking Temperature of Co doped ZnO films by RF sputtering Using Nitrogen International conference

M. N. Agusutrisno, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, N. Yamashita

MRM2023/IUMRS-ICA2023 2023.12

　More details

Event date： 2023.12

Language：English

Venue：国立京都国際会館 Country：Japan

researchmap
クメンを用いた二周波容量結合プラズマ CVD 法による a-C:H 膜の製膜特性

恵利眞人, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：山口KDDI維新ホール Country：Japan
PECVD を用いた a-C:H 成膜における添加希ガス種における成膜機構の違い

池田築, 大高真寛，大友洋，脇田大地，頼建勲，鎌滝晋礼, 山下大輔，奥村賢直，山下尚人，板垣奈穂，古閑一憲, 白谷正治, 進藤崇央，松土龍夫

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：山口KDDI維新ホール Country：Japan
任意波形放電による水素化アモルファスカーボン成膜：イオンフラックスが膜質に与える影響

脇田大地，大高真寛，池田築，頼建勲，大友洋，鎌滝晋礼，山下直人，板垣奈穂，古閑一憲，白谷正治，進藤崇央，松土龍夫

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：山口KDDI維新ホール Country：Japan
逆 Stranski-Krastanov モードによるサファイア基板上への(ZnO)x(InN)1-x 膜のエピタキシャル成長:バッファー層のモフォロジーの影響

畑昌太朗，中野祐太郎，成重椋太，山下尚人，鎌滝晋礼，奥村賢直，古閑一憲，白谷正治，木山治樹，板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：山口KDDI維新ホール Country：Japan
逆 Stranski-Krastanov モードを利用した異なるオフ角を有するサファイア基板上への(ZnO)x(InN)1-x 膜の成長

中野祐太郎，成重椋太，山下尚人，鎌滝晋礼，奥村賢直，古閑一憲，白谷正治，木山治樹，板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：山口KDDI維新ホール Country：Japan
放電電圧変調波形が高周波容量結合プラズマに与える影響：PIC-MCC シミュレーション

長尾伊織，山本祐馬，佐藤優志，鎌滝晋礼，山下尚人, 奥村賢直，木山治樹，板垣奈穂，古閑一憲，白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：山口KDDI維新ホール Country：Japan
水と大気圧プラズマの相互作用による二酸化炭素分解

乙部響, P. Attri，奥村賢直, 史合平, 中尾匠，日高直哉, 鎌滝晋礼，山下大輔，板垣奈穂，古閑一憲，白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：山口KDDI維新ホール Country：Japan
TEOS-PECVD における発光分光計測を用いたSiO2 薄膜膜質推定についての研究

佐藤優志, 山本祐馬, F. W. Sukuma, 長尾伊織, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：山口KDDI維新ホール Country：Japan
PECVD を用いた a-C:H 成膜における添加希ガス種における成膜機構の違い

池田築, 大高真寛, 大友洋, 脇田大地, 頼建勲, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治, 進藤崇央, 松土龍夫

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese

Venue：山口KDDI維新ホール Country：Japan

researchmap
逆 Stranski-Krastanov モードを利用した異なるオフ角を有するサファイア基板上への(ZnO)x(InN)1-x 膜の成長

中野祐太郎, 成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 木山治樹, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese

Venue：山口KDDI維新ホール Country：Japan

researchmap
逆 Stranski-Krastanov モードによるサファイア基板上への(ZnO)x(InN)1-x 膜のエピタキシャル成長:バッファー層のモフォロジーの影響

畑昌太朗, 中野祐太郎, 成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 木山治樹, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese

Venue：山口KDDI維新ホール Country：Japan

researchmap
水と大気圧プラズマの相互作用による二酸化炭素分解

乙部響, P. Attri, 奥村賢直, 史合平, 中尾匠, 日高直哉, 鎌滝晋礼, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese

Venue：山口KDDI維新ホール Country：Japan

researchmap
放電電圧変調波形が高周波容量結合プラズマに与える影響：PIC-MCC シミュレーション

長尾伊織, 山本祐馬, 佐藤優志, 鎌滝晋礼, 山下尚人, 奥村賢直, 木山治樹, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese

Venue：山口KDDI維新ホール Country：Japan

researchmap
任意波形放電による水素化アモルファスカーボン成膜：イオンフラックスが膜質に与える影響

脇田大地, 大高真寛, 池田築, 頼建勲, 大友洋, 鎌滝晋礼, 山下直人, 板垣奈穂, 古閑一憲, 白谷正治, 進藤崇央, 松土龍夫

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese

Venue：山口KDDI維新ホール Country：Japan

researchmap
クメンを用いた二周波容量結合プラズマ CVD 法による a-C:H 膜の製膜特性

恵利眞人, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese

Venue：山口KDDI維新ホール Country：Japan

researchmap
TEOS-PECVD における発光分光計測を用いたSiO2 薄膜膜質推定についての研究

佐藤優志, 山本祐馬, F. W. Sukuma, 長尾伊織, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会 2023.12

　More details

Event date： 2023.12

Language：Japanese

Venue：山口KDDI維新ホール Country：Japan

researchmap
空気プラズマを用いた窒素固定に対する放電電力密度の効果

中尾匠, 奥村賢直, パンカジアタリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 古閑一憲

第40回プラズマ・核融合学会年会 2023.11

　More details

Event date： 2023.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：アイーナ・いわて県民情報交流センター Country：Japan
空気プラズマを用いた窒素固定に対する放電電力密度の効果

中尾匠, 奥村賢直, パンカジアタリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 古閑一憲

第40回プラズマ・核融合学会年会 2023.11

　More details

Event date： 2023.11

Language：Japanese

Venue：アイーナ・いわて県民情報交流センター Country：Japan

researchmap
Sputtering deposition of single crystalline ZnO films on sapphire substrates via inverted Stranski-Krastanov mode: effects of thickness of 3D island buffer layer

H. Otsuyama, R. Mitsuishi, T. Yunoue, K. Yataka, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference 2023.11

　More details

Event date： 2023.11

Language：English Presentation type：Oral presentation (general)

Venue：九州大学伊都キャンパス Country：Japan
プラズマ中に浮遊する微粒子の帯電量の新評価法

井口恒聖, 佐藤斗真, 鎌滝晋礼, P. Yiming, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治, 富田健太郎

2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference 2023.11

　More details

Event date： 2023.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学伊都キャンパス Country：Japan
TEOS-PECVD によるSiO2成膜におけるプラズマ発光強度と膜質の関係

山本祐馬, 佐藤優志, 長尾伊織, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference 2023.11

　More details

Event date： 2023.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学伊都キャンパス Country：Japan
任意電圧波形放電による容量結合プラズマにおける重畳周波数の効果：PIC-MCCモデル

頼建勳, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference 2023.11

　More details

Event date： 2023.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学伊都キャンパス Country：Japan
Sputtering deposition of single crystalline ZnO films on sapphire substrates via inverted Stranski-Krastanov mode: effects of thickness of 3D island buffer layer

H. Otsuyama, R. Mitsuishi, T. Yunoue, K. Yataka, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference 2023.11

　More details

Event date： 2023.11

Language：English

Venue：九州大学伊都キャンパス Country：Japan

researchmap
任意電圧波形放電による容量結合プラズマにおける重畳周波数の効果：PIC-MCCモデル

頼建勳, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference 2023.11

　More details

Event date： 2023.11

Language：Japanese

Venue：九州大学伊都キャンパス Country：Japan

researchmap
プラズマ中に浮遊する微粒子の帯電量の新評価法

井口恒聖, 佐藤斗真, 鎌滝晋礼, P. Yiming, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治, 富田健太郎

2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference 2023.11

　More details

Event date： 2023.11

Language：Japanese

Venue：九州大学伊都キャンパス Country：Japan

researchmap
TEOS-PECVD によるSiO2成膜におけるプラズマ発光強度と膜質の関係

山本祐馬, 佐藤優志, 長尾伊織, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference 2023.11

　More details

Event date： 2023.11

Language：Japanese

Venue：九州大学伊都キャンパス Country：Japan

researchmap
Comparative study of deposition characteristics of different precursors for plasma CVD International conference

S. Ono, M. Eri, T. Okumura, K. Kunihiro, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

DPS2023 2023.11

　More details

Event date： 2023.11

Language：English Presentation type：Oral presentation (general)

Venue：ウインク愛知 Country：Japan
Quantitative Analysis of Electric Field Intensity Generated by Scalable Dielectric Barrier Discharge Electrodes for Irradiating to Plant Seeds International conference

K. Koga, T. Okumura, T. Nakao, K. Kamataki, N. Yamashita, N. Itagaki, P. Attri, M. Shiratani

DPS2023 2023.11

　More details

Event date： 2023.11

Language：English Presentation type：Oral presentation (general)

Venue：ウインク愛知 Country：Japan
Comparative study of deposition characteristics of different precursors for plasma CVD International conference

S. Ono, M. Eri, T. Okumura, K. Kunihiro, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

DPS2023 2023.11

　More details

Event date： 2023.11

Language：English

Venue：ウインク愛知 Country：Japan

researchmap
Quantitative Analysis of Electric Field Intensity Generated by Scalable Dielectric Barrier Discharge Electrodes for Irradiating to Plant Seeds International conference

K. Koga, T. Okumura, T. Nakao, K. Kamataki, N. Yamashita, N. Itagaki, P. Attri, M. Shiratani

DPS2023 2023.11

　More details

Event date： 2023.11

Language：English

Venue：ウインク愛知 Country：Japan

researchmap
質量分析を用いたプラズマ照射イネ種子における分子修飾解析

史合平,奥村賢直,パンカジアトリ,山下大輔,鎌滝晋礼,山下尚人,板垣奈穂,古閑一憲,白谷正治

第33回日本MRS年次大会 2023.11

　More details

Event date： 2023.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
大量処理のためのプラズマ照射による土壌への窒素固定化の最適化

中尾匠,奥村賢,アタリパンカジ,山下大輔,鎌滝晋礼,山下尚人,板垣奈穂,白谷正治,古閑一憲

第33回日本MRS年次大会 2023.11

　More details

Event date： 2023.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
液体クロマトグラフィー質量分析法を用いたプラズマ被照射物からの亜硝酸塩および硝酸塩の同時検出法の開発

日高直哉,奥村賢直,アタリパンカジ,鎌滝晋礼,山下尚人,板垣奈穂,古閑一憲,白谷正治

第33回日本MRS年次大会 2023.11

　More details

Event date： 2023.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
スケーラブル誘電体バリア放電プラズマを照射したDMPOの質量分析

乙部響,史合平,奥村賢直,阿南輝樹,アタリパンカジ,山下大輔,鎌滝晋礼,山下尚人,板垣奈穂,古閑一憲,白谷正治

第33回日本MRS年次大会 2023.11

　More details

Event date： 2023.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
質量分析を用いたプラズマ照射イネ種子における分子修飾解析

史合平, 奥村賢直, パンカジアトリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第33回日本MRS年次大会 2023.11

　More details

Event date： 2023.11

Language：Japanese

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
液体クロマトグラフィー質量分析法を用いたプラズマ被照射物からの亜硝酸塩および硝酸塩の同時検出法の開発

日高直哉, 奥村賢直, アタリパンカジ, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第33回日本MRS年次大会 2023.11

　More details

Event date： 2023.11

Language：Japanese

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
大量処理のためのプラズマ照射による土壌への窒素固定化の最適化

中尾匠, 奥村賢, アタリパンカジ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 古閑一憲

第33回日本MRS年次大会 2023.11

　More details

Event date： 2023.11

Language：Japanese

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
スケーラブル誘電体バリア放電プラズマを照射したDMPOの質量分析

乙部響, 史合平, 奥村賢直, 阿南輝樹, アタリパンカジ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第33回日本MRS年次大会 2023.11

　More details

Event date： 2023.11

Language：Japanese

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Predictions for High Mobility Amorphous ITO(In2O3:Sn) Films via Hybrid Machine Learning Model International conference

K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

AAPPS-DPP2023 2023.11

　More details

Event date： 2023.11

Language：English Presentation type：Oral presentation (general)

Venue：ポートメッセ名古屋 Country：Japan
Predictions for High Mobility Amorphous ITO(In2O3:Sn) Films via Hybrid Machine Learning Model International conference

K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

AAPPS-DPP2023 2023.11

　More details

Event date： 2023.11

Language：English

Venue：ポートメッセ名古屋 Country：Japan

researchmap
Highly sensitive electric field vector measurements using an optically trapped fine particle International conference

M. Shiratani, T. Sato, K. Kamataki, S. W. Fitriani，K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga

Global Plasma Forum in Aomori 2023.10

　More details

Event date： 2023.10

Language：English Presentation type：Oral presentation (general)

Venue：ねぶたの家ワ・ラッセ Country：Korea, Republic of
Controlling the synthesis, transport, and surface coverage of carbon nanoparticles using plasma CVD International conference

S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani

Global Plasma Forum in Aomori 2023.10

　More details

Event date： 2023.10

Language：English Presentation type：Oral presentation (general)

Venue：ねぶたの家ワ・ラッセ Country：Japan
Evaluation of carbon nanoparticle adhesion on substrate surface deposited by plasma CVD International conference

K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

Global Plasma Forum in Aomori 2023.10

　More details

Event date： 2023.10

Language：English Presentation type：Oral presentation (general)

Venue：ねぶたの家ワ・ラッセ Country：Japan
Controlling the synthesis, transport, and surface coverage of carbon nanoparticles using plasma CVD International conference

S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani

Global Plasma Forum in Aomori 2023.10

　More details

Event date： 2023.10

Language：English

Venue：ねぶたの家ワ・ラッセ Country：Japan

researchmap
Highly sensitive electric field vector measurements using an optically trapped fine particle International conference

M. Shiratani, T. Sato, K. Kamataki, S. W. Fitriani, K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga

Global Plasma Forum in Aomori 2023.10

　More details

Event date： 2023.10

Language：English

Venue：ねぶたの家ワ・ラッセ Country：Korea, Republic of

researchmap
Evaluation of carbon nanoparticle adhesion on substrate surface deposited by plasma CVD International conference

K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

Global Plasma Forum in Aomori 2023.10

　More details

Event date： 2023.10

Language：English

Venue：ねぶたの家ワ・ラッセ Country：Japan

researchmap
Evaluation of Interaction Between Substrate and Nanoparticles Deposited by Plasma Chemical Vapor Deposition International conference

K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N.Yamashita, N. Itagaki, M. Shiratani

GEC 2023.10

　More details

Event date： 2023.10

Language：English Presentation type：Oral presentation (general)

Venue：Michigan League
Evaluation of Interaction Between Substrate and Nanoparticles Deposited by Plasma Chemical Vapor Deposition International conference

K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N.Yamashita, N. Itagaki, M. Shiratani

GEC 2023.10

　More details

Event date： 2023.10

Language：English

Venue：Michigan League

researchmap
プラズマ照射による窒素固定肥料へのサトウキビの表現型応答解析

中尾匠, 奥村賢直, パンカジアタリ, 古閑一憲, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本城ホール他 Country：Japan
光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(4)

鎌滝晋礼, 佐藤斗真, 井口恒聖, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本城ホール他 Country：Japan
ZnON膜からの固相結晶化ZnO膜の形成と透明導電膜シード層としての効果：ZnON膜の結晶化度の影響

和田義晴, 沈志遠, 薮田久人, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本城ホール他 Country：Japan
逆Stranski-Krastanovモードを用いたサファイア基板上へのZnO単結晶膜成長：MgOバッファー層の効果

湯上貴文, 矢高功太郎, 山下尚人, 山下大輔,　奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲, 白谷正治, 板垣奈穂

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本城ホール他 Country：Japan
サファイア基板上への原子ステップを有するZn1-xMgxO薄膜の形成：3次元島バッファー層の形成温度の影響

矢高功太郎, 湯上貴文, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本城ホール他 Country：Japan
ZnOおよびScAlMgO4ステップ基板上への(ZnO)x(InN)1-x膜の室温エピタキシャル成長

成重椋太, 中野祐太朗, 山下尚人, 鎌滝晋礼, 奥村賢直, 木山治樹, 古閑一憲, 白谷正治, 薮田久人, 板垣奈穂

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本城ホール他 Country：Japan
逆Stranski-Krastanovモードによる格子不整合基板上への原子平坦 (ZnO)x(InN)1-x 膜の成長

中野祐太郎, 成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 木山治樹, 薮田久人, 板垣奈穂

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本城ホール他 Country：Japan
質量分析を用いたプラズマ照射DMPOの分子修飾解析

史合平, 奥村賢直, P. Attri, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本城ホール他 Country：Japan
サンドウィッチ構造 a-C:H 膜の剥離と強度に対する膜界面に堆積したナノ粒子の効果

小野晋次郎, 恵利眞人, 奥村賢直, 鎌滝晋礼, 山下尚人, 木山治樹, 板垣奈穂, 古閑一憲, 白谷正治

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本城ホール他 Country：Japan
任意波形放電を用いた水素化アモルファスカーボン膜の膜質制御

大高真寛,大友洋, 池田築, 頼建勲, 脇田大地, 鎌滝晋礼, 山下直人, 板垣奈穂, 古閑一憲, 白谷正治, 進藤崇央, 田中諭志, 松土龍夫

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本城ホール他 Country：Japan
ZnON膜からの固相結晶化ZnO膜の形成と透明導電膜シード層としての効果：ZnON膜の結晶化度の影響

和田義晴, 沈志遠, 薮田久人, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：熊本城ホール他 Country：Japan

researchmap
逆Stranski-Krastanovモードを用いたサファイア基板上へのZnO単結晶膜成長：MgOバッファー層の効果

湯上貴文, 矢高功太郎, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲, 白谷正治, 板垣奈穂

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：熊本城ホール他 Country：Japan

researchmap
逆Stranski-Krastanovモードによる格子不整合基板上への原子平坦 (ZnO)x(InN)1-x 膜の成長

中野祐太郎, 成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 木山治樹, 薮田久人, 板垣奈穂

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：熊本城ホール他 Country：Japan

researchmap
質量分析を用いたプラズマ照射DMPOの分子修飾解析

史合平, 奥村賢直, P. Attri, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：熊本城ホール他 Country：Japan

researchmap
光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(4)

鎌滝晋礼, 佐藤斗真, 井口恒聖, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：熊本城ホール他 Country：Japan

researchmap
任意波形放電を用いた水素化アモルファスカーボン膜の膜質制御

大高真寛, 大友洋, 池田築, 頼建勲, 脇田大地, 鎌滝晋礼, 山下直人, 板垣奈穂, 古閑一憲, 白谷正治, 進藤崇央, 田中諭志, 松土龍夫

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：熊本城ホール他 Country：Japan

researchmap
プラズマ照射による窒素固定肥料へのサトウキビの表現型応答解析

中尾匠, 奥村賢直, パンカジアタリ, 古閑一憲, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：熊本城ホール他 Country：Japan

researchmap
サンドウィッチ構造 a-C:H 膜の剥離と強度に対する膜界面に堆積したナノ粒子の効果

小野晋次郎, 恵利眞人, 奥村賢直, 鎌滝晋礼, 山下尚人, 木山治樹, 板垣奈穂, 古閑一憲, 白谷正治

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：熊本城ホール他 Country：Japan

researchmap
サファイア基板上への原子ステップを有するZn1-xMgxO薄膜の形成：3次元島バッファー層の形成温度の影響

矢高功太郎, 湯上貴文, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：熊本城ホール他 Country：Japan

researchmap
ZnOおよびScAlMgO4ステップ基板上への(ZnO)x(InN)1-x膜の室温エピタキシャル成長

成重椋太, 中野祐太朗, 山下尚人, 鎌滝晋礼, 奥村賢直, 木山治樹, 古閑一憲, 白谷正治, 薮田久人, 板垣奈穂

第84回応用物理学会秋季学術講演会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：熊本城ホール他 Country：Japan

researchmap
質量分析を用いたプラズマ照射イネ種子における変動分子の組織別解析

史合平, 奥村賢直, A. Pankaj, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

2023年度(第76回)電気・情報関係学会九州支部連合大会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：崇城大学 Country：Japan
大気圧空気プラズマによる硝酸態窒素固定量に対する放電電力密度依存性

中尾匠, 奥村賢直, A. Pankaj, 古閑一憲, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治

2023年度(第76回)電気・情報関係学会九州支部連合大会 2023.9

　More details

Event date： 2023.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：崇城大学 Country：Japan
大気圧空気プラズマによる硝酸態窒素固定量に対する放電電力密度依存性

中尾匠, 奥村賢直, A. Pankaj, 古閑一憲, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治

2023年度(第76回)電気・情報関係学会九州支部連合大会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：崇城大学 Country：Japan

researchmap
質量分析を用いたプラズマ照射イネ種子における変動分子の組織別解析

史合平, 奥村賢直, A. Pankaj, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

2023年度(第76回)電気・情報関係学会九州支部連合大会 2023.9

　More details

Event date： 2023.9

Language：Japanese

Venue：崇城大学 Country：Japan

researchmap
Measurement of electric field, UV photons, and long-lifetime reactive species generated by atmospheric pressure air plasma for plasma bio applications International conference

T. Okumura, S. Tsuboyama, Y. Tagawa, T. Nakao, T. Anan, H. Tanaka, K. Kamataki, N. Yamashita, N. Itagaki, P. Attri, K. Koga, M. Shiratani, K. Kuchitsu

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Effects of tailored voltage waveform discharges on deposition of hydrogenated amorphous carbon films by CH4/Ar capacitively coupled plasma International conference

M. Otaka, H. Otomo, K. Ikeda, J. Lai, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, T. Shindo, S. Tanaka, T. Matsudo

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Optical tweezers technique for electric field strength and fluctuation measurements in plasma using a fine particle International conference

T. Sato, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Control of ion trajectory in high aspect ratio trenches by using amplitude modulated rf discharges International conference

I. Nagao, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Investigation of particle charge and interparticle interaction in a plasma International conference

K. Kamataki, T. Sato, K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Coverage control of carbon nanoparticles on substrate using capacitively coupled plasma chemical vapor deposition International conference

K. Koga, S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Sputter epitaxy of atomically flat (ZnO)x(InN)1-x films on sapphire substrates using ZnO(N) buffer layers fabricated by Ar/N2 discharges International conference

Y. Nakano, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, H. Kiyama, H. Yabuta, N. Itagaki

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Deposition characteristics of cumene plasma CVD for high-speed deposition of high-density a-C:H films International conference

S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Relation between Spatial Distribution of Optical Emission Intensity and SiO2 Film Property in TEOS-PECVD International conference

Y. Yamamoto, I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Effects of Ne mixing on plasma enhanced chemical vapor deposition of a-C:H films using CH4/Ar/Ne capacitively coupled discharges International conference

K. Ikeda, M. Otaka, H. Otomo, T. Arima, J. Lai, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani, T. Shindo, S. Tanaka, T. Matsudo

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Sputter epitaxy of Zn1-xMgxO films on lattice-mismatched sapphire substrates utilizing ZnO(N)/MgO buffer layers fabricated by Ar/N2 and Ar/O2 discharges International conference

T. Yunoue, K. Yataka, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Pseudomorphic growth of (ZnO)x(InN)1-x films on ZnO substrates by magnetron sputtering using Ar/N2/O2 discharges International conference

R. Narishige, Y. Nakano, N. Yamashita, K. Kamataki, T. Okumura, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Sputter deposition of low resistive 30-nm-thick ZnO:Al films using ZnO seed layers grown via solid-phase crystallization International conference

Y. Wada, Z. Shen, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Effects of lower discharge frequency on ion energy distribution function in dual frequency plasma studied by particle-in-cell/Monte Carlo method International conference

J. Lai, T. Arima, M. Otaka, K. Ikeda, I. Nagao, K. Kamataki, D. Yamashita, N. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands
Control of ion trajectory in high aspect ratio trenches by using amplitude modulated rf discharges International conference

I. Nagao, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Sputter epitaxy of Zn1-xMgxO films on lattice-mismatched sapphire substrates utilizing ZnO(N)/MgO buffer layers fabricated by Ar/N2 and Ar/O2 discharges International conference

T. Yunoue, K. Yataka, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Sputter epitaxy of atomically flat (ZnO)x(InN)1-x films on sapphire substrates using ZnO(N) buffer layers fabricated by Ar/N2 discharges International conference

Y. Nakano, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, H. Kiyama, H. Yabuta, N. Itagaki

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Sputter deposition of low resistive 30-nm-thick ZnO:Al films using ZnO seed layers grown via solid-phase crystallization International conference

Y. Wada, Z. Shen, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Relation between Spatial Distribution of Optical Emission Intensity and SiO2 Film Property in TEOS-PECVD International conference

Y. Yamamoto, I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Pseudomorphic growth of (ZnO)x(InN)1-x films on ZnO substrates by magnetron sputtering using Ar/N2/O2 discharges International conference

R. Narishige, Y. Nakano, N. Yamashita, K. Kamataki, T. Okumura, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Optical tweezers technique for electric field strength and fluctuation measurements in plasma using a fine particle International conference

T. Sato, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Measurement of electric field, UV photons, and long-lifetime reactive species generated by atmospheric pressure air plasma for plasma bio applications International conference

T. Okumura, S. Tsuboyama, Y. Tagawa, T. Nakao, T. Anan, H. Tanaka, K. Kamataki, N. Yamashita, N. Itagaki, P. Attri, K. Koga, M. Shiratani, K. Kuchitsu

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Investigation of particle charge and interparticle interaction in a plasma International conference

K. Kamataki, T. Sato, K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Effects of tailored voltage waveform discharges on deposition of hydrogenated amorphous carbon films by CH4/Ar capacitively coupled plasma International conference

M. Otaka, H. Otomo, K. Ikeda, J. Lai, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, T. Shindo, S. Tanaka, T. Matsudo

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Effects of Ne mixing on plasma enhanced chemical vapor deposition of a-C:H films using CH4/Ar/Ne capacitively coupled discharges International conference

K. Ikeda, M. Otaka, H. Otomo, T. Arima, J. Lai, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani, T. Shindo, S. Tanaka, T. Matsudo

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Effects of lower discharge frequency on ion energy distribution function in dual frequency plasma studied by particle-in-cell/Monte Carlo method International conference

J. Lai, T. Arima, M. Otaka, K. Ikeda, I. Nagao, K. Kamataki, D. Yamashita, N. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Deposition characteristics of cumene plasma CVD for high-speed deposition of high-density a-C:H films International conference

S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
Coverage control of carbon nanoparticles on substrate using capacitively coupled plasma chemical vapor deposition International conference

K. Koga, S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

ICPIG2023 2023.7

　More details

Event date： 2023.7

Language：English

Venue：Hotel Zuiderduin, Egmonf aan Zee Country：Netherlands

researchmap
プラズマ中帯電微粒子の相互作用に関する研究

井口恒聖, 佐藤斗真, 鎌滝晋礼, 富田健太郎, P. Yiming, 山下尚人, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

2023年度日本表面真空学会　九州支部学術講演会 2023.6

　More details

Event date： 2023.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：アルカス佐世保 Country：Japan
ナノ粒子を用いた膜界面の形状ゆらぎによる膜応力低減

小野晋次郎, 恵利眞人, 奥村賢直, 鎌滝晋礼, 山下尚人, 木山治樹, 板垣奈穂, 古閑一憲, 白谷正治

2023年度日本表面真空学会　九州支部学術講演会 2023.6

　More details

Event date： 2023.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：アルカス佐世保 Country：Japan
ナノ粒子を用いた膜界面の形状ゆらぎによる膜応力低減

小野晋次郎, 恵利眞人, 奥村賢直, 鎌滝晋礼, 山下尚人, 木山治樹, 板垣奈穂, 古閑一憲, 白谷正治

2023年度日本表面真空学会九州支部学術講演会 2023.6

　More details

Event date： 2023.6

Language：Japanese

Venue：アルカス佐世保 Country：Japan

researchmap
プラズマ中帯電微粒子の相互作用に関する研究

井口恒聖, 佐藤斗真, 鎌滝晋礼, 富田健太郎, P. Yiming, 山下尚人, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

2023年度日本表面真空学会九州支部学術講演会 2023.6

　More details

Event date： 2023.6

Language：Japanese

Venue：アルカス佐世保 Country：Japan

researchmap
Prediction of Plasma CVD Process Data of a-Si:H Films via Machine Learning International conference

K. Kamataki, F. L. Chawarambwa, D. Yamashita, N. Yamashita, T.Okumura, N. Itagaki, K.Koga, M. Shiratani

ISPC25 2023.5

　More details

Event date： 2023.5

Language：English Presentation type：Oral presentation (general)

Venue：みやこめっせ Country：Japan
Prediction of Plasma CVD Process Data of a-Si:H Films via Machine Learning International conference

K. Kamataki, F. L. Chawarambwa, D. Yamashita, N. Yamashita, T.Okumura, N. Itagaki, K.Koga, M. Shiratani

ISPC25 2023.5

　More details

Event date： 2023.5

Language：English

Venue：みやこめっせ Country：Japan

researchmap
プラズマCVD法で堆積した2層a-C:Hの機械的強度に対するカーボンナノ粒子挿入の効果

田渕竜也, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第70回応用物理学会春季学術講演会 2023.3

　More details

Event date： 2023.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：上智大学 Country：Japan
Non-off Axis Sputtering Deposition of Ferrimagnetic Insulator Film with Perpendicular Magnetic Anisotropy

山下尚人, A. Agustrisno, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, C. Marrows

第70回応用物理学会春季学術講演会 2023.3

　More details

Event date： 2023.3

Language：English Presentation type：Oral presentation (general)

Venue：上智大学 Country：Japan
プラズマ照射によるレタス種子表面および内部の分子変動

阿南輝樹, 奥村賢直, アトリパンカジ, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第70回応用物理学会春季学術講演会 2023.3

　More details

Event date： 2023.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：上智大学 Country：Japan
光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(3)

鎌滝晋礼, 佐藤斗真, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

第70回応用物理学会春季学術講演会 2023.3

　More details

Event date： 2023.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：上智大学 Country：Japan
Non-off Axis Sputtering Deposition of Ferrimagnetic Insulator Film with Perpendicular Magnetic Anisotropy

山下尚人, A. Agustrisno, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, C. Marrows

第70回応用物理学会春季学術講演会 2023.3

　More details

Event date： 2023.3

Language：English

Venue：上智大学 Country：Japan

researchmap
光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(3)

鎌滝晋礼, 佐藤斗真, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

第70回応用物理学会春季学術講演会 2023.3

　More details

Event date： 2023.3

Language：Japanese

Venue：上智大学 Country：Japan

researchmap
プラズマ照射によるレタス種子表面および内部の分子変動

阿南輝樹, 奥村賢直, アトリパンカジ, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第70回応用物理学会春季学術講演会 2023.3

　More details

Event date： 2023.3

Language：Japanese

Venue：上智大学 Country：Japan

researchmap
プラズマCVD法で堆積した2層a-C:Hの機械的強度に対するカーボンナノ粒子挿入の効果

田渕竜也, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第70回応用物理学会春季学術講演会 2023.3

　More details

Event date： 2023.3

Language：Japanese

Venue：上智大学 Country：Japan

researchmap
A Study of Solid-phase Crystallization of Amorphous ZnON Films International conference

Z. Shen, Y. Mido, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani1, H. Yabuta, N. Itagaki

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Measurement of fluctuation of electric field in Ar plasmas using a fine particle trapped with laser tweezers International conference

T. Sato, S. Okunaga, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Structural Characteristics of Carbon Sphere Composite Deposited by Ar+CH4 Plasma Chemical Vapor Deposition Method International conference

K. Koga, S. H. Hwang, S. Ono, D. Yoshikawa, T. 0kumura, K. Kamataki, N. Yamashita, N. Itagaki, M.Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Sputtering deposition of single crystalline Zn1-xMgxO films on sapphire substrate via inverted Staranski-Krastanov mode: effects of substrate International conference

K.Yataka, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Time resolved optical emission spectroscopy in Ar and Ar/Ne capacitively coupled radio frequency plasma. International conference

M. Otaka, D. Nagamatsu, T. Arima, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Fluctuation of plasma and amount of nanoparticles in TEOS amplitude modulated rf discharge International conference

A. Yamamoto, I. Nagao, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Effects of Amplitude Modulation Discharge on Ion Energy and Angular Distributions studied by PIC-MCC method International conference

I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Effects of Gas Pressure on Deposition Characteristics of Hydrogenated Amorphous Carbon Films Produced by Ar + CH4 Capacitively Coupled Plasma International conference

S. Ono, S. H. Hwang, D. Yoshikawa, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Masaharu

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Effects of thermal treatment of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated by magnetron sputtering International conference

R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Effects of RF powers on the crystal quality and surface morphology of single crystalline ZnO films deposited by magnetron sputtering International conference

R. Mitsuishi, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Microscopic analysis of single crystalline Zn1-xMgxO thin films on sapphire grown via inverted Stranski-Krastanov mode International conference

N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Effects of lower discharge frequency on plasma parameters in capacitively coupled plasmas studied by particle-in-cell/Monte Carlo collision method International conference

T. Arima, M. Otaka, I. Nagao, K. Kamataki, D. Yamashita, N. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Developing Prediction of Key Process Parameters and Sputtering Conditions for Amorphous and high Mobility ITO/In2O3 Films via Machine Learning International conference

K. Kamataki, Y. Mido, I. Nagao, D. Yamashita, T. Okumura, N.Yamashita, K. Koga, N. Itagaki, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
A Study of Solid-phase Crystallization of Amorphous ZnON Films International conference

Z. Shen, Y. Mido, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani1, H. Yabuta, N. Itagaki

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Time resolved optical emission spectroscopy in Ar and Ar/Ne capacitively coupled radio frequency plasma. International conference

M. Otaka, D. Nagamatsu, T. Arima, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Structural Characteristics of Carbon Sphere Composite Deposited by Ar+CH4 Plasma Chemical Vapor Deposition Method International conference

K. Koga, S. H. Hwang, S. Ono, D. Yoshikawa, T. 0kumura, K. Kamataki, N. Yamashita, N. Itagaki, M.Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Sputtering deposition of single crystalline Zn1-xMgxO films on sapphire substrate via inverted Staranski-Krastanov mode: effects of substrate International conference

K.Yataka, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Microscopic analysis of single crystalline Zn1-xMgxO thin films on sapphire grown via inverted Stranski-Krastanov mode International conference

N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Measurement of fluctuation of electric field in Ar plasmas using a fine particle trapped with laser tweezers International conference

T. Sato, S. Okunaga, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Fluctuation of plasma and amount of nanoparticles in TEOS amplitude modulated rf discharge International conference

A. Yamamoto, I. Nagao, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Effects of thermal treatment of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated by magnetron sputtering International conference

R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Effects of RF powers on the crystal quality and surface morphology of single crystalline ZnO films deposited by magnetron sputtering International conference

R. Mitsuishi, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Effects of lower discharge frequency on plasma parameters in capacitively coupled plasmas studied by particle-in-cell/Monte Carlo collision method International conference

T. Arima, M. Otaka, I. Nagao, K. Kamataki, D. Yamashita, N. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Effects of Gas Pressure on Deposition Characteristics of Hydrogenated Amorphous Carbon Films Produced by Ar + CH4 Capacitively Coupled Plasma International conference

S. Ono, S. H. Hwang, D. Yoshikawa, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Masaharu

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Effects of Amplitude Modulation Discharge on Ion Energy and Angular Distributions studied by PIC-MCC method International conference

I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Developing Prediction of Key Process Parameters and Sputtering Conditions for Amorphous and high Mobility ITO/In2O3 Films via Machine Learning International conference

K. Kamataki, Y. Mido, I. Nagao, D. Yamashita, T. Okumura, N.Yamashita, K. Koga, N. Itagaki, M. Shiratani

7th International Conference on Advances in Functional Materials(AFM-2022) 2023.1

　More details

Event date： 2023.1

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
サファイア基板上への Zn1-xMgxO 膜のスパッタエピタキシー：ZnON/MgO バッファー層の効果

湯上貴文, 矢高功太郎, 三石遼, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲，白谷正治, 薮田久人, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学筑紫キャンパス Country：Japan
プラズマ照射を用いて窒素リッチ化した肥料で栽培したサトウキビの生育評価

中尾匠，小野晋二郎，山本小龍，内野泰祐，奥村賢直，P. Attri，古閑一憲, 山下大輔，鎌滝晋礼，山下尚人，板垣奈穂，白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学筑紫キャンパス Country：Japan
水への CO₂プラズマ照射による選択的 CO 生成

内野泰佑, アタリパンカジ, 奥村賢直, 古閑一憲，山下大輔, 鎌滝普礼, 山下尚人, 板垣奈穂, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学筑紫キャンパス Country：Japan
Ar/Ne/CH4 プラズマ CVD による a-C:H 成膜への Ne 混合効果

池田築，大高真寛，大友洋，有馬聡明，頼建勲，鎌滝晋礼, 山下大輔，奥村賢直，山下尚人，板垣奈穂，古閑一憲，白谷正治, 進藤崇央，田中諭志，松土龍夫

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学筑紫キャンパス Country：Japan
ナノインデンテーションを用いた a-C:H/CNP/a-C:H サンドイッチ構造膜の機械的強度評価

田渕竜也, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲，白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学筑紫キャンパス Country：Japan
固相結晶成長した ZnO シード層上への ZnO:Al 膜のスパッタリング成膜

和田義晴, 沈志遠, 薮田久人, 山下尚人, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲，白谷正治, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学筑紫キャンパス Country：Japan
Ar/Ne/CH4 プラズマ CVD による a-C:H 成膜への Ne 混合効果

池田築, 大高真寛, 大友洋, 有馬聡明, 頼建勲, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治, 進藤崇央, 田中諭志, 松土龍夫

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese

Venue：九州大学筑紫キャンパス Country：Japan

researchmap
水への CO₂プラズマ照射による選択的 CO 生成

内野泰佑, アタリパンカジ, 奥村賢直, 古閑一憲, 山下大輔, 鎌滝普礼, 山下尚人, 板垣奈穂, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese

Venue：九州大学筑紫キャンパス Country：Japan

researchmap
固相結晶成長した ZnO シード層上への ZnO:Al 膜のスパッタリング成膜

和田義晴, 沈志遠, 薮田久人, 山下尚人, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese

Venue：九州大学筑紫キャンパス Country：Japan

researchmap
プラズマ照射を用いて窒素リッチ化した肥料で栽培したサトウキビの生育評価

中尾匠, 小野晋二郎, 山本小龍, 内野泰祐, 奥村賢直, P. Attri, 古閑一憲, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese

Venue：九州大学筑紫キャンパス Country：Japan

researchmap
ナノインデンテーションを用いた a-C:H/CNP/a-C:H サンドイッチ構造膜の機械的強度評価

田渕竜也, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese

Venue：九州大学筑紫キャンパス Country：Japan

researchmap
サファイア基板上への Zn1-xMgxO 膜のスパッタエピタキシー：ZnON/MgO バッファー層の効果

湯上貴文, 矢高功太郎, 三石遼, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲, 白谷正治, 薮田久人, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会 2022.12

　More details

Event date： 2022.12

Language：Japanese

Venue：九州大学筑紫キャンパス Country：Japan

researchmap
Influence of Seed Dormancy on Plasma Irradiation Effects on their Germination International conference

K. Koga, T. Okumura, P. Attri, T. Anan, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani, Y. Ishibashi, S. Tsuboyama, K. Kuchitsu, K. Ishikawa, M. Hori

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Amorphous In-Ga-Mg-O thin film: Optical, Electrical Properties and TFT characteristics International conference

H.Yabuta, N. Itagaki, T. Ekino, Y. Shigesato

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Predictive Analytics in Impurity Mediated Amorphization Plasma Sputtering Process using Machine Learning tools and Techniques International conference

F. L. Chawarambwa, M. Shiratani, K. Kamataki, N. Itagaki

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Electric fields measurement using an optically trapped charged particle in Ar plasma (Invited) Invited International conference

K. Kamataki, T. Sato, k. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Formation of Graphene Nanoribbon-like Structure in Carbon Nanoparticles Fabricated by Ar+CH4 Plasma Chemical Vapor Deposition International conference

S. Ono, S. H. Hwang, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, J. S. Oh, S. Takabayashi, T. Nakatani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Effects of Amplitude Modulated Discharge on SiO2 film qualities in TEOS Plasma CVD International conference

Y. Yamamoto, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Investigation of dual frequency method in capacitively coupled plasmas using particle-in-cell/Monte Carlo method International conference

J. Lai, T. Arima, M. Otaka, I. Nagao, K. Kamataki, D. Yamashita, N. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Measurement of the charge on single fine particles in plasma International conference

K. Kamataki, T. Sato, K. Tomita, Y. Pan, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Discharge frequency dependence on spatio-temporal distribution of excitation rates of Ar 2p1 and Ne 2p1 in Ar and Ar/Ne capacitively coupled plasmas International conference

K. Ikeda, M. Otaka, T. Arima, J. Lai, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Improvement of Germination Characteristics of Sorghum bicolor Seeds Irradiated by Surface Discharge Plasma International conference

S. Yamamoto, T. Nakao, T. Anan, T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Yanagawa, S. Shimada

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Plasma Irradiation-induced Molecular Modification of Quercetin as Plant Antioxidant International conference

T. Anan, T. Nakao, T. Okumura, P. Attri, D. Yamashita, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Study on biomolecules extracted from plasma-irradiated plant seeds using quadrupole mass spectrometer International conference

T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市産業貿易センタービル Country：Japan
Amorphous In-Ga-Mg-O thin film: Optical, Electrical Properties and TFT characteristics International conference

H.Yabuta, N. Itagaki, T. Ekino, Y. Shigesato

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Study on biomolecules extracted from plasma-irradiated plant seeds using quadrupole mass spectrometer International conference

T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Predictive Analytics in Impurity Mediated Amorphization Plasma Sputtering Process using Machine Learning tools and Techniques International conference

F. L. Chawarambwa, M. Shiratani, K. Kamataki, N. Itagaki

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Plasma Irradiation-induced Molecular Modification of Quercetin as Plant Antioxidant International conference

T. Anan, T. Nakao, T. Okumura, P. Attri, D. Yamashita, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Measurement of the charge on single fine particles in plasma International conference

K. Kamataki, T. Sato, K. Tomita, Y. Pan, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Investigation of dual frequency method in capacitively coupled plasmas using particle-in-cell/Monte Carlo method International conference

J. Lai, T. Arima, M. Otaka, I. Nagao, K. Kamataki, D. Yamashita, N. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Influence of Seed Dormancy on Plasma Irradiation Effects on their Germination International conference

K. Koga, T. Okumura, P. Attri, T. Anan, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani, Y. Ishibashi, S. Tsuboyama, K. Kuchitsu, K. Ishikawa, M. Hori

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Improvement of Germination Characteristics of Sorghum bicolor Seeds Irradiated by Surface Discharge Plasma International conference

S. Yamamoto, T. Nakao, T. Anan, T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Yanagawa, S. Shimada

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Formation of Graphene Nanoribbon-like Structure in Carbon Nanoparticles Fabricated by Ar+CH4 Plasma Chemical Vapor Deposition International conference

S. Ono, S. H. Hwang, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, J. S. Oh, S. Takabayashi, T. Nakatani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Electric fields measurement using an optically trapped charged particle in Ar plasma (Invited) Invited International conference

K. Kamataki, T. Sato, k. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Effects of Amplitude Modulated Discharge on SiO2 film qualities in TEOS Plasma CVD International conference

Y. Yamamoto, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Discharge frequency dependence on spatio-temporal distribution of excitation rates of Ar 2p1 and Ne 2p1 in Ar and Ar/Ne capacitively coupled plasmas International conference

K. Ikeda, M. Otaka, T. Arima, J. Lai, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

第32回日本MRS年次大会 2022.12

　More details

Event date： 2022.12

Language：English

Venue：横浜市産業貿易センタービル Country：Japan

researchmap
Sputter epitaxy of (ZnO)x(InN)1-x films on sapphire substrates using ZnON buffer layers

Y. Nakano, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, H. Kiyama, H. Yabuta, N. Itagaki

2022年(令和４年度)応用物理学会九州支部学術講演会 / The 7th Asian Applied Physics Conference 2022.11

　More details

Event date： 2022.11

Language：English Presentation type：Oral presentation (general)

Venue：大分大学 Country：Japan
二周波重畳容量結合並行平板放電の PIC-MCC シミュレーション:駆動周波数の効果

有馬聡明, 頼建勲, 大高真寛, 池田築, 長尾伊織, 鎌滝晋礼, 山下大輔, 山下尚人, 板垣奈穂, 奥村賢直, 古閑一憲, 白谷正治

2022年(令和４年度)応用物理学会九州支部学術講演会 / The 7th Asian Applied Physics Conference 2022.11

　More details

Event date： 2022.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：大分大学 Country：Japan
Sputtering deposition of ZnO:Al Transparent Conducting Films on Seed Layers Crystallized via Thermal Annealing of Amorphous ZnON Films

Z. Shen, H. Yabuta, Y. Wada, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, H. Kiyama, N. Itagaki

2022年(令和４年度)応用物理学会九州支部学術講演会 / The 7th Asian Applied Physics Conference 2022.11

　More details

Event date： 2022.11

Language：English Presentation type：Oral presentation (general)

Venue：大分大学 Country：Japan
Sputter epitaxy of (ZnO)x(InN)1-x films on sapphire substrates using ZnON buffer layers

Y. Nakano, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, H. Kiyama, H. Yabuta, N. Itagaki

2022年(令和４年度)応用物理学会九州支部学術講演会 / The 7th Asian Applied Physics Conference 2022.11

　More details

Event date： 2022.11

Language：English

Venue：大分大学 Country：Japan

researchmap
二周波重畳容量結合並行平板放電の PIC-MCC シミュレーション:駆動周波数の効果

有馬聡明, 頼建勲, 大高真寛, 池田築, 長尾伊織, 鎌滝晋礼, 山下大輔, 山下尚人, 板垣奈穂, 奥村賢直, 古閑一憲, 白谷正治

2022年(令和４年度)応用物理学会九州支部学術講演会 / The 7th Asian Applied Physics Conference 2022.11

　More details

Event date： 2022.11

Language：Japanese

Venue：大分大学 Country：Japan

researchmap
Sputtering deposition of ZnO:Al Transparent Conducting Films on Seed Layers Crystallized via Thermal Annealing of Amorphous ZnON Films

Z. Shen, H. Yabuta, Y. Wada, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, H. Kiyama, N. Itagaki

2022年(令和４年度)応用物理学会九州支部学術講演会 / The 7th Asian Applied Physics Conference 2022.11

　More details

Event date： 2022.11

Language：English

Venue：大分大学 Country：Japan

researchmap
One-dimensional particle-in-cell / Monte Carlo collision model simulation of the effects of amplitude modulation discharge on ion/electron energy distribution functions International conference

I. Nagao, A. Yamamoto, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

DPS2022 2022.11

　More details

Event date： 2022.11

Language：English Presentation type：Oral presentation (general)

Venue：大阪国際会議場 Country：Japan
Effects of plasma activ ated lact ate solution administration to seeds of Arabidopsis thaliana on germination characteristics International conference

T. Anan, T. Nakao, T. Okumura, P. Attri, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi, S. Tsuboyama, K. Hashimoto, K. Kuchitsu, H. Hashizume, K. Ishikawa, M. Hori

DPS2022 2022.11

　More details

Event date： 2022.11

Language：English Presentation type：Oral presentation (general)

Venue：大阪国際会議場 Country：Japan
Effects of plasma activ ated lact ate solution administration to seeds of Arabidopsis thaliana on germination characteristics International conference

T. Anan, T. Nakao, T. Okumura, P. Attri, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi, S. Tsuboyama, K. Hashimoto, K. Kuchitsu, H. Hashizume, K. Ishikawa, M. Hori

DPS2022 2022.11

　More details

Event date： 2022.11

Language：English

Venue：大阪国際会議場 Country：Japan

researchmap
One-dimensional particle-in-cell / Monte Carlo collision model simulation of the effects of amplitude modulation discharge on ion/electron energy distribution functions International conference

I. Nagao, A. Yamamoto, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

DPS2022 2022.11

　More details

Event date： 2022.11

Language：English

Venue：大阪国際会議場 Country：Japan

researchmap
Enhancing output power of polymer electrolytes DSSCs with V-shape lowconcentrated light systems International conference

T. E. Putri, F. L. Chawarambwa, P. Attri, K. Kamataki, N. ltagaki, K. Koga, M. Shiratani

PVSEC-33 2022.11

　More details

Event date： 2022.11

Language：English Presentation type：Oral presentation (general)

Venue：名古屋国際会議場 Country：Japan
Enhancing output power of polymer electrolytes DSSCs with V-shape lowconcentrated light systems International conference

T. E. Putri, F. L. Chawarambwa, P. Attri, K. Kamataki, N. ltagaki, K. Koga, M. Shiratani

PVSEC-33 2022.11

　More details

Event date： 2022.11

Language：English

Venue：名古屋国際会議場 Country：Japan

researchmap
Study of electric field measurements in Ar plasmas using an optically trapped fine particle International conference

T.Sato, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, N.Yamashita, N. Itagaki, K. Koga, M. Shiratani

AAPPS-DPP 2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Study of electric field measurements in Ar plasmas using an optically trapped fine particle International conference

T.Sato, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, N.Yamashita, N. Itagaki, K. Koga, M. Shiratani

AAPPS-DPP 2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：オンライン Country：Japan

researchmap
The role of post-annealing treatment on ZnO:Co structure and magnetic transition grown by sputtering deposition International conference

A. M. Nurut, N. Yamashita, K. Kamataki, K. Koga, N. Itagaki, M. Shiratani

ICIEE 2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：Indonesia,Yogyakarta・オンライン Country：Indonesia
The role of post-annealing treatment on ZnO:Co structure and magnetic transition grown by sputtering deposition International conference

A. M. Nurut, N. Yamashita, K. Kamataki, K. Koga, N. Itagaki, M. Shiratani

ICIEE 2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：Indonesia,Yogyakarta・オンライン Country：Indonesia

researchmap
Plasma irradiation-introduced RONS amount into plant seeds and their response analysis International conference

T. Okumura, T. Anan, P. Attri, Y. Tsukada, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：仙台国際センター Country：Japan
Role of short-lived nitrogen species generated at low-pressure RF plasma on the germination and seedling growth International conference

K. Koga, P. Attri, T. Okumura, T. Anan, T. Nakao, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：仙台国際センター Country：Japan
Measurements of strength and fluctuation of 2D electric fields in plasmas using a fine particle trapped with laser tweezers(Invited) Invited International conference

K. Kamataki, T. Sato, K. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：仙台国際センター Country：Japan
Effects of amplitude modulation discharge on behavior of oxygen ions in Ar/O2 capacitively coupled plasma studied by particle-in-cell/Monte Carlo collision model International conference

I. Nagao, A. Yamamoto, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：仙台国際センター Country：Japan
Pressure dependence on spatio-temporal distribution of excitation rates of Ar 2p1 and Ne 2p1 in Ar and Ar/Ne capacitively coupled plasmas International conference

M. Otaka, T. Arima, J. Lai, K. Ikeda, K. Kamataki, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：仙台国際センター Country：Japan
Effect of plasma irradiation on germination of lettuce seeds with fluctuating dormancy International conference

T. Anan, T. Nakao, T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：仙台国際センター Country：Japan
Plasma induced conversion of CO2 with water to useful compounds International conference

P. Attri, T. Okumura, K. Koga, K. Kamataki, N. Itagaki, M. Shiratani, N. Takeuchi

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：仙台国際センター Country：Japan
Sputter epitaxy of Mg-doped ZnO films on sapphire substrates using inverted Stranski-Krastanov mode International conference

M. Shiratani, D. Takahashi, N. Yamashita, N. Itagaki

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：仙台国際センター Country：Japan
Process analysis of cracking aC: H/CNP/aC: H sandwich films under stress using nanoindentation International conference

S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English Presentation type：Oral presentation (general)

Venue：仙台国際センター Country：Japan
Effect of plasma irradiation on germination of lettuce seeds with fluctuating dormancy International conference

T. Anan, T. Nakao, T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：仙台国際センター Country：Japan

researchmap
Sputter epitaxy of Mg-doped ZnO films on sapphire substrates using inverted Stranski-Krastanov mode International conference

M. Shiratani, D. Takahashi, N. Yamashita, N. Itagaki

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：仙台国際センター Country：Japan

researchmap
Role of short-lived nitrogen species generated at low-pressure RF plasma on the germination and seedling growth International conference

K. Koga, P. Attri, T. Okumura, T. Anan, T. Nakao, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：仙台国際センター Country：Japan

researchmap
Process analysis of cracking aC: H/CNP/aC: H sandwich films under stress using nanoindentation International conference

S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：仙台国際センター Country：Japan

researchmap
Pressure dependence on spatio-temporal distribution of excitation rates of Ar 2p1 and Ne 2p1 in Ar and Ar/Ne capacitively coupled plasmas International conference

M. Otaka, T. Arima, J. Lai, K. Ikeda, K. Kamataki, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：仙台国際センター Country：Japan

researchmap
Plasma irradiation-introduced RONS amount into plant seeds and their response analysis International conference

T. Okumura, T. Anan, P. Attri, Y. Tsukada, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：仙台国際センター Country：Japan

researchmap
Plasma induced conversion of CO2 with water to useful compounds International conference

P. Attri, T. Okumura, K. Koga, K. Kamataki, N. Itagaki, M. Shiratani, N. Takeuchi

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：仙台国際センター Country：Japan

researchmap
Measurements of strength and fluctuation of 2D electric fields in plasmas using a fine particle trapped with laser tweezers(Invited) Invited International conference

K. Kamataki, T. Sato, K. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：仙台国際センター Country：Japan

researchmap
Effects of amplitude modulation discharge on behavior of oxygen ions in Ar/O2 capacitively coupled plasma studied by particle-in-cell/Monte Carlo collision model International conference

I. Nagao, A. Yamamoto, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ICRP-11/GCE2022 2022.10

　More details

Event date： 2022.10

Language：English

Venue：仙台国際センター Country：Japan

researchmap
固相結晶化シード層上へのZnO:Al透明導電膜のスパッタリング成膜：固相結晶化温度の影響

沈志遠, 薮田久人, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan
休眠状態を考慮したレタス種子発芽へのプラズマ照射効果

奥村賢直, 阿南輝樹, アタリパンカジ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治, 石橋勇志

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan
大気圧空気プラズマを用いた肥料への窒素固定と圃場試験

中尾匠, 奥村賢直, パンカジアトリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan
サファイア基板上の単結晶ZnO薄膜作製におけるバッファー層評価指標

山下尚人, 中村優太, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan
振幅変調放電法を用いたTEOSプラズマCVDへの効果

山本晃大, 長尾伊織, 山本祐馬, 大高真寛, 山下大輔, 鎌滝晋礼, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan
Role of plasma treatment on radish seeds affects germination, morphology, and biochemical responses

P. Attri, T. Okumura, K. Koga, K. Kamataki, N. Yamashita, Y. Tsukada, N. Itagaki, M. Shiratani

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：English Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan
光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(2)

鎌滝晋礼, 佐藤斗真, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan
異なるMg組成を有する単結晶Zn1-xMgxO膜成長におけるZnONバッファー層の効果

矢高功太郎, 高橋大智, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan
格子不整合サファイア基板上への単結晶ZnO膜のスパッタリング成膜: ZnONバッファー層の効果

三石遼, 矢高功太郎, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan
スパッタエピタキシー法による(ZnO)x(InN)1-x単結晶薄膜の室温成膜

成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan
Role of plasma treatment on radish seeds affects germination, morphology, and biochemical responses

P. Attri, T. Okumura, K. Koga, K. Kamataki, N. Yamashita, Y. Tsukada, N. Itagaki, M. Shiratani

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：English

Venue：東北大学 Country：Japan

researchmap
異なるMg組成を有する単結晶Zn1-xMgxO膜成長におけるZnONバッファー層の効果

矢高功太郎, 高橋大智, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese

Venue：東北大学 Country：Japan

researchmap
格子不整合サファイア基板上への単結晶ZnO膜のスパッタリング成膜: ZnONバッファー層の効果

三石遼, 矢高功太郎, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese

Venue：東北大学 Country：Japan

researchmap
振幅変調放電法を用いたTEOSプラズマCVDへの効果

山本晃大, 長尾伊織, 山本祐馬, 大高真寛, 山下大輔, 鎌滝晋礼, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese

Venue：東北大学 Country：Japan

researchmap
大気圧空気プラズマを用いた肥料への窒素固定と圃場試験

中尾匠, 奥村賢直, パンカジアトリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese

Venue：東北大学 Country：Japan

researchmap
固相結晶化シード層上へのZnO:Al透明導電膜のスパッタリング成膜：固相結晶化温度の影響

沈志遠, 薮田久人, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese

Venue：東北大学 Country：Japan

researchmap
光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(2)

鎌滝晋礼, 佐藤斗真, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese

Venue：東北大学 Country：Japan

researchmap
休眠状態を考慮したレタス種子発芽へのプラズマ照射効果

奥村賢直, 阿南輝樹, アタリパンカジ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治, 石橋勇志

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese

Venue：東北大学 Country：Japan

researchmap
スパッタエピタキシー法による(ZnO)x(InN)1-x単結晶薄膜の室温成膜

成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese

Venue：東北大学 Country：Japan

researchmap
サファイア基板上の単結晶ZnO薄膜作製におけるバッファー層評価指標

山下尚人, 中村優太, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

第83回応用物理学会秋季学術講演会 2022.9

　More details

Event date： 2022.9

Language：Japanese

Venue：東北大学 Country：Japan

researchmap
Impact of amplitude modulated discharge on suppression of nanoparticle growth in TEOS/O2/Ar capacitively coupled plasma International conference

K. Kamataki, A. Yamamoto, I. Nagao, Y. Yamamoto, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

IVC-22 2022.9

　More details

Event date： 2022.9

Language：English Presentation type：Oral presentation (general)

Venue：札幌コンベンションセンター Country：Japan
Impact of amplitude modulated discharge on suppression of nanoparticle growth in TEOS/O2/Ar capacitively coupled plasma International conference

K. Kamataki, A. Yamamoto, I. Nagao, Y. Yamamoto, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

IVC-22 2022.9

　More details

Event date： 2022.9

Language：English

Venue：札幌コンベンションセンター Country：Japan

researchmap
Eff ects of Modifi cation of Film Interface by Nanoparticles on Mechanical Properties of Films International conference

S. Ono, S. H. Hwang, T. Okumura, K. Koga, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

9th International Symposium on Control of Semiconductor Interfaces 2022.9

　More details

Event date： 2022.9

Language：English Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Effects of surface polarity of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated at room temperature International conference

R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

9th International Symposium on Control of Semiconductor Interfaces 2022.9

　More details

Event date： 2022.9

Language：English Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Control of Crystal Structure and Magnetic Properties of ZnO: Co Films Grown by Magnetron Sputtering Using Nitrogen International conference

A. M. Nurut, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

9th International Symposium on Control of Semiconductor Interfaces 2022.9

　More details

Event date： 2022.9

Language：English Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Eff ects of Amplitude Modulated RF Discharge on Properties of SiO2 Films Deposited by TEOS/O2/Ar Plasma-Enhanced Chemical Vapor Deposition International conference

K. Kamataki, A. Yamamoto, I. Nagao, Y. Yamamoto, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

9th International Symposium on Control of Semiconductor Interfaces 2022.9

　More details

Event date： 2022.9

Language：English Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Control of Crystal Structure and Magnetic Properties of ZnO: Co Films Grown by Magnetron Sputtering Using Nitrogen International conference

A. M. Nurut, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

9th International Symposium on Control of Semiconductor Interfaces 2022.9

　More details

Event date： 2022.9

Language：English

Venue：名古屋大学 Country：Japan

researchmap
Effects of surface polarity of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated at room temperature International conference

R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

9th International Symposium on Control of Semiconductor Interfaces 2022.9

　More details

Event date： 2022.9

Language：English

Venue：名古屋大学 Country：Japan

researchmap
Eff ects of Modifi cation of Film Interface by Nanoparticles on Mechanical Properties of Films International conference

S. Ono, S. H. Hwang, T. Okumura, K. Koga, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

9th International Symposium on Control of Semiconductor Interfaces 2022.9

　More details

Event date： 2022.9

Language：English

Venue：名古屋大学 Country：Japan

researchmap
Eff ects of Amplitude Modulated RF Discharge on Properties of SiO2 Films Deposited by TEOS/O2/Ar Plasma-Enhanced Chemical Vapor Deposition International conference

K. Kamataki, A. Yamamoto, I. Nagao, Y. Yamamoto, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

9th International Symposium on Control of Semiconductor Interfaces 2022.9

　More details

Event date： 2022.9

Language：English

Venue：名古屋大学 Country：Japan

researchmap
Magnetic properties of Co-doped ZnO films fabricated by sputtering using mediated crystallization. International conference

A. M. Nurut, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, N. Itagaki, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Effect of reactive nitrogen species mainly nitric oxide on the germination of radish seeds International conference

A. Pankaj, T. Okumura, F. L. Chawarambwa, T. E. Putri, N. Takeuti, K. Koga, K. Ishikawa, K. Kamataki, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Thermoplastic Polymer Electrolytes for DSSCs Performance Under V-Shape Low-Concentrated Light International conference

T. E. Putri, F. L. Chawarambwa, A. Pankaj, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Spatio-temporal structures of plasma density in lower driving rf frequency plasmas studied by particle-in-cell/Monte Carlo collision method International conference

T. Arima, M.Otaka, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Time resolved optical emission spectroscopy in Ar/Ne capacitively coupled radio frequency plasma International conference

M. Otaka, D. Nagamatsu1, T. Arima, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Ion energy and angular distribution functions in amplitude modulated capacitively coupled Ar discharge plasma obtained using particle-in-cell Monte Carlo collision model simulation International conference

I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年講堂 Country：Japan
Effect of reactive nitrogen species mainly nitric oxide on the germination of radish seeds International conference

A. Pankaj, T. Okumura, F. L. Chawarambwa, T. E. Putri, N. Takeuti, K. Koga, K. Ishikawa, K. Kamataki, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Time resolved optical emission spectroscopy in Ar/Ne capacitively coupled radio frequency plasma International conference

M. Otaka, D. Nagamatsu1, T. Arima, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Thermoplastic Polymer Electrolytes for DSSCs Performance Under V-Shape Low-Concentrated Light International conference

T. E. Putri, F. L. Chawarambwa, A. Pankaj, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Spatio-temporal structures of plasma density in lower driving rf frequency plasmas studied by particle-in-cell/Monte Carlo collision method International conference

T. Arima, M.Otaka, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Magnetic properties of Co-doped ZnO films fabricated by sputtering using mediated crystallization. International conference

A. M. Nurut, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, N. Itagaki, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Ion energy and angular distribution functions in amplitude modulated capacitively coupled Ar discharge plasma obtained using particle-in-cell Monte Carlo collision model simulation International conference

I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

IUMRS-ICYRAM 2022 2022.8

　More details

Event date： 2022.8

Language：English

Venue：九州大学医学部百年講堂 Country：Japan

researchmap
Increase of Blocking Temperature in Co-doped ZnO by Using NitrogenMediated Crystallization International conference

N. Yamashita, A. Agusutrisno, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

ICMFS-2022 2022.7

　More details

Event date： 2022.7

Language：English Presentation type：Oral presentation (general)

Venue：OIST Country：Japan
Increase of Blocking Temperature in Co-doped ZnO by Using NitrogenMediated Crystallization International conference

N. Yamashita, A. Agusutrisno, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

ICMFS-2022 2022.7

　More details

Event date： 2022.7

Language：English

Venue：OIST Country：Japan

researchmap
TEOSプラズマSiO2成膜に及ぼす振幅変調放電の効果

山本晃大、長尾伊織、山本祐馬、大高真寛、山下大輔、鎌滝晋礼、奥村賢直、山下尚人、板垣奈穂、古閑一憲、白谷正治

2022年度日本表面真空学会　九州支部学術講演会 2022.6

　More details

Event date： 2022.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
大気圧空気プラズマで生成した硝酸態窒素の水表面への輸送評価

中尾匠、奥村賢直、P. Attri、古閑一憲、山下大輔、鎌滝晋礼、山下尚人、板垣奈穂、白谷正治

2022年度日本表面真空学会　九州支部学術講演会 2022.6

　More details

Event date： 2022.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
逆Stranski-Krastanovモードによる単結晶ZnO薄膜のスパッタリング成膜:窒素流量の影響

三石遼, 山下尚人, 矢高功太郎, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

2022年度日本表面真空学会　九州支部学術講演会 2022.6

　More details

Event date： 2022.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
TEOSプラズマSiO2成膜に及ぼす振幅変調放電の効果

山本晃大, 長尾伊織, 山本祐馬, 大高真寛, 山下大輔, 鎌滝晋礼, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

2022年度日本表面真空学会九州支部学術講演会 2022.6

　More details

Event date： 2022.6

Language：Japanese

Venue：佐賀大学 Country：Japan

researchmap
逆Stranski-Krastanovモードによる単結晶ZnO薄膜のスパッタリング成膜:窒素流量の影響

三石遼, 山下尚人, 矢高功太郎, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

2022年度日本表面真空学会九州支部学術講演会 2022.6

　More details

Event date： 2022.6

Language：Japanese

Venue：佐賀大学 Country：Japan

researchmap
大気圧空気プラズマで生成した硝酸態窒素の水表面への輸送評価

中尾匠, 奥村賢直, P. Attri, 古閑一憲, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治

2022年度日本表面真空学会九州支部学術講演会 2022.6

　More details

Event date： 2022.6

Language：Japanese

Venue：佐賀大学 Country：Japan

researchmap
Development of Measurement of Two-Dimensional Distribution of Strength of Electrical Field with High Spatial Resolution Using Optical Trapped Particle in Plasma International conference

K. Kamataki, S. Okunaga,T. Sato,K. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Key parameters for single crystalline ZnO film growth by magnetron sputtering via inverted Stranski-Krastanov mode International conference

N. Yamashita, Y. Nakamura, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Growth of Nanoparticles in TEOS rf Plasma with Amplitude Modulation International conference

A. Yamamoto, K. Abe, I. Nagao, M. Otaka, D. Yamashita, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M.Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Epitaxial Growth of Atomically Flat Single-crystalline (ZnO) (InN) Films on O-polar ZnO Substrates by Magnetron Sputtering International conference

R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N.Itagaki

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Development of Measurement of Two-Dimensional Distribution of Strength of Electrical Field with High Spatial Resolution Using Optical Trapped Particle in Plasma International conference

K. Kamataki, S. Okunaga, T. Sato, K. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：オンライン

researchmap
Key parameters for single crystalline ZnO film growth by magnetron sputtering via inverted Stranski-Krastanov mode International conference

N. Yamashita, Y. Nakamura, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：オンライン

researchmap
Growth of Nanoparticles in TEOS rf Plasma with Amplitude Modulation International conference

A. Yamamoto, K. Abe, I. Nagao, M. Otaka, D. Yamashita, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M.Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：オンライン

researchmap
Epitaxial Growth of Atomically Flat Single-crystalline (ZnO) (InN) Films on O-polar ZnO Substrates by Magnetron Sputtering International conference

R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N.Itagaki

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：オンライン

researchmap
Quantitative Evaluation through LC-QqQ MS/MS for RONS Induced into Dry Seeds by Non-Thermal Plasma Irradiation International conference

T. Okumura , K. Koga , P. Attri , K. Kamataki , N. Yamashita , N. Itagaki, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：ホノルル
Structural Control of Hydrogenated Amorphous Carbon Films by Substrate Position and Gas Pressure in Plasma Chemical Vapor Deposition International conference

S. Ono, S. H. Hwang, D. Yoshikawa, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, J. S. Oh, S. Takabayashi, T. Nakatani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：ホノルル
Amplitude Modulation Frequency Dependence of Ion Energy Distribution in Capacitively Coupled Discharge Plasma Studied by Particle-in-Cell/Monte Carlo Collision Method International conference

I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：ホノルル
Position Fluctuation of a Fine Particle Trapped with Laser Tweezers in Ar Plasma International conference

T. Sato, S. Okunaga, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：ホノルル
Effects of rf Frequency on Plasma Density in Capacitively Coupled Plasmas at Low Pressure Studied by Particle-in-Cell/Monte Carlo Collision Method International conference

T. Arima , T. Yang, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：ホノルル
Time Resolved Optical Emission Spectroscopy in Ar and Ar/Ne Capacitively Coupled Radio Frequency Plasma International conference

M. Otaka, D. Nagamatsu, T. Arima, K. Kamataki, D. Yamashita, N. yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：ホノルル
Stress Relaxation of Hydrogenated Amorphous Carbon Films by Incorporating Carbon Nanoparticles Using Plasma Chemical Vapor Deposition International conference

K. Koga, S. H. Hwang, S. Ono, D. Yoshikawa, T. Okumura, N. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani, J-S. Oh, S. Takabayashi, T. Nakatani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：ホノルル
Epitaxial Growth of Single-Crystalline ZnO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode by Low-Power Magnetron Sputtering International conference

R. Mitsuishi, N. Yamashita, D.Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English Presentation type：Oral presentation (general)

Venue：ホノルル
Amplitude Modulation Frequency Dependence of Ion Energy Distribution in Capacitively Coupled Discharge Plasma Studied by Particle-in-Cell/Monte Carlo Collision Method International conference

I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：ホノルル

researchmap
Time Resolved Optical Emission Spectroscopy in Ar and Ar/Ne Capacitively Coupled Radio Frequency Plasma International conference

M. Otaka, D. Nagamatsu, T. Arima, K. Kamataki, D. Yamashita, N. yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：ホノルル

researchmap
Structural Control of Hydrogenated Amorphous Carbon Films by Substrate Position and Gas Pressure in Plasma Chemical Vapor Deposition International conference

S. Ono, S. H. Hwang, D. Yoshikawa, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, J. S. Oh, S. Takabayashi, T. Nakatani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：ホノルル

researchmap
Stress Relaxation of Hydrogenated Amorphous Carbon Films by Incorporating Carbon Nanoparticles Using Plasma Chemical Vapor Deposition International conference

K. Koga, S. H. Hwang, S. Ono, D. Yoshikawa, T. Okumura, N. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani, J-S. Oh, S. Takabayashi, T. Nakatani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：ホノルル

researchmap
Quantitative Evaluation through LC-QqQ MS/MS for RONS Induced into Dry Seeds by Non-Thermal Plasma Irradiation International conference

T. Okumura, K. Koga, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：ホノルル

researchmap
Position Fluctuation of a Fine Particle Trapped with Laser Tweezers in Ar Plasma International conference

T. Sato, S. Okunaga, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：ホノルル

researchmap
Epitaxial Growth of Single-Crystalline ZnO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode by Low-Power Magnetron Sputtering International conference

R. Mitsuishi, N. Yamashita, D.Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：ホノルル

researchmap
Effects of rf Frequency on Plasma Density in Capacitively Coupled Plasmas at Low Pressure Studied by Particle-in-Cell/Monte Carlo Collision Method International conference

T. Arima, T. Yang, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

MRS spring meeting 2022 2022.5

　More details

Event date： 2022.5

Language：English

Venue：ホノルル

researchmap
調湿レタス種子のラジカル量に与えるプラズマ照射の効果

奥村賢直，阿南輝樹，パンカジアタリ, 古閑一憲, 鎌滝晋礼，山下尚人, 板垣奈穂, 白谷正治, 石橋勇

第69回応用物理学会春季学術講演会 2022.3

　More details

Event date： 2022.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学・ｵﾝﾗｲﾝ Country：Japan
光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測

鎌滝晋礼, 奥永冴京, 佐藤斗真, 富田健太郎, P. Yiming, 山下大輔, 山下尚人,奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

第69回応用物理学会春季学術講演会 2022.3

　More details

Event date： 2022.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学・ｵﾝﾗｲﾝ Country：Japan
プラズマ CVD 法を用いた a-C:H 薄膜製膜特性に対するガス圧力・基板位置の効果

小野晋次郎, 吉川大智, 黄成和, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治, 呉準席, 鷹林将, 中谷達行

第69回応用物理学会春季学術講演会 2022.3

　More details

Event date： 2022.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学・ｵﾝﾗｲﾝ Country：Japan
CNP 層を挿入した a-C:H 膜の応力低減に対する CNP 被覆率の効果

吉川大智, 小野晋次郎, 黄成和, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治, 鷹林将，呉準席, 中谷達行

第69回応用物理学会春季学術講演会 2022.3

　More details

Event date： 2022.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学・ｵﾝﾗｲﾝ Country：Japan
植物へのプラズマ照射効果解明に向けたゼニゴケ実験系の確立

古閑一憲, 坪山祥子，田川雄大, 中尾匠，田中颯，阿南輝樹，奥村賢直，P. Attri，鎌滝晋礼，山下尚人，板垣奈穂，白谷正治，朽津和幸

第69回応用物理学会春季学術講演会 2022.3

　More details

Event date： 2022.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学・ｵﾝﾗｲﾝ Country：Japan
CNP 層を挿入した a-C:H 膜の応力低減に対する CNP 被覆率の効果

吉川大智, 小野晋次郎, 黄成和, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治, 鷹林将, 呉準席, 中谷達行

第69回応用物理学会春季学術講演会 2022.3

　More details

Event date： 2022.3

Language：Japanese

Venue：青山学院大学・ｵﾝﾗｲﾝ Country：Japan

researchmap
調湿レタス種子のラジカル量に与えるプラズマ照射の効果

奥村賢直, 阿南輝樹, パンカジアタリ, 古閑一憲, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 石橋勇

第69回応用物理学会春季学術講演会 2022.3

　More details

Event date： 2022.3

Language：Japanese

Venue：青山学院大学・ｵﾝﾗｲﾝ Country：Japan

researchmap
植物へのプラズマ照射効果解明に向けたゼニゴケ実験系の確立

古閑一憲, 坪山祥子, 田川雄大, 中尾匠, 田中颯, 阿南輝樹, 奥村賢直, P. Attri, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 朽津和幸

第69回応用物理学会春季学術講演会 2022.3

　More details

Event date： 2022.3

Language：Japanese

Venue：青山学院大学・ｵﾝﾗｲﾝ Country：Japan

researchmap
光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測

鎌滝晋礼, 奥永冴京, 佐藤斗真, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

第69回応用物理学会春季学術講演会 2022.3

　More details

Event date： 2022.3

Language：Japanese

Venue：青山学院大学・ｵﾝﾗｲﾝ Country：Japan

researchmap
プラズマ CVD 法を用いた a-C:H 薄膜製膜特性に対するガス圧力・基板位置の効果

小野晋次郎, 吉川大智, 黄成和, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治, 呉準席, 鷹林将, 中谷達行

第69回応用物理学会春季学術講演会 2022.3

　More details

Event date： 2022.3

Language：Japanese

Venue：青山学院大学・ｵﾝﾗｲﾝ Country：Japan

researchmap
プラズマCVDを用いて堆積した薄膜のナノ構造化による機械的特性制御

古閑一憲，黄成和，小野晋次郎，吉川大智, 奥村賢直，鎌滝晋礼，山下尚人，板垣奈穂，白谷正治

日本物理学会第77回年次大会（2022年） 2022.3

　More details

Event date： 2022.3 - 2021.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Deposition of Carbon Nanoparticles of 5 nm in Size on Positively Biased Substrates using Multi-Hollow Discharge Plasma CVD Method International conference

K. Koga, S. H. Hwang, S. Ono, D. Yoshikawa, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

ISPlasma2022/IC-PLANTS2022 2022.3

　More details

Event date： 2022.3

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Effects of Concentration of Plasma Activated Lactate on Germination of Arabidopsis thaliana Seeds International conference

H. Tanaka, T. Okumura, P. Attri, T. Anan, K. Kamataki, N. Itagaki, M. Shiratani, Y. Ishibashi, M. Nakano, K. Namiki, S. Tsuboyama, K. Hashimoto, K. Kuchitsu, H. Hashizume, K. Ishikawa, M. Hori, K. Koga

ISPlasma2022/IC-PLANTS2022 2022.3

　More details

Event date： 2022.3

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Deposition of Carbon Nanoparticles of 5 nm in Size on Positively Biased Substrates using Multi-Hollow Discharge Plasma CVD Method International conference

K. Koga, S. H. Hwang, S. Ono, D. Yoshikawa, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

ISPlasma2022/IC-PLANTS2022 2022.3

　More details

Event date： 2022.3

Language：English

Venue：オンライン Country：Japan

researchmap
Effects of Concentration of Plasma Activated Lactate on Germination of Arabidopsis thaliana Seeds International conference

H. Tanaka, T. Okumura, P. Attri, T. Anan, K. Kamataki, N. Itagaki, M. Shiratani, Y. Ishibashi, M. Nakano, K. Namiki, S. Tsuboyama, K. Hashimoto, K. Kuchitsu, H. Hashizume, K. Ishikawa, M. Hori, K. Koga

ISPlasma2022/IC-PLANTS2022 2022.3

　More details

Event date： 2022.3

Language：English

Venue：オンライン Country：Japan

researchmap
異なる状態の混合粉末ターゲットによるAlドープ酸化亜鉛薄膜のスパッタリング堆積

大島多美子, 日比野祐介，猪原武士，柳生義人, 佐竹卓彦, 川崎仁晴, 青木振一, 板垣奈穂, 古閑一憲, 白谷正治

SPP-39/SPSM34 2022.1

　More details

Event date： 2022.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマ照射肥料を用いて栽培した植物の成長解析

奥村賢直, アタリバンカジ，中尾匠，田中颯, 鎌滝晋礼, 山下尚人, 古閑ー憲, 板垣奈穂, 白谷正治, 竹内希

SPP-39/SPSM34 2022.1

　More details

Event date： 2022.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマ照射による酸化還元反応に対する種子内水分量の効果

阿南輝樹, 田中颯，奥村賢直, アタリパンカジ, 中尾匠, 鎌滝晋礼，山下尚人, 板垣奈穂，古閑ー憲, 白谷正治

SPP-39/SPSM34 2022.1

　More details

Event date： 2022.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
AM変調放電を圧いたTEOS プラズマにおけるナノ粒子成長とプラズマ生成の関係についての研究

鎌滝晋礼, 阿部滉平, 山本晃大, 長尾伊織, 大高真寛, 山下大輔, 奥村賢直, 板垣奈穂, 古閑ー憲, 白谷正治

SPP-39/SPSM34 2022.1

　More details

Event date： 2022.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
AM変調放電を圧いたTEOS プラズマにおけるナノ粒子成長とプラズマ生成の関係についての研究

鎌滝晋礼, 阿部滉平, 山本晃大, 長尾伊織, 大高真寛, 山下大輔, 奥村賢直, 板垣奈穂, 古閑ー憲, 白谷正治

SPP-39/SPSM34 2022.1

　More details

Event date： 2022.1

Language：Japanese

Venue：オンライン Country：Japan

researchmap
異なる状態の混合粉末ターゲットによるAlドープ酸化亜鉛薄膜のスパッタリング堆積

大島多美子, 日比野祐介, 猪原武士, 柳生義人, 佐竹卓彦, 川崎仁晴, 青木振一, 板垣奈穂, 古閑一憲, 白谷正治

SPP-39/SPSM34 2022.1

　More details

Event date： 2022.1

Language：Japanese

Venue：オンライン Country：Japan

researchmap
プラズマ照射肥料を用いて栽培した植物の成長解析

奥村賢直, アタリバンカジ, 中尾匠, 田中颯, 鎌滝晋礼, 山下尚人, 古閑ー憲, 板垣奈穂, 白谷正治, 竹内希

SPP-39/SPSM34 2022.1

　More details

Event date： 2022.1

Language：Japanese

Venue：オンライン Country：Japan

researchmap
プラズマ照射による酸化還元反応に対する種子内水分量の効果

阿南輝樹, 田中颯, 奥村賢直, アタリパンカジ, 中尾匠, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑ー憲, 白谷正治

SPP-39/SPSM34 2022.1

　More details

Event date： 2022.1

Language：Japanese

Venue：オンライン Country：Japan

researchmap
光ピンセット技術を用いたプラズマ中微粒子への作用力の絶対値校正

佐藤斗真, 奥永冴京, 鎌滝晋礼, 富田健太郎, P. Yiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第24回支部大会 2021.12

　More details

Event date： 2021.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Solid-phase Crystallization of Sputter-deposited ZnON Films and Their Impacts as Seed Layers for ZnO:Al Transparent Conducting Oxides

Z. Shen, N. Yamashita, Y. Mido, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki

プラズマ・核融合学会九州・沖縄・山口支部第24回支部大会 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
逆 Stranski-Krastanov モードを利用した単結晶 ZnMgO 薄膜のスパッタリング成膜

矢髙功太郎, 山下尚人, 髙橋大智, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第24回支部大会 2021.12

　More details

Event date： 2021.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
平行平板容量結合高周波放電プラズマの AM 変調周波数依存性に関する PICMCC シミュレーション

長尾伊織, 阿部滉平, 山本晃大, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第24回支部大会 2021.12

　More details

Event date： 2021.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
PIC-MCCM を用いた平行平板容量結合プラズマに対する放電周波数依存性に関する研究

陶陽, 阿部滉平, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第24回支部大会 2021.12

　More details

Event date： 2021.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
平行平板容量結合高周波プラズマ発光の時空間分解計測

大高真寛, 有馬聡明, 永松大樹, 山下大輔, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第24回支部大会 2021.12

　More details

Event date： 2021.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
N2/SiH4 flow rate ratio dependence of nanoparticle incorporation in SiNx films deposited by plasma CVD International conference

M. Shiratani, Y. Sasaki, K. Kamataki, N. Itagaki, K. Koga

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Effect of rf bias on the film property of amorphous silicon oxide films deposited by plasma enhanced chemical vapor deposition International conference

A. Yamamoto, K. Abe, I. Nagao, M. Otaka, D. Yamashita, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Structural Analysis of Hydrogenated Amorphous Carbon Films Deposited by Capacitively Coupled Plasma Chemical Vapor Deposition International conference

S. Ono, S. H. Hwang, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, J. S. Oh, S. Takabayashi, T. Nakatani, M. Shiratani

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Effects of pulse rf discharge on carbon dioxide methanation in plasma catalytic method International conference

M. Ideguchi, T. Hasegawa, D. Yamashita, S. Toko, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Effect of intraseed moisture and plasma irradiation on lettuce seed surface International conference

T. Okumura, T. Anan, H. Tanaka, D. Yamashita, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi, Y. Fujimoto, M. Kumauchi, H. Matsui

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Ion Energy Distribution Function in DC Pulse biased Capacitively Coupled Plasma Discharge by using Particle-In-Cell/Monte Carlo Collision Model International conference

K. Abe, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Investigation of 2D electric field measurements in Ar plasmas using a fine particle trapped with laser tweezers International conference

K. Kamataki, S. Okunaga, T. Sato, K. Tomita, P. Yimin, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Study of Position Fluctuation of a Fine Particle Trapped with Laser Tweezers in Ar Plasma International conference

T. Sato, S. Okunaga, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Calibration of force acting on an optically trapped particle in Ar plasma International conference

S. Okunaga, T. Sato, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, T. Okumura, N.Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Structural analysis of carbon nanoparticle composite films prepared by Ar+CH4 multi-hollow plasma chemical vapor deposition International conference

S. H. Hwang, S. Ono, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Measurements of Radial and Vertical Electric Field in Capacitively Coupled Plasma International conference

Y.Tao, D. Nagamatsu, K. Kamataki, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Possible plasma oxidation effect on the binding of C-terminal Domain of SARS-CoV-2 Spike Protein with Human Angiotensin-Converting Enzyme 2 (hACE2): A computational study International conference

K. Koga, T. Okumura, K. Kamataki, N. Itagaki, M. Shiratani, P. Attri

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Developing Prediction of Key Process Parameters of Plasma CVD for Fabricating a-Si:H Solar Cells through Boosting Technique International conference

F. Chen, K. Kamataki, Y. Tao, S. Okunaga, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2021 (MRM2021） 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマ照射された植物種子に関する物理的、化学的および分子生物学的研究(招待講演) Invited

奥村賢直, アトリパンカジ,石橋勇志, 鎌滝晋礼, 古閑一憲, 板垣奈穂, 白谷正治

第31回日本MRS年次大会 2021.12

　More details

Event date： 2021.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
ポッケルスセルを用いたスケーラブル誘電体バリア放電により生じる電界の測定

田川雄大, 奥村賢直, 鎌滝晋礼, A. Pankaj, 山下大輔, 古閑一憲, 板垣奈穂, 白谷正治

第31回日本MRS年次大会 2021.12

　More details

Event date： 2021.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
スケーラブル誘電体バリア放電による対象物への活性酸素窒素種暴露量の評価

中尾匠, 阿南輝樹, 田中颯, 奥村賢直, 山下大輔, A. Pankaj, 鎌滝晋礼, 古閑一憲, 板垣奈穂, 白谷正治

第31回日本MRS年次大会 2021.12

　More details

Event date： 2021.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
水素と触媒を用いない低圧窒素プラズマを用いた窒素肥料作製

古閑一憲, アタリパンカジ, 奥村賢直, 竹内希, 鎌滝晋礼, 板垣奈穂, 白谷正治

第31回日本MRS年次大会 2021.12

　More details

Event date： 2021.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
電子常磁性共鳴法を用いたレタス種子内ラジカル量のプラズマ照射時間依存性

阿南輝樹, 田中颯, 奥村賢直, A. Pankaj, 山下大輔, 古閑一憲, 鎌滝晋礼, 板垣奈穂, 石橋勇志, 白谷正治

第31回日本MRS年次大会 2021.12

　More details

Event date： 2021.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
イネ種子へのプラズマ照射がDNAメチル化レベルに及ぼす影響

田中颯, 阿南輝樹, 奥村賢直, A. Pankaj, 古閑一憲, 鎌滝晋礼, 板垣奈穂, S. Chetphilin, 石橋勇志, 白谷正治

第31回日本MRS年次大会 2021.12

　More details

Event date： 2021.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Investigation of Growth Suppression Mechanism of Nanoparticles through Amplitude Modulation Discharge Method in TEOS Plasma International conference

K. Kamataki, K. Abe, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani

the 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12) 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Taiwan, Province of China
Flowing Electrolyte System of Bifacial Dye-Sensitized Solar Cells Under Low-Concentrated Light International conference

T. E. Putri, L. F. Chawarambwa, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

MRS fall meeting 2021 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
High-temperature Growth of Amorphous In O :Sn Films by Magnetron Sputtering using Nitrogen International conference

Y. Mido, K. Takeda, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, M. Hori, N. Itagaki

MRS fall meeting 2021 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Epitaxial Growth of Atomically Flat Single-crystalline (ZnO) (InN) Films on O-polar ZnO Substrates by Magnetron Sputtering International conference

R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

MRS fall meeting 2021 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Inverted Stranski-Krastanov Growth of Single-Crystalline Zn Mg O Films on Sapphire Substrates using Magnetron Sputtering International conference

D. Takahashi, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

MRS fall meeting 2021 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Effects of Plasma Irradiation to Moistened Seeds on Radical Amount International conference

T. Anan, H. Tanaka,T. Okumura, P. Attri,D. Yamashita,K. Kamataki,K. Koga, N. Itagaki, M. Shiratani, Y.Ishibashi

The 6th Asian Applied Physics Conference (Asian-APC) 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Sputtering deposition of single crystalline ZnO films on sapphire substrates via inverted Stranski-Krastanov mode: effects of RF power International conference

R. Mitsuishi, D. Takahashi, D. Yamashita, T. Okumura, N. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

The 6th Asian Applied Physics Conference (Asian-APC) 2021.12

　More details

Event date： 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
種子に導入された大気圧空気プラズマ起因活性種の高感度微量定量測定法の創成

奥村賢直，パンカジアトリ，古閑一憲，鎌滝晋礼，板垣奈穂，白谷正治

プラズマ・核融合学会　第38回年会 2021.11

　More details

Event date： 2021.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
植物照射用スケーラブル誘電体バリア放電の生成粒子の計測

古閑一憲，田川雄大，中尾匠，阿南輝樹，田中颯，奥村賢直，P. Attri，鎌滝晋礼，板垣奈穂，白谷正治，坪山祥子，橋本研志，朽津和幸

プラズマ・核融合学会　第38回年会 2021.11

　More details

Event date： 2021.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Better step coverage of TEOS-PECVD SiO2 films realized by amplitude modulation of RF discharge voltage International conference

K. Kamataki, K. Abe, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani, S. Tahara, Y. Mizokami, Y. Miyata, K. Tabuchi, T. Tanikuni, S. Hiyama, K. Nagahata

42nd International Symposium on Dry Process (DPS2021) 2021.11

　More details

Event date： 2021.11

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Reduction of compressive stress of hydrogenated amorphous carbon films by inserting carbon nanoparticle layer using plasma CVD International conference

S. H. Hwang, S. Ono, T. Okumura, K. Koga, K. Kamataki, N. Itagaki, M. Shiratani, J.-S. Oh, S. Takabayashi, T. Nakatani

42nd International Symposium on Dry Process (DPS2021) 2021.11

　More details

Event date： 2021.11

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Study of effect of amplitude modulated discharge on growth of nanoparticles in TEOS plasma International conference

M. Shiratani, K. Kamataki, K. Abe, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, N. Itagaki, T. Okumura, K. Koga

42nd International Symposium on Dry Process (DPS2021) 2021.11

　More details

Event date： 2021.11

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Low-stress diamond-like carbon films containing carbon nanoparticles produced by combining rf sputtering and plasma chemical vapor deposition International conference

S. H. Hwang, S. Ono, D. Yoshikawa, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani

Japan-RUB Workshop 2021.11

　More details

Event date： 2021.10 - 2021.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Molecular Analysis of Plasma-Induced Germination Improvement of Rice Seeds With High-Temperature Stress Damage International conference

K. Koga, Y. Ishibashi, C. Suriyasak, T. Okumura, H. Tanaka, P. Attri, K. Matsuo, D. Yamashita, N. Itagaki, K. Kamataki, M. Shiratani

AVS67 2021.10

　More details

Event date： 2021.10

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Transport of Nanoparticles in Afterglow Region Using Multi-Hollow Discharge Plasma CVD International conference

K. Koga, S. H. Hwang, P. Attri, K. Kamataki, N. Itagaki, M. Shiratani

74th Annual Gaseous Electronics Conference 2021.10

　More details

Event date： 2021.10

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Effect of plasma treatment on MDM2 and p53 expression in cancer cells International conference

P. Attri，H. Kurita, T. Okumura, K. Koga, M. Shiratani

5th Asia-Pacific Conference on Plasma Physics 2021.9

　More details

Event date： 2021.9 - 2021.10

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Study on measurement of strength and fluctuation of electrical field using optical trapped particle in Ar plasma International conference

K. kamataki, S. Okunaga, T. Sato, K. Tomita, P. Yimin, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

5th Asia-Pacific Conference on Plasma Physics 2021.9

　More details

Event date： 2021.9 - 2021.10

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Suppression of nanoparticle growth in TEOS plasma by amplitude modulation discharge method International conference

K. Abe, A.Yamamoto, I.Nagao, M.Otaka, D.Yamashita, K.Kamataki, T.Okumura, N.Itagaki, K.Koga, M.Shiratani

5th Asia-Pacific Conference on Plasma Physics 2021.9

　More details

Event date： 2021.9 - 2021.10

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
スケーラブル誘電体バリア放電プラズマで発生した活性種量評価

中尾匠, 阿南輝樹, 田中颯, 奥村賢直, P. Attri, 鎌滝晋礼, 古閑一憲, 板垣奈穂, 白谷正治

第74回電気・情報関係学会九州支部連合大会 2021.9

　More details

Event date： 2021.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
スケーラブル誘電体バリア放電プラズマの特性評価

田川雄大, 奥村賢直, 鎌滝晋礼, P. Attri, 古閑一憲, 板垣奈穂, 白谷正治

第74回電気・情報関係学会九州支部連合大会 2021.9

　More details

Event date： 2021.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
2D electric field measurements in Ar plasmas using a fine particle trapped with optical tweezers International conference

S. Okunaga, K. Kamataki, K. Tomita, Y. Pan, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Plathinium 2021 2021.9

　More details

Event date： 2021.9

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：France
Relation between CH4 yield and CO emission intensity gradient in plasma-assisted CO2 methanation International conference

M. Ideguchi, T. Hasegawa, K. Kamataki, S. Toko, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Plathinium 2021 2021.9

　More details

Event date： 2021.9

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：France
Epitaxial growth of (ZnO)X(InN)1-X films by magnetron sputtering: effects of surface polarity of ZnO substrates International conference

R. Narishige, D. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

Plathinium 2021 2021.9

　More details

Event date： 2021.9

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：France
窒素添加スパッタ法による高移動度アモルファスIn2O3:Sn薄膜の高温成膜

御堂雄大, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第82回応用物理学会秋季学術講演会 2021.9

　More details

Event date： 2021.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマCVDによるi/n a-Si:H/SiN反射防止パッシベーション膜の特性

布村正太, 坂田功, 佐藤愛子, ロザックミカエ, 三沢達也, 板垣奈穂, 白谷正治

第82回応用物理学会秋季学術講演会 2021.9

　More details

Event date： 2021.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
振幅変調放電プラズマ中の光捕捉微粒子の挙動に関する研究

鎌滝晋礼, 奥永冴京, 佐藤斗真, 富田健太郎, Pan Yiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第82回応用物理学会秋季学術講演会 2021.9

　More details

Event date： 2021.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Ar+CH4平行平板型プラズマCVDで作製したカーボンナノ粒子サイズに対するガス圧力の効果

古閑一憲, 黄成和, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 鷹林将, 呉準席, 中谷達行, 白谷正治

第82回応用物理学会秋季学術講演会 2021.9

　More details

Event date： 2021.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
液体クロマトグラフ-トリプル四重極質量分析計を用いたプラズマ照射種子内植物ホルモンの定量分析

奥村賢直, アトリパンカジ, 古閑一憲, 鎌滝晋礼, 板垣奈穂, 白谷正治

第82回応用物理学会秋季学術講演会 2021.9

　More details

Event date： 2021.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
マグネトロンスパッタリング法で作製した(ZnO)x(InN)1-x膜の表面モフォロジーに及ぼす基板極性の影響

成重椋太, 山下大輔, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂

第82回応用物理学会秋季学術講演会 2021.9

　More details

Event date： 2021.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
ZnONバッファー層を用いたサファイア基板上への単結晶Zn1-xMgxO薄膜の成長

高橋大智, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第82回応用物理学会秋季学術講演会 2021.9

　More details

Event date： 2021.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Effects of Carbon Nanoparticles Inserted between Two Diamond Like Carbon Layers Films on Residual Stress of Films Deposited by Plasma Chemical Vapor Deposition International conference

S. H. Hwang, S. Ono, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani

INTERFINISH 2020 2021.9

　More details

Event date： 2021.9

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Production of Hollow Carbon Nanoparticles using Multi-Hollow Discharge Plasma CVD Invited International conference

K. Koga, S. H. Hwang, T. Okumura, P. Attri, K. Kamataki, N. Itagaki, J. S. Oh, S. Takabayashi, T. Nakatani, M. Shiratani

INTERFINISH 2020 2021.9

　More details

Event date： 2021.9

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
容量結合型プラズマ化学気相堆積法を用いて製膜された水素化アモルファスカーボン膜(a-C:H)の構造解析

小野晋次郎, 黄成和, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第15回プラズマエレクトロニクスインキュベーションホール 2021.9

　More details

Event date： 2021.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
スパッタ法によるサファイア基板上への原子平坦なZnMgO薄膜の作製

髙橋大智, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

令和３年度日本表面真空学会九州支部学術講演会 2021.6

　More details

Event date： 2021.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
レタス種子表面状態に対する種子内水分およびプラズマ照射の影響

阿南輝樹, 田中颯, 山下大輔, 奥村賢直, Pankaj Attri, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, 石橋勇志, 藤本祉史, 熊内雅人, 松井英享

令和３年度日本表面真空学会九州支部学術講演会 2021.6

　More details

Event date： 2021.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Particle-In-Cell モンテカルロ衝突モデルによる容量結合型Arプラズマにおける下部バイアス電圧印加シミュレーション

阿部滉平, 山本晃大, 長尾伊織, 大高真寛, 山下大輔, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

令和３年度日本表面真空学会九州支部学術講演会 2021.6

　More details

Event date： 2021.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
窒素添加スパッタ法による高移動度アモルファス In2 O3 :Sn 薄膜の作製

御堂雄大, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

令和３年度日本表面真空学会九州支部学術講演会 2021.6

　More details

Event date： 2021.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
(ZnO)x (InN)1-x 膜のスパッタエピタキシーに及ぼす基板表面極性の影響

成重椋太, 山下大輔, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂

令和３年度日本表面真空学会九州支部学術講演会 2021.6

　More details

Event date： 2021.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Structure control ofa:C-H film nanocomposite using a combination of rf sputtering and plasma CVD Invited International conference

K. Koga, S. H. Hwang, K. Kamataki, P. Attri, N. Itagaki, M. Shiratani

Thermec2021 2021.6

　More details

Event date： 2021.6

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Austria
High Throughput Deposition of Hydrogenated Amorphous Carbon Films using High-Pressure Ar+CH4 Plasmas International conference

K.Koga‚ S. H. Hwang‚ K. Kamataki‚ N. Itagaki‚ M. Shiratani

ICMCTF2021 2021.4

　More details

Event date： 2021.4

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Arプラズマ中の光捕捉微粒子への作用力の研究

鎌滝晋礼,奥永冴京, 岩本亮介, 富田健太郎, P.Yiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第68回応用物理学会春季学術講演会 2021.3

　More details

Event date： 2021.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
マグネトロンスパッタリング法による(ZnO)x(InN)1-x膜のエピタキシャル成長:基板の面極性の影響

成重椋太, 金島健太郎, 浦川聖一, 山下大輔, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂

応用物理学会プラズマエレクトロニクス分科会３０周年記念シンポジウム 2021.3

　More details

Event date： 2021.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
ナノ粒子取り込みによる SiNx の低温プラズマ CVD 製膜

佐々木勇輔, 吉田知晃, 阿部滉平, 山本晃大, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

応用物理学会プラズマエレクトロニクス分科会３０周年記念シンポジウム 2021.3

　More details

Event date： 2021.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
任意波形励起プラズマ CVD 法による a-C:H 膜質の制御

岩本亮介, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, 進藤崇央, 田中諭志, 松土龍夫

応用物理学会プラズマエレクトロニクス分科会３０周年記念シンポジウム 2021.3

　More details

Event date： 2021.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマを用いてカーボンナノ粒子層を含むミルフィーユ型 a-C:H 膜の機械的特性

古閑一憲, 黄成和, Y.Hao, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 白谷正治

第68回応用物理学会春季学術講演会 2021.3

　More details

Event date： 2021.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマCVD中飛行時間によるカーボンナノ粒子サイズ制御

古閑一憲, S. H. Hwang, Y. Hao, P. Attir, 奥村賢直，鎌滝晋礼，板垣奈穂, 白谷正治

日本物理学会第76回年次大会 2021.3

　More details

Event date： 2021.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Electric Field Measurements in Ar plasmas using a Fine Particle Trapped with Optical Tweezers International conference

S. Okunaga, K. Kamataki, K. Tomita, P. Yimin, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

ISPlasma2021/IC-PLANTS2021 2021.3

　More details

Event date： 2021.3

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
調湿レタス種子の発芽に及ぼす大気圧プラズマ照射の影響

奥村賢直, 阿南輝樹, 田中颯, 有田涼, 山下大輔, アトリパンカジ, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, 藤本祉史, 熊内雅人, 松井英享, 石橋勇志

SPP-38/SPSM33 2021.1

　More details

Event date： 2021.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Sputter deposition of ZnAlO films with tunable bandgaps from 3.4 to 6.1 eV International conference

S. Urakawa, K. Kaneshima, R. Narishige, D. Yamashita, T. Okumura, K. Kamataki, K. Koga,　M. shiratani, N. Itagaki

ICMAP 2020 & ISFM 2020 2021.1

　More details

Event date： 2021.1

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Korea, Republic of
Effects of surface polarity of ZnO substrates on epitaxial growth of magnetron sputtered (ZnO)x(InN)1-x films International conference

R. Narishige, K. Kaneshima, S. Urakawa, D. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

ICMAP 2020 & ISFM 2020 2021.1

　More details

Event date： 2021.1

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Korea, Republic of
Sputter deposition of low resistive amorphous In2O3:Sn films using nitrogen mediate amorphization method: Effects of nitrogen flow rate International conference

Y. Mido, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

ICMAP 2020 & ISFM 2020 2021.1

　More details

Event date： 2021.1

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Korea, Republic of
Structural and Optical Properties of ZnMgO Films on Sapphire Substrates Fabricated by Sputter Epitaxy International conference

D. Takahashi, Y. Nakamura, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

ICMAP 2020 & ISFM 2020 2021.1

　More details

Event date： 2021.1

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Korea, Republic of
Impact of surface morphologies of 3D island layers on the single crystal growth of magnetron sputtered ZnO films International conference

Y. Nakamura, M. Kikuchi, D. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagak

ICMAP 2020 & ISFM 2020 2021.1

　More details

Event date： 2021.1

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Korea, Republic of
Growth of high-quality (ZnO)x(InN)1-x films by RF magnetron sputtering using a two-step growth process International conference

K. Kaneshima, S. Urakawa, R. Narishige, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

ICMAP 2020 & ISFM 2020 2021.1

　More details

Event date： 2021.1

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Korea, Republic of
Low temperature fabrication of SiO2 films using capacitively coupled TEOS plasma International conference

Y. Sasaki, T. Yoshida, K. Abe, K. Yamamoto, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

The 21st Workshop on Fine Particle Plasmas 2020.12

　More details

Event date： 2020.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Study on Film Deposition Process using Spatial Profiles of Plasma Parameters and Nanoparticles in Reactive Plasma International conference

K. Kamataki, T. Yoshida, Y. Sasaki, K. Abe, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

The 21st Workshop on Fine Particle Plasmas 2020.12

　More details

Event date： 2020.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
ITO薄膜のスパッタ製膜プロセスへの機械学習の適用

陳飛宇, 岩本亮介, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
PIC-MCCMを用いたCCPにおけるIEDに関する研究

阿部滉平, 陶陽, 岩本亮介, 佐々木勇輔, 吉田知晃, 山下大輔, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
レタス種子の発芽特性に及ぼす調湿・プラズマ照射時間依存性

阿南輝樹, 田中颯, 有田涼, 山下大輔, 奥村賢直, アトリパンカジ, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, 石橋勇志, 藤本祉史, 熊内雅人, 松井英享

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
アルゴンプラズマ中光捕捉微粒子への作用力の校正

奥永冴京, 鎌滝晋礼, 富田健太郎, Pan Yiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治,

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
CCPにおける径方向電場Eyの計測の試み

陶陽, 岩本亮介, 阿部滉平, 鎌滝晋礼, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
スパッタエピタキシー法による(ZnO)X(InN)1-X膜の作製: 高温バッファー層の効果

寺澤寛, 金島健太郎, 成重椋太, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Ar/N2スパッタリングによるサファイア基板上へのZnO単結晶成長：O-poorバッファー層の効果

松本翔剛, 髙橋大智, 中村優太, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Ar+CH4 マルチホロー放電プラズマCVDで作製したカーボンナノ粒子のフラックスに対する熱泳動力の効果

郝源, 𠮷川大智, 黄成和, 古閑一憲, 白谷正治, 鎌滝晋礼, 板垣奈穂, 奥村賢直

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマ CVD におけるナノ粒子成長とプラズマ生成の関係

吉田知晃, 阿部滉平, 佐々木勇輔, 山本晃大, 山下大輔, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
TEOSプラズマCVDを用いたSiO2膜の形成:基板バイアス電圧依存性

山本晃大, 吉田智晃, 阿部滉平, 佐々木勇輔, 山下大輔, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
容量結合プラズマCVD法によるSiO2膜の低温製膜

佐々木勇輔, 吉田知晃, 阿部滉平, 山本晃大, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
容量結合プラズマ触媒法によるサバティエ反応：圧力依存性

長谷川大樹, 出口雅志, 都甲将, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Impact of Plasma Treatment on the binding of C-terminal Domain of SARS-CoV-2 Spike Protein with Human Angiotensin-Converting Enzyme 2 (hACE2) International conference

P. Attri, K. Koga, T. Okumura, K. Kamataki, N. Itagaki, M. Shiratani

第30回日本MRS年次大会 2020.12

　More details

Event date： 2020.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Nitric Acid Generation by Pulsed Needle-water Discharge Plasma International conference

H. Tanaka, R. Kogawa, Y. Oba, M. Fujita, T. Okumura, P. Attri, K. Koga, M. Shiratani, K. Kamataki, N. Itagaki

第30回日本MRS年次大会 2020.12

　More details

Event date： 2020.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Impact of Plasma Treatment Time on the Barley Seeds using Electron Paramagnetic Resonance International conference

K. Koga, P. Attri, T. Anan, R. Arita, H. Tanaka, T. Okumura, D. Yamashita, K. Matsuo, K. Kanataki, N. Itagaki, M. Shiratani, Y. Ishibashi

第30回日本MRS年次大会 2020.12

　More details

Event date： 2020.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Growth of Rice Cultivated in Field from Plasma-irradiated Seeds and Its Health Assessment for rats International conference

T. Okumura, H. Tanaka, R. Arita, D. Yamashita, K. Matsuo, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

第30回日本MRS年次大会 2020.12

　More details

Event date： 2020.12

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマ触媒法を用いたCO2のCH4化反応におけるプラズマ発光強度の空間分布

出口雅志, 山下大輔, 都甲将, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第37回プラズマ・核融合学会年会 2020.12

　More details

Event date： 2020.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：愛媛大学 Country：Japan
Sputter deposition of low resistive amorphous In2O3:Sn films using impurity mediate amorphization method: Effects of substrate temperature International conference

Y. Midou, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

The 5t h Asian Applied Physics Conference (Asian-APC) 2020.11

　More details

Event date： 2020.11

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマ触媒メタン化におけるメタン収率とプラズマ発光強度空間分布の関係

出口雅志，長谷川大樹，山下大輔，鎌滝晋礼，板垣奈穂，古閑一憲，白谷正治，都甲将，寒川誠二

2020年(令和2年度 )応用物理学会九州支部学術講演会 2020.11

　More details

Event date： 2020.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Effect of Concave Concentrator and Plane Reflector Mirror to Increase Efficiency of Bifacial Dye-Sensitized Solar Cells International conference

T. E. Putri, F. L. Chawarambwa, H. Seo, Min-Kyu Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 5t h Asian Applied Physics Conference (Asian-APC) 2020.11

　More details

Event date： 2020.11

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Effects of substrate surface polarity on epitaxial growth of magnetron sputtered (ZnO)x(InN)1-xfilms International conference

R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki,T. Okumura, K. Koga, M. Shiratani, N. Itagaki

The 5t h Asian Applied Physics Conference (Asian-APC) 2020.11

　More details

Event date： 2020.11

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Bandgap Tuning of ZnMgO Films on Sapphire Substrates Fabricated by Sputter Epitaxy International conference

D. Takahashi, Y. Nakamura, S. Urakawa, D. Yamashita,T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

The 5t h Asian Applied Physics Conference (Asian-APC) 2020.11

　More details

Event date： 2020.11

Language：English Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
Information on electric field deduced using a fine particle trapped with laser tweezers in Ar plasma International conference

K. Kamataki, S. Okunaga, K. Tomita, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

The 73rd Annual Gaseous Electronics Conference 2020.10

　More details

Event date： 2020.10

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
Role of seed coat color and harvest year on growth enhancement by plasma irradiation to seeds International conference

K. Koga, P. Attri, K. Ishikawa, T. Okumura, K. Matsuo, D. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani, V. Mildaziene

The 73rd Annual Gaseous Electronics Conference 2020.10

　More details

Event date： 2020.10

Language：English Presentation type：Oral presentation (general)

Venue：オンライン
マルチホロー放電プラズマ CVDを用いて作製したカーボンナノ粒子輸送量に対する電極基板間距離の効果

古閑一憲,　S. H. Hwang,　奥村賢直,　Y. Hao,　山下大輔,　松尾かよ,　板垣奈穂,　鎌滝晋礼,　白谷正治

2020年度(第73回)電気・情報関係学会九州支部連合大会 2020.9

　More details

Event date： 2020.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマCVD技術文献のテキストマイニングを用いた単語のインパクトの解析

古閑一憲, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 白谷正治, 谷口雄太, 池田大輔

第81回応用物理学会秋季学術講演会 2020.9

　More details

Event date： 2020.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
高温障害を持つイネ種子の発芽特性へ及ぼす誘電体バリア放電プラズマ照射の影響

奥村賢直, 石橋勇志, C. Suriyasak, 田中颯, 佐藤僚哉, 有田涼, 廣松真弥, 古閑一憲, P. Attri, 松尾かよ, 山下大輔, 板垣奈穂, 鎌滝晋礼,白谷正治

第81回応用物理学会秋季学術講演会 2020.9

　More details

Event date： 2020.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
光ピンセットによる捕捉微粒子を用いたアルゴンプラズマの等電場面計測

奥永冴京, 岩本亮介, 鎌滝晋礼, 富田健太郎, PanYiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第81回応用物理学会秋季学術講演会 2020.9

　More details

Event date： 2020.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
メタンプラズマCVDを用いたホローカーボンナノ粒子のワンステップ作製

Y. Hao, S. H. Hwang, 古閑一憲, 鎌滝晋礼, 板垣奈穂, 中谷達行, 白谷正治

第81回応用物理学会秋季学術講演会 2020.9

　More details

Event date： 2020.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマCVDを用いたa-Si：H堆積薄膜中のSi-H/Si-H2結合形成の活性化エネルギー

古閑一憲, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 白谷正治

日本物理学会 2020年秋季大会 2020.9

　More details

Event date： 2020.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
低温環境下におけるプラズマCVDによる高品質保護膜の作製

鎌滝晋礼, 吉田知晃, 佐々木勇輔, 阿部滉平, 岩本亮介, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

日本物理学会 2020年秋季大会 2020.9

　More details

Event date： 2020.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：オンライン Country：Japan
プラズマと薄膜のナノ界面相互作用による結合形成の活性化エネルギー評価

古閑一憲, 原尚志, 鎌滝晋礼, 板垣奈穂, 白谷正治

日本物理学会第75回年次大会(2020年) 2020.3

　More details

Event date： 2020.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
低温成膜における反応性プラズマ中のナノ粒子制御

鎌滝晋礼, 吉田知晃, 阿部滉平, 佐々木勇輔, 永石翔大, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

日本物理学会第75回年次大会(2020年) 2020.3

　More details

Event date： 2020.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
光ピンセットによるプラズマ中捕捉微粒⼦の揺動スペクトル解析

鎌滝晋礼, 奥永冴京, 岩本亮介, 富田健太郎, 山下⼤輔, 板垣奈穂, 古閑一憲, 白谷正治

第67回応用物理学会春季学術講演会 2020.3

　More details

Event date： 2020.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：上智大学 Country：Japan
⾮平衡プラズマを⽤いたサイズ制御したカーボンナノ粒⼦の連続作製と堆積

古閑⼀憲, 黄成和, 石川健治, P. Attri, 松尾かよ, 山下⼤輔, 板垣奈穂, 鎌滝晋礼, 白谷正治

第67回応用物理学会春季学術講演会 2020.3

　More details

Event date： 2020.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：上智大学 Country：Japan
プラズマ照射したカイワレ種⼦の吸⽔の時間推移評価

石川健治, P. Attri, 奥村賢直, 古閑⼀憲, 有田涼, 佐藤僚哉, 田中颯, 廣松真弥, 松尾かよ, 山下大輔, 鎌滝晋礼, 板垣奈穂, 堀勝, 白谷正治

第67回応用物理学会春季学術講演会 2020.3

　More details

Event date： 2020.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：上智大学 Country：Japan
⾼温障害を持つイネ種⼦の発芽特性に対するプラズマ照射の効果

古閑⼀憲, 石橋勇志, S. Chetphilin, 田中颯, 佐藤僚哉, 有田涼, 廣松真弥, 石川健治, P. Attri, 松尾かよ, 山下⼤輔, 板垣奈穂, 鎌滝晋礼, 白谷正治

第67回応用物理学会春季学術講演会 2020.3

　More details

Event date： 2020.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：上智大学 Country：Japan
Effects of substrates on the epitaxial growth of (ZnO)x(InN)1-x films International conference

R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

ISPlasma2020/IC-PLANTS2020 2020.3

　More details

Event date： 2020.3

Language：English Presentation type：Oral presentation (general)

Venue：Nagoya University Country：Japan
Low temperature fabrication of passivation films by plasma enhanced CVD Invited International conference

K. Kamataki, Y. Sasaki, S. Nagaishi, T. Yoshida, K. Abe, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020, 4th International Symposium on Energy Research and Application 2020.1

　More details

Event date： 2020.1

Language：English Presentation type：Oral presentation (general)

Venue：Sungkyunkwan University, Suwon Country：Korea, Republic of
Methane production for energy storage using low temperature plasma (Invited) Invited International conference

M. Shiratani, M. Ideguchi, A. Yamamoto, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga

7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020, 4th International Symposium on Energy Research and Application 2020.1

　More details

Event date： 2020.1

Language：English Presentation type：Oral presentation (general)

Venue：Sungkyunkwan University, Suwon Country：Korea, Republic of
Effects of Activated Carbon Counter Electrode On Bifacial Dye Sensitized Solar Cells (DSSCs) International conference

T. E. Putri, Y. Hao, F. L. Chawarambwa, H. Seo, Min-Kyu Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020, 4th International Symposium on Energy Research and Application 2020.1

　More details

Event date： 2020.1

Language：English Presentation type：Oral presentation (general)

Venue：Sungkyunkwan University, Suwon Country：Korea, Republic of
Si3N4/Carbon based PEDOT:PSS Counter Electrode for low-cost Dye-Sensitized Solar Cells International conference

F. L. Chawarambwa, T. E. Putri, Y. Hao, H. Seo, Min-Kyu Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020, 4th International Symposium on Energy Research and Application 2020.1

　More details

Event date： 2020.1

Language：English Presentation type：Oral presentation (general)

Venue：Sungkyunkwan University, Suwon Country：Korea, Republic of
プラズマ照射したカイワレダイコン種子の発芽促進機構－吸水時の種子内ラジカル動態－

有田涼, 田中颯, 廣松真弥, 佐藤僚哉, 松尾かよ, 山下大輔, 板垣奈穂, 鎌滝晋礼, Pankaj Attri, 石川健治, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会 2019.12

　More details

Event date： 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：B-ConPlaza, 別府 Country：Japan
イネ種子に対するプラズマ照射効果のフィールドテスト

田中颯, 有田涼, 廣松真弥, 佐藤僚哉, 松尾かよ, 山下大輔, 板垣奈穂, 鎌滝晋礼, Pankaj Attri, 石川健治, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会 2019.12

　More details

Event date： 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：B-ConPlaza, 別府 Country：Japan
レタス幼苗重量分布に対する種子エイジングとプラズマ照射の効果

廣松真弥, 有田涼, 田中颯, 佐藤僚哉, 松尾かよ, 山下大輔, 板垣奈穂, 鎌滝晋礼, Pankaj Attri, 石川健治, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会 2019.12

　More details

Event date： 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：B-ConPlaza, 別府 Country：Japan
パルス変調プラズマ触媒法による二酸化炭素のメタン化

出口雅志, 山本瑛久, 山下大輔, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会 2019.12

　More details

Event date： 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：B-ConPlaza, 別府 Country：Japan
光ピンセットによる微粒子トラップを用いたアルゴンプラズマ電場の精密測定

奥永冴京, 岩本亮介, 鎌滝晋礼, 富田健太郎, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会 2019.12

　More details

Event date： 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：B-ConPlaza, 別府 Country：Japan
反応性プラズマのAM変調における発光強度分布

阿部滉平, 吉田知晃, 佐々木勇輔, 山下大輔, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会 2019.12

　More details

Event date： 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：B-ConPlaza, 別府 Country：Japan
TEOS プラズマ CVD による SiO2製膜と膜質の温度勾配依存性

吉田知晃, 阿部滉平, 佐々木勇輔, 山下大輔, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会 2019.12

　More details

Event date： 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：B-ConPlaza, 別府 Country：Japan
Measurements of Electrostatic Potential in RF Ar Plasma Using an Optically Trapped Fine Particle International conference

M. Shiratani, R. Iwamoto, S. Okunaga, K. Kamataki, N. Itagaki, K. Koga

20th Workshop on Fine Particle Plasmas 2019.12

　More details

Event date： 2019.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Fabrication of high nitriding and low hydrogen content SiN films at 100°C by controlling cluster formation in plasma International conference

S. Nagaishi, Y. Sasaki, K. Kamataki, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

20th Workshop on Fine Particle Plasmas 2019.12

　More details

Event date： 2019.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Tuning Parameters of Indium Tin Oxide Sputter Processing via Bayesian Optimization International conference

R. Iwamoto, S. Okunaga, S. Muraoka, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

20th Workshop on Fine Particle Plasmas 2019.12

　More details

Event date： 2019.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Effects of Pulse Bias Voltage on Characteristics of a-C:H Film Deposited by High Pressure Ar+CH4 Plasma CVD Process International conference

S. H. Hwang, R. Iwamoto, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2019 (MRM2019） 2019.12

　More details

Event date： 2019.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Symposia Country：Japan
Investigation of Impact of Plasma Fluctuation Driven by Amplitude Modulated VHF Discharge on Growth of Nanoparticles in Reactive Plasma (Invited) Invited International conference

K. Kamataki, R. Iwamoto, H. Tanaka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2019 (MRM2019） 2019.12

　More details

Event date： 2019.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Symposia Country：Japan
Developing Prediction of Amorphization Condition Models from Sputter Deposition Experimental Results by Machine Learning Method International conference

K. Kamataki, R. Iwamoto, S. Okunaga, S. Muraoka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2019 (MRM2019） 2019.12

　More details

Event date： 2019.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Symposia Country：Japan
Effects of higher-order silane molecules on Si-H2 bond and Si-H bond densities in a-Si:H films International conference

H. Hara, Y. Hao, K. Abe, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Materials Research Meeting 2019 (MRM2019） 2019.12

　More details

Event date： 2019.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Symposia Country：Japan
プラズマ照射した種籾の圃場栽培試験

古閑一憲, 佐藤僚哉, 吉田知晃, 有田涼, 田中颯, 廣松真弥, 鎌滝晋礼, 板垣奈穂, 白谷正治

第36回プラズマ・核融合学会年会 2019.12

　More details

Event date： 2019.11 - 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan

Field Test of Cultivation of Plasma Irradiated Rice Seeds
反応性プラズマにおけるナノ粒子生成制御(招待講演) Invited

鎌滝晋礼, 永石翔大, 佐々木勇輔, 原尚志, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第36回プラズマ・核融合学会年会 2019.11

　More details

Event date： 2019.11 - 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan

Precision control of growth of nanoparticle in reactive plasma
不純物添加アモルファス化法による低抵抗アモルファスITO膜の作製: 基板温度の影響

村岡宗一郎, 山下大輔, 鎌滝普礼, 古閑一憲, 白谷正治, 板垣奈穂

第36回プラズマ・核融合学会年会 2019.11

　More details

Event date： 2019.11 - 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan

Fabrication of amorphous In2O3:Sn films with low resistivity via impurity mediated amorphization: Effects of substrates temperature
Sputter deposition of wide-gap amorphous ZnAlON films with tunable bandgaps from 3.4 to 4.2 eV

S. Urakawa, K. Kaneshima, D. Yamashita, K. Kamataki, D. Nakamura, K. Koga, M. Shiratani, N. Itagaki

第36回プラズマ・核融合学会年会 2019.11

　More details

Event date： 2019.11 - 2019.12

Language：English Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan
気相中のクラスター生成制御による低温低水素SiN膜の作製

永石翔大, 佐々木勇輔, 鎌滝晋礼, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第36回プラズマ・核融合学会年会 2019.11

　More details

Event date： 2019.11 - 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan

Fabrication of low hydrogen content SiN film at low substrate temperature by control of cluster formation in reactive plasma
スパッタエピタキシーによるサファイア基板上への単結晶ZnO膜の成長

中村優太, 村岡宗一郎, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第36回プラズマ・核融合学会年会 2019.11

　More details

Event date： 2019.11 - 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan

Growth of single crystal ZnO films on sapphire substrates by sputter epitaxy
(ZnO)x(InN)1-x膜のスパッタエピタキシーにおける基板温度の影響

金島健太郎, 宮原奈乃華, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第36回プラズマ・核融合学会年会 2019.11

　More details

Event date： 2019.11 - 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan

The effects of Substrate temperature on (ZnO)x(InN)1-x Fabricated by Sputter Epitaxy
マルチホロー放電プラズマCVD法を用いて高ガス流速で製膜することによるa-Si:H膜の面内に局所的に存在する高密度Si-H2結合の抑制

原尚志, HAO Yuan, 阿部滉平, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第36回プラズマ・核融合学会年会 2019.11

　More details

Event date： 2019.11 - 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan

Suppression of high-density region of Si-H2 in a-Si:H films by Multi-hollow discharge plasma CVD method at high gas velocity
ベイズ的最適化による高移動度アモルファスITO/In2O3成膜条件の探索

岩本亮介, 鎌滝晋礼, 村岡宗一郎, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第36回プラズマ・核融合学会年会 2019.12

　More details

Event date： 2019.11 - 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan

Search for deposition conditions for high mobility amorphous ITO / In2O3 by Bayesian optimization
低温低圧プラズマと触媒を用いた二酸化炭素のメタン化率とCO発光強度の相関

山本瑛久, 出口雅史, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第36回プラズマ・核融合学会年会 2019.12

　More details

Event date： 2019.11 - 2019.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan

Correlation between CO emission intensity and CO2 methanation yield using low pressure and low temperature plasma and catalyst
Fabrication of dye sensitized solar cells with up and down conversion nano-particles International conference

F. L. Chawarambwa, K. Kamataki, H. Seo, N. Itagaki, K. Koga, M. Shiratani

29th Annual Meeting of MRS-J 2019.11

　More details

Event date： 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Effect of Plasma Irradiation to Seeds of Lactuca Sativa on Histogram of Fresh Weight of Their Seedling International conference

R. Sato, M. Hiromatsu, K. Matsuo, T. Yoshida, R. Arita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

29th Annual Meeting of MRS-J 2019.11

　More details

Event date： 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Substrate position dependence of characteristics of a-C:H films fabricated by Ar+CH4 plasma International conference

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 4th Asian Applied Physics Conference 2019.11

　More details

Event date： 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：Kumamoto University Country：Japan
Sputter deposition of amorphous ZnAlON films with tunable bandgap International conference

S. Urakawa, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

The 4th Asian Applied Physics Conference 2019.11

　More details

Event date： 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：Kumamoto University Country：Japan
Surface morphology of single-crystal ZnO films on sapphire substrates fabricated by sputter epitaxy *Yuta Nakamura, Soichiro Muraoka, Kunihiro K International conference

Y. Nakamura, S. Muraoka, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

The 4th Asian Applied Physics Conference 2019.11

　More details

Event date： 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：Kumamoto University Country：Japan
Effects of Substrate temperature on Crystal Quality of (ZnO)x(InN)1-x Films Fabricated by Sputter Epitaxy International conference

K. Kaneshima, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

The 4th Asian Applied Physics Conference 2019.11

　More details

Event date： 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：Kumamoto University Country：Japan
Sputter Epitaxy of (ZnO)x(InN)1-x films for Excitonic Transistors International conference

R. Narishige, N. Miyahara, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

The 4th Asian Applied Physics Conference 2019.11

　More details

Event date： 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：Kumamoto University Country：Japan
Effects of DC Pulse Bias on Deposition Characteristics of a-C:H Films Deposited by High Pressure Ar+CH4 Plasma CVD International conference

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

41st International Symposium on Dry Process (DPS2019) 2019.11

　More details

Event date： 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：JMS Aster Plaza, Hioshima Country：Japan
Low Temperature Fabrication of High Nitriding Degree of SiN films by Multi-Hollow Discharge SiH4+N2 Plasma CVD International conference

K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

41st International Symposium on Dry Process (DPS2019) 2019.11

　More details

Event date： 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：JMS Aster Plaza, Hioshima Country：Japan
Fabrication of low resistive amorphous In2O3:Sn films using impurity mediate amorphization method: Effects of substrate temperature International conference

S. Muraoka, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

41st International Symposium on Dry Process (DPS2019) 2019.11

　More details

Event date： 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：JMS Aster Plaza, Hioshima Country：Japan
Fluctuation of Position and Energy of a Fine Particle in Plasma Nanofabrication

M. Shiratani, M. Soejima, H. Seo, N. Itagaki, K. Koga

第35回九州･山口プラズマ研究会 2019.11

　More details

Event date： 2019.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：対馬市交流センター, 長崎 Country：Japan
Precision control of nanoparticle property in reactive plasma ~ Low Temperature Fabrication of Low Hydrogen Content SiN films in a Multi-Hollow Discharge Plasma CVD ~

K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

第35回九州･山口プラズマ研究会 2019.11

　More details

Event date： 2019.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：対馬市交流センター, 長崎 Country：Japan
Effects of Pressure on Characteristics of a-Si:H Films Desosited using Multi-Hollow Discharge Plasma CVD International conference

Y. Hao, H. Hara, K. Abe, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

3rd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2019) 2019.11

　More details

Event date： 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：Crowne Plaza Hefei, Hefei Country：China
Development of a Sensitive Electric Field Probe in Ar plasmas using Optically Trapped Fine Particles International conference

K. Tomita, S. Okunaga, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

72nd Gaseous Electronics Conference 2019.10

　More details

Event date： 2019.10 - 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：Texas A&M Hotel and Conference Center, Texas
Spatial inhomogeneous distribution of high Si-H2 bond density in a-Si:H films deposited by MHPCVD International conference

H. Hara, Y. Hao, K. Abe, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

72nd Gaseous Electronics Conference 2019.10

　More details

Event date： 2019.10 - 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：Texas A&M Hotel and Conference Center, Texas
Effects of Discharge Power on Deposition Cutoff of Carbon Nanoparticles Synthesized by High Pressure Ar+CH4 Multi-hollow Discharge Plasma CVD International conference

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

72nd Gaseous Electronics Conference 2019.10

　More details

Event date： 2019.10 - 2019.11

Language：English Presentation type：Oral presentation (general)

Venue：Texas A&M Hotel and Conference Center, Texas
Rate Limiting Factors of Low Pressure Plasma-catalytic CO2 Methanation Process International conference

K. Koga, A. Yamamoto, K. Kamataki, N. Itagaki, M. Shiratani

AVS 66th International Symposium & Exhibition 2019.10

　More details

Event date： 2019.10

Language：English Presentation type：Oral presentation (general)

Venue：Greater Columbus Convention Center, Columbus, Ohio
Ar+CH4プラズマCVDを用いて堆積した水素化アモルファスカーボン薄膜の堆積特性に対する電極基板間距離依存性

古閑一憲, Sung Hwa Hwang, 鎌滝晋礼, 板垣奈穂, 白谷正治

2019年度（第72回）電気・情報関係学会九州支部連合大会 2019.9

　More details

Event date： 2019.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州工業大学 Country：Japan
吸水したカイワレダイコン種子内ラジカル計測

吉田知晃, 佐藤僚哉, 山下大輔, 鎌瀧晋礼, 板垣奈穂, 古閑一憲, 白谷正治

2019年第80回応用物理学会秋季学術講演会 2019.9

　More details

Event date： 2019.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：北海道大学 Country：Japan
AM変調反応性プラズマにおけるナノ粒子成長揺動に関する時空間情報解析

鎌滝晋礼, 田中颯, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

2019年第80回応用物理学会秋季学術講演会 2019.9

　More details

Event date： 2019.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：北海道大学 Country：Japan
Developing Prediction of Key Plasma Processing Parameter from Small Data of Experimental Results by Machine Learning Method International conference

K. Kamataki, R. Iwamoto, S. Okunaga, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019) 2019.9

　More details

Event date： 2019.9

Language：English Presentation type：Oral presentation (general)

Venue：Maison Glad Hotel, Jeju Island Country：Korea, Republic of
Effects of cluster incorporation in SiN films International conference

S. Nagaishi, Y. Sasaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019) 2019.9

　More details

Event date： 2019.9

Language：English Presentation type：Oral presentation (general)

Venue：Maison Glad Hotel, Jeju Island Country：Korea, Republic of
High Rate Deposition of Carbon Films Using High Pressure CH4 Plasma CVD International conference

S. H. Hwang, R. Iwamoto, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019) 2019.9

　More details

Event date： 2019.9

Language：English Presentation type：Oral presentation (general)

Venue：Maison Glad Hotel, Jeju Island Country：Korea, Republic of
Investigation of Spatiotemporal Structure of Fluctuation Related with Nanoparticle Growth in Amplitude-Modulated VHF Discharge Reactive Plasma International conference

K. Kamataki, R. Iwamoto, H. Tanaka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019) 2019.9

　More details

Event date： 2019.9

Language：English Presentation type：Oral presentation (general)

Venue：Maison Glad Hotel, Jeju Island Country：Korea, Republic of
Ultra-sensitive Plasma Potential Measurements by using an Optically Trapped Fine Particle International conference

M. Shiratani, R. Iwamoto, K. Kamataki, N. Itagaki, K. Koga

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019) 2019.9

　More details

Event date： 2019.9

Language：English Presentation type：Oral presentation (general)

Venue：Maison Glad Hotel, Jeju Island Country：Korea, Republic of
Synthesis and deposition of a-C:H nanoparticles using reactive plasmas with a fast gas flow International conference

K. Koga, S. H. Hwang, K. Kamataki, N. Itagaki, M. Shiratani

The Korea-Japan Workshop on Dust Particles in Plasmas 2019.8

　More details

Event date： 2019.8

Language：English Presentation type：Oral presentation (general)

Venue：NFRI, Daejeon Country：Korea, Republic of
Low Temperature Fabrication of Low Hydrogen Content SiN films by Multi Hollow Discharge SiH4+N2 Plasma CVD International conference

Y. Sasaki, S. Nagaishi, H. Hara, S. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The Korea-Japan Workshop on Dust Particles in Plasmas 2019.8

　More details

Event date： 2019.8

Language：English Presentation type：Oral presentation (general)

Venue：NFRI, Daejeon Country：Korea, Republic of
Advanced Methods of Thin Film Fabrication using Plasmas (Invited) Invited International conference

M. Shiratani, K. Kamataki, K. Koga, N. Itagaki

28th International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS28) 2019.8

　More details

Event date： 2019.8

Language：English Presentation type：Oral presentation (general)

Venue：Ecole Polytechnique, Palaiseau Country：France
Influence of Seed Coat Color on Reactive Species in Plasma Irradiated Seeds of Radish Sprouts International conference

K. Koga, K. Kamataki, N. Itagaki, M. Shiratani, V. Mildaziene

XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10) 2019.7

　More details

Event date： 2019.7

Language：English Presentation type：Oral presentation (general)

Venue：Sapporo Education and Culture Hall Country：Japan
Growth Mechanism of Carbon Nanoparticles In Multi-Hollow Discharge Plasma Chemical Vapor Deposition (Invited) Invited International conference

K. Koga, S. H. Hwang, K. Kamataki, N. Itagaki M. Shiratani

XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10) 2019.7

　More details

Event date： 2019.7

Language：English Presentation type：Oral presentation (general)

Venue：Sapporo Education and Culture Hall Country：Japan
Study on Relationship between Growth of Nanoparticles and Plasma Fluctuation due to Amplitude Modulated Discharge Voltage in Capacitively Coupled Reactive Plasma International conference

K. Kamataki, R. Zhou, H. Ohtomo, R. Iwamoto, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10) 2019.7

　More details

Event date： 2019.7

Language：English Presentation type：Oral presentation (general)

Venue：Sapporo Education and Culture Hall Country：Japan
Position fluctuation of a fine particle trapped optically in Ar plasma International conference

M. Shiratani, K. Tomita, H. Ohtomo, R. Iwamoto, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga

XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10) 2019.7

　More details

Event date： 2019.7

Language：English Presentation type：Oral presentation (general)

Venue：Sapporo Education and Culture Hall Country：Japan
Influence of DC Substrate Bias Voltage on Deposition of Carbon Nanoparticles Produced by Ar+CH4 Multi-Hollow Discharge Plasma CVD method International conference

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, J. S. Oh, T. Nakatani

XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10) 2019.7

　More details

Event date： 2019.7

Language：English Presentation type：Oral presentation (general)

Venue：Sapporo Education and Culture Hall Country：Japan
SiH4 gas velocity dependence of deposition rate and Si-H2 bond density of a-Si:H films deposited by multi-hollow discharge plasma CVD method International conference

H. Hara, S. Nagaishi, R. Iwamoto, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10) 2019.7

　More details

Event date： 2019.7

Language：English Presentation type：Oral presentation (general)

Venue：Sapporo Education and Culture Hall Country：Japan
Low Temperature Fabrication of Low Hydrogen Content SiN films in a Multi-Hollow Discharge Plasma CVD International conference

K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10) 2019.7

　More details

Event date： 2019.7

Language：English Presentation type：Oral presentation (general)

Venue：Sapporo Education and Culture Hall Country：Japan
Sputter Epitaxy of (ZnO)x(InN)1-x Films on Sapphire Substrates International conference

N. Miyahara, S. Urakawa, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10) 2019.7

　More details

Event date： 2019.7

Language：English Presentation type：Oral presentation (general)

Venue：Sapporo Education and Culture Hall Country：Japan
Prediction of Sputtering Conditions for Amorphous and Low Resistive ITO/In2O3 Films via Machine Learning International conference

R. Iwamoto, K. Kamataki, S. Muraoka, N. Miyahara, D. Yamashita, D. Ikeda, K. Koga, N. Itagaki, M. Shiratani

XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10) 2019.7

　More details

Event date： 2019.7

Language：English Presentation type：Oral presentation (general)

Venue：Sapporo Education and Culture Hall Country：Japan
Sputter deposition of wide bandgap (ZnO)x(AlN)1-x alloys: a new material system with tunable bandgap International conference

S. Urakawa, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10) 2019.7

　More details

Event date： 2019.7

Language：English Presentation type：Oral presentation (general)

Venue：Sapporo Education and Culture Hall Country：Japan
マルチホロー放電プラズマCVD法による高品質SiN膜の低温(100度)形成

永石翔大, 佐々木勇輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

令和元年度日本表面真空学会九州支部学術講演会（九州表面・真空研究会2019） 2019.6

　More details

Event date： 2019.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
RFマグネトロンスパッタリングによる可変バンドギャップ半導体(ZnO)x(AlN)1-xの創成

浦川聖市, 宮原奈乃華, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

令和元年度日本表面真空学会九州支部学術講演会（九州表面・真空研究会2019） 2019.6

　More details

Event date： 2019.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
Deposition of Carbon Nanoparticles Using Multi-Hollow Discharge Plasma CVD for Synthesis of Carbon Nanoparticle Composite Films International conference

K. Koga, S. H. Hwang, T. Nakatani, J. S. Oh, K. Kamataki, N. Itagaki, M.Shiratani

46th International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2019) 2019.5

　More details

Event date： 2019.5

Language：English Presentation type：Oral presentation (general)

Venue：San Diego, CA
プラズマ中の光捕捉微粒子に働く力の揺らぎ検出

白谷正治, 大友洋, 鎌滝晋礼, 板垣奈穂, 古閑一憲

日本物理学会第74回年次大会（2019年） 2019.3

　More details

Event date： 2019.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
微粒子プラズマにおける2体衝突運動の顕微高速観察

古閑一憲, 大友洋, 真銅雅子, 鎌滝晋礼, 板垣奈穂, 白谷正治

日本物理学会第74回年次大会（2019年） 2019.3

　More details

Event date： 2019.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
反応性プラズマにおけるナノ粒子成長における変調レベル依存性

鎌滝晋礼, 周靭, 大友洋, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

日本物理学会第74回年次大会（2019年） 2019.3

　More details

Event date： 2019.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
スパッタエピタキシーによるサファイア基板上(ZnO)x(InN)1-x薄膜の2段階成長 Invited

宮原奈乃華, 浦川聖市, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第66回応用物理学会春季学術講演会 2019.3

　More details

Event date： 2019.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
Arプラズマ中の光捕捉微粒子を用いたシース近傍電界計測法の開発

富田健太郎, 大友洋, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第66回応用物理学会春季学術講演会 2019.3

　More details

Event date： 2019.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
反応性プラズマにおける相互作用揺らぎの時空間構造の周波数依存性

鎌滝晋礼, 周靭, 大友洋, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第66回応用物理学会春季学術講演会 2019.3

　More details

Event date： 2019.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
ダウン／アップコンバージョンナノ粒子を用いた色素増感太陽電池の特性改善

Chawarambwa Fadzai, 張博辰, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, 徐鉉雄

第66回応用物理学会春季学術講演会 2019.3

　More details

Event date： 2019.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
Deposition Control of Carbon Nanoparticles Synthesized by Using Ar + CH4 Multi-Hollow Discharge Plasma CVD Method

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

第66回応用物理学会春季学術講演会 2019.3

　More details

Event date： 2019.3

Language：English Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan

Deposition Control of Carbon Nanoparticles Synthesized by Using Ar + CH4 Multi-Hollow Discharge Plasma CVD Method
プラズマに関する学生実験が受講者の動機付けに与える影響

鎌滝晋礼, 大友洋, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第66回応用物理学会春季学術講演会 2019.3

　More details

Event date： 2019.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
高ガス流速下におけるシランプラズマ中で発生した粒子の堆積とその膜質への影響

田中和真, 石榴, 原尚志, 永石翔大, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第66回応用物理学会春季学術講演会 2019.3

　More details

Event date： 2019.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
Cluster Incorporation Amount and Film Composition of SiN Films Fabricated by Multi-Hollow Discharge Plasma CVD Method International conference

S. Nagaishi, Y. Sasaki, K. Tanaka, H. Hara, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

6th Korea-Japan Joint Symposium on Advanced Solar Cells 2019 2019.2

　More details

Event date： 2019.2

Language：English Presentation type：Oral presentation (general)

Venue：Kinugawa Hotel Mikazuki, Tochigi Country：Japan
High transparency polymer counter electrode for bifacial dye sensitized solar cells International conference

B. Zhang, F. L. chawarambwa, H. Seo, N. Itagaki, K. Koga, M. Shiratani

6th Korea-Japan Joint Symposium on Advanced Solar Cells 2019 2019.2

　More details

Event date： 2019.2

Language：English Presentation type：Oral presentation (general)

Venue：Kinugawa Hotel Mikazuki, Tochigi Country：Japan
Effects of film deposition precursor on FWHM into a-Si:H thin films deposited by plasma CVD International conference

K. Tanaka, H. Hara, L. Shi, S. Nagaishi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

6th Korea-Japan Joint Symposium on Advanced Solar Cells 2019 2019.2

　More details

Event date： 2019.2

Language：English Presentation type：Oral presentation (general)

Venue：Kinugawa Hotel Mikazuki, Tochigi Country：Japan
Effects of clusters and higher-order silanes (HOSs) on surface roughness and Si-H2 bond density in a-Si:H films deposited by SiH4 plasma CVD International conference

H. Hara, K. Tanaka, L. Shi, S. Nagaishi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

6th Korea-Japan Joint Symposium on Advanced Solar Cells 2019 2019.2

　More details

Event date： 2019.2

Language：English Presentation type：Oral presentation (general)

Venue：Kinugawa Hotel Mikazuki, Tochigi Country：Japan
Ambipolar charging due to plasma irradiation: from nanoparticles to proteins (Invited) Invited International conference

M. Shiratani, K. Kamataki, N. Itagaki, K. Koga

19th Workshop on Fine Particle Plasmas 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Growth of Nano-Particles in Reactive Plasma using Amplitude Modulated rf Discharge Voltage International conference

K. Kamataki, R. Zhou, H. Ohtomo, R. Iwamoto, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

19th Workshop on Fine Particle Plasmas 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Study on Spatial Distribution of Plasma Fluctuation Using Optically Trapped Fine Particle in Ar Plasma International conference

H. Ohtomo, T. Chimura, R. Zhou, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

19th Workshop on Fine Particle Plasmas 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Deposition Rate and Cluster Incorporation Amount of SiN Films Fabricated by a Multi-Hollow Discharge Plasma CVD Method International conference

S. Nagaishi, Y. Sasaki, K. Tanaka, H. Hara, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

28th Annual Meeting of MRS-Japan 2018 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Kitakyushu International Conference Center Country：Japan
Effects of N2, O2 gas composition ratio and humidity in plasma on plasma induced plant growth enhancement International conference

Y. Wada, R. Sato, R. Shimada, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

28th Annual Meeting of MRS-Japan 2018 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Kitakyushu International Conference Center Country：Japan
Effects of film deposition precursors on Raman intensity ITA/ITO of a-Si:H thin films fabricated by plasma CVD method International conference

K. Tanaka, H. Hara, S. Nagaishi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

28th Annual Meeting of MRS-Japan 2018 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Kitakyushu International Conference Center Country：Japan
Effects of cluster-eliminating filter and gas velocity on SiH2 bond formation in a-Si:H films deposited by MHDPCVD method International conference

H. Hara, K. Tanaka, S. Nagaishi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

28th Annual Meeting of MRS-Japan 2018 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Kitakyushu International Conference Center Country：Japan
Size and Structure Control of Carbon Nano-particles Synthesized by Multi-hollow Discharge Plasma CVD Method International conference

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

28th Annual Meeting of MRS-Japan 2018 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Kitakyushu International Conference Center Country：Japan
Fabrication of high-mobility amorphous In2O3:Sn films via nitrogen-mediated amorphization: effects of target-substrate distance International conference

K. Imoto, D.Yamashita, K.Kamataki, K.Koga, M.Shiratani, N.Itagaki

28th Annual Meeting of MRS-Japan 2018 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Kitakyushu International Conference Center Country：Japan
SiH4+N2 マルチホロー放電プラズマ CVD を用い製膜した SiNx 薄膜のクラスター混入と膜質の関係

佐々木勇輔, 永石翔大, 田中和真, 原尚志, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部　第22回支部大会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
プラズマ中光捕捉微粒子の位置揺らぎに関する研究

千村智, 大友洋, 周靭, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部　第22回支部大会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Si 薄膜プラズマ CVD における成膜条件と膜質の相関の機械学習解析

岩本亮介, 鎌滝晋礼, 田中和真, 原尚志, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部　第22回支部大会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
容量結合放電プラズマを用いた炭酸ガスのメタンへの改質

山本瑛久, 谷田知史, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部　第22回支部大会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
マグネトロンスパッタによる擬2元系混晶(ZnO)x(InN,AlN)1-xのヘテロエピタキシー

浦川聖市, 宮原奈乃華, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部　第22回支部大会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Effects of DC Bias Voltage on Deposition of Carbon Nano Particles Synthesized by Ar + CH4 Multi-Hollow Discharge Plasma International conference

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 3rd Asian Applied Physics Conference 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Time evolution of amount of cluster incorporation into SiNx films and electron temperature of CVD Plasma International conference

S. Nagaishi, Y. Sasaki, K. Tanaka, H. Hara, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M, Shiratani

The 3rd Asian Applied Physics Conference 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Gas velocity dependence of Si-H2 bond density and surface roughness of a-Si:H films deposited by multi-hollow plasma CVD International conference

H. Hara, K. Tanaka, S. Nagaishi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 3rd Asian Applied Physics Conference 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Spatial Profile of RONS Dose Supplied by a Scalable DBD Device International conference

K. Koga, Y. Wada, R. Sato, R. Shimada, D. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani, T. Kawasaki

The 3rd Asian Applied Physics Conference 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Applying Multivariate Analysis to a-Si:H Deposition Plasma Process Data International conference

R. Iwamoto, K. Kamataki, K. Tanaka, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

The 3rd Asian Applied Physics Conference 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Effect of Plasma Fluctuation Frequency on Growth of Nanopariticles in Reactive Plasmas International conference

K. Kamataki, R. Zhou, H. Ohtomo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

The 3rd Asian Applied Physics Conference 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
反応性プラズマにおけるプラズマ揺らぎとラジカルとナノ粒子成長の関係

鎌滝晋礼, 周靭, 大友洋, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan

Relationship between plasma fluctuation, radicals and growth of nano-particle in reactive plasma
顕微FTIRを用いたプラズマCVD Si薄膜の結合状態の二次元分布評価

石榴, 田中和真, 原尚志, 鎌滝晋礼, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
フラックス制御スパッタによるIn-rich (ZnO)x(InN)1-x膜のヘテロエピタキシー

宮原奈乃華, 山下大輔, 鎌滝晋礼, 中村大輔, 古閑一憲, 白谷正治, 板垣奈穂

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan

Hetero Epitaxy of In-rich (ZnO)x(InN)1-x films by Flux Control Sputtering
プラズマCVD法で作製したa-Si:H薄膜のSiネットワーク秩序性評価

田中和真, 原尚志, 石榴, 中野慎也, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
プラズマCVDによるSiN製膜時のクラスターの混入が膜物性へ与える影響

永石翔大, 佐々木勇輔, 田中和真, 原尚志, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
窒素添加結晶化法による格子不整合基板上へZnOエピタキシャル成長—窒素酸素共添加多段バッファー層の効果—

呂佳豪, 山下大輔, 古閑一憲, 白谷正治, 板垣奈穂

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan

Sputter epitaxy of single crystalline ZnO films on 18%-lattice-mismatched sapphire substrates using multiple ZnON buffers
RFマグネトロンスパッタ法を用いたSi(111)基板上でのZnO結晶成長における窒素不純物の効果

村岡宗一郎, 呂佳豪, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan

Effect of buffer layer on the growth of ZnO films on Si (111) substrates by sputtering via nitrogen mediated crystallization
Ar/N2スパッタリングによる低抵抗アモルファスITO膜の作製：ターゲット-基板間距離の影響

井本幸希, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
反応性プラズマ中のナノ粒子量揺らぎの構造解析

周靭, 鎌滝晋礼, 大友洋, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan

The structure analysis of fluctuation of nanoparticles in reactive plasmas
高速ガス流マルチホロー放電プラズマの発光分光計測

原尚志, 田中和真, 石榴, 中野慎也, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
Growth Kinetics of Carbon Nano Particles Generated in an Ar/CH4 Multi-Hollow Discharge Plasmas

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：English Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
Arプラズマ中微粒子の相互作用の評価

大友洋, 周靭, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan

An evaluation of interactions between fine particles using collision analysis in Ar plasma
大気圧プラズマ照射したイネの成長に対する浸水処理日数依存性

佐藤僚哉, 和田陽介, 嶋田凌太郎, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
カイワレ大根種皮の色素に対するプラズマ照射の効果

古閑一憲, 嶋田凌太郎, 和田陽介, 佐藤僚哉, 山下大輔, 鎌滝晋礼, 板垣奈穂, 白谷正治, Vida Mildaziene

第35回プラズマ・核融合学会年会 2018.12

　More details

Event date： 2018.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
Catalyst-free growth of c-axis aligned (ZnO)0.79(InN)0.21 nanorods by RF magnetron sputtering International conference

N. Miyahara, D. Yamashita, D. Nakamura, K. Koga, M. Shiratani, N. Itagaki

2018 MRS Fall Meeting & Exhibit 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：Boston, Massachusetts
Evaluation of Amount of RONS Transport and Absorption of Seeds International conference

K. Koga, Y. Wada, R. Sato, D. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani

2018 MRS Fall Meeting & Exhibit 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：Boston, Massachusetts
Effects of nitrogen impurity on sputtering growth of ZnO films on Si(111) substrates International conference

S. Muraoka, J. Lyu, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

2018 MRS Fall Meeting & Exhibit 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：Boston, Massachusetts
反応性プラズマにおけるプラズマ揺らぎの時空間構造

鎌滝晋礼, 周靭, 大友洋, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第34回九州･山口プラズマ研究会 2018.11

　More details

Event date： 2018.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：シーサイドホテル屋久島, 鹿児島 Country：Japan
Motion analysis of inter-particle interactions of three fine particles in Ar plasma International conference

H. Ohtomo, R. Zhou, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

40th International Symposium on Dry Process (DPS2018) 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：Nagoya University Country：Japan
Sputter deposition of low resistive amorphous In2O3:Sn films using nitrogen-mediated amorphization method: Effects of target-substrate distance International conference

K. Imoto, N. Miyahara, D.Yamashita, K.Kamataki, K.Koga, M.Shiratani, N.Itagaki

40th International Symposium on Dry Process (DPS2018) 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：Nagoya University Country：Japan
Effects of Gas Pressure on Size of Carbon Nanoparticles Prepared by Methane Plasma Process International conference

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

2nd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018) 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：The Kanazawa Chamber of Commerce and Industry & Ishikawa Prefectural Bunkyo Hall Country：Japan
Impact of Amplitude Modulation of RF Discharge Voltage on the Spatial Profile of Nanoparticle Characteristics in Reactive Plasma (Invited) Invited International conference

K. Kamataki, R. Zhou, H. Ohtomo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

2nd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018) 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：The Kanazawa Chamber of Commerce and Industry & Ishikawa Prefectural Bunkyo Hall Country：Japan
Spatial-Structure of Density Fluctuation of Nanoparticles in Amplitude Modulated Capactively Coupled Plasma International conference

R. Zhou, K. Kamataki, H. Ohtomo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

2nd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018) 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：The Kanazawa Chamber of Commerce and Industry & Ishikawa Prefectural Bunkyo Hall Country：Japan
Spatial distribution of SiH2/SiH bond density ratio in a-Si:H solar cells fabricated by plasma CVD International conference

L. Shi, K. Tanaka, H. Hara, S. Nakano, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

2nd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018) 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：The Kanazawa Chamber of Commerce and Industry & Ishikawa Prefectural Bunkyo Hall Country：Japan
Suppression of HOS molecules incorporation in a-Si:H films fabricated by plasma CVD International conference

K. Tanaka, H. Hara, L. Shi, S. Nagaishi, S. Nakano, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

2nd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018) 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：The Kanazawa Chamber of Commerce and Industry & Ishikawa Prefectural Bunkyo Hall Country：Japan
Sputter epitaxy of single crystalline ZnO on 18%-lattice-mismatched sapphire using multi buffer layers fabricated via nitrogen mediated crystallization International conference

J. Lyu, D. Yamashita, K. Koga, M. Shiratani, N. Itagaki

2nd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018) 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：The Kanazawa Chamber of Commerce and Industry & Ishikawa Prefectural Bunkyo Hall Country：Japan
Spatial-Structure of Density Fluctuation of Nanoparticles in Amplitude Modulated Capactively Coupled Plasma International conference

R. Zhou, K. Kamataki, H. Ohtomo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

2nd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018) 2018.11

　More details

Event date： 2018.11

Language：English Presentation type：Oral presentation (general)

Venue：The Kanazawa Chamber of Commerce and Industry & Ishikawa Prefectural Bunkyo Hall Country：Japan
SiH4+N2マルチホロー放電プラズマCVDによる SiN製膜時の膜へのクラスターの取り込み

永石翔大, 佐々木勇輔, 田中和真, 原尚志, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

放電/プラズマ・パルスパワー合同研究会 2018.10

　More details

Event date： 2018.10

Language：Japanese Presentation type：Oral presentation (general)

Venue：大分大学 Country：Japan
Synthesis of Hydrogenated Amorphous Carbon Nanoparticles using High-Pressure CH4+Ar Plasmas and Their Deposition International conference

K. Koga, S. H. Hwang, K. Kamataki, N. Itagaki, T. Nakatani, M. Shiratani

AVS 65th International Symposium & Exhibition 2018.10

　More details

Event date： 2018.10

Language：English Presentation type：Oral presentation (general)

Venue：Long Beach Convention Center, Long Beach, CA
スパッタエピタキシーによるサファイア基板直上へのIn-rich (ZnO)x(InN)1-x 膜の作製

宮原奈乃華, 山下大輔, 鎌滝晋礼, 中村大輔, 古閑一憲, 白谷正治, 板垣奈穂

2018年第79回応用物理学会秋季学術講演会 2018.9

　More details

Event date： 2018.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋国際会議場 Country：Japan

Sputter Epitaxy of In-rich (ZnO)x(InN)1-x Films Directly on Sapphire Substrates
CH4+Arマルチホロー放電プラズマで生成したカーボンナノ粒子の基板堆積に対するガス流量の影響

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

2018年第79回応用物理学会秋季学術講演会 2018.9

　More details

Event date： 2018.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋国際会議場 Country：Japan

Influence of gas flow rate on deposition of carbon nanoparticles produced by CH4+Ar multi-hollow discharge plasma onto substrates
大気圧誘電体バリア放電プラズマ照射に対する種皮の機能大気圧誘電体バリア放電プラズマ照射に対する種皮の機能

鎌滝晋礼, 和田陽介, 嶋田凌太郎, 佐藤僚哉, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治, Vida Mildaziene

2018年第79回応用物理学会秋季学術講演会 2018.9

　More details

Event date： 2018.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋国際会議場 Country：Japan

Seed coat function against atmospheric pressure dielectric barrier discharge plasma irradiation
Siネットワーク秩序性に対する製膜前駆体の効果

古閑一憲, 田中和真, 原尚志, 石榴, 中野慎也, 山下大輔, 鎌滝晋礼, 板垣奈穂, 白谷正治

2018年第79回応用物理学会秋季学術講演会 2018.9

　More details

Event date： 2018.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋国際会議場 Country：Japan

Effects of deposition precursors on Si network orderliness
プラズマ中二体微粒子の衝突解析による相互作用揺らぎの研究

古閑一憲, 大友洋, 周靭, 山下大輔, 鎌滝晋礼, 板垣奈穂, 白谷正治

2018年第79回応用物理学会秋季学術講演会 2018.9

　More details

Event date： 2018.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋国際会議場 Country：Japan

Study on interaction fluctuation by collision analysis of two fine particles in plasmas
Effects of cluster deposition on spatial profile of Si-Hx bond density in a-Si:H films International conference

K. Koga, K. Tanaka, H. Hara, S. Nagaishi, D. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani

2018 International Conference on Solid State Devices and Materials (SSDM2018) 2018.9

　More details

Event date： 2018.9

Language：English Presentation type：Oral presentation (general)

Venue：The University of Tokyo Country：Japan
Effects of CH4 Concentration on Size of Carbon Nano-Particles Formed in Multi-hollow Discharge Plasma International conference

S. H. Hwang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

6th UK-Japan Engineering Education League Workshop 2018 2018.9

　More details

Event date： 2018.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyushu University Country：Japan
Photoluminescence of (ZnO)0.92(InN)0.08 films -Fabrication templature dependence- International conference

N. Miyahara, M. Shiratani, N. Itagaki

6th UK-Japan Engineering Education League Workshop 2018 2018.9

　More details

Event date： 2018.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyushu University Country：Japan
Improvement of Si network order of a-Si:H thin films by suppressing incorporation of HOS molecules International conference

S. Nakano, K. Tanaka, H. Hara, L. Shi, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

6th UK-Japan Engineering Education League Workshop 2018 2018.9

　More details

Event date： 2018.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyushu University Country：Japan
Analysis of Inter-particle Interactions of Two Fine Particles in Ar Plasma International conference

H. Ohtomo, R. Zhou, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

JP-KO dust workshop 2018 2018.7

　More details

Event date： 2018.7

Language：English Presentation type：Oral presentation (general)

Venue：KKR Kamakura Country：Japan
Density modulation of nanoparticles in amplitude modulated discharge plasmas International conference

M. Shiratani, R. Zhou, H. Ohtomo, N. Itagaki, K. Koga

24th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 2018) 2018.7

　More details

Event date： 2018.7

Language：English Presentation type：Oral presentation (general)

Venue：Glasgow Country：United Kingdom
Room Temperature Photoluminescence from (ZnO)0.79(InN)0.21 films fabricated by RF magnetron sputtering International conference

N. Miyahara, L. Shi, K. Iwasaki, H. Seo, K. Koga, M. Shiratani, N. Itagaki

10th International Conference on Processing & Manufacturing of Advanced Materials Processing, Fabrication, Properties, Applications (THERMEC 2018) 2018.7

　More details

Event date： 2018.7

Language：English Presentation type：Oral presentation (general)

Venue：Paris Country：France
Effects of gas velocity dependence of Si-H2 bond density at P/I interface of a-Si:H layered films deposited by multi-hollow discharge plasma CVD. International conference

H. Hara, K. Tanaka, S. Nagaishi, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

Workshop "Plasma surface interaction for technological applications" 2018.6

　More details

Event date： 2018.6

Language：English Presentation type：Oral presentation (general)

Venue：University of Kiel Country：Germany
SiH4 gas flow rate dependence of Si-H2 bond density at P/I interface in aSi:H solar cells fabricated by plasma CVD International conference

H. Hara, K. Tanaka, S. Nagaishi, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

28th Symposium on Plasma Physics and Technology (SPPT) 2018.6

　More details

Event date： 2018.6

Language：English Presentation type：Oral presentation (general)

Venue：Czech Technical University in Prague
High energy leverage method on growth enhancement of bio-mass plants using plasma seed treatment International conference

K. Koga, Y. Wada, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

7th International Conference on Plasma Medicine (ICPM-7) 2018.6

　More details

Event date： 2018.6

Language：English Presentation type：Oral presentation (general)

Venue：Philadelphia
a‐Si:H 薄膜への高次シラン取り込みとSiネットワーク秩序性の関係

田中和真, 原尚志, 石榴, 永石翔大, 中野慎也, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

平成30年度九州表面・真空研究会2018（兼第23回九州薄膜表面研究会） 2018.6

　More details

Event date： 2018.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州工業大学 Country：Japan
プラズマCVD法で作製したa-Si:H 膜のSiH2/SiH 結合密度比の２次元分布

石榴, 田中和真, 原尚志, 中野慎也, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

平成30年度九州表面・真空研究会2018（兼第23回九州薄膜表面研究会） 2018.6

　More details

Event date： 2018.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州工業大学 Country：Japan
A deep insight of plasma-nanoparticle interaction Invited International conference

K. Koga, K. Kamataki, N. Itagaki, M. Shiratani

19th International Congress on Plasma Physics 2018.6

　More details

Event date： 2018.6

Language：English Presentation type：Oral presentation (general)

Venue：Vancouver Country：Canada
スパッタエピタキシーにより作製した(ZnO)0.73(InN)0.27のフォトルミネッセンス

宮原奈乃華, 岩崎和也, 石榴, 山下大輔, 中村大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

第65回応用物理学会春季学術講演会 2018.3

　More details

Event date： 2018.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan

Photoluminescence of (ZnO)0.73(InN)0.27 fabricated by sputter epitaxy
大気圧空気誘電体バリア放電プラズマを照射したカイワレ種子の電子スピン共鳴分光

古閑一憲, 和田陽介, 佐藤僚哉, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

第65回応用物理学会春季学術講演会 2018.3

　More details

Event date： 2018.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan

Electron spin resonance spectroscopy of radish sprout seeds irradiated using atmospheric air dielectric barrier discharge plasmas
水素原子源付プラズマCVD法に任意電圧波形を併用したa-C:H薄膜の堆積

古閑一憲, 山木健司, 方トウジュン, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

第65回応用物理学会春季学術講演会 2018.3

　More details

Event date： 2018.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan

Deposition of a-C:H films using H-assisted plasma CVD method together with tailored voltage waveforms
カーボン薄膜の選択プラズマCVD

白谷正治, 方トウジュン, 山木健司, 徐鉉雄, 板垣奈穂, 古閑一憲

平成30年電気学会全国大会 2018.3

　More details

Event date： 2018.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
任意電圧波形を用いたC7H8+Ar+H2プラズマ生成

古閑一憲, 山木健司, 方トウジュン, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

平成30年電気学会全国大会 2018.3

　More details

Event date： 2018.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Effects of Number Density of Seeds on Plant Growth Enhancement by Atmospheric Air Plasma Irradiation International conference

Y. Wada, R. Sato, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

2nd International Workshop On Plasma Agriculture (IWOPA2) 2018.3

　More details

Event date： 2018.3

Language：English Presentation type：Oral presentation (general)

Venue：Takayama Civic Cultural Hall, Gifu Country：Japan
Effects of RONS Dose on Plasma Induced Growth Enhancement of Radish Sprout International conference

K. Koga, Y. Wada, R. Sato, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

2nd International Workshop On Plasma Agriculture (IWOPA2) 2018.3

　More details

Event date： 2018.3

Language：English Presentation type：Oral presentation (general)

Venue：Takayama Civic Cultural Hall, Gifu Country：Japan
A tailored voltage waveform plasma CVD method for carbon film deposition International conference

K. Yamaki, T. Fang, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

10th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 11th International Conference on Plasma Nanotechnology and Science (ISPlasma2018/IC-PLANTS2018) 2018.3

　More details

Event date： 2018.3

Language：English Presentation type：Oral presentation (general)

Venue：Meijo University, Nagoya Country：Japan
IoT-oriented solar cells fabricated using plasma-based nanotechnology (Invited) Invited International conference

M. Shiratani, H. Seo, N. Itagaki, K. Koga

10th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 11th International Conference on Plasma Nanotechnology and Science (ISPlasma2018/IC-PLANTS2018) 2018.3

　More details

Event date： 2018.3

Language：English Presentation type：Oral presentation (general)

Venue：Meijo University, Nagoya
Analysis of Coupling of Interaction Fluctuation between Reactive Plasmas and Nanoparticles International conference

R. Zhou, K. Mori, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

10th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 11th International Conference on Plasma Nanotechnology and Science (ISPlasma2018/IC-PLANTS2018) 2018.3

　More details

Event date： 2018.3

Language：English Presentation type：Oral presentation (general)

Venue：Meijo University, Nagoya Country：Japan
Thin film deposition using low temperature plasmas: past, present, and future (Plenary) Invited International conference

M. Shiratani, K. Koga, H. Seo, N. Itagaki

4th International Workshop on Advanced Plasma Technology and Applications (The 4th IWAPTA workshop) 2018.2

　More details

Event date： 2018.2

Language：English Presentation type：Oral presentation (general)

Venue：IPB International Convention Centre, Bogor Country：Indonesia
Plasma CVD of a-C:H films as protective layers for solar cells (Invited) Invited International conference

M. Shiratani, T. Fang, K. Yamaki, K. Koga, D. Yamashita, H. Seo, N. Itagaki, K. Takenaka, Y. Setsuhara

5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application 2018.2

　More details

Event date： 2018.2

Language：English Presentation type：Oral presentation (general)

Venue：Sungkyunkwan University, Suwon Country：Korea, Republic of
SiH4 gas flow rate dependence of Si-H2 bond density at P/I interface in aSi:H solar cells fabricated by plasma CVD International conference

K. Tanaka, H. Hara, S. Toko, T. Kojima, S. Nagaishi, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application 2018.2

　More details

Event date： 2018.2

Language：English Presentation type：Oral presentation (general)

Venue：Sungkyunkwan University, Suwon Country：Korea, Republic of
Enhancement on photovoltaic performance of dye-sensitized solar cells by applying up-conversion Y2O3:Er3 + nanoparticles International conference

D. Sakamoto, B. Zhang, H. Seo, N. Itagaki, K. Koga, M. Shiratani

5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application 2018.2

　More details

Event date： 2018.2

Language：English Presentation type：Oral presentation (general)

Venue：Sungkyunkwan University, Suwon Country：Korea, Republic of
Effect of additive on catalytic enhancement of polymer counter electrode in dye-sensitized solar cells International conference

B. Zhang, D. Sakamoto, H. Seo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application 2018.2

　More details

Event date： 2018.2

Language：English Presentation type：Oral presentation (general)

Venue：Sungkyunkwan University, Suwon Country：Korea, Republic of
Strategy for the commercialization of dye-sensitized solar cells Invited International conference

H. Seo, D. Sakamoto, B. Zhang, N. Itagaki, K. Koga, M. Shiratani

5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application 2018.2

　More details

Event date： 2018.2

Language：English Presentation type：Oral presentation (general)

Venue：Sungkyunkwan University, Suwon Country：Korea, Republic of
Plasma Enhanced Carbon Recycling for Large-Scale Introduction of Solar Cells to Energy Supply Chain Invited International conference

K. Koga, Y. Wada, R. Sato, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application 2018.2

　More details

Event date： 2018.2

Language：English Presentation type：Oral presentation (general)

Venue：Sungkyunkwan University, Suwon Country：Korea, Republic of
A new insight into nanoparticle-plasma interactions (Invited) Invited International conference

K. Koga, K. Mori, R. Zhou, H. Seo, N. Itagaki, M. Shiratani

JP-KO dust workshop 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：HanYang University, Seoul Country：Korea, Republic of
Ar プラズマ中で光捕捉した微粒子を用いたプラズマ揺動の評価

大友洋, 森研人, 周靭, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第21回支部大会 2017.12

　More details

Event date： 2017.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
プラズマ CVD で作製した a-Si:H 積層膜の P/I 界面 SiH2結合量の基板温度依存性

原尚志, 田中和真, 小島尚, 永石翔大, 都甲将, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第21回支部大会 2017.12

　More details

Event date： 2017.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
スパッタエピタキシーによる高品質(ZnO)0.8(InN)0.2薄膜の作製：スパッタリングガス圧力の影響

竹内一登, 宮原奈乃華, 石榴, 岩崎和也, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第21回支部大会 2017.12

　More details

Event date： 2017.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
SiH4+N2マルチホロー放電プラズマ CVD による SiN 系膜の作製

永石翔大, 小島尚, 田中和真, 原尚志, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第21回支部大会 2017.12

　More details

Event date： 2017.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
Ar/N2 スパッタリングによる高品質 ZnO 膜の作製：基板温度の影響

村岡宗一郎, 岩崎和也, 呂佳豪, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第21回支部大会 2017.12

　More details

Event date： 2017.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
プラズマ CVD で作製した a-Si:H 薄膜の Si ネットワーク秩序性向上

田中和真, 原尚志, 小島尚, 永石翔大, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第21回支部大会 2017.12

　More details

Event date： 2017.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
Analysis of Inter-particle Fluctuation in Capacitively Coupled Low Pressure Ar Plasma Using Optical Tweezers International conference

H. Ohtomo, K. Mori, R. Zhou, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

18th Workshop on Fine Particle Plasmas 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Fine Particle Plasma and Plasma Process (Invited) Invited International conference

M. Shiratani, K. Koga

18th Workshop on Fine Particle Plasmas 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Evaluation of coupling among interaction fluctuations in nanoparticle growth in reactive plasmas International conference

K. Koga, K. Mori, R. Zhou, H. Seo, N. Itagaki, M. Shiratani

18th Workshop on Fine Particle Plasmas 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Cross-spectrum Analysis of Interaction Fluctuation between Plasma and Nanoparticles in Capacitively-Coupled RF Discharge Reactive Plasmas International conference

K. Mori, R. Zhou, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

18th Workshop on Fine Particle Plasmas 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Cloud of a-Si:H Clusters as Selective Filter in SiH4 Multi-Hollow Discharge Plasma International conference

T. Kojima, K. Tanaka, S. Nagaishi, H. Hara, H. Seo, N. Itagaki, K. Koga, M. Shiratani

18th Workshop on Fine Particle Plasmas 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Advanced plasma process for next-generation photovoltaics Invited International conference

H. Seo, N. Itagaki, K. Koga, M. Shiratani

27th annual meeting of MRS-J 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Fluctuation Analysis of An Optical Trapped Fine Particle in Ar Plasma International conference

H. Ohtomo, K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

27th annual meeting of MRS-J 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Effects of Number Density of Seeds on Plasma Induced Plant Growth Enhancement International conference

K. Koga, Y. Wada, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

27th annual meeting of MRS-J 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Deposition of High Quality Silicon Thin Films Utilizing Nanoparticles Trapped in Plasmas International conference

K. Koga, T. Kojima, S. Toko, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

27th annual meeting of MRS-J 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Y2O3:Er のアップコンバージョン特性と太陽電池への応用

坂本大輔, 張博辰, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 中村大輔

2017年度応用物理学会九州支部学術講演会 2017.12

　More details

Event date： 2017.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：宮崎観光ホテル Country：Japan
低圧プラズマを用いた CO2 のメタン化反応の活性化エネルギー

山本瑛久, 都甲将, 谷田知史, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

2017年度応用物理学会九州支部学術講演会 2017.12

　More details

Event date： 2017.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：宮崎観光ホテル Country：Japan
種子へのプラズマ照射のカイワレ大根の長さ分布に対する効果

佐藤僚哉, 和田陽介, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

2017年度応用物理学会九州支部学術講演会 2017.12

　More details

Event date： 2017.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：宮崎観光ホテル Country：Japan
Growth Enhancement of Sorghum by Plasma Irradiation to The Seeds International conference

M. Shiratani, Y. Wada, R. Sato, D. Yamashita, H. Seo, N. Itagaki, K. Koga

The 2nd Asian Applied Physics Conference (Asian-APC) 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Miyazaki Kanko Hotel Country：Japan
Effects of Gap between Electrodes and Seeds on Plasma Induced Plant Growth Enhancement International conference

Y. Wada, R. Sato, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 2nd Asian Applied Physics Conference (Asian-APC) 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Miyazaki Kanko Hotel Country：Japan
Photoluminescence from (ZnO)0.79(InN)0.21 films fabricated on sapphire substrates International conference

N. Miyahara, K. Iwasaki, L. Shi, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

The 2nd Asian Applied Physics Conference (Asian-APC) 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Miyazaki Kanko Hotel Country：Japan
Effects of Gas Flow Velocity on Plant Growth of Radish Sprout International conference

K. Koga, Y. Wada, R. Sato, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

The 2nd Asian Applied Physics Conference (Asian-APC) 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Miyazaki Kanko Hotel Country：Japan
Correlation analysis between high energy electrons and nanoparticles in AM CCP International conference

R. Zhou, K. Mori, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 2nd Asian Applied Physics Conference (Asian-APC) 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Miyazaki Kanko Hotel Country：Japan
Sputtering Growth of SiC Films on Si(111) Substrates by using Impurity Mediated Crystallization Method International conference

K. Imoto, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

The 2nd Asian Applied Physics Conference (Asian-APC) 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Miyazaki Kanko Hotel Country：Japan
Effects of Gas Pressure on Crystal Quality of ZION Films Fabricated by RF Magnetron Sputtering International conference

L. Shi, N. Miyahara, D. Yamashita, H. Seo, J. Lyu, K. Koga, M. Shiratani, N. Itagaki

The 2nd Asian Applied Physics Conference (Asian-APC) 2017.12

　More details

Event date： 2017.12

Language：English Presentation type：Oral presentation (general)

Venue：Miyazaki Kanko Hotel Country：Japan
色素増感太陽電池のポリマー対向電極における触媒反応の活性化（招待講演） Invited

徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

電子情報通信学会有機エレクトロニクス研究会 2017.12

　More details

Event date： 2017.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：サンメッセ鳥栖 Country：Japan

Catalytic enhancement of polymer counter electrode in dye-sensitized solar cells
マグネトロンスパッタ法によるSi(111)基板上への高品質ZnO膜の作製：窒素添加バッファー層の効果

岩崎和也, 呂佳豪, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

Plasma Conference 2017 2017.11

　More details

Event date： 2017.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：姫路商工会議所 Country：Japan
プラズマプロセスにおけるtailored voltage waveformsの使用に向けての設計及びマッチング

山木健司, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

Plasma Conference 2017 2017.11

　More details

Event date： 2017.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：姫路商工会議所 Country：Japan
反応性プラズマとナノ粒子の相互作用ゆらぎのクロスコリレーション解析区間の比較

周靭, 森研人, 大友洋, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

Plasma Conference 2017 2017.11

　More details

Event date： 2017.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：姫路商工会議所 Country：Japan
光ピンセットを用いたArプラズマと単一微粒子との相互作用解析

大友洋, 森研人, 周靭, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

Plasma Conference 2017 2017.11

　More details

Event date： 2017.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：姫路商工会議所 Country：Japan
基板温度制御によるa-Si:H薄膜のSiネットワーク秩序性の向上

田中和真, 小島尚, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

Plasma Conference 2017 2017.11

　More details

Event date： 2017.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：姫路商工会議所 Country：Japan
植物種子の吸水に与える大気圧プラズマ照射の効果

和田陽介, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

Plasma Conference 2017 2017.11

　More details

Event date： 2017.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：姫路商工会議所 Country：Japan
Development of a fine particle transport analyzer for processing plasmas International conference

K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

The 39th International Symposium on Dry Process (DPS 2017) 2017.11

　More details

Event date： 2017.11

Language：English Presentation type：Oral presentation (general)

Venue：Tokyo Institute of Technology Country：Japan
An Analysis on a Kinetic Motion of Optical Trapped Single Fine Particle in Ar Plasma International conference

H. Ohtomo, K. Mori, Z. Ren, D. Yamashita H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 4th International Symposium on Hybrid Materials and Processing (HyMaP 2017) 2017.11

　More details

Event date： 2017.11

Language：English Presentation type：Oral presentation (general)

Venue：Busan Country：Korea, Republic of
Nanoparticle Composite Films: Fabrication and Functions (Invited) International conference

M. Shiratani, K. Koga, H. Seo, N. Itagaki

The 4th International Symposium on Hybrid Materials and Processing (HyMaP 2017) 2017.11

　More details

Event date： 2017.11

Language：English Presentation type：Oral presentation (general)

Venue：Busan Country：Korea, Republic of
Effects of gas flow rate ratio on structure of a-C:H films deposited using Ar + H2+ C7H8 plasma CVD International conference

T. Fang, K. Yamaki, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

Taiwan Association for Coating and Thin Film Technology (TACT) 2017 2017.10

　More details

Event date： 2017.10

Language：English Presentation type：Oral presentation (general)

Venue：National Dong Hwa University Country：Taiwan, Province of China
Photoluminescence from epitaxial (ZnO)x(InN)1-x films on sapphire substrates fabricated by RF magnetron sputtering International conference

N. Miyahara, K. Iwasaki, L. Shi, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Taiwan Association for Coating and Thin Film Technology (TACT) 2017 2017.10

　More details

Event date： 2017.10

Language：English Presentation type：Oral presentation (general)

Venue：National Dong Hwa University Country：Taiwan, Province of China
Novel Fabrication Methods of Thin Films using Low Temperature Plasmas (Invited) Invited International conference

M. Shiratani, K. Koga, H. Seo, N. Itagaki

Taiwan Association for Coating and Thin Film Technology (TACT) 2017 2017.10

　More details

Event date： 2017.10

Language：English Presentation type：Oral presentation (general)

Venue：National Dong Hwa University Country：Taiwan, Province of China
スケーラブルDBDプラズマのRONS照射量に対する空気流れの効果

古閑一憲, 和田陽介, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

平成29年度（第70回）電気・情報関係学会九州支部連合大会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：琉球大学 Country：Japan
Local Fluctuations of Plasma Detected with an Optically Trapped Fine Particle International conference

M. Shiratani, H. Ohtomo, K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga

1st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2017) 2017.9

　More details

Event date： 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Jinniu Hotel, Chengdu Country：China
Effect of Gas flow rate ratio on the structure and properties of a-C:H films deposited using Ar + H2+ C7H8 Plasma CVD International conference

T. Fang, K. Yamaki, K .Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

1st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2017) 2017.9

　More details

Event date： 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Jinniu Hotel, Chengdu Country：China
Suppression of Si-H2 bond formation at P/I interface in a-Si:H solar cells fabricated by plasma CVD (Invited) International conference

K. Tanaka, T. Kojima, S. Toko, D. Yamashita, Hy. Seo, N. Itagaki, K.Koga, M. Shiratani

11th Asian-European International Conference on Plasma Surface Engineering (AEPSE2017) 2017.9

　More details

Event date： 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：International Convention Center Jeju Country：Korea, Republic of
Spatial Structure of Interactions between Nanoparticles and Low Pressure Plasmas (Invited) Invited International conference

M. Shiratani, H. Seo, N. Itagaki, K. Koga

11th Asian-European International Conference on Plasma Surface Engineering (AEPSE2017) 2017.9

　More details

Event date： 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：International Convention Center Jeju Country：Korea, Republic of
Catalytic enhancement on polymer counter electrodes of dye-sensitized solar cells by isooctylphenoxy-polyethoxyethanol addition International conference

B. Zhang, D. Sakamoto, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

11th Asian-European International Conference on Plasma Surface Engineering (AEPSE2017) 2017.9

　More details

Event date： 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：International Convention Center Jeju Country：Korea, Republic of
Arプラズマ中で光捕捉された単一微粒子の運動解析

大友洋, 森研人, 周靭, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
色素増感太陽電池のポリマー対向電極の触媒能のTriton X-100添加による向上

張博辰, 坂本大輔, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
色素増感太陽電池におけるポリマー対向電極へのシリコンナノ粒子添加効果

坂本大輔, 張博辰, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
ポリマーナノコンポジットを用いた量子ドット増感太陽電池の対向電極

徐鉉雄, 坂本大輔, 張博辰, 板垣奈穂, 古閑一憲, 白谷正治

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
反応性プラズマ中ナノ粒子とプラズマの相互作用ゆらぎの起因解明

森研人, 周靭, 大友洋, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
反応性プラズマとナノ粒子の相互作用ゆらぎの相関関係解析

周靭, 森研人, 大友洋, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
窒素添加結晶化法による格子不整合基板上へのZnOエピタキシャル成長―窒素酸素共添加バッファー層の効果―

呂佳豪, 岩崎和也, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
窒素添加スパッタリング法を用いたSi(111)基板上への高品質ZnO薄膜の作製

岩崎和也, 呂佳豪, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
高圧マルチホロー放電プラズマCVD下流におけるラジカル成膜速度の時間変化

小島尚, 都甲将, 田中和真, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
プラズマ照射した種籾への催芽処理の効果

古閑一憲, 和田陽介, 徐鉉雄, 板垣奈穂, 白谷正治, 橋本昌隆, 小島昌治

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
スペクトル解析によるプラズマ中クラスター挙動の分類

白谷正治, 小島尚, 都甲将, 田中和真, 徐鉉雄, 板垣奈穂, 古閑一憲

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
ジャガイモの生育に対するプラズマ照射時間の影響

和田陽介, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
不純物添加法を用いたSi(111)基板上へのSiC薄膜成長

井本幸希, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
スパッタエピタキシーによるサファイア基板上へのIn-N rich (ZnO)x(InN)1-x膜の作製

宮原奈乃華, 岩崎和也, 石榴, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
RFマグネトロンスパッタリング法で作製したZION薄膜の結晶性に及ぼすガス圧力の影響

石榴, 宮原奈乃華, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
P/I界面のSi-H2結合形成に対する基板温度の効果

田中和真, 原尚志, 小島尚, 永石翔大, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第78回応用物理学会秋季学術講演会 2017.9

　More details

Event date： 2017.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡国際会議場, 福岡国際センター Country：Japan
A Theoretical Model for Time Evolution of Radical Deposition Rate in Silane Plasma CVD International conference

T. Kojima, S. Toko, K. Keya, K. Tanaka, H. Seo, N. Itagaki, K. Koga, M. Shiratani

International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017) 2017.8

　More details

Event date： 2017.8 - 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto University, Kyoto Country：Japan
Catalytic Enhancement of Polymer Counter Electrode of Photochemical Photovoltaics based on Nano-particle Application International conference

H. Seo, D. Sakamoto, H. Chou, N. Itagaki, K. Koga, M. Shiratani

International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017) 2017.8

　More details

Event date： 2017.8 - 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto University, Kyoto Country：Japan
Film thickness dependence of structure of a-Si:H thin films measured by Raman spectroscopy International conference

K. Tanaka, S. Toko, K. Keya, T. Kojima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017) 2017.8

　More details

Event date： 2017.8 - 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto University, Kyoto Country：Japan
Two-dimensional profile of RONS dose irradiated with a scalable DBD device International conference

Y. Oide, T. Sarinont, R. Katayama, Y. Wada, T. Kawasaki, D. Yamashita, H. Seo, N. Itagaki, P. Attri, E. H. Choi, A. Tanaka, K. Koga, M. Shiratani

International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017) 2017.8

　More details

Event date： 2017.8 - 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto University, Kyoto Country：Japan
Spatiotemporal structure of fluctuation of interactions between plasmas and nanoparticles in capacitively-coupled rf discharge reactive plasmas International conference

K. Mori, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017) 2017.8

　More details

Event date： 2017.8 - 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto University, Kyoto Country：Japan
Optical Trapping Process of Single Fine Particle in Ar Plasma International conference

H. Ohtomo, K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017) 2017.8

　More details

Event date： 2017.8 - 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto University, Kyoto Country：Japan
Next Generation Photovoltaics Based on Si Nano-particles Fabricated by Advanced Plasma Process International conference

H. Seo, N. Itagaki, K. Koga, M. Shiratani

International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017) 2017.8

　More details

Event date： 2017.8 - 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto University, Kyoto Country：Japan
Fabrication of surface flat (ZnO)x(InN)1-x films on 3%-lattice-mismatched a-sapphire substrates International conference

N. Miyahara, K. Matsushima, H. Seo, K. Koga, M. Shiratani, N. Itagaki

International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017) 2017.8

　More details

Event date： 2017.8 - 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto University, Kyoto Country：Japan
Effects of bias voltage on the surface morphology of a-C:H films deposited using Ar + H2+ C7H8 Plasma CVD International conference

M. Shiratani, T. Fang, K. Yamaki, K. Koga, D. Yamashita, H. Seo, N. Itagaki

International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017) 2017.8

　More details

Event date： 2017.8 - 2017.9

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto University, Kyoto Country：Japan
Morphology Evolution of ZnO Thin Films Deposited by Nitorogen Mediated Cristallization Method International conference

I. Suhariadi, N. Itagaki, M. Shiratani

The 2nd International Joint Conference on Advanced Engineering and Technology (IJCAET 2017) 2017.8

　More details

Event date： 2017.8

Language：English Presentation type：Oral presentation (general)

Venue：Sanur Paradise Plaza Hotel & Suites, Bali Country：Indonesia
Measurements of nitrogen and oxygen atom density in N2/Ar sputtering plasma for fabrication of high-mobility amorphous In2O3:Sn films International conference

M. Shiratani, T. Takasaki, H. Wang, K. Matsushima, H. Seo, K. Koga, K. Takeda, M. Hori, and N. Itagaki

International Conference on Phenomena in Ionized Gases (ICPIG 2017) 2017.7

　More details

Event date： 2017.7

Language：English Presentation type：Oral presentation (general)

Venue：Estoril Congress Center, Lisbon Country：Portugal
Suppression of Si-H2 bond formation at P/I interface in a-Si:H solar cells deposited by multi-hollow discharge plasma CVD International conference

S. Toko, K. Tanaka, K. Keya, T. Kojima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

International Conference on Phenomena in Ionized Gases (ICPIG 2017) 2017.7

　More details

Event date： 2017.7

Language：English Presentation type：Oral presentation (general)

Venue：Estoril Congress Center, Lisbon Country：Portugal
a‐Si:H 薄膜中の Si ネットワーク秩序性のラマン分光法を⽤いた評価

田中和真, 小島尚, 都甲将, ⼭下⼤輔, 徐鉉雄, 板垣奈穂, 古閑⼀憲, 白谷正治

平成29年度九州表面・真空研究会2017（兼第22回九州薄膜表面研究会） 2017.6

　More details

Event date： 2017.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
⾊素増感太陽電池におけるナノ粒⼦を⽤いた表⾯改質によるポリマー触媒の反応活性化

坂本⼤輔, 張博辰, 徐鉉雄, 板垣奈穂, 古閑⼀憲, 白谷正治

平成29年度九州表面・真空研究会2017（兼第22回九州薄膜表面研究会） 2017.6

　More details

Event date： 2017.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
Synthesis of Nanoparticles Using Low Temperature Plasmas and Its Application to Solar Cells and Tracers in Living Body (Invited) Invited International conference

K. Koga, H. Seo, A. Tanaka, N. Itagaki, M. Shiratani

231st Meeting of Electrochemical Society (ECS) 2017.5

　More details

Event date： 2017.5 - 2017.6

Language：English Presentation type：Oral presentation (general)

Venue：Hilton New Orleans Riverside, New Orleans, Louisiana
低温プラズマによるナノ粒子の合成と太陽電池への応用

古閑一憲, 徐鉉雄, 板垣奈穂, 白谷正治

電子情報通信学会有機エレクトロニクス研究会 2017.4

　More details

Event date： 2017.4

Language：Japanese Presentation type：Oral presentation (general)

Venue：龍郷町生涯学習センター（鹿児島県奄美大島） Country：Japan
プラズマとナノ粒子の相互作用ゆらぎのモード間相関

森研人, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

日本物理学会第72回年次大会（2017年） 2017.3

　More details

Event date： 2017.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
a-Si:H太陽電池P/I界面におけるSi-H2結合評価

都甲将, 田中和真, 小島尚, 毛屋公孝, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第64回応用物理学会春季学術講演会 2017.3

　More details

Event date： 2017.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：パシフィコ横浜 Country：Japan
マルチホロー放電プラズマCVD下流におけるラジカル製膜速度と膜中クラスター混入量の動的振る舞い

都甲将, 小島尚, 毛屋公孝, 田中和真, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第64回応用物理学会春季学術講演会 2017.3

　More details

Event date： 2017.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：パシフィコ横浜 Country：Japan
RFマグネトロンスパッタにより格子不整合基板上に作製した表面平坦ZION薄膜

宮原奈乃華, 松島宏一, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

第64回応用物理学会春季学術講演会 2017.3

　More details

Event date： 2017.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：パシフィコ横浜 Country：Japan
大気圧DBD装置の活性種照射量の放電電力密度依存性

白谷正治, 片山龍, 北﨑訓, T. Sarinont, 大井手芳徳, 和田陽介, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, Attri Pankaj, Eun Ha Choi, 田中昭代

第64回応用物理学会春季学術講演会 2017.3

　More details

Event date： 2017.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：パシフィコ横浜 Country：Japan
色素増感太陽電池の触媒としてのポリマーナノコンポジット

徐鉉雄, 坂本大輔, 板垣奈穂, 古閑一憲, 白谷正治

第64回応用物理学会春季学術講演会 2017.3

　More details

Event date： 2017.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：パシフィコ横浜 Country：Japan
スパッタ支援層交換で作製したポリイミド基板上結晶Ge薄膜の膜質

白谷正治, 田浪荘汰, 坂本大輔, 張博辰, 徐鉉雄, 山下大輔, 板垣奈穂, 古閑一憲

第64回応用物理学会春季学術講演会 2017.3

　More details

Event date： 2017.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：パシフィコ横浜 Country：Japan
RFマグネトロンスパッタリング法で作製した(ZnO)x(InN)1-x膜のフォトルミネッセンス

松島宏一, 宮原奈乃華, 岩崎和也, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

第64回応用物理学会春季学術講演会 2017.3

　More details

Event date： 2017.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：パシフィコ横浜 Country：Japan
Corrational study of fluctuation of coupling between plasmas and nanoparticles International conference

K. Koga, K. Mori, H. Seo, N. Itagaki, M. Shiratani

9th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 10th International Conference on Plasma Nanotechnology and Science (ISPlasma2017/IC-PLANTS2017) 2017.3

　More details

Event date： 2017.3

Language：English Presentation type：Oral presentation (general)

Venue：Chubu University Country：Japan
Long-term evaluation of In nanoparticle transport in living body International conference

K. Koga, A. Tanaka, M. Hirata, T. Amano, T. Sarinont, H. Seo, N. Itagaki, M. Shiratani

9th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 10th International Conference on Plasma Nanotechnology and Science (ISPlasma2017/IC-PLANTS2017) 2017.3

　More details

Event date： 2017.3

Language：English Presentation type：Oral presentation (general)

Venue：Chubu University Country：Japan
Comparision of Gamma irradation and scalable DBD on the declorization of Dyes International conference

K. Koga, P. Attri, T. Sarinont, H. Seo, N. Itagaki, M. Shiratani

9th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 10th International Conference on Plasma Nanotechnology and Science (ISPlasma2017/IC-PLANTS2017) 2017.3

　More details

Event date： 2017.3

Language：English Presentation type：Oral presentation (general)

Venue：Chubu University Country：Japan
Time evolution of CH4 yield in methanation of CO2 using helicon discharge plasma International conference

S. Tanida, S. Toko, R. Katayama, K. Koga, M. Shiratani

9th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 10th International Conference on Plasma Nanotechnology and Science (ISPlasma2017/IC-PLANTS2017) 2017.3

　More details

Event date： 2017.3

Language：English Presentation type：Oral presentation (general)

Venue：Chubu University Country：Japan
Effects of P-layer of PIN a-Si:H solar cells on Si-H2/Si-H bond ratio at P/I interface International conference

K. Keya, K. Tanaka, T. Kojima, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

34th Symposium on Plasma Processing (SPP34) / The 29th Symposium on Plasma Science for Materials (SPSM29) 2017.1

　More details

Event date： 2017.1

Language：English Presentation type：Oral presentation (general)

Venue：Hokkaido University Country：Japan
Si Nanoparticles Fabricated by Multi-hollow Discharge Plasma Chemical Vapor Deposition and their Photovoltaic Application International conference

D. Sakamoto, H. Chou, S. Tanami, H. Seo, N. Itagaki, K. Koga, M. Shiratani

34th Symposium on Plasma Processing (SPP34) / The 29th Symposium on Plasma Science for Materials (SPSM29) 2017.1

　More details

Event date： 2017.1

Language：English Presentation type：Oral presentation (general)

Venue：Hokkaido University Country：Japan
Theoretical Consideration on Methane Production Using Plasma on Mars International conference

S. Toko, S. Tanida, K. Koga, M. Shiratani

34th Symposium on Plasma Processing (SPP34) / The 29th Symposium on Plasma Science for Materials (SPSM29) 2017.1

　More details

Event date： 2017.1

Language：English Presentation type：Oral presentation (general)

Venue：Hokkaido University Country：Japan
Time evolution of cross-correlation between two fluctuations of couplings between plasmas and nanoparticles in amplitude modulated discharges International conference

K. Koga, K. Mori, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

17th Workshop on Fine Particle Plasmas and JAPAN-KOREA Workshop on Dust Particles 2016 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
DC bias voltage dependence of dust transport in a compact dust trajectory analyzer International conference

R. Katayama, T. Fang, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, S. Masuzaki, N. Ashikawa, M. Tokitani, K. Nishimura, A. Sagara

17th Workshop on Fine Particle Plasmas and JAPAN-KOREA Workshop on Dust Particles 2016 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute of Fusion Science, Gifu Country：Japan
Dependence of amount of plasma activated water on growth enhancement of radish sprout International conference

K. Koga, T. Sarinont, R. Katayama, Y. Wada, H. Seo, N. Itagaki, M. Shiratani

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Time evolution of electron temperature and amount of cluster incorporation into films in SiH4 multi-hollow plasma CVD International conference

T. Kojima, S. Toko, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Spatial distribution of Si-H2 bond density in a-Si:H film evaluated by microscopic FTIR International conference

K. Tanaka, T. Kojima, K. Keya, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Properties of Au-induced layer-exchange crystalline Ge formed by sputtering deposition International conference

S. Tanami, Y. Oide, D. Sakamoto, H. Seo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Interaction potential fluctuation between binary collisions of fine particles suspended in low pressure Ar rf plasmas International conference

M. Soejima, H. Ohtomo, K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
High-mobility transparent amorphous In2O3:Ge films fabricated by impurity mediated amorphization method International conference

T. Takasaki, H. Wang, N. Miyahara, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Effects of Sputtering Gas Composition on Properties of ZnO Prepared by Nitrogen Mediated Crystallization Method International conference

N. Miyahara, T. Ide, K. Iwasaki, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Effects of P-layer of PIN a-Si:H solar cells on Si-H2 bond formation at P/I interface International conference

K. Keya, K. Tanaka, T. Kojima, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Effects of modulation frequency on interaction fluctuation between plasma and nanoparticles International conference

K. Mori, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Effects of electrostatic field direction on dust accumulation to mirror in a plasma reactor International conference

R. Katayama, T. Fang, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, S. Masuzaki, N. Ashikawa, M. Tokitani, K. Nishimura, A. Sagara

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Effects of bias voltage on mass density of a-C:H films deposited using Ar + H2+ C7H8 Plasma CVD International conference

T. Fang, K. Yamaki, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Dependence of internal resistance by the quantity of Si nanoparticles on polymer counter electrode in dye-sensitized solar cells International conference

D. Sakamoto, H. Chou, Y. Oide, S. Tanami, H. Seo, N. Itagaki, K. Koga, M. Shiratani

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Characteristic length of position fluctuation of a single fine particle optically trapped in Ar plasma International conference

H. Ohtomo, M. Soejima, K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

26th annual meeting of MRS-J 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
アモルファスITO成膜用Ar/N2スパッタプラズマ中の窒素原子密度の測定

高崎俊行, 王寒, 松島宏一, 竹田圭吾, 堀勝, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
反応性プラズマとナノ粒子の相互作用ゆらぎの時空間構造

森研人, 添島雅大, 大友洋, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
大気圧DBDジェット装置のRONS照射量比較実験

片山龍, サリノントタパナット, 大井手芳徳, 和田陽介, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, Pankaj Attri, 田中昭代, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
マルチホロー放電プラズマCVD法で製膜されたa-Si:H薄膜のSi-H2結合密度の面内分布

田中和真, 毛屋公孝, 都甲将, 小島尚, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
マルチホロー放電プラズマCVD下流領域におけるクラスター輸送量と膜中クラスター混入量の関係

小島尚, 都甲将, 毛屋公孝, 田中和真, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
ポリイミドフィルム上へのプラズマ支援Au誘起低温高速層交換Ge結晶成長

田浪荘汰, 坂本大輔, 張博辰, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
プラズマ中微粒子の相互作用計測

添島雅大, 大友洋, 森研人, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
プラズマ中微粒子の光捕捉

大友洋, 添島雅大, 森研人, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
プラズマプロセスによって作成されたSiナノ粒子の光電変換特性

張博辰, 坂本大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
プラズマCVDにより作製されたナノ粒子を用いることによるポリマー薄膜の性能向上

坂本大輔, 張博辰, 田浪荘汰, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
スパッタ製膜圧力が窒素添加ZnO膜の表面形状に与える影響

岩崎和也, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Scalable DBDによるRONS照射量の二次元分布

大井手芳徳, 片山龍, サリノントタパナット, 和田陽介, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Ar+H2+C7H8プラズマCVD法におけるアモルファス水素化炭素膜に対する水素流量比の影響

方韜鈞, 山木健司, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Ar/N2/O2スパッタによるZnO薄膜の高品質エピタキシャル成長

宮原奈乃華, 井手智章, 岩崎和也, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Ar/N2 スパッタリングプラズマにより作製したアモルファスITO膜の表面形状

王寒, 高崎俊行, 松島宏一, 岩崎和也, 宮原奈及華, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
マルチホロー放電プラズマCVD法で製膜されたPIN a-Si:H太陽電池の安定性に界面が及ぼす影響

毛屋公孝, 田中和真, 小島尚, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Plasma anisotropic CVD of carbon films from toluene (Invited) Invited International conference

M. Shiratani, X. Dong, H. Seo, N. Itagaki, K. Koga

6th International Conference on Advanced Plasma Technologies (ICAPT-6) 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Siem Reap Country：Cambodia
Catalytic characteristics and photovoltaic application of polymer nano-composite International conference

H. Seo, D. Sakamoto, N. Itagaki, K. Koga, M. Shiratani

The 1st Asian Applied Physics Conference (Asian-APC) 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Tsushima, Nagasaki Country：Japan
マルチホロー放電プラズマ中のクラスターサイズ・密度の放電時間依存性

小島尚, 都甲将, 毛屋公孝, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

平成28年度応用物理学会九州支部学術講演会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：対馬市交流センター, 長崎 Country：Japan
PEDOT:PSS 薄膜の導電性向上

坂本大輔, 張博辰, 大井手芳徳, 田浪荘汰, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

平成28年度応用物理学会九州支部学術講演会 2016.12

　More details

Event date： 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：対馬市交流センター, 長崎 Country：Japan
Enhancement of fill factor (FF) of dye-sensitized solar cell by means of counter polymer electrode containing Si nanoparticles International conference

D. Sakamoto, H. Chou, Y. Oide, S. Tanami, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 1st Asian Applied Physics Conference (Asian-APC) 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Tsushima, Nagasaki Country：Japan
Effects of pulse discharge on cluster transport in downstream region of multi-hollow discharge CVD plasma International conference

T. Kojima, S. Toko, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 1st Asian Applied Physics Conference (Asian-APC) 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Tsushima, Nagasaki Country：Japan
Comparative study on death of cells irradiated by non-thermal plasma, X-ray, and UV International conference

K. Koga, T. Amano, T. Sarinont, R. Katayama, Y. Wada, H. Seo, N. Itagaki, M. Shiratani, A. Tanaka, Y. Nakatsu, T. Kondo

The 1st Asian Applied Physics Conference (Asian-APC) 2016.12

　More details

Event date： 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Tsushima, Nagasaki Country：Japan
小型ダスト飛跡分析装置を用いたミラー上ダスト堆積抑制の検討

古閑一憲, 片山龍, 方韜鈞, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男

第33回プラズマ・核融合学会年会 2016.12

　More details

Event date： 2016.11 - 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan

Study on suppression of dust deposition on mirror using a compact dust trajectory analyzer
プラズマとナノ粒子の相互作用ゆらぎの２次元空間構造の時間発展

古閑一憲, 森研人, 徐鉉雄, 板垣奈穂, 白谷正治

第33回プラズマ・核融合学会年会 2016.11

　More details

Event date： 2016.11 - 2016.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北大学 Country：Japan

Temporal development of two dimensional structure of fluctuation of interaction between plasmas and nanoparticles
Blue and Green Photoluminescence of (ZnO)0.92(InN)0.08 International conference

K. Matsushima, K. Iwasaki, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

2016 MRS Fall Meeting & Exhibit 2016.12

　More details

Event date： 2016.11 - 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Boston, Massachusetts
Measurements of Absolute N Atom Density in Ar/N2 Sputtering Plasma during Heteroepitaxial Growth of Single Crystalline ZnO Films on Sapphire Substrates International conference

K. Iwasaki, T. Ide, K. Matsushima, T. Takasaki, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

2016 MRS Fall Meeting & Exhibit 2016.12

　More details

Event date： 2016.11 - 2016.12

Language：English Presentation type：Oral presentation (general)

Venue：Boston, Massachusetts
Effects of particle size on catalytic characteristics of polymer counter electrode containing Si nanoparticles in dye-sensitized solar cells International conference

D. Sakamoto, Y. Oide, S. Tanami, H. Seo, N. Itagaki, K. Koga, and M. Shiratani

26th International Photovoltaic Science and Engineering Conference (PVSEC-26) 2016.10

　More details

Event date： 2016.10

Language：English Presentation type：Oral presentation (general)

Venue：Sands Expo and Convention Centre Country：Singapore
Room temperature fabrication of high-mobility amorphous In2O3:Sn films via nitrogen-mediated amorphization method International conference

T. Takasaki, W. Han, K. Iwasaki, K. Matsushima,D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

26th International Photovoltaic Science and Engineering Conference (PVSEC-26) 2016.10

　More details

Event date： 2016.10

Language：English Presentation type：Oral presentation (general)

Venue：Sands Expo and Convention Centre Country：Singapore
Low cost dye-sensitized solar cells based on polymer composite catalyst International conference

D. Sakamoto, H. Seo, S. Tanami, Y. Oide, N. Itagaki, K. Koga, M. Shiratani

26th International Photovoltaic Science and Engineering Conference (PVSEC-26) 2016.10

　More details

Event date： 2016.10

Language：English Presentation type：Oral presentation (general)

Venue：Sands Expo and Convention Centre Country：Singapore
Effect of photocatalyst TiO2 on the long-term stability of dye-sensitized solar cells International conference

T. Takasaki, H. Seo, N. Itagaki, K. Koga, and M. Shiratani

26th International Photovoltaic Science and Engineering Conference (PVSEC-26) 2016.10

　More details

Event date： 2016.10

Language：English Presentation type：Oral presentation (general)

Venue：Sands Expo and Convention Centre Country：Singapore
Comparative study of non-thermal atmospheric pressure discharge plasmas for life science applications International conference

K. Koga, R. Katayama, T. Sarinont, H. Seo, N. Itagaki, P. Attri, E. L. Quiros, .A. Tanaka, M. Shiratani

69th Annual Gaseous Electronics Conference (GEC2016) 2016.10

　More details

Event date： 2016.10

Language：English Presentation type：Oral presentation (general)

Venue：Ruhr-Universität Bochum Country：Germany
Catalytic enhancement on polymer composite counter electrode for low cost quantum dot-sensitized solar cells International conference

H. Seo, D. Sakamoto, C. V. V. M. Gopi, M. Kim, H. J. Kim, N. Itagaki, K. Koga, M. Shiratani

The 6th International Conference on Microelectronics and Plasma Technology (ICMAP 2016) 2016.9

　More details

Event date： 2016.9

Language：English Presentation type：Oral presentation (general)

Venue：Dream Center, Gyeongju Country：Korea, Republic of
p層上に堆積したintrinsic a-Si:H中のSi-H2/Si-H結合比に対する界面の影響

毛屋公孝, 田中和真, 小島尚, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第77回応用物理学会秋季学術講演会 2016.9

　More details

Event date： 2016.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：朱鷺メッセ, 新潟 Country：Japan
反応性プラズマとナノ粒子の相互作用ゆらぎの時空間構造解析

森研人, 添島雅大, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第77回応用物理学会秋季学術講演会 2016.9

　More details

Event date： 2016.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：朱鷺メッセ, 新潟 Country：Japan
マルチホロー放電プラズマ下流における電場とクラスター輸送の関係

小島尚, 都甲将, 毛屋公孝, 田中和真, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第77回応用物理学会秋季学術講演会 2016.9

　More details

Event date： 2016.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：朱鷺メッセ, 新潟 Country：Japan
Time development of response of cells irradiated by non-thermal atmospheric air plasma International conference

K. Koga, T. Amano, Y. Nakatsu, H. Seo, N. Itagaki, A. Tanaka, T. Kondo, M. Shiratani

6th International Conference on Plasma Medicine (ICPM6) 2016.9

　More details

Event date： 2016.9

Language：English Presentation type：Oral presentation (general)

Venue：Slovak University of Technology
低圧ヘリコン放電プラズマを用いたCO2のメタン化

谷田知史, 都甲将, 片山龍, 古閑一憲, 白谷正治

第10回プラズマエレクトロニクスインキュベーションホール 2016.9

　More details

Event date： 2016.8 - 2016.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
マルチホロー放電プラズマCVD法によって作成されたSiナノ粒子の量子測定と太陽電池への応用

張博辰, 坂本大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第10回プラズマエレクトロニクスインキュベーションホール 2016.9

　More details

Event date： 2016.8 - 2016.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
プラズマ中でレーザートラップされた微粒子を用いたプラズマのその場計測

大友洋, 添島雅大, 森研人, 山下大輔, 徐鉉雄, 古閑一憲, 板垣奈穂, 白谷正治

第10回プラズマエレクトロニクスインキュベーションホール 2016.9

　More details

Event date： 2016.8 - 2016.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
ナノ粒子制御による高光安定なa-Si:H太陽電池セルの作成

田中和真, 毛屋公孝, 鳥越祥宏, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第10回プラズマエレクトロニクスインキュベーションホール 2016.9

　More details

Event date： 2016.8 - 2016.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
Relationship between Electric Property and Surface Flatness of (ZnO)x(InN)1-X Films on ZnO Templates International conference

K. Matsushima, N. Itagaki, M. Shiratani

16th International Conference On Nanotechnology (IEEE NANO 2016) 2016.8

　More details

Event date： 2016.8

Language：English Presentation type：Oral presentation (general)

Venue：Sendai International Center Country：Japan
Effects of RF power on Au-induced layer-exchange crystalline Ge formation using sputtering deposition International conference

S. Tanami, Y. Oide, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

20th International Vacuum Congress (IVC-20) 2016.8

　More details

Event date： 2016.8

Language：English Presentation type：Oral presentation (general)

Venue：Busan Exhibition Convention Center Country：Korea, Republic of
Time evolution of radical deposition rate and cluster amount (Invited) Invited International conference

M. Shiratani, S. Toko, Y. Torigoe, K. Keya, T. Kojima, H. Seo, N. Itagaki and K. Koga

20th International Vacuum Congress (IVC-20) 2016.8

　More details

Event date： 2016.8

Language：English Presentation type：Oral presentation (general)

Venue：Busan Exhibition Convention Center Country：Korea, Republic of
Surface modification of polymeric catalyst for the catalytic enhancement of dye and quantum dot sensitized solar cells International conference

H. Seo, M. K. Son, S. Tanami, N. Itagaki, K. Koga, M. Shiratani

20th International Vacuum Congress (IVC-20) 2016.8

　More details

Event date： 2016.8

Language：English Presentation type：Oral presentation (general)

Venue：Busan Exhibition Convention Center Country：Korea, Republic of
Catalytic Activation of Polymer Composite Catalyst for Photochemical Solar Cells International conference

H. Seo, M. Son, S. Tanami, N. Itagaki, K. Koga, M. Shiratani

The 67th Annual Meeting of the International Society of Electrochemistry 2016.8

　More details

Event date： 2016.8

Language：English Presentation type：Oral presentation (general)

Venue：The Hague Country：Netherlands
Envelope analysis and cross correlation analysis of plasma perturbation in amplitude modulated reactive dusty plasmas International conference

K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani and S. Inagaki

Workshop on Plasma surface interaction for technological applications 2016.7

　More details

Event date： 2016.7

Language：English Presentation type：Oral presentation (general)

Venue：University of Kiel Country：Germany
Effects of hydrogen content on a-C:H films deposited by Ar+H2+C7H8 plasma CVD International conference

K. Yamaki, K. Koga, D. Yamashita, H. Seo, N. Itagaki and M. Shiratani

Workshop on Plasma surface interaction for technological applications 2016.7

　More details

Event date： 2016.7

Language：English Presentation type：Oral presentation (general)

Venue：University of Kiel Country：Germany
Effects of clusters transport on hydrogenated amorphous silicon solar cells International conference

T. Kojima, S. Toko, K. Keya, K. Tanaka, H. Seo, N. Itagaki, K. Koga, and M. Shiratani

Workshop on Plasma surface interaction for technological applications 2016.7

　More details

Event date： 2016.7

Language：English Presentation type：Oral presentation (general)

Venue：University of Kiel Country：Germany
QCMを用いたLHD内ダスト堆積量のその場測定

古閑一憲, 片山龍, 方韜鈞, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男, LHD実験グループ

第11回核融合エネルギー連合講演会 2016.7

　More details

Event date： 2016.7

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
コンパクトドリフトチューブを用いたArプラズマとグラファイト壁の相互作用により発生したダストの捕集実験

方韜鈞, 片山龍, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男

第11回核融合エネルギー連合講演会 2016.7

　More details

Event date： 2016.7

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
コンパクトドリフトチューブへのダスト入射角度に対する印加バイアス電圧の影響

片山龍, 方韜鈞, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男

第11回核融合エネルギー連合講演会 2016.7

　More details

Event date： 2016.7

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Effects of hydrogen content on mass density of a-C:H films deposited using Ar + H2+ C7H8 Plasma CVD International conference

K. Yamaki. X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, and M. Shiratani

23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG) 2016.7

　More details

Event date： 2016.7

Language：English Presentation type：Oral presentation (general)

Venue：Bratislava
Modulation level dependence of fluctuation of interactions between plasmas and nanoparticles grown in amplitude modulated discharges International conference

K. Mori, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG) 2016.7

　More details

Event date： 2016.7

Language：English Presentation type：Oral presentation (general)

Venue：Bratislava
Effects of discharge power on transport characteristics of clusters in the downstream region of multi-hollow SiH4 discharges International conference

T. Kojima, S. Toko, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG) 2016.7

　More details

Event date： 2016.7

Language：English Presentation type：Oral presentation (general)

Venue：Bratislava
プラズマを用いた低温高速層交換結晶成長に対するRF電力の効果

田浪荘汰, 大井手芳徳, 坂本大輔, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

平成28年度九州表面・真空研究会2016（兼第21回九州薄膜表面研究会） 2016.6

　More details

Event date： 2016.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
不純物添加法を用いた高移動度アモルファスIn2O3:Sn膜の作製

高崎俊行, 松島宏一, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

平成28年度九州表面・真空研究会2016（兼第21回九州薄膜表面研究会） 2016.6

　More details

Event date： 2016.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
DC biased parallel plates for reduction of dust accumulation on first mirror International conference

M. Shiratani, R. Katayama, K. Koga, D. Yamashita, H. Seo, N. Itagaki, S. Masuzaki, N. Ashikawa, M. Tokitani, K. Nishimura, A. Sagara

International Conference on Plasma Surface Interactions in Controlled Fusion Devices (22nd PSI) 2016.5

　More details

Event date： 2016.5 - 2016.6

Language：English Presentation type：Oral presentation (general)

Venue：Pontifical Urbaniana University, Roma Country：Italy
コンパクトドリフトチューブを用いたプラズマ生成ダスト捕集

白谷正治, 片山龍, 古閑⼀憲, 山下大輔, 徐鉉雄, 板垣奈穂, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男, LHD実験グループ

第63回応用物理学会春季学術講演会 2016.3

　More details

Event date： 2016.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
RFマグネトロンスパッタリング法で作製した(ZnO)x(InN)1-x膜の表⾯モフォロジー制御

松島宏⼀, 井手智章, 山下大輔, 徐鉉雄, 古閑⼀憲, 白谷正治, 板垣奈穂

第63回応用物理学会春季学術講演会 2016.3

　More details

Event date： 2016.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
プラズマ中微粒子を用いたプラズマポテンシャルゆらぎの評価

古閑一憲, 添島雅大, 伊藤鉄平, 徐鉉雄, 板垣奈穂, 白谷正治

日本物理学会第71回年次大会 2016.3

　More details

Event date： 2016.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東北学院大学 Country：Japan
プラズマによるクラスター捕捉を利用した低クラスター混入 a-Si:H 薄膜の作製

都甲将, 毛屋公孝, 小島尚, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第7回薄膜太陽電池セミナー 2016.3

　More details

Event date： 2016.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：山形大学 Country：Japan
色素及び量子ドット増感太陽電池の電解液に適用可能なポリマー触媒

徐鉉雄, 田浪荘汰, 大井手芳徳, 板垣奈穂, 古閑一憲, 白谷正治

第7回薄膜太陽電池セミナー 2016.3

　More details

Event date： 2016.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：山形大学 Country：Japan
A compact drift tube: a novel in-situ dust measurement method International conference

M. Shiratani, R. Katayama, K. Koga, D. Yamashita, H. Seo, N. Itagaki, S. Masuzaki, N. Ashikawa, M. Tokitani, K. Nishimura, A. Sagara, and the LHD Experimental Group

8th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 9th International Conference on Plasma Nanotechnology and Science (ISPlasma2016/IC-PLANTS2016) 2016.3

　More details

Event date： 2016.3

Language：English Presentation type：Oral presentation (general)

Venue：Nagoya University Country：Japan
Non-thermal atmospheric air plasma irradiation to plant seeds for plasma agricultural applications International conference

M. Soejima, K. Koga, T. Sarinont, T. Amano, H. Seo, N. Itagaki, M. Shirtani

5th International Conference on Advanced Plasma Technologies (ICAPT-5) 2016.3

　More details

Event date： 2016.2 - 2016.3

Language：English Presentation type：Oral presentation (general)

Venue：Rogla Country：Slovenia
Fluctuation in interaction potential between binary colliding fine particles suspended in plasmas International conference

M. Soejima, T. Ito, H. Seo, N. Itagaki, K. Koga, M. Shiratani

5th International Conference on Advanced Plasma Technologies (ICAPT-5) 2016.3

　More details

Event date： 2016.2 - 2016.3

Language：English Presentation type：Oral presentation (general)

Venue：Rogla Country：Slovenia
Deposition of high-mobility amorphous In2O3:Sn films by utilizing nitrogen mediated amorphization method International conference

T. Takasaki, T. Ide, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

The 3rd Korea-Japan Joint Symposium on Advanced Solar Cells 2016.2

　More details

Event date： 2016.2

Language：English Presentation type：Oral presentation (general)

Venue：Welli Hilli Park, Kangwon Province Country：Korea, Republic of
Inverse Correlation between Radical Deposition Rate and Cluster Amount in Gas Phase in SiH4 Discharge Plasmas for Si Thin Film Solar Cell Fabrication International conference

S. Toko, Y. Torigoe, K. Keya, T. Kojima, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 3rd Korea-Japan Joint Symposium on Advanced Solar Cells 2016.2

　More details

Event date： 2016.2

Language：English Presentation type：Oral presentation (general)

Venue：Welli Hilli Park, Kangwon Province Country：Korea, Republic of
Hybrid counter electrode of photochemical solar cells for iodine and polysulfide redox systems (Invited) Invited International conference

H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 3rd Korea-Japan Joint Symposium on Advanced Solar Cells 2016.2

　More details

Event date： 2016.2

Language：English Presentation type：Oral presentation (general)

Venue：Welli Hilli Park, Kangwon Province Country：Korea, Republic of
Evaluation of SiH and SiH2 bonds in PIN a-Si:H solar cells using Raman spectroscopy International conference

K. Keya, Y. Torigoe, S. Toko, T. Kojima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 3rd Korea-Japan Joint Symposium on Advanced Solar Cells 2016.2

　More details

Event date： 2016.2

Language：English Presentation type：Oral presentation (general)

Venue：Welli Hilli Park, Kangwon Province Country：Korea, Republic of
Effects of annealing temperature on grain size of Au catalyst for layer-exchange Ge crystalline formation International conference

S. Tanami, S. Hashimoto, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 3rd Korea-Japan Joint Symposium on Advanced Solar Cells 2016.2

　More details

Event date： 2016.2

Language：English Presentation type：Oral presentation (general)

Venue：Welli Hilli Park, Kangwon Province Country：Korea, Republic of
Stable and low cost polymeric catalyst for dye-sensitized solar cells International conference

H. Seo, M.-K. Son, N. Itagaki, K. Koga, M. Shiratani

EMN Photovoltaics Meeting 2016.1

　More details

Event date： 2016.1

Language：English Presentation type：Oral presentation (general)

Venue：Eaton Hotel, Hong Kong Country：China
シランマルチホロー放電プラズマ下流領域におけるクラスタ量の時間変化

小島尚, 都甲将, 鳥越祥宏, 毛屋公孝, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第19回支部大会 2015.12

　More details

Event date： 2015.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本大学 Country：Japan

Time evolution of cluster amount in downstream of SiH4 multi-hollow discharge plasmas
反応性プラズマ中で形成されたナノ粒子によるレーザー散乱光強度のエンベロープ解析：変調周波数依存性

森研人, 伊東鉄平, 添島雅大, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 小林達哉, 稲垣滋

プラズマ・核融合学会九州・沖縄・山口支部第19回支部大会 2015.12

　More details

Event date： 2015.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本大学 Country：Japan

Envelope analysis of laser light scattering intensity from nanoparticles formed in reactive plasmas : Modulation frequency dependence
プラズマスパッタリングによる酸化シリコン中への埋め込みGeナノ粒子の粒径制御

大井手芳徳, 橋本慎史, 田浪荘汰, 徐鉉雄, 内田儀一郎, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第19回支部大会 2015.12

　More details

Event date： 2015.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本大学 Country：Japan

Control of Ge nanoparticles Size Embedded in SiO2 by Plasma Sputtering
O2/N2分圧比制御による高品質(ZnO)x(InN)1-x膜のスパッタリング形成

松村勇希, 松島宏一, 井手智章, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会九州・沖縄・山口支部第19回支部大会 2015.12

　More details

Event date： 2015.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本大学 Country：Japan

Sputter deposition of high quality (ZnO)x(InN)1-X films by controlling O2/N2 partial pressure
Ar+H2+C7H8プラズマCVDで堆積したa-C:H膜へのイオン照射の効果

山木健司, 董ショウ, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第19回支部大会 2015.12

　More details

Event date： 2015.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本大学 Country：Japan

Effects of ion irradiation on a-C:H films deposited by Ar+H2+C7H8 plasma CVD
ダイバータシミュレータ内でのコンパクトドリフトチューブを用いたダスト捕集実験

片山龍, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男, LHD実験グループ

プラズマ・核融合学会九州・沖縄・山口支部第19回支部大会 2015.12

　More details

Event date： 2015.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：熊本大学 Country：Japan

Dust collection experiments using a compact drift tube in a divertor simulator
Analysis of Spatiotemporal Development of Interaction Fluctuation between Nanoparticles and Radicals in Reactive Plasmas International conference

K. Koga, T. Ito, T. Kobayashi, M. Shiratani, S. Inagaki

9th APSPT/28th SPSM 2015.12

　More details

Event date： 2015.12

Language：English Presentation type：Oral presentation (general)

Venue：Nagasaki University Country：Japan
Effects of Substrate Temperature on Film Growth Mode of ZnO-InN Pseudo Binary Alloys International conference

K. Matsushima, T. Ide, D. Yamashita, K. Koga, M. Shiratani, N. Itagaki

9th APSPT/28th SPSM 2015.12

　More details

Event date： 2015.12

Language：English Presentation type：Oral presentation (general)

Venue：Nagasaki University Country：Japan
DC biased compact drift tube for measuring dust transport

R. Katayama, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, S. Masuzaki, N. Ashikawa, M. Tokitani, K. Nishimura, A. Sagara, and the LHD Experimental Group

第16回微粒子プラズマ研究会 2015.12

　More details

Event date： 2015.12

Language：English Presentation type：Oral presentation (general)

Venue：核融合科学研究所 Country：Japan
Arプラズマ中の２つのダスト粒子間のポテンシャル

白谷正治, 添島雅大, 伊東鉄平, 徐鉉雄, 板垣奈穂, 古閑一憲

第25回日本MRS年次大会 2015.12

　More details

Event date： 2015.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan

Inter-grain Potential between Two Dust Grains in Ar Plasma
クラスタ及びSiH3ラジカルのSiH2結合形成への寄与

毛屋公孝, 鳥越祥宏, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第25回日本MRS年次大会 2015.12

　More details

Event date： 2015.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan

Contribution of Clusters and SiH3 Radicals to Si-H2 Bond Formation in a-Si:H Films
Photovoltaic Potentials of Nano-particles Based on Advanced Plasma Processes (Invited) Invited

H. Seo, S. Hashimoto, S. Tanami, N. Itagaki, K. Koga, M. Shiratani

第25回日本MRS年次大会 2015.12

　More details

Event date： 2015.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan
Performance Enhancement of Si Quantum Dotsensitized Solar Cells Based on Improved Charge Transfer

H. Seo, S. Hashimoto, S. Tanami, N. Itagaki, K. Koga, M. Shiratani

第25回日本MRS年次大会 2015.12

　More details

Event date： 2015.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan
基板テクスチャ構造がa-Si:H薄膜中Si-H2結合形成に及ぼす影響

毛屋公孝, 鳥越祥宏, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第25回日本MRS年次大会 2015.12

　More details

Event date： 2015.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan

Effects of Substrate Surface Texture on Si-H2 Bond Configuration in a-Si:H Films
a-Si:H膜中のSi-H2結合生成に対する表面反応の寄与

鳥越祥宏, 毛屋公孝, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第25回日本MRS年次大会 2015.12

　More details

Event date： 2015.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan

Contribution of Surface Reactions to Si-H2 Bond Formation in a-Si:H Thin Films
液中プラズマを用いたAuとPtナノ粒子の簡易作製法

古閑一憲, 天野孝昭, Thapanut Sarinont, 徐鉉雄, 板垣奈穂, 白谷正治, 中津可道, 平田美由紀, 田中昭代

平成27年度応用物理学会九州支部学術講演会 2015.12

　More details

Event date： 2015.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：琉球大学 Country：Japan
Chemical Ordering in ZnO-InN Pseudo Binary Alloys with Tunable Bandgap International conference

K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

2015 MRS Fall Meeting 2015.12

　More details

Event date： 2015.11 - 2015.12

Language：English Presentation type：Oral presentation (general)

Venue：Hynes Convention Center, Boston
プラズマ中のクーロン衝突微粒子間引力

古閑一憲,添島雅大,伊東鉄平,山下大輔,徐鉉雄,板垣奈穂,白谷正治,野口将之,内田誠一

第32回プラズマ・核融合学会年会 2015.11

　More details

Event date： 2015.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
核融合炉内ダスト計測用コンパクトドリフトチューブの試作

片山龍, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 時谷政行, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

第32回プラズマ・核融合学会年会 2015.11

　More details

Event date： 2015.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Catalytic Activation in Polymeric Counter Electrode of Dye-sensitized Solar Cells by Surface Modification International conference

H. Seo, M.-K. Son, S. Hashimoto, N. Itagaki, K. Koga, M. Shiratani

25th International Photovoltaic Science and Engineering Conference (PVSEC-25) 2015.11

　More details

Event date： 2015.11

Language：English Presentation type：Oral presentation (general)

Venue：BEXCO, Busan Country：Korea, Republic of
Enhancement on Photocatalytic and Photovoltaic Properties of Dye-sensitized Solar Cells by S doped TiO2 International conference

H. Seo, S.-H. Nam, J.-H. Boo, N. Itagaki, K. Koga, M. Shiratani

25th International Photovoltaic Science and Engineering Conference (PVSEC-25) 2015.11

　More details

Event date： 2015.11

Language：English Presentation type：Oral presentation (general)

Venue：BEXCO, Busan Country：Korea, Republic of
新しいプラズマプロセス技術を用いた薄膜堆積

古閑一憲, 田浪荘汰, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

接合科学共同利用・共同研究拠点大阪大学接合科学研究所平成２７年度共同研究成果発表会 2015.11

　More details

Event date： 2015.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：大阪大学接合科学研究所 Country：Japan
Effects of Ion Energy on Chemical Bond Configuration in a-C:H Deposited using Ar + H2+ C7H8 Plasma CVD International conference

K. Koga, X. Dong, K. Yamaki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, K. Takenaka ,Y. Setsuhara

37th International Symposium on Dry Process (DPS2015) 2015.11

　More details

Event date： 2015.11

Language：English Presentation type：Oral presentation (general)

Venue：Awaji Yumebutai International Conference Center Country：Japan
Improving of Harvest Period and Crop Yield of Arabidopsis Thaliana L. using Nonthermal Atmospheric Air Plasma International conference

K. Koga, T. Sarinont, T. Amano, H. Seo, N. Itagaki, M. Shiratani

American Vacuum Society 62nd International Symposium and Exhibition (AVS) 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：SanJose, California
Two Dimentional Visualization of Oxidation Effect of Scalable DBD Plasma Irradiation using KI-starch Solution International conference

K. Koga, T. Amano, T. Sarinont, T. Kawasaki, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, Y. Nakatsu, A. Tanaka

American Vacuum Society 62nd International Symposium and Exhibition (AVS) 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：SanJose, California
Deposition rate and etching rate due to neutral radicals and dust particles measured using QCMs together with a dust eliminating filter International conference

R. Katayama, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, M. Tokitani, S. Masuzaki, K. Nishimura, A. Sagara, LHD Experimental Group

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Cross correlation analysis of plasma perturbation in amplitude modulated reactive dusty plasmas International conference

T. Ito, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani, T. Kobayashi, S. Inagaki

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Cluster Incorporation into A-Si:H Films Deposited Using H 2 +SiH 4 Discharge Plasmas International conference

S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Attraction during binary collision of fine particles in Ar plasma International conference

M. Soejima, T. Ito, D. Yamashita, N. Itagaki, H. Seo, K. Koga, M. Shiratani

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Synthesis of indium-containing nanoparticles using plasmas in water to study their effects on living body International conference

T. Amano, K. Koga, T. Sarinont, H. Seo, N. Itagaki, M. Shiratani, S. Kitazaki, M. Hirata, Y. Nakatsu, A. Tanaka

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Simple Evaluation Method of Atmospheric Plasma Irradiation Dose using pH of Water International conference

K. Koga, T. Sarinont, T. Amano, H. Seo, N. Itagaki, Y. Nakatsu, A. Tanaka, M. Shiratani

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Raman spectroscopy of PIN hydrogenated amorphous silicon solar cells International conference

K. Keya, Y. Torigoe, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Laser trapped single fine particle as a probe of plasma parameters International conference

D. Yamashita, M. Soejima, T. Ito, H. Seo, N. Itagaki, K. Koga, M. Shiratani

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Effects of N2 dilution on fabrication of Ge nanoparticles by rf sputtering International conference

S. Hashimoto, S. Tanami, H. Seo, G. Uchida, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Effects of electrode structure on characteristics of multi-hollow discharges International conference

Y. Torigoe, K. Keya, S. Toko, H. Seo, N. Itagaki, K. Koga, M. Shiratani

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Measurement of absolute density of N atom in sputtering plasma for epitaxial growth ZnO films via nitrogen mediated crystallization International conference

T. Ide, K. Matsushima, T. Takasaki, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Substrate temperature dependence of Au-induced crystalline Ge film formation using sputtering deposition International conference

S. Tanami, D. Ichida, D. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Raman Spectroscopy of a -C:H Films Deposited Using Ar + H 2 + C 7 H 8 Plasma CVD International conference

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Measurements of nitrogen atom density in N2/Ar sputtering plasma for fabrication of high-mobility amorphous In2O3:Sn films International conference

T. Takasaki, T. Ide, K. Matsushima, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Measurements of absolute densities of nitrogen and oxygen atoms in sputtering plasma for fabrication of ZnInON films International conference

K. Matsushima, T. Ide, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

ICRP9/GEC68/SPP33 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Hawaii Convention Center
Novel polymer counter electrode of dye-sensitized solar cells International conference

H. Seo, M.-K. Son, S. Hashimoto, N. Itagaki, K. Koga, M. Shiratani

66th Annual Meeting of the International Society of Electrochemistry 2015.10

　More details

Event date： 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Taipei Country：Taiwan, Province of China
In-situ laser Raman spectroscopy of an optically trapped fine particle International conference

K. Koga, M. Soejima, K. Tomita, T. Ito, H. Seo, N. Itagaki, M. Shiratani

17th International Symposium on Laser-Aided Plasma Diagnostics (LAPD17) 2015.9

　More details

Event date： 2015.9 - 2015.10

Language：English Presentation type：Oral presentation (general)

Venue：Chateraise Gateaux Kingdom Sapporo Country：Japan
RFスパッタリングによるGeナノ粒子作製への窒素希釈の効果

橋本慎史, 田浪荘汰, 徐鉉雄, 内田儀一郎, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
反応性プラズマ中ナノ粒子量揺らぎのクロスコリレーション解析

伊東鉄平, 添島雅大, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 小林達哉, 稲垣滋

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
窒素添加結晶化法を用いたZnO膜作製におけるN2/Arプラズマ中のN原子絶対密度計測

井手智章, 松島宏一, 高崎俊行, 竹田圭吾, 堀勝, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
成膜領域へのマルチホロー放電プラズマの拡散に対する電極構造の影響

鳥越祥宏, 都甲将, 毛屋公孝, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
水素前方散乱分析法とフーリエ変換赤外分光法によるアモルファス炭素膜中水素濃度の比較分析

Xiao Dong, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
高移動度アモルファスIn2O3:Sn薄膜作製におけるN2/Arスパッタリングプラズマ中の窒素原子絶対密度計測

高崎俊行, 井手智章, 松島宏一, 竹田圭吾, 堀勝, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
ラマン分光法を用いたa-Si:H　PIN太陽電池のP、I層およびPI界面の評価

毛屋公孝, 鳥越祥宏, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
マルチホロー放電プラズマCVD法におけるシランガス流速のクラスターに対するラジカル損失への影響

都甲将, 鳥越祥宏, 毛屋公孝, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
プラズマ中微粒子運動の2次元顕微解析

添島雅大, 伊東鉄平, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 野口将之, 内田誠一

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
プラズマを用いた低温高速層交換結晶成長に対する金触媒膜厚の効果

田浪荘汰, 橋本慎史, 内田儀一郎, 徐鉉雄, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
プラズマ・壁相互作用により発生したダスト堆積とプラズマ発光との相関

片山龍, 古閑一憲, 山下大輔, Hyunwoong Seo, 板垣奈穂, 白谷正治, 芦川直子, 時谷政行, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
ZnInON膜作製時におけるAr/O2/N2プラズマ中のO原子及びN原子の絶対密度計測

松島宏一, 井手智章, 高崎俊行, 竹田圭吾, 堀勝, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

平成27年度（第68回）電気・情報関係学会九州支部連合大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡大学 Country：Japan
Hydrogen Concentration In Extremely Thin A-Si:H Fimls Deposited By Multi-Hollow Discharge Plasma CVD Method International conference

Y. Torigoe, S. Toko, K. Keya, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015) 2015.9

　More details

Event date： 2015.9

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Gas Flow Rate Ratio Dependence Of Properties Of Carbon Films Deposited Using Ar + H2+ C7H8 Plasma CVD International conference

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015) 2015.9

　More details

Event date： 2015.9

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Requirements Of Buffer Layer For Heteroepitaxy Of ZnO On Lattice-Mismatched Substrate By Sputtering International conference

M. Shiratani, T. Ide, K. Matsushima, T. Takasaki, H. Seo, K. Koga, N. Itagaki

The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015) 2015.9

　More details

Event date： 2015.9

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Performance Enhancement Of Organic/inorganic Hybrid Solar Cell By The Surface Modification At Si And Polymer Junction International conference

H. Seo, S. Hashimoto, S. Tanami, N. Itagaki, K. Koga, M. Shiratani

The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015) 2015.9

　More details

Event date： 2015.9

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Catalytic Enhancement On Polymeric Counter Electrode Of Si Quantum Dot-sensitized Solar Cells International conference

H. Seo, S. Hashimoto, S. Tanami, N. Itagaki, K. Koga, M. Shiratani

The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015) 2015.9

　More details

Event date： 2015.9

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Sputter Deposition Of Amorphous In2O3:Sn Films With High Mobility By Utilizing Nitrogen Mediated Amorphization Method International conference

T. Takasaki, T. Ide, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015) 2015.9

　More details

Event date： 2015.9

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
アルゴンプラズマ中微粒子運動の画像解析によるプラズマパラメータ評価

古閑一憲, 添島雅大, 徐鉉雄, 板垣奈穂, 白谷正治, 内田誠一

日本物理学会　2015年秋季大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：関西大学 Country：Japan
反応性プラズマ中ナノ粒子とラジカルの非線形結合成分の時空間解析

古閑一憲, 伊東鉄平, 徐鉉雄, 板垣奈穂, 白谷正治

日本物理学会　2015年秋季大会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：関西大学 Country：Japan
マルチホロー放電プラズマCVDにおける水素希釈のa-Si:H膜中クラスター混入量への影響

都甲将, 鳥越祥宏, 毛屋公孝, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第76回応用物理学会秋季学術講演会 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋国際会議場 Country：Japan
Effects of Cluster Eliminating Filter on Extremely Thin a-Si:H Films Deposited by SiH4 Multi-Hollow Discharges

Y. Torigoe, S. Toko, K. Keya, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

第76回応用物理学会秋季学術講演会 2015.9

　More details

Event date： 2015.9

Language：English Presentation type：Oral presentation (general)

Venue：名古屋国際会議場 Country：Japan
AM変調を用いた反応性プラズマ中のナノ粒子揺らぎの時空間解析

森研人, 伊東鉄平, 古閑一憲, 添島雅大, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治,小林達哉, 稲垣滋

第9回プラズマエレクトロニクスインキュベーションホール 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
膜中クラスター体積分率の水素ガス流量依存性

小島尚, 都甲将, 鳥越祥宏, 毛屋公孝, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第9回プラズマエレクトロニクスインキュベーションホール 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
窒素媒介結晶化のスパッタ法によるZnO膜のエピタキシャル成長の窒素流量の影響

松村勇希, 井手智章, 松島宏一, 山下大輔, Hyunwoong Seo, 古閑一憲, 白谷正治, 板垣奈穂

第9回プラズマエレクトロニクスインキュベーションホール 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
水素原子源付プラズマCVD法によるカーボンフィルムの堆積速度および膜質の制御

山木健司, 董ショウ, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 節原裕一, 竹中弘祐

第9回プラズマエレクトロニクスインキュベーションホール 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
RFスパッタリング法を用いて作製したGeナノ粒子膜の増感型量子ドット太陽電池への応用

大井手芳徳, 橋本慎史, 徐鉉雄, 内田儀一郎, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第9回プラズマエレクトロニクスインキュベーションホール 2015.9

　More details

Event date： 2015.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
体内動態観察を目的とした水中プラズマによるインジウムナノ粒子の作製と投与

天野孝昭, 古閑一憲, 板垣奈穂, 白谷正治, 田中昭代, 平田美由紀

新学術領域研究「プラズマ医療科学の創成」＋「プラズマとナノ界面の相互作用に関する学術基盤の創成」＋「統合的神経機能の制御を標的とした糖鎖の作動原理解明」合同公開シンポジウム 2015.8

　More details

Event date： 2015.8

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋大学ESホール Country：Japan
Bispectrum analysis of fluctuation of nanoparticle amount in amplitude modulated capacitively-coupled discharge plasmas International conference

M. Shiratani, T. Ito, K. Koga, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, T. Kobayashi, S. Inagaki

The XXXII edition of the International Conference on Phenomena in Ionized Gases (ICPIG2015) 2015.7

　More details

Event date： 2015.7

Language：English Presentation type：Oral presentation (general)

Venue：Iasi Country：Romania
Position fluctuation of a fine particle optically trapped in Ar plasma International conference

M. Shiratani, M. Soejima, T. Ito, D. Yamashita, N. Itagaki, H. Seo, K. Koga

The XXXII edition of the International Conference on Phenomena in Ionized Gases (ICPIG2015) 2015.7

　More details

Event date： 2015.7

Language：English Presentation type：Oral presentation (general)

Venue：Iasi Country：Romania
Linear and Nonlinear Correlation between Deposition Rate and SiH Emission Intensity in SiH4 Multi-hollow Discharge Plasmas International conference

S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The XXXII edition of the International Conference on Phenomena in Ionized Gases (ICPIG2015) 2015.7

　More details

Event date： 2015.7

Language：English Presentation type：Oral presentation (general)

Venue：Iasi Country：Romania
Contribution of Clusters to SiH2 Bonds in a-Si:H Films International conference

S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The XXXII edition of the International Conference on Phenomena in Ionized Gases (ICPIG2015) 2015.7

　More details

Event date： 2015.7

Language：English Presentation type：Oral presentation (general)

Venue：Iasi Country：Romania
Third Generation Photovoltaics (Invited) Invited International conference

M. Shiratani, K. Koga, H. Seo, N. Itagaki

The 1st Asian Workshop on Advanced Plasma Technology and Application 2015.7

　More details

Event date： 2015.7

Language：English Presentation type：Oral presentation (general)

Venue：Ming Chi University of Technology Country：Taiwan, Province of China
Second and Third Generation Photovoltaics (Invited) Invited International conference

M. Shiratani, K. Koga, H. Seo, N. Itagaki

2015 International Forum on Functional Materials (IFFM2015) 2015.6

　More details

Event date： 2015.6

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Site-selective Coating of Carbon Protective Layer on Sub-micron Trenches Using Plasma CVD International conference

M. Shiratani, X. Dong, K. Koga, N. Itagaki, H. Seo, G. Uchida

42nd International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2015) 2015.4

　More details

Event date： 2015.4

Language：English Presentation type：Oral presentation (general)

Venue：Town & Country Resort Hotel, San Diego
Enhancement on the Photovoltaic Properties of Dye-Sensitized Solar Cells with Catalytically Activated Polymeric Counter Electrode International conference

H. Seo, S. Hashimoto, N. Itagaki, K. Koga, M. Shiratani

2015 MRS Spring Meeting 2015.4

　More details

Event date： 2015.4

Language：English Presentation type：Oral presentation (general)

Venue：San Francisco, California
Crystalline Ge film deposition between Au catalyst film and quartz glass substrate using magnetron sputtering International conference

M. Shiratani, D. Ichida, H. Seo, N. Itagaki, K. Koga

2015 MRS Spring Meeting 2015.4

　More details

Event date： 2015.4

Language：English Presentation type：Oral presentation (general)

Venue：San Francisco, California
Effects of Gas Flow Rate on Deposition Rate and Amount of Si Clusters Incorporated into a-Si:H Films International conference

S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterial/8th International Conference on Plasma Nanotechnology and Science (ISPlasma2015/IC-PLANTS2015) 2015.3

　More details

Event date： 2015.3

Language：English Presentation type：Oral presentation (general)

Venue：Nagoya University Country：Japan
Fabrication of ZnInON-based multi-quantum well solar cells by RF magnetron sputtering International conference

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterial/8th International Conference on Plasma Nanotechnology and Science (ISPlasma2015/IC-PLANTS2015) 2015.3

　More details

Event date： 2015.3

Language：English Presentation type：Oral presentation (general)

Venue：Nagoya University Country：Japan
Effects of ion irradiation on mass density of carbon films deposited by Hassisted plasma CVD International conference

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterial/8th International Conference on Plasma Nanotechnology and Science (ISPlasma2015/IC-PLANTS2015) 2015.3

　More details

Event date： 2015.3

Language：English Presentation type：Oral presentation (general)

Venue：Nagoya University Country：Japan
非平衡プラズマスパッタリングによる高速低温層交換結晶成長

古閑一憲, 市田大樹, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

日本物理学会第70回年次大会 2015.3

　More details

Event date： 2015.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan
スパッタを用いた低温高速層交換Ge結晶成長に対する基板温度の効果

古閑一憲, 市田大樹, 橋本慎史, 徐鉉雄, 山下大輔, 板垣奈穂, 白谷正治

第62回応用物理学会春季学術講演会 2015.3

　More details

Event date： 2015.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東海大学 Country：Japan
窒素添加結晶化法によるc面サファイア基板上へのZnO膜の作製：歪み緩和におけるバッファー層結晶粒密度の影響

井手智章, 松島宏一, 清水僚太, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

第62回応用物理学会春季学術講演会 2015.3

　More details

Event date： 2015.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東海大学 Country：Japan
ワイドバンドギャップ半導体ZnInONをi層に用いたpin太陽電池の作製

松島宏一, 清水僚太, 井手智章, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

第62回応用物理学会春季学術講演会 2015.3

　More details

Event date： 2015.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東海大学 Country：Japan
水素化アモルファスシリコン薄膜中Si-H2結合生成に対するクラスタ混入とラジカル表面反応の寄与

古閑一憲, 都甲将, 鳥越祥宏, 毛屋公孝, 徐鉉雄, 板垣奈穂, 白谷正治

第62回応用物理学会春季学術講演会 2015.3

　More details

Event date： 2015.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東海大学 Country：Japan
Photovoltaic application of Si nano-particles fabricated by underwater discharge (Invited) Invited International conference

H. Seo, S. Hashimoto, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 20th Workshop on Advanced Plasma Processes and Diagnostics & The 7th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials 2015.1

　More details

Event date： 2015.1

Language：English Presentation type：Oral presentation (general)

Venue：Hokkaido University Country：Japan
Realization of highly stable a‐Si:H film by using cluster eliminating filter International conference

Y. Torigoe, S. Toko, K. Keya, D. Yamashita, H. Seo, N. Itagaki, K. Koga and M. Shiratani

The 75th IUVSTA Workshop on Sheath Phenomena in Plasma Processing of Advanced Materials 2015.1

　More details

Event date： 2015.1

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Raj, Cerkljena Gorenjskem Country：Slovenia
Temporal development of nonlinear coupling between radicals and nanoparticles in reactive plasmas (Invited) Invited International conference

K. Koga, T. Ito, H. Seo, N. Itagaki, and M. Shiratani

The 75th IUVSTA Workshop on Sheath Phenomena in Plasma Processing of Advanced Materials 2015.1

　More details

Event date： 2015.1

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Raj, Cerkljena Gorenjskem Country：Slovenia
Cluster suppressed deposition of a-Si:H films by employing non-linear phenomena in reactive plasmas (Invited) Invited International conference

K. Koga, S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, M. Shiratani

2015 Japan-Korea Joint Symposium on Advanced Solar Cells 2015.1

　More details

Event date： 2015.1

Language：English Presentation type：Oral presentation (general)

Venue：TKP HAKATAEKIMAE Meeting Room, Fukuoka Country：Japan
Gas Residence Time Effects of Cluster Incorporation into a-Si:H Films International conference

S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani

2015 Japan-Korea Joint Symposium on Advanced Solar Cells 2015.1

　More details

Event date： 2015.1

Language：English Presentation type：Oral presentation (general)

Venue：TKP HAKATAEKIMAE Meeting Room, Fukuoka Country：Japan
Fabrication of strained-induced ZnInON-based multi-quantum well solar cells by RF magnetron sputtering International conference

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

2015 Japan-Korea Joint Symposium on Advanced Solar Cells 2015.1

　More details

Event date： 2015.1

Language：English Presentation type：Oral presentation (general)

Venue：TKP HAKATAEKIMAE Meeting Room, Fukuoka Country：Japan
Fabrication of Si nanoparticles using plasmas in liquid for solar cell applications International conference

S. Hashimoto, D. Ichida, H. Seo, G. Uchida, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

2015 Japan-Korea Joint Symposium on Advanced Solar Cells 2015.1

　More details

Event date： 2015.1

Language：English Presentation type：Oral presentation (general)

Venue：TKP HAKATAEKIMAE Meeting Room, Fukuoka Country：Japan
Effects of hydrogen dilution on stability of a-Si:H films in silane hydrogen mixture multi-hollow discharge plasmas International conference

Y. Torigoe, S. Toko, K. Keya, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

2015 Japan-Korea Joint Symposium on Advanced Solar Cells 2015.1

　More details

Event date： 2015.1

Language：English Presentation type：Oral presentation (general)

Venue：TKP HAKATAEKIMAE Meeting Room, Fukuoka Country：Japan
プラズマCVDで作製されたa-Si:H膜中Si-H2結合形成に対するクラスター混入と表面反応の寄与

都甲将, 鳥越祥宏, 毛屋公孝, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第18回支部大会 2014.12

　More details

Event date： 2014.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
マルチホロー放電プラズマCVD法で作製したナノ結晶シリコン薄膜を用いた光学バンドギャップ制御

金光善徳, 古閑一憲, 山下大輔, 鎌滝普礼, 徐鉉雄, 板垣奈穂, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第18回支部大会 2014.12

　More details

Event date： 2014.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
プラズマ・壁相互作用により発生したダストの容器壁堆積のその場検出

立石瑞樹, 片山龍, 古閑一憲, 山下大輔, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 時谷政行増崎貴, 西村清彦, 相良明男, LHD実験グループ

プラズマ・核融合学会九州・沖縄・山口支部第18回支部大会 2014.12

　More details

Event date： 2014.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
シランマルチホロー放電の発光強度の圧力依存性

鳥越祥宏, 都甲将, 毛屋公孝, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第18回支部大会 2014.12

　More details

Event date： 2014.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
RFマグネトロンスパッタリングと金薄膜触媒を用いた低温高速層交換Ge結晶成長

市田大樹, 橋本慎史, 内田儀一郎, 徐鉉雄, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第18回支部大会 2014.12

　More details

Event date： 2014.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
LHD内バイアス基板への長期ダスト堆積実験

片山龍, 立石瑞樹, 古閑一憲, 山下大輔, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 時谷政行, 増崎貴, 西村清彦相良明男, LHD実験グループ

プラズマ・核融合学会九州・沖縄・山口支部第18回支部大会 2014.12

　More details

Event date： 2014.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
プラズマナノプロセシングにおける揺らぎ抑制のための戦略

白谷正治, 古閑一憲, 徐鉉雄, 板垣奈穂

第24回日本MRS年次大会 2014.12

　More details

Event date： 2014.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan

Strategy for Suppressing Fluctuations of Plasma Nano-processing
マルチホロー放電プラズマCVD法で堆積したSiナノ粒子含有膜の光学バンドギャップ制御

金光善徳, 内田儀一郎, 市田大樹, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第24回日本MRS年次大会 2014.12

　More details

Event date： 2014.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan

Optical Bandgap Energy Control of Nano-crystalline Si Films by using a Multi-hollow Discharge Plasma CVD Method
Contributions of ion irradiation to the characteristics of a-C:H films deposited by H-assisted plasma CVD method

董ショウ, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

平成26年度応用物理学会九州支部学術講演会 2014.12

　More details

Event date： 2014.12

Language：English Presentation type：Oral presentation (general)

Venue：大分大学 Country：Japan
窒素添加スパッタリング法による高移動度アモルファスIn2O3:Sn 膜の作製

高崎俊行, 中西貴彦, 山下大輔, 徐鉱雄, 古閑一憲, 白谷正治, 板垣奈穂

平成26年度応用物理学会九州支部学術講演会 2014.12

　More details

Event date： 2014.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大分大学 Country：Japan
マルチホロー放電の上流領域に輸送されたクラスタ量の水素希釈の効果

毛屋公孝, 鳥越祥宏, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

平成26年度応用物理学会九州支部学術講演会 2014.12

　More details

Event date： 2014.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大分大学 Country：Japan
プラズマ中に光捕捉した微粒子の挙動解析

添島雅大, 伊東鉄平, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

平成26年度応用物理学会九州支部学術講演会 2014.12

　More details

Event date： 2014.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大分大学 Country：Japan
Evaluaion of Si-H2 bond formation of a-Si:H film using cluster eliminating filter

鳥越祥宏, 都甲将, 毛屋公孝, 山下大輔, 徐鉉雄, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

平成26年度応用物理学会九州支部学術講演会 2014.12

　More details

Event date： 2014.12

Language：English Presentation type：Oral presentation (general)

Venue：大分大学 Country：Japan
Performance Dependence of Perovskite Solar Cells on the Ratio of Lead Iodide and Methylammonium Iodide International conference

H. Seo, S. Hashimoto, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

2014 MRS Fall Meeting 2014.12

　More details

Event date： 2014.11 - 2014.12

Language：English Presentation type：Oral presentation (general)

Venue：Hynes Convention Center, Boston
Morphology Control of Buffer Layers for Growth of Single-Crystalline ZnO Films on Lattice Mismatched Substrates International conference

T. Ide, K. Matsushima, R. Shimizu, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

2014 MRS Fall Meeting 2014.12

　More details

Event date： 2014.11 - 2014.12

Language：English Presentation type：Oral presentation (general)

Venue：Hynes Convention Center, Boston
Fabrication of Strained Multi-Quantum Well Solar Cells Utilizing ZnInON International conference

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

2014 MRS Fall Meeting 2014.12

　More details

Event date： 2014.11 - 2014.12

Language：English Presentation type：Oral presentation (general)

Venue：Hynes Convention Center, Boston
Optical Analysis on Perovskite Films According to CH3NH3I and PbI2 Concentration International conference

H. Seo, S. Hashimoto, G. Uchida, N. Itagaki, K. Koga and M. Shiratani

6th World Conferenceon Photovoltaic Energy Conversion 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto International Conference Center Country：Japan
Effects of Gas Residence Time on Amount of Si Clusters Incorporated into a-Si:H Films International conference

S. Toko, Y. Torigoe, Y. Kanemitu, H. Seo, N. Itagaki, K. Koga and M. Shiratani

6th World Conferenceon Photovoltaic Energy Conversion 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto International Conference Center Country：Japan
Analysis of coupling between nanoparticles and radicals using perturbation of radical density in reactive plasmas International conference

K. Koga, T. Ito, H. Seo, N. Itagaki, M. Shiratani

Plasma Conference 2014 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Toki Messe, Niigata Country：Japan

Analysis of coupling between nanoparticles and radicals using pertubataion of radical density in reactive plasmas
Fabrication of crystalline Ge films using RF sputtering and metal catalyst International conference

D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Plasma Conference 2014 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Toki Messe, Niigata Country：Japan

Fabrication of crystal Ge films using RF sputtering and metal catalyst
In-situ mass measurement of dust particles generated due to interaction between H2 plasma and graphite wall International conference

M. Tateishi, R. Katayama, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

Plasma Conference 2014 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Toki Messe, Niigata Country：Japan

In-situ mass measurement of dust particles generated due to interaction between H2 plasma and graphite wall
Effects of dust deposition on optical characteristics of substrates International conference

R. Katayama, M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

Plasma Conference 2014 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Toki Messe, Niigata Country：Japan

Effects of dust deposition on optical characteristics of substrates
Fabrication of Ge films for applying solar cells using RF magnetron sputtering and gold film catalyst International conference

D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Global Photovoltaic Conference 2014 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：BEXCO Convention center, Busan Country：Korea, Republic of
Quantum characterization of Si nano-particles fabricated by multi-hollow discharge plasma chemical vapor deposition International conference

H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Global Photovoltaic Conference 2014 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：BEXCO Convention center, Busan Country：Korea, Republic of
Improvement on charge transportation of Si quantum dot-sensitized solar cell using vanadium doped TiO2 International conference

H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, S. H. Nam, J. H. Boo

Global Photovoltaic Conference 2014 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：BEXCO Convention center, Busan Country：Korea, Republic of
Fabrication of Si nanoparticles using plasmas in water for organic/inorganic hybrid solar cells International conference

S. Hashimoto, D. Ichida, H. Seo, G. Uchida, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

Global Photovoltaic Conference 2014 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：BEXCO Convention center, Busan Country：Korea, Republic of
Effects of amplitude modulated VHF discharge on coupling between plasmas and nanoparticles International conference

K. Koga, T. Ito, K. Kamataki, H. Seo, N. Itagaki, and M. Shiratani

24th International Toki Conference 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Ceratopia Toki, Toki-city, Gifu Country：Japan
Novel method of Ge crystalline thin film deposition on SiO2 by sputtering International conference

M. Shiratani, D. Ichida, H. Seo, N. Itagaki, K. Koga

67th Annual Gaseous Electronics Conference 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Raleigh Convention Center, North Carolina
Modulation frequency dependence of bispectrum of laser light scattering intensity from nanoparticles formed in reactive plasmas International conference

T. Ito, D. Yamashita, H. Seo, K. KamatakiI, N. Itagaki, K. Koga, M. Shiratani

67th Annual Gaseous Electronics Conference 2014.11

　More details

Event date： 2014.11

Language：English Presentation type：Oral presentation (general)

Venue：Raleigh Convention Center, North Carolina
Effects of Dust Deposition on Optical Characteristics of Mirrors Installed on First Wall in LHD International conference

R. Katayama, M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, LHD Experimental Group

15th Workshop on Fine Particle Plasmas 2014.10

　More details

Event date： 2014.10

Language：English Presentation type：Oral presentation (general)

Venue：National Institute for Fusion Science, Toki Country：Japan
Development of an in-situ Detection Method of Dust Particles Deposited on Vessel Wall Using Quartz Crystal Microbalances International conference

M. Tateishi, R. Katayama, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, LHD Experimental Group

15th Workshop on Fine Particle Plasmas 2014.10

　More details

Event date： 2014.10

Language：English Presentation type：Oral presentation (general)

Venue：National Institute for Fusion Science, Toki Country：Japan
Size-controlled Ge Nanoparticle Synthesis and Their Application to Quantum-dot Solar Cells International conference

G. Uchida, D. Ichida, H. Seo, S. Hashimoto, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

15th Workshop on Fine Particle Plasmas 2014.10

　More details

Event date： 2014.10

Language：English Presentation type：Oral presentation (general)

Venue：National Institute for Fusion Science, Toki Country：Japan
Single Fine Particle Trapped in Ar Plasma by Optical Tweezers (Invited) Invited International conference

M. Shiratani, T. Ito, M. Soejima, K. Koga, D. Yamashita, K. Kamataki, N. Itagaki

15th Workshop on Fine Particle Plasmas 2014.10

　More details

Event date： 2014.10

Language：English Presentation type：Oral presentation (general)

Venue：National Institute for Fusion Science, Toki Country：Japan
S i ナノ粒子を用いたハイブリッド型太陽電池の研究

橋本慎史, 市田大樹, 徐鉉雄, 内田儀一郎, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第6回薄膜太陽電池セミナー2014 2014.10

　More details

Event date： 2014.10

Language：Japanese Presentation type：Oral presentation (general)

Venue：広島大学 Country：Japan
色素増感太陽電池のポリマー触媒の改善

徐鉉雄, 橋本慎史, 市田大樹, 板垣奈穂, 古閑一憲, 白谷正治

第6回薄膜太陽電池セミナー2014 2014.10

　More details

Event date： 2014.10

Language：Japanese Presentation type：Oral presentation (general)

Venue：広島大学 Country：Japan
マルチホロー放電プラズマで作製したa-Si:H膜中クラスター量の水素-シラン混合比依存性

毛屋公孝, 都甲将, 鳥越祥宏, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第6回薄膜太陽電池セミナー2014 2014.10

　More details

Event date： 2014.10

Language：Japanese Presentation type：Oral presentation (general)

Venue：広島大学 Country：Japan
Si量子ドットを用いたハイブリッド型太陽電池の研究

橋本慎史, 市田大樹, 徐鉉雄, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

平成26年度（第67回）電気・情報関係学会九州支部連合大会 2014.9

　More details

Event date： 2014.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：鹿児島大学 Country：Japan
マルチホロー放電プラズマCVDによるSi量子ドットの作製と新太陽電池への応用研究

徐鉉雄, 橋本慎史, 板垣奈穂, 古閑一憲, 白谷正治

平成26年度（第67回）電気・情報関係学会九州支部連合大会 2014.9

　More details

Event date： 2014.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：鹿児島大学 Country：Japan
酸窒化物半導体ZnInONを用いた量子井戸型太陽電池の作製

松島宏一, 清水僚太, 井手智章, 山下大輔, 鎌滝晋礼, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

第75回応用物理学会秋季学術講演会 2014.9

　More details

Event date： 2014.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：北海道大学 Country：Japan
Effects of hydrogen dilution to nanoparticle formation in silane hydrogen mixture multi-hollow discharge plasmas International conference

Y. Torigoe, S. Toko, W. Chen, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, and M. Shiratani

12th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 27th Symposium on Plasma Science for Materials (SPSM) 2014.9

　More details

Event date： 2014.8 - 2014.9

Language：English Presentation type：Oral presentation (general)

Venue：Adelaid Country：Australia
Plasma CVD nanostructured films for energy applications (Invited) Invited International conference

M. Shiratani, H. Seo, N. Itagaki, G. Uchida, K. Koga

12th Asia Pacific Conference on Plasma Science and Technology (APCPST) and 27th Symposium on Plasma Science for Materials (SPSM) 2014.9

　More details

Event date： 2014.8 - 2014.9

Language：English Presentation type：Oral presentation (general)

Venue：Adelaid Country：Australia
Fabrication of tandem dye-sensitized solar cell based on mesh-type of counter electrode International conference

H. Seo, S. Hashimoto, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

65th Annual Meeting of the International Society of Electrochemistry 2014.9

　More details

Event date： 2014.8 - 2014.9

Language：English Presentation type：Oral presentation (general)

Venue：Ubiquitous Electrochemistry, Lausanne Country：Switzerland
Counter electrode based on conductive polymer for cost-effective dye-sensitized solar cells International conference

H. Seo, S. Hashimoto, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
RF Magnetron sputtering of low-resistive ZnO:Ga films with buffer layers fabricated via nitrogen mediated crystallization International conference

T. Nakanishi, I. Suhariadi, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Epitaxial growth of sputter-deposited ZnO films via nitrogen mediated crystallization: effects of nitrogen flow rate International conference

T. Ide, K. Matsushima, R. Shimizu, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Epitaxial growth of In-rich ZnInON films by RF magnetron sputtering International conference

K. Matsuhima, R. Shimizu, T. Ide, D. Yamashita, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Epitaxial growth of a novel widegap semiconductor ZnGaON by magnetron sputtering International conference

R. Shimizu, K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Synthesis of In nanoparticles using RF sputtering for evaluating nanoparticle kinetics in living body International conference

T. Amano, K. Koga, T. Sarinont, N. Itagaki, M. Shiratani, N. Hayashi, Y. Nakatsu, T. Tsuzuki, M. Hirata, A. Tanaka

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Si QD/PEDOT:PSS Hybrid Solar Cells Using Si Nanoparticles Fabricated by Multi-Hollow Plasma CVD International conference

S. Hashimoto, D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Real Time Deposition Measurement of Dust Particles Generated by Plasma-Wall Interaction International conference

M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Hydrogen Concentration Associated with Si-H2 Bonds in Films Deposited by High Frequency Multi-Hollow Discharge Plasma CVD Method International conference

Y. Torigoe, Y. Hashimoto, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Effects of Substrate Temperature on Defect Density of Ge Nanoparticle Films International conference

D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Stability of nanoparticle growth processes in reactive plasmas International conference

M. Shiratani, H. Seo, K. Koga, N. Itagaki

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Spatiotemporal Analysis of Nanoparticle Growth in Amplitude Modulated Reactive Plasmas for Understanding Interactions between Plasmas and Nanomaterials (Invited) Invited International conference

K. Koga, Y. Morita, T. Ito, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Raman spectroscopy of optically trapped single fine particle in plasmas International conference

T. Ito, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Hysteresis of Cluster Amount in Multi-Hollow Discharge Plasma CVD Method International conference

S. Toko, Y. Hasahimoto, Y. Kanemitsu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

15th IUMRS-International Conference in Asia 2014.8

　More details

Event date： 2014.8

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka University Country：Japan
Photovoltaic Application of Polymer: Dye-sensitized Solar Cell and Organic/inorganic Hybrid Solar Cell (Invited) Invited International conference

H. Seo, S. Hashimoto, D. Ichida, G. Uchida, N. Itagaki, K. Koga, and M. Shiratani

International Conference on Microelectronics and Plasma Technology 2014 (ICMAP2014) 2014.7

　More details

Event date： 2014.7

Language：English Presentation type：Oral presentation (general)

Venue：Gunsan Saemangeum Convention Center, Gunsan Country：Korea, Republic of
Suppression of Cluster Incorporation into a-Si:H Films Using a Cluster Eliminating Filter International conference

Y. Torigoe, C. Weiting, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, and M. Shiratani

International Conference on Microelectronics and Plasma Technology 2014 (ICMAP2014) 2014.7

　More details

Event date： 2014.7

Language：English Presentation type：Oral presentation (general)

Venue：Gunsan Saemangeum Convention Center, Gunsan Country：Korea, Republic of
Photovoltaic Properties of Organic/Inorganic Hybrid Solar Cells with Improved Electrode International conference

H. Seo, S. Hashimoto, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

2014 International Symposium on Green Manufacturing and Applications (ISGMA 2014) 2014.6

　More details

Event date： 2014.6

Language：English Presentation type：Oral presentation (general)

Venue：Paradise Hotel, Busan Country：Korea, Republic of
プラズマ CVD で作成したGe半導体薄膜の光電特性

市田大樹, 橋本慎史, 内田儀一郎, 徐鉉雄, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

平成26年度九州表面・真空研究会2014（兼第19回九州薄膜表面研究会） 2014.6

　More details

Event date： 2014.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：福岡教育大学 Country：Japan
Real time mass measurement of dust particles deposited on vessel wall using quartz crystal microbalances in a divertor simulator International conference

K. Koga, M. Tateishi, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

21th International Conference on Plasma Surface Interactions (PSI2014) 2014.5

　More details

Event date： 2014.5

Language：English Presentation type：Oral presentation (general)

Venue：Ishikawa Ongakudo, Kanazawa Country：Japan
Dust collection with dc-biased substrates in large helical device International conference

M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

21th International Conference on Plasma Surface Interactions (PSI2014) 2014.5

　More details

Event date： 2014.5

Language：English Presentation type：Oral presentation (general)

Venue：Ishikawa Ongakudo, Kanazawa Country：Japan
In-situ Measurements of Volume Fraction of cDusters in Films During Plasma CVD International conference

M. Shiratani, S. Toko, K. Koga, N. Itagaki, H. Seo

International Conference on Metallurgical Coatings and Thin Films(ICMCTF 2014) 2014.5

　More details

Event date： 2014.4 - 2014.5

Language：English Presentation type：Oral presentation (general)

Venue：Town & Country Resort Hotel, San Diego
Si/SiC coreshell nanoparticle composite anode for Li ion batteries International conference

M. Shiratani, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga

2014 MRS Spring Meeting 2014.4

　More details

Event date： 2014.4

Language：English Presentation type：Oral presentation (general)

Venue：San Francisco, California
ナノ粒子含有振幅変調放電プラズマ中のAr準安定原子密度

白谷正治, 古閑一憲, 森田康彦, 伊東鉄平, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂

日本物理学会　第69回年次大会 2014.3

　More details

Event date： 2014.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：東海大学 Country：Japan
RFスパッタリングによるInナノ粒子の作製とそのラット体内の動態

天野孝昭, 古閑一憲, Sarinont Thapanut, 板垣奈穂, 白谷正治, 林信哉, 中津可道, 續輝久, 平田美由紀, 田中昭代

2014年第61回応用物理学会春季学術講演会 2014.3

　More details

Event date： 2014.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学 Country：Japan
反応性プラズマにおけるナノ粒子成長のバイスペクトル解析

森田康彦, 伊東鉄平, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 古閑一憲 , 白谷正治

2014年第61回応用物理学会春季学術講演会 2014.3

　More details

Event date： 2014.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学 Country：Japan
水素原子源付きプラズマCVDで作製した炭素薄膜の堆積速度:圧力と電極間距離への依存性

董ショウ, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治

2014年第61回応用物理学会春季学術講演会 2014.3

　More details

Event date： 2014.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学 Country：Japan
プラズマ中に光捕捉した単一微粒子を用いたプラズマと界面の相互作用評価

伊東鉄平, 森田康彦, 岩下伸也, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

2014年第61回応用物理学会春季学術講演会 2014.3

　More details

Event date： 2014.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学 Country：Japan
シランプラズマ中のクラスター量に対する振幅変調放電の効果

都甲将, 橋本優史, 金光善徳, 鳥越祥宏, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

2014年第61回応用物理学会春季学術講演会 2014.3

　More details

Event date： 2014.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学 Country：Japan
反応性プラズマ中のナノ粒子成長とプラズマ揺らぎ

白谷正治, 古閑一憲, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂

2014年第61回応用物理学会春季学術講演会 2014.3

　More details

Event date： 2014.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学 Country：Japan
RFマグネトロンスパッタリング法による高In組成ZnInON膜の作製

松島宏一, 清水僚太, 井手智章, 山下大輔, 鎌滝晋礼, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

2014年第61回応用物理学会春季学術講演会 2014.3

　More details

Event date： 2014.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：青山学院大学 Country：Japan
Transport of fine particles produced by interactions between H2 plasmas and carbon wall International conference

M. Tateishi, K. Koga, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterial/7th International Conference on Plasma Nanotechnology and Science (ISPlasma2014/IC-PLANTS2014) 2014.3

　More details

Event date： 2014.3

Language：English Presentation type：Oral presentation (general)

Venue：Meijo University, Nagoya Country：Japan
Fabrication of Qunatum-Dot Sensitized Solar Cells Using Ge Nanoparticle Films Deposited by High Pressure Rf Magnetron Sputtering Method International conference

D. Ichida, S. Hashimoto, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterial/7th International Conference on Plasma Nanotechnology and Science (ISPlasma2014/IC-PLANTS2014) 2014.3

　More details

Event date： 2014.3

Language：English Presentation type：Oral presentation (general)

Venue：Meijo University, Nagoya Country：Japan
Effects of Amplitude Modulation of Discharge Voltage on Volume Fraction of Clusters in Si Thin Films Depoisted by Multi-Hollow Discharge Plasma CVD International conference

S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterial/7th International Conference on Plasma Nanotechnology and Science (ISPlasma2014/IC-PLANTS2014) 2014.3

　More details

Event date： 2014.3

Language：English Presentation type：Oral presentation (general)

Venue：Meijo University, Nagoya Country：Japan
Band gap control of nc-Si thin films deposited multi-hollow discharge plasma CVD International conference

Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Photocurrent generation of quantum-dot sensitized solar cells using group-IV semiconductor nanoparticle films (Invited) Invited International conference

G. Uchida, D. Ichida, S. Hashimoto, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Fukuoka International Congress Center Country：Japan
Sputtering Fabrication of novel semiconductor ZnGaON with wide bandgap for optoelectronic devices International conference

R. Shimizu, K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, and N. Itagaki

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Si nano-particles: Its quantum characteristics and application for photovoltaics (Invited) Invited International conference

H. Seo, D. Ichida, S. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

2014 Japan-Korea Joint Symposium on Advanced Solar Cells 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Selective removal of clusters in silane plasmas by cluster eliminating filter International conference

Y. Hashimoto, Y. Torigoe, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Magnetron sputtering of In2O3:Sn films with buffer layers fabricated via nitrogen mediated crystallization International conference

K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Ga-doped Zinc Oxide (GZO) Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization by RF Magnetron Sputtering Method International conference

T. Nakanishi, K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Flux Control of Dust Particles Generated due to Interactions between Graphite Wall and H2 Plasmas using DC Biased Substrates International conference

M. Tateishi, K. Koga, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Fabrication of Size-controlled Ge Nanoparticle Films Using High Pressure RF Sputtering Method for Quantum Dot Solar Cell International conference

D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Fabrication of InN-rich ZnInON films for photovoltaic appplications by RF magnetron sputtering International conference

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

2014 Japan-Korea Joint Symposium on Advanced Solar Cells 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Fabrication of highly stable a-Si:H solar cells by suppressing cluster incorporation (Invited) Invited International conference

K. Koga, Y. Hashimoto, S. Toko, D. Yamashita, Y. Torigoe, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, and M. Shiratani

2014 Japan-Korea Joint Symposium on Advanced Solar Cells 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Evaluation of Interactions between Plasmas and Interface using Optically Trapped Single Fine Particle International conference

T. Ito, Y. Morita, K. Koga, G. Uchida, N. Itagaki, H. Seo, K. Kamataki, and M. Shiratani

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Epitaxial growth of ZnO films on lattice mismatch substrates by magnetron sputtering: Effects of buffer layers prepared via nitrogen mediated crystallization International conference

T. Ide, K. Matsushima, R. Shimizu, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Effects of Hydrogen Dilution on Structure of Ge Quantum Dot Film Deposited by Using High Pressure rf Sputtering International conference

S. Hashimoto, D. Ichida, K. Kamataki, H. Seo, G. Uchida, N. Itagaki,, K. Koga, M. Shiratani

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Effects of Gas Pressure on Deposition Rate of Anisotropic Plasma CVD International conference

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Effects of Amplitude Modulation on Stability of Hydrogenated Amorphous Silicon Films Deposited using Multi-Hollow Discharge Plasma CVD Method International conference

Y. Torigoe,Y. Hashimoto, S. Toko, D. Yamashita, N. Itagaki, H. Seo, K. Kamataki, K. Koga, M. Shiratani

2014 Japan-Korea Joint Symposium on Advanced Solar Cells 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Effects of Amplitude Modulation of Discharge Voltage on Cluster Amount in Downstream Region of Multi-Hollow Silane Discharge Plasmas Studied by Laser Light Scattering Method International conference

S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

2014 Japan-Korea Joint Symposium on Advanced Solar Cells 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Coupling between radicals in plasmas and nanoparticle growth in initial growth phase in reactive plasmas with amplitude modulation International conference

K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida and M. Shiratani

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Bispectrum analysis of nanoparticle growth in reactive dusty plasmas International conference

Y. Morita, T. Ito, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Symposium, workshop panel (public)

Venue：NISHIJIN PLAZA, Fukuoka Country：Japan
Combinatorial evaluation of optical properties of crystalline Si nanoparticle embedded Si films deposited by a multi-hollow discharge plasma CVD method International conference

Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Quantum characterization and photovoltaic application of Si nano-particles fabricated by multi-hollow plasma discharge chemical vapor deposition International conference

H. Seo, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Fabrication of SiC nanoparticles as high capacity electrodes for Li-ion batteries International conference

G. Uchida, K. Kamataki, D. Ichida, Y. Morita, H. Seo, N. Itagaki, K. Koga, T. Ishihara, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Epitaxial growth of ZnO films on sapphire substrates by magnetron sputtering: Effects of buffer layers prepared via nitrogen mediated crystallization International conference

T. Ide, K. Matsushima, R. Shimizu, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Coupling between radicals and nanoparticles in initial growth phase in reactive plasmas with amplitude modulation (Invited) Invited International conference

K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
A model for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas International conference

M. Shiratani, K. Koga, K. Kamataki, S. Iwashita, Y. Morita, H. Seo, N. Itagaki, G. Uchida

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Subacute toxicity of gallium arsenide, indium arsenide and arsenic trioxide following intermittent intrantracheal instillations to the lung of rats International conference

A. Tanaka, M. Hirata, K. Koga, N. Itagaki, M. Shiratani, N. Hayashi, G. Uchida

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Study on nitrogen desorption behavior of sputtered ZnO for transparent conducting oxide International conference

I. Suhariadi, K. Oshikawa, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Sputtering fabrication of a novel widegap semiconductor ZnGaON for optoelectronic devices with wide bandgap for optical device International conference

R. Shimizu, K. Matsushima, T. Ide, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Sputter Deposition of Ga-doped Zinc Oxide (GZO) Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization International conference

T. Nakanishi, K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Spatial profile of flux of dust particles in hydrogen helicon plasmas International conference

M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Raman spectroscopy of a fine particle optically trapped in plasma International conference

D. Yamashita, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Pressure dependence of carbon film deposition using H-assisted plasma CVD International conference

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, K. Takenaka, Y. Setsuhara, M. Sekine, M. Hori

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Nanoparticle amount in reactive plasmas with amplitude modulation detected by twodimensional laser light scattering method International conference

T. Ito, Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Magnetron sputtering of low-resistive In2O3:Sn films with buffer layers fabricated via nitrogen mediated crystallization International conference

K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Fine response of deposition rate of Si films deposited by multi-hollow discharge plasma CVD with amplitude modulation International conference

S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Fabrication of In-rich ZnInON filmswith narrow band gap by RF magnetron sputtering International conference

K. Matsushima, R. Shimizu, T. Ide, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Analysis of fluctuation of Ar metastable density and nanoparticle amount in capacitively coupled discharges with amplitude modulation International conference

Y. Morita, T. Ito, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Substrate temperature dependence of hydrogen content of a-Si:H film deposited with a cluster-eliminating filter International conference

Y. Hashimoto, S. Toko, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Fabrication of size-controlled Ge nanoparticle films varying gas flow rate using high pressure rf magnetron sputtering method International conference

D. Ichida, S. Hashimoto, G. Uchida, H. Seo, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Effects of amplitude modulation on deposition of hydrogenated amorphous silicon films using multi-Hollow discharge plasma CVD method International conference

Y. Torigoe, Y. Hashimoto, S. Toko, Y. Kim, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Deposition of Crystalline Ge Nanoparticle Films Varying H2 Dilution Ratio Using High Pressure rf Magnetron Sputtering International conference

S. Hashimoto, D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing (ICRP-8/SPP-31) 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Ultrathin ZnO films for transparent conductors and plasmonics International conference

D. C. Look, B. Wang, K. D. Leedy, D. B. Thomson, N. Itagaki, K. Matsushima, I. Surhariadi

International Society for Optics and Photonics, Photonics West 2014 2014.2

　More details

Event date： 2014.2

Language：English Presentation type：Oral presentation (general)

Venue：San Francisco
Solar cells using nanoparticles of group IV semiconductor aiming at MEG effects International conference

G. Uchida, H. Seo, D. Ichida, N. Itagaki, K, Koga, M. Shiratani

6th International Symposium on Innovative Solar Cells 2014.1

　More details

Event date： 2014.1

Language：English Presentation type：Oral presentation (general)

Venue：Tokyo Tech Front Country：Japan
Nanoparticle composite plasma CVD films Fundamental and applications (Invited) Invited International conference

M. Shiratani, K. Koga, G. Uchida, N. Itagaki, H. Seo, K. Kamataki

The 9th EU-Japan Joint Symposium on Plasma Processing 2014.1

　More details

Event date： 2014.1

Language：English Presentation type：Oral presentation (general)

Venue：Bohinj Park ECO Hotel Country：Slovenia
Ga添加酸化亜鉛薄膜に対する窒素添加結晶化法を用いた酸化亜鉛バッファー層の効果

押川晃一郎, I. Suhariadi, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会　九州・沖縄・山口支部第17回支部大会 2013.12

　More details

Event date： 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐世保工業高等専門学校 Country：Japan
マルチホロー放電プラズマCVDにおけるa-Si:H膜中クラスター混入量に対する振幅変調放電の効果

都甲将, 橋本優史, 金光善徳, 鳥越祥宏, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会　九州・沖縄・山口支部第17回支部大会 2013.12

　More details

Event date： 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐世保工業高等専門学校 Country：Japan
マグネトロンスパッタ法による窒素添加結晶化バッファー層を用いた低抵抗In2O3:Sn薄膜の作製

押川晃一郎, 板垣奈穂, 白谷正治, 古閑一憲, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 山下大輔, I. Suhariadi

プラズマ・核融合学会　九州・沖縄・山口支部第17回支部大会 2013.12

　More details

Event date： 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐世保工業高等専門学校 Country：Japan
スパッタリング法による狭ギャップ半導体ZnInON膜の高品質結晶成長

松島宏一, 清水僚太, 山下大輔, 鎌滝晋礼, 徐鉉雄, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会　九州・沖縄・山口支部第17回支部大会 2013.12

　More details

Event date： 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐世保工業高等専門学校 Country：Japan
プラズマを用いたⅣ族半導体ナノ粒子膜の堆積とそのデバイス応用 (Invited) Invited

内田儀一郎, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第16回プラズマエレクトロニクス分科会プラズマ新領域研究会 2013.12

　More details

Event date： 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大学利用施設UNITY, 神戸 Country：Japan
Correlation between Plasma Fluctuation and Nanoparticle Amount in Initial Growth Phase in Reactive Plasmas with Amplitude Modulation

K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida, M. Shiratani

14th Workshop on Fine Particle Plasmas 2013.12

　More details

Event date： 2013.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute for Fusion Science, Toki Country：Japan
Transport of Carbon Dust Particles Produced by Interactions between H2 Plasmas and Graphite Target

M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, LHD Experimental Group

14th Workshop on Fine Particle Plasmas 2013.12

　More details

Event date： 2013.12

Language：English Presentation type：Oral presentation (general)

Venue：National Institute for Fusion Science, Toki Country：Japan
Deposition of Ge nanoparticle composite films and their application to solar cells

G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

23rd Annual Meeting of MRS-JAPAN 2013 2013.12

　More details

Event date： 2013.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Quantum characteristics of crystalline Si nano-particles and their application for photochemical solar cells (Invited) Invited

H. Seo, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

23rd Annual Meeting of MRS-JAPAN 2013 2013.12

　More details

Event date： 2013.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Morphological Characterization of ZnO Thin Films Fabricated via Nitrogen Mediated Crystallization: Effects of Substrate Temperature

I. Suhariadi, K. Oshikawa, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

23rd Annual Meeting of MRS-JAPAN 2013 2013.12

　More details

Event date： 2013.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Magnetron sputtering of low-resistive transparent conductive oxide films with double buffer layers fabricated via nitrogen mediated crystallization

押川晃一郎, I. Suhariadi, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

23rd Annual Meeting of MRS-JAPAN 2013 2013.12

　More details

Event date： 2013.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Time evolution of spatial profile of nanoparticle amount in amplitude modulated　capacitively coupled reactive plasmas

M. Shiratani, K. Koga, Y. Morita, S. Iwashita, H. Seo, K. Kamataki, N. Itagaki, G. Uchida

23rd Annual Meeting of MRS-JAPAN 2013 2013.12

　More details

Event date： 2013.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Effects of Amplitude Modulation of Discharge Voltage of Multi-Hollow Silane Discharges on Amount of Clusters Formed in the Discharges

S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitsu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

23rd Annual Meeting of MRS-JAPAN 2013 2013.12

　More details

Event date： 2013.12

Language：English Presentation type：Oral presentation (general)

Venue：Yokohama Port Opening Plaza Country：Japan
Quantum dot sensitized solar cells using group IV semiconductor nanoparticles (Invited) Invited International conference

K. Koga, G. Uchida, D. Ichida, S. Hashimoto, H. Seo, K. Kamataki, N. Itagaki, and M. Shiratani

2013 EMN Fall Meeting 2013.12

　More details

Event date： 2013.12

Language：English Presentation type：Oral presentation (general)

Venue：Orland, Florida
ナノ粒子成長に対するプラズマ摂動周波数の効果

古閑一憲, 森田康彦, 岩下伸也, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 白谷正治

プラズマ・核融合学会　第30回年会 2013.12

　More details

Event date： 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
水素プラズマとグラファイト壁の相互作用により発生するダスト粒子の輸送

立石瑞樹, 古閑一憲, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

プラズマ・核融合学会　第30回年会 2013.12

　More details

Event date： 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
Novel metal oxinitride materials for optoelectronic applications (Invited) Invited International conference

M. Shiratani, N. Itagaki., K. Matsushima, R. Shimizu, H. Seo, K. Koga

2013 EMN Fall Meeting 2013.12

　More details

Event date： 2013.12

Language：English Presentation type：Oral presentation (general)

Venue：Orland, Florida
Nanostructure control of Si-based solar cells using plasma CVD (Invited) Invited International conference

M. Shiratani, G. Uchida, H. Seo, D. Ichida, K. Koga, N. Itagaki, K. Kamataki

THERMEC 2013 2013.12

　More details

Event date： 2013.12

Language：English Presentation type：Oral presentation (general)

Venue：Las Vagas
RFマグネトロンスパッタリング法を用いて作製したGeナノ粒子膜の特性

橋本慎史, 市田大樹, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

平成25年度応用物理学会九州支部学術講演会 2013.12

　More details

Event date： 2013.11 - 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan
マグネトロンスパッタ法による格子不整合基板上へのエピタキシャルZnO膜の作製：窒素添加結晶化バッファー層の効果

井手智章, 松島宏一, 清水僚太, 山下大輔, 徐鉉雄, 古閑一憲, 白谷正治, 板垣奈穂

平成25年度応用物理学会九州支部学術講演会 2013.11

　More details

Event date： 2013.11 - 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan
反応性プラズマ中で発生するナノ粒子量の時空間分布

伊東鉄平, 森田康彦, 岩下伸也, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

平成25年度応用物理学会九州支部学術講演会 2013.12

　More details

Event date： 2013.11 - 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan
振幅変調マルチホロー放電プラズマCVD法を用いた水素化アモルファスシリコン薄膜の作製

鳥越祥宏, 橋本優史, 都甲将, 金淵元, 山下大輔, 徐鉉雄, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

平成25年度応用物理学会九州支部学術講演会 2013.12

　More details

Event date： 2013.11 - 2013.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan
Control of plasma CVD films containing group IV nanoparticles (Invited) Invited International conference

M. Shiratani, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga

International Conference on Surface Engineering (ICSE 2013) 2013.11

　More details

Event date： 2013.11

Language：English Presentation type：Oral presentation (general)

Venue：Haeundae Grand Hotel Country：Korea, Republic of
Performance enhancement of Si quantum dot-sensitized solar cells based on Si functionalization and multi-layered structure International conference

H. Seo, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

International Conference on Surface Engineering (ICSE 2013) 2013.11

　More details

Event date： 2013.11

Language：English Presentation type：Oral presentation (general)

Venue：Haeundae Grand Hotel Country：Korea, Republic of
高効率太陽電池のための狭バンドギャップZnInON膜の作成-[O]/([O]+[N]）依存性-

松島宏一, 清水僚太, 山下大輔, 鎌滝晋礼, 徐鉉雄, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

第5回薄膜太陽電池セミナー 2013.11

　More details

Event date： 2013.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
膜中クラスター退席分率のAM変調依存性

都甲将, 橋本優史, 金光善徳, 鳥越祥宏, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第5回薄膜太陽電池セミナー 2013.11

　More details

Event date： 2013.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Fabrication of Dye and Si Quantum Dot Co-sensitized Solar Cells for Performance Enhancement International conference

H. Seo, M.-K. Son, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 2nd International Conference on Advanced Electromaterials (ICAE 2013) 2013.11

　More details

Event date： 2013.11

Language：English Presentation type：Oral presentation (general)

Venue：Jeju Country：Korea, Republic of
Deposition of Size-controlled Ge Nanoparticle Film by Highpressure rf Magnetron Sputtering for Quantum Dot Solar Cells International conference

D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

AVS 60th International Symposium and Exhibition 2013.10

　More details

Event date： 2013.10 - 2013.11

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Long Beach, California
PS+TF-MoA11 Two-dimensional Growth of Novel ZnO based Semiconductor ZnInON with Tunable Bandgap by Magnetron Sputtering International conference

K. Matsushima, R. Shimizu, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

AVS 60th International Symposium and Exhibition 2013.10

　More details

Event date： 2013.10 - 2013.11

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Long Beach, California
Photocurrent Generation Characteristics of Ge Quantum-Dot Solar Cells International conference

G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

AVS 60th International Symposium and Exhibition 2013.10

　More details

Event date： 2013.10 - 2013.11

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Long Beach, California
Deposition of Ge Nanoparticle Films and Their Application to Ge Quantum-dot Sensitized Solar Cells International conference

K. Koga, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani

The 23rd International Photovoltaic Science and Engineering Conference 2013.11

　More details

Event date： 2013.10 - 2013.11

Language：English Presentation type：Oral presentation (general)

Venue：Taipei International Convention Center Country：Taiwan, Province of China
Selective Removal of Clusters in Silane Plasmas Using Cluster Eliminating Filter International conference

Y. Hashimoto, S. Toko, Y. Kim, D. Yamashita, G. Uchida, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

The 23rd International Photovoltaic Science and Engineering Conference 2013.10

　More details

Event date： 2013.10 - 2013.11

Language：English Presentation type：Oral presentation (general)

Venue：Taipei International Convention Center Country：Taiwan, Province of China
The performance enhancement of dye and quantum dot hybrid nanostructured solar cell with barrier coating International conference

H. Seo, Y. Wang, D. Ichida, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Taiwan Associatoin for Coatings and Thin Films Technology 2013.10

　More details

Event date： 2013.10

Language：English Presentation type：Oral presentation (general)

Venue：Grand Hotel Taipei Country：Taiwan, Province of China
Cluster control plasma CVD for fabrication of stable a-Si:H solar cells International conference

M. Shiratani, Y. Hashimoto, Y. Kanemitsu, H. Seo, G. Uchida, N. Itagaki, K. Koga

66th Annual Gaseous Electronics Conference 2013.10

　More details

Event date： 2013.9 - 2013.10

Language：English Presentation type：Oral presentation (general)

Venue：Princeton, New Jersey
Sputtering deposition of ZnGaInON with tunable bandgap for photovoltaics International conference

R. Shimizu, K. Matsushima, D. Yamashita, G. Uchida, H. Seo, K. Koga, M. Shiratani, N. Itagaki

66th Annual Gaseous Electronics Conference 2013.10

　More details

Event date： 2013.9 - 2013.10

Language：English Presentation type：Oral presentation (general)

Venue：Princeton, New Jersey
Cluster incorporation during amplitude modulated VHF discharge silane plasmas International conference

S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

66th Annual Gaseous Electronics Conference 2013.10

　More details

Event date： 2013.9 - 2013.10

Language：English Presentation type：Oral presentation (general)

Venue：Princeton, New Jersey
Ar/N2 Magnetron Sputtering Discharges to Control Growth of Transparent Conducting Oxide Films International conference

K. Oshikawa, I. Suhariadi, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

66th Annual Gaseous Electronics Conference 2013.10

　More details

Event date： 2013.9 - 2013.10

Language：English Presentation type：Oral presentation (general)

Venue：Princeton, New Jersey
ナノ粒子含有プラズマ系におけるナノ粒子成長

白谷正治, 森田康彦, 岩下伸也, 古閑一憲, 内田儀一郎, 板垣奈穂, H. Seo, 鎌滝晋礼

日本物理学会2013年秋季大会 2013.9

　More details

Event date： 2013.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：徳島大学（常三島キャンパス) Country：Japan
Effects of H2 plasma etching on carbon nanoparticles formed due to interactions betweengraphite target and H2 Plasmas

M. Tateishi, K. Koga, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

第7回プラズマエレクトロニクスインキュベーションホール 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
マルチホロー放電プラズマCVD法で堆積したSiナノ粒子膜の光学的バンドギャップ制御

金光善徳, 内田儀一郎, 市田大樹, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第7回プラズマエレクトロニクスインキュベーションホール 2013.9

　More details

Event date： 2013.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
ハイスピードカメラを用いたナノ粒子成長プロセスの観測

伊東鉄平, 森田康彦, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治

第7回プラズマエレクトロニクスインキュベーションホール 2013.9

　More details

Event date： 2013.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
シリコン量子ドット増感太陽電池の高性能化のための多硫化物電解液の最適化

橋本慎史, 市田大樹, 徐鉉雄, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

第7回プラズマエレクトロニクスインキュベーションホール 2013.9

　More details

Event date： 2013.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
Photocarrier generation in quantum-dot sensitized solar cells using Ge nanoparticle films International conference

G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Solid State Devices and Materials 2013 (SSDM) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Hilton Fukuoka Sea Hawk Country：Japan
Amplitude modulation frequency dependence of nanoparticle amount in plasmas

Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 26th Symposium on Plasma Science for Materials (SPSM-26) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Centennial Hall Kyushu University School of Medicine Country：Japan
Time Evolution of Ar Emission Intensities of Ar + H2 + Toluene Plasmas in H-assistedPlasma CVD Reactor

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani

The 26th Symposium on Plasma Science for Materials (SPSM-26) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Centennial Hall Kyushu University School of Medicine Country：Japan
Production of SiC nanoparticles for Li-ion battery applications by using a high pressuremulti-hollow discharge plasma CVD

G. Uchida, D. Ichida, Y. Kanemitsu, H. Seo, K. Kamataki, N. Itagaki, K. Koga, T. Ishihara, M. Shiratani

The 26th Symposium on Plasma Science for Materials (SPSM-26) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Centennial Hall Kyushu University School of Medicine Country：Japan
Plasma Etching of Single Fine Particle Trapped By Optical Tweezers

M. Shiratani, D. Yamashita, K. Koga, K. Kamataki, N. Itagaki, G. Uchida

The 26th Symposium on Plasma Science for Materials (SPSM-26) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Centennial Hall Kyushu University School of Medicine Country：Japan
Effects of RF power on structure of Ge nanoparticle films deposited by high-pressure RFmagnetron sputtering method

D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 26th Symposium on Plasma Science for Materials (SPSM-26) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Centennial Hall Kyushu University School of Medicine Country：Japan
Effects of H2 plasma etching on carbon nanoparticles formed due to interactions betweengraphite target and H2 Plasmas

M. Tateishi, K. Koga, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

The 26th Symposium on Plasma Science for Materials (SPSM-26) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Centennial Hall Kyushu University School of Medicine Country：Japan
Effects of filter gap of cluster eliminating filter on cluster eliminating efficiency

Y. Hashimoto, S. Toko, Y. Kim, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 26th Symposium on Plasma Science for Materials (SPSM-26) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Centennial Hall Kyushu University School of Medicine Country：Japan
Dependence of Volume Fraction of Si Clusters in Films on Amplitude Modulation Frequencyin Multi-Hollow Discharge Plasma CVD Method

S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 26th Symposium on Plasma Science for Materials (SPSM-26) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Centennial Hall Kyushu University School of Medicine Country：Japan
Carbon Nanostructure formed by high pressure methane plasmas

K. Koga, S. Iwashita, G. Uchida, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani, U. Czarnetzki

The 26th Symposium on Plasma Science for Materials (SPSM-26) 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Oral presentation (general)

Venue：Centennial Hall Kyushu University School of Medicine Country：Japan
反応性プラズマにおけるナノ粒子量空間分布の変調周波数依存性

森田康彦, 岩下伸也, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第74回応用物理学会秋季学術講演会 2013.9

　More details

Event date： 2013.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：同志社大学 Country：Japan
Performance Dependence of Si Quantum Dot-Sensitized Solar Cells on Counter Electrode International conference

H. Seo, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

2013 JSAP-MRS Joint Symposia 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Doshisha University Country：Japan
マルチホロー放電プラズマからのクラスター流出量のガス流速依存性

都甲将, 金淵元, 橋本優史, 金光善徳, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第74回応用物理学会秋季学術講演会 2013.9

　More details

Event date： 2013.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：同志社大学 Country：Japan
RFマグネトロンスパッタリング法による高移動度ワイドギャップ半導体ZnInON膜の作製－Ar分圧依存性－

松島宏一, 清水僚太, 山下大輔, 鎌滝晋礼, 徐鉉雄, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

第74回応用物理学会秋季学術講演会 2013.9

　More details

Event date： 2013.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：同志社大学 Country：Japan
Comparative Acute Pulmonary Toxicity of Different Types of Indium-Tin Oxide Following Intermittent Intratracheal Instillation to the Lung of Rats International conference

K. Koga, A. Tanaka, M. Hirata, N. Hayashi, N. Itagaki and G. Uchida

2013 JSAP-MRS Joint Symposia 2013.9

　More details

Event date： 2013.9

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Doshisha University Country：Japan
シラン放電プラズマ初期のクラスター発生と膜への取り込み

橋本優史, 都甲将, 金淵元, 山下大輔, 内田儀一郎, 徐鉉雄, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

第74回応用物理学会秋季学術講演会 2013.9

　More details

Event date： 2013.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：同志社大学 Country：Japan
RFスパッタリング法を用いた結晶Geナノ粒子膜の堆積

市田大樹, 内田儀一郎, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第74回応用物理学会秋季学術講演会 2013.9

　More details

Event date： 2013.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：同志社大学 Country：Japan
クラスタ抑制法を用いた高光安定アモルファスシリコンPIN太陽電池の作製

古閑一憲, 橋本優史, 金淵元, 都甲将, 内田儀一郎, 徐鉉雄, 板垣奈穂, 白谷正治

プラズマ研究会 2013.9

　More details

Event date： 2013.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan

Fabrication of highly stable a-Si:H PIN solar cells using cluster suppression method
Contribution of ionic deposition precursors to Si thin film deposition International conference

S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

Dry Process Symposium 2013 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Effects of amplitude modulation of rf discharge voltage on silane plasmas in initial phase International conference

Y. Kim, S. Toko, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

Dry Process Symposium 2013 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Ramada Plaza Jeju Hotel, Jeju Country：Korea, Republic of
Deposition of Ge nanoparticle films by high-pressure rf magnetron sputtering method for quantum dot solar cells International conference

G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

The 9th Asian-European International Conference on Plasma Surface Engineering　(AEPSE2013) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Formation of self-organized nanostructures using high pressure CH4+Ar plasmas International conference

K. Koga, S. Iwashita, G. Uchida, D. Yamashita, N. Itagaki, H. Seo, M. Shiratani and U. Czarnetzki

The 9th Asian-European International Conference on Plasma Surface Engineering　(AEPSE2013) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Characteristics of GeSn nanoparticle films deposition by high-pressure rf magnetron sputtering method International conference

D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 9th Asian-European International Conference on Plasma Surface Engineering　(AEPSE2013) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Tuning Size Distribution of Nanoparticles Formed in Reactive Plasmas using Plasma Parameter Modulation International conference

M. Shiratani, Y. Morita, S. Iwashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, and K. Koga

The 9th Asian-European International Conference on Plasma Surface Engineering　(AEPSE2013) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Safety Issues on Plasma Life Sicences (Invited) Invited International conference

M. Shiratani, K. Koga, A. Tanaka, M. Hirata, N. Hayashi, N. Itagaki, G. Uchida

The 9th Asian-European International Conference on Plasma Surface Engineering　(AEPSE2013) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Performance Enhancement of Si Quantum Dot-sensitized Solar Cell Using vanadium Doped TiO2 International conference

H. Seo, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, S. Nam, J. Boo

The 9th Asian-European International Conference on Plasma Surface Engineering　(AEPSE2013) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Time evolution of spatial profile of nanoparticle amount in reactive plasmas International conference

Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga and M. Shiratani

The 9th Asian-European International Conference on Plasma Surface Engineering　(AEPSE2013) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Sputtering Fabrication of ZnInON films with Tunable Bandgap for Heterojunction Solar Cells International conference

R. Shimizu, K. Matsushima, Tadashi Hirose, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Koga, M. Shiratani, and N. Itagaki

The 9th Asian-European International Conference on Plasma Surface Engineering　(AEPSE2013) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Effects of atmospheric air plasma treatments of seeds on plant growth International conference

T. Sarinont, S. Kitazaki, K. Koga, G. Uchida, N. Itagaki, H. Seo, M. Shiratani and N. Hayashi

The 9th Asian-European International Conference on Plasma Surface Engineering　(AEPSE2013) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Jeju Hotel Country：Korea, Republic of
Coreshell nanoparticles generated by plasma CVD and their applications to Li ion batteries International conference

M. Shiratani, Y. Morita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, and K. Koga

21st International Symposium on Plasma Chemistry (ISPC21) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Cairns Country：Australia
Observation of nanoparticle growth process using high speed camera International conference

Y. Morita, K. Koga, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, D. Yamashita and M. Shiratani

21st International Symposium on Plasma Chemistry (ISPC21) 2013.8

　More details

Event date： 2013.8

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Cairns Country：Australia
Combinatorial plasma CVD of Si nanoparticle composite films for band gap control International conference

Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

The 12th Asia Pacific Physics Conference (APPC12) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Makuhari, Chiba Country：Japan
Study on the crystal growth mechanism of ZnO films fabricated via nitrogen mediated crystallization International conference

I. Suhariadi, K. Oshikawa, H. Seo, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

The 12th Asia Pacific Physics Conference (APPC12) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Makuhari, Chiba Country：Japan
Effects of plasma incident angle of dust production due to interactions between hydrogen plasmas and carbon wall International conference

M. Tateishi, K. Koga, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group d, S. Bornholdte, H. Kersten

The 12th Asia Pacific Physics Conference (APPC12) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Makuhari, Chiba Country：Japan
Effects of grid DC bias on incorporation of Si clusters into amorphous silicon films by multi-hollow discharge plasma CVD International conference

S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

The 12th Asia Pacific Physics Conference (APPC12) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Makuhari, Chiba Country：Japan
Transport of nanoparticles produced in reactive plasmas using a positively-biased collector International conference

Y. Morita, K. Koga, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, and M. Shiratani

The 12th Asia Pacific Physics Conference (APPC12) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Makuhari, Chiba Country：Japan
Infrared Laser Manipulation of Single Fine Particle Levitated at Plasma/Sheath Boundary International conference

D. Yamashita, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani

The 12th Asia Pacific Physics Conference (APPC12) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Makuhari, Chiba Country：Japan
High Pressure Nonthermal Methane Plasmas for Nanoparticle Production International conference

K. Koga, S. Iwashita, G. Uchida, D. Yamashita, N. Itagaki, K. Kamataki, M. Shiratani, U. Czarnetzki

The 12th Asia Pacific Physics Conference (APPC12) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Makuhari, Chiba Country：Japan
Effects of H2 gas addition on structure of Ge nanoparticle films deposited by high-pressure rf magnetron sputtering method International conference

D. Ichida, G. Uchida, H. Seo, K. Kamatakia, N. Itagaki, K. Koga, M. Shiratani

The 12th Asia Pacific Physics Conference (APPC12) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Makuhari, Chiba Country：Japan
Correlation between nanoparticle growth and plasma parameters in low pressure reactive VHF discharge plasmas International conference

M. Shiratani, Y. Morita, K. Kamataki, H. Seo, G. Uchida, N. Itagaki, K. Koga

The 12th Asia Pacific Physics Conference (APPC12) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Makuhari, Chiba Country：Japan
Layer by layer deposition of ZnO buffer layers fabricated via nitrogen mediated crystallization for ZnO:Al transparent conducting oxide International conference

I. Suhariadi, K. Oshikawa, K. Kuwahara, K. Matsushima, D. Yamashita, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

International Symposium on Sputtering and Plasma Processes (ISSP2013) 2013.7

　More details

Event date： 2013.7

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto Research Park Country：Japan
Analysis on the paint-type Si quantum dot-sensitized solar cells International conference

H. Seo, Y. Wang, D. Ichida, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

International Symposium on Green Manufacturing and Applecations 2013.6

　More details

Event date： 2013.6

Language：English Presentation type：Oral presentation (general)

Venue：Hawai
Control of nanostructure of plasma CVD Si thin films (Invited) Invited International conference

M. Shiratani, K. Koga, G. Uchida, N. Itagaki, H. Seo, and K. Kamataki

Japan-Australia Workshop on Gaseous Electronics and Its Applications (JAWS25) 2013.6

　More details

Event date： 2013.6

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Australian National University Country：Australia
Dust flux control in high density hydrogen plasmas using DC biased substrates International conference

M. Tateishi, K. Koga, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

The 17th International Workshop on Advanced Plasma Processing and Diagnostics 2013.5

　More details

Event date： 2013.5

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Sungkyunkwan University Country：Korea, Republic of
Advanced plasma sources and processes for energy harvesting devices (Invited) Invited International conference

M. Shiratani, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, and K. Koga

The 17th International Workshop on Advanced Plasma Processing and Diagnostics 2013.5

　More details

Event date： 2013.5

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Sungkyunkwan University Country：Korea, Republic of
Advance in quantum dot-sensitized solar cells using group IV semiconductor nano-particles (Invited) Invited International conference

H. Seo, D. Ichida, S. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani

The 17th International Workshop on Advanced Plasma Processing and Diagnostics 2013.5

　More details

Event date： 2013.5

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Sungkyunkwan University Country：Korea, Republic of
Volume fraction of clusters in Si thin films in initial deposition phase of plasma CVD International conference

S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani

The 17th International Workshop on Advanced Plasma Processing and Diagnostics 2013.5

　More details

Event date： 2013.5

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Sungkyunkwan University Country：Korea, Republic of
Nanostructure of plasma CVD films containing nanoparticles (Invited) Invited International conference

M. Shiratani, K. Koga, G. Uchida, N. Itagaki, H. Seo, K. Kamataki

International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2013) 2013.4

　More details

Event date： 2013.4 - 2013.5

Language：English Presentation type：Oral presentation (general)

Venue：San Diego, CA
Silicon cluster volume fraction of silicon thin films prepared by multi-hollow plasma discharge CVD

金淵元, K. Hatozaki, Y. Hashimoto, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

2013年第60回応用物理学会春季学術講演会 2013.3

　More details

Event date： 2013.3

Language：English Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
RFマグネトロンスパッタリング法による高移動度ワイドギャップ半導体ZnInONの作製

松島宏一, 桑原和成, 廣瀬忠史, 山下大輔, 鎌滝晋礼, 徐鉉雄, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

2013年第60回応用物理学会春季学術講演会 2013.3

　More details

Event date： 2013.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
振幅変調放電プラズマ中のナノ粒子成長初期におけるナノ粒子量の時空間分布

古閑一憲, 森田康彦, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 白谷正治

2013年第60回応用物理学会春季学術講演会 2013.3

　More details

Event date： 2013.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
Siナノ粒子膜を用いたSi/PEDOT:PSS太陽電池の特性評価

内田儀一郎, 王玉亭, 市田大樹, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

2013年第60回応用物理学会春季学術講演会 2013.3

　More details

Event date： 2013.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
Infrared Plasmonics via ZnO (Keynote lecture) Invited International conference

D. C. Look, M. S. Allen, J. W. Allen, N. Itagaki, K. Matsushima, I. Surhariadi

4th Mexican Workshop on Nanostructured Materials 2013.3

　More details

Event date： 2013.3

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Puebla Country：Mexico
Model for Thickness dependence of mobility and concentration in highly conductive ZnO International conference

D. C. Look, Kevin D. Leedy, Arnold M. Kiefer, Bruce B. Claflin, N. Itagaki, K. Matsushima, I. Suhariadi

SPIE-Int. Soc. Opt. Photonics, Photonics West (2013) 2013.2

　More details

Event date： 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：The Moscone Center, San Francisco
Fluctuation in Plasma Processes (Invited) Invited International conference

M. Shiratani, K. Kamataki, Y. Morita, K. Koga, G. Uchida, N. Itagaki, H. Seo

6th International Conference on Plasma Nanotechnology and Science (IC-PLANTS 2013) 2013.2

　More details

Event date： 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：下呂交流会館 Country：Japan
Cycle characteristics of lithium ion batteries using Si/SiC core-shell nanoparticle anode International conference

Y. Morita, K. Kamataki, G. Uchida, Y. Kim, H. Seo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, H. Nagano, T. Ishihara

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.2

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
Time evolution of nanoparticle size in reactive plasmas: comparison between theory and experiments International conference

M. Shiratani, K. Kamataki, Y. Morita, G. Uchida, H. Seo, N. Itagaki, K. Koga

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.1

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
Substrate temperature dependence of silcion cluster volume fraction in silicon thin films measured with quartz crystal microbalances International conference

Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.1

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
Spatio-temporal structure of growth of nano-particles with without amplitude modulation in reactive plasmas International conference

K. Kamataki, Y. Morita, K. Koga, G. Uchida, N. Itagaki, H. Seo, M. Shiratani

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.1

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
Dependence of performance of p-i-n a-Si:H solar cells using stable a-Si:H films on distance between discahrges and substrate International conference

K. Hatozaki, Y. Hashimoto, D. Yamashita, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.1

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
The improvement on the electron transfer of dye-sensitized solar cell using vanadium doped TiO2 International conference

H. Seo, Y. Wang, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Sanghoon Nam and Jin-Hyo Boo

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.2

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
Properties and Performance of C-Si/Si QDs/organic Heterojunction Solar Cells International conference

Y. Wang, D. Ichida, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.2

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
Evaluation of etching effects due to H+ ions on dust transport using local bias potential International conference

K. Nishiyama, M. Tateishi, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and The LHD Experimental Group

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.2

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
Energy conversion efficincy of Si nanoparticle/PEDOT:PSS qunatum-dot solar cells International conference

G. Uchida, Y. Wang, H. Seo, D. Ichida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.2

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
Effects of Nitrogen on Crystal Growth of Sputter-Deposited ZnO Films for Transparent Conducting Oxide International conference

I. Suhariadi, K. Oshikawa, K. Kuwahara, K. Matsushima, D. Yamashita, G. Uchida, K. Koga, M. Shiratani, N. Itagaki

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.2

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
Effects of deposition temperature on properties of epitaxial ZnInON films for solar cells International conference

K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, and N. Itagaki

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.2

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
Dependence of Voc of a-Si:H solar cells on distance between discharge and substrate International conference

Y. Hashimoto, K. Hatozaki, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani

5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013) 2013.2

　More details

Event date： 2013.1 - 2013.2

Language：English Presentation type：Oral presentation (general)

Venue：Naogya University Country：Japan
The fabrication of paint-type Si quantum dot-sensitized solar cells and ZnS post-treatment (Invited) Invited International conference

H. Seo, Y. wang, D. Ichida, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 16th International Workshop on Advanced Plasma Processing and Diagnostics 2013.1

　More details

Event date： 2013.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：自然科学研究機構岡崎コンファレンスセンター Country：Japan
Tuning nanostructures of plasma CVD films (Plenary) Invited International conference

M. Shiratani, K. Koga, G. Uchida, N. Itagaki, H. Seo, K. Kamataki

The 16th International Workshop on Advanced Plasma Processing and Diagnostics 2013.1

　More details

Event date： 2013.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：自然科学研究機構岡崎コンファレンスセンター Country：Japan
Fabrication of epitaxial ZnInON films for MQW solar cells by RF magnetron sputtering International conference

K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

The 16th International Workshop on Advanced Plasma Processing and Diagnostics 2013.1

　More details

Event date： 2013.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：自然科学研究機構岡崎コンファレンスセンター Country：Japan
Deposition rate dependence of silicon cluster volume fraction in silicon thin films deposited by multi-hollow plasma discharge CVD International conference

Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 16th International Workshop on Advanced Plasma Processing and Diagnostics 2013.1

　More details

Event date： 2013.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：自然科学研究機構岡崎コンファレンスセンター Country：Japan
Siナノ粒子/PEDOT:PSSを用いた量子ドット太陽電池の作製

市田大樹, 王玉亭, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第30回プラズマプロセシング研究会(SPP-30) 2013.1

　More details

Event date： 2013.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：アクトシティ浜松・研修交流センター Country：Japan
反応性プラズマ中の微粒子成長速度の時空間相関

白谷正治, 鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, 徐鉉雄

第30回プラズマプロセシング研究会(SPP-30) 2013.1

　More details

Event date： 2013.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：アクトシティ浜松・研修交流センター Country：Japan
マルチホロー放電プラズマCVDで堆積したSiナノ粒子含有膜のバンドギャップ制御

金光善徳, 内田儀一郎, 市田大樹, 王玉亭, 波戸崎浩介, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第30回プラズマプロセシング研究会(SPP-30) 2013.1

　More details

Event date： 2013.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：アクトシティ浜松・研修交流センター Country：Japan
ダブルマルチホロープラズマCVDを用いたリチウムイン電池用SiCナノ粒子膜のコンビナトリアル生成

森田康彦, 鎌滝晋礼, 内田儀一郎, 金淵元, 徐鉉雄, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治, 永野裕己, 石原達己

第30回プラズマプロセシング研究会(SPP-30) 2013.1

　More details

Event date： 2013.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：アクトシティ浜松・研修交流センター Country：Japan
Etching Effects of Hydrogen Ions on Dust Collection Using Local Bias Potential International conference

K. Nishiyama, M. Tateishi, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

2013 International Symposium on Information Science and Electrical Engineering 2013.1

　More details

Event date： 2013.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学伊都キャンパス稲盛会館 Country：Japan
SiH4マルチホロー放電プラズマの発光分光計測

橋本優史, 波戸崎浩介, 金淵元, 山下大輔, 内田儀一郎, 徐鉉雄, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

プラズマ・核融合学会　九州・沖縄・山口支部第16回支部大会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
反応性プラズマ中でのナノ粒子成長の時空間分布

森田康彦, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会　九州・沖縄・山口支部第16回支部大会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
反応性プラズマとナノ構造の相互作用の長距離相関モデル

白谷正治, 鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, 徐鉉雄

プラズマ・核融合学会　九州・沖縄・山口支部第16回支部大会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
大型ヘリカル装置の主放電時に発生するダストの局所バイアス電圧を用いた除去

西山雄士, 立石瑞樹, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

プラズマ・核融合学会　九州・沖縄・山口支部第16回支部大会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
重水素ヘリコンプラズマとグラファイト壁の相互作用により発生したダストの捕集

古閑一憲, 岩下伸也, 西山雄士, 立石瑞樹, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

プラズマ・核融合学会　九州・沖縄・山口支部第16回支部大会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
マルチホロー放電プラズマCVD法を用いたSiナノ粒子膜の堆積と有機・無機ハイブリッド型太陽電池への応用

市田大樹, 王玉亭, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会　九州・沖縄・山口支部第16回支部大会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
マルチホロー放電プラズマCVDで堆積したSiナノ粒子含有膜の光学特性

金光善徳, 内田儀一郎, 市田大樹, 王玉亭, 波戸崎浩介, 徐鉉雄, 鎌滝普礼, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会　九州・沖縄・山口支部第16回支部大会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
スパッタリング法による高効率量子井戸型太陽電池のための狭バンドギャップ酸窒化物半導体の作製

廣瀬忠史, 松島宏一, 桑原和成, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

プラズマ・核融合学会　九州・沖縄・山口支部第16回支部大会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Electrochemical impedance analysis on the additional layers for the enhancement on the performance of dye-sensitized solar cell International conference

H. Seo, Y. Wang, D. Ichida, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

10th International Conference on Nano-Molecular Electronics 2012.12

　More details

Event date： 2012.12

Language：English Presentation type：Oral presentation (general)

Venue：Awaji Yumebutai International Conference Center Country：Japan
Application of Si nanoparticles to energy devices: quantum-dot solar cells and Li ion batteris (Invited) Invited International conference

G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga, T. Ishihara, and M. Shiratani

The 69th IUVSTA Workshop 2012.12

　More details

Event date： 2012.12

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Mountain Krvavec, Cerklje Country：Slovenia
A simplified model of a relationship between plasma fluctuation and size distribution of nanoparticles formed in reactive plasmas

M. Shiratani, Y. Morita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga

第13回微粒子プラズマ研究会 2012.12

　More details

Event date： 2012.12

Language：English Presentation type：Oral presentation (general)

Venue：核融合科学研究所 Country：Japan
SiC/Si nanoparticle anode of lithium ion batteries fabricated using double multi-hollow plasma CVD

Y. Morita, K. Kamataki, G. Uchida, Y. Kim, H. Seo, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, H. Nagano, T. Ishihara

第13回微粒子プラズマ研究会 2012.12

　More details

Event date： 2012.12

Language：English Presentation type：Oral presentation (general)

Venue：核融合科学研究所 Country：Japan
Dust particle formation due to interaction between deuterium helicon plasmas and graphite wall

M. Tateishi, S. Iwashita, K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

第13回微粒子プラズマ研究会 2012.12

　More details

Event date： 2012.12

Language：English Presentation type：Oral presentation (general)

Venue：核融合科学研究所 Country：Japan
Dust Collection on DC Biased Substrates during Glow Discharges in the Large Helical Device

K. Nishiyama, M. Tateishi, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagar2, and the LHD Experimental Group

第13回微粒子プラズマ研究会 2012.12

　More details

Event date： 2012.12

Language：English Presentation type：Oral presentation (general)

Venue：核融合科学研究所 Country：Japan
Deposition of Si nanoparticle composite films for C-Si/Si QDs/organic Solar Cells

K. Koga, Y. Wang, D. Ichida, H. Seo, G. Uchida, N. Itagaki, M. Shiratani

第13回微粒子プラズマ研究会 2012.12

　More details

Event date： 2012.12

Language：English Presentation type：Oral presentation (general)

Venue：核融合科学研究所 Country：Japan
Si ナノ粒子/PEDOT:PSS 量子ドット太陽電池のエネルギー変換効率

市田大樹, 王玉亭, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

平成24年度応用物理学会九州支部学術講演会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
低温スパッタリング法による高効率量子井戸型太陽電池のための新規酸窒化物半導体ZnInONの形成

松島宏一, 桑原和成, 廣瀬忠史, 山下大輔, 鎌滝晋礼, 徐鉉雄, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

平成24年度応用物理学会九州支部学術講演会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
窒素添加結晶化バッファー層を用いた低抵抗ZnO:Al薄膜の作製：バッファー層形成時における酸素供給量の効果

押川晃一郎, I. Suhariadi, 桑原和成, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治, 板垣奈穂

平成24年度応用物理学会九州支部学術講演会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
ヘリコンプラズマ装置における捕集基板上ダストへのエッチング効果の考察

立石瑞樹, 西山雄士, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

平成24年度応用物理学会九州支部学術講演会 2012.12

　More details

Event date： 2012.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
グラファイトと重水素プラズマの相互作用で発生したダスト捕集

古閑一憲, 岩下伸也, 西山雄士, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

プラズマ・核融合学会　第29回年会 2012.11

　More details

Event date： 2012.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：春日クローバープラザ Country：Japan
局所バイアス電圧印加基板で捕集したカーボンダスト量に対する水素プラズマエッチングの効果

立石瑞樹, 西山雄士, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

プラズマ・核融合学会　第29回年会 2012.11

　More details

Event date： 2012.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：春日クローバープラザ Country：Japan
放電電力変調反応性プラズマにおけるナノ粒子成長の時空間構造の観測

鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 白谷正治

プラズマ・核融合学会　第29回年会 2012.11

　More details

Event date： 2012.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：春日クローバープラザ Country：Japan
ダイバータシミュレータで発生したカーボンダストの生成と輸送の放電電力の効果

西山雄士, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ, S. Bornholdt, H. Kersten

プラズマ・核融合学会　第29回年会 2012.11

　More details

Event date： 2012.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：春日クローバープラザ Country：Japan
Performance enhancement of c-Si/organic heterojunction solar cells by using Si quantum dots International conference

Y. Wang, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 34th International Symposium on Dry Process 2012.11

　More details

Event date： 2012.11

Language：English Presentation type：Oral presentation (general)

Venue：The University of Tokyo Country：Japan
プラズマプロセスにおける揺らぎのダイナミックス

鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, H. Seo, 白谷正治

九州山口プラズマ研究会、応物新領域研究会 2012.11

　More details

Event date： 2012.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：由布院倶楽部 Country：Japan
Long-range correlation of nanoparticle growth in in low pressure reactive VHF discharge plasmas International conference

M. Shiratani, K. Kamataki, Y. Morita, H. Seo, N. Itagaki, G. Uchida, K. Koga

54th Annual Meeting of the APS Division of Plasma Physics (DPP) 2012.10

　More details

Event date： 2012.10 - 2012.11

Language：English Presentation type：Oral presentation (general)

Venue：Rhode Island Convention Center, Rhode Island
Epitaxial Growth of ZnInON Films for Piezo-Electric-Field Effect MQW Solar Cells International conference

K. Matsushima, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

AVS 59th International Symposium & Exhibition 2012.11

　More details

Event date： 2012.10 - 2012.11

Language：English Presentation type：Oral presentation (general)

Venue：Tampa Convention Center, Florida
Photocarrier generation in Si quantum-dot sensitized solar cells International conference

G. Uchida, H. Seo, Y. Wang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

AVS 59th International Symposium & Exhibition 2012.10

　More details

Event date： 2012.10 - 2012.11

Language：English Presentation type：Oral presentation (general)

Venue：Tampa Convention Center, Florida
Sputter deposition of atomically smooth ZnO films with buffer layers crystallized via nitrogen mediation International conference

K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, K. Koga, M. Shiratani, N. Itagaki

AVS 59th International Symposium & Exhibition 2012.11

　More details

Event date： 2012.10 - 2012.11

Language：English Presentation type：Oral presentation (general)

Venue：Tampa Convention Center, Florida
SiH4/H2 and CH4 multi-hollow discharge plasma CVD of SiC nano-composite anode for high charge-discharge capacity lithium ion batteries International conference

Y. Morita, K. Kamataki, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani

AVS 59th International Symposium & Exhibition 2012.11

　More details

Event date： 2012.10 - 2012.11

Language：English Presentation type：Oral presentation (general)

Venue：Tampa Convention Center, Florida
Impacts of plasma fluctuation on growth of nanoparticles in low pressure reactive VHF discharge plasmas International conference

M. Shiratani, K. Kamataki, Y. Morita, H. Seo, N. Itagaki, G. Uchida, K. Koga

65th Annual Gaseous Electronics Conference (GEC) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：The University of Texas
Control of Dust Flux in LHD and in a Divertor Simulator International conference

K. Koga, K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

24th Fusion Energy Conference (IAEA) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：San Diego
Fabrication of ZnO Buffer Layers via Nitrogen-Mediated Crystallization for ZnO:Al Transparent Conducting Oxide: Effects of Oxygen Addition International conference

I. Suhariadi, K. Oshikawa, K. Kuwahara, K. Matsushima, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, N. Itagaki, M. Shiratani

Asia-Pacific Conference on Plasma Science and Technology　(11th APCPST) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
Temporal Evolution Of Number Density Of Ar Metastable Atoms In Dusty Plasmas International conference

G. Uchida, N. Sadegh, K. Kamataki, H. Seo, N. Itagaki, K. Koga, M. Shiratani

Asia-Pacific Conference on Plasma Science and Technology　(11th APCPST) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
Growth Control Of ZNO Nano-Rod With Various Seeds And Photovoltaic Application International conference

H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Asia-Pacific Conference on Plasma Science and Technology　(11th APCPST) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
Time evolution of diameter of laser trapped single dust particle in plasmas International conference

D. Yamashita, K. Koga, S. Kitazaki, K. Kamataki, G. Uchida, N. Itagaki, M. Shiratani

Asia-Pacific Conference on Plasma Science and Technology　(11th APCPST) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
Temperature dependence of fill factor of a-Si:H Schottky cells International conference

Y. Hashimoto, K. Hatozaki, Y. Kim, D. Yamashita, G. Uchida, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

Asia-Pacific Conference on Plasma Science and Technology　(11th APCPST) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
Sputter deposition of epitaxial ZnO films: effects of O2 partial pressure International conference

K. Kuwahara, K. Matsushima, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, K. Koga, M. Shiratani, N. Itagaki

Asia-Pacific Conference on Plasma Science and Technology　(11th APCPST) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
High capacity lithium ion batteries using SiC nanoparticles International conference

Y. Morita, K. Kamataki, G. Uchida, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani, H. Nagano, T. Ishihara

Asia-Pacific Conference on Plasma Science and Technology　(11th APCPST) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
Fabrication of epitaxial ZnInON films for solar cell application by N2/Ar sputtering International conference

K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

Asia-Pacific Conference on Plasma Science and Technology　(11th APCPST) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
Control of size distribution of nanoparticles produced in reactive plasmas International conference

M. Shiratani, K. Kamataki, Y. Morita, K. Koga, G. Uchida, H. Seo, D. Yamashita, N. Itagaki

Asia-Pacific Conference on Plasma Science and Technology　(11th APCPST) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
Measurements of amount of Si clusters incorporated during film deposition using quartz crystal microbalances International conference

Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Asia-Pacific Conference on Plasma Science and Technology　(11th APCPST) 2012.10

　More details

Event date： 2012.10

Language：English Presentation type：Oral presentation (general)

Venue：京都大学 Country：Japan
Deposition of B-doped a-Si:H films using a cluster eliminating filter International conference

Y. Hashimoto, K. Nakahara, T. Matsunaga, K. Hatozaki, D. Yamashita, G. Uchida, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
In-situ Measurements of Size Distribution of Nanoparticles Formed in Reactive Plasmas Using a Laser Light Scattering Method International conference

M. Shiratani, K. Kamataki, Y. Morita, G. Uchida, H. Seo, N. Itagaki, K. Koga

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
A Theoretical Model of a Relationship between Plasma Fluctuation and Nanostructure Fluctuation International conference

M. Shiratani, Y. Morita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
Selective deposition of nanoparticles to valleys of texture substrates International conference

Y. Morita, K. Kamataki, G. Uchida, D. Yamashita, N. Itagaki, H. Seo, K. Koga, M. Shiratani

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances International conference

Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
High Capacity Li Ion Battery Anodes Using Silicon Carbide Nanoparticles Produced by Double Multi-Hollow Discharge Plasma CVD International conference

K. Kamataki, M. Shiratani, T. Ishihara, H. Nagano, Y. Morita, K. Kuwahara, G. Uchida, H. Seo, N. Itagaki, K. Koga

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
Deposition of Si quantum-dot thin films for solar cell applications using multi-hollow discharge plasma CVD International conference

G. Uchida, M. Sato, H. Seo, Y. Wang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
An infrared laser trap of a single dust particle for study of plasma-surface interactions International conference

G. Uchida, K. Koga, D. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
ZnO films with buffer layers crystallized via nitrogen mediation: effects of thickness of buffer layers International conference

K. Kuwahara, N. Itagaki, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, K. Koga, M. Shiratani

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
Hydrogenated Amorphous Silicon Solar Cells Fabricated by a Multi-hollow Discharge Plasma CVD Method International conference

K. Hatozaki, Y. Hashimoto, D. Yamashita, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
Fabrication of ZnO Films via Nitrogen-Mediated Crystallization as Buffer Layers for ZnO:Al Transparent Conducting Oxide International conference

I. Suhariadi, K. Oshikawa, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
Fabrication of Zn-In-ON films with tunable optical bandgap for photovoltaic applications International conference

K. Matsushima, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
Enhancement of light harvesting efficiency with multi-layered electrode of Si quantum dot-sensitized solar cells International conference

H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
Effects of V-doped TiO2 on Performance Si QDSCs International conference

Y. Wang, J. Boo, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

IUMRS‐ICEM 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：PACIFICO YOKOHAMA Country：Japan
Si量子ドット増感太陽電池の高性能化のための多硫化物電解液の最適化

市田大樹, 王玉亭, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治

第6回プラズマエレクトロニクスインキュベーションホール 2012.9

　More details

Event date： 2012.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
高効率量子井戸型太陽電池のための新規窒化物半導体薄膜の作製

廣瀬忠史, 松島宏一、桑原和成、押川晃一郎、I. Suhariadi、山下大輔、徐鉉雄、鎌滝晋礼、内田儀一郎、板垣奈穂、古閑一憲、白谷正治

第6回プラズマエレクトロニクスインキュベーションホール 2012.9

　More details

Event date： 2012.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
プラズマ壁相互作用により発生するカーボンナノダストの生成に関する実験

立石瑞樹, 西山雄士, 森田康彦, 山下大輔, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, the LHD Experimental Group, S. Bornholdt, H. Kersten

第6回プラズマエレクトロニクスインキュベーションホール 2012.9

　More details

Event date： 2012.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
Optical Trapping of Single Fine Particle in Plasmas for study of interactions between a fine particle and plasmas International conference

K. Koga, D. Yamashita, S. Kitazaki, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

NANOSMAT 2012 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：Aqua Palace Hotel
Study on the fabrication of paint-type Si quantum dot-sensitized solar cells International conference

H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

International Conference on Electronic materials and Nanotechnology for Green Environment (ENGE 2012) 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Plaza Hotel Country：Korea, Republic of
大容量リチウムイオン電池用プラズマCVD生成SiCナノ粒子負極の開発

森田康彦, 鎌滝晋礼, 内田儀一郎, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 永野裕己, 石原達己

第73回応用物理学会学術講演会 2012.9

　More details

Event date： 2012.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：愛媛大学・松山大学 Country：Japan
微粒子プラズマ中におけるAr準安定粒子密度の空間分布計測

内田儀一郎, 鎌滝晋礼, 森田康彦, H. Seo, 板垣奈穂, 古閑一憲, Nader Sadeghi, 白谷正治

第73回応用物理学会学術講演会 2012.9

　More details

Event date： 2012.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：愛媛大学・松山大学 Country：Japan
Control of deposition profile and properties of plasma CVD carbon films International conference

K. Koga, T. Urakawa, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

13th International Conference on Plasma Surface Engineering (PSE2012) 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：Garmisch-Partenkirchen Country：Germany
Growth Enhancement of Plants by Combinatorial Plasma Irradiation International conference

M. Shiratani, S. Kitazaki, T. Sarinont, K. Koga, G. Uchida, N. Itagaki, H. Seo, K. Kamataki, N. Hayashi

The 9th International Bioelectrics Symposium (BIOELECTRICS 2012) 2012.9

　More details

Event date： 2012.9

Language：English Presentation type：Oral presentation (general)

Venue：KKR Hotel Kumamoto Country：Japan
The improvement on the performance of quantum dot-sensitized solar cells with functionalized Si International conference

H. Seo, Y. Wang, M. Sato, G. Uchida, K. Koga, N. Itagaki, K. Kamataki and M. Shiratani

International Union of Materials Research Society – International Conference in Asia – 2012 (IUMRS-ICA-2012) 2012.8

　More details

Event date： 2012.8

Language：English Presentation type：Oral presentation (general)

Venue：BEXCO Country：Korea, Republic of
Nanostructure control of thin films depoisted by plasmas and its application to fabrication of green energy devices (Invited) Invited International conference

M. Shiratani, N. Itagaki, K. Koga, Uchida G., K. Kamataki, H. Seo

(APT2012) The 2nd Advanced Plasma Technology for Green Energy and Biomedical Applications 2012.8

　More details

Event date： 2012.8

Language：English Presentation type：Oral presentation (general)

Venue：Chiangmai University Country：Thailand
Deposition of Si nano-particle films for Si quantum-dots sensitized solar cells International conference

G. Uｃhida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 6th International Conference on Technological Advances of Thin Films and Surface Coating 2012.7

　More details

Event date： 2012.7

Language：English Presentation type：Oral presentation (general)

Venue：Singapore Management University Country：Singapore
Impacts of plasma fluctuation on nanoparticle growth in reactive plasmas International conference

M. Shiratani, K. Kamataki, Y. Morita, K. Koga, G. Uchida, N. Itagaki, H. Seo

IEEE ICOPS2012 2012.7

　More details

Event date： 2012.7

Language：English Presentation type：Oral presentation (general)

Venue：Edingburgh
Investigations on the energy balance of the substrate during ZnO magnetron sputtering International conference

S. Bornholdt, K. Kuwahara, N. Itagaki, H. Wulff, M. Shiratani, H. Kersten

39th European Physical Society Conference on Plasma Physics, 16th International Congress on Plasma Physics 2012.7

　More details

Event date： 2012.7

Language：English Presentation type：Oral presentation (general)

Venue：Stockholm Country：Sweden
ダイバータシミュレータ中のカーボンナノダストの生成と輸送に関する実験

西山雄士, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ, S. Bornholdt, H. Kersten

第9回核融合エネルギー連合講演会 2012.6

　More details

Event date： 2012.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：神戸国際会議場 Country：Japan
Application of SiC nanoparticle films to energy conversion devices: lithium ion batteries and quantum-dot solar cells (Invited) Invited International conference

G. Uchida, K. Kamataki, H. Seo, Y. Morita, N. Itagaki, K. Koga, T. Ishihara, M. Shiratani

The 15th International Workshop on Advanced Plasma Processing and Diagnostics 2012.6

　More details

Event date： 2012.6

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Sungkyunkwan University Country：Korea, Republic of
The fabrication of multi-layered Si quantum dot-sensitized solar cells for better light harvesting (Invited) Invited International conference

H. Seo, Y. wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 15th International Workshop on Advanced Plasma Processing and Diagnostics 2012.6

　More details

Event date： 2012.6

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Sungkyunkwan University Country：Korea, Republic of
Observation of growth of nano-particles using a high speed camera International conference

Y. Morita, K. Kamataki, K. Koga, G. Uchida, H. Seo, D. Yamashita, N. Itagaki, M. Shiratani

The 15th International Workshop on Advanced Plasma Processing and Diagnostics 2012.6

　More details

Event date： 2012.6

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Sungkyunkwan University Country：Korea, Republic of
Fabrication of ZnInON films with high crystallinity for photovoltaic applications International conference

K. Matsushima, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

The 15th International Workshop on Advanced Plasma Processing and Diagnostics 2012.6

　More details

Event date： 2012.6

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Sungkyunkwan University Country：Korea, Republic of
Deposition of B-doped a-Si:H films with a cluster eliminating filter International conference

Y. Hashimoto, K. Hatozaki, Y. Kim, G.u Uchida, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

The 15th International Workshop on Advanced Plasma Processing and Diagnostics 2012.6

　More details

Event date： 2012.6

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Sungkyunkwan University Country：Korea, Republic of
Discharge Power Dependence of Carbon Dust Flux in a Diverter Simulator International conference

Y. Morita, K. Nishiyama, K. Koga, G. Uchida, H. Seo, K. Kamataki, D. Yamashita, N. Itagaki,, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, H. Kersten

20th International Conference on Plasma Surface Interactions 2012 (PSI2012) 2012.5

　More details

Event date： 2012.5

Language：English Presentation type：Oral presentation (general)

Venue：Eurogress Aachen Country：Germany
Effects of Substrate DC Bias Voltage on Dust Collection Efficiency in Large Helical Device International conference

K. Koga, K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

20th International Conference on Plasma Surface Interactions 2012 (PSI2012) 2012.5

　More details

Event date： 2012.5

Language：English Presentation type：Oral presentation (general)

Venue：Eurogress Aachen Country：Germany
Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition International conference

M. Shiratani, K. Nakahara, K. Hatozaki, Y. Hashimoto, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga

2012 MRS Spring Meeting 2012.4

　More details

Event date： 2012.4

Language：English Presentation type：Oral presentation (general)

Venue：Moscone West Convention Center, San Francisco
The analysis on the optical properties of size-controllable Si nano-particles by multi-hollow plasma discharge CVD International conference

H. Seo, Y. Kim, M. Sato, Y. Wang, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

2012 MRS Spring Meeting 2012.4

　More details

Event date： 2012.4

Language：English Presentation type：Oral presentation (general)

Venue：Moscone West Convention Center, San Francisco
Optical Emission Study for Chracterization of Nanoparticle-Suppressed Plasma CVD for Microcrystalline Film Deposition International conference

Y. Kim, T. Matsunaga, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

2012 MRS Spring Meeting 2012.4

　More details

Event date： 2012.4

Language：English Presentation type：Oral presentation (general)

Venue：Moscone West Convention Center, San Francisco
Effects of incorporation of clusters generated in the plasma ignition phase on Schottky cell performance of amorphous silicon films International conference

K. Koga, K. Nakahara, K. Hatozaki, Y. Hashimoto, T. Matsunaga, H. Seo, G. Uchida, N. Itagaki, M. Shiratani

The Fourth International Workshop on Thin-Film Silicon Solar Cells (IWTFSSC-4) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Hotel Beaulac Country：Switzerland
プラズマ異方性CVDカーボン膜の硬度のイオンエネルギー依存性

浦川達也, 鳥越隆平, 徐鉉雄, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治, 節原裕一, 関根誠, 堀勝

第59回応用物理学関係連合講演会 2012.3

　More details

Event date： 2012.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan
窒化Si ナノ粒子膜を用いた量子ドット増感型太陽電池の効率波長依存性

内田儀一郎, 佐藤宗治, 徐鉉雄, 王玉亭, 鎌滝普札, 板垣奈穂, 古閑一憲, 白谷正治

第59回応用物理学関係連合講演会 2012.3

　More details

Event date： 2012.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan
Siナノ粒子量子ドット増感型太陽電池電極の最適化

王玉亭, 佐藤宗治, 徐鉉雄, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

第59回応用物理学関係連合講演会 2012.3

　More details

Event date： 2012.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan
高安定a-Si:H 膜を用いたショットキーセル特性の光照射時間依存性

波戸﨑浩介, 中原賢太, 橋本優史, 松永剛明, 山下大輔, 松崎秀文, 徐鉉雄, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

第59回応用物理学関係連合講演会 2012.3

　More details

Event date： 2012.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan
プラズマ揺らぎとプラズマ生成ナノ粒子のサイズ分布実験と理論

白谷正治, 鎌滝晋礼, 西山雄士, 森田康彦, 山下大輔, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲

第59回応用物理学関係連合講演会 2012.3

　More details

Event date： 2012.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan
ダストの生成に対する熱流束の影響とダストフラックスの制御

西山雄士, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, L H D実験グループ

第59回応用物理学関係連合講演会 2012.3

　More details

Event date： 2012.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan
クラスター除去フィルタを用いたP ドープn 型a-Si:H の製膜

橋本優史, 中原賢太, 松永剛明, 波戸崎浩介, 内田儀一郎, 徐絃雄, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

第59回応用物理学関係連合講演会 2012.3

　More details

Event date： 2012.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan
Effects of Silicon Nano-particles on Properties of Microcrystalline Silicon Thin Films Frabricated using Multi-hollow Discharge CVD Plasmas

Y. Kim, 松永剛明, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

第59回応用物理学関係連合講演会 2012.3

　More details

Event date： 2012.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：早稲田大学 Country：Japan
Three growth modes of nanoparticles generated in reactive plasmas International conference

K. Koga, K. Kamataki, S. Nunomura, S. Iwashita, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, U. Czarnetzki

DPG Spring Meeting of the Section AMOP (SAMOP) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：University of Stuttgart Country：Germany
Energy balance at the substrate during magnetron sputter deposition of ZnO International conference

S. Bornholdt, N. Itagaki, K. Kuwahara, H. Wulff, M. Shiratani, H. Kersten

DPG Spring Meeting of the Section AMOP (SAMOP) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：University of Stuttgart Country：Germany
Plasma fluctuation and plasma nanotechnologies (Invited) Invited International conference

M. Shiratani, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga

The 5th International Conference on Plasma Nanotechnology and Science (IC-PLANTS 2012) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：Freude, Inuyama International Sightseeing Center, Nagoya Country：Japan
Properties of microcrystalline silicon thin films with/without silicon nanoparticles deposited by multi-hollow plasma CVD International conference

Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 5th International Conference on Plasma Nanotechnology and Science (IC-PLANTS 2012) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：Freude, Inuyama International Sightseeing Center, Nagoya Country：Japan
A-Si:H Schottky Cells with Quite Low Light Induced Degradation Fabricated by Multi-hollow Discharge Plasma CVD International conference

M. Shiratani, K. Hatozaki, K. Nakahara, Y. Hashimoto, T. Matsunaga, D. Yamashita, H. Matsuzaki, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga

4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan
Mesurements of energy influx towards a graphite target in helicon H2 discharge plasmas using a calorimetric probe International conference

K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. MasuzakiI, K. Nishimura, A. sagara, The LHD Expreimental Group, S. Bornholdt, H. Kersten

4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan
Control of dust-particle transportation in multi-frequency capacitively coupled radio frequency discharge International conference

G. Uchida, Y. Wang, M. Sato, H. Seo, N. Itagaki, K. Koga, M. Shiratani

4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan
The improvement on the adhesion of Si nano-particles for Si quantum dot-sensitized solar cells International conference

H. Seo, M. Sato, Y. Wang, Y. Kim, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan
Optical Emission Chracteristics of Nanoparticle-supressed CVD Plasmas for Microcrystalline Silicon Film Deposition International conference

Y. Kim, T. Matsunaga, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan
Interaction between amplitude modulated plasmas and nanoparitcles growth in the plasmas International conference

K. Kamataki, K. Koga, G. Uchida, N. Itagaki, H. Seo, M. Shiratani

4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan
Etching rate of carbon films deposited by H-assisted plasma CVD International conference

T. Urakawa, R. Torigoe, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan
Effect of Hydrogen Dilution on ZnO Thin Films Fabricated via Nitrogen Mediated Crystallization International conference

I. Suhariadi, K. Matsushima, K. Kuwahara, K. Oshikawa, K. Nakahara, D. Yamashita, H. Seo, G. Uchida, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012) 2012.3

　More details

Event date： 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：中部大学 Country：Japan
Impacts of plasma fluctuation on nanostructure formation using plasmas (Invited) Invited International conference

M. Shiratani, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga

The Third International Symposium on Plasma Nanoscience (iPlasmaNano-III) 2012.2

　More details

Event date： 2012.2 - 2012.3

Language：English Presentation type：Oral presentation (general)

Venue：Malaysia and Nanyang Technological University Country：Malaysia
プラズマとナノ界面の相互作用の制御

白谷正治, 古閑一憲, 内田儀一郎, 鎌滝晋礼, 板垣奈穂

東北大学電気通信研究所共同プロジェクト研究会, 仙台"プラズマフォーラム" 2012.2

　More details

Event date： 2012.2

Language：Japanese Presentation type：Oral presentation (general)

Venue：秋保温泉岩沼屋 Country：Japan
Control of deposition profile of carbon films on fine trench using low temperature H-assisted plasma CVD method International conference

T. Urakawa, R. Torigoe, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

第８回日欧プラズマプロセス共同シンポジウム 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Oral presentation (general)

Venue：東大寺総合文化センター Country：Japan
Effects of nano-particles on multi-hollow discharge CVD plasmas for microcrystalline silicon thin film deposition International conference

Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

第８回日欧プラズマプロセス共同シンポジウム 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Oral presentation (general)

Venue：東大寺総合文化センター Country：Japan
Deposition of P-doped a-Si:H films with a cluster eliminating filter International conference

Y. Hashimoto, K. Nakahara, T. Matsunaga, K. Hatozaki, G. Uchida, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
The improvement on the combination between TiO2 and Si nano-particles for higher performance of Si quantum dot-sensitized solar cells (Invited) Invited International conference

H. Seo, M. Sato, Y. wang, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Recent progress in frontier science of interactions between plasmas and nano-interfaces (Invited) Invited International conference

M. Shiratani, K. Koga, K. Kamataki, G. Uchida, H. Seo, N. Itagaki

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Optimization of Redox Electrolyte for Higher Performance of Si Quantum Dot-sensitized Solar cells International conference

Y. Wang, M. Sato, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
High stabilization of a-Si:H films by discharge plasma control International conference

K. Hatozaki, K. Nakahara, Y. Hashimoto, T. Matsunaga, D. Yamashita, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Fabrication of ZnO-Based Transparent Conducting Films on Buffer Layers Crystallized via Nitrogen Mediation International conference

K. Oshikawa, I. Suhariadi, K. Kuwahara, D. Yamashita, Seo H., G. Uchida, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Fabrication of Novel Oxynitride Semiconductors by Magnetron Sputtering for Photovoltaic application International conference

K. Matsushima, N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Effects on nano-patricls on crystalline orientation of microcrystalline silicon films for solar cells International conference

T. Matsunaga, Y. Kim, K. Koga, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Effects of Nano-particles on Properties of Microcrystalline Silicon Thin Films Fabricated using Multi-hollow Discharge CVD Plasmas International conference

Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Effects of deposition temperature on the properties of ZnO films fabricated via nitrogen mediation International conference

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Effect of N2/Ar Flow Rate Gas Ratio on the AZO Thin Films with Buffer Layers Deposited via Nitrogen Mediated Crystallization International conference

I. Suhariadi, N. Itagaki, K. Kuwahara, K. Oshikawa, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, K. Nakahara, M. Shiratani

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Dust Removal by Applying Bias Voltage to Reactor Wall in Large Helical Device International conference

K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Discharge power dependence of dust flux in helicon discharge reactor International conference

Y. Morita, K. Nishiyama, K. Koga, G. Uchida, H. Seo, K. Kamataki, D. Yamashita, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, H. Kersten

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Deposition profile control of carbon films on trench structure using plasma anisotropic CVD method International conference

T. Urakawa, R. Torigoe, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Deposition of p-type a-Si:H using SiH4+ B10H14 multi-hollow discharge plasma CVD as a window layer for pin cell International conference

K. Nakahara, K. Hatozaki, Y. Hashimoto, T. Matsunaga, M. Sato, H. Matsuzaki, G. Uchida, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani

The 14th International Workshop on Advanced Plasma Processing and Diagnostics 2012.1

　More details

Event date： 2012.1

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Kyushu University Country：Japan
Performance of quantum dot sensitized solar cells with nitridated Si nanoparticle films International conference

G. Uchida, M. Sato, H. Seo, Y. Wang, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

第21回日本MRS学術シンポジウム 2011.12

　More details

Event date： 2011.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜開港記念会館 Country：Japan
Stable a-Si:H Schottky Cells Fabricated by Multi-hollow Discharge Plasma CVD International conference

M. Shiratani, K. Nakahara, K. Hatozaki, H. Seo, G. Uchida, N. Itagaki, K. Kamataki, K. Koga

第21回日本MRS学術シンポジウム 2011.12

　More details

Event date： 2011.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜開港記念会館 Country：Japan
Performance Enhancement of Si Quantum Dot-sensitized Solar Cells by Surface Modification Using ZnO barrier layer and 400nm TiO2 Particles International conference

Y. Wang, M. Sato, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

第21回日本MRS学術シンポジウム 2011.12

　More details

Event date： 2011.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜開港記念会館 Country：Japan
ZnO:Al Thin Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization: Effects of N2/Ar Gas Flow Rate Ratio International conference

I. Suhariadi, N. Itagaki, K. Kuwahara, K. Oshikawa, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, K. Nakahara, M. Shiratani

第21回日本MRS学術シンポジウム 2011.12

　More details

Event date： 2011.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜開港記念会館 Country：Japan
反応性プラズマにおけるナノ粒子生成に対する放電電力摂動の効果

鎌滝晋礼, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治

プラズマ・核融合学会第15回九州・沖縄・山口支部大会 2011.12

　More details

Event date： 2011.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大分大学工学部 Country：Japan
水素プラズマ-カーボン壁相互作用によるダスト生成に対する壁への熱流速の影響

森田康彦, 西山雄士, 山下大輔, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 徐鉉雄, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ, S. BORNHOLDT, H. KERSTEN

プラズマ・核融合学会第15回九州・沖縄・山口支部大会 2011.12

　More details

Event date： 2011.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大分大学工学部 Country：Japan
クラスタ取込抑制マルチホロー放電プラズマCVD法で作製した光安定水素化アモルファスシリコン薄膜のショットキーセル特性

波戸﨑浩介, 中原賢太, 橋本優史, 松永剛明, 山下大輔, 松崎秀文, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会第15回九州・沖縄・山口支部大会 2011.12

　More details

Event date： 2011.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：大分大学工学部 Country：Japan
水素プラズマのグラファイト壁への熱フラックスとダスト生成

西山雄士, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ, S. Bornholdt, H. Kersten

ＰＷＩ合同研究会 2011.12

　More details

Event date： 2011.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：核融合科学研究所, 岐阜 Country：Japan
Effects of nano-particles on (220) crystal orientation of microcrystallite silicon thin films International conference

T. Matsunaga, Kim Y., K. Koga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21) 2011.12

　More details

Event date： 2011.11 - 2011.12

Language：English Presentation type：Oral presentation (general)

Venue：Pacifico Yokohama Country：Japan
Properties and performance of si quantum dot-sensitized solar cells with low temperature titania paste International conference

Y. Wang, M. Sato, T. Matsunaga, N. Itagaki, H. Seo, G. Uchida, K. Koga, M. Shiratani

The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21) 2011.11

　More details

Event date： 2011.11 - 2011.12

Language：English Presentation type：Oral presentation (general)

Venue：Pacifico Yokohama Country：Japan
Defect density of cluster-free a-si:h films deposited by multi-hollow discharge plasma CVD International conference

K. Nakahara, K. Hatozaki, M. Sato, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21) 2011.11

　More details

Event date： 2011.11 - 2011.12

Language：English Presentation type：Oral presentation (general)

Venue：Pacifico Yokohama Country：Japan
A study of optical emission spectroscopy on microcrystalline silicon film using multi-hollow discharge plasma CVD International conference

Y. Kim, T. Matsunaga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21) 2011.11

　More details

Event date： 2011.11 - 2011.12

Language：English Presentation type：Oral presentation (general)

Venue：Pacifico Yokohama Country：Japan
Zno films with buffer layers crystallized via nitrogen mediation: Effects of deposition temperature of buffer layers International conference

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21) 2011.12

　More details

Event date： 2011.11 - 2011.12

Language：English Presentation type：Oral presentation (general)

Venue：Pacifico Yokohama Country：Japan
Control of size distribution of nanoparticles in reactive plasmas by using AM rf discharges

M. Shiratani, G. Uchida, N. Itagaki, K. Kamataki, K. Koga

12th Workshop on Fine Particle Plasmas (第12回微粒子プラズマ研究会) 2011.11

　More details

Event date： 2011.11

Language：English Presentation type：Symposium, workshop panel (public)

Venue：核融合科学研究所, 岐阜 Country：Japan
窒素添加結晶化法により作製したエピタキシャル酸化亜鉛薄膜の特性の成膜温度依存性

松島宏一, 板垣奈穂, 桑原和成, 山下大輔, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

平成23年度応用物理学会九州支部学術講演会 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：鹿児島大学 Country：Japan
クラスター除去フィルタを用いたP ドープa-Si;H の製膜ドープ量依存性

橋本優史, 中原賢太, 松永剛明, 波戸崎浩介, 内田儀一郎, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

平成23年度応用物理学会九州支部学術講演会 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：鹿児島大学 Country：Japan
LHDおよびLHDを模擬したヘリコン装置における水素ガスとグラファイトの相互作用により生じたダストの基板へのフラックスの基板バイアス電圧依存性

森田康彦, 西山雄士, 山下大輔, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

平成23年度応用物理学会九州支部学術講演会 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：鹿児島大学 Country：Japan
Effects of substrate bias voltage on dust collection efficiency

K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, LHD Experimental Group

12th Workshop on Fine Particle Plasmas (第12回微粒子プラズマ研究会) 2011.11

　More details

Event date： 2011.11

Language：English Presentation type：Symposium, workshop panel (public)

Venue：核融合科学研究所, 岐阜 Country：Japan
Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD International conference

K. Kamataki, K. Koga, G. Uchida, H. Seo, N. Itagaki, M. Shiratani

Plasma Conference 2011 (PLASMA2011) 2011.11

　More details

Event date： 2011.11

Language：English Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan

Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD
低温プラズマ異方性CVDを用いた微細トレンチ上面への自己組織カーボンマスク形成 International conference

古閑一憲, 浦川達也, 内田儀一郎, 徐鉉雄, 鎌滝晋礼, 板垣奈穂, 白谷正治, 節原裕一, 関根誠, 堀勝

Plasma Conference 2011 (PLASMA2011) 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan
Si量子ドット増感型太陽電池の電解液最適化 International conference

王玉亭, 佐藤宗治, 徐鉉雄, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

Plasma Conference 2011 (PLASMA2011) 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan
微結晶シリコン薄膜作製用マルチホロー放電プラズマに対するナノ粒子の影響 International conference

松永剛明, 金淵元, 古閑一憲, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 白谷正治

Plasma Conference 2011 (PLASMA2011) 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan
高密度水素プラズマとカーボン壁間のプラズマ・壁相互作用により形成されるカーボンダスト粒子の局所バイアス電圧印加による捕集 International conference

西山雄士, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD 実験グループ, S. Bornholdt, H. Kersten

Plasma Conference 2011 (PLASMA2011) 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan
高速ガス流マルチホロープラズマCVD法を用いた高光安定クラスタフリーa-Si:H膜の作製 International conference

波戸﨑浩介, 中原賢太, 橋本優史, 松永剛明, 山下大輔, 松崎秀文, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

Plasma Conference 2011 (PLASMA2011) 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan
マルチホロー放電プラズマで作製した微結晶シリコン膜へのラジカルフラックス評価 International conference

金淵元, 松永剛明, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

Plasma Conference 2011 (PLASMA2011) 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan
プラズマCVDで成膜したSi薄膜へのナノ粒子含有の効果 International conference

白谷正治, 金淵元, 松永剛明, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲

Plasma Conference 2011 (PLASMA2011) 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan
スパッタリングプラズマへの窒素ガス添加のエピキシャルZnO薄膜物性に対する効果 International conference

桑原和成, 中原賢太, 山下大輔, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

Plasma Conference 2011 (PLASMA2011) 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan
クラスター除去フィルタを用いたクラスターフリー水素化アモルファスシリコンの製膜 International conference

中原賢太, 波戸﨑浩介, 橋本優史, 松永剛明, 佐藤宗治, 山下大輔, 松崎秀文, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

Plasma Conference 2011 (PLASMA2011) 2011.11

　More details

Event date： 2011.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：石川県立音楽堂 Country：Japan
Deposition profile control of carbon films on trenched substrate by simultaneous plasma CVD and plasma etching International conference

M. Shiratani, T. Urakawa, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, Y. Setsuhara, M. Sekine, M. Hori

64th Gaseous Electronics Conference 2011.11

　More details

Event date： 2011.11

Language：English Presentation type：Oral presentation (general)

Venue：Salt Palace Convention Center, Salt Lake City
Performance enhancement of Si quantum dot-sensitized solar cells by surface modification using ZnO barrier layer International conference

Y. Wang, M. Sato, H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 33rd International Symposium on Dry Process (DPS 2011) 2011.11

　More details

Event date： 2011.11

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto Garden Palace Country：Japan
Combinatorial Si Film Deposition by Multihollow Discharge Plasma CVD International conference

M. Shiratani, Y. Kim, T. Matsunaga, K. Nakahara, G. Uchida, K. Kamataki, N. Itagaki, K. Koga

第15回薄膜国際会議 (ICTF-15) 2011.11

　More details

Event date： 2011.11

Language：English Presentation type：Oral presentation (general)

Venue：Kyoto TERRSA Country：Japan
Quantum dot sensitized solar cells using nanoparticles of Si compounds fabricated by multihollow discharge plasma CVD International conference

M. Shiratani, G. Uchida, M. Sato, Y. Wang, K. Koga, N. Itagaki

AVS 58th International Symposium & Exhibition 2011.11

　More details

Event date： 2011.10 - 2011.11

Language：English Presentation type：Oral presentation (general)

Venue：Nashville, Tennessee
ZnOバリア層を用いたSiナノ粒子量子ドット増感型太陽電池

王玉亭, 佐藤宗治, 徐鉉雄, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

第3回薄膜太陽電池セミナー 2011.10

　More details

Event date： 2011.10

Language：Japanese Presentation type：Oral presentation (general)

Venue：ラフレさいたま Country：Japan
Impacts of Plasma Fluctuations in Reactive Plasmas (Invited) Invited International conference

K. Kamataki, K. Koga, G. Uchida, N. Itagaki, M. Shiratani

BIT's 1st Annual World Congress of Nano-S&T 2011.10

　More details

Event date： 2011.10

Language：English Presentation type：Oral presentation (general)

Venue：World EXPO Center, Dalian Country：China
Fabrication of Si Nano-particles and Their Application to Quantum Dot Sensitized Solar Cells International conference

G. Uchida, M. Sato, Y. Wang, T. Matsunaga, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

BIT's 1st Annual World Congress of Nano-S&T 2011.10

　More details

Event date： 2011.10

Language：English Presentation type：Oral presentation (general)

Venue：World EXPO Center, Dalian Country：China
Fabrication of Si Nano-particles and Their Application to Quantum Dot Sensitized Solar Cells International conference

G. Uchida, M. Sato, Y. Wang, T. Matsunaga, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

BIT's 1st Annual World Congress of Nano-S&T 2011.10

　More details

Event date： 2011.10

Language：English Presentation type：Oral presentation (general)

Venue：World EXPO Center, Dalian Country：China
プラズマCVD中におけるナノ粒子成長に対するプラズマ揺らぎの効果

鎌滝晋礼, 古閑一憲, 内田儀一郎,　板垣奈穂, 山下大輔, 松崎秀文, 白谷正治

プラズマエレクトロニクス分科会２０周年（研究会創設２５周年）記念特別シンポジウム 2011.10

　More details

Event date： 2011.10

Language：Japanese Presentation type：Oral presentation (general)

Venue：名古屋大学 Country：Japan
Deposition of Si Nano-particle Films for Quantum Dot Sensitized Solar Cells International conference

G. Uchida, M. Sato, Y. Wang, T. Matsunaga, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Low Carbon Earth Summit (LCES-2011) 2011.10

　More details

Event date： 2011.10

Language：English Presentation type：Oral presentation (general)

Venue：Dalian city Country：China
高周波放電のAM変調によるナノ粒子サイズ分布の制御

白谷正治, 鎌滝晋礼, 西山雄士, 古閑一憲, 内田儀一郎, 板垣奈穂

平成23年度（第64回）電気関係学会九州支部連合大会 2011.9

　More details

Event date： 2011.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：佐賀大学 Country：Japan
Deposition of quantum dot thin films using Si nanoparticles with surface nitridation (Invited) Invited International conference

M. Shiratani, K. Yamamoto, M. Sato, Y. Kawashima, K. Nakahara, K. Kamataki, N. Itagaki, G. Uchida, K. Koga

The 8th Asian-European International Conference on Plasma Surface Engineering (AEPSE2011) 2011.9

　More details

Event date： 2011.9

Language：English Presentation type：Oral presentation (general)

Venue：Furama Hotel, Dalian Country：China
Effects of Si nano-particle incorporation on properties of microcrystalline silicon thin films studied by multi-hollow discharge CVD International conference

Y. Kim, T. Matsunaga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

The 8th Asian-European International Conference on Plasma Surface Engineering (AEPSE2011) 2011.9

　More details

Event date： 2011.9

Language：English Presentation type：Oral presentation (general)

Venue：Furama Hotel, Dalian Country：China
ZnOバリア層を用いたSiナノ粒子量子ドット増感型太陽電池

王玉亭, 佐藤宗治, 徐鉉雄, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

第5回プラズマエレクトロニクスインキュベーションホール 2011.9

　More details

Event date： 2011.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
水素プラズマとカーボン壁間のプラズマ・壁相互作用により形成されるナノダストの基板へのフラックスの基板バイアスによる制御

西山雄士, 森田康彦, 山下大輔, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

第5回プラズマエレクトロニクスインキュベーションホール 2011.9

　More details

Event date： 2011.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
エピタキシャル酸化亜鉛薄膜作製における窒素添加効果

桑原和成, 板垣奈穂, 中原賢太, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 古閑一憲, 白谷正治

第5回プラズマエレクトロニクスインキュベーションホール 2011.9

　More details

Event date： 2011.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan
Frontier science of interactions between plasmas and nano‐interfaces (Plenary) Invited International conference

M. Shiratani, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga

(ICPAT2011)4th International Conference on Advanced Plasma Technologies 2011.9

　More details

Event date： 2011.9

Language：English Presentation type：Oral presentation (general)

Venue：Hotel Salinera Strunjan Country：Slovenia
マルチホロー放電プラズマCVDを用いて作製したクラスターフリーa-Si:Hの膜質の基板温度依存性

中原賢太, 波戸﨑浩介, 松永剛明, 佐藤宗治, 内田儀一郎, 山下大輔, 松崎秀文, 板垣奈穂, 古閑一憲, 白谷正治

第72回応用物理学会学術講演会 2011.9

　More details

Event date： 2011.8 - 2011.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：山形大学 Country：Japan
水素プラズマとグラファイトの相互作用により発生したカーボンナノ粒子の基板バイアス電圧印加による配置制御

西山雄士, 山下大輔, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

第72回応用物理学会学術講演会 2011.8

　More details

Event date： 2011.8 - 2011.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：山形大学 Country：Japan
Impacts of Plasma Fluctuations on Growth of Nano-Particles in Reactive Plasmas International conference

K. Kamataki , H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

the XXX International Conference on Phenomena in Ionized Gases（ICPIG） 2012 Conference 2011.8

　More details

Event date： 2011.8 - 2011.9

Language：English Presentation type：Oral presentation (general)

Venue：Queen's University, Belfast Country：Ireland
Combinatorial study of substrate temperature dependence on properties of silicon films deposited using multihollow discharge plasma CVD International conference

Y. Kim, T. Matsunaga, Y. Kawashima, D. Yamashita, K. Kamataki, N. Itagaki, G.u Uchida, K. Koga, M. Shiratani

The 20th International Symposium on Plasma Chemistry （ISPC20） 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Oral presentation (general)

Venue：Loews Hotel, Philadelphia
Highly stable schottky cells using cluster-free a-Si:H deposited by multi-hollow discharge plasma CVD method International conference

K. Hatozaki, K. Nakahara, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani

The 13th International Workshop on Advanced Plasma Processing and Diagnostics 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Daejeon Convention Center Country：Korea, Republic of
Innovative Si solar cells: new approaches and demonstration of devices (Invited) Invited International conference

M. Shiratani, K. Koga, G. Uchida, N. Itagaki

The 13th International Workshop on Advanced Plasma Processing and Diagnostics 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Daejeon Convention Center Country：Korea, Republic of
Control of radial density profile of nano-particle produced in reactive plasma by amplitude modulation of rf discharge voltage International conference

K. Kamataki, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

第24回プラズマ材料科学シンポジウム (SPSM-24） 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
Fluctuation Control towards Ultimate Plasma Nanotechnologies (Keynote) Invited International conference

M. Shiratani, K. Koga, G. Uchida, N. Itagaki, K. Kamataki

第24回プラズマ材料科学シンポジウム (SPSM-24） 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
Effects of nanoparticle incorporation on crystalline orientation of microcrystalline silicon films prepared by multi-hollow plasma discharge CVD International conference

Y. Kim, T. Matsunaga, K. Nakahara, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

第24回プラズマ材料科学シンポジウム (SPSM-24） 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Oral presentation (general)

Venue：大阪大学 Country：Japan
Deposition of Si Nano-particle Films and its Application to Quantum dot Sensitized Solar Cells International conference

G. Uchida, M. Sato, Y. Wang, K. Nakahara, T. Matsunaga, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

2011 International Workshop on Advanced Electrical Engineering and Related Topics 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Ruhr-University Bochum Country：Germany
Surface modification with TiO2 films for Si quantum dot-sensitized solar cells International conference

Y. Wang, M. Sato, T. Matsunaga, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

2011 International Workshop on Advanced Electrical Engineering and Related Topics 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Ruhr-University Bochum Country：Germany
Nanoparticle formation due to interactions between H2 plasmas and graphite International conference

K. Nishiyama, D. Yamashita, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group

2011 International Workshop on Advanced Electrical Engineering and Related Topics 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Ruhr-University Bochum Country：Germany
Effects of solid-phase crystallization temperature on properties of epitaxial ZnO films International conference

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

2011 International Workshop on Advanced Electrical Engineering and Related Topics 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Symposium, workshop panel (public)

Venue：Ruhr-University Bochum Country：Germany
Effects of surface treatment on performance of Si nano-particle quantum dot solar cells International conference

K. Koga, G. Uchida, M. Sato, Y. Wang, K. Nakahara, K. Kamataki, N. Itagaki, M. Shiratani

The 3rd International Conference on Microelectronics and Plasma Technology (ICMAP-2011) 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Oral presentation (general)

Venue：Furama Hotel, Dalian Country：China
Process Window Evaluation of Microcrystalline Silicon Films with and without Incorporating Clusters using Multi-hollow Discharge Plasma CVD International conference

T. Matsunaga, Yeon Won Kim, K. Koga, K. Nakahara, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

The 3rd International Conference on Microelectronics and Plasma Technology (ICMAP-2011) 2011.7

　More details

Event date： 2011.7

Language：English Presentation type：Oral presentation (general)

Venue：Furama Hotel, Dalian Country：China
Performance enhancement of Si quantum dot-sensitized solar cells by surface coating

Y. Wang, M. Sato, T. Matsunaga, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

九州表面・真空研究会2011（兼第16回九州薄膜表面研究会） 2011.6

　More details

Event date： 2011.6

Language：English Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan
マルチホロー放電プラズマCVD による微結晶シリコン製膜プロセスウィンドウのガス圧力依存性

松永剛明, 金淵元, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

九州表面・真空研究会2011（兼第16回九州薄膜表面研究会） 2011.6

　More details

Event date： 2011.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan
高光安定a-Si太陽電池の開発

白谷正治, 古閑一憲, 板垣奈穂, 内田儀一郎

第3回薄膜コンソ技術委員会 2011.5

　More details

Event date： 2011.5

Language：Japanese Presentation type：Oral presentation (general)

Venue：産総研関西センター, 大阪 Country：Japan
High quality epitaxial ZnO films grown on solid-phase crystallized buffer layers International conference

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, and M. Shiratani

European Materials Research Society 2011 Spring Meeting 2011.5

　More details

Event date： 2011.5

Language：English Presentation type：Oral presentation (general)

Venue：Congress Center, Nice Country：France
Transport control of carbon nanoparticles in plasmas by biasing wall potential for plasma nano-factories International conference

K. Nishiyama, H. Miyata, D. Yamashita, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group

European Materials Research Society 2011 Spring Meeting 2011.5

　More details

Event date： 2011.5

Language：English Presentation type：Oral presentation (general)

Venue：Congress Center, Nice Country：France
振幅変調パルス放電を用いてトレンチ基板上に堆積させたナノ粒子の付着形状

宮田大嗣, 西山雄士, 岩下伸也, 松崎秀文, 内田儀一郎, 板垣奈穂, 鎌滝晋礼, 古閑一憲, 白谷正治

第58回応用物理学関係連合講演会 2011.3

　More details

Event date： 2011.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
水素プラズマとグラファイトの相互作用により発生したナノダストの基板へのフラックスの基板バイアス電圧依存性

西山雄士, 宮田大嗣, 山下大輔, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男

第58回応用物理学関係連合講演会 2011.3

　More details

Event date： 2011.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
DM-DMOS微粒子プラズマ中におけるAr準安定粒子密度の時間変動

内田儀一郎, 宮田大嗣, 鎌滝晋礼, 板垣奈穂, 古閑一憲, Nader Sadeghi, 白谷正治

第58回応用物理学関係連合講演会 2011.3

　More details

Event date： 2011.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
Deposition of carbon films on top surface of fine trenches at 100℃ using a plasma anisotropic CVD method

古閑一憲, 野村卓也, 浦川達也, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 白谷正治, 節原裕一, 関根誠, 堀勝

第58回応用物理学関係連合講演会 2011.3

　More details

Event date： 2011.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
マルチホロー放電プラズマCVD 法を用いたラジカルフラックス評価

松永剛明, 川嶋勇毅, 古閑一憲, 中原賢太, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 白谷正治

第58回応用物理学関係連合講演会 2011.3

　More details

Event date： 2011.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
ダブルマルチホロー放電による表面窒化Siナノ粒子含有薄膜のコンビナトリアル成膜

山本康介, 佐藤宗治, 川嶋勇毅, 中原賢太, 山下大輔, 松崎秀文, 鎌滝晋礼, 板垣奈穂, 内田儀一郎, 古閑一憲, 白谷正治

第58回応用物理学関係連合講演会 2011.3

　More details

Event date： 2011.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
SiH4+B10H14マルチホロー放電プラズマCVDによるp型a-Si:Hの製膜

中原賢太, 川嶋勇毅, 松永剛明, 佐藤宗治, 山本康介, 中村ウィリアム誠, 内田儀一郎, 山下大輔, 松崎秀文, 板垣奈穂, 古閑一憲, 白谷正治

第58回応用物理学関係連合講演会 2011.3

　More details

Event date： 2011.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
Combinatorial study on deposition profiles of silicon thin films deposited using high gas pressure multi-hollow discharge plasma CVD

金淵元, 松永剛明, 川嶋勇毅, 山下大輔, 鎌滝晋礼, 板垣奈穂, 内田儀一郎, 古閑一憲, 白谷正治

第58回応用物理学関係連合講演会 2011.3

　More details

Event date： 2011.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
量子ドット増感太陽電池の電流密度-電圧特性の膜堆積による影響

佐藤宗治, 川嶋勇毅, 山本康介, 中原賢太, 松永剛明, 山下大輔, 松崎秀文, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, 近藤道雄

第58回応用物理学関係連合講演会 2011.3

　More details

Event date： 2011.3

Language：Japanese Presentation type：Oral presentation (general)

Venue：神奈川工科大学 Country：Japan
Combinatorial deposition of surface nitridated Si nano-particle composite films by double multi-hollow discharges International conference

M. Sato, K. Yamamoto, Y. Kawashima, K. Nakahara, T. Matsunaga, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. shiratani

The 4th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 20) 2011.3

　More details

Event date： 2011.3

Language：English Presentation type：Oral presentation (general)

Venue：Takayama Public Cultural Hall, Gifu Country：Japan
Ultra Low Resistive NM Thick AZO Films Deposited by Magnetron Sputtering Using Solid Phase Crystallization International conference

M. Shiratani, N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga

The 4th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 20) 2011.3

　More details

Event date： 2011.3

Language：English Presentation type：Oral presentation (general)

Venue：Takayama Public Cultural Hall, Gifu Country：Japan
Process window of microcrystalline silicon films deposited using multi-hollow discharge plasma CVD International conference

T. Matsunaga, Y. Kim, Y. Kawashima, K. Koga, D. Yamashita, K. Nakahara, M. Sato, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

The 4th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 20) 2011.3

　More details

Event date： 2011.3

Language：English Presentation type：Oral presentation (general)

Venue：Takayama Public Cultural Hall, Gifu Country：Japan
Effects of substrate temperature on properties of μc-Si:H films deposited using multi-hollow discharge plasma CVD International conference

Y. Kim, T. Matsunaga, Y. Kawashima, K. Nakahara, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 4th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 20) 2011.3

　More details

Event date： 2011.3

Language：English Presentation type：Oral presentation (general)

Venue：Takayama Public Cultural Hall, Gifu Country：Japan
Deposition of P-doped a-Si:H films of a low defect density using SiH4+PH3 multi-hollow discharge plasma CVD International conference

K. Nakahara, Y. Kawashima, Y. Kim, M. Sato, T. Matsunaga, K. Yamamoto, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 4th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS 20) 2011.3

　More details

Event date： 2011.3

Language：English Presentation type：Oral presentation (general)

Venue：Takayama Public Cultural Hall, Gifu Country：Japan
Deposition of ?c-Si films using plasma CVD under high gas pressure conditions International conference

T. Matsunaga, Y. Kawashima, Y. Kim, K. Koga, K. Nakahara, M. Sato, G. Uchida, N. Itagaki, K. Kamataki, M. Shiratani

3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials(ISPlasma20) 2011.3

　More details

Event date： 2011.3

Language：English Presentation type：Oral presentation (general)

Venue：名古屋工業大学 Country：Japan
Optical and electrical properties of nitridated Si nano-particle composite thin films deposited by double multi-hollow discharges CVD International conference

G. Uchida, K. Yamamoto, M. Sato, Y. Kawashima, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials(ISPlasma20) 2011.3

　More details

Event date： 2011.3

Language：English Presentation type：Oral presentation (general)

Venue：名古屋工業大学 Country：Japan
Generation of nitridated silicon nano-particles by double multi-hollow discharge CVD International conference

M. Sato, K. Yamamoto, Y. Kawashima, K. Nakahara, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials(ISPlasma20) 2011.3

　More details

Event date： 2011.3

Language：English Presentation type：Oral presentation (general)

Venue：名古屋工業大学 Country：Japan
Effect of substrate temperature on microcrystalline silicon thin films deposited using plasma enhanced CVD International conference

Y. Kim, T. Matsunaga, Y. Kawashima, M. Sato, K. Nakahara, K. Yamamoto, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials(ISPlasma20) 2011.3

　More details

Event date： 2011.3

Language：English Presentation type：Oral presentation (general)

Venue：名古屋工業大学 Country：Japan
Deposition of B-doped a-Si:H films using SiH4+B10H14 multi-hollow discharge plasma CVD for pin solar cell International conference

K. Nakahara, Y. Kawashima, Y. Kim, M. Sato, T. Matsunaga, K. Yamamoto, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials(ISPlasma20) 2011.3

　More details

Event date： 2011.3

Language：English Presentation type：Oral presentation (general)

Venue：名古屋工業大学 Country：Japan
Deposition of Si nano-particle quantum dot thin film by multi-hollow discharge and their application to the third generation hotovoltaics International conference

G. Uchida, K. Yamamoto, M. Sato, Y. Kawashima, K. Kamataki, N. Itagaki, K. Koga, M. shiratani

2nd International Workshop on Plasma Nano-Interfaces and Plasma Characterization (若手国際ワークショップ) 2011.3

　More details

Event date： 2011.3

Language：English Presentation type：Oral presentation (general)

Venue：The hotel Raj Country：Slovenia
Generation and Surface Modification of Si nano-particles using SiH4/H2 and N2 multi-hollow discharges and their application to the third generation photovoltaics (Invited) Invited International conference

K. Koga, G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Kamataki, N. Itagaki, M. Shiratani

Ｉnternational Conference on Advances in Condensed and Nano Materials-2011(ICACNM-2011) 2011.2

　More details

Event date： 2011.2

Language：English Presentation type：Oral presentation (general)

Venue：Panjab University Country：India
LHD第一壁へのダストフラックスに対する壁電位の効果

白谷正治, 宮田大嗣, 西山雄士, 山下大輔, 鎌滝晋礼, 内田儀一朗, 板垣奈穂, 古閑一憲, 芦川直子, 増崎貴, 西村清彦, 相良明男, LHD実験グループ

核融合科学研究所一般共同研究成果報告会(NIFS) 2011.1

　More details

Event date： 2011.1

Language：Japanese Presentation type：Oral presentation (general)

Venue：山陽館, 大分 Country：Japan
Combinatorial study on deposition profiles of silicon thin films deposited using multi-hollow discharge plasma CVD International conference

Y. Kim, T. Matsunaga, Y. Kawashima, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

The 12th International Workshop on Advanced Plasma Processing and Diagnostics 2011.1

　More details

Event date： 2011.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年記念講堂 Country：Japan
Surface reactions of P-doped a-Si:H films deposition using SiH4+PH3 International conference

D. Yamashita, K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, H. Matsuzaki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 12th International Workshop on Advanced Plasma Processing and Diagnostics 2011.1

　More details

Event date： 2011.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年記念講堂 Country：Japan
Radical flux evaluation of high pressure silane plasma CVD using multi-hollow discharges (Invited) Invited International conference

K. Koga, T. Matsunaga, Y. Kawashima, Y. Kim, K. Nakahara, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

The 12th International Workshop on Advanced Plasma Processing and Diagnostics 2011.1

　More details

Event date： 2011.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年記念講堂 Country：Japan
Property evaluation of silicon films deposited using high gas pressure multi-hollow discharge plasma CVD International conference

T. Matsunaga, Y. Kawashima, Y. Kim, K. Koga, K. Nakahara, M. Sato, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

The 12th International Workshop on Advanced Plasma Processing and Diagnostics 2011.1

　More details

Event date： 2011.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年記念講堂 Country：Japan
Photoluminescence measurement of nitridated Si particles generated by double multi-hollow discharge PECVD International conference

M. Sato, K. Yamamoto, Y. Kawashima, K. Nakahara, T. Matsunaga, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

The 12th International Workshop on Advanced Plasma Processing and Diagnostics 2011.1

　More details

Event date： 2011.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年記念講堂 Country：Japan
Optical bandgap energy of B-doped a-Si:H films depositedby SiH4+B10H14multi-hollow discharge plasma CVD International conference

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 12th International Workshop on Advanced Plasma Processing and Diagnostics 2011.1

　More details

Event date： 2011.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年記念講堂 Country：Japan
Low resistivity AZO films fabricated on solid phase crystallized ZnO buffer layer: solid phase crystallization temperature dependence International conference

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani

The 12th International Workshop on Advanced Plasma Processing and Diagnostics 2011.1

　More details

Event date： 2011.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年記念講堂 Country：Japan
Generation of nitridated Si particle composite films by double multi-hollow plasma CVD method International conference

K. Yamamoto, Y. Kawashima, M. Sato, K. Nakahara, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani

The 12th International Workshop on Advanced Plasma Processing and Diagnostics 2011.1

　More details

Event date： 2011.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年記念講堂 Country：Japan
Flux measurements of carbon dust particles towards biased substrates in H2 helicon discharge plasmas International conference

K. Nishiyama, H. Miyata, D. Yamashita, K. Kamataki, G.u Uchida, N. Itagaki, K. Koga, M. Shiratani

The 12th International Workshop on Advanced Plasma Processing and Diagnostics 2011.1

　More details

Event date： 2011.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年記念講堂 Country：Japan
Electrical characteristics of Si nanoparticles/ruthenium dye hybrid sensitized solar cells International conference

Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

The 12th International Workshop on Advanced Plasma Processing and Diagnostics 2011.1

　More details

Event date： 2011.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年記念講堂 Country：Japan
Deposition of SiOx-CH3 nano-particles on trench substrates using pulse RF discharges International conference

H. Miyata, S. Iwashita, K. Nishiyama, D. Yamashita, H. Matsuzaki, G. Uchida, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani

The 12th International Workshop on Advanced Plasma Processing and Diagnostics 2011.1

　More details

Event date： 2011.1

Language：English Presentation type：Oral presentation (general)

Venue：九州大学医学部百年記念講堂 Country：Japan
Deposition rate of SiH4+PH3 multi-hollow plasma CVD a-Si:H films

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

第20回日本MRS学術シンポジウム 2010.12

　More details

Event date： 2010.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan
Microcrystalline silicon films deposited by using multi-hollow discharge plasma CVD under high pressure depletion conditions

T. Matsunaga, Y. Kawashima, K. Koga, K. Nakahara, G. Uchida, N. Itagaki, K. Kamataki, M. Shiratani

第20回日本MRS学術シンポジウム 2010.12

　More details

Event date： 2010.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan
Investigation of Interaction between of Growth of Nano Particles and Plasma Fluctuations in Plasma CVD

K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

第20回日本MRS学術シンポジウム 2010.12

　More details

Event date： 2010.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan
Generation of nitridated silicon particles and the application to solar cell

G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

第20回日本MRS学術シンポジウム 2010.12

　More details

Event date： 2010.12

Language：English Presentation type：Oral presentation (general)

Venue：横浜市開港記念会館 Country：Japan
マルチホロー放電プラズマCVD を用いた第三世代太陽電池用結晶シリコンナノ粒子のサイズ制御

川嶋勇毅, 佐藤宗治, 山本康介, 中原賢太, 松永剛明, 山下大輔, 松崎秀文, 内田儀一郎, 板垣奈穂, 古閑一憲, 鎌滝晋礼, 近藤道雄, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第14回支部大会 2010.12

　More details

Event date： 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
水素プラズマとグラファイトとの相互作用により発生したダストのフラックスの壁電位依存性

西山雄士, 宮田大嗣, 山下大輔, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第14回支部大会 2010.12

　More details

Event date： 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
振幅変調パルス放電を用いた微細パターン基板へのナノ粒子の堆積

宮田大嗣, 西山雄士, 岩下伸也, 山下大輔, 松崎秀文, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第14回支部大会 2010.12

　More details

Event date： 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
マルチホロー放電プラズマＣＶＤを用いたμc-Si:Hのコンビナトリアル製膜によるSiH3,Hフラックス解析

松永剛明, 川嶋勇毅, 金淵元, 古閑一憲, 中原賢太, 佐藤宗治, 山下大輔, 内田儀一郎, 板垣奈穂, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第14回支部大会 2010.12

　More details

Event date： 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
プラズマCVD中のナノ粒子成長に対するプラズマ揺動の影響

鎌滝晋礼, 宮田大嗣, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第14回支部大会 2010.12

　More details

Event date： 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
ダブルマルチホロー放電プラズマを用いた表面窒化Siナノ粒子含有薄膜の作製

山本康介, 佐藤宗治, 川嶋勇毅, 中原賢太, 山下大輔, 松崎秀文, 板垣奈穂, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第14回支部大会 2010.12

　More details

Event date： 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
ダブルマルチホロー放電によるN2/SiH4プラズマの独立制御

佐藤宗治, 山本康介, 川嶋勇毅, 中原賢太, 山下大輔, 松崎秀文, 板垣奈穂, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第14回支部大会 2010.12

　More details

Event date： 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
スパッタリング法を用いた新規固相結晶化法によるエピタキシャル酸化亜鉛薄膜の作製

桑原和成, 板垣奈穂, 中原賢太, 山下大輔, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第14回支部大会 2010.12

　More details

Event date： 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
Substrate temperature dependence of microcrystalline silicon deposition by multi-hollow discharge plasma CVD

金淵元, 松永剛明, 川嶋勇毅, 中原賢太, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第14回支部大会 2010.12

　More details

Event date： 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
SiH4+B10H14マルチホロー放電プラズマCVDを用いたBドーピングa-Si:Hの堆積

中原賢太, 川嶋勇毅, 松永剛明, 佐藤宗治, 山本康介, 山下大輔, 松崎秀文, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

プラズマ・核融合学会九州・沖縄・山口支部第14回支部大会 2010.12

　More details

Event date： 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
A novel control method of nano-strucutre of oxide films using sputtering deposition (Keynote Speech) Invited International conference

M. Shiratani, K. Koga, G. Uchida, N. Itagaki, K. Kamataki

The Second International Symposium on Plasma Nanoscience (iPlasmaNano-II) 2010.12

　More details

Event date： 2010.12

Language：English Presentation type：Oral presentation (general)

Venue：Murramarang Resort, New South Wales Country：Australia
微細パターン基板へのSiOx-CH3ナノ粒子堆積

古閑一憲, 宮田大嗣, 西山雄士, 岩下伸也, 山下大輔, 松崎秀文, 内田儀一郎, 板垣奈穂, 鎌滝晋礼, 白谷正治

第27回プラズマ・核融合学会年会 2010.12

　More details

Event date： 2010.11 - 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：札幌国際プラザ Country：Japan

Deposition of SiOx-CH3 nano-particles on fine pattern substrate
プラズマ－カーボン壁相互作用で発生したカーボン微粒子の基板へのフラックス評価

古閑一憲, 宮田大嗣, 西山雄士, 岩下伸也, 山下大輔, 松崎秀文, 内田儀一郎, 板垣奈穂, 鎌滝晋礼, 白谷正治, 芦川直子, 増﨑貴, 西村清彦, 相良明男, LHD実験グループ

第27回プラズマ・核融合学会年会 2010.11

　More details

Event date： 2010.11 - 2010.12

Language：Japanese Presentation type：Oral presentation (general)

Venue：札幌国際プラザ Country：Japan

Evaluation of the flux of carbon particles generated plasma-carbon wall interaction to substrates
シリコンナノ粒子とRu色素を用いた増感太陽電池の電流密度－電圧特性

川嶋勇毅, 佐藤宗治, 山本康介, 中原賢太, 松永剛明, 山下大輔, 松崎秀文, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, 近藤道雄

平成22年度応用物理学会九州支部学術講演会 2010.11

　More details

Event date： 2010.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan

Current density-voltage characteristics of the sensitized solar cell
using Si nanoparticles and Ru dye
窒素原子を介した酸化亜鉛薄膜の固相結晶化におけるアニール温度依存性

桑原和成, 板垣奈穂, 中原賢太, 山下大輔, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

平成22年度応用物理学会九州支部学術講演会 2010.11

　More details

Event date： 2010.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
高ガス圧力条件における微結晶シリコン薄膜の作製

松永剛明, 川嶋勇毅, 古閑一憲, 中原賢太, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 白谷正治

平成22年度応用物理学会九州支部学術講演会 2010.11

　More details

Event date： 2010.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan

Preparation of microcrystalline silicon films under high gas pressure condition
マルチホロー放電プラズマCVD法で堆積したPドープa-Si:H膜の導電率

中原賢太, 川嶋勇毅, 松永剛明, 佐藤宗治, 山本康介, 中村ウィリアム誠, 内田儀一郎, 山下大輔, 松崎秀文, 板垣奈穂, 古閑一憲, 白谷正治

平成22年度応用物理学会九州支部学術講演会 2010.11

　More details

Event date： 2010.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan

Conductivity of P-doped a-Si:H films deposited using multi-hollow plasma CVD
ダブルマルチホロー放電を用いた表面窒化シリコン粒子の生成

山本康介, 佐藤宗治, 川嶋勇毅, 中原賢太, 山下大輔, 松崎秀文, 鎌滝晋礼, 板垣奈穂, 内田儀一郎, 古閑一憲, 白谷正治

平成22年度応用物理学会九州支部学術講演会 2010.11

　More details

Event date： 2010.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan

Fabrication of surface-nitrided Si particles by double multi-hollow discharges
微細トレンチ基板へのナノ粒子の堆積

西山雄士, 宮田大嗣, 山下大輔, 鎌滝晋礼, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

平成22年度応用物理学会九州支部学術講演会 2010.11

　More details

Event date： 2010.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan

Deposition of nano-particles onto micro trench substrates
Generation of nitridated silicon nanoparticles and the application to solar cell (Invited) Invited International conference

G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 1st Korean-Japan Symposium on Surface Technology 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：Premier Songdo Park Hotel, Inchon, Korea Country：Korea, Republic of
Cluster-Free B-Doped a-Si:H Films Deposited Using SiH4 + B10H14 Multi-Hollow Discharges International conference

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

International technical conference of IEEE Region 10 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Fluctuation Control for Plasma Nanotechnologies (Keynote Speech) Invited International conference

M. Shiratani, K. Koga, G. Uchida, N. Itagaki, K. Kamataki

International technical conference of IEEE Region 10 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Effects of Ar addition on breakdown voltage in a Si(CH3)2(OCH3)2 RF discharge International conference

G. Uchida, S. Nunomutra, H. Miyata, S. Iwashita, Dsaisuke Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

International technical conference of IEEE Region 10 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Effects of Amplitude Modulation of rf Discharge Voltage on Growth of Nano-Particles in Reactive Plasmas International conference

K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

International technical conference of IEEE Region 10 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Deposition profiles of microcrystalline silicon films using multi-hollow discharge plasma CVD International conference

T. Matsunaga, Y. Kawashima, K. Koga, K. Nakahara, W. M. Nakamura, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani

International technical conference of IEEE Region 10 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：Fukuoka International Congress Center Country：Japan
Cluster-free p-type a Si:H films deposited using SiH4 + B10H14 multi-hollow discharges International conference

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

The 4th International Student Workshop on Electrical Engineering 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：福岡国際会議場 Country：Japan
Novel solar cells using Si nanoparticles International conference

Y. Kawashima, K. Yamamoto, M. Sato, T. Matsunaga, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

The 4th International Student Workshop on Electrical Engineering 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：福岡国際会議場 Country：Japan
Evaluation of microcrystalline silicon filmas deposited by using multi-hollow discharge plasma CVD International conference

T. Matsunaga, Y. Kawashima, K. Koga, M. Sato, K. Nakahara, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

The 4th International Student Workshop on Electrical Engineering 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：福岡国際会議場 Country：Japan
Generation of nitridated silicon particle in SiH4/H2 and N2 multi-hollow discharges International conference

G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

11th Workshop on Fine Particle Plasmas 第11回微粒子プラズマ研究会 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：核融合科学研究所, 岐阜 Country：Japan
In-situ collection of dust particles produced due to interaction between helicon discharge plasmasand graphite on substrates with bias voltage International conference

M. Shiratani, H. Miyata, K. Nishiyama, S. Iwashita, D.Yamashita, H. Matsuzaki, G. Uchida, N. Itagaki, K. Kamataki, K. Koga, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara

11th Workshop on Fine Particle Plasmas 第11回微粒子プラズマ研究会 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：核融合科学研究所, 岐阜 Country：Japan
Manipulation of Nano-objects Uusing Plasmas for a Plasma Nano-factory (Invited) Invited International conference

M. Shiratani, K. Koga, G.u Uchida, N. Itagaki, K. Kamataki

The 11th Asia Pacific Physics Conference (APPC11) 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：Shanghai, China Country：China

新しいボトムアッププロセスとしてナノ粒子の操作をプラズマを用いて行う新概念の提案とその実験的検証に関する報告を行った。
Substrate Temperature Dependence of Sticking Probability of SiOx-CH3 Nano-Particles International conference

H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

2010 International Symposium on Dry Process Program (DPS) 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
Optical and Electrical Properties of Particle Composite Thin Films deposited in SiH4/H2 and N2 Multi-Hollow Discharges International conference

G. Uchida, M. Sato, Y. Kawashima, K. Yamamoto, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

第23回マイクロプロセス・ナノテクノロジー国際会議（MNC 2010) 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：リーガロイヤルホテル小倉 Country：Japan
Deposition of Nanoparticles using Substrate Bias Voltage International conference

K. Koga, H. Miyata, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani, N. Ashikawa, K. Nishimura, A. Sagara, the LHD Experimental Group

第23回マイクロプロセス・ナノテクノロジー国際会議（MNC 2010) 2010.11

　More details

Event date： 2010.11

Language：English Presentation type：Oral presentation (general)

Venue：リーガロイヤルホテル小倉 Country：Japan
プラズマ-細胞相互作用による細胞活性制御

古閑一憲, 北﨑訓, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 白谷正治

第26回九州・山口プラズマ研究会 2010.11

　More details

Event date： 2010.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：山陽館, 大分 Country：Japan
窒化シリコン微粒子の生成と太陽電池への応用

内田儀一郎, 川嶋勇毅, 山本康介, 佐藤宗治, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第26回九州・山口プラズマ研究会 2010.11

　More details

Event date： 2010.11

Language：Japanese Presentation type：Oral presentation (general)

Venue：山陽館, 大分 Country：Japan
Combinatorial plasma CVD of Si thin films with a multihollow discharge plasma CVD reactor International conference

M. Shiratani, K. Koga, T. Matsunaga, Y. Kawashima, W. M. Nakamura, G. Uchida, N. Itagaki

AVS 57th International Symposium & Exhibition 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：Albuquerque Convention Center, Albuquerque
Carrier generation in Si quantum dots-sensitized solar cell International conference

Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

Third International Workshop on Thin Film Silicon Solar Cells (IWTFSSC3) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：長崎全日空ホテル Country：Japan
ZnO transparent conductive films prepared by solid-phase crystallization from amorphous phase International conference

K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Koga, M. Shiratani

Third International Workshop on Thin Film Silicon Solar Cells (IWTFSSC3) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：長崎全日空ホテル Country：Japan
Production of nitridated silicon particles for quantum dot solar cell International conference

K. Yamamoto, Y. Kawashima, M. Sato, K. Nakahara, T. Matsunaga, D. Yamashita, H.Matsuzaki, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani, M. Kondo

Third International Workshop on Thin Film Silicon Solar Cells (IWTFSSC3) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：長崎全日空ホテル Country：Japan
Optical and electrical properties of microcrystalline silicon thin films deposited by mutli-hollow discharge plasma CVD International conference

T. Matsunaga, Y. Kawashima, K. Koga, K. Nakahara, M. Sato, D. Yamashita, G. Uchida, N. Itagaki, M. Shiratani

Third International Workshop on Thin Film Silicon Solar Cells (IWTFSSC3) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：長崎全日空ホテル Country：Japan
High speed deposition of highly stable a-Si:H films using pure silane multi-hollow discharges International conference

K. Koga, K. Nakahara, T. Matsunaga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

Third International Workshop on Thin Film Silicon Solar Cells (IWTFSSC3) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：長崎全日空ホテル Country：Japan
Effects of H2 plasma irradiation to TiO2 on quantum dot/dye-sensitized solar cells International conference

H. Miyata, Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo

Third International Workshop on Thin Film Silicon Solar Cells (IWTFSSC3) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：長崎全日空ホテル Country：Japan
Deposition of cluster-free B-doped a-Si:H films using SiH4+B10H14 multi-hollow discharge plasma CVD International conference

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani

Third International Workshop on Thin Film Silicon Solar Cells (IWTFSSC3) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：長崎全日空ホテル Country：Japan
Si quantum dot-sensitized solar cells using Si nanoparticles produced by multi-hollow discharge International conference

K. Koga, G. Uchida, Y. Kawashima, M. Sato, K. Yamamoto, K. Nakahara, T. Matsunaga, K. Kamataki, N. Itagaki, M. Shiratani

3rd International Symposium on Innovative Solar Cells 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：東京工業大学 Country：Japan
Carbon dust particles generated due to H2 plasma-carbon wall interaction International conference

H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, G. Uchida, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, LHD experimental group

63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas (ICRP) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：Paris Country：France
Generation of nitridated silicon particles and their thin film deposition using double multi-hollow discharges International conference

G. Uchida, M. Sato, Y. Kawashima, K. Nakahara, K. Yamamoto, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas (ICRP) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：Paris Country：France
Deposition rate enhancement of cluster-free P-doped a-Si:H films using multi-hollow discharge plasma CVD method International conference

K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas (ICRP) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：Paris Country：France
Combinatorial deposition of microcrystalline Si films using multi-hollow discharge plasma CVD International conference

T. Matsunaga, Y. Kawashima, K. Koga, W. M. Nakamura, K. Nakahara, H. Matsuzaki, D. Yamashita, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas (ICRP) 2010.10

　More details

Event date： 2010.10

Language：English Presentation type：Oral presentation (general)

Venue：Paris Country：France
SiH4+ B10H14マルチホロー放電プラズマCVD法によるBドープa-Si:Hの製膜

中原賢太, 川嶋勇毅, 松永剛明, 佐藤宗治, 山本康介, 中村ウィリアム誠, 山下大輔, 松崎秀文, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第4回プラズマエレクトロニクスインキュベーションホール 2010.9

　More details

Event date： 2010.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan

Deposition of B-doped a-Si:H using by SiH4+ B10H14 multi-hollow discharge plasma CVD
高ガス圧力条件における微結晶シリコン薄膜の結晶化率分布

松永剛明, 川嶋勇毅, 古閑一憲, 中原賢太, 佐藤宗治, 山下大輔, 内田儀一郎, 鎌滝晋礼, 板垣菜穂, 白谷正治

第4回プラズマエレクトロニクスインキュベーションホール 2010.9

　More details

Event date： 2010.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan

Mapping of crystallinity of ?c-Si thin films deposited under high gas pressure
ダブルマルチホロー放電プラズマを用いた表面窒化シリコン粒子の生成

山本康介, 川嶋勇毅, 佐藤宗治, 中原賢太, 松永剛明, 山下大輔, 松崎秀文, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第4回プラズマエレクトロニクスインキュベーションホール 2010.9

　More details

Event date： 2010.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：国立中央青少年交流の家, 静岡 Country：Japan

Fabrication of surface nitrided Si particles applying double multi-hollow discharge plasma
ダブルマルチホロー放電によるシリコン粒子の表面窒化

内田儀一郎, 佐藤宗治, 川嶋勇毅, 中原賢太, 山本康介, 山下大輔, 松崎秀文, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第71回応用物理学会学術講演会 2010.9

　More details

Event date： 2010.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan

Surface nitridation of silicon particles by double multi-hollow discharges
ナノ粒子増感太陽電池の光電流の照射光強度依存性

川嶋勇毅, 佐藤宗治, 山本康介, 中原賢太, 松永剛明, 松崎秀文, 内田儀一郎, 近藤道雄, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

第71回応用物理学会学術講演会 2010.9

　More details

Event date： 2010.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan

Light intensity dependence of photo current of nano-particle sensitized solar cells
反応性プラズマ中のナノ粒子成長に対する電力摂動の効果

鎌滝晋礼, 宮田大嗣, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治

第71回応用物理学会学術講演会 2010.9

　More details

Event date： 2010.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan

Effects of Discharge Power Fluctuation on Growth of Nano-Particles in Reactive Plasmas
水素プラズマとグラファイトの相互作用で発生したダストの壁へのフラックスに対する壁電位の影響

宮田大嗣, 西山雄士, 岩下伸也, 松崎秀文, 山下大輔, 鎌滝晋礼, 内田儀一朗, 板垣奈穂, 古閑一憲, 白谷正治, 芦川直子, 増崎貴, 西村清彦, 相良明男

第71回応用物理学会学術講演会 2010.9

　More details

Event date： 2010.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan

Effects of wall potential on flux of dust particles generated due to Interaction between H plasmas and graphite
高ガス圧力微結晶シリコン製膜条件における結晶化率2次元分布

松永剛明, 川嶋勇毅, 古閑一憲, 中原賢太, 佐藤宗治, 山下大輔, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 白谷正治

第71回応用物理学会学術講演会 2010.9

　More details

Event date： 2010.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan

2-dimensional mapping of crysallinity of μc-Si films deposited under high gas pressure
SiH4+ B10H14マルチホロー放電プラズマCVD法を用いたBドープa-Si:Hの製膜

中原賢太, 川嶋勇毅, 松永剛明, 佐藤宗治, 山本康介, 中村ウィリアム誠, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治, 山下大輔, 松崎秀文

第71回応用物理学会学術講演会 2010.9

　More details

Event date： 2010.9

Language：Japanese Presentation type：Oral presentation (general)

Venue：長崎大学 Country：Japan

Deposition of B doped a-Si:H using SiH4+ B0H4 multi-hollow discharge plasma CVD
シリコンナノ微粒子の生成と太陽電池への応用

内田儀一郎, 川嶋勇毅, 山本康介, 佐藤宗治, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

平成22年度東北大学電気通信研究所共同プロジェクト研究会「微粒子プラズマの応用に関する基礎的研究」 2010.8

　More details

Event date： 2010.8

Language：Japanese Presentation type：Oral presentation (general)

Venue：ホテルクレセント, 仙台 Country：Japan
Generation of Si particles and their nitridation using double multihollow discharges International conference

M. Sato, Y. Kawashima, K. Yamamoto, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani, M. Kondo

The 11th International Workshop on Advanced Plasma Processing and Diagnostics 2010.7

　More details

Event date： 2010.7

Language：English Presentation type：Oral presentation (general)

Venue：Ramada Jeju Hotel Country：Korea, Republic of
Comparison between Si thin films with and without incorporating nanoparticles into the film International conference

K. Koga, Y. Kawashima, T. Matsunaga, M. Sato, K. Nakahara, W. M. Nakamura, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani

10th Asia Pacific Conference on Plasma Science and Technology (APCPST) 2010.7

　More details

Event date： 2010.7

Language：English Presentation type：Oral presentation (general)

Venue：Jeju island Country：Korea, Republic of
SiH4+PH3マルチホロー放電プラズマCVDによるn型a-Si:Hの製膜

中原賢太, 川嶋勇毅, 松永剛明, 佐藤宗治, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治

九州表面・真空研究会2010（兼第15回九州薄膜表面研究会） 2010.6

　More details

Event date： 2010.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
マルチホロー放電プラズマＣＶＤ法を用いた微結晶シリコン薄膜の作製と膜質評価

松永剛明, 川嶋勇毅, 板垣奈穂, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

九州表面・真空研究会2010（兼第15回九州薄膜表面研究会） 2010.6

　More details

Event date： 2010.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan
ナノ粒子含有シリコン薄膜の光学特性

佐藤宗治, 川嶋勇毅, 山本康介, 中原賢太, 板垣奈穂, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治

九州表面・真空研究会2010（兼第15回九州薄膜表面研究会） 2010.6

　More details

Event date： 2010.6

Language：Japanese Presentation type：Oral presentation (general)

Venue：九州大学 Country：Japan

▼display all

MISC

スパッタリング成膜法による高品質酸化亜鉛薄膜の形成

板垣奈穂, 古閑一憲, 白谷正治

応用物理 2014.5

　More details

Language：Japanese

スパッタリング法を用いた酸化亜鉛（ZnO）薄膜の結晶成長において，初期核形成を制御する新しい方法「不純物添加結晶化（Impurity Mediated Crystallization: IMC）法」を開発した．本手法により，高格子不整合基板上への原子レベルで平坦なZnO単結晶膜の作製や，ガラス基板上への極薄低抵抗ZnO導電膜の形成が可能となった．本稿では，IMC法について紹介するとともに，これら成果の概要を述べる．

Industrial property rights

Patent	Number of applications: 58	Number of registrations: 45
Utility model	Number of applications: 0	Number of registrations: 0
Design	Number of applications: 0	Number of registrations: 0
Trademark	Number of applications: 0	Number of registrations: 0

Professional Memberships

The Japan Society of Applied Physics
応用物理学会　薄膜・表面物理分科会
応用物理学会　プラズマエレクトロニクス分科会
Europian Materials Research Society
Materials Research Society
応用物理学会薄膜・表面物理分科会

　 More details

researchmap
応用物理学会プラズマエレクトロニクス分科会

　 More details

researchmap
THE JAPAN SOCIETY OF APPLIED PHYSICS

　 More details

researchmap
プラズマ核融合学会

　 More details

researchmap
American Vacuum Society

　 More details

researchmap
Materials Research Society

　 More details

researchmap
Europian Materials Research Society

　 More details

researchmap

▼display all

Committee Memberships

九州大学部局化学物質管理者

2024.1 - 2028.3

　 More details

Committee type：Other

researchmap
The Japan Society of Applied Physics "OYO BUTURI" Editorial Committee Member

2022.4 - Present

　 More details

Committee type：Academic society

researchmap
九州大学工学部電気情報工学科・国際コースクラス指導教員

2022.4 - Present

　 More details

Committee type：Other

researchmap
応用物理学会機関誌企画・編集委員 Domestic

2022.4 - 2024.3
九州大学大学院システム情報科学研究院付属量子コンピューティングシステム研究センター副センター長

2022.3 - Present

　 More details

researchmap
日本表面真空学会SP部会 Organizer Domestic

2021.4 - 2021.8
日本学術会議総合工学委員会未来社会と応用物理分科会・幹事

2020.10 - Present

　 More details

researchmap
日本学術会議連携会員

2020.10 - Present

　 More details

researchmap
日本学術会議 Organizer Domestic

2020.10 - 2025.3
日本学術会議連携会員，分科会幹事（これからの未来社会と応用物理分科会） Domestic

2020.10 - 2025.3
日本学術振興会　R025委員会委員 Domestic

2020.10 - 2023.3
日本学術振興会 R025先進薄膜界面機能創成委員会委員

2020.4 - Present

　 More details

Committee type：Academic society

researchmap
九州大学同窓会評議委員

2020.4 - Present

　 More details

Committee type：Other

researchmap
九州大学電気情報工学科クラス指導教員

2019.2 - Present

　 More details

Committee type：Other

researchmap
日本学術振興会　136委員会委員 Domestic

2016.4 - 2023.3
日本学術振興会 136委員会委員

2016.4 - 2022.3

　 More details

Committee type：Academic society

researchmap
Science and Technology of Advanced Materials (STAM誌) 編集委員

2016.2 - Present

　 More details

Committee type：Academic society

researchmap
応用物理学会プラズマエレクトロニクス分科会 Organizer Domestic

2015.4 - 2019.3
応用物理学会代議員 Domestic

2015.3 - 2019.3
日本学術振興会153委員会委員

2013.11 - Present

　 More details

Committee type：Academic society

researchmap
日本学術振興会153委員会委員 Domestic

2013.11 - 2022.3
応用物理学会九州支部理事

2012.5 - Present

　 More details

researchmap
応用物理学会九州支部 Executive Domestic

2012.5 - 2023.3
文部科学省，科学技術政策研究所専門調査員

2012 - Present

　 More details

Committee type：Academic society

researchmap
九州大学工学部等放射線安全委員会委員

2010.8 - Present

　 More details

Committee type：Other

researchmap

▼display all

Academic Activities

Committee International contribution

International Symposium on Sputtering and Plasma Processes (ISSP) （ Kyoto Japan ） 2024.7

　More details

Type：Competition, symposium, etc.

Number of participants：1,000
International Symposium on Sputtering and Plasma Processes (ISSP) International contribution

（ Kyoto Japan ） 2024.7

　More details

Type：Competition, symposium, etc.

researchmap
International Scientific Committee Member International contribution

Asian-Europian International Conference on Plasma Surface Engineering （ Busan Korea ） 2023.11

　More details

Type：Competition, symposium, etc.

Number of participants：1,000
Asian-Europian International Conference on Plasma Surface Engineering International contribution

（ Busan Korea ） 2023.11

　More details

Type：Competition, symposium, etc.

researchmap
連携会員

日本学術会議 2023.10 - 2028.9

　More details

researchmap
Chair, Local Organizing Committee International contribution

Advances in Functional Materials (AFM) Conference 2023 （ Fukuoka Japan ） 2023.1

　More details

Type：Competition, symposium, etc.

Number of participants：1,000
Advances in Functional Materials (AFM) Conference 2023 International contribution

（ Fukuoka Japan ） 2023.1

　More details

Type：Competition, symposium, etc.

researchmap
Committee International contribution

International Symposium on Sputtering and Plasma Processes (ISSP) （ Japan ） 2022.9

　More details

Type：Competition, symposium, etc.

Number of participants：1,000
国際プログラム委員 International contribution

9th International Symposium on Control of Semiconductor Interfaces （ Japan ） 2022.9

　More details

Type：Competition, symposium, etc.

Number of participants：1,000
9th International Symposium on Control of Semiconductor Interfaces International contribution

（名古屋大学 Japan ） 2022.9

　More details

Type：Competition, symposium, etc.

researchmap
応用物理

2022.4 - 2024.3

　More details

Type：Academic society, research group, etc.
応用物理

2022.4 - 2024.3

　More details

Type：Peer review

researchmap
連携会員，分科会幹事（これからの未来社会と応用物理分科会）

日本学術会議 2020.10 - 2028.9

　More details

researchmap
Committee member International contribution

International Conference on Solid State Devices and Materials (SSDM) （ Nagoya University Japan ） 2019.9

　More details

Type：Competition, symposium, etc.

Number of participants：2,000
International Program Committee Member International contribution

Asian-Europian International Conference on Plasma Surface Engineering （ MAISON GLAD JEJU HOTEL Korea ） 2019.9

　More details

Type：Competition, symposium, etc.

Number of participants：1,000
Committee member International contribution

International Conference on Solid State Devices and Materials (SSDM) （ Japan ） 2018.9

　More details

Type：Competition, symposium, etc.

Number of participants：2,000
Screening of academic papers

Role(s)： Peer review

2018

　More details

Type：Peer review

Number of peer-reviewed articles in foreign language journals：5

Proceedings of International Conference Number of peer-reviewed papers：70
International Program Committee International contribution

The 11th Asian-European International Conference on Plasma （ Jeju Island Korea ） 2017.9 - 2018.9

　More details

Type：Competition, symposium, etc.

Number of participants：2,000
Organizing Committee International contribution

The 29th International Conference on Defects in Semiconductors （ Matsue Japan ） 2017.7 - 2017.8

　More details

Type：Competition, symposium, etc.
Screening of academic papers

Role(s)： Peer review

2017

　More details

Type：Peer review

Number of peer-reviewed articles in foreign language journals：3

Proceedings of International Conference Number of peer-reviewed papers：40
Organizing Committee International contribution

9th International Workshop on Zinc Oxide and Related Materials (IWZnO 2016) （ Taipei Taiwan ） 2016.10

　More details

Type：Competition, symposium, etc.
企画担当幹事

第10回プラズマエレクトロニクスインキュベーションホール（ Japan ） 2016.9

　More details

Type：Competition, symposium, etc.

Number of participants：100
Science and Technology of Advanced Materials (STAM) International contribution

2016.2 - 2025.3

　More details

Type：Academic society, research group, etc.
座長（Chairmanship）

平成27年度（第68回）電気・情報関係学会九州支部連合大会（ Japan ） 2015.9

　More details

Type：Competition, symposium, etc.
International Program Committee International contribution

10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015) （ Jeju Korea ） 2015.9

　More details

Type：Competition, symposium, etc.

Number of participants：500
企画担当幹事

第10回プラズマエレクトロニクスインキュベーションホール（ Japan ） 2015.9 - 2016.9

　More details

Type：Competition, symposium, etc.

Number of participants：100
Program Committee International contribution

International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials （ Nagoya Japan ） 2015.3

　More details

Type：Competition, symposium, etc.

Number of participants：500
Sympojium Chair International contribution

International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials （ Nagoya Japan ） 2015.3

　More details

Type：Competition, symposium, etc.

Number of participants：500
座長（Chairmanship） International contribution

2015 Japan-Korea Joint Symposium on Advanced Solar Cells （ Fukuoka Japan ） 2015.1

　More details

Type：Competition, symposium, etc.
座長（Chairmanship） International contribution

Pacific Rim Symposium on Surfaces, Coatings and Interfaces （ Hawaii UnitedStatesofAmerica ） 2014.12

　More details

Type：Competition, symposium, etc.
Inter. Advisory Committee member International contribution

IUMRS-ICYRAM2014 （ China ） 2014.10

　More details

Type：Competition, symposium, etc.

Number of participants：1,000
現地実行委員 International contribution

8th International Conference on Reactive Plasmas （ Fukuoka Japan ） 2014.2

　More details

Type：Competition, symposium, etc.

Number of participants：500
運営委員 International contribution

プラズマ材料科学シンポジウム（ Japan ） 2013.9

　More details

Type：Competition, symposium, etc.
論文委員 International contribution

The 35rd International Symposium on Dry Process （ Jeju Korea ） 2013.1 - 2014.12

　More details

Type：Competition, symposium, etc.

Number of participants：200
座長（Chairmanship） International contribution

The 33rd International Symposium on Dry Process (DPS 2011) （ Tokyo Japan ） 2012.11

　More details

Type：Competition, symposium, etc.
座長（Chairmanship） International contribution

International Union of Materials Research Societes-International Conference on Electronic Materials 2012 （ Yokohama Japan ） 2012.9

　More details

Type：Competition, symposium, etc.
座長（Chairmanship）

電気関係学会九州支部連合大会（ Japan ） 2012.9

　More details

Type：Competition, symposium, etc.
シンポジウムチェア International contribution

International Union of Materials Research Societes-International Conference on Electronic Materials 2012 （ yokohama Japan ） 2012.9

　More details

Type：Competition, symposium, etc.
Transactions of the Materials Research Society of Japan International contribution

2012.8 - Present

　More details

Type：Academic society, research group, etc.
Transactions of the Materials Research Society of Japan International contribution

Role(s)： Review, evaluation

2012.8

　More details

Type：Peer review

researchmap
プログラム委員長

電気関係学会九州支部連合大会（ Japan ） 2012.4 - 2013.3

　More details

Type：Competition, symposium, etc.
座長（Chairmanship）

応用物理学会2012年春季講演会（ Japan ） 2012.3

　More details

Type：Competition, symposium, etc.
論文委員 International contribution

The 34rd International Symposium on Dry Process （ Tokyo Japan ） 2012.2 - 2013.12

　More details

Type：Competition, symposium, etc.

Number of participants：200
座長（Chairmanship） International contribution

Plasma Conference 20 （ kanazawa Japan ） 2011.11

　More details

Type：Competition, symposium, etc.
座長（Chairmanship） International contribution

The 33rd International Symposium on Dry Process (DPS 2011) （ kyoyo Japan ） 2011.11

　More details

Type：Competition, symposium, etc.
プログラム副委員長

電気関係学会九州支部連合大会（ Japan ） 2011.4 - 2012.3

　More details

Type：Competition, symposium, etc.
プログラム委員 International contribution

The 33rd International Symposium on Dry Process （ Kyoto Japan ） 2011.2 - 2011.12

　More details

Type：Competition, symposium, etc.

Number of participants：1,000
論文委員 International contribution

The 33rd International Symposium on Dry Process （ Kyoto Japan ） 2011.2 - 2011.12

　More details

Type：Competition, symposium, etc.

Number of participants：1,000
座長（Chairmanship） International contribution

International technical conference of IEEE Region 10 （ Fukuoka Japan ） 2010.11

　More details

Type：Competition, symposium, etc.
プログラム編集

電気関係学会九州支部連合大会（ Japan ） 2010.7 - 2010.10

　More details

Type：Competition, symposium, etc.
座長（Chairmanship）

九州表面・真空研究会2010 （ Fukuoka Japan ） 2010.6

　More details

Type：Competition, symposium, etc.

▼display all

Research Projects

励起子が情報を記憶する新概念・光メモリの創製

Grant number：24K00929 2024.4 - 2028.3

Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

板垣奈穂, 木山治樹

　 More details

Grant type：Scientific research funding

励起子は，半導体の光物性と光機能を担う中核として，主にその生成・消滅に着目した物性解明と受発光デバイスへの工学的応用が行われてきた．一方で，「電子とホールが再結合する過程=中間状態」である励起子が，外場中でどのように輸送され，保存されるかの議論は少ない．本研究の目的は，「マクロスケールでは電気的に中性で，かつ中間状態である励起子は，外場中でどのように輸送・保存されるのか？」を明らかにすることで、励起子の輸送と保存を利用した革新デバイスを創製することである．

CiNii Research
スピン軌道相互作用を利用した集積スピン量子ビット基盤の開拓

Grant number：23K26486 2023.4 - 2026.3

Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

木山治樹, 板垣奈穂

　 More details

Grant type：Scientific research funding

本研究では、集積化に適した量子ビットとして、スピン軌道相互作用を利用した半導体スピン量子ビットに着目し、その基盤技術の開発に取り組む。まず、強いスピン軌道相互作用を示す材料を用いて、集積化に適したゲート制御量子ドットの作製手法を確立する。次に、スピン軌道相互作用を用いたスピン量子ビット高速操作、およびｇ因子のゲート電圧制御による共鳴周波数の精密制御手法の開発に取り組む。これらの技術を組み合わせることで、大規模集積化可能なスピン量子ビットデバイスの実現を目指す。

CiNii Research
逆SKモードを利用したパワーデバイス用・窒化物半導体薄膜の単結晶成長 International coauthorship

2023.4

九州大学（日本），フラウンホーファー研究所（独）
不均一場中での励起子ドリフトの実証と新概念・励起子デバイスの創製

Grant number：23K17752 2023 - 2024

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Challenging Research(Exploratory)

　 More details

Authorship：Principal investigator Grant type：Scientific research funding
励起子トランジスタ用ZnO/ZnMgO ヘテロ構造における時空間分解ルミネッセンス計測

2022.4 - 2025.3

九州大学（日本），東北大学（日本）

　 More details

Authorship：Principal investigator
ポストムーア時代を見据えた超伝導コンピューティング技術の創成と展開

2022.4

文科省

　 More details

Authorship：Coinvestigator(s)

科研費・基盤研究(S)
ポストムーア時代を見据えた超伝導コンピューティング技術の創成と展開

Grant number：22H05000 2022 - 2026

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (S)

　 More details

Authorship：Coinvestigator(s) Grant type：Scientific research funding
量子コンピュータ講座の設置

2022 - 2026

大学改革活性化制度

　 More details

Authorship：Principal investigator Grant type：On-campus funds, funds, etc.
村田学術振興財団研究助成／新規II-III-V-VI族化合物半導体による室温動作エキシトントランジスタの開発

2022

　 More details

Grant type：Donation
量子―古典ハイブリッドコンピューター研究設備置

2022

九州大学研究環境整備事業「最先端設備」

　 More details

Authorship：Principal investigator Grant type：On-campus funds, funds, etc.
励起子トランジスタの創成と励起子輸送の学理探求：情報担体へ進化する励起子

2021.4 - 2025.3

文科省

　 More details

Authorship：Principal investigator

科研費・基盤研究(B)
励起子トランジスタの創成と励起子輸送の学理探求：情報担体へ進化する励起子

Grant number：23K20953 2021.4 - 2025.3

Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

板垣奈穂, 白谷正治

　 More details

Grant type：Scientific research funding

励起子は電子と正孔がクーロン相互作用で結合した準粒子であり，半導体の光物性と光機能を担う中核として長年にわたり膨大な研究がなされてきた．一方でマクロスケールでは電気的に中性とみなされる励起子が，電界などの外場中でどのように輸送されるかの議論は殆どなされていない．本研究の最終目的は，外場中での励起子輸送メカニズムを解明し，励起子を情報担体へと進化させることである．
本課題ではまず，その進化の鍵となる非局在型の室温・長寿命励起子をオリジナル材料ZAIONを用いて実現する．そしてこれを外場による励起子輸送の機構解明の場とするとともに，励起子のドリフト輸送を利用した励起子トランジスタを作製する．

CiNii Research
励起子トランジスタの創成と励起子輸送の学理探求：情報担体へ進化する励起子

Grant number：21H01372 2021 - 2024

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

　 More details

Authorship：Principal investigator Grant type：Scientific research funding
量子情報を記憶する「明るい」長寿命励起子の創製

Grant number：21K18731 2021 - 2022

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Challenging Research(Exploratory)

板垣奈穂

　 More details

Authorship：Principal investigator Grant type：Scientific research funding

本研究は，代表者オリジナル技術を背景に，励起子が量子情報を記憶する革新的デバイスを創製するものである．励起子を「電子と正孔が再結合する過程 (=中間状態）としての準粒子」として扱い，受発光を伴うその生成と消滅に着目した工学的応用を行ってきたこれまでの励起子研究を転換させる点で，挑戦的研究としての意義を有する．この記憶する励起子を用い，大規模集積化において有利な光によるデータ伝送を前提とした量子コンピュータの実現を目指す点で，実用的観点からも意義を有する．本研究は，明るい励起子そのもののを長寿命化させる，というアイデアにより，従来の励起子において存在した寿命と制御性のトレードオフ問題を解決する．

CiNii Research
豊田理研スカラー／新規II-III-V-VI 族化合物半導体による長寿命なブライト励起子の創製

2021

　 More details

Grant type：Donation
エキシトンが情報を伝達し記憶する革新的古典／量子デバイスの創製

2019.7 - 2021.3

文科省

　 More details

Authorship：Principal investigator

科研費・挑戦的研究（萌芽)
エキシトンが情報を伝達し記憶する革新的古典／量子デバイスの創製

Grant number：19K21978 2019 - 2020

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Challenging Research(Exploratory)

　 More details

Authorship：Principal investigator Grant type：Scientific research funding
サムコ科学技術財団・薄膜技術に関する研究助成

2019

　 More details

Grant type：Donation
データ駆動型科学に基づく革新デバイス実現のためのオープンプラットフォーム整備

2019

九州大学ルネッサンスプロジェクト若手研究者研究環境整備

　 More details

Authorship：Principal investigator Grant type：On-campus funds, funds, etc.
新材料(ZnO)x(InN)1-xを用いたSi基板上への小型E/O変換デバイスの創製

2018.10 - 2019.9

サムコ科学技術財団

　 More details

Authorship：Principal investigator

サムコ科学技術財団・薄膜技術に関する研究助成
スパッタエピタキシーによる革新的エキシトンデバイスの実現と励起子輸送機構の解明の研究

2018.4 - 2022.3

文科省

　 More details

Authorship：Principal investigator

科研費・基盤B
スパッタエピタキシーによる革新的エキシトンデバイスの実現と励起子輸送機構の解明

Grant number：18H01206 2018 - 2021

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

板垣奈穂, 白谷正治

　 More details

Authorship：Principal investigator Grant type：Scientific research funding

本研究は，高精度フラックス制御スパッタと代表者オリジナル材料ZIONを駆使して，革新的エキシトンデバイスを創製することを目的とした．主な成果としては，①単結晶ZIONエピタキシャル成長，②原子レベルで急峻なZION/ZnOヘテロ界面の形成，③ゲート電極への光照射によるエキシトントランジスタのスイッチング動作実証，が挙げられる．また本研究では，従来ブラックボックスとなっていた外場によるエキシトン輸送の機構解明も試みた．エキシトン輸送方向に平行な電界成分を外力とした拡散方程式を解いた結果，両極性拡散と不均一電界中での双極子の並進運動がデバイス内でのエキシトンの主な輸送機構である可能性が示された．

CiNii Research
光電子集積回路を実現する革新的エキシトニクスデバイスの創製

2017.11 - 2022.3

Joint research

　 More details

Authorship：Principal investigator Grant type：Other funds from industry-academia collaboration
光電子集積回路を実現する革新的エキシトニクスデバイスの創製

2017.11 - 2022.3

NTT

　 More details

Authorship：Principal investigator

ＮＴＴ-九州大学基礎科学共同研究プログラム
新材料ZIONを用いた超小型・高速E/O変換デバイスの創製

2016

　 More details

Grant type：Donation
フラックス制御スパッタによる高品質酸窒化物の創製と新概念光スイッチへの応用

2015.4 - 2018.3

文科省

　 More details

Authorship：Principal investigator

科研費若手Ａ
フラックス制御スパッタによる高品質酸窒化物の創製と新概念光スイッチへの応用

Grant number：15H05431 2015 - 2018

Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (A)

　 More details

Authorship：Principal investigator Grant type：Scientific research funding
研究助成/2次元エキシトンガスをチャネルとした超高速・超低消費電力トランジスタの創成

2014

　 More details

Grant type：Donation
高品質ＺｎＯ薄膜の形成とそのキャリア伝導機構の解明 International coauthorship

2013.8

九州大学（日本），ライト州立大（米国）

　 More details

Authorship：Principal investigator
酸窒化物超格子のピエゾ電界を利用した室温動作エキシトニクスデバイスの創成

2013.4 - 2015.3

日本学術振興会

　 More details

Authorship：Principal investigator
酸窒化物量子井戸中のエキシトン流を利用した高速・低消費電力トランジスタの創成

Grant number：25630127 2013 - 2014

Grants-in-Aid for Scientific Research Grant-in-Aid for challenging Exploratory Research

　 More details

Authorship：Principal investigator Grant type：Scientific research funding
研究助成/高速・低消費電力エキシトニックトランジスタを実現する新材料ZnInON歪量子井戸チャネルの開発

2013

　 More details

Grant type：Donation
プラズマナノマテリアル動態学の創成

2012.4 - 2014.10

日本学術振興会

　 More details

Authorship：Coinvestigator(s)
モジュール型ディスプレイ技術の研究

2012 - 2017

平成22年度先端的低炭素化技術開発事業

　 More details

Authorship：Collaborating Investigator(s) (not designated on Grant-in-Aid) Grant type：Contract research
プラズマ・ナノマテリアル動態学の創成と安全安心医療科学の構築

Grant number：24108009 2012 - 2014

Japan Society for the Promotion of Science・Ministry of Education, Culture, Sports, Science and Technology Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research on Innovative Areas

　 More details

Authorship：Coinvestigator(s) Grant type：Scientific research funding
豊田理研スカラー／室温動作型エキシトニックトランジスタを実現する新規酸窒化物半導体材料の創成

2012

　 More details

Grant type：Donation
JST 戦略的創造研究推進事業(さきがけ), 研究領域「太陽光と光電変換機能」: 新規酸窒化物を用いたピエゾ電界誘起量子井戸型太陽電池の創製

2011.10 - 2015.3

JST

　 More details

Authorship：Principal investigator
スパッタリングプラズマ中の熱フラックス制御による高品質酸化膜の作製 International coauthorship

2011.7

九州大学（日本），キール大学（独），グライフスヴァルト大（独）

　 More details

Authorship：Principal investigator
ナノ粒子含有プラズマを用いた細胞活性制御プログラム

2011 - 2015

Japan Society for the Promotion of Science・Ministry of Education, Culture, Sports, Science and Technology Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research on Innovative Areas

　 More details

Authorship：Collaborating Investigator(s) (not designated on Grant-in-Aid) Grant type：Scientific research funding
新規酸窒化物を用いたピエゾ電界誘起量子井戸型太陽電池の創製

2011 - 2014

JST Strategic Basic Research Program (Ministry of Education, Culture, Sports, Science and Technology)

　 More details

Authorship：Principal investigator Grant type：Contract research
酸窒化物超格子のピエゾ電界を利用した室温動作エキシトニクスデバイスの創成

Grant number：23760285 2011 - 2012

Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B)

　 More details

Authorship：Principal investigator Grant type：Scientific research funding
財団法人九州大学後援会　「教員の研究プロジェクト」／エキシトニクス流を用いた超高速・超低消費電力型新概念トランジスタの創成

2011

　 More details

Grant type：Donation
国際交流助成

2011

　 More details

Grant type：Donation
超格子構造を有する新規酸窒化物半導体材料の創成と高効率フレキシブル太陽電池への応用

2011

益財団法人旭硝子財団自然科学系「研究奨励」

　 More details

Authorship：Principal investigator Grant type：On-campus funds, funds, etc.
革新的半導体材料を用いた超高性能・フレキシブルデバイスの創成

2011

九州大学教育研究プログラム・研究拠点形成プロジェクト

　 More details

Authorship：Principal investigator Grant type：On-campus funds, funds, etc.
エキシトニクス流用いた超高速・超低消費電力型新概念トランジスタの創成

2011

財団法人九州大学後援会　「教員の研究プロジェクト」

　 More details

Authorship：Principal investigator Grant type：On-campus funds, funds, etc.
ナノ粒子制御によるa-Siセルの高光安定化に関する研究

2010.10 - 2012.3

ＮＥＤＯ太陽光発電技術組合

　 More details

Authorship：Coinvestigator(s)
ナノ粒子含有プラズマによるナノ界面ボンドエンジニアリングの創生

2010.4 - 2013.3

　 More details

Authorship：Coinvestigator(s)
ナノ粒子含有プラズマによるナノ界面ボンドエンジニアリングの創生

Grant number：21110005 2010 - 2013

Japan Society for the Promotion of Science・Ministry of Education, Culture, Sports, Science and Technology Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research on Innovative Areas

　 More details

Authorship：Coinvestigator(s) Grant type：Scientific research funding
ナノ粒子制御によるa-Siセルの高光安定化に関する研究

2010 - 2012

Industrial Technology Research Grant Program (Ministry of Economy, Trade and Industry)

　 More details

Authorship：Coinvestigator(s) Grant type：Contract research
矢崎科学技術振興記念財団２０１０（H22）年度『国際交流援助』 High quality ZnO films prepared by solid-phase crystallization of amorphous ZnON films

2010

　 More details

Grant type：Donation
Novel Fabrication Method For Transparent Conducting Oxide Films Utilizing Solid-Phase Crystallized Seed Layers

2010

九州大学女性研究者キャリア開発センター国際学会派遣支援

　 More details

Authorship：Principal investigator Grant type：On-campus funds, funds, etc.
Solid phase crystallization of ZnO films via nitrogen-atom mediation

2010

九州大学女性研究者キャリア開発センター国際学会派遣支援

　 More details

Authorship：Principal investigator Grant type：On-campus funds, funds, etc.

▼display all

Educational Activities

Fundamentals of Electrical Engineering

Class subject

ナノプロセス工学特論Ⅱ

2024.6 - 2024.8 Summer quarter
電気情報数学Ⅱ（EE)

2024.6 - 2024.8 Summer quarter
電磁気学Ⅳ（EC）

2024.6 - 2024.8 Summer quarter
電気電子工学演示Ⅰ

2024.4 - 2024.9 First semester
電気情報数学（A）

2024.4 - 2024.9 First semester
電磁気学Ⅲ（B）【前期】

2024.4 - 2024.9 First semester
電気電子工学読解Ⅰ

2024.4 - 2024.9 First semester
ナノプロセス工学特論Ⅰ

2024.4 - 2024.6 Spring quarter
電気情報数学Ⅰ（EE)

2024.4 - 2024.6 Spring quarter
電磁気学Ⅲ（EC）

2024.4 - 2024.6 Spring quarter
(IUPE)Fundamentals of Electrical Eng II

2023.12 - 2024.2 Winter quarter
電気電子工学演示Ⅱ

2023.10 - 2024.3 Second semester
電気電子工学読解Ⅱ

2023.10 - 2024.3 Second semester
(IUPE)Fundamentals of Electrical Eng I

2023.10 - 2023.12 Fall quarter
ナノプロセス工学特論Ⅱ

2023.6 - 2023.8 Summer quarter
電気情報数学Ⅱ（EE)

2023.6 - 2023.8 Summer quarter
電磁気学Ⅳ（EC）

2023.6 - 2023.8 Summer quarter
Advanced Research in Electrical and Electronic Eng II

2023.4 - 2024.3 Full year
Advanced Research in Electrical and Electronic Engineering I

2023.4 - 2024.3 Full year
Advanced Seminar in Electrical and Electronic Engineering

2023.4 - 2024.3 Full year
電気電子工学特別研究Ⅱ

2023.4 - 2024.3 Full year
電気電子工学特別研究Ⅰ

2023.4 - 2024.3 Full year
電気電子工学特別演習

2023.4 - 2024.3 Full year
Advanced Research in Nanoprocess

2023.4 - 2024.3 Full year
ナノプロセス特別講究

2023.4 - 2024.3 Full year
電気情報数学（A）

2023.4 - 2023.9 First semester
電磁気学Ⅲ（B）【前期】

2023.4 - 2023.9 First semester
電気電子工学読解Ⅰ

2023.4 - 2023.9 First semester
電気電子工学演示Ⅰ

2023.4 - 2023.9 First semester
電気情報数学Ⅰ（EE)

2023.4 - 2023.6 Spring quarter
電磁気学Ⅲ（EC）

2023.4 - 2023.6 Spring quarter
ナノプロセス工学特論Ⅰ

2023.4 - 2023.6 Spring quarter
(IUPE)Fundamentals of Electrical Eng II

2022.12 - 2023.2 Winter quarter
(IUPE)Fundamentals of Electrical Eng II

2022.12 - 2023.2 Winter quarter
電気電子工学演示Ⅱ

2022.10 - 2023.3 Second semester
電気電子工学読解Ⅱ

2022.10 - 2023.3 Second semester
(IUPE)Fundamentals of Electrical Eng II

2022.10 - 2022.12 Fall quarter
(IUPE)Fundamentals of Electrical Eng I

2022.10 - 2022.12 Fall quarter
(IUPE)Fund. of Electrical Eng and Computer Science I

2022.10 - 2022.12 Fall quarter
ナノプロセス工学特論Ⅱ

2022.6 - 2022.8 Summer quarter
ナノプロセス工学特論Ⅱ

2022.6 - 2022.8 Summer quarter
電気情報数学Ⅱ（EE)

2022.6 - 2022.8 Summer quarter
国際演示技法

2022.4 - 2023.3 Full year
知的財産技法

2022.4 - 2023.3 Full year
ティーチング演習

2022.4 - 2023.3 Full year
先端プロジェクト管理技法

2022.4 - 2023.3 Full year
Scientific English Presentation

2022.4 - 2023.3 Full year
Intellectual Property Management

2022.4 - 2023.3 Full year
Exercise in Teaching

2022.4 - 2023.3 Full year
Advanced Project Management Technique

2022.4 - 2023.3 Full year
ナノプロセス特別講究

2022.4 - 2023.3 Full year
Advanced Research in Nanoprocess

2022.4 - 2023.3 Full year
電気電子工学特別演習

2022.4 - 2023.3 Full year
電気電子工学特別講究第一

2022.4 - 2023.3 Full year
電気電子工学特別講究第二

2022.4 - 2023.3 Full year
Advanced Research in Electrical and Electronic Engineering I

2022.4 - 2023.3 Full year
Adv Res in Electrical and Electronic Engineering II

2022.4 - 2023.3 Full year
Advanced Seminar in Electrical and Electronic Engineering

2022.4 - 2023.3 Full year
電気情報数学（A）

2022.4 - 2022.9 First semester
電気電子工学読解Ⅰ

2022.4 - 2022.9 First semester
電気電子工学演示Ⅰ

2022.4 - 2022.9 First semester
電気情報数学II（EE）

2022.4 - 2022.9 First semester
電気情報数学I（EE）

2022.4 - 2022.9 First semester
電磁気学Ⅲ（B）

2022.4 - 2022.9 First semester
電気電子工学読解Ⅰ

2022.4 - 2022.9 First semester
[M2]電気電子工学演習第三

2022.4 - 2022.9 First semester
電磁気学Ⅲ（B）

2022.4 - 2022.9 First semester
ナノプロセス工学特論Ⅰ

2022.4 - 2022.6 Spring quarter
ナノプロセス工学特論Ⅰ

2022.4 - 2022.6 Spring quarter
電気情報数学Ⅰ（EE)

2022.4 - 2022.6 Spring quarter
(IUPE)Fundamentals of Electrical Eng II

2021.12 - 2022.2 Winter quarter
(IUPE)Fundamentals of Electrical Eng II

2021.12 - 2022.2 Winter quarter
電気電子工学読解Ⅱ

2021.10 - 2022.3 Second semester
(IUPE)Fundamentals of Electrical Eng II

2021.10 - 2021.12 Fall quarter
(IUPE)Fundamentals of Electrical Eng I

2021.10 - 2021.12 Fall quarter
ナノプロセス工学特論Ⅱ

2021.6 - 2021.8 Summer quarter
Advanced Seminar in Electrical and Electronic Engineering

2021.4 - 2022.3 Full year
国際演示技法

2021.4 - 2022.3 Full year
知的財産技法

2021.4 - 2022.3 Full year
ティーチング演習

2021.4 - 2022.3 Full year
先端プロジェクト管理技法

2021.4 - 2022.3 Full year
Scientific English Presentation

2021.4 - 2022.3 Full year
Intellectual Property Management

2021.4 - 2022.3 Full year
Exercise in Teaching

2021.4 - 2022.3 Full year
Advanced Project Management Technique

2021.4 - 2022.3 Full year
ナノプロセス特別講究

2021.4 - 2022.3 Full year
Advanced Research in Nanoprocess

2021.4 - 2022.3 Full year
電気電子工学特別演習

2021.4 - 2022.3 Full year
電気電子工学特別講究第一

2021.4 - 2022.3 Full year
電気電子工学特別講究第二

2021.4 - 2022.3 Full year
Advanced Research in Electrical and Electronic Engineering I

2021.4 - 2022.3 Full year
Adv Res in Electrical and Electronic Engineering II

2021.4 - 2022.3 Full year
[M2]電気電子工学演習第三

2021.4 - 2021.9 First semester
電磁気学Ⅲ（B）

2021.4 - 2021.9 First semester
電気電子工学読解Ⅰ

2021.4 - 2021.9 First semester
ナノプロセス工学特論Ⅰ

2021.4 - 2021.6 Spring quarter
(IUPE)Fundamentals of Electrical Eng II

2020.12 - 2021.2 Winter quarter
(IUPE)Fundamentals of Electrical Eng II

2020.12 - 2021.2 Winter quarter
電気電子工学演習第二

2020.10 - 2021.3 Second semester
電気電子工学演習第二

2020.10 - 2021.3 Second semester
(IUPE)Fundamentals of Electrical Eng II

2020.10 - 2020.12 Fall quarter
(IUPE)Fundamentals of Electrical Eng I

2020.10 - 2020.12 Fall quarter
Advanced Seminar in Electrical and Electronic Engineering

2020.4 - 2021.3 Full year
国際演示技法

2020.4 - 2021.3 Full year
知的財産技法

2020.4 - 2021.3 Full year
ティーチング演習

2020.4 - 2021.3 Full year
先端プロジェクト管理技法

2020.4 - 2021.3 Full year
Scientific English Presentation

2020.4 - 2021.3 Full year
Intellectual Property Management

2020.4 - 2021.3 Full year
Exercise in Teaching

2020.4 - 2021.3 Full year
Advanced Project Management Technique

2020.4 - 2021.3 Full year
ナノプロセス特別講究

2020.4 - 2021.3 Full year
Advanced Research in Nanoprocess

2020.4 - 2021.3 Full year
電気電子工学特別演習

2020.4 - 2021.3 Full year
電気電子工学特別講究第一

2020.4 - 2021.3 Full year
電気電子工学特別講究第二

2020.4 - 2021.3 Full year
Advanced Research in Electrical and Electronic Engineering I

2020.4 - 2021.3 Full year
Adv Res in Electrical and Electronic Engineering II

2020.4 - 2021.3 Full year
電磁気学Ⅲ（B）

2020.4 - 2020.9 First semester
ナノプロセス工学特論

2020.4 - 2020.9 First semester
電気情報工学入門Ⅰ

2020.4 - 2020.9 First semester
電気電子工学特別研究第一

2020.4 - 2020.9 First semester
電気電子工学特別研究第ニ

2020.4 - 2020.9 First semester
ナノプロセス工学特論

2020.4 - 2020.9 First semester
電気電子工学演習第一

2020.4 - 2020.9 First semester
電気電子工学演習第三

2020.4 - 2020.9 First semester
(IUPE)Fundamentals of Electrical Eng II

2019.12 - 2020.2 Winter quarter
電気電子工学演習第二

2019.10 - 2020.3 Second semester
(IUPE)Fundamentals of Electrical Eng I

2019.10 - 2019.12 Fall quarter
電気電子工学特別研究第ニ

2019.4 - 2019.9 First semester
電磁気学Ⅲ（B)

2019.4 - 2019.9 First semester
電気情報工学入門Ⅰ

2019.4 - 2019.9 First semester
ナノプロセス工学特論

2019.4 - 2019.9 First semester
電気電子工学演習第一

2019.4 - 2019.9 First semester
電気電子工学演習第三

2019.4 - 2019.9 First semester
電気電子工学特別研究第一

2019.4 - 2019.9 First semester
電気電子工学特別研究第一

2018.10 - 2019.3 Second semester
電気電子工学演習第二

2018.10 - 2019.3 Second semester
電気電子工学演習第三

2018.4 - 2018.9 First semester
ナノプロセス工学特論

2018.4 - 2018.9 First semester
電磁気学Ⅲ

2018.4 - 2018.9 First semester
電気電子工学演習第一

2018.4 - 2018.9 First semester
Fundamentals of Electrical Engineering

2018.4 - 2018.6 Spring quarter
電気電子工学演習第二

2017.10 - 2018.3 Second semester
Advanced Seminar in Electrical and Electronic Engineering

2017.4 - 2018.3 Full year
国際演示技法

2017.4 - 2018.3 Full year
知的財産技法

2017.4 - 2018.3 Full year
ティーチング演習

2017.4 - 2018.3 Full year
先端プロジェクト管理技法

2017.4 - 2018.3 Full year
Overseas Internship

2017.4 - 2018.3 Full year
Scientific English Presentation

2017.4 - 2018.3 Full year
Intellectual Property Management

2017.4 - 2018.3 Full year
Exercise in Teaching

2017.4 - 2018.3 Full year
Advanced Project Management Technique

2017.4 - 2018.3 Full year
電気電子工学特別講究第一

2017.4 - 2018.3 Full year
電気電子工学特別講究第二

2017.4 - 2018.3 Full year
Advanced Research in Electrical and Electronic Engineering I

2017.4 - 2018.3 Full year
Adv Res in Electrical and Electronic Engineering II

2017.4 - 2018.3 Full year
電気電子工学特別演習

2017.4 - 2018.3 Full year
電気電子工学演習第三

2017.4 - 2017.9 First semester
ナノプロセス工学特論

2017.4 - 2017.9 First semester
電磁気学Ⅲ

2017.4 - 2017.9 First semester
電気電子工学演習第一

2017.4 - 2017.9 First semester
Fundamentals of Electrical Engineering

2017.4 - 2017.6 Spring quarter
Fundamentals of Electrical Engineering (国際コース）

2016.10 - 2017.3 Second semester
電気電子工学演習第三

2016.10 - 2017.3 Second semester
電気電子工学演習第一

2016.10 - 2017.3 Second semester
電気電子工学特別研究

2016.4 - 2017.3 Full year
電磁気学III

2016.4 - 2016.9 First semester
電気電子工学演習第二

2016.4 - 2016.9 First semester
電気情報工学入門

2016.4 - 2016.9 First semester
ナノプロセス工学特論

2016.4 - 2016.9 First semester
Fundamentals of Electrical Engineering (国際コース）

2015.10 - 2016.3 Second semester
電気情報工学入門

2015.4 - 2015.9 First semester
ナノプロセス工学特論

2015.4 - 2015.9 First semester
電磁気学III

2014.10 - 2015.3 Second semester
電気情報工学入門

2014.4 - 2014.9 First semester
ナノプロセス工学特論

2014.4 - 2014.9 First semester
電磁気学III

2013.10 - 2014.3 Second semester
電気情報工学入門

2013.4 - 2013.9 First semester
ナノプロセス工学特論

2013.4 - 2013.9 First semester
電気工学基礎

2012.10 - 2013.3 Second semester
電気情報数学

2012.4 - 2012.9 First semester
ナノプロセス工学特論

2012.4 - 2012.9 First semester
電気情報工学入門

2012.4 - 2012.9 First semester
電気工学基礎

2011.10 - 2012.3 Second semester
ナノプロセス工学特論

2011.4 - 2011.9 First semester
電気情報工学入門

2011.4 - 2011.9 First semester
電気工学基礎

2010.10 - 2011.3 Second semester
電気情報工学入門

2010.4 - 2010.9 First semester
ナノプロセス工学特論

2010.4 - 2010.9 First semester

▼display all

FD Participation

2023.10 Role：Participation Title：【シス情FD】価値創造型半導体人材育成センターについて

Organizer：[Undergraduate school/graduate school/graduate faculty]
2022.3 Role：Participation Title：全学FD:メンタルヘルス講演会

Organizer：University-wide
2022.3 Role：Participation Title：メンタルヘルス講演会

Organizer：University-wide
2020.9 Role：Participation Title：電気情報工学科総合型選抜（AO入試）について

Organizer：[Undergraduate school/graduate school/graduate faculty]
2018.9 Role：Participation Title：九州能開大の教育システムのご紹介

Organizer：[Undergraduate school/graduate school/graduate faculty]
2018.1 Role：Participation Title：工学研究院・システム情報科学研究院ＦＤ

Organizer：[Undergraduate school/graduate school/graduate faculty]
2016.9 Role：Participation Title：システム情報科学研究院第ファカルティデベロップメント

Organizer：[Undergraduate school/graduate school/graduate faculty]
2016.2 Role：Planning Title：システム情報科学研究院ファカルティデベロップメント

Organizer：[Undergraduate school/graduate school/graduate faculty]
2013.12 Role：Planning Title：システム情報科学研究院第５回ファカルティデベロップメント

Organizer：[Undergraduate school/graduate school/graduate faculty]
2010.3 Role：Participation Title：Ｈ22年度　第2回システム情報科学府ファカルティディベロップメント

Organizer：Undergraduate school department

▼display all

Visiting, concurrent, or part-time lecturers at other universities, institutions, etc.

2021 大阪大学接合科学研究所共同研究員 Domestic/International Classification:Japan
2020 大阪大学接合科学研究所共同研究員 Domestic/International Classification:Japan
2019 大阪大学接合科学研究所共同研究員 Domestic/International Classification:Japan
2018 大阪大学接合科学研究所共同研究員 Domestic/International Classification:Japan
2017 大阪大学接合科学研究所共同研究員 Domestic/International Classification:Japan
2016 大阪大学接合科学研究所共同研究員 Domestic/International Classification:Japan
2015 大阪大学接合科学研究所共同研究員 Domestic/International Classification:Japan
2014 RMIT University, Australia, 博士論文審査員 Domestic/International Classification:Overseas
2014 独立行政法人　科学技術振興機構 Classification:Part-time faculty Domestic/International Classification:Japan
2014 大阪大学接合科学研究所共同研究員 Domestic/International Classification:Japan
2013 独立行政法人　科学技術振興機構 Classification:Part-time faculty Domestic/International Classification:Japan
2012 独立行政法人　科学技術振興機構 Classification:Part-time faculty Domestic/International Classification:Japan
2011 独立行政法人　科学技術振興機構 Classification:Part-time faculty Domestic/International Classification:Japan
2010 釜山大学 Classification:Intensive course Domestic/International Classification:Overseas

Semester, Day Time or Duration：2010年08月

▼display all

Participation in international educational events, etc.

2023.5

International Plasma Chemistry Society

Summer School, 25th International Symposium on Plasma Chemistry

　 More details

Venue：Kyoto, Japan

Number of participants：100
2015.8

九州大学

インターンシップ受入（都城高専）
2010.8

九州大学・釜山大学

釜山大学とのStudent exchange program

Other educational activity and Special note

2024 Class Teacher 学部
2023 Class Teacher 学部
2022 Class Teacher 学部
2022 Special Affairs 博士課程学生・学内アドバイザリ委員

　詳細を見る

博士課程学生・学内アドバイザリ委員
2022 Special Affairs 博士課程学生（社会人）・学内アドバイザリ委員

　詳細を見る

博士課程学生（社会人）・学内アドバイザリ委員
2021 Class Teacher 学部
2021 Special Affairs 博士課程学生・学内アドバイザリ委員

　詳細を見る

博士課程学生・学内アドバイザリ委員
2020 Class Teacher 学部
2019 Class Teacher 学部
2018 Class Teacher 学部
2017 Class Teacher 学部
2017 Special Affairs 博士課程学生・学内アドバイザリ委員

　詳細を見る

博士課程学生・学内アドバイザリ委員
2017 Special Affairs 明治学園高等学校での出前授業

　詳細を見る

明治学園高等学校での出前授業
2016 Class Teacher 学部
2015 Class Teacher 学部
2014 Class Teacher 学部
2013 Class Teacher 学部
2012 Class Teacher 学部
2011 Class Teacher 学部
2010 Class Teacher 学部
2010 Special Affairs Lectures of Electrical Engineering in English:,Processes of Silicon Thin Film Solar CellsにおいてTransparent conducting oxide films for solar cellsの講義を担当

　詳細を見る

Lectures of Electrical Engineering in English:,Processes of Silicon Thin Film Solar CellsにおいてTransparent conducting oxide films for solar cellsの講義を担当
2010 Special Affairs 釜山大学とのStudent exchange programによる韓国人留学生（３名）への研究指導

　詳細を見る

釜山大学とのStudent exchange programによる韓国人留学生（３名）への研究指導

▼display all

Outline of Social Contribution and International Cooperation activities

九州大学女子卒業生の会・松の実会・理事

Social Activities

出前授業／工学部のススメ～科学技術のブレークスルーを実現し，社会の諸問題に挑戦する～

明治学園中学高等学校 2017.7

　More details

Audience：Infants,　Schoolchildren,　Junior students,　High school students

Type：Seminar, workshop
出前授業／工学部のススメ～科学技術のブレークスルーを実現し，社会の諸問題に挑戦する～

明治学園中学高等学校 2017.7

　More details

Type：Seminar, workshop

researchmap
応用物理学会九州支部・福岡市立少年科学文化会館主催　リフレッシュ理科教室実行委員

2012.7

　More details

Audience：Infants,　Schoolchildren,　Junior students,　High school students

Type：Seminar, workshop
応用物理学会九州支部・福岡市立少年科学文化会館主催リフレッシュ理科教室実行委員

2012.7

　More details

Type：Science cafe

researchmap
応用物理学会九州支部・福岡市立少年科学文化会館主催　リフレッシュ理科教室実行委員

2011.7

　More details

Audience：Infants,　Schoolchildren,　Junior students,　High school students

Type：Seminar, workshop
応用物理学会九州支部・福岡市立少年科学文化会館主催リフレッシュ理科教室実行委員

2011.7

　More details

Type：Science cafe

researchmap

▼display all

Media Coverage

理系という選択 Newspaper, magazine

リビング福岡 2014.6

　More details

理系という選択

Activities contributing to policy formation, academic promotion, etc.

2023.10 - 2028.9 日本学術会議

連携会員
2020.10 - 2023.9 日本学術会議

連携会員，分科会幹事（これからの未来社会と応用物理分科会）
2012.4 - 2020.3 文部科学省　科学技術政策研究所

専門調査員

Acceptance of Foreign Researchers, etc.

National Research Centre, Egypt

Acceptance period： 2023.4 - 2025.3

Nationality：Egypt