Updated on 2025/02/13

Information

 

写真a

 
YAMASHITA NAOTO
 
Organization
Faculty of Information Science and Electrical Engineering Department of I&E Visionaries Associate Professor
School of Engineering Department of Electrical Engineering and Computer Science（Concurrent）
Graduate School of Information Science and Electrical Engineering Department of Electrical and Electronic Engineering（Concurrent）
Title
Associate Professor
Homepage
External link

Degree

  • Ph.D

Research History

  • Chalmers University of Technology  Guest Researcher 

    2024.4 - 2024.7

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    Country：Sweden

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  • Kyushu University Faculty of Information Science and Electrical Engineering Assistant Professor 

    2021.8 - Present

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  • 株式会社デンソー   

    株式会社デンソー

Research Interests・Research Keywords

  • Research theme： Semiconductor spintronics

    Keyword： spintronics; semiconductor devices; crystal growth

    Research period： 2021.8 - 2023.3

Awards

  • 応用物理学会第5回英語講演奨励賞

    2016.9   応用物理学会スピントロニクス分科会  

Papers

  • Effect of nanoscale inhomogeneity on blocking temperature of ZnO:Co films fabricated by using nitrogen-mediated crystallization Reviewed

    Marlis N. Agusutrisno, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoto Yamashita

    MRS Advances   2024.7   （ ISSN:2731-5894 eISSN:2059-8521 ）

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    Authorship：Last author   Publishing type：Research paper (scientific journal)   Publisher：Springer Science and Business Media LLC  

    Diluted magnetic semiconductors (DMS) have attracted interest for the potential applications of spintronic devices. The origin of the temperature dependence of their ferromagnetism has been debated and has not been concluded yet. A potential conclusion is that nanoscale inhomogeneity largely affects the temperature dependence of the magnetization in DMS even if the structure and compositions are not largely different. We examined this hypothesis by implementing nitrogen-mediated crystallization consisting of sputtering deposition of amorphous film and solid-phase crystallization by thermal annealing. A series of samples with different inhomogeneities were prepared by changing the annealing time. No significant changes in the composition and the structure were observed after annealing for various times, while significant enhancements were observed in the coercivity, blocking temperature, and grain size. These results provide clear understanding in the temperature dependence of the ferromagnetism in DMS and direct evidence of the potential conclusion on the long-lasting debate. Graphical abstract: (Figure presented.)

    DOI： 10.1557/s43580-024-00907-z

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    Other Link： https://link.springer.com/article/10.1557/s43580-024-00907-z/fulltext.html

  • On-axis sputtering fabrication of Tm3Fe5O12 film with perpendicular magnetic anisotropy Reviewed International journal

    M. N. Agusutrisno, C. H. Marrows, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, N. Yamashita

    Thin Solid Films   788 ( 15 )   140176 - 140176   2024.1   （ ISSN:0040-6090 eISSN:1879-2731 ）

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    Language：English   Publishing type：Research paper (scientific journal)   Publisher：Elsevier BV  

    Thulium iron garnet, Tm3Fe5O12 with perpendicular magnetic anisotropy is fabricated using an on-axis sputtering technique followed by annealing, whereas previous reports have used unusual off-axis geometries. Stoichiometric Tm3Fe5O12 is obtained after the modification of the deposition conditions involving the position of the substrate relative to the cathode, which affects both the chemical and structural properties. The effective perpendicular magnetic anisotropy of 8.6 kJ/m3 is well in line with the results of previous studies using pulse laser deposition and off-axis sputtering. A maze domain pattern is observed, and the domain-wall energy is evaluated as 0.69 mJ/m2.

    DOI： 10.1016/j.tsf.2023.140176

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  • Role of insoluble atoms in the formation of a three-dimensional buffer layer in inverted Stranski–Krastanov mode Reviewed International journal

    N. Yamashita, R. Mitsuishi, Y. Nakamura, K. Takeda, M. Hori, K. Kamataki, T. Okumura, K. Koga, M. Shiratani

    J. Mater. Res   2023.1

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1557/s43578-022-00886-7

  • Realization of efficient tuning of the Fermi level in iron-based ferrimagnetic alloys Reviewed

    N. Yamashita, E. Shigematsu, S. Honda, R. Ohshima, M. Shiraishi, Y. Ando

    Physical Review Materials   6 ( 10 )   104405   2022.10   （ ISSN:2475-9953 eISSN:2475-9953 ）

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    Language：Others   Publishing type：Research paper (scientific journal)   Publisher：American Physical Society (APS)  

    The Stoner criterion allows only three single elements possessing room-temperature (RT) ferromagnetism: cobalt (Co), nickel (Ni), and iron (Fe). Although these three elements have played central roles in magnetism-based materials, their large work function (4.5∼5.2eV) is becoming a non-negligible obstacle for realization of spin devices using nonmetallic materials with finite energy gaps, because injection of electron spins into these nonmetallic materials is strongly hampered due to the large Schottky barrier height. Hence, a novel ferromagnetic or ferrimagnetic material simultaneously possessing RT ferromagnetism or ferrimagnetism and high Fermi energy is strongly required. Here, we show that an Fe-based alloy, iron-gadolinium (FeGd), allows circumvention of the obstacle. Surprisingly, only 20% of Gd incorporation in Fe dramatically modulates the Fermi energy from -4.8 to -3.0 eV, which is the largest modulation in all metallic alloys reported thus far. The coexistence of ferrimagnetism and nonzero spin polarization at RT of FeGd supports its abundant potential for future applications in low-carrier-density materials such as monolayer, organic, and nondegenerate inorganic semiconductors.

    DOI： 10.1103/physrevmaterials.6.104405

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    Other Link： http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevMaterials.6.104405/fulltext

  • Growth of Single-Crystalline ZnO Films on 18%-Lattice-Mismatched Sapphire Substrates Using Buffer Layers with Three-Dimensional Islands Reviewed

    Yuta Nakamura, Naoto Yamashita, Kunihiro Kamataki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

    Crystal Growth & Design   22 ( 6 )   3770 - 3777   2022.6

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    Language：Others   Publishing type：Research paper (scientific journal)  

    DOI： 10.1021/acs.cgd.2c00145

  • Epitaxial Growth of Zn1-xMgxO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode Using Magnetron Sputtering Reviewed International journal

    D. Takahashi, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    MRS Adv.   2022.2

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1557/s43580-022-00234-1

  • Thermally Generated Spin Signals in a Nondegenerate Silicon Spin Valve Reviewed

    Naoto Yamashita, Yuichiro Ando, Hayato Koike, Shinji Miwa, Yoshishige Suzuki, Masashi Shiraishi

    Physical Review Applied   9 ( 5 )   054002   2018.5

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    Language：Others   Publishing type：Research paper (scientific journal)  

    DOI： 10.1103/physrevapplied.9.054002

  • Large-scale fabrication of thulium iron garnet film with perpendicular magnetic anisotropy using RF magnetron sputtering Reviewed

    Marlis N. Agusutrisno, Sora Obinata, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoto Yamashita

    Japanese Journal of Applied Physics   63 ( 7 )   07SP06 - 07SP06   2024.7   （ ISSN:0021-4922 eISSN:1347-4065 ）

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    Authorship：Last author   Publishing type：Research paper (scientific journal)   Publisher：IOP Publishing  

    Abstract

    Large-scale fabrication of thulium iron garnet (TmIG) films on gadolinium gallium garnet (GGG) substrates, with a total area of 25 cm<sup>2</sup>, has been demonstrated by rotating substrate holders during on-axis sputtering. By optimizing the growth parameters based on the pressure and flow rate of the oxygen ratio, a Tm/Fe ratio of 0.65 was obtained, which is close to the stoichiometry of TmIG. The increase in post-annealing temperature has induced the growth of the TmIG structure by the strain of the lattice constant mechanism. At the highest post-annealing temperature, the crystal structure of TmIG (444) and the perpendicular magnetic anisotropy (PMA) were obtained. This result demonstrates the potential method for large-scale fabrication of TmIG film with PMA.

    DOI： 10.35848/1347-4065/ad5aff

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    Other Link： https://iopscience.iop.org/article/10.35848/1347-4065/ad5aff/pdf

  • Sputtering deposition of dense and low-resistive amorphous In<sub>2</sub>O<sub>3</sub>: Sn films under ZONE-T conditions of Thornton's structural diagram

    Wada, Y; Magdy, W; Takeda, K; Mido, Y; Yamashita, N; Okumura, T; Kamataki, K; Koga, K; Hori, M; Shiratani, M; Itagaki, N

    APPLIED PHYSICS LETTERS   124 ( 24 )   2024.6   （ ISSN:0003-6951 eISSN:1077-3118 ）

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    Publisher：Applied Physics Letters  

    We have fabricated smooth-surfaced amorphous In2O3:Sn (a-ITO) films at a high temperature of 550 °C, far above the typical crystallization threshold of 150 °C for ITO films. This achievement has been made possible by intentionally introducing N2 into the sputtering atmosphere, which maintains a low N atom incorporation of only a few atomic percent within the films. Positioned within ZONE-T of the Thornton diagram (higher-temperature region characterized by high film density), our method allows the preparation of films with superior film density about 6.96 g/cm3, substantially exceeding the density of 6.58 g/cm3 for conventional a-ITO films fabricated under ZONE-1 (low-temperature region) and approaching the bulk crystal density of In2O3 at 7.12 g/cm3. The films also feature a high carrier density of 5 × 1020 cm−3 and a remarkably low resistivity of 3.5 × 10−4 Ω cm, comparable to those of polycrystalline films. The analysis via vacuum-ultraviolet absorption spectroscopy on N and O atom densities in the plasma suggests that amorphization is primarily caused not by N atoms incorporated in the films but by those temporally adsorbed on the film surface, inhibiting crystal nucleation before eventually desorbing. Our findings will pave the way not only for broader applications of a-ITO films but also for the design of other amorphous materials at temperatures beyond their crystallization points.

    DOI： 10.1063/5.0211090

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  • Sputter deposition of ZnO-AlN pseudo-binary amorphous alloys with tunable band gaps in the deep ultraviolet region

    Urakawa, S; Magdy, W; Wada, Y; Narishige, R; Kaneshima, K; Yamashita, N; Okumura, T; Kamataki, K; Koga, K; Shiratani, M; Itagaki, N

    MATERIALS RESEARCH EXPRESS   11 ( 6 )   2024.6   （ eISSN:2053-1591 ）

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    Publisher：Materials Research Express  

    ZnO-AlN pseudo-binary amorphous alloys (a-ZAON hereinafter) with tunable band gaps in the deep ultraviolet (DUV) region have been synthesized using magnetron sputtering. The miscibility gap between ZnO and AlN has been overcome using room-temperature sputtering deposition, leveraging the rapid quenching abilities of sputtered particles to fabricate metastable but single-phase alloys. X-ray diffraction patterns and optical transmittance spectra revealed that the synthesized films with chemical composition ratios of [Zn]/([Zn] + [Al]) = 0.24-0.79 likely manifested as single-phase of a-ZAON films. Despite their amorphous structures, these films presented direct band gaps of 3.4-5.8 eV and thus high optical absorption coefficients (105 cm−1). Notably, the observed values adhered to Vegard’s law for crystalline ZnO-AlN systems, implying that the a-ZAON films were solid solution alloys with atomic-level mixing. Furthermore, atomic force microscopy analyses revealed smooth film surfaces with root-mean-square roughness of 0.8-0.9 nm. Overall, the wide-ranging band gap tunability, high absorption coefficients, amorphous structures, surface smoothness, and low synthesis temperatures of a-ZAON films position them as promising materials for use in DUV optoelectronic devices and power devices fabricated using large-scale glass and flexible substrates.

    DOI： 10.1088/2053-1591/ad4f57

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  • Evaluation of Interaction Between Substrate and Nanoparticles Deposited by Plasma Chemical Vapor Deposition Reviewed International journal

    K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    Bull. Am. Phys. Soc.   2023.10

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    Language：English   Publishing type：Research paper (international conference proceedings)  

  • Prediction by a hybrid machine learning model for highmobility amorphous In2O3: Sn films fabricated by RF plasma sputtering deposition using a nitrogen-mediated amorphization method Reviewed International journal

    K. Kamataki, H. Ohtomo, N. Itagaki, C. F. Lesly, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

    J. Appl. Phys.   134   2023.10

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1063/5.0160228

  • Health assessment of rice cultivated and harvested from plasma-irradiated seeds Reviewed International journal

    T. Okumura, H. Tanaka, T. Nakao, T. Anan, R. Arita, M. Shiraki, K. Shiraki, T. Miyabe, D. Yamashita, K. Matsuo, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani, S. Hosoda, A. Tanaka, Y. Ishibashi, K. Koga

    Sci. Rep.   13   2023.10

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1038/s41598-023-43897-y

  • Low-temperature fabrication of silicon nitride thin films from a SiH4+N2 gas mixture by controlling SiNx nanoparticle growth in multi-hollow remote plasma chemical vapor deposition Reviewed International journal

    K. Kamataki, Y. Sasaki, I. Nagao, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    Mater Sci Semicond Process   164   2023.9

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1016/j.mssp.2023.107613

  • Control of Inhomogeneity and Magnetic Properties of ZnO:Co Films Grown by Magnetron Sputtering Using Nitrogen Reviewed International journal

    M. N. Agusutrisno, R. Narishige, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, N. Yamashita

    Mater Sci Semicond Process   162   2023.8   （ ISSN:1369-8001 eISSN:1873-4081 ）

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    Language：English   Publishing type：Research paper (scientific journal)   Publisher：Materials Science in Semiconductor Processing  

    We experimentally report the control of structural inhomogeneity and magnetic properties of Co-doped ZnO films using nitrogen mediated-crystallization. The ZnO:CoN were grown on a silicon substrate at room temperature by RF-magnetron sputtering using nitrogen and followed by a post-annealing treatment for 3 hours at 400 °C, 600 °C, 800 °C and 1000 °C in the air. This method induces changes in inhomogeneity properties comprised by microstructure and stoichiometry of each film, which are confirmed by X-ray diffraction, thermal desorption, and X-ray fluorescence measurements. The difference in inhomogeneity has led to the transformation in the magnetic properties. Films annealed at 400 °C, which showed the highest inhomogeneity, exhibited superparamagnetic-ferromagnetic properties. In contrast, all the other films exhibited diamagnetic properties. Increasing the post-annealing temperature above 400 °C reduces inhomogeneities indicated by improved grain size, decreased impurities, and lattice parameters and stoichiometry of ZnO:CoN films approached those of pure ZnO. Our present results will contribute to control the inhomogeneity of ZnO:Co films to improve magnetic properties at room temperature.

    DOI： 10.1016/j.mssp.2023.107503

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  • One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges

    Iori Nagao, Kunihiro Kamataki, Akihiro Yamamoto, Michihiro Otaka, Yuma Yamamoto, Daisuke Yamashita, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    MRS Advances   7 ( 31 )   911 - 917   2022.12

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    Language：Others   Publishing type：Research paper (scientific journal)  

    DOI： 10.1557/s43580-022-00417-w

  • Raman spectral analysis of the as-deposited a-C:H films prepared by CH4+ Ar plasma CVD

    Shinjiro Ono, Sung Hwa Hwang, Takamasa Okumura, Kunihiro Kamataki, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Jun-Seok Oh, Susumu Takabayashi, Tatsuyuki Nakatani

    MRS ADVANCES   7 ( 30 )   718 - 722   2022.11

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    Applicability of precise Raman spectral analysis of a-C:H films deposited using a plasma chemical vapor deposition (CVD) method has been discussed based on the sensitivity to initial conditions in peak separation. The spectral analysis offers to deconvolute the spectra into five peaks, while the as-deposited films prepared by plasma CVD is difficult to the five-peak separation. We found the peak position and the peak height ratio of the D-band to the G(+)-band can be employed to discuss the structure of the as-deposited films. We examined the structural difference between the films deposited at the powered electrode and that at grounded electrode. We found graphene nanoribbon-like structures may be formed in the films deposited on the grounded substrate. This result suggests that the substrate position is an important factor to form the graphene nanoribbon-like structure.

    DOI： 10.1557/s43580-022-00310-6

  • Effects of substrate surface polarity on heteroepitaxial growth of pseudobinary ZnO–InN alloy films on ZnO substrates Invited Reviewed

    Ryota Narishige, Naoto Yamashita, Kunihiro Kamataki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Hisato Yabuta, Naho Itagaki

    Journal of Materials Research   38 ( 7 )   1803 - 1812   2022.11

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    DOI： 10.1557/s43578-022-00827-4

  • Role of short-lived nitrogen species generated at low-pressure RF plasma on the germination and seedling growth Reviewed International journal

    K. Koga, P. Attri, T. Okumura, T. Anan, T. Nakao, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    Bull. Am. Phys. Soc.   2022.10

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    Language：English   Publishing type：Research paper (international conference proceedings)  

  • Plasma irradiation-introduced RONS amount into plant seeds and their response analysis Reviewed International journal

    T. Okumura, T. Anan, P. Attri, Y. Tsukada, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi

    Bull. Am. Phys. Soc.   2022.10

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  • Process analysis of cracking aC: H/CNP/aC: H sandwich films under stress using nanoindentation Reviewed International journal

    S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    Bull. Am. Phys. Soc.   2022.10

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  • Sputter epitaxy of Mg-doped ZnO films on sapphire substrates using inverted Stranski-Krastanov mode Reviewed International journal

    M. Shiratani, D. Takahashi, N. Yamashita, N. Itagaki

    Bull. Am. Phys. Soc.   2022.10

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    Language：English   Publishing type：Research paper (international conference proceedings)  

  • Effect of plasma irradiation on germination of lettuce seeds with fluctuating dormancy Reviewed International journal

    T. Anan, T. Nakao, T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    Bull. Am. Phys. Soc.   2022.10

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  • Pressure dependence on spatio-temporal distribution of excitation rates of Ar 2p1 and Ne 2p1 in Ar and Ar/Ne capacitively coupled plasmas Reviewed International journal

    M. Otaka, T. Arima, J. Lai, K. Ikeda, K. Kamataki, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    Bull. Am. Phys. Soc.   2022.10

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  • Control of magnetic transition of ZnO: Co grown by RF-sputter using post-annealing Reviewed International journal

    A. M. Nurut, N. Yamashita, K. Kamataki, K. Koga, N. Itagaki, M. Shiratani

    ICIEE   2022.10

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    Language：English   Publishing type：Research paper (international conference proceedings)  

    DOI： 10.1109/ICIEE55596.2022.10010108

  • Effects of amplitude modulation discharge on behavior of oxygen ions in Ar/O2 capacitively coupled plasma studied by particle-in-cell/Monte Carlo collision model Reviewed International journal

    I. Nagao, A. Yamamoto, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    Bull. Am. Phys. Soc.   2022.10

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  • Measurements of strength and fluctuation of 2D electric fields in plasmas using a fine particle trapped with laser tweezers Reviewed International journal

    K. Kamataki, T. Sato, K. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    Bull. Am. Phys. Soc.   2022.10

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  • Effects of amplitude modulated capacitively coupled discharge Ar plasma on kinetic energy and angular distribution function of ions impinging on electrodes:particle-in-cell/Monte Carlo collision model simulation Reviewed International journal

    K. Abe, K. Kamataki, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K . Koga, M. Shiratani

    Jpn. J. Appl. Phys.   61 ( 10 )   2022.9

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.35848/1347-4065/ac7626

  • Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma Reviewed International journal

    K. Kamataki, D. Nagamatsu, T. Yang, K. Abe, A. Yamamoto, I. Nagao, T. Arima, M. Otaka, Y. Yamamoto, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    AIP Adv   12 ( 8 )   2022.8

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1063/5.0097691

  • Raman spectral analysis of the as-deposited aC: H films prepared by CH4+ Ar plasma CVD Reviewed International journal

    S. Ono, S. H. Hwang, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, J. S. Oh, S. Takabayashi, T. Nakatani

    MRS Adv.   7   2022.7

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1557/s43580-022-00310-6

  • Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma

    Michihiro Otaka, Toshiaki Arima, Jiansyun Lai, Kizuki Ikeda, Kunihiro Kamataki, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani

    MRS Advances   7 ( 31 )   918 - 922   2022.7

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    DOI： 10.1557/s43580-022-00306-2

  • Detection of NO3− introduced in plasma-irradiated dry lettuce seeds using liquid chromatography-electrospray ionization quantum mass spectrometry (LC-ESI QMS) Reviewed International journal

    T. Okumura, P. Attri, K. Kamataki, N. Yamashita, Y. Tsukada, N. Itagaki, M. Shiratani, Y. Ishibashi, K. Kuchitsu, K. Koga

    Sci. Rep.   12   2022.7

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1038/s41598-022-16641-1

  • Epitaxial growth of Zn1−xMgxO films on sapphire substrates via inverted Stranski-Krastanov mode using magnetron sputtering Reviewed

    Daichi Takahashi, Naoto Yamashita, Daisuke Yamashita, Takamasa Okumura, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Naho Itagaki

    MRS Advances   2022.2

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    Language：Others   Publishing type：Research paper (scientific journal)  

    DOI： 10.1557/s43580-022-00234-1

  • Synthetic Rashba spin–orbit system using a silicon metal-oxide semiconductor

    Soobeom Lee, Hayato Koike, Minori Goto, Shinji Miwa, Yoshishige Suzuki, Naoto Yamashita, Ryo Ohshima, Ei Shigematsu, Yuichiro Ando, Masashi Shiraishi

    Nature Materials   20 ( 9 )   1228 - 1232   2021.6

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    Language：Others   Publishing type：Research paper (scientific journal)  

    DOI： 10.1038/s41563-021-01026-y

  • Investigation of the thermal tolerance of silicon-based lateral spin valves

    N. Yamashita, S. Lee, R. Ohshima, E. Shigematsu, H. Koike, Y. Suzuki, S. Miwa, M. Goto, Y. Ando, M. Shiraishi

    Scientific Reports   11 ( 1 )   10583   2021.5

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    <title>Abstract</title>Improvement in the thermal tolerance of Si-based spin devices is realized by employing thermally stable nonmagnetic (NM) electrodes. For Au/Ta/Al electrodes, intermixing between Al atoms and Au atoms occurs at approximately 300 °C, resulting in the formation of a Au/Si interface. The Au–Si liquid phase is formed and diffuses mainly along an in-plane direction between the Si and AlN capping layers, eventually breaking the MgO layer of the ferromagnetic (FM) metal/MgO electrodes, which is located 7 µm away from the NM electrodes. By changing the layer structure of the NM electrode from Au/Ta/Al to Au/Ta, the thermal tolerance is clearly enhanced. Clear spin transport signals are obtained even after annealing at 400 °C. To investigate the effects of Mg insertion in FM electrodes on thermal tolerance, we also compare the thermal tolerance among Fe/Co/MgO, Fe/Co/Mg/MgO and Fe/Co/MgO/Mg contacts. Although a highly efficient spin injection has been reported by insertion of a thin Mg layer below or above the MgO layer, these thermal tolerances decrease obviously.

    DOI： 10.1038/s41598-021-90114-9

  • Enhancement of spin signals by thermal annealing in silicon-based lateral spin valves

    N. Yamashita, S. Lee, R. Ohshima, E. Shigematsu, H. Koike, Y. Suzuki, S. Miwa, M. Goto, Y. Ando, M. Shiraishi

    AIP Advances   10 ( 9 )   095021 - 095021   2020.9

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    DOI： 10.1063/5.0022160

  • Investigation of spin scattering mechanism in silicon channels of Fe/MgO/Si lateral spin valves Reviewed

    Soobeom Lee, Naoto Yamashita, Yuichiro Ando, Shinji Miwa, Yoshishige Suzuki, Hayato Koike, Masashi Shiraishi

    Applied Physics Letters   110 ( 19 )   192401 - 192401   2017.5

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    Language：Others   Publishing type：Research paper (scientific journal)  

    DOI： 10.1063/1.4982966

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Presentations

  • Semiconductor spintronics － device application and the design Invited

    Naoto Yamashita

    Group Seminar  2022.11  Condensed Matter Physics Group, University of Leeds

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    Language：English   Presentation type：Public lecture, seminar, tutorial, course, or other speech  

    Venue：University of Leeds   Country：United Kingdom  

  • Non-off Axis Sputtering Deposition of Ferrimagnetic Insulator Film with Perpendicular Magnetic Anisotropy

    山下尚人, A. Agustrisno, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, C. Marrows

    第70回応用物理学会 春季学術講演会  2023.3 

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    Event date： 2023.3

    Language：English   Presentation type：Oral presentation (general)  

    Venue：上智大学   Country：Japan  

  • Microscopic analysis of single crystalline Zn1-xMgxO thin films on sapphire grown via inverted Stranski-Krastanov mode International conference

    N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Mechanism of homogeneous nucleation of ZnO in N2 and Ar plasma International conference

    N. Yamashita, R. Mitsuishi, Y. Nakamura, T. Okumura, K. Kamataki, K. Koga, M. Shiratani

    第32回日本MRS年次大会  2022.12 

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    Event date： 2022.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • サファイア基板上の単結晶ZnO薄膜作製におけるバッファー層評価指標

    山下尚人, 中村優太, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    第83回応用物理学会秋季学術講演会  2022.9 

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    Event date： 2022.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東北大学   Country：Japan  

  • Increase of Blocking Temperature in Co-doped ZnO by Using NitrogenMediated Crystallization International conference

    N. Yamashita, A. Agusutrisno, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

    ICMFS-2022  2022.7 

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    Event date： 2022.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：OIST   Country：Japan  

  • Large-Scale Fabrication of Tm3 Fe5 O12 Film with Perpendicular Magnetic Anisotropy Using Magnetron Sputtering International conference

    A. M. Nurut, S. Obinata, T. Okumura, K. Kamataki, K. Koga, N. Itagaki, M. Shiratani, N. Yamashita

    ISPlasma  2024.3 

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    Event date： 2024.3

    Language：English   Presentation type：Oral presentation (general)  

    Venue：東京都市大学   Country：Japan  

  • CxHy+ArプラズマCVDを用いた水素化アモルファスカーボン膜の堆積特性に対するガス圧力の効果

    小野晋次郎, 恵利眞人, 奥村賢直, 山下尚人, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date： 2024.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東京都市大学   Country：Japan  

  • プラズマスパッタによる高移動度アモルファスITO成膜におけるハイブリッド機械学習モデル

    鎌滝晋礼, 板垣奈穂, 山下大輔, 奥村賢直, 山下尚人, 古閑一憲, 白谷正治

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date： 2024.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東京都市大学   Country：Japan  

  • 大気圧プラズマを用いた窒素固定における電極温度の効果

    中尾匠, 奥村賢直, パンカジアタリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 古閑一憲

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date： 2024.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東京都市大学   Country：Japan  

  • プラズマ照射によるシロイヌナズナ種皮の物質透過性変化

    奥村賢直, 古閑一憲, アタリパンカジ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 南原英司

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date： 2024.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東京都市大学   Country：Japan  

  • イネ種皮のプラズマ起因化学種透過性の二次元分布解析

    史合平, 奥村賢直, P. Attri, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date： 2024.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東京都市大学   Country：Japan  

  • Stability of insulative perovskite YBiO3 film grown on BaBiO3 buffer layer

    N. Yamashita, P. Shepley, N. Fox2, J. Burton, J. Freeman, S. Sasaki

    第71回応用物理学会 春季学術講演会  2024.3 

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    Event date： 2024.3

    Language：English   Presentation type：Oral presentation (general)  

    Venue：東京都市大学   Country：Japan  

  • Physics of Metal/Si Interfaces for the Development of Spin MOSFETs Invited

    Naoto Yamashita

    2024.3  Daegu Gyeongbuk Institute of Science and Technology

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    Event date： 2024.3

    Language：English   Presentation type：Public lecture, seminar, tutorial, course, or other speech  

    Venue：Daegu Gyeongbuk Institute of Science and Technology   Country：Korea, Republic of  

  • Sputtering deposition of low resistive 30-nm-thick ZnO:Al films on seed layers grown via solid phase crystallization of fractionally crystallized ZnON films International conference

    Y. Wada, S. Zhiyuan, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki

    ISPlasma  2024.3 

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    Event date： 2024.3

    Language：English   Presentation type：Oral presentation (general)  

    Venue：名古屋大学   Country：Japan  

  • Nitrogen Fixation to Leaf Mold Using Air Plasma and Evaluation of Phenotype Response of Sugarcane to Nitrogen-Fixed Fertilizer International conference

    T.Nakao, T. Okumura, P. Attri, D. Yamashita, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani, K. Koga

    ISPlasma  2024.3 

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    Event date： 2024.3

    Language：English   Presentation type：Oral presentation (general)  

    Venue：名古屋大学   Country：Japan  

  • Deposition of carbon nanoparticles fabricated by multi-hollow discharge plasma CVD on DC biased substrates International conference

    K. Koga, S. Ono, M. Eri, S. H. Hwang, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M.Shiratani

    ISPlasma  2024.3 

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    Event date： 2024.3

    Language：English   Presentation type：Oral presentation (general)  

    Venue：名古屋大学   Country：Japan  

  • Molecular structure analysis of DBD plasma irradiated DMPO by LC-MS International conference

    T. Okumura, H. Shi, P.Attri, D. Yamasita, K. Kamataki, N.Yamasita, N. Itagaki, K. Koga, M. Shiratan

    ISPlasma  2024.3 

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    Event date： 2024.3

    Language：English   Presentation type：Oral presentation (general)  

    Venue：名古屋大学   Country：Japan  

  • プラズマスパッタによる高品質アモルファスITO薄膜形成のためのハイブリッド機械学習モデル Invited

    鎌滝晋礼，板垣 奈穂，山下 大輔, 奥村 賢直，山下 尚人, 古閑 一憲, 白谷 正治

    SPP-41  2024.1 

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    Event date： 2024.1

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東京工業大学   Country：Japan  

  • Predictions for High Quality Amorphous ITO(In2O3:Sn) Film Formation via Hybrid Machine Learning Model Invited International conference

    K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

    ICTS  2024.1 

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    Event date： 2024.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：パラダイスホテル釜山   Country：Korea, Republic of  

  • Enhancement of The Coercivity and Blocking Temperature of Co doped ZnO films by RF sputtering Using Nitrogen International conference

    M. N. Agusutrisno, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, N. Yamashita

    MRM2023/IUMRS-ICA2023  2023.12 

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    Event date： 2023.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：国立京都国際会館   Country：Japan  

  • Effects of Carbon Nanoparticle Interposed between Two Hydrogenated Amorphous Carbon Films on Surface Morphology of a-C:H Film

    S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    第39回 九州･山口プラズマ研究会  2023.12 

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    Event date： 2023.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：国立京都国際会館   Country：Japan  

  • Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In2O3:Sn by Sputtering Combined with Solid Phase Crystallization International conference

    N. Itagaki, Z. Shen, Y. Wada, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani

    MRM2023/IUMRS-ICA2023  2023.12 

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    Event date： 2023.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：国立京都国際会館   Country：Japan  

  • Hybrid machine learning model prediction for high mobility amorphous ITO films fabricated by RF plasma sputtering International conference

    K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

    MRM2023/IUMRS-ICA2023  2023.12 

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    Event date： 2023.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：国立京都国際会館   Country：Japan  

  • Evaluation of Elastic Parameters of a-C:H Film with Carbon Nanoparticles Using Nanoindentation Method International conference

    K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    MRM2023/IUMRS-ICA2023  2023.12 

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    Event date： 2023.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：国立京都国際会館   Country：Japan  

  • クメンを用いた二周波容量結合プラズマ CVD 法による a-C:H 膜の製膜特性

    恵利眞人, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷 正治

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date： 2023.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：山口KDDI維新ホール   Country：Japan  

  • TEOS-PECVD における発光分光計測を用いたSiO2 薄膜膜質推定についての研究

    佐藤優志, 山本祐馬, F. W. Sukuma, 長尾伊織, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date： 2023.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：山口KDDI維新ホール   Country：Japan  

  • 放電電圧変調波形が高周波容量結合プラズマに与える影響：PIC-MCC シミュレーション

    長尾伊織，山本祐馬，佐藤優志，鎌滝晋礼，山下尚人, 奥村賢直，木山治樹，板垣奈穂，古閑一憲，白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date： 2023.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：山口KDDI維新ホール   Country：Japan  

  • 逆 Stranski-Krastanov モードを利用した異なるオフ角を有するサファイア基板上への(ZnO)x(InN)1-x 膜の成長

    中野祐太郎，成重椋太，山下尚人，鎌滝晋礼，奥村賢直，古閑一憲，白谷正治，木山治樹，板垣奈穂

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date： 2023.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：山口KDDI維新ホール   Country：Japan  

  • 逆 Stranski-Krastanov モードによるサファイア基板上への(ZnO)x(InN)1-x 膜のエピタキシャル成長:バッファー層のモフォロジーの影響

    畑昌太朗，中野祐太郎，成重椋太，山下尚人，鎌滝晋礼，奥村賢直，古閑一憲，白谷正治，木山治樹，板垣奈穂

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date： 2023.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：山口KDDI維新ホール   Country：Japan  

  • PECVD を用いた a-C:H 成膜における添加希ガス種における成膜機構の違い

    池田築, 大高真寛，大友洋，脇田大地，頼建勲，鎌滝晋礼, 山下大輔，奥村賢直，山下尚人，板垣奈穂，古閑一憲, 白谷正治, 進藤崇央，松土龍夫

    プラズマ・核融合学会 九州・沖縄・山口支部 第27回 支部大会  2023.12 

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    Event date： 2023.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：山口KDDI維新ホール   Country：Japan  

  • 空気プラズマを用いた窒素固定に対する放電電力密度の効果

    中尾匠, 奥村賢直, パンカジアタリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治, 古閑一憲

    第40回 プラズマ・核融合学会 年会  2023.11 

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    Event date： 2023.11

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：アイーナ・いわて県民情報交流センター   Country：Japan  

  • Sputtering deposition of single crystalline ZnO films on sapphire substrates via inverted Stranski-Krastanov mode: effects of thickness of 3D island buffer layer

    H. Otsuyama, R. Mitsuishi, T. Yunoue, K. Yataka, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference  2023.11 

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    Event date： 2023.11

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学伊都キャンパス   Country：Japan  

  • 任意電圧波形放電による容量結合プラズマにおける重畳周波数の効果：PIC-MCCモデル

    頼 建勳, 鎌滝 晋礼, 山下 大輔, 奥村 賢直, 山下 尚人, 板垣 奈穂, 古閑 一憲, 白谷 正治

    2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference  2023.11 

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    Event date： 2023.11

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：九州大学伊都キャンパス   Country：Japan  

  • TEOS-PECVD によるSiO2成膜におけるプラズマ発光強度と膜質の関係

    山本祐馬, 佐藤優志, 長尾伊織, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    2023年(令和5年度)応用物理学会九州支部学術講演会 / The 8th Asian Applied Physics Conference  2023.11 

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    Event date： 2023.11

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学伊都キャンパス   Country：Japan  

  • Quantitative Analysis of Electric Field Intensity Generated by Scalable Dielectric Barrier Discharge Electrodes for Irradiating to Plant Seeds International conference

    K. Koga, T. Okumura, T. Nakao, K. Kamataki, N. Yamashita, N. Itagaki, P. Attri, M. Shiratani

    DPS2023  2023.11 

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    Event date： 2023.11

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ウインク愛知   Country：Japan  

  • Comparative study of deposition characteristics of different precursors for plasma CVD International conference

    S. Ono, M. Eri, T. Okumura, K. Kunihiro, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    DPS2023  2023.11 

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    Event date： 2023.11

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ウインク愛知   Country：Japan  

  • 大量処理のためのプラズマ照射による土壌への窒素固定化の最適化

    中尾 匠,奥村 賢,アタリ パンカジ,山下 大輔,鎌滝 晋礼,山下 尚人,板垣 奈穂,白谷 正治,古閑 一憲

    第33回日本MRS年次大会  2023.11 

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    Event date： 2023.11

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • 質量分析を用いたプラズマ照射イネ種子における分子修飾解析

    史 合平,奥村 賢直,パンカジ アトリ,山下 大輔,鎌滝 晋礼,山下 尚人,板垣 奈穂,古閑 一憲,白谷 正治

    第33回日本MRS年次大会  2023.11 

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    Event date： 2023.11

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • スケーラブル誘電体バリア放電プラズマを照射したDMPOの質量分析

    乙部 響,史 合平,奥村 賢直,阿南 輝樹,アタリ パンカジ,山下 大輔,鎌滝 晋礼,山下 尚人,板垣 奈穂,古閑 一憲,白谷 正治

    第33回日本MRS年次大会  2023.11 

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    Event date： 2023.11

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • 液体クロマトグラフィー質量分析法を用いたプラズマ被照射物からの亜硝酸塩および硝酸塩の同時検出法の開発

    日高 直哉,奥村 賢直,アタリ パンカジ,鎌滝 晋礼,山下 尚人,板垣 奈穂,古閑 一憲,白谷 正治

    第33回日本MRS年次大会  2023.11 

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    Event date： 2023.11

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • Predictions for High Mobility Amorphous ITO(In2O3:Sn) Films via Hybrid Machine Learning Model International conference

    K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani

    AAPPS-DPP2023  2023.11 

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    Event date： 2023.11

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ポートメッセ名古屋   Country：Japan  

  • Highly sensitive electric field vector measurements using an optically trapped fine particle International conference

    M. Shiratani, T. Sato, K. Kamataki, S. W. Fitriani，K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga

    Global Plasma Forum in Aomori  2023.10 

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    Event date： 2023.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ねぶたの家 ワ・ラッセ   Country：Korea, Republic of  

  • Evaluation of carbon nanoparticle adhesion on substrate surface deposited by plasma CVD International conference

    K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    Global Plasma Forum in Aomori  2023.10 

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    Event date： 2023.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ねぶたの家 ワ・ラッセ   Country：Japan  

  • Controlling the synthesis, transport, and surface coverage of carbon nanoparticles using plasma CVD International conference

    S. Ono, M. Eri, T. Okumura, K. Kamataki, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani

    Global Plasma Forum in Aomori  2023.10 

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    Event date： 2023.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ねぶたの家 ワ・ラッセ   Country：Japan  

  • Evaluation of Interaction Between Substrate and Nanoparticles Deposited by Plasma Chemical Vapor Deposition International conference

    K. Koga, S. Ono, M. Eri, T. Okumura, K. Kamataki, N.Yamashita, N. Itagaki, M. Shiratani

    GEC  2023.10 

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    Event date： 2023.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Michigan League  

  • Fabrication process of patterned perpendicular magnetized multilayered film on plastic sheet for flexible magnetic memory

    Y. Kurokawa, N. Yamashita, S. Oishi, H. Yuasa

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date： 2023.9

    Language：English   Presentation type：Oral presentation (general)  

    Venue：熊本城ホール他   Country：Japan  

  • 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(4)

    鎌滝晋礼, 佐藤斗真, 井口恒聖, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date： 2023.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：熊本城ホール他   Country：Japan  

  • サンドウィッチ構造 a-C:H 膜の剥離と強度に対する 膜界面に堆積したナノ粒子の効果

    小野晋次郎, 恵利眞人, 奥村賢直, 鎌滝晋礼, 山下尚人, 木山治樹, 板垣奈穂, 古閑一憲, 白谷正治

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date： 2023.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：熊本城ホール他   Country：Japan  

  • 質量分析を用いたプラズマ照射DMPOの分子修飾解析

    史合平, 奥村賢直, P. Attri, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date： 2023.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：熊本城ホール他   Country：Japan  

  • プラズマ照射による窒素固定肥料へのサトウキビの表現型応答解析

    中尾匠, 奥村賢直, パンカジアタリ, 古閑一憲, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date： 2023.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：熊本城ホール他   Country：Japan  

  • 逆Stranski-Krastanovモードによる格子不整合基板上への原子平坦 (ZnO)x(InN)1-x 膜の成長

    中野祐太郎, 成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 木山治樹, 薮田久人, 板垣奈穂

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date： 2023.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：熊本城ホール他   Country：Japan  

  • ZnOおよびScAlMgO4ステップ基板上への(ZnO)x(InN)1-x膜の室温エピタキシャル成長

    成重椋太, 中野祐太朗, 山下尚人, 鎌滝晋礼, 奥村賢直, 木山治樹, 古閑一憲, 白谷正治, 薮田久人, 板垣奈穂

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date： 2023.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：熊本城ホール他   Country：Japan  

  • サファイア基板上への原子ステップを有するZn1-xMgxO薄膜の形成：3次元島バッファー層の形成温度の影響

    矢高功太郎, 湯上貴文, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date： 2023.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：熊本城ホール他   Country：Japan  

  • 逆Stranski-Krastanovモードを用いたサファイア基板上へのZnO単結晶膜成長：MgOバッファー層の効果

    湯上貴文, 矢高功太郎, 山下尚人, 山下大輔,　奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲, 白谷正治, 板垣奈穂

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date： 2023.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：熊本城ホール他   Country：Japan  

  • ZnON膜からの固相結晶化ZnO膜の形成と透明導電膜シード層としての効果：ZnON膜の結晶化度の影響

    和田義晴, 沈志遠, 薮田久人, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    第84回応用物理学会秋季学術講演会  2023.9 

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    Event date： 2023.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：熊本城ホール他   Country：Japan  

  • 大気圧空気プラズマによる硝酸態窒素固定量に対する放電電力密度依存性

    中尾匠, 奥村賢直, A. Pankaj, 古閑一憲, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 白谷正治

    2023年度(第76回)電気・情報関係学会九州支部連合大会  2023.9 

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    Event date： 2023.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：崇城大学   Country：Japan  

  • 質量分析を用いたプラズマ照射イネ種子における変動分子の組織別解析

    史合平, 奥村賢直, A. Pankaj, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    2023年度(第76回)電気・情報関係学会九州支部連合大会  2023.9 

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    Event date： 2023.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：崇城大学   Country：Japan  

  • Physics of Metal/Si Interfaces for the Development of Spin MOSFETs Invited

    Naoto Yamashita

    Spin+X Scientific Talk  2023.8  Spin Phenomena Interdisciplinary Center

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    Event date： 2023.8

    Language：English  

    Venue：Johannes Gutenberg Universität Mainz   Country：Germany  

  • Sputter epitaxy of atomically flat (ZnO)x(InN)1-x films on sapphire substrates using ZnO(N) buffer layers fabricated by Ar/N2 discharges International conference

    Y. Nakano, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, H. Kiyama, H. Yabuta, N. Itagaki

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Measurement of electric field, UV photons, and long-lifetime reactive species generated by atmospheric pressure air plasma for plasma bio applications International conference

    T. Okumura, S. Tsuboyama, Y. Tagawa, T. Nakao, T. Anan, H. Tanaka, K. Kamataki, N. Yamashita, N. Itagaki, P. Attri, K. Koga, M. Shiratani, K. Kuchitsu

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Coverage control of carbon nanoparticles on substrate using capacitively coupled plasma chemical vapor deposition International conference

    K. Koga, S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Investigation of particle charge and interparticle interaction in a plasma International conference

    K. Kamataki, T. Sato, K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Control of ion trajectory in high aspect ratio trenches by using amplitude modulated rf discharges International conference

    I. Nagao, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Effects of lower discharge frequency on ion energy distribution function in dual frequency plasma studied by particle-in-cell/Monte Carlo method International conference

    J. Lai, T. Arima, M. Otaka, K. Ikeda, I. Nagao, K. Kamataki, D. Yamashita, N. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Optical tweezers technique for electric field strength and fluctuation measurements in plasma using a fine particle International conference

    T. Sato, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Sputter deposition of low resistive 30-nm-thick ZnO:Al films using ZnO seed layers grown via solid-phase crystallization International conference

    Y. Wada, Z. Shen, H. Yabuta, N. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, N. Itagaki

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Pseudomorphic growth of (ZnO)x(InN)1-x films on ZnO substrates by magnetron sputtering using Ar/N2/O2 discharges International conference

    R. Narishige, Y. Nakano, N. Yamashita, K. Kamataki, T. Okumura, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Sputter epitaxy of Zn1-xMgxO films on lattice-mismatched sapphire substrates utilizing ZnO(N)/MgO buffer layers fabricated by Ar/N2 and Ar/O2 discharges International conference

    T. Yunoue, K. Yataka, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, H. Kiyama, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Effects of Ne mixing on plasma enhanced chemical vapor deposition of a-C:H films using CH4/Ar/Ne capacitively coupled discharges International conference

    K. Ikeda, M. Otaka, H. Otomo, T. Arima, J. Lai, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani, T. Shindo, S. Tanaka, T. Matsudo

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Relation between Spatial Distribution of Optical Emission Intensity and SiO2 Film Property in TEOS-PECVD International conference

    Y. Yamamoto, I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Effects of tailored voltage waveform discharges on deposition of hydrogenated amorphous carbon films by CH4/Ar capacitively coupled plasma International conference

    M. Otaka, H. Otomo, K. Ikeda, J. Lai, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, T. Shindo, S. Tanaka, T. Matsudo

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • Deposition characteristics of cumene plasma CVD for high-speed deposition of high-density a-C:H films International conference

    S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ICPIG2023  2023.7 

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    Event date： 2023.7

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Hotel Zuiderduin, Egmonf aan Zee   Country：Netherlands  

  • プラズマ中帯電微粒子の相互作用に関する研究

    井口恒聖, 佐藤斗真, 鎌滝晋礼, 富田健太郎, P. Yiming, 山下尚人, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    2023年度日本表面真空学会　九州支部学術講演会  2023.6 

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    Event date： 2023.6

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：アルカス佐世保   Country：Japan  

  • ナノ粒子を用いた膜界面の形状ゆらぎによる膜応力低減

    小野晋次郎, 恵利眞人, 奥村賢直, 鎌滝晋礼, 山下尚人, 木山治樹, 板垣奈穂, 古閑一憲, 白谷正治

    2023年度日本表面真空学会　九州支部学術講演会  2023.6 

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    Event date： 2023.6

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：アルカス佐世保   Country：Japan  

  • Prediction of Plasma CVD Process Data of a-Si:H Films via Machine Learning International conference

    K. Kamataki, F. L. Chawarambwa, D. Yamashita, N. Yamashita, T.Okumura, N. Itagaki, K.Koga, M. Shiratani

    ISPC25  2023.5 

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    Event date： 2023.5

    Language：English   Presentation type：Oral presentation (general)  

    Venue：みやこめっせ   Country：Japan  

  • 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(3)

    鎌滝晋礼, 佐藤斗真, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    第70回応用物理学会 春季学術講演会  2023.3 

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    Event date： 2023.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：上智大学   Country：Japan  

  • プラズマ照射によるレタス種子表面および内部の分子変動

    阿南輝樹, 奥村賢直, アトリパンカジ, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    第70回応用物理学会 春季学術講演会  2023.3 

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    Event date： 2023.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：上智大学   Country：Japan  

  • プラズマCVD法で堆積した2層a-C:Hの機械的強度に対するカーボンナノ粒子挿入の効果

    田渕竜也, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    第70回応用物理学会 春季学術講演会  2023.3 

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    Event date： 2023.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：上智大学   Country：Japan  

  • 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(3)

    鎌滝晋礼, 佐藤斗真, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    第70回応用物理学会 春季学術講演会  2023.3 

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    Event date： 2023.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：上智大学   Country：Japan  

  • プラズマ照射によるレタス種子表面および内部の分子変動

    阿南輝樹, 奥村賢直, アトリパンカジ, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    第70回応用物理学会 春季学術講演会  2023.3 

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    Event date： 2023.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：上智大学   Country：Japan  

  • Non-off Axis Sputtering Deposition of Ferrimagnetic Insulator Film with Perpendicular Magnetic Anisotropy

    山下尚人, A. Agustrisno, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, C. Marrows

    第70回応用物理学会 春季学術講演会  2023.3 

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    Event date： 2023.3

    Language：English   Presentation type：Oral presentation (general)  

    Venue：上智大学   Country：Japan  

  • プラズマCVD法で堆積した2層a-C:Hの機械的強度に対するカーボンナノ粒子挿入の効果

    田渕竜也, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    第70回応用物理学会 春季学術講演会  2023.3 

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    Event date： 2023.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：上智大学   Country：Japan  

  • Structural Characteristics of Carbon Sphere Composite Deposited by Ar+CH4 Plasma Chemical Vapor Deposition Method International conference

    K. Koga, S. H. Hwang, S. Ono, D. Yoshikawa, T. 0kumura, K. Kamataki, N. Yamashita, N. Itagaki, M.Shiratani

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Developing Prediction of Key Process Parameters and Sputtering Conditions for Amorphous and high Mobility ITO/In2O3 Films via Machine Learning International conference

    K. Kamataki, Y. Mido, I. Nagao, D. Yamashita, T. Okumura, N.Yamashita, K. Koga, N. Itagaki, M. Shiratani

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • A Study of Solid-phase Crystallization of Amorphous ZnON Films International conference

    Z. Shen, Y. Mido, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani1, H. Yabuta, N. Itagaki

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Effects of lower discharge frequency on plasma parameters in capacitively coupled plasmas studied by particle-in-cell/Monte Carlo collision method International conference

    T. Arima, M. Otaka, I. Nagao, K. Kamataki, D. Yamashita, N. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Effects of RF powers on the crystal quality and surface morphology of single crystalline ZnO films deposited by magnetron sputtering International conference

    R. Mitsuishi, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Effects of thermal treatment of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated by magnetron sputtering International conference

    R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Effects of Gas Pressure on Deposition Characteristics of Hydrogenated Amorphous Carbon Films Produced by Ar + CH4 Capacitively Coupled Plasma International conference

    S. Ono, S. H. Hwang, D. Yoshikawa, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Masaharu

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Effects of Amplitude Modulation Discharge on Ion Energy and Angular Distributions studied by PIC-MCC method International conference

    I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Fluctuation of plasma and amount of nanoparticles in TEOS amplitude modulated rf discharge International conference

    A. Yamamoto, I. Nagao, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Time resolved optical emission spectroscopy in Ar and Ar/Ne capacitively coupled radio frequency plasma. International conference

    M. Otaka, D. Nagamatsu, T. Arima, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Sputtering deposition of single crystalline Zn1-xMgxO films on sapphire substrate via inverted Staranski-Krastanov mode: effects of substrate International conference

    K.Yataka, N. Yamashita, D. Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Measurement of fluctuation of electric field in Ar plasmas using a fine particle trapped with laser tweezers International conference

    T. Sato, S. Okunaga, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    7th International Conference on Advances in Functional Materials(AFM-2022)  2023.1 

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    Event date： 2023.1

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • サファイア基板上への Zn1-xMgxO 膜のスパッタエピタキシー：ZnON/MgO バッファー層の効果

    湯上貴文, 矢高功太郎, 三石遼, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲，白谷正治, 薮田久人, 板垣奈穂

    プラズマ・核融合学会 九州・沖縄・山口支部 第26回 支部大会  2022.12 

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    Event date： 2022.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：九州大学筑紫キャンパス   Country：Japan  

  • 固相結晶成長した ZnO シード層上への ZnO:Al 膜のスパッタリング成膜

    和田義晴, 沈志遠, 薮田久人, 山下尚人, 奥村賢直, 鎌滝晋礼, 木山治樹, 古閑一憲，白谷正治, 板垣奈穂

    プラズマ・核融合学会 九州・沖縄・山口支部 第26回 支部大会  2022.12 

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    Event date： 2022.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：九州大学筑紫キャンパス   Country：Japan  

  • ナノインデンテーションを用いた a-C:H/CNP/a-C:H サンドイッチ構造膜の機械的強度評価

    田渕竜也, 小野晋次郎, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲，白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部 第26回 支部大会  2022.12 

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    Event date： 2022.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：九州大学筑紫キャンパス   Country：Japan  

  • Ar/Ne/CH4 プラズマ CVD による a-C:H 成膜への Ne 混合効果

    池田築，大高真寛，大友洋，有馬聡明，頼建勲，鎌滝晋礼, 山下大輔，奥村賢直，山下尚人，板垣奈穂，古閑一憲，白谷正治, 進藤崇央，田中諭志，松土龍夫

    プラズマ・核融合学会 九州・沖縄・山口支部 第26回 支部大会  2022.12 

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    Event date： 2022.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：九州大学筑紫キャンパス   Country：Japan  

  • 水への CO₂プラズマ照射による選択的 CO 生成

    内野泰佑, アタリ パンカジ, 奥村賢直, 古閑一憲，山下大輔, 鎌滝普礼, 山下尚人, 板垣奈穂, 白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部 第26回 支部大会  2022.12 

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    Event date： 2022.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：九州大学筑紫キャンパス   Country：Japan  

  • プラズマ照射を用いて窒素リッチ化した肥料で栽培したサトウキビの生育評価

    中尾匠，小野晋二郎，山本小龍，内野泰祐，奥村賢直，P. Attri，古閑一憲, 山下大輔，鎌滝晋礼，山下尚人，板垣奈穂，白谷正治

    プラズマ・核融合学会 九州・沖縄・山口支部 第26回 支部大会  2022.12 

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    Event date： 2022.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：九州大学筑紫キャンパス   Country：Japan  

  • Electric fields measurement using an optically trapped charged particle in Ar plasma (Invited) Invited International conference

    K. Kamataki, T. Sato, k. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    第32回日本MRS年次大会  2022.12 

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    Event date： 2022.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • Discharge frequency dependence on spatio-temporal distribution of excitation rates of Ar 2p1 and Ne 2p1 in Ar and Ar/Ne capacitively coupled plasmas International conference

    K. Ikeda, M. Otaka, T. Arima, J. Lai, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    第32回日本MRS年次大会  2022.12 

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    Event date： 2022.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • Measurement of the charge on single fine particles in plasma International conference

    K. Kamataki, T. Sato, K. Tomita, Y. Pan, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    第32回日本MRS年次大会  2022.12 

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    Event date： 2022.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • Investigation of dual frequency method in capacitively coupled plasmas using particle-in-cell/Monte Carlo method International conference

    J. Lai, T. Arima, M. Otaka, I. Nagao, K. Kamataki, D. Yamashita, N. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani

    第32回日本MRS年次大会  2022.12 

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    Event date： 2022.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • Effects of Amplitude Modulated Discharge on SiO2 film qualities in TEOS Plasma CVD International conference

    Y. Yamamoto, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    第32回日本MRS年次大会  2022.12 

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    Event date： 2022.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • Formation of Graphene Nanoribbon-like Structure in Carbon Nanoparticles Fabricated by Ar+CH4 Plasma Chemical Vapor Deposition International conference

    S. Ono, S. H. Hwang, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, J. S. Oh, S. Takabayashi, T. Nakatani

    第32回日本MRS年次大会  2022.12 

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    Event date： 2022.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • Influence of Seed Dormancy on Plasma Irradiation Effects on their Germination International conference

    K. Koga, T. Okumura, P. Attri, T. Anan, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani, Y. Ishibashi, S. Tsuboyama, K. Kuchitsu, K. Ishikawa, M. Hori

    第32回日本MRS年次大会  2022.12 

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    Event date： 2022.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • Study on biomolecules extracted from plasma-irradiated plant seeds using quadrupole mass spectrometer International conference

    T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    第32回日本MRS年次大会  2022.12 

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    Event date： 2022.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • Plasma Irradiation-induced Molecular Modification of Quercetin as Plant Antioxidant International conference

    T. Anan, T. Nakao, T. Okumura, P. Attri, D. Yamashita, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi

    第32回日本MRS年次大会  2022.12 

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    Event date： 2022.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • Improvement of Germination Characteristics of Sorghum bicolor Seeds Irradiated by Surface Discharge Plasma International conference

    S. Yamamoto, T. Nakao, T. Anan, T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Yanagawa, S. Shimada

    第32回日本MRS年次大会  2022.12 

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    Event date： 2022.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：横浜市産業貿易センタービル   Country：Japan  

  • Sputter epitaxy of (ZnO)x(InN)1-x films on sapphire substrates using ZnON buffer layers

    Y. Nakano, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, H. Kiyama, H. Yabuta, N. Itagaki

    2022年(令和４年度)応用物理学会九州支部学術講演会 / The 7th Asian Applied Physics Conference  2022.11 

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    Event date： 2022.11

    Language：English   Presentation type：Oral presentation (general)  

    Venue：大分大学   Country：Japan  

  • Sputtering deposition of ZnO:Al Transparent Conducting Films on Seed Layers Crystallized via Thermal Annealing of Amorphous ZnON Films

    Z. Shen, H. Yabuta, Y. Wada, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, H. Kiyama, N. Itagaki

    2022年(令和４年度)応用物理学会九州支部学術講演会 / The 7th Asian Applied Physics Conference  2022.11 

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    Event date： 2022.11

    Language：English   Presentation type：Oral presentation (general)  

    Venue：大分大学   Country：Japan  

  • 二周波重畳容量結合並行平板放電の PIC-MCC シミュレーション:駆動周波数の効果

    有馬聡明, 頼建勲, 大高真寛, 池田築, 長尾伊織, 鎌滝晋礼, 山下大輔, 山下尚人, 板垣奈穂, 奥村賢直, 古閑一憲, 白谷正治

    2022年(令和４年度)応用物理学会九州支部学術講演会 / The 7th Asian Applied Physics Conference  2022.11 

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    Event date： 2022.11

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：大分大学   Country：Japan  

  • One-dimensional particle-in-cell / Monte Carlo collision model simulation of the effects of amplitude modulation discharge on ion/electron energy distribution functions International conference

    I. Nagao, A. Yamamoto, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    DPS2022  2022.11 

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    Event date： 2022.11

    Language：English   Presentation type：Oral presentation (general)  

    Venue：大阪国際会議場   Country：Japan  

  • Effects of plasma activ ated lact ate solution administration to seeds of Arabidopsis thaliana on germination characteristics International conference

    T. Anan, T. Nakao, T. Okumura, P. Attri, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi, S. Tsuboyama, K. Hashimoto, K. Kuchitsu, H. Hashizume, K. Ishikawa, M. Hori

    DPS2022  2022.11 

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    Event date： 2022.11

    Language：English   Presentation type：Oral presentation (general)  

    Venue：大阪国際会議場   Country：Japan  

  • Study of electric field measurements in Ar plasmas using an optically trapped fine particle International conference

    T.Sato, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, N.Yamashita, N. Itagaki, K. Koga, M. Shiratani

    AAPPS-DPP 2022  2022.10 

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    Event date： 2022.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：オンライン   Country：Japan  

  • The role of post-annealing treatment on ZnO:Co structure and magnetic transition grown by sputtering deposition International conference

    A. M. Nurut, N. Yamashita, K. Kamataki, K. Koga, N. Itagaki, M. Shiratani

    ICIEE 2022  2022.10 

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    Event date： 2022.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：Indonesia,Yogyakarta・オンライン   Country：Indonesia  

  • Role of short-lived nitrogen species generated at low-pressure RF plasma on the germination and seedling growth International conference

    K. Koga, P. Attri, T. Okumura, T. Anan, T. Nakao, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    ICRP-11/GCE2022  2022.10 

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    Event date： 2022.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：仙台国際センター   Country：Japan  

  • Plasma irradiation-introduced RONS amount into plant seeds and their response analysis International conference

    T. Okumura, T. Anan, P. Attri, Y. Tsukada, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Y. Ishibashi

    ICRP-11/GCE2022  2022.10 

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    Event date： 2022.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：仙台国際センター   Country：Japan  

  • Process analysis of cracking aC: H/CNP/aC: H sandwich films under stress using nanoindentation International conference

    S. Ono, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ICRP-11/GCE2022  2022.10 

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    Event date： 2022.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：仙台国際センター   Country：Japan  

  • Sputter epitaxy of Mg-doped ZnO films on sapphire substrates using inverted Stranski-Krastanov mode International conference

    M. Shiratani, D. Takahashi, N. Yamashita, N. Itagaki

    ICRP-11/GCE2022  2022.10 

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    Event date： 2022.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：仙台国際センター   Country：Japan  

  • Effect of plasma irradiation on germination of lettuce seeds with fluctuating dormancy International conference

    T. Anan, T. Nakao, T. Okumura, P. Attri, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ICRP-11/GCE2022  2022.10 

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    Event date： 2022.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：仙台国際センター   Country：Japan  

  • Pressure dependence on spatio-temporal distribution of excitation rates of Ar 2p1 and Ne 2p1 in Ar and Ar/Ne capacitively coupled plasmas International conference

    M. Otaka, T. Arima, J. Lai, K. Ikeda, K. Kamataki, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    ICRP-11/GCE2022  2022.10 

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    Event date： 2022.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：仙台国際センター   Country：Japan  

  • Effects of amplitude modulation discharge on behavior of oxygen ions in Ar/O2 capacitively coupled plasma studied by particle-in-cell/Monte Carlo collision model International conference

    I. Nagao, A. Yamamoto, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    ICRP-11/GCE2022  2022.10 

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    Event date： 2022.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：仙台国際センター   Country：Japan  

  • Measurements of strength and fluctuation of 2D electric fields in plasmas using a fine particle trapped with laser tweezers(Invited) Invited International conference

    K. Kamataki, T. Sato, K. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    ICRP-11/GCE2022  2022.10 

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    Event date： 2022.10

    Language：English   Presentation type：Oral presentation (general)  

    Venue：仙台国際センター   Country：Japan  

  • Role of plasma treatment on radish seeds affects germination, morphology, and biochemical responses

    P. Attri, T. Okumura, K. Koga, K. Kamataki, N. Yamashita, Y. Tsukada, N. Itagaki, M. Shiratani

    第83回応用物理学会秋季学術講演会  2022.9 

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    Event date： 2022.9

    Language：English   Presentation type：Oral presentation (general)  

    Venue：東北大学   Country：Japan  

  • 固相結晶化シード層上へのZnO:Al透明導電膜のスパッタリング成膜：固相結晶化温度の影響

    沈志遠, 薮田久人, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂

    第83回応用物理学会秋季学術講演会  2022.9 

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    Event date： 2022.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東北大学   Country：Japan  

  • スパッタエピタキシー法による(ZnO)x(InN)1-x単結晶薄膜の室温成膜

    成重椋太, 山下尚人, 鎌滝晋礼, 奥村賢直, 古閑一憲, 白谷正治, 板垣奈穂

    第83回応用物理学会秋季学術講演会  2022.9 

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    Event date： 2022.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東北大学   Country：Japan  

  • 格子不整合サファイア基板上への単結晶ZnO膜のスパッタリング成膜: ZnONバッファー層の効果

    三石遼, 矢高功太郎, 山下尚人, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    第83回応用物理学会秋季学術講演会  2022.9 

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    Event date： 2022.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東北大学   Country：Japan  

  • 異なるMg組成を有する単結晶Zn­­1-xMgxO膜成長におけるZnONバッファー層の効果

    矢高功太郎, 高橋大智, 山下尚人, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    第83回応用物理学会秋季学術講演会  2022.9 

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    Event date： 2022.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東北大学   Country：Japan  

  • 大気圧空気プラズマを用いた肥料への窒素固定と圃場試験

    中尾匠, 奥村賢直, パンカジアトリ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷 正治

    第83回応用物理学会秋季学術講演会  2022.9 

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    Event date： 2022.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東北大学   Country：Japan  

  • 休眠状態を考慮したレタス種子発芽へのプラズマ照射効果

    奥村賢直, 阿南輝樹, アタリパンカジ, 山下大輔, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治, 石橋勇志

    第83回応用物理学会秋季学術講演会  2022.9 

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    Event date： 2022.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東北大学   Country：Japan  

  • 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(2)

    鎌滝晋礼, 佐藤斗真, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    第83回応用物理学会秋季学術講演会  2022.9 

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    Event date： 2022.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東北大学   Country：Japan  

  • 振幅変調放電法を用いたTEOSプラズマCVDへの効果

    山本晃大, 長尾伊織, 山本祐馬, 大高真寛, 山下大輔, 鎌滝晋礼, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    第83回応用物理学会秋季学術講演会  2022.9 

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    Event date： 2022.9

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：東北大学   Country：Japan  

  • Impact of amplitude modulated discharge on suppression of nanoparticle growth in TEOS/O2/Ar capacitively coupled plasma International conference

    K. Kamataki, A. Yamamoto, I. Nagao, Y. Yamamoto, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    IVC-22  2022.9 

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    Event date： 2022.9

    Language：English   Presentation type：Oral presentation (general)  

    Venue：札幌コンベンションセンター   Country：Japan  

  • Effects of surface polarity of ZnO substrates on epitaxial growth of (ZnO)x(InN)1-x films fabricated at room temperature International conference

    R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

    9th International Symposium on Control of Semiconductor Interfaces  2022.9 

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    Event date： 2022.9

    Language：English   Presentation type：Oral presentation (general)  

    Venue：名古屋大学   Country：Japan  

  • Eff ects of Modifi cation of Film Interface by Nanoparticles on Mechanical Properties of Films International conference

    S. Ono, S. H. Hwang, T. Okumura, K. Koga, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    9th International Symposium on Control of Semiconductor Interfaces  2022.9 

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    Event date： 2022.9

    Language：English   Presentation type：Oral presentation (general)  

    Venue：名古屋大学   Country：Japan  

  • Eff ects of Amplitude Modulated RF Discharge on Properties of SiO2 Films Deposited by TEOS/O2/Ar Plasma-Enhanced Chemical Vapor Deposition International conference

    K. Kamataki, A. Yamamoto, I. Nagao, Y. Yamamoto, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    9th International Symposium on Control of Semiconductor Interfaces  2022.9 

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    Event date： 2022.9

    Language：English   Presentation type：Oral presentation (general)  

    Venue：名古屋大学   Country：Japan  

  • Fabrication of Low-Resistive Amorphous In2O3 :Sn Films at 600°C by Magnetron Sputtering Using Nitrogen International conference

    N. Itagaki, Y. Mido, Z. Shen, N. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani

    9th International Symposium on Control of Semiconductor Interfaces  2022.9 

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    Event date： 2022.9

    Language：English   Presentation type：Oral presentation (general)  

    Venue：名古屋大学   Country：Japan  

  • Control of Crystal Structure and Magnetic Properties of ZnO: Co Films Grown by Magnetron Sputtering Using Nitrogen International conference

    A. M. Nurut, R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

    9th International Symposium on Control of Semiconductor Interfaces  2022.9 

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    Event date： 2022.9

    Language：English   Presentation type：Oral presentation (general)  

    Venue：名古屋大学   Country：Japan  

  • Thermoplastic Polymer Electrolytes for DSSCs Performance Under V-Shape Low-Concentrated Light International conference

    T. E. Putri, F. L. Chawarambwa, A. Pankaj, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

    IUMRS-ICYRAM 2022  2022.8 

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    Event date： 2022.8

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Magnetic properties of Co-doped ZnO films fabricated by sputtering using mediated crystallization. International conference

    A. M. Nurut, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, N. Itagaki, M. Shiratani

    IUMRS-ICYRAM 2022  2022.8 

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    Event date： 2022.8

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Ion energy and angular distribution functions in amplitude modulated capacitively coupled Ar discharge plasma obtained using particle-in-cell Monte Carlo collision model simulation International conference

    I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani

    IUMRS-ICYRAM 2022  2022.8 

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    Event date： 2022.8

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Time resolved optical emission spectroscopy in Ar/Ne capacitively coupled radio frequency plasma International conference

    M. Otaka, D. Nagamatsu1, T. Arima, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    IUMRS-ICYRAM 2022  2022.8 

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    Event date： 2022.8

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • Spatio-temporal structures of plasma density in lower driving rf frequency plasmas studied by particle-in-cell/Monte Carlo collision method International conference

    T. Arima, M.Otaka, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    IUMRS-ICYRAM 2022  2022.8 

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    Event date： 2022.8

    Language：English   Presentation type：Oral presentation (general)  

    Venue：九州大学医学部百年講堂   Country：Japan  

  • TEOSプラズマSiO2成膜に及ぼす振幅変調放電の効果

    山本晃大、長尾伊織、山本祐馬、大高真寛、山下大輔、鎌滝晋礼、奥村賢直、山下尚人、板垣奈穂、古閑一憲、白谷正治

    2022年度日本表面真空学会　九州支部学術講演会  2022.6 

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    Event date： 2022.6

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：佐賀大学   Country：Japan  

  • 大気圧空気プラズマで生成した硝酸態窒素の水表面への輸送評価

    中尾匠、奥村賢直、P. Attri、古閑一憲、山下大輔、鎌滝晋礼、山下尚人、板垣奈穂、白谷正治

    2022年度日本表面真空学会　九州支部学術講演会  2022.6 

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    Event date： 2022.6

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：佐賀大学   Country：Japan  

  • 逆Stranski-Krastanovモードによる単結晶ZnO薄膜のスパッタリング成膜:窒素流量の影響

    三石遼, 山下尚人, 矢高功太郎, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    2022年度日本表面真空学会　九州支部学術講演会  2022.6 

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    Event date： 2022.6

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：佐賀大学   Country：Japan  

  • Key parameters for single crystalline ZnO film growth by magnetron sputtering via inverted Stranski-Krastanov mode International conference

    N. Yamashita, Y. Nakamura, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

    MRS spring meeting 2022  2022.5 

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    Event date： 2022.5

    Language：English   Presentation type：Oral presentation (general)  

    Venue：オンライン  

  • Development of Measurement of Two-Dimensional Distribution of Strength of Electrical Field with High Spatial Resolution Using Optical Trapped Particle in Plasma International conference

    K. Kamataki, S. Okunaga,T. Sato,K. Tomita, P. Yimin, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    MRS spring meeting 2022  2022.5 

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    Event date： 2022.5

    Language：English   Presentation type：Oral presentation (general)  

    Venue：オンライン  

  • Epitaxial Growth of Atomically Flat Single-crystalline (ZnO) (InN) Films on O-polar ZnO Substrates by Magnetron Sputtering International conference

    R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N.Itagaki

    MRS spring meeting 2022  2022.5 

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    Event date： 2022.5

    Language：English   Presentation type：Oral presentation (general)  

    Venue：オンライン  

  • Structural Control of Hydrogenated Amorphous Carbon Films by Substrate Position and Gas Pressure in Plasma Chemical Vapor Deposition International conference

    S. Ono, S. H. Hwang, D. Yoshikawa, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, J. S. Oh, S. Takabayashi, T. Nakatani

    MRS spring meeting 2022  2022.5 

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    Event date： 2022.5

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ホノルル  

  • Epitaxial Growth of Single-Crystalline ZnO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode by Low-Power Magnetron Sputtering International conference

    R. Mitsuishi, N. Yamashita, D.Takahashi, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    MRS spring meeting 2022  2022.5 

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    Event date： 2022.5

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ホノルル  

  • Stress Relaxation of Hydrogenated Amorphous Carbon Films by Incorporating Carbon Nanoparticles Using Plasma Chemical Vapor Deposition International conference

    K. Koga, S. H. Hwang, S. Ono, D. Yoshikawa, T. Okumura, N. Yamashita, K. Kamataki, N. Itagaki, M. Shiratani, J-S. Oh, S. Takabayashi, T. Nakatani

    MRS spring meeting 2022  2022.5 

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    Event date： 2022.5

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ホノルル  

  • Time Resolved Optical Emission Spectroscopy in Ar and Ar/Ne Capacitively Coupled Radio Frequency Plasma International conference

    M. Otaka, D. Nagamatsu, T. Arima, K. Kamataki, D. Yamashita, N. yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    MRS spring meeting 2022  2022.5 

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    Event date： 2022.5

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ホノルル  

  • Effects of rf Frequency on Plasma Density in Capacitively Coupled Plasmas at Low Pressure Studied by Particle-in-Cell/Monte Carlo Collision Method International conference

    T. Arima , T. Yang, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    MRS spring meeting 2022  2022.5 

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    Event date： 2022.5

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ホノルル  

  • Quantitative Evaluation through LC-QqQ MS/MS for RONS Induced into Dry Seeds by Non-Thermal Plasma Irradiation International conference

    T. Okumura , K. Koga , P. Attri , K. Kamataki , N. Yamashita , N. Itagaki, M. Shiratani

    MRS spring meeting 2022  2022.5 

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    Event date： 2022.5

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ホノルル  

  • Amplitude Modulation Frequency Dependence of Ion Energy Distribution in Capacitively Coupled Discharge Plasma Studied by Particle-in-Cell/Monte Carlo Collision Method International conference

    I. Nagao, A. Yamamoto, K. Kamataki, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani

    MRS spring meeting 2022  2022.5 

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    Event date： 2022.5

    Language：English   Presentation type：Oral presentation (general)  

    Venue：ホノルル  

  • プラズマ CVD 法を用いた a-C:H 薄膜製膜特性に対するガス圧力・基板位置の効果

    小野晋次郎, 吉川大智, 黄成和, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治, 呉準席, 鷹林将, 中谷達行

    第69回応用物理学会春季学術講演会  2022.3 

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    Event date： 2022.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：青山学院大学・ｵﾝﾗｲﾝ   Country：Japan  

  • 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測

    鎌滝晋礼, 奥永冴京, 佐藤斗真, 富田健太郎, P. Yiming, 山下大輔, 山下尚人,奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治

    第69回応用物理学会春季学術講演会  2022.3 

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    Event date： 2022.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：青山学院大学・ｵﾝﾗｲﾝ   Country：Japan  

  • 調湿レタス種子のラジカル量に与えるプラズマ照射の効果

    奥村賢直，阿南輝樹，パンカジアタリ, 古閑一憲, 鎌滝晋礼，山下尚人, 板垣奈穂, 白谷正治, 石橋勇

    第69回応用物理学会春季学術講演会  2022.3 

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    Event date： 2022.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：青山学院大学・ｵﾝﾗｲﾝ   Country：Japan  

  • CNP 層を挿入した a-C:H 膜の応力低減に対する CNP 被覆率の効果

    吉川大智, 小野晋次郎, 黄成和, 奥村賢直, 鎌滝晋礼, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治, 鷹林将，呉準席, 中谷達行

    第69回応用物理学会春季学術講演会  2022.3 

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    Event date： 2022.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：青山学院大学・ｵﾝﾗｲﾝ   Country：Japan  

  • 植物へのプラズマ照射効果解明に向けたゼニゴケ実験系の確立

    古閑一憲, 坪山祥子，田川雄大, 中尾匠，田中颯，阿南輝樹，奥村賢直 ，P. Attri，鎌滝晋礼，山下尚人 ，板垣奈穂 ，白谷正治 ，朽津和幸

    第69回応用物理学会春季学術講演会  2022.3 

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    Event date： 2022.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：青山学院大学・ｵﾝﾗｲﾝ   Country：Japan  

  • プラズマCVDを用いて堆積した薄膜のナノ構造化による機械的特性制御

    古閑一憲，黄成和，小野晋次郎，吉川大智, 奥村賢直，鎌滝晋礼，山下尚人，板垣奈穂，白谷正治

    日本物理学会 第77回年次大会（2022年）  2022.3 

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    Event date： 2022.3

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：オンライン   Country：Japan  

  • Deposition of Carbon Nanoparticles of 5 nm in Size on Positively Biased Substrates using Multi-Hollow Discharge Plasma CVD Method International conference

    K. Koga, S. H. Hwang, S. Ono, D. Yoshikawa, T. Okumura, K. Kamataki, N. Yamashita, N. Itagaki, M. Shiratani

    ISPlasma2022/IC-PLANTS2022  2022.3 

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    Event date： 2022.3

    Language：English   Presentation type：Oral presentation (general)  

    Venue：オンライン   Country：Japan  

  • プラズマ照射による酸化還元反応に対する種子内水分量の効果

    阿南 輝樹, 田中颯，奥村賢直, アタリパンカジ, 中尾匠, 鎌滝晋礼，山下尚人, 板垣奈穂，古閑ー憲, 白谷 正治

    SPP-39/SPSM34  2022.1 

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    Event date： 2022.1

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：オンライン   Country：Japan  

  • Ohmic contact on n-type Si using an Iron-based Alloy International conference

    N. Yamashita, E. Shigematsu, S. Honda, R. Ohshima, M. Shiraishi, Y. Ando

    2022 Joint MMM-Intermag Conference  2021.12 

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    Event date： 2021.12 - 2022.3

    Language：English   Presentation type：Oral presentation (general)  

    Venue：オンデマンド  

  • Solid-phase Crystallization of Sputter-deposited ZnON Films and Their Impacts as Seed Layers for ZnO:Al Transparent Conducting Oxides

    Z. Shen, N. Yamashita, Y. Mido, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, H. Yabuta, N. Itagaki

    プラズマ・核融合学会九州・沖縄・山口支部 第24回支部大会  2021.12 

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    Event date： 2021.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：オンライン   Country：Japan  

  • PIC-MCCM を用いた平行平板容量結合プラズマに対する放電周波数依存性に関する研究

    陶陽, 阿部滉平, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    プラズマ・核融合学会九州・沖縄・山口支部 第24回支部大会  2021.12 

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    Event date： 2021.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：オンライン   Country：Japan  

  • 平行平板容量結合高周波放電プラズマの AM 変調周波数依存性に関する PICMCC シミュレーション

    長尾伊織, 阿部滉平, 山本晃大, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治

    プラズマ・核融合学会九州・沖縄・山口支部 第24回支部大会  2021.12 

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    Event date： 2021.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：オンライン   Country：Japan  

  • 逆 Stranski-Krastanov モードを利用した単結晶 ZnMgO 薄膜のスパッタリング成膜

    矢髙功太郎, 山下尚人, 髙橋大智, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂

    プラズマ・核融合学会九州・沖縄・山口支部 第24回支部大会  2021.12 

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    Event date： 2021.12

    Language：Japanese   Presentation type：Oral presentation (general)  

    Venue：オンライン   Country：Japan  

  • Epitaxial Growth of Atomically Flat Single-crystalline (ZnO) (InN) Films on O-polar ZnO Substrates by Magnetron Sputtering International conference

    R. Narishige, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki

    MRS fall meeting 2021  2021.12 

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    Event date： 2021.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：オンライン  

  • Sputtering deposition of single crystalline ZnO films on sapphire substrates via inverted Stranski-Krastanov mode: effects of RF power International conference

    R. Mitsuishi, D. Takahashi, D. Yamashita, T. Okumura, N. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki

    The 6th Asian Applied Physics Conference (Asian-APC)  2021.12 

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    Event date： 2021.12

    Language：English   Presentation type：Oral presentation (general)  

    Venue：オンライン   Country：Japan  

  • Large Modulation of the Fermi Energy in an Iron-Based Alloy

    N. Yamashita, E. Shigematsu, S. Honda, R. Ohshima, M. Shiraishi, Y. Ando

    第82回応用物理学会秋季学術講演会  2021.9 

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    Event date： 2021.9

    Language：English   Presentation type：Oral presentation (general)  

    Venue：オンライン   Country：Japan  

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Professional Memberships

Research Projects

  • スパッタエピタキシーによる酸化物スピンオービトロニクスの開拓

    2024 - 2026

    日本板硝子材料工学助成会

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    Authorship：Principal investigator  Grant type：Contract research

  • スピン流を用いた磁壁カイラリティの電気的検出, 強靭化ハードウェア

    2023.10 - 2026.3

    Research commissions

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    Authorship：Principal investigator  Grant type：Other funds from industry-academia collaboration

  • Implementation and Characterization of Oxide Topological Insulator

    2023.4 - 2024.3

    Joint research

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    Authorship：Principal investigator  Grant type：Other funds from industry-academia collaboration

  • スピン流を用いた磁壁カイラリティの電気的検出

    2023 - 2026

    JST Strategic Basic Research Program (Ministry of Education, Culture, Sports, Science and Technology)

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    Authorship：Principal investigator  Grant type：Contract research

  • 酸化物半導体および磁性体の薄膜作製の研究

    2023

    数理・データサイエンスに関する教育・研究支援プログラム

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    Authorship：Principal investigator  Grant type：On-campus funds, funds, etc.

  • 量子ビット応用に向けた酸化物半導体における暗励起子スピン流の研究

    Grant number：22K14292  2022 - 2023

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Early-Career Scientists

    山下 尚人

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    Authorship：Principal investigator  Grant type：Scientific research funding

    量子ビット応用が期待される暗励起子の生成と検出を研究する。暗励起子は固体中で電子と正孔が結びついた励起子のうち、光学遷移が禁制され消滅確率の低い長寿命な励起子である。電気的にも光学的にも直接検出不可能のため、発光デバイスおよび光電変換デバイスの研究ではほとんど触れられることのない日陰の存在だったが、その長寿命性から量子ビット応用が期待されている。研究代表者は、スピン角運動量を用いることにより暗励起子を検出可能である考えており、その基盤技術を研究する。

    CiNii Research

  • シリコンスピントランジスタの高性能化に関する研究

    Grant number：20J22776  2020.4 - 2023.3

    Grants-in-Aid for Scientific Research  Grant-in-Aid for JSPS Fellows

    山下 尚人

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    Grant type：Scientific research funding

    半導体集積回路の発熱問題、消費電力問題を解決するスピントランジスタの実現に向け、エネルギー効率の良いスピン流生成方法を開発する。半導体シリコンを用いたスピントランジスタは室温動作実証されたが、エネルギー効率が低い点が課題となっている。半導体で生じるの熱を活用する等、新たな指針に基づいたのスピン流生成方法について調査し、低消費電力スピントランジスタの実現に向けて材料開発と作製方法の検討を行う。

    CiNii Research

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Class subject

  • 電気情報工学実験Ⅰ（A・B）

    2023.4 - 2023.9   First semester

  • 電気情報工学実験Ⅰ（EC・EE）

    2023.4 - 2023.9   First semester

  • プログラミング演習(P)

    2022.6 - 2022.8   Summer quarter

  • 電気情報工学実験Ⅰ（A,B）

    2022.4 - 2022.9   First semester

FD Participation

  • 2023.3   Role：Participation   Title：【シス情FD】独・蘭・台湾での産学連携を垣間見る-Industy 4.0・量子コンピューティング・先端半導体-

    Organizer：[Undergraduate school/graduate school/graduate faculty]

  • 2022.10   Role：Speech   Title：【シス情FD】若手教員による研究紹介⑥

    Organizer：[Undergraduate school/graduate school/graduate faculty]

  • 2022.5   Role：Participation   Title：【シス情FD】若手教員による研究紹介④「量子コンピュータ・システム・アーキテクチャの研究～道具になることを目指して～」

    Organizer：[Undergraduate school/graduate school/graduate faculty]

  • 2022.4   Role：Participation   Title：令和４年度 第１回全学ＦＤ（新任教員の研修）The 1st All-University FD (training for new faculty members) in FY2022

    Organizer：University-wide

  • 2022.4   Role：Participation   Title：【シス情FD】第4期中期目標・中期計画等について

    Organizer：[Undergraduate school/graduate school/graduate faculty]

  • 2021.9   Role：Participation   Title：博士後期課程の充足率向上に向けて

    Organizer：[Undergraduate school/graduate school/graduate faculty]

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Travel Abroad

  • 2024.3

    Staying countory name 1：Taiwan, Province of China   Staying institution name 1：National Chung Cheng University

  • 2024.3

    Staying countory name 1：Korea, Republic of   Staying institution name 1：Daegu Gyeongbuk Institute of Science and Technology

  • 2023.8 - 2023.9

    Staying countory name 1：United Kingdom   Staying institution name 1：University of Leeds

  • 2023.8

    Staying countory name 1：Germany   Staying institution name 1：Johannes Gutenberg-Universität Mainz

  • 2022.10 - 2023.1

    Staying countory name 1：United Kingdom   Staying institution name 1：University of Leeds