Kyushu University Academic Staff Educational and Research Activities Database
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KAMATAKI KUNIHIRO Last modified date：2023.11.27

Associate Professor / Department of Electronics
Faculty of Information Science and Electrical Engineering


Other Organization
Center of Plasma Nono-interface Engineering
Research Center for Plasma Turbulence


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Homepage
https://kyushu-u.elsevierpure.com/en/persons/kunihiro-kamataki
　Reseacher Profiling Tool　Kyushu University Pure
http://plasma.ed.kyushu-u.ac.jp
Academic Degree
Ph.D.
Country of degree conferring institution (Overseas)
No
Field of Specialization
Plasma Engineering, Plasma Physics, Science Education
Total Priod of education and research career in the foreign country
00years00months
Outline Activities
【Research】
Effect of fluctuations in plasma, Active learning in science education.
Research Field： ULSI, Solar cell, Rechargeable battery, science education

【Education】
Educational research and development of physics education.
Kikan-Education Seminar
interdisciplinary collaborative learning of social issues
Scientific seminar for a small group of arts and science students
Research
Research Interests
  • Elucidation and Application of Precise Control Mechanism of Plasma Process by Controlling Discharge Technique
    keyword : Precise Control Mechanism of Plasma Process
    2023.04～2026.03.
  • Mechanism of spatio-temporal structure fluctuation formation of sheath electric field using laser trapping particles in plasma
    keyword : Mechanism of spatio-temporal structure fluctuation formation of sheath electric field
    2020.04～2024.03.
  • New TVWs discharge method in reactive plasma
    keyword : New TVWs discharge method in reactive plasma
    2020.04～2023.03.
  • Machine learning in plasma process
    keyword : machine learning, data science
    2018.04～2020.03.
  • Growth and Behavior of nanoparticles in reactive plasma
    keyword : Growth and Behavior of nanoparticles in reactive plasma
    2018.04～2020.03.
  • Effect of scientific experimental lecture for first year students
    keyword : Experiment, Science, First year education
    2016.04.
  • Education of Experiments for first and second year undergraduates using PBL and AL methods.
    keyword : Experiment, Science
    2013.04.
  • Interaction between plasma and dust particle in space
    keyword : Interaction between plasma and dust particle
    2010.04.
  • High Capacity Li Ion Battery Anodes Using Silicon Carbide Nano-particles Produced by Double Multi-Hollow Discharge Plasma CVD
    keyword : Lithium ion battery, Si carbide nano-particle,
    2011.10.
  • Interaction dynamics between plasma fluctuation and nano-interface property.
    keyword : nano-interface, dyanmics, plasma
    2011.04～2013.03.
  • Plasma Fluctuation in Plasma Processing.
    keyword : Fluctuation, Amplitude Modulation, Nano-particle property
    2010.04.
  • plasma turbulence and structural formation
    keyword : plasma, fluctuation, drift wave, interchange mode
    2004.04～2010.03.
Current and Past Project
  • Voluntary learning motivation within college students
  • Interaction between plasma and dust particle in space
  • High Capacity Li Ion Battery Anodes Using Silicon Carbide Nano-particles Produced by Double Multi-Hollow Discharge Plasma CVD
Academic Activities
Papers
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1. Kunihiro Kamataki, Yusuke Sasaki, Iori Nagao, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani, Low-temperature fabrication of silicon nitride thin films from a SiH4+N2 gas mixture by controlling SiNx nanoparticle growth in multi-hollow remote plasma chemical vapor deposition, Materials Science in Semiconductor Processing, 10.1016/j.mssp.2023.107613, 164, 107613, 2023.05.
2. Nunomura, Shota, SAKATA Isao, Misawa Tatsuya, Kawai Shinji, KAMATAKI Kunihiro, Koga Kazunori, SHIRATANI Masaharu, Silicon surface passivation with a-Si:H by PECVD : Growth temperature effects on defects and band offset, Japanese Journal of Applied Physics, in press, 2023.05.
3. M.N. Agusutrisno, Ryota Narishige, Kunihiro Kamataki, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoto Yamashita, Control of inhomogeneity and magnetic properties of ZnO:Co films grown by magnetron sputtering using nitrogen, Materials Science in Semiconductor Processing, 10.1016/j.mssp.2023.107503, 162, 107503, 2023.04.
4. Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani and Yuichi Setsuhara, Optical emission spectroscopy study in CO2 methanation with plasma, Japanese Journal of Applied Physics, 10.35848/1347-4065/acc66a, 62, SI1008, 2023.04.
5. Ryota Narishige, Naoto Yamashita, Kunihiro Kamataki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Hisato Yabuta & Naho Itagaki, Effects of substrate surface polarity on heteroepitaxial growth of pseudobinary ZnO_InN alloy films on ZnO substrates, Journal of Materials Research, 10.1557/s43578-022-00827-4, 38, 7, 1803-1812, 2022.11.
6. Naoto Yamashita, Ryo Mitsuishi, Yuta Nakamura, Keigo Takeda, Masaru Hori, Kunihiro Kamataki, Takamasa Okumura, Kazunori Koga & Masaharu Shiratani,, Role of insoluble atoms in the formation of a three-dimensional buffer layer in inverted Stranski–Krastanov mode, Journal of Materials Research, 10.1557/s43578-022-00886-7, 38, 5, 1178-1185, 2023.01.
7. Takamasa Okumura, Pankaj Attri, Kunihiro Kamataki, Naoto Yamashita, Yuichi Tsukada, Naho Itagaki, Masaharu Shiratani, Yushi Ishibashi, Kazuyuki Kuchitsu & Kazunori Koga, Detection of NO3－ introduced in plasma-irradiated dry lettuce seeds using liquid chromatography-electrospray ionization quantum mass spectrometry (LC-ESI QMS), Scientific Reports, 10.1038/s41598-022-16641-1, 12, 1, 12525, 2022.07.
8. Iori Nagao, K. Kamataki, A. Yamamoto, M. Otaka, Y. Yamamoto, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges, MRS Advances, 10.1557/s43580-022-00417-w, 7, 31, 911-917, 2022.12.
9. Kunihiro Kamataki, Daiki Nagamatsu, Tao Yang, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Toshiaki Arima, Michihiro Otaka, Yuma Yamamoto, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani, Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma, AIP Advances, https://doi.org/10.1063/5.0097691, 12, 085220, 2022.08.
10. SHOTA NUNOMURA, KUNIHIRO KAMATAKI, TAKEHIKO NAGAI, TATSUYA MISAWA, SHINJI KAWAI, KOSUKE TAKENAKA, GIICHIRO UCHIDA, AND KAZUNORI KOGA, Plasma Synthesis of Silicon Nanoparticles: From Molecules to Clusters and Nanoparticle Growth, IEEE Open Journal of Nanotechnology, 10.1109/OJNANO.2022.3209995, 3, 94-100, 2022.09.
11. Shinjiro Ono, Sung Hwa Hwang, Takamasa Okumura, Kunihiro Kamataki, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Jun-Seok Oh, Susumu Takabayashi & Tatsuyuki Nakatani , Raman spectral analysis of the as-deposited a-C:H films prepared by CH4 + Ar plasma CVD, MRS adv., https://doi.org/10.1557/s43580-022-00310-6, 2022.07.
12. Pankaj Attri, Kazunori Koga, Takamasa Okumura, Fadzai L. Chawarambwa, Tika E. Putri, Yuichi Tsukada, Kunihiro Kamataki, Naho Itagaki & Masaharu Shiratani , Treatment of organic wastewater by a combination of non-thermal plasma and catalyst: a review, Reviews of Modern Plasma Physics, 6, 17, 2022, 2022.07.
13. Michihiro Otaka, Toshiaki Arima, Jiansyun Lai, Kizuki Ikeda, Kunihiro Kamataki, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga & Masaharu Shiratani , Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma, MRS Adv., 10.1557/s43580-022-00306-2, 2022.07.
14. D. Takahashi, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki, Epitaxial Growth of Zn1-xMgxO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode Using Magnetron Sputtering, MRS Adv., 10.1557/s43580-022-00234-1, 7, 415-419, 2022.02.
15. Y. Nakamura, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki, Growth of single crystalline ZnO films on 18%-lattice-mismatched sapphire substrates using buffer layers with three-dimensional islands, Cryst. Growth Des., 10.1021/acs.cgd.2c00145, 22, 6, 3770-3777, 2022.05.
16. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, The Effects of Spin-Coating Rate on Surface Roughness, Thickness, and Electrochemical Properties of a Pt Polymer Counter Electrode, Advanced Engineering Forum, 10.4028/p-6l16rl, 45, 1-13, 2022.04.
17. T. E. Putri, F. L. Chawarambwa, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Performance comparison of nitrile-based liquid electrolytes on bifacial dye-sensitized solar cells under low-concentrated light, MRS Adv., 10.1557/s43580-022-00270-x, 7, 427-432, 2022.04.
18. Kohei Abe, Kunihiro KAMATAKI, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho ITAGAKI, Kazunori Koga and Masaharu SHIRATANI, Effects of amplitude modulated capacitively coupled discharge Ar plasma on kinetic energy and angular distribution function of ions impinging on electrodes: particle-in-cell/Monte Carlo collision model simulation, Japanese Journal of Applied Physics, 2022.06.
19. Y. Nakamura, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki, Growth of single crystalline ZnO films on 18%-lattice-mismatched sapphire substrates using buffer layers with three-dimensional islands, Cryst. Growth Des., 10.1557/s43580-022-00270-x, 22, 6, 3770-3777, 2022.05.
20. T. E. Putri, F. L. Chawarambwa, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani , Performance comparison of nitrile-based liquid electrolytes on bifacial dye-sensitized solar cells under low-concentrated light, MRS Adv., 10.1557/s43580-022-00270-x, 7, 427-432, 2022.04.
21. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, The Effects of Spin-Coating Rate on Surface Roughness, Thickness, and Electrochemical Properties of a Pt Polymer Counter Electrode, Advanced Engineering Forum, 10.4028/p-6l16rl, 116845, 1-13, 2022.04.
22. D. Takahashi, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki, Epitaxial Growth of Zn1-xMgxO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode Using Magnetron Sputtering, MRS Adv., 10.1557/s43580-022-00234-1, 7, 415-419, 2022.02.
23. S. Toko, M. Ideguchi, T. Hasegawa, T. Okumura, K. Kamataki, K.Takenaka, K. Koga, M. Shiratani, Y. Setsuhara, Effect of gas flow rate and discharge volume on CO2 methanation with plasma catalysis, Jpn. J. Appl. Phys., 61, SI1002, 2022.01.
24. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Performances of Carbon Black-Titanium nitrate and Carbon Black-Titanium/Triton X-100 Composite Polymer Counter Electrodes for Dye-Sensitized Solar Cells, Adv. Mater. Res., 10.4028/www.scientific.net/AMR.1168.35, 1168, 35-47, 2022.01.
25. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Improved luminescence performance of Yb3+-Er3+-Zn2+: Y2O3 phosphor and its application to solar cells, Optical Materials, 10.1016/j.optmat.2021.111928, 123, 111928, 2022.01.
26. P. Attri, T. Anan, R. Arita, T. Okumura, H. Tanaka, D. Yamashita, K. Matsuo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani, K. Kuchitsu, Y. Ishibashi, Plasma Treatment Effect on the Paramagnetic Species of Barley Seed Radical’s Intensity: An EPR study, Plasma Medicine, 10.1615/PlasmaMed.2020036353, 10, 3, 159-168, 2021.12.
27. T. E. Putri, F. L Chawarambwa, M. K. Son, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Performance Characteristics of Bifacial Dye-Sensitized Solar Cells with a V-Shaped Low-Concentrating Light System, ACS Appl. Energy Mater., 10.1021/acsaem.1c02774, 4, 12, 13410-13414, 2021.11.
28. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Effects of concentrated light on the performance and stability of a quasi-solid electrolyte in dye-sensitized solar cells, Chem. Phys. Lett., , 10.1016/j.cplett.2021.138986, 781, 138986, 2021.10.
29. S. H. Hwang, R. Iwamoto, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani, Comparison between Ar+CH4 Cathode and Anode Coupled Capacitively Coupled Plasma Chemical Vapor Deposition of Hydrogenated Amorphous Carbon Films, Thin Solid Films, 10.1016/j.tsf.2021.138701, 729, 138701, 2021.07.
30. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Highly efficient and transparent counter electrode for application in bifacial solar cells, Chem. Phys. Lett., 10.1016/j.cplett.2021.138369, 768, 138369, 2021.04.
31. F. L. Chawarambwa, T. E. Putri, K. Kamataki, M. Shiratani, K. Koga, N. Itagaki, D. Nakamura, Synthesis of Yb3+/Ho3+ co-doped Y2O3 nanoparticles and its application to dye sensitized solar cells, J. Mol. Struct., 10.1016/j.molstruc.2020.129479, 1228, 129479, 2021.03.
32. T. E. Putri, Y. Hao, F. L. Chawarambwa, H. Seo, Min-Kyu Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Effects of Activated Carbon Counter Electrode On Bifacial Dye Sensitized Solar Cells (DSSCs), Mater. Sci. Forum, 10.4028/www.scientific.net/MSF.1016.863, 1016, 863-868, 2021.01.
33. S. H. Hwang, K. Koga, Y. Hao, P. Attri, T. Okumura, K. Kamataki, N. Itagaki, M. Shiratani, J-S. Oh, S. Takabayashi, T. Nakatani, Time of Flight Size Control of Carbon Nanoparticles Using Ar+CH4 Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method, Processes, 10.3390/pr9010002, 9, 1, 2, 2020.12.
34. F. L. Chawarambwa, T. E. Putri, M. K. Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Graphene-Si3N4 nanocomposite blended polymer counter electrode for low-cost dye-sensitized solar cells, Chem. Phys. Lett., 10.1016/j.cplett.2020.137920, 758, 137920, 2020.11.
35. S. H. Hwang, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Size and flux of carbon nanoparticles synthesized by Ar+CH4 multi-hollow plasma chemical vapor deposition, Diam Relat Mater, 10.1016/j.diamond.2020.108050, 109, 108050, 2020.11.
36. F. L. Chawarambwa, T. E. Putri, K. Kamataki, M. Shiratani, K. Koga, N. Itagaki, D. Nakamura, Synthesis of Yb3+/Ho3+ co-doped Y2O3 nanoparticles and its application to dye sensitized solar cells, J. Mol. Struct., 10.1016/j.molstruc.2020.129479, 129479, 2020.10.
37. R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki, Impact of surface morphologies of substrates on the epitaxial growth of magnetron sputtered (ZnO)x(InN)1-x films, Jpn. J. Appl. Phys., 10.35848/1347-4065/abba0c, 60, SA, SAAB02, 2020.10.
38. S. H. Hwang, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani, Low stress diamond-like carbon films containing carbon nanoparticles fabricated by combining rf sputtering and plasma chemical vapor deposition, Jpn. J. Appl. Phys. , 10.35848/1347-4065/abbb20, 59, 10, 100906, 2020.10.
39. Ren Zhou, Kunihiro Kamataki, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunoni Koga and Masaharu Shiratani, Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma, Journal of Plasma and Fusion Research, (2019)in press., 2019.07.
40. S. Muraoka, L. Jiahao, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki, Effects of nitrogen impurity on zno crystal growth on Si substrates, MRS Adv., 10.1557/adv.2019.28, 4, 27, 1557-1563, 1557-1563, 2019.01.
41. T. Ito, K. Koga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida and M. Shiratani, Plasma etching of single fine particle trapped in Ar plasma by optical tweezers, J. Phys. : Conf. Series.(SPSM26), 10.1088/1742-6596/518/1/012014, 518, 1, 012014, 2014.06.
42. M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura and A. Sagara, the LHD Experimental Group,Contribution of H2 plasma etching to radial profile of amount of dust particles in a divertor simulator, J. Phys. : Conf. Series (SPSM26), 10.1088/1742-6596/518/1/012009, 518, 1, 012009, 2014.06.
43. S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani, Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD, J. Phys. : Conf. Series (SPSM26), 10.1088/1742-6596/518/1/012008, 518, 1, 012008, 2014.06.
44. Y. Hashimoto, S. Toko, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani, Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency, J. Phys. : Conf. Series (SPSM26), 10.1088/1742-6596/518/1/012007, 518, 1, 012007, 2014.06.
45. D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani, Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method, J. Phys. : Conf. Series (SPSM26), 10.1088/1742-6596/518/1/012002, 518, 1, 012002, 2014.06.
46. M. Shiratani, G. Uchida, H. Seo, D. Ichida, K. Koga, N. Itagaki, and K. Kamataki, Nanostructure Control of Si and Ge Quantum Dots Based Solar Cells Using Plasma Processes, Materials Science Forum, 10.4028/www.scientific.net/MSF.783-786.2022, 783-786, 2022-2027, 2014.05.
47. M. Shiratani, K. Kamataki, G. Uchida, K. Koga, H. Seo, N. Itagaki, T. Ishihara, SiC Nanoparticle Composite Anode for Li-Ion Batteries, Mat. Res. Soc. Symp. , http://dx.doi.org/10.1557/opl.2014.742, 1678, 2014.04.
48. I. Suhariadi, K. Oshikawa, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, and N. Itagaki, Study on the Crystal Growth Mechanism of ZnO Films Fabricated Via Nitrogen Mediated Crystallization, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015064, 1, 015064, 2014.03.
49. S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani, Effects of Grid DC Bias on Incorporation of Si Clusters into Amorphous Silicon Thin Films in Multi-Hollow Discharge Plasma CVD, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015069, 1, 015069, 2014.03.
50. M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group, Spatial Profile of Flux of Dust Particles Generated due to Interaction between Hydrogen Plasmas and Graphite Target, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015020, 1, 015020, 2014.03.
51. G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Effects of H2 Gas Addition on Structure of Ge Nanoparticle Films Deposited by High-pressure RF Magnetron Sputtering Method, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015082, 1, 015082, 2014.03.
52. M. Shiratani, Y. Morita, K. Kamataki, H. Seo, G. Uchida, N. Itagaki, K. Koga, Correlation between nanoparticle growth and plasma parameters in low pressure reactive VHF discharge plasmas, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015083, 1, 015083, 2014.03.
53. G. Uchida, Y. Kanemitsu, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Combinatorial Plasma CVD of Si Nanoparticle Composite Films for Band Gap Control, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015080, 1, 015080, 2014.03.
54. H. Seo, D. Ichida, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Analysis on the photovoltaic property of Si quantum dot-sensitized solar cells, International Journal of Precision Engineering and Manufacturing , 10.1007/s12541-014-0343-8, 15, 2, 339-343, 2014.02.
55. M. Shiratani, K. Koga, K. Kamataki, S. Iwashita, G. Uchida, H. Seo, and N. Itagaki, Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas, Jpn. J. Appl. Phys. , 10.7567/JJAP.53.010201, 53, 1, 010201, 2014.01.
56. H. Seo, Y. Wang, M. Sato, G. Uchida, K. Koga, N. Itagaki, K. Kamataki, M. Shiratani, The improvement on the performance of quantum dot-sensitized solar cells with functionalized Si, Thin Solid Films, 10.1016/j.tsf.2013.04.073, 546, 284-288, 2013.11.
57. K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki, Epitaxial Growth of ZnInON Films with Tunable Band Gap from 1.7 eV to 3.3 eV on ZnO Templates, Jpn. J. Appl. Phys., 10.7567/JJAP.52.11NM06, 52, 11NM06, 2013.11.
58. K. Koga, M. Tateishi, K. Nishiyama, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, Akiko Sagara, the LHD Experimental Group, Flux Control of Carbon Nanoparticles Generated due to Interactions between Hydrogen Plasmas and Graphite Using DC-Biased Substrates, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.11NA08, 52, 11NA08, 2013.11.
59. Y. Kim, K. Hatozaki, Y. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, H. Seo, K. Koga, and M. Shiratani, Correlation between Volume Fraction of Silicon Clusters in Amorphous Silicon Films and Optical Emission Properties of Si and SiH, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.11NA07, 52, 11NA07, 2013.11.
60. G. Uchida, Y. Wang, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Characteristics of Crystalline Silicon/Si Quantum Dot/Poly(3,4-ethylenedioxythiophene) Hybrid Solar Cells, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.11NA05, 52, 11NA05, 2013.11.
61. G. Uchida, M. Sato, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Characteristics of Photocurrent Generation in the Near-Ultraviolet Region in Si Quantum-Dot Sensitized Solar Cells, Thin Solid Films, 10.1016/j.tsf.2013.04.111, 544, 93-98, 2013.10.
62. Y. Kim, T. Matsunaga, K. Nakahara, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Effects of nanoparticle incorporation on properties of microcrystalline films deposited using multi-hollow discharge plasma CVD, Surf. Coat. Technol., 10.1016/j.surfcoat.2012.04.029, 228, 1, S550–S553, 2013.08.
63. Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga, and M. Shiratani, Observation of nanoparticle growth process using a high speed camera, ISPC 21 Proceedings, 2013.07.
64. K. Koga, K. Nishiyama, Y. Morita, G. Uchida, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group, Effects of DC Substrate Bias Voltage on Dust Flux in the Large Helical Device, Journal of Nuclear Materials, 10.1016/j.jnucmat.2013.01.154, 438, S727–S730, 2013.07.
65. K. Nishiyama, Y. Morita, G. Uchida, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, and H. Kersten, Discharge Power Dependence of Carbon Dust Flux in a Divertor Simulator, Journal of Nuclear Materials, 10.1016/j.jnucmat.2013.01.169, 438, S788–S791, 2013.07.
66. H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Growth control of ZnO nano-rod with various seeds and photovoltaic application, J. Phys. : Conference Series, 10.1088/1742-6596/441/1/012029, 441, 1, 012029, 2013.06.
67. H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Analysis on the effect of polysulfide electrolyte composition for higher performance of Si quantum dot-sensitized solar cells, Electrochimica Acta, 10.1016/j.electacta.2013.02.026, 95, 1, 43-47, 2013.04.
68. I. Suhariadi, K. Matsushima, K. Kuwahara, K. Oshikawa, D. Yamashita, H. Seo, G. Uchida, K. Kamtaki, K. Koga, M. Shiratani, S. Bornholdt, H. Kersten, Harm Wulff, N. Itagaki, Effects of Hydrogen Dilution on ZnO Thin Films Fabricated via Nitrogen Mediated Crystallization, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.01AC08, 52, 1, 01AC08(5pages), 2013.01.
69. Y. Kim, K. Hatozaki, Y. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, H. Seo, K. Koga, M. Shiratani, High Amount Cluster Incorporation in Initial Si Film Deposition by SiH4 Plasma Chemical Vapor Deposition, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.01AD01, 52, 1, 01AD01(4pages), 2013.01.
70. H. Seo, Y. Wang, M. Sato, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Improvement of Si Adhesion and Reduction of Electron Recombination for Si Quantum Dot-Sensitized Solar Cells, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.01AD05, 52, 1, 01AD05(5pages), 2013.01.
71. H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, The reduction of charge recombination and performance enhancement by the surface modification of Si quantum dot-sensitized solar cell, Electrochimica Acta, 10.1016/j.electacta.2012.09.087, 87, 1, 213-217, 2013.01.
72. K. Kamataki, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani, Control of radial density profile of nano-particle produced in reactive plasma by amplitude modulation of rf discharge voltage, Thin Solid Films, 10.1016/j.tsf.2012.07.059, 523, 76-79, 2012.11.
73. N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, Sputter deposition of Epitaxial Zinc-Indium Oxynitride Films for Excitonic Transistors (Invited), Proc. of International Symposium on Dry Process, 34, 97-98, 2012.11.
74. Y. Kim, T. Matsunaga, K. Nakahara ,G. Uchida, K. Kamataki , N. Itagaki, H. Seo, K. Koga, M. Shiratani , Effects of crystalline nanoparticle incorporation on growth, structure, and properties of microcrystalline silicon films deposited by plasma CVD , Thin Solid Films, 10.1016/j.tsf.2012.06.023, 523, 29-33, 2012.11.
75. I. Suhariadi, N. Itagaki, K. Kuwahara, K. Oshikawa, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, K. Nakahara, M. Shiratani, ZnO:Al Thin Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization: Effects of N2/Ar Gas Flow Rate Ratio, Transactions of the Materials Research Society of Japan, 10.14723/tmrsj.37.165, 37, 2, 165-168, 2012.06.
76. K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani, High quality epitaxial ZnO films grown on solid-phase crystallized buffer layers, Thin Solid Films, 10.1016/j.tsf.2011.10.136, 520, 14, 4674-4677, 2012.05.
77. K. Kamataki, Y. Morita, M. Shiratani, K. Koga, G. Uchida, N. Itagaki , In situ analysis of size dispersion of nano-particles in reactive plasma using two dimentional laser light scattering method, Journal of Instrumentation, 10.1088/1748-0221/7/04/C04017, 7, 4, C04017, 2012.04.
78. H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, The Optical Analysis and Application of Size-controllable Si Quantum Dots Fabricated by Multi-hollow Discharge Plasma Chemical Vapor Deposition, Mat. Res. Soc. Symp. Proc., 10.1557/opl.2012.890, 1426, 313-318, 2012.04.
79. Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, In-situ Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances, Mat. Res. Soc. Symp. Proc., 10.1557/opl.2012.839, 1426, 307-311, 2012.04.
80. M. Shiratani, K. Hatozaki, Y. Hashimoto, Y. Kim, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition, Mat. Res. Soc. Symp. Proc., 10.1557/opl.2012.1245, 1426, 377-382, 2012.04.
81. K. Koga, T. Matsunaga, Y. Kim, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, and M. Shiratani, Combinatorial Deposition of Microcrystalline Silicon Films Using Multihollow Discharge Plasma Chemical Vapor Deposition, Jpn. J. Appl. Phys. , 10.1143/JJAP.51.01AD02, 51, 1, 01AD02(4pages), 2012.01.
82. G. Uchida, K. Yamamoto, M. Sato, Y. Kawashima, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Effect of nitridation of Si nano-particles on the performance of quantum-dot sensitized solar cells, Jpn. J. Appl. Phys. , 10.1143/JJAP.51.01AD01, 51, 1, 01AD01(5pages), 2012.01.
83. K. Koga, K. Nakahara, Y. Kim, T. Matsunaga, D.Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani, Deposition of cluster-free B-doped a-Si:H films using SiH4+B10H14 multi-hollow discharge plasma CVD, Jpn. J. Appl. Phys. , 10.1143/JJAP.51.01AD03, 51, 1, 01AD03(4pages), 2012.01.
84. Y. Nagashima, S. Itoh, S. Inagaki, H. Arakawa, N. Kasuya, A. Fujisawa, K. Kamataki, T. Yamada, S. Shinohara, S. Oldenburger, M. Yagi, Y. Takase, P. H. Diamond, and K. Itoh, Dynamics of global transport and turbulence noise force - an experimental analysis on plasma turbulence, Proc. of Plasma Conference 2011, 25, SP6-4, 2011.11.
85. T. Matsunaga, Y. Kim, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani, Effects of nano-particles on (220) crystal orientation of microcrystallite silicon thin films, Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21), 4D-2P-16, 2011.11.
86. K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani, Zno films with buffer layers crystallized via nitrogen mediation: Effects of deposition temperature of buffer layers, Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21), 4D-2P-11, 2011.11.
87. N. Itagaki, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani, Zinc oxide-based transparent conducting films with buffer layers fabricated via nitrogen-mediated crystallization, Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21), 4D-2P-10, 2011.11.
88. K. Nakahara, K. Hatozaki, M. Sato, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Defect density of cluster-free a-si:h films deposited by multi-hollow discharge plasma CVD, Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21), 3D-2P-20, 2011.11.
89. Y. Kim, T. Matsunaga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani, Combinatorial study on effects of substatrate temperature of silicon film deposition using multi-hollow discharge plasma cvd, Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21), 3D-2P-09, 2011.11.
90. K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, Seo H., G. Uchida, K. Kamataki, K. Koga, M. Shiratani, Effects of N2 gas addition to sputtering plasma on properties of epitaxial ZnO films, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P008-O, 2011.11.
91. T. Matsunaga, Y. Kim, K. Koga, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani, Influence of nano-particles on multi-hollow discharge plasma for microcrystalline silicon thin films deposition, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P015-O, 2011.11.
92. K. Kamataki, K. Koga, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P014-O, 2011.11.
93. K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, H. Kersten, Collection of carbon dust particles formed due to plasma-wall interactions between high density H2 plasma and carbon wall onto substrates by applying local DC bias voltage, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P094-O, 2011.11.
94. Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Radical Flux Evaluation to Microcrystalline Silicon Films Deposited by Multi-Hollow Discharge Plasma CVD, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P011-O, 2011.11.
95. K. Nakahara, K. Hatozaki, Y. Hashimoto, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Deposition of cluster-free a-Si:H films using cluster eliminating filter, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P010-O, 2011.11.
96. N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, K. Kamataki, H. Seo, G. Uchida, K. Koga, M. Shiratani, Low resistive ZnO:Al films with ZnO buffer layers fabricated by Ar/N2 magnetron sputtering, Proc. of Plasma Conference 2011 (PLASMA2011) , 24G16, 2011.11.
97. M. Shiratani, Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, Effects of nanoparticle incorporation on Si thin films deposited by plasma CVD, Proc. of Plasma Conference 2011 (PLASMA2011) , 24G06, 2011.11.
98. K. Koga, T. Urakawa, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori, Self-organized carbon Mk formation on the top surface of fine trenches using a low temperature plasma anisotropic CVD for depositing fine organic structure, Proc. of Plasma Conference 2011 (PLASMA2011) , 23G03, 2011.11.
99. G. Uchida, Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani, Hybrid sensitized solar cells using Si nanoparticles and ruthenium dye, Physica Status Solidi (c), 10.1002/pssc.201100166, 8, 10, 3021-3024, 2011.10.
100. G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani, Surface nitridation of silicon nano-particles using double multi-hollow discharge plasma CVD, Physica Status Solidi (c), 10.1002/pssc.201001230, 8, 10, 3017-3020, 2011.10.
101. K. Koga, K. Nakahara, Y. Kim, Y. Kawashima, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani, Deposition of cluster-free P-doped a-Si:H films using SiH4+PH3 multi-hollow discharge plasma CVD method, Physica Status Solidi (c), 10.1002/pssc.201100229, 8, 10, 3013-3016, 2011.10.
102. K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, M. Shiratani, Impacts of Amplitude Modulation of RF Discharge Voltage on the Growth of Nanoparticles in Reactive Plasma, Applied Physics Express, 10.1143/APEX.4.105001, 4, 10, 105001(3pages), 2011.10.
103. K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani, Impacts of Plasma Fluctuations on Growth of Nano-Particles in Reactive Plasma , Proc. of International Conference on Phenomena in Ionized Gases（ICPIG） 2011 Conference, D13-318, 2011.09.
104. K. Koga, Y. Kawashima, T. Matsunaga, M. Sato, K. Nakahara, W. M. Nakamura, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani, Comparison between silicon thin films with and without incorporating crystalline silicon nanoparticles into the film, Thin Solid Films, 10.1016/j.tsf.2011.01.408, 519, 20, 6896-6898, 2011.08.
105. Y. Nagashima, S. Itoh, S. Inagaki, H. Arakawa, N. Kasuya, A. Fujisawa, K. Kamataki, T. Yamada, S. Shinohara, S. Oldenburger, M. Yagi, Y. Takase, P. H. Diamond, and K. Itoh, Non-Gaussian properties of global momentum and particle fluxes in a cylindrical laboratory plasma, Physics of Plasma, 10.1063/1.3601767, 18, 070701, 2011.07.
106. Y. Kim, T. Matsunaga, Y. Kawashima, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani, Combinatorial study of substrate temperature dependence on properties of silicon films deposited using multihollow discharge plasma CVD, Proc. of The 20th International Symposium on Plasma Chemistry （ISPC20）, POL08, 2011.07.
107. M. Shiratani, K. Koga, S. Iwashita, G. Uchida, N. Itagaki, K. Kamataki, Nano-factories in plasma: present status and outlook, Journal of Physics D: Applied Physics, 10.1088/0022-3727/44/17/174038 , 44, 17, 174038, 2011.05.
108. Y. Nagashima, S. Inagaki, K. Kamakaki, H. Arakawa, T. Yamada, S. Shinohara, Y. Kawai, M. Yagi, A. Fujisawa, S. Itoh, K. Itoh, and Y. Takase, Development of radially movable multichannel Reynolds stress probe system for a cylindrical laboratory plasma, Rev. Sci. Instrum., 82, 033503, 2011.03.
109. K. Koga, G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Kamataki, N. Itagaki, M. Shiratani, Generation and Surface Modification of Si nano-particles using SiH4/H2 and N2 multi-hollow discharges and their application to the third generation photovoltaics, International Conference on Advances in Condensed and Nano Materials (ICACNM), 10.1063/1.3653600, 1393, 27-30, 2011.02.
110. K. Kamataki, K. Itoh, S. Itoh, A. Fujisawa, S. Inagaki, Y. Nagashima, M. Yagi, T. Yamada, ECRH Superposition on Linear Cylindrical Helicon Plasma in LMD-U, Journal of Plasma and Fusion Research, 5, S2046, Special Issue, 2010.12.
111. T. Kobayashi, S. Inagaki, H. Arakawa, K. Kamataki, Y. Nagashima, T. Yamada, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, S. Itoh, K. Itoh, Bi-spectral analysis of density and potential flucutuations in a high neutral density cylindrical plasma, Journal of Plasma and Fusion Research, 5, S2047, Special Issue, 2010.12.
112. H. Arakawa, S. Inagaki, Y. Nagashima, T. Yamada, K. Kamataki, T. Kobayashi, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, K. Itoh, S. Itoh, Probability Density Function of Density Fluctuations in Cylindrical Helicon Plasma, Journal of Plasma and Fusion Research, 5, S2044, Special Issue, 2010.12.
113. T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, S. Shinohara, N.Kasuya, K. Terasaka, K. Kamataki, H. Arakawa, M. Yagi, A. Fujisawa, K. Itoh , Nonlinear mode couplings in a cylindrical magnetized plasma, Journal of Plasma and Fusion Research, 5, S2016, Special Issue, 2010.12.
114. T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, N. Kasuya, K. Kamataki, H. Arakawa, T.Kobayashi, M. Yagi, A. Fujisawa, and K. Itoh , Observation of Quasi-Two-Dimensional Nonlinear Interactions in a Drift-Wave Streamer, Physical Review Letter, 105, 225002, 2010.11.
115. G. Uchida, M. Sato, Y. Kawashima, K. Yamamoto, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo, Optical and Electrical Properties of Particle Composite Thin Films deposited in SiH4/H2 and N2 Multi-Hollow Discharges, Proc. of MNC2010 (第23回マイクロプロセス・ナノテクノロジー国際会議), 12D-11-66, 2010.11.
116. H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Substrate Temperature Dependence of Sticking Probability of SiOx-CH3 Nano-Particles, Proc. of International Symposium on Dry Process, 43-44, P1-A17, 2010.11.
117. G. Uchida, S. Nunomutra, H. Miyata, S. Iwashita, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Effects of Ar addition on breakdown voltage in a Si(CH3)2(OCH3)2 RF discharge, IEEE Region 10 Conference on TENCON 2010 , 10.1109/TENCON.2010.5686704, 2199-2201, 2010.11.
118. K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani, Effects of Amplitude Modulation of rf Discharge Voltage on Growth of Nano-Particles in Reactive Plasma, IEEE Region 10 Conference on TENCON 2010 , 10.1109/TENCON.2010.5686456, 1943-1947, 2010.11.
119. M. Shiratani, K. Koga, G. Uchida, N. Itagaki, K. Kamataki, Fluctuation Control for Plasma Nanotechnologies, IEEE Region 10 Conference on TENCON 2010 , 10.1109/TENCON.2010.5685920, XII-XVI , 2010.11, プラズマナノテクノロジーで最重要課題となっている揺らぎの制御に関する現状と将来を展望した論文。.
120. H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, G. Uchida, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, LHD experimental group, Carbon dust particles generated due to H2 plasma-carbon wall interaction, Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma, 55, 7, CTP.00114, 2010.10.
121. G. Uchida, M. Sato, Y. Kawashima, K. Nakahara, K. Yamamoto, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Generation of nitridated silicon particles and their thin film deposition using double multi-hollow discharges, Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma, 55, 7, CTP.00093, 2010.10.
122. T. Matsunaga, Y. Kawashima, K. Koga, W. M. Nakamura, K. Nakahara, H. Matsuzaki, D. Yamashita, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani, Combinatorial deposition of microcrystalline Si films using multi-hollow discharge plasma CVD, Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma, 55, 7, CTP.00089, 2010.10.
123. K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Deposition rate enhancement of cluster-free P-doped a-Si:H films using multi-hollow discharge plasma CVD method, Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma, 55, 7, CTP.00087, 2010.10.
124. H. Arakawa, S. Inagaki, Y. Nagashima, T. Yamada, K. Kamataki, T. Kobayashi, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, S. -I Itoh and K. Itoh , Bifurcation of the plasma turbulence on LMD-U, Plasma Phys. Controlled Fusion , 51, 10, 105009, 2010.09.
125. K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Deposition of cluster-free P-doped a-Si:H films using a multi-hollow discharge plasma CVD method, Proc. of 35th IEEE Photovoltaic Specialists Conference , 10.1109/PVSC.2010.5616514, 3722-3755, 2010.07.
126. Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo, Si quantum dot-sensitized solar cells using Si nanoparticles produced by plasma CVD, Proc. 35th IEEE Photovoltaic Specialists Conf., 10.1109/PVSC.2010.5617205, 3347-3351, 2010.07.
127. T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, K. Kamataki, H. Arakawa, M. Yagi, A. Fujisawa, K. Itoh , Study of Amplitude Correlation Technique in a Cylindrical Magnetized Plasma, Journal of the Physical Society of Japan, 79, 085001, 2010.06.
128. T.Yamada, S. Itoh, S. Inagaki, Y.Nagashima, S. Shinohara, N.Kasuya, K.Terasaka, K.Kamataki, H. Arakawa, M. Yagi, A. Fujisawa, K. Itoh, Two-dimensional bi-spectral analysis of drift wave turbulence in a cylindrical plasma, Phys. Plasma, 17, 052313, 2010.05.
129. K. Kamataki, K. Itoh, S. Itoh, A. Fujisawa, S. Inagaki, Y. Nagashima, M. Yagi, T. Yamada, ECRH Superposition on Linear Cylindrical Helicon Plasma in LMD-U, Journal of Plasma and Fusion Research, 5, S2046, 2010., 5, S2046-1-5, 2010.04.
130. K. Kamataki, K. Itoh, S. Itoh, A. Fujisawa, S. Inagaki, Y. Nagashima, M. Yagi, T. Yamada, Statistical Analysis Technique for Estimation of Causal Relationship in Plasma Turbulence, Journal of the Physical Society of Japan, 79, 2, 24501, 2010.02.
131. H. Arakawa, K. Kamataki, S. Inagaki, T. Maruta, Y. Nagashima, T. Yamada, S. Shinohara, K. Terasaka, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, S. Itoh, K. Itoh, Observations of abrupt changes in the fluctuation spectrum on LMD-U, Plasma Phys. Controlled Fusion , 51, 8, 085001, 2009.08.
132. Y. Nagashima, S. Itoh, K. Itoh, A. Fujisawa, S. Inagaki, Y. Kawai, S. Shinohara, M. Fukao, T. Yamada, K. Terasaka, T. Maruta, K. Kamataki, H. Arakawa, M. Yagi, N. Kasuya, G. R. Tynan, P. H. Diamond, Y. Takase, Reynolds Stress Measurements for Investigation of Nonlinear Processes of Turbulence in the Large Mirror Device and in the Large Mirror Device-Upgrade, Journal of Plasma and Fusion Research, 8, 50, 2009.08.
133. K. Kamataki, S. Itoh, Y Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh., Dynamics of Drift and Flute Modes in Linear Cylindrical ECR Plasma, Journal of Plasma and Fusion Research, 8, 82, 2009.08.
134. T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, S. Shinohara, T. Maruta, K. Terasaka, K. Kamataki, N. Kasuya, M. Yagi, Y. Kawai, A. Fujisawa, K. Itoh, Measurement of Nonlinear Mode Couplings in the Large Mirror Device-Upgrade, Journal of Plasma and Fusion Research, 8, 87, 2009.08.
135. K. Kamataki, S. Itoh, Y Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh, Observation of Zonal Flow Type Oscillation in Linear Cylindrical ECR Plasma, Journal of Plasma and Fusion Research, 3, 047, 2008.08.
136. H. Tsuchiya, S. Itoh, A. Fujisawa, K. Kamataki, S. Shinohara, M. Yagi, Y. Kawai, A. Komori, K.Itoh, Sheared flow generation and mode suppression in a magnetized linear cylindrical plasma, Plasma Phys. Control. Fusion, 50, 5, 055005, 2008.05.
137. K. Kamataki, S. Itoh, Y Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh, Investigation of Competitive Oscillations between Drift Mode and Flute Mode in Linear Cylindrical ECR Plasma, Plasma Phys. Control. Fusion, 50, 035011, 2008.03.
138. K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, M. Yagi, K. Itoh, S. Itoh, Coexistence of Collisional Drift and Flute Wave Instabilities in Bounded Linear ECR Plasma, Journal of the Physical Society of Japan, 76, 5, 054501, 2007.05.
139. K. Kamataki, Y Nagashima, S. Shinohara, Y. Kawai, S. Inagaki, M. Yagi, K. Itoh, S. Itoh, Observation of Competition between Drift Instability and Flute Instability in a Bounded Linear ECR Plasma, Journal of Plasma and Fusion Research, 2, 034, 2007.05.
Presentations
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1. Kunihiro Kamataki, F. L. Charawambwa, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Prediction of Plasma CVD Process Data of a-Si:H Films via Machine Learning, ISPC25(25th International Symposium on Plasma Chemistry), 2023.05.
2. Kunihiro Kamataki, Yuta Mido, Iori Nagao, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Developing Prediction of Key Process Parameters and Sputtering Conditions for Amorphous and high Mobility ITO/In2O3 Films via Machine Learning, AFM2023(7th International Conference on Advances in Functional Materials), 2023.01.
3. Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Electric field measurements in Ar plasma using a fine charged particle trapped with laser tweezers, 23rd Workshop on Fine Particle Plasmas , 2022.12.
4. Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Measurement of the charge on single fine particles in plasma, The 32nd Annual Meeting of MRS-J, 2022.12.
5. Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Electric fields measurement using an optical trapped charged particle in Ar plasma(invited)
, The 32nd Annual Meeting of MRS-J , 2022.12.
6. Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Yuma Yamamoto, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Control of Growth of Nano-particles and Properties of SiO2 Films with Amplitude Modulated Discharge in TEOS-PECVD(Plenary), AAPPS-DPP2022 (6th Asia-Pacific Conference on Plasma Physics), 2022.10.
7. Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Measurements of strength and fluctuation of 2D electric fields in plasmas using a fine particle trapped with laser tweezers(invited), GEC2022/ICRP-11(The 75th Annual Gaseous Electronics Conference/the 11th International Conference on Reactive Plasmas), 2022.10.
8. Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Yuma Yamamoto, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Impact of amplitude modulated discharge on suppression of nanoparticles growth in TEOS/O2/Ar capacitively coupled plasma, The 22nd International Vacuum Congress (IVC-22), 2022.09.
9. Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Yuma Yamamoto, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Effects of amplitude modulated rf discharge on properties of SiO2 films deposited by TEOS/O2/Ar plasma-enhanced chemical vapor deposition, 9th International Symposium on Control of Semiconductor Interfaces (ISCSI-IX), 2022.09.
10. Kunihiro Kamataki, Sakyo Okunaga, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Development of measurement of two-dimensional distribution of strength of electrical field with high spatial resolution using optical trapped particle in plasma, 2022 MRS (Material Research society) Spring Meeting, 2022.05.
11. Kunihiro. Kamataki, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Investigation of relationship between growth of nanoparticle and plasma generation due to amplitude modulated discharge voltage in TEOS plasma, SPP-39/SPSM34(39th Symposium on Plasma Processing/34th Symposium on Plasma Science for Materials), 2022.01.
12. Kunihiro Kamataki, Sakyo Okunaga, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Investigation of 2D electric field measurements in Ar plasmas using a fine particle trapped with laser tweezers, MRM2021(Material Research Meeting), 2021.12.
13. Kunihiro Kamataki, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani , Investigation of growth suppression mechanism of nanoparticles through amplitude modulation discharge method in TEOS plasma
, The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12), 2021.12.
14. Kunihiro KAMATAKI, Sakyo OKUNAGA, Toma SATO, Kentaro TOMITA, Pan YIMIN, Daisuke YAMASHITA, Takamasa OKUMURA, Naho ITAGAKI, Kazunori KOGA, Masaharu SHIRATANI , Study on measurement of strength and fluctuation of electrical field using optical trapped particle in Ar plasma (invited), AAPPS-DPP2021(5th Asia-Pacific Conference on Plasma Physics), 2021.09.
15. K. Kamataki, K. Abe, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani, S. Tahara, Y. Mizokami, Y. Miyata, K. Tabuchi, T. Tanikuni, S. Hiyama, K. Nagahata , Better step coverage of TEOS-PECVD SiO2 films realized by amplitude modulation of RF discharge voltage, DPS 2021 (42nd International Symposium on Dry Process), 2021.11.
16. Kunhiro KAMATAKI, Chen Feiyu, Tao Yang, Sakyo Okunaga, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani , Predictive analytics in plasma process using machine learning tools and techniques (invited), 1st Workshop on Artificial Intelligence in Plasma Science - Satellite Workshop of EU-Japan Joint Symposium on Plasma Processing, 2021.09.
17. Kunihiro Kamataki, Tomoaki Yoshida, Yusuke Sasaki, Kohei Abe, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani, Relations among spatial profiles of plasma parameters, growth of nanoparticles in reactive plasma and properties of fabricated thin films(invited), AAPPS-DPP2020 e-conference, 2020.10.
18. K. Kamataki, Relations among spatial profiles of plasma parameters, growth of nanoparticles in reactive plasma and properties of fabricated thin films, 4th Asia Pacific Conference on Plasma Physics, 2020.10.
19. K. Kamataki, S. Okunaga, K. Tomita, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, Information on electric field deduced using a fine particle trapped with laser tweezers in Ar plasma, The 73rd Annual Gaseous Electronics Conference, 2020.10.
20. K. Kamataki, Future prospects of Plasma-nano interface (Invited), Satellite meeting of AAPPS-DPP2020：Workshop on cutting-edge of plasma applications, 2020.08.
21. K. Kamataki, Y. Sasaki, S. Nagaishi, T. Yoshida, K. Abe, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Low temperature fabrication of passivation films by plasma enhanced CVD, 7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020, 4th International Symposium on Energy Research and Application, 2020.01.
22. K. Kamataki, R. Iwamoto, S. Okunaga, S. Muraoka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Developing Prediction of Amorphization Condition Models from Sputter Deposition Experimental Results by Machine Learning Method, Materials Research Meeting 2019 (MRM2019）, 2019.12.
23. K. Kamataki, R. Iwamoto, H. Tanaka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Investigation of Impact of Plasma Fluctuation Driven by Amplitude Modulated VHF Discharge on Growth of Nanoparticles in Reactive Plasma (Invited), Materials Research Meeting 2019 (MRM2019）, 2019.12.
24. Precision control of growth of nanoparticle in reactive plasma.
25. K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani , Low Temperature Fabrication of High Nitriding Degree of SiN films by Multi-Hollow Discharge SiH4+N2 Plasma CVD, 41st International Symposium on Dry Process (DPS2019), 2019.11.
26. K. Kamataki, F. L. Chawarambwa, K. Koga, M. Shiratani, Challenges and Opportunities in Dye Sensitized Solar Cells Using DBD Plasma Treated Upconversion Nanoparticles (Invited), 236th ECS Meeting, 2019.10.
27. K. Kamataki, R. Iwamoto, S. Okunaga, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani , Developing Prediction of Key Plasma Processing Parameter from Small Data of Experimental Results by Machine Learning Method, The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019), 2019.09.
28. K. Kamataki, R. Iwamoto, H. Tanaka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Investigation of Spatiotemporal Structure of Fluctuation Related with Nanoparticle Growth in Amplitude-Modulated VHF Discharge Reactive Plasma, The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019), 2019.09.
29. K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Low Temperature Fabrication of Low Hydrogen Content SiN films in a Multi-Hollow Discharge Plasma CVD, XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10), 2019.07.
30. K. Kamataki, R. Zhou, H. Ohtomo, R. Iwamoto, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Study on Relationship between Growth of Nanoparticles and Plasma Fluctuation due to Amplitude Modulated Discharge Voltage in Capacitively Coupled Reactive Plasma, XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10), 2019.07.
31. K. Kamataki, M. Shiratani, Predictive insight based on grey box analysis of plasma process data, 2nd International Conference on Data Driven Plasma Science (2nd ICDDPS), 2019.05.
32. Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD.
33. Attempt of hybrid education of Japanese and English in Natural Science Experiments.
34. Effects of Discharge Power Fluctuation on Growth of Nano-Particles in Reactive Plasmas
.
Membership in Academic Society
  • The Japan Society of Applied Physics
  • Division of Plasma Electronics
  • Plasma and Fusion Research
  • The Physical Society of Japan
  • The Institute of Electrical Engineers of Japan
  • The Japanese Association of Educational Psychology
  • The Physics Education Society of Japan
  • Japanese Association of First-Year-Experience at Universities and Colleges
Awards
  • AEPSE2019 "Young Scientist Awards: Gold Prize"
  • IUMRS-ICEM2012 "Young Scientist Awards: Silver Award Winners"
  • Advanced Plasma Application Award
  • Best Presentation Award
  • Presentation award in 11st Kyushu-Okinawa-Yamaguchi branch of th Japan Society of Plasma Science and Nuclear Fusion Research (JSPF)
Educational
Educational Activities
・Cyber security fundamental lecture (KIKAN education)
・Electrical Engineering and Computer Science Experimental Lecture(fundamental, I, II)(for second and third grade students)
・Natural science experiments(physics, earth science)(first and second terms)(for first grade students)
・KIKAN education seminar　(KIKAN education)
・Interdisciplinary Collaborative Learning of Social Issues
・scientific seminar for small groups of arts and science students.
Other Educational Activities
  • 2010.08, English Lecture of plasma technology for South Korean international students(including Japanese postgraduates). Title: Fluctuation control in plasma CVD..
  • 2008.07.


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