九州大学 研究者情報
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基本情報 研究活動 教育活動 社会活動
鎌滝 晋礼(かまたき くにひろ) データ更新日:2023.11.27



主な研究テーマ
放電手法制御によるプラズマプロセス精密制御機構の解明とその応用
キーワード:プラズマプロセス精密制御機構
2023.04~2026.03.
プラズマ中光捕捉微粒子を用いたシース電場の時空間構造揺らぎ形成機構の解明
キーワード:シース電場の時空間構造揺らぎ形成機構
2020.04~2024.03.
反応性プラズマにおける任意波形放電手法による高精度成膜技術の開発
キーワード:任意波形放電手法
2020.04~2023.03.
プラズマプロセスにおける機械学習を用いた高精度予測モデルの構築
キーワード:機械学習、データサイエンス
2018.04~2020.03.
プラズマプロセスにおける揺らぎ制御による高品質成膜技術の開発及び物理機構の解明
キーワード:気相中ナノ粒子の成長及び挙動
2018.04~2020.03.
初年次教育における文系学部学生への科学実験授業の効果
キーワード:科学実験、文系学部学生,初年次教育
2016.04.
大学1,2年時の大学教育における科学実験を取り入れたPBL及びActive Learning授業の可能性
キーワード:科学実験、PBL(Project-based learning),大学教育
2013.04.
宇宙空間におけるプラズマとダストの相互作用関係
キーワード:プラズマとダストの相互作用
2010.04.
リチウムイオン電池用Si系ナノ粒子含有ポーラス負極に関する研究開発
キーワード:二次電池、リチウムイオン電池、Siナノ粒子含有ポーラス負極
2011.10.
プラズマ揺らぎとナノ界面特性との相互作用ダイナミックス
キーワード:ナノ界面、ダイナミックス、プラズマ
2011.04~2013.03.
プラズマプロセスにおけるプラズマ揺らぎの研究
キーワード:揺動、振幅変調、ナノ粒子特性との相互作用
2010.04.
プラズマ乱流と構造形成
キーワード:プラズマ、揺動、ドリフト波、インターチェンジモード
2004.04~2010.03.
従事しているプロジェクト研究
反応性プラズマにおける任意波形放電手法を用いた高精度成膜技術の構築
2019.04, 代表者:鎌滝晋礼, 九州大学.
機械学習を用いたプラズマプロセスにおける高精度予測モデルの構築
2019.04, 代表者:鎌滝晋礼, 九州大学.
反応性プラズマにおける気相制御による低温成膜技術の構築
2018.04, 代表者:鎌滝晋礼, 九州大学.
基礎教育から専門教育をつなぐ新しい実用的プラズマ科学実験教材の開発
2016.04, 代表者:鎌滝晋礼, 九州大学.
協働学習における動機付けの研究
2015.04, 代表者:鎌滝晋礼, 九州大学.
宇宙空間におけるプラズマとダストの相互作用関係の解明
2010.04, 代表者:鎌滝晋礼, 九州大学.
リチウムイオン電池用Si系ナノ粒子含有ポーラス負極に関する研究開発
2011.10, 代表者:白谷正治, 九州大学.
プラズマ揺らぎとナノ界面特性揺らぎの相互作用ダイナミックス
2011.04, 代表者:鎌滝晋礼, 高等教育開発推進センター.
ナノ粒子含有プラズマによるナノ界面ボンドエンジニアリングの創生
2009.04~2014.03, 代表者:白谷正治, 九州大学.
研究業績
主要著書
主要原著論文
1. Kunihiro Kamataki, Yusuke Sasaki, Iori Nagao, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani, Low-temperature fabrication of silicon nitride thin films from a SiH4+N2 gas mixture by controlling SiNx nanoparticle growth in multi-hollow remote plasma chemical vapor deposition, Materials Science in Semiconductor Processing, 10.1016/j.mssp.2023.107613, 164, 107613, 2023.05.
2. Nunomura, Shota, SAKATA Isao, Misawa Tatsuya, Kawai Shinji, KAMATAKI Kunihiro, Koga Kazunori, SHIRATANI Masaharu, Silicon surface passivation with a-Si:H by PECVD : Growth temperature effects on defects and band offset, Japanese Journal of Applied Physics, in press, 2023.05.
3. M.N. Agusutrisno, Ryota Narishige, Kunihiro Kamataki, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoto Yamashita, Control of inhomogeneity and magnetic properties of ZnO:Co films grown by magnetron sputtering using nitrogen, Materials Science in Semiconductor Processing, 10.1016/j.mssp.2023.107503, 162, 107503, 2023.04.
4. Susumu Toko, Taiki Hasegawa, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani and Yuichi Setsuhara, Optical emission spectroscopy study in CO2 methanation with plasma, Japanese Journal of Applied Physics, 10.35848/1347-4065/acc66a, 62, SI1008, 2023.04.
5. Ryota Narishige, Naoto Yamashita, Kunihiro Kamataki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Hisato Yabuta & Naho Itagaki, Effects of substrate surface polarity on heteroepitaxial growth of pseudobinary ZnO_InN alloy films on ZnO substrates, Journal of Materials Research, 10.1557/s43578-022-00827-4, 38, 7, 1803-1812, 2022.11.
6. Naoto Yamashita, Ryo Mitsuishi, Yuta Nakamura, Keigo Takeda, Masaru Hori, Kunihiro Kamataki, Takamasa Okumura, Kazunori Koga & Masaharu Shiratani,, Role of insoluble atoms in the formation of a three-dimensional buffer layer in inverted Stranski–Krastanov mode, Journal of Materials Research, 10.1557/s43578-022-00886-7, 38, 5, 1178-1185, 2023.01.
7. Takamasa Okumura, Pankaj Attri, Kunihiro Kamataki, Naoto Yamashita, Yuichi Tsukada, Naho Itagaki, Masaharu Shiratani, Yushi Ishibashi, Kazuyuki Kuchitsu & Kazunori Koga, Detection of NO3- introduced in plasma-irradiated dry lettuce seeds using liquid chromatography-electrospray ionization quantum mass spectrometry (LC-ESI QMS), Scientific Reports, 10.1038/s41598-022-16641-1, 12, 1, 12525, 2022.07.
8. Iori Nagao, K. Kamataki, A. Yamamoto, M. Otaka, Y. Yamamoto, D. Yamashita, N. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges, MRS Advances, 10.1557/s43580-022-00417-w, 7, 31, 911-917, 2022.12.
9. Kunihiro Kamataki, Daiki Nagamatsu, Tao Yang, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Toshiaki Arima, Michihiro Otaka, Yuma Yamamoto, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani, Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma, AIP Advances, https://doi.org/10.1063/5.0097691, 12, 085220, 2022.08.
10. SHOTA NUNOMURA, KUNIHIRO KAMATAKI, TAKEHIKO NAGAI, TATSUYA MISAWA, SHINJI KAWAI, KOSUKE TAKENAKA, GIICHIRO UCHIDA, AND KAZUNORI KOGA, Plasma Synthesis of Silicon Nanoparticles: From Molecules to Clusters and Nanoparticle Growth, IEEE Open Journal of Nanotechnology, 10.1109/OJNANO.2022.3209995, 3, 94-100, 2022.09.
11. Shinjiro Ono, Sung Hwa Hwang, Takamasa Okumura, Kunihiro Kamataki, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Jun-Seok Oh, Susumu Takabayashi & Tatsuyuki Nakatani , Raman spectral analysis of the as-deposited a-C:H films prepared by CH4 + Ar plasma CVD, MRS adv., https://doi.org/10.1557/s43580-022-00310-6, 2022.07.
12. Pankaj Attri, Kazunori Koga, Takamasa Okumura, Fadzai L. Chawarambwa, Tika E. Putri, Yuichi Tsukada, Kunihiro Kamataki, Naho Itagaki & Masaharu Shiratani , Treatment of organic wastewater by a combination of non-thermal plasma and catalyst: a review, Reviews of Modern Plasma Physics, 6, 17, 2022, 2022.07.
13. Michihiro Otaka, Toshiaki Arima, Jiansyun Lai, Kizuki Ikeda, Kunihiro Kamataki, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga & Masaharu Shiratani , Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma, MRS Adv., 10.1557/s43580-022-00306-2, 2022.07.
14. D. Takahashi, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki, Epitaxial Growth of Zn1-xMgxO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode Using Magnetron Sputtering, MRS Adv., 10.1557/s43580-022-00234-1, 7, 415-419, 2022.02.
15. Y. Nakamura, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki, Growth of single crystalline ZnO films on 18%-lattice-mismatched sapphire substrates using buffer layers with three-dimensional islands, Cryst. Growth Des., 10.1021/acs.cgd.2c00145, 22, 6, 3770-3777, 2022.05.
16. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, The Effects of Spin-Coating Rate on Surface Roughness, Thickness, and Electrochemical Properties of a Pt Polymer Counter Electrode, Advanced Engineering Forum, 10.4028/p-6l16rl, 45, 1-13, 2022.04.
17. T. E. Putri, F. L. Chawarambwa, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Performance comparison of nitrile-based liquid electrolytes on bifacial dye-sensitized solar cells under low-concentrated light, MRS Adv., 10.1557/s43580-022-00270-x, 7, 427-432, 2022.04.
18. Kohei Abe, Kunihiro KAMATAKI, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho ITAGAKI, Kazunori Koga and Masaharu SHIRATANI, Effects of amplitude modulated capacitively coupled discharge Ar plasma on kinetic energy and angular distribution function of ions impinging on electrodes: particle-in-cell/Monte Carlo collision model simulation, Japanese Journal of Applied Physics, 2022.06, [URL].
19. Y. Nakamura, N. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki, Growth of single crystalline ZnO films on 18%-lattice-mismatched sapphire substrates using buffer layers with three-dimensional islands, Cryst. Growth Des., 10.1557/s43580-022-00270-x, 22, 6, 3770-3777, 2022.05, [URL].
20. T. E. Putri, F. L. Chawarambwa, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani , Performance comparison of nitrile-based liquid electrolytes on bifacial dye-sensitized solar cells under low-concentrated light, MRS Adv., 10.1557/s43580-022-00270-x, 7, 427-432, 2022.04, [URL].
21. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, The Effects of Spin-Coating Rate on Surface Roughness, Thickness, and Electrochemical Properties of a Pt Polymer Counter Electrode, Advanced Engineering Forum, 10.4028/p-6l16rl, 116845, 1-13, 2022.04, [URL].
22. D. Takahashi, N. Yamashita, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki, Epitaxial Growth of Zn1-xMgxO Films on Sapphire Substrates via Inverted Stranski-Krastanov Mode Using Magnetron Sputtering, MRS Adv., 10.1557/s43580-022-00234-1, 7, 415-419, 2022.02, [URL].
23. S. Toko, M. Ideguchi, T. Hasegawa, T. Okumura, K. Kamataki, K.Takenaka, K. Koga, M. Shiratani, Y. Setsuhara, Effect of gas flow rate and discharge volume on CO2 methanation with plasma catalysis, Jpn. J. Appl. Phys., 61, SI1002, 2022.01, [URL].
24. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Performances of Carbon Black-Titanium nitrate and Carbon Black-Titanium/Triton X-100 Composite Polymer Counter Electrodes for Dye-Sensitized Solar Cells, Adv. Mater. Res., 10.4028/www.scientific.net/AMR.1168.35, 1168, 35-47, 2022.01, [URL].
25. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Improved luminescence performance of Yb3+-Er3+-Zn2+: Y2O3 phosphor and its application to solar cells, Optical Materials, 10.1016/j.optmat.2021.111928, 123, 111928, 2022.01, [URL].
26. P. Attri, T. Anan, R. Arita, T. Okumura, H. Tanaka, D. Yamashita, K. Matsuo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani, K. Kuchitsu, Y. Ishibashi, Plasma Treatment Effect on the Paramagnetic Species of Barley Seed Radical’s Intensity: An EPR study, Plasma Medicine, 10.1615/PlasmaMed.2020036353, 10, 3, 159-168, 2021.12, [URL].
27. T. E. Putri, F. L Chawarambwa, M. K. Son, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Performance Characteristics of Bifacial Dye-Sensitized Solar Cells with a V-Shaped Low-Concentrating Light System, ACS Appl. Energy Mater., 10.1021/acsaem.1c02774, 4, 12, 13410-13414, 2021.11, [URL].
28. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Effects of concentrated light on the performance and stability of a quasi-solid electrolyte in dye-sensitized solar cells, Chem. Phys. Lett., , 10.1016/j.cplett.2021.138986, 781, 138986, 2021.10, [URL].
29. S. H. Hwang, R. Iwamoto, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani, Comparison between Ar+CH4 Cathode and Anode Coupled Capacitively Coupled Plasma Chemical Vapor Deposition of Hydrogenated Amorphous Carbon Films, Thin Solid Films, 10.1016/j.tsf.2021.138701, 729, 138701, 2021.07, [URL].
30. F. L. Chawarambwa, T. E. Putri, P. Attri, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Highly efficient and transparent counter electrode for application in bifacial solar cells, Chem. Phys. Lett., 10.1016/j.cplett.2021.138369, 768, 138369, 2021.04, [URL].
31. F. L. Chawarambwa, T. E. Putri, K. Kamataki, M. Shiratani, K. Koga, N. Itagaki, D. Nakamura, Synthesis of Yb3+/Ho3+ co-doped Y2O3 nanoparticles and its application to dye sensitized solar cells, J. Mol. Struct., 10.1016/j.molstruc.2020.129479, 1228, 129479, 2021.03, [URL].
32. T. E. Putri, Y. Hao, F. L. Chawarambwa, H. Seo, Min-Kyu Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Effects of Activated Carbon Counter Electrode On Bifacial Dye Sensitized Solar Cells (DSSCs), Mater. Sci. Forum, 10.4028/www.scientific.net/MSF.1016.863, 1016, 863-868, 2021.01, [URL].
33. S. H. Hwang, K. Koga, Y. Hao, P. Attri, T. Okumura, K. Kamataki, N. Itagaki, M. Shiratani, J-S. Oh, S. Takabayashi, T. Nakatani, Time of Flight Size Control of Carbon Nanoparticles Using Ar+CH4 Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method, Processes, 10.3390/pr9010002, 9, 1, 2, 2020.12, [URL].
34. F. L. Chawarambwa, T. E. Putri, M. K. Son, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Graphene-Si3N4 nanocomposite blended polymer counter electrode for low-cost dye-sensitized solar cells, Chem. Phys. Lett., 10.1016/j.cplett.2020.137920, 758, 137920, 2020.11, [URL].
35. S. H. Hwang, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Size and flux of carbon nanoparticles synthesized by Ar+CH4 multi-hollow plasma chemical vapor deposition, Diam Relat Mater, 10.1016/j.diamond.2020.108050, 109, 108050, 2020.11, [URL].
36. F. L. Chawarambwa, T. E. Putri, K. Kamataki, M. Shiratani, K. Koga, N. Itagaki, D. Nakamura, Synthesis of Yb3+/Ho3+ co-doped Y2O3 nanoparticles and its application to dye sensitized solar cells, J. Mol. Struct., 10.1016/j.molstruc.2020.129479, 129479, 2020.10, [URL].
37. R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki, Impact of surface morphologies of substrates on the epitaxial growth of magnetron sputtered (ZnO)x(InN)1-x films, Jpn. J. Appl. Phys., 10.35848/1347-4065/abba0c, 60, SA, SAAB02, 2020.10, [URL].
38. S. H. Hwang, T. Okumura, K. Kamataki, N. Itagaki, K. Koga, T. Nakatani, M. Shiratani, Low stress diamond-like carbon films containing carbon nanoparticles fabricated by combining rf sputtering and plasma chemical vapor deposition, Jpn. J. Appl. Phys. , 10.35848/1347-4065/abbb20, 59, 10, 100906, 2020.10, [URL].
39. Ren Zhou, Kunihiro Kamataki, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunoni Koga and Masaharu Shiratani, Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma, Journal of Plasma and Fusion Research, (2019)in press., 2019.07.
40. K. Kamataki, R. Zhou, H. Ohtomo, R. Iwamoto, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Study on Relationship between Growth of Nanoparticles and Plasma Fluctuation due to Amplitude Modulated Discharge Voltage in Capacitively Coupled Reactive Plasma, Proc. of XXXIV ICPIG & ICRP-10, (2019), 2019.07.
41. 鎌滝晋礼, 小島健太郎,飯嶋裕治,内田竜也, 大河内豊, 大久保文哉, 斎藤新悟, 猿渡悦子, セビリア・アントン, 田中真理, 野瀬健, 川島啓二, 安永和央, 木村政伸, 基幹教育セミナーにおける学生の意識の変容:4学期制導入に伴う授業内容の変更とセミナーの意義に焦点を当てて, 基幹教育紀要, 5 (2019) 57-74, 2019.03.
42. K. Kamataki, R. Zhou, H. Ohtomo, R. Iwamoto, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Amplitude Modulation Frequency Dependence of Growth of Nano-Particles in Reactive Plasma, Proceedings of 36th Symposium on Plasma Processing (SPP36) / The 31th Symposium on Plasma Science for Materials (SPSM31), 15aB-4, p.52-53, (2019), 2019.01.
43. Kunihiro Kamataki, Shota Nagaishi, Yusuke Sasaki, Kazuma Tanaka, Hisayuki Hara, Daisuke Yamashita, Naho Itagaki, Kazunori Koga and Masaharu Shiratani, Relationship between Amount of Nano-particles Incorporation into SiN Film and Properties of Film by SiH4+N2 Plasma Chemical Vapor Deposition, Proceedings of 36th Symposium on Plasma Processing (SPP36) / The 31th Symposium on Plasma Science for Materials (SPSM31), PB-16, p.204-205, (2019), 2019.01.
44. S. Muraoka, L. Jiahao, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki, Effects of nitrogen impurity on zno crystal growth on Si substrates, MRS Adv., 10.1557/adv.2019.28, 4, 27, 1557-1563, 1557-1563, 2019.01, [URL].
45. K. Kamataki, R. Zhou, H. Ohtomo, D. Yamashita, N. Itagaki, K. Koga and M. Shiratani, Effect of Plasma Fluctuation Frequency on Growth of Nanopariticles in Reactive Plasmas, Proc. of the 3rd Asian Applied Physics Conference, 8Dp-2, p.131, (2018), 2018.12.
46. 鎌滝 晋礼, 課題協学科目による初年次学生の動機づけと学習観への影響 : 1つの授業実践の事例から, 基幹教育紀要, 3 (2017) 33-46, 2017.03.
47. 鎌滝 晋礼, 初年次における文系学部学生への科学実験授業の影響と意義, 第65回九州地区大学一般教育研究協議会議事録, 65 (2016) 82-89, 2017.02.
48. 鎌滝 晋礼, 科学実験を用いた課題解決型授業の展開, 第64回九州地区大学一般教育研究協議会議事録, 64 (2015) 51-55, 2015.09.
49. 鎌滝晋礼, 少人数クラスによる実験系学問分野におけるグループ学習の取組事例, 第63回九州地区大学一般教育研究協議会議事録, 65, 2015.03.
50. T. Ito, K. Koga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida and M. Shiratani, Plasma etching of single fine particle trapped in Ar plasma by optical tweezers, J. Phys. : Conf. Series.(SPSM26), 10.1088/1742-6596/518/1/012014, 518, 1, 012014, 2014.06.
51. M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura and A. Sagara, the LHD Experimental Group,Contribution of H2 plasma etching to radial profile of amount of dust particles in a divertor simulator, J. Phys. : Conf. Series (SPSM26), 10.1088/1742-6596/518/1/012009, 518, 1, 012009, 2014.06.
52. S. Toko, Y. Hashimoto, Y. Kanemitu, Y. Torigoe, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani, Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD, J. Phys. : Conf. Series (SPSM26), 10.1088/1742-6596/518/1/012008, 518, 1, 012008, 2014.06.
53. Y. Hashimoto, S. Toko, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani, Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency, J. Phys. : Conf. Series (SPSM26), 10.1088/1742-6596/518/1/012007, 518, 1, 012007, 2014.06.
54. D. Ichida, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani, Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method, J. Phys. : Conf. Series (SPSM26), 10.1088/1742-6596/518/1/012002, 518, 1, 012002, 2014.06.
55. M. Shiratani, G. Uchida, H. Seo, D. Ichida, K. Koga, N. Itagaki, and K. Kamataki, Nanostructure Control of Si and Ge Quantum Dots Based Solar Cells Using Plasma Processes, Materials Science Forum, 10.4028/www.scientific.net/MSF.783-786.2022, 783-786, 2022-2027, 2014.05.
56. M. Shiratani, K. Kamataki, G. Uchida, K. Koga, H. Seo, N. Itagaki, T. Ishihara, SiC Nanoparticle Composite Anode for Li-Ion Batteries, Mat. Res. Soc. Symp. , http://dx.doi.org/10.1557/opl.2014.742, 1678, 2014.04, [URL].
57. I. Suhariadi, K. Oshikawa, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, and N. Itagaki, Study on the Crystal Growth Mechanism of ZnO Films Fabricated Via Nitrogen Mediated Crystallization, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015064, 1, 015064, 2014.03, [URL].
58. S. Toko, Y. Kim, Y. Hashimoto, Y. Kanemitu, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani, Effects of Grid DC Bias on Incorporation of Si Clusters into Amorphous Silicon Thin Films in Multi-Hollow Discharge Plasma CVD, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015069, 1, 015069, 2014.03, [URL].
59. M. Tateishi, K. Koga, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group, Spatial Profile of Flux of Dust Particles Generated due to Interaction between Hydrogen Plasmas and Graphite Target, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015020, 1, 015020, 2014.03, [URL].
60. G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Effects of H2 Gas Addition on Structure of Ge Nanoparticle Films Deposited by High-pressure RF Magnetron Sputtering Method, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015082, 1, 015082, 2014.03, [URL].
61. M. Shiratani, Y. Morita, K. Kamataki, H. Seo, G. Uchida, N. Itagaki, K. Koga, Correlation between nanoparticle growth and plasma parameters in low pressure reactive VHF discharge plasmas, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015083, 1, 015083, 2014.03, [URL].
62. G. Uchida, Y. Kanemitsu, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Combinatorial Plasma CVD of Si Nanoparticle Composite Films for Band Gap Control, JPS Conf. Proc. (12th Asia Pacific Physics Conference), 10.7566/JPSCP.1.015080, 1, 015080, 2014.03, [URL].
63. H. Seo, D. Ichida, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Analysis on the photovoltaic property of Si quantum dot-sensitized solar cells, International Journal of Precision Engineering and Manufacturing , 10.1007/s12541-014-0343-8, 15, 2, 339-343, 2014.02, [URL].
64. M. Shiratani, K. Koga, K. Kamataki, S. Iwashita, G. Uchida, H. Seo, and N. Itagaki, Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas, Jpn. J. Appl. Phys. , 10.7567/JJAP.53.010201, 53, 1, 010201, 2014.01, [URL].
65. H. Seo, Y. Wang, M. Sato, G. Uchida, K. Koga, N. Itagaki, K. Kamataki, M. Shiratani, The improvement on the performance of quantum dot-sensitized solar cells with functionalized Si, Thin Solid Films, 10.1016/j.tsf.2013.04.073, 546, 284-288, 2013.11, [URL].
66. K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki, Epitaxial Growth of ZnInON Films with Tunable Band Gap from 1.7 eV to 3.3 eV on ZnO Templates, Jpn. J. Appl. Phys., 10.7567/JJAP.52.11NM06, 52, 11NM06, 2013.11, [URL].
67. K. Koga, M. Tateishi, K. Nishiyama, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, Akiko Sagara, the LHD Experimental Group, Flux Control of Carbon Nanoparticles Generated due to Interactions between Hydrogen Plasmas and Graphite Using DC-Biased Substrates, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.11NA08, 52, 11NA08, 2013.11, [URL].
68. Y. Kim, K. Hatozaki, Y. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, H. Seo, K. Koga, and M. Shiratani, Correlation between Volume Fraction of Silicon Clusters in Amorphous Silicon Films and Optical Emission Properties of Si and SiH, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.11NA07, 52, 11NA07, 2013.11, [URL].
69. G. Uchida, Y. Wang, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Characteristics of Crystalline Silicon/Si Quantum Dot/Poly(3,4-ethylenedioxythiophene) Hybrid Solar Cells, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.11NA05, 52, 11NA05, 2013.11, [URL].
70. G. Uchida, M. Sato, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Characteristics of Photocurrent Generation in the Near-Ultraviolet Region in Si Quantum-Dot Sensitized Solar Cells, Thin Solid Films, 10.1016/j.tsf.2013.04.111, 544, 93-98, 2013.10, [URL].
71. Y. Kim, T. Matsunaga, K. Nakahara, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Effects of nanoparticle incorporation on properties of microcrystalline films deposited using multi-hollow discharge plasma CVD, Surf. Coat. Technol., 10.1016/j.surfcoat.2012.04.029, 228, 1, S550–S553, 2013.08, [URL].
72. Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga, and M. Shiratani, Observation of nanoparticle growth process using a high speed camera, ISPC 21 Proceedings, 2013.07, [URL].
73. K. Koga, K. Nishiyama, Y. Morita, G. Uchida, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, and the LHD Experimental Group, Effects of DC Substrate Bias Voltage on Dust Flux in the Large Helical Device, Journal of Nuclear Materials, 10.1016/j.jnucmat.2013.01.154, 438, S727–S730, 2013.07, [URL].
74. K. Nishiyama, Y. Morita, G. Uchida, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, and H. Kersten, Discharge Power Dependence of Carbon Dust Flux in a Divertor Simulator, Journal of Nuclear Materials, 10.1016/j.jnucmat.2013.01.169, 438, S788–S791, 2013.07, [URL].
75. H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Growth control of ZnO nano-rod with various seeds and photovoltaic application, J. Phys. : Conference Series, 10.1088/1742-6596/441/1/012029, 441, 1, 012029, 2013.06, [URL].
76. H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Analysis on the effect of polysulfide electrolyte composition for higher performance of Si quantum dot-sensitized solar cells, Electrochimica Acta, 10.1016/j.electacta.2013.02.026, 95, 1, 43-47, 2013.04, [URL].
77. I. Suhariadi, K. Matsushima, K. Kuwahara, K. Oshikawa, D. Yamashita, H. Seo, G. Uchida, K. Kamtaki, K. Koga, M. Shiratani, S. Bornholdt, H. Kersten, Harm Wulff, N. Itagaki, Effects of Hydrogen Dilution on ZnO Thin Films Fabricated via Nitrogen Mediated Crystallization, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.01AC08, 52, 1, 01AC08(5pages), 2013.01, [URL].
78. Y. Kim, K. Hatozaki, Y. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, H. Seo, K. Koga, M. Shiratani, High Amount Cluster Incorporation in Initial Si Film Deposition by SiH4 Plasma Chemical Vapor Deposition, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.01AD01, 52, 1, 01AD01(4pages), 2013.01, [URL].
79. H. Seo, Y. Wang, M. Sato, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Improvement of Si Adhesion and Reduction of Electron Recombination for Si Quantum Dot-Sensitized Solar Cells, Jpn. J. Appl. Phys. , 10.7567/JJAP.52.01AD05, 52, 1, 01AD05(5pages), 2013.01, [URL].
80. H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, The reduction of charge recombination and performance enhancement by the surface modification of Si quantum dot-sensitized solar cell, Electrochimica Acta, 10.1016/j.electacta.2012.09.087, 87, 1, 213-217, 2013.01, [URL].
81. K. Kamataki, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani, Control of radial density profile of nano-particle produced in reactive plasma by amplitude modulation of rf discharge voltage, Thin Solid Films, 10.1016/j.tsf.2012.07.059, 523, 76-79, 2012.11, [URL].
82. N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani, Sputter deposition of Epitaxial Zinc-Indium Oxynitride Films for Excitonic Transistors (Invited), Proc. of International Symposium on Dry Process, 34, 97-98, 2012.11.
83. Y. Kim, T. Matsunaga, K. Nakahara ,G. Uchida, K. Kamataki , N. Itagaki, H. Seo, K. Koga, M. Shiratani , Effects of crystalline nanoparticle incorporation on growth, structure, and properties of microcrystalline silicon films deposited by plasma CVD , Thin Solid Films, 10.1016/j.tsf.2012.06.023, 523, 29-33, 2012.11, [URL].
84. I. Suhariadi, N. Itagaki, K. Kuwahara, K. Oshikawa, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, K. Nakahara, M. Shiratani, ZnO:Al Thin Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization: Effects of N2/Ar Gas Flow Rate Ratio, Transactions of the Materials Research Society of Japan, 10.14723/tmrsj.37.165, 37, 2, 165-168, 2012.06, [URL].
85. K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani, High quality epitaxial ZnO films grown on solid-phase crystallized buffer layers, Thin Solid Films, 10.1016/j.tsf.2011.10.136, 520, 14, 4674-4677, 2012.05, [URL].
86. K. Kamataki, Y. Morita, M. Shiratani, K. Koga, G. Uchida, N. Itagaki , In situ analysis of size dispersion of nano-particles in reactive plasma using two dimentional laser light scattering method, Journal of Instrumentation, 10.1088/1748-0221/7/04/C04017, 7, 4, C04017, 2012.04, [URL].
87. H. Seo, Y. Wang, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, The Optical Analysis and Application of Size-controllable Si Quantum Dots Fabricated by Multi-hollow Discharge Plasma Chemical Vapor Deposition, Mat. Res. Soc. Symp. Proc., 10.1557/opl.2012.890, 1426, 313-318, 2012.04, [URL].
88. Y. Kim, K. Hatozaki, Y. Hashimoto, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, In-situ Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances, Mat. Res. Soc. Symp. Proc., 10.1557/opl.2012.839, 1426, 307-311, 2012.04, [URL].
89. M. Shiratani, K. Hatozaki, Y. Hashimoto, Y. Kim, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition, Mat. Res. Soc. Symp. Proc., 10.1557/opl.2012.1245, 1426, 377-382, 2012.04, [URL].
90. 鎌滝晋礼, 理系日本人学生の実験授業における日本簿の英語教育によるハイブリッド授業の試み, 第60回九州地区大学一般教育研究協議会議事録, 65, 2012.03.
91. K. Koga, T. Matsunaga, Y. Kim, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, and M. Shiratani, Combinatorial Deposition of Microcrystalline Silicon Films Using Multihollow Discharge Plasma Chemical Vapor Deposition, Jpn. J. Appl. Phys. , 10.1143/JJAP.51.01AD02, 51, 1, 01AD02(4pages), 2012.01, [URL].
92. G. Uchida, K. Yamamoto, M. Sato, Y. Kawashima, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Effect of nitridation of Si nano-particles on the performance of quantum-dot sensitized solar cells, Jpn. J. Appl. Phys. , 10.1143/JJAP.51.01AD01, 51, 1, 01AD01(5pages), 2012.01, [URL].
93. K. Koga, K. Nakahara, Y. Kim, T. Matsunaga, D.Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani, Deposition of cluster-free B-doped a-Si:H films using SiH4+B10H14 multi-hollow discharge plasma CVD, Jpn. J. Appl. Phys. , 10.1143/JJAP.51.01AD03, 51, 1, 01AD03(4pages), 2012.01, [URL].
94. Y. Nagashima, S. Itoh, S. Inagaki, H. Arakawa, N. Kasuya, A. Fujisawa, K. Kamataki, T. Yamada, S. Shinohara, S. Oldenburger, M. Yagi, Y. Takase, P. H. Diamond, and K. Itoh, Dynamics of global transport and turbulence noise force - an experimental analysis on plasma turbulence, Proc. of Plasma Conference 2011, 25, SP6-4, 2011.11.
95. 鎌滝晋礼, 文系学生に対する科学教育の取り組みと意義, 大学の物理教育, 17, 3, 125, 2011.11, [URL].
96. T. Matsunaga, Y. Kim, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani, Effects of nano-particles on (220) crystal orientation of microcrystallite silicon thin films, Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21), 4D-2P-16, 2011.11.
97. K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani, Zno films with buffer layers crystallized via nitrogen mediation: Effects of deposition temperature of buffer layers, Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21), 4D-2P-11, 2011.11.
98. N. Itagaki, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, M. Shiratani, Zinc oxide-based transparent conducting films with buffer layers fabricated via nitrogen-mediated crystallization, Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21), 4D-2P-10, 2011.11.
99. K. Nakahara, K. Hatozaki, M. Sato, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Defect density of cluster-free a-si:h films deposited by multi-hollow discharge plasma CVD, Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21), 3D-2P-20, 2011.11.
100. Y. Kim, T. Matsunaga, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani, Combinatorial study on effects of substatrate temperature of silicon film deposition using multi-hollow discharge plasma cvd, Proc. of The 21st International Photovoltaic Science and Engineering Conference (PVSEC-21), 3D-2P-09, 2011.11.
101. K. Kuwahara, N. Itagaki, K. Nakahara, D. Yamashita, Seo H., G. Uchida, K. Kamataki, K. Koga, M. Shiratani, Effects of N2 gas addition to sputtering plasma on properties of epitaxial ZnO films, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P008-O, 2011.11.
102. T. Matsunaga, Y. Kim, K. Koga, H. Seo, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani, Influence of nano-particles on multi-hollow discharge plasma for microcrystalline silicon thin films deposition, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P015-O, 2011.11.
103. K. Kamataki, K. Koga, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P014-O, 2011.11.
104. K. Nishiyama, Y. Morita, D. Yamashita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, the LHD Experimental Group, S. Bornholdt, H. Kersten, Collection of carbon dust particles formed due to plasma-wall interactions between high density H2 plasma and carbon wall onto substrates by applying local DC bias voltage, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P094-O, 2011.11.
105. Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Radical Flux Evaluation to Microcrystalline Silicon Films Deposited by Multi-Hollow Discharge Plasma CVD, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P011-O, 2011.11.
106. K. Nakahara, K. Hatozaki, Y. Hashimoto, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Deposition of cluster-free a-Si:H films using cluster eliminating filter, Proc. of Plasma Conference 2011 (PLASMA2011) , 24P010-O, 2011.11.
107. N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, K. Kamataki, H. Seo, G. Uchida, K. Koga, M. Shiratani, Low resistive ZnO:Al films with ZnO buffer layers fabricated by Ar/N2 magnetron sputtering, Proc. of Plasma Conference 2011 (PLASMA2011) , 24G16, 2011.11.
108. M. Shiratani, Y. Kim, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, Effects of nanoparticle incorporation on Si thin films deposited by plasma CVD, Proc. of Plasma Conference 2011 (PLASMA2011) , 24G06, 2011.11.
109. K. Koga, T. Urakawa, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori, Self-organized carbon Mk formation on the top surface of fine trenches using a low temperature plasma anisotropic CVD for depositing fine organic structure, Proc. of Plasma Conference 2011 (PLASMA2011) , 23G03, 2011.11.
110. G. Uchida, Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani, Hybrid sensitized solar cells using Si nanoparticles and ruthenium dye, Physica Status Solidi (c), 10.1002/pssc.201100166, 8, 10, 3021-3024, 2011.10, [URL].
111. G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Nakahara, K. Kamataki, N. Itagaki, K. Koga, M. Kondo, M. Shiratani, Surface nitridation of silicon nano-particles using double multi-hollow discharge plasma CVD, Physica Status Solidi (c), 10.1002/pssc.201001230, 8, 10, 3017-3020, 2011.10, [URL].
112. K. Koga, K. Nakahara, Y. Kim, Y. Kawashima, T. Matsunaga, M. Sato, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani, Deposition of cluster-free P-doped a-Si:H films using SiH4+PH3 multi-hollow discharge plasma CVD method, Physica Status Solidi (c), 10.1002/pssc.201100229, 8, 10, 3013-3016, 2011.10, [URL].
113. K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, M. Shiratani, Impacts of Amplitude Modulation of RF Discharge Voltage on the Growth of Nanoparticles in Reactive Plasma, Applied Physics Express, 10.1143/APEX.4.105001, 4, 10, 105001(3pages), 2011.10, [URL].
114. K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani, Impacts of Plasma Fluctuations on Growth of Nano-Particles in Reactive Plasma , Proc. of International Conference on Phenomena in Ionized Gases(ICPIG) 2011 Conference, D13-318, 2011.09.
115. K. Koga, Y. Kawashima, T. Matsunaga, M. Sato, K. Nakahara, W. M. Nakamura, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani, Comparison between silicon thin films with and without incorporating crystalline silicon nanoparticles into the film, Thin Solid Films, 10.1016/j.tsf.2011.01.408, 519, 20, 6896-6898, 2011.08, [URL].
116. Y. Nagashima, S. Itoh, S. Inagaki, H. Arakawa, N. Kasuya, A. Fujisawa, K. Kamataki, T. Yamada, S. Shinohara, S. Oldenburger, M. Yagi, Y. Takase, P. H. Diamond, and K. Itoh, Non-Gaussian properties of global momentum and particle fluxes in a cylindrical laboratory plasma, Physics of Plasma, 10.1063/1.3601767, 18, 070701, 2011.07, [URL].
117. Y. Kim, T. Matsunaga, Y. Kawashima, D. Yamashita, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, M. Shiratani, Combinatorial study of substrate temperature dependence on properties of silicon films deposited using multihollow discharge plasma CVD, Proc. of The 20th International Symposium on Plasma Chemistry (ISPC20), POL08, 2011.07.
118. M. Shiratani, K. Koga, S. Iwashita, G. Uchida, N. Itagaki, K. Kamataki, Nano-factories in plasma: present status and outlook, Journal of Physics D: Applied Physics, 10.1088/0022-3727/44/17/174038 , 44, 17, 174038, 2011.05, [URL].
119. Y. Nagashima, S. Inagaki, K. Kamakaki, H. Arakawa, T. Yamada, S. Shinohara, Y. Kawai, M. Yagi, A. Fujisawa, S. Itoh, K. Itoh, and Y. Takase, Development of radially movable multichannel Reynolds stress probe system for a cylindrical laboratory plasma, Rev. Sci. Instrum., 82, 033503, 2011.03, [URL].
120. K. Koga, G. Uchida, K. Yamamoto, Y. Kawashima, M. Sato, K. Kamataki, N. Itagaki, M. Shiratani, Generation and Surface Modification of Si nano-particles using SiH4/H2 and N2 multi-hollow discharges and their application to the third generation photovoltaics, International Conference on Advances in Condensed and Nano Materials (ICACNM), 10.1063/1.3653600, 1393, 27-30, 2011.02, [URL].
121. K. Kamataki, K. Itoh, S. Itoh, A. Fujisawa, S. Inagaki, Y. Nagashima, M. Yagi, T. Yamada, ECRH Superposition on Linear Cylindrical Helicon Plasma in LMD-U, Journal of Plasma and Fusion Research, 5, S2046, Special Issue, 2010.12, [URL].
122. T. Kobayashi, S. Inagaki, H. Arakawa, K. Kamataki, Y. Nagashima, T. Yamada, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, S. Itoh, K. Itoh, Bi-spectral analysis of density and potential flucutuations in a high neutral density cylindrical plasma, Journal of Plasma and Fusion Research, 5, S2047, Special Issue, 2010.12, [URL].
123. H. Arakawa, S. Inagaki, Y. Nagashima, T. Yamada, K. Kamataki, T. Kobayashi, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, K. Itoh, S. Itoh, Probability Density Function of Density Fluctuations in Cylindrical Helicon Plasma, Journal of Plasma and Fusion Research, 5, S2044, Special Issue, 2010.12, [URL].
124. T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, S. Shinohara, N.Kasuya, K. Terasaka, K. Kamataki, H. Arakawa, M. Yagi, A. Fujisawa, K. Itoh , Nonlinear mode couplings in a cylindrical magnetized plasma, Journal of Plasma and Fusion Research, 5, S2016, Special Issue, 2010.12, [URL].
125. T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, N. Kasuya, K. Kamataki, H. Arakawa, T.Kobayashi, M. Yagi, A. Fujisawa, and K. Itoh , Observation of Quasi-Two-Dimensional Nonlinear Interactions in a Drift-Wave Streamer, Physical Review Letter, 105, 225002, 2010.11, [URL].
126. G. Uchida, M. Sato, Y. Kawashima, K. Yamamoto, K. Nakahara, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo, Optical and Electrical Properties of Particle Composite Thin Films deposited in SiH4/H2 and N2 Multi-Hollow Discharges, Proc. of MNC2010 (第23回マイクロプロセス・ナノテクノロジー国際会議), 12D-11-66, 2010.11.
127. H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani, Substrate Temperature Dependence of Sticking Probability of SiOx-CH3 Nano-Particles, Proc. of International Symposium on Dry Process, 43-44, P1-A17, 2010.11.
128. G. Uchida, S. Nunomutra, H. Miyata, S. Iwashita, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Effects of Ar addition on breakdown voltage in a Si(CH3)2(OCH3)2 RF discharge, IEEE Region 10 Conference on TENCON 2010 , 10.1109/TENCON.2010.5686704, 2199-2201, 2010.11, [URL].
129. K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani, Effects of Amplitude Modulation of rf Discharge Voltage on Growth of Nano-Particles in Reactive Plasma, IEEE Region 10 Conference on TENCON 2010 , 10.1109/TENCON.2010.5686456, 1943-1947, 2010.11, [URL].
130. M. Shiratani, K. Koga, G. Uchida, N. Itagaki, K. Kamataki, Fluctuation Control for Plasma Nanotechnologies, IEEE Region 10 Conference on TENCON 2010 , 10.1109/TENCON.2010.5685920, XII-XVI , 2010.11, [URL], プラズマナノテクノロジーで最重要課題となっている揺らぎの制御に関する現状と将来を展望した論文。.
131. H. Miyata, K. Nishiyama, S. Iwashita, H. Matsuzaki, D. Yamashita, G. Uchida, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, A. Sagara, LHD experimental group, Carbon dust particles generated due to H2 plasma-carbon wall interaction, Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma, 55, 7, CTP.00114, 2010.10.
132. G. Uchida, M. Sato, Y. Kawashima, K. Nakahara, K. Yamamoto, T. Matsunaga, D. Yamashita, H. Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Generation of nitridated silicon particles and their thin film deposition using double multi-hollow discharges, Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma, 55, 7, CTP.00093, 2010.10.
133. T. Matsunaga, Y. Kawashima, K. Koga, W. M. Nakamura, K. Nakahara, H. Matsuzaki, D. Yamashita, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani, Combinatorial deposition of microcrystalline Si films using multi-hollow discharge plasma CVD, Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma, 55, 7, CTP.00089, 2010.10.
134. K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Deposition rate enhancement of cluster-free P-doped a-Si:H films using multi-hollow discharge plasma CVD method, Proc. of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasma, 55, 7, CTP.00087, 2010.10.
135. H. Arakawa, S. Inagaki, Y. Nagashima, T. Yamada, K. Kamataki, T. Kobayashi, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, S. -I Itoh and K. Itoh , Bifurcation of the plasma turbulence on LMD-U, Plasma Phys. Controlled Fusion , 51, 10, 105009, 2010.09, [URL].
136. K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, K. Yamamoto, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, Deposition of cluster-free P-doped a-Si:H films using a multi-hollow discharge plasma CVD method, Proc. of 35th IEEE Photovoltaic Specialists Conference , 10.1109/PVSC.2010.5616514, 3722-3755, 2010.07, [URL].
137. Y. Kawashima, K. Yamamoto, M. Sato, K. Nakahara, T. Matsunaga, W. M. Nakamura, D. Yamashita, H. Matsuzaki, G. Uchida, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani, M. Kondo, Si quantum dot-sensitized solar cells using Si nanoparticles produced by plasma CVD, Proc. 35th IEEE Photovoltaic Specialists Conf., 10.1109/PVSC.2010.5617205, 3347-3351, 2010.07, [URL].
138. 鎌滝晋礼, 理系日本人学生の実験授業における日本語と英語によるハイブリッド授業の試み, 大学教育, 16, 129-134, 2010.06.
139. T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, K. Kamataki, H. Arakawa, M. Yagi, A. Fujisawa, K. Itoh , Study of Amplitude Correlation Technique in a Cylindrical Magnetized Plasma, Journal of the Physical Society of Japan, 79, 085001, 2010.06, [URL].
140. T.Yamada, S. Itoh, S. Inagaki, Y.Nagashima, S. Shinohara, N.Kasuya, K.Terasaka, K.Kamataki, H. Arakawa, M. Yagi, A. Fujisawa, K. Itoh, Two-dimensional bi-spectral analysis of drift wave turbulence in a cylindrical plasma, Phys. Plasma, 17, 052313, 2010.05, [URL].
141. K. Kamataki, K. Itoh, S. Itoh, A. Fujisawa, S. Inagaki, Y. Nagashima, M. Yagi, T. Yamada, ECRH Superposition on Linear Cylindrical Helicon Plasma in LMD-U, Journal of Plasma and Fusion Research, 5, S2046, 2010., 5, S2046-1-5, 2010.04.
142. K. Kamataki, K. Itoh, S. Itoh, A. Fujisawa, S. Inagaki, Y. Nagashima, M. Yagi, T. Yamada, Statistical Analysis Technique for Estimation of Causal Relationship in Plasma Turbulence, Journal of the Physical Society of Japan, 79, 2, 24501, 2010.02.
143. H. Arakawa, K. Kamataki, S. Inagaki, T. Maruta, Y. Nagashima, T. Yamada, S. Shinohara, K. Terasaka, S. Sugita, M. Yagi, N. Kasuya, A. Fujisawa, S. Itoh, K. Itoh, Observations of abrupt changes in the fluctuation spectrum on LMD-U, Plasma Phys. Controlled Fusion , 51, 8, 085001, 2009.08.
144. Y. Nagashima, S. Itoh, K. Itoh, A. Fujisawa, S. Inagaki, Y. Kawai, S. Shinohara, M. Fukao, T. Yamada, K. Terasaka, T. Maruta, K. Kamataki, H. Arakawa, M. Yagi, N. Kasuya, G. R. Tynan, P. H. Diamond, Y. Takase, Reynolds Stress Measurements for Investigation of Nonlinear Processes of Turbulence in the Large Mirror Device and in the Large Mirror Device-Upgrade, Journal of Plasma and Fusion Research, 8, 50, 2009.08.
145. K. Kamataki, S. Itoh, Y Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh., Dynamics of Drift and Flute Modes in Linear Cylindrical ECR Plasma, Journal of Plasma and Fusion Research, 8, 82, 2009.08.
146. T. Yamada, S. Itoh, S. Inagaki, Y. Nagashima, S. Shinohara, T. Maruta, K. Terasaka, K. Kamataki, N. Kasuya, M. Yagi, Y. Kawai, A. Fujisawa, K. Itoh, Measurement of Nonlinear Mode Couplings in the Large Mirror Device-Upgrade, Journal of Plasma and Fusion Research, 8, 87, 2009.08.
147. K. Kamataki, S. Itoh, Y Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh, Observation of Zonal Flow Type Oscillation in Linear Cylindrical ECR Plasma, Journal of Plasma and Fusion Research, 3, 047, 2008.08, [URL].
148. H. Tsuchiya, S. Itoh, A. Fujisawa, K. Kamataki, S. Shinohara, M. Yagi, Y. Kawai, A. Komori, K.Itoh, Sheared flow generation and mode suppression in a magnetized linear cylindrical plasma, Plasma Phys. Control. Fusion, 50, 5, 055005, 2008.05.
149. K. Kamataki, S. Itoh, Y Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh, Investigation of Competitive Oscillations between Drift Mode and Flute Mode in Linear Cylindrical ECR Plasma, Plasma Phys. Control. Fusion, 50, 035011, 2008.03.
150. K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, M. Yagi, K. Itoh, S. Itoh, Coexistence of Collisional Drift and Flute Wave Instabilities in Bounded Linear ECR Plasma, Journal of the Physical Society of Japan, 76, 5, 054501, 2007.05.
151. K. Kamataki, Y Nagashima, S. Shinohara, Y. Kawai, S. Inagaki, M. Yagi, K. Itoh, S. Itoh, Observation of Competition between Drift Instability and Flute Instability in a Bounded Linear ECR Plasma, Journal of Plasma and Fusion Research, 2, 034, 2007.05.
主要総説, 論評, 解説, 書評, 報告書等
主要学会発表等
1. Kunihiro Kamataki, F. L. Charawambwa, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Prediction of Plasma CVD Process Data of a-Si:H Films via Machine Learning, ISPC25(25th International Symposium on Plasma Chemistry), 2023.05.
2. 鎌滝 晋礼, F. L. Chawarambwa, 板垣 奈穂, 古閑 一憲, 白谷 正治, プラズマプロセスにおける機械学習の活用~ITO薄膜のスパッタ製膜プロセスを例に~, 令和4年度 LHD におけるプラズマ・壁相作用に関する研究会  および 静岡大学「放射科学が切り拓くグリーン・エネルギー超領域科学研究」研究会 , 2023.03.
3. 鎌滝 晋礼, 佐藤 斗真,富田 健太郎,Pan Yiming, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治, 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(3), 第70回応用物理学会春季学術講演会, 2023.03.
4. 田中真里、鎌滝晋礼, 自然災害被災地訪問による認識の変容に関する研究 東日本大震災の体験を通じて, 日本発達心理学会第34回大会, 2023.03.
5. Kunihiro Kamataki, Yuta Mido, Iori Nagao, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Developing Prediction of Key Process Parameters and Sputtering Conditions for Amorphous and high Mobility ITO/In2O3 Films via Machine Learning, AFM2023(7th International Conference on Advances in Functional Materials), 2023.01.
6. Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Electric field measurements in Ar plasma using a fine charged particle trapped with laser tweezers, 23rd Workshop on Fine Particle Plasmas , 2022.12.
7. Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Measurement of the charge on single fine particles in plasma, The 32nd Annual Meeting of MRS-J, 2022.12.
8. Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Electric fields measurement using an optical trapped charged particle in Ar plasma(invited)
, The 32nd Annual Meeting of MRS-J , 2022.12.
9. Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Yuma Yamamoto, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, プラズマCVDにおける成膜とナノ粒子成長 , 第38回 九州・山口プラズマ研究会, 2022.11.
10. Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Yuma Yamamoto, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Control of Growth of Nano-particles and Properties of SiO2 Films with Amplitude Modulated Discharge in TEOS-PECVD(Plenary), AAPPS-DPP2022 (6th Asia-Pacific Conference on Plasma Physics), 2022.10.
11. Kunihiro Kamataki, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Measurements of strength and fluctuation of 2D electric fields in plasmas using a fine particle trapped with laser tweezers(invited), GEC2022/ICRP-11(The 75th Annual Gaseous Electronics Conference/the 11th International Conference on Reactive Plasmas), 2022.10.
12. 鎌滝 晋礼, 佐藤 斗真,富田 健太郎,Pan Yiming, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治, 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(2), 第83回応用物理学会秋季学術講演会, 2022.09.
13. Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Yuma Yamamoto, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Impact of amplitude modulated discharge on suppression of nanoparticles growth in TEOS/O2/Ar capacitively coupled plasma, The 22nd International Vacuum Congress (IVC-22), 2022.09.
14. Kunihiro Kamataki, Akihiro Yamamoto, Iori Nagao, Yuma Yamamoto, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Effects of amplitude modulated rf discharge on properties of SiO2 films deposited by TEOS/O2/Ar plasma-enhanced chemical vapor deposition, 9th International Symposium on Control of Semiconductor Interfaces (ISCSI-IX), 2022.09.
15. Kunihiro Kamataki, Sakyo Okunaga, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Development of measurement of two-dimensional distribution of strength of electrical field with high spatial resolution using optical trapped particle in plasma, 2022 MRS (Material Research society) Spring Meeting, 2022.05.
16. 鎌滝 晋礼, 奥永 冴京,佐藤 斗真,富田 健太郎,Pan Yiming, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治, 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(1)
, 第69回応用物理学会春季学術講演会, 2022.03.
17. 鎌滝 晋礼, 奥永 冴京,佐藤 斗真,富田 健太郎,Pan Yiming, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治, 光捕捉微粒子による超高感度電場計測-電場強度と電場揺動計測-, 令和3年度東北大学電気通信研究所共同プロジェクト研究会, 2022.02.
18. Kunihiro. Kamataki, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani, Investigation of relationship between growth of nanoparticle and plasma generation due to amplitude modulated discharge voltage in TEOS plasma, SPP-39/SPSM34(39th Symposium on Plasma Processing/34th Symposium on Plasma Science for Materials), 2022.01.
19. Kunihiro Kamataki, Sakyo Okunaga, Toma Sato, Kentaro Tomita, Pan Yimin, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Investigation of 2D electric field measurements in Ar plasmas using a fine particle trapped with laser tweezers, MRM2021(Material Research Meeting), 2021.12.
20. Kunihiro Kamataki, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani , Investigation of growth suppression mechanism of nanoparticles through amplitude modulation discharge method in TEOS plasma
, The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12), 2021.12.
21. Kunihiro KAMATAKI, Sakyo OKUNAGA, Toma SATO, Kentaro TOMITA, Pan YIMIN, Daisuke YAMASHITA, Takamasa OKUMURA, Naho ITAGAKI, Kazunori KOGA, Masaharu SHIRATANI , Study on measurement of strength and fluctuation of electrical field using optical trapped particle in Ar plasma (invited), AAPPS-DPP2021(5th Asia-Pacific Conference on Plasma Physics), 2021.09.
22. K. Kamataki, K. Abe, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani, S. Tahara, Y. Mizokami, Y. Miyata, K. Tabuchi, T. Tanikuni, S. Hiyama, K. Nagahata , Better step coverage of TEOS-PECVD SiO2 films realized by amplitude modulation of RF discharge voltage, DPS 2021 (42nd International Symposium on Dry Process), 2021.11.
23. Kunhiro KAMATAKI, Chen Feiyu, Tao Yang, Sakyo Okunaga, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani , Predictive analytics in plasma process using machine learning tools and techniques (invited), 1st Workshop on Artificial Intelligence in Plasma Science - Satellite Workshop of EU-Japan Joint Symposium on Plasma Processing, 2021.09.
24. 鎌滝 晋礼, 奥永 冴京,佐藤 斗真,富田 健太郎,Pan Yiming, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治, 振幅変調放電プラズマ中の光捕捉微粒子の挙動に関する研究, 第82回応用物理学会秋季学術講演会, 2021.09.
25. 鎌滝晋礼 , 佐々木勇輔 , 奥村賢直 ,板垣奈穂 ,古閑一憲 ,白谷正治, SiH4+N2 プラズマによる SiNx の低温高品質成膜, 応用物理学会 シリコンテクノロジー分科会 第227回 研究集会, 2021.03, 半導体デバイス高性能化に伴い,例えば、半導体の素子が高層化すればするほど、またフレキシブル基板への成膜などの場合、下地への熱ダメージを低減する必要があり、膜質を担保したままの低温成膜技術が求められている。SiNやSiO2は半導体の保護膜としてよく使われている。従来、SiN膜は、プラズマCVDにおいて300-400 ℃の高い基板温度で製膜されてきた。これは、低基板温度では、表面反応が遅く、低窒化度、高水素量の膜となり, 高品質膜を作製することが困難であるためである。本研究は、SiH4+N2プラズマを用いて気相中のナノ粒子の成長を制御することで、低基板温度(100 ℃)でも高窒化及び膜中水素量の低い高品質なSiN膜を作製することに成功した。.
26. Kunihiro Kamataki, Tomoaki Yoshida, Yusuke Sasaki, Kohei Abe, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani, Relations among spatial profiles of plasma parameters, growth of nanoparticles in reactive plasma and properties of fabricated thin films(invited), AAPPS-DPP2020 e-conference, 2020.10.
27. 鎌滝晋礼,奥永冴京, 岩本 亮介, 富田 健太郎, P.Yiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷 正治, Arプラズマ中の光捕捉微粒子への作用力の研究, 第68回応用物理学会春季学術講演会, 2021.03.
28. 鎌滝晋礼, プラズマCVDによるアモルファスシリコン成膜におけるプラズマプロセスへの機械学習の適用, 第36回九州・山口プラズマ研究会, 2020.11.
29. K. Kamataki, Relations among spatial profiles of plasma parameters, growth of nanoparticles in reactive plasma and properties of fabricated thin films, 4th Asia Pacific Conference on Plasma Physics, 2020.10.
30. K. Kamataki, S. Okunaga, K. Tomita, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani, Information on electric field deduced using a fine particle trapped with laser tweezers in Ar plasma, The 73rd Annual Gaseous Electronics Conference, 2020.10.
31. 鎌滝晋礼, 吉田知晃, 佐々木勇輔, 阿部滉平, 岩本亮介, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治, 低温環境下におけるプラズマCVDによる高品質保護膜の作製, 日本物理学会 2020年秋季大会, 2020.09.
32. K. Kamataki, Future prospects of Plasma-nano interface (Invited), Satellite meeting of AAPPS-DPP2020:Workshop on cutting-edge of plasma applications, 2020.08.
33. 鎌滝晋礼, 吉田知晃, 阿部滉平, 佐々木勇輔, 永石翔大, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治, 低温成膜における反応性プラズマ中のナノ粒子制御, 日本物理学会第75回年次大会(2020年), 2020.03.
34. 鎌滝晋礼, 奥永冴京, 岩本亮介, 富田健太郎, 山下⼤輔, 板垣奈穂, 古閑一憲, 白谷正治, 光ピンセットによるプラズマ中捕捉微粒⼦の揺動スペクトル解析, 第67回応用物理学会春季学術講演会, 2020.03.
35. K. Kamataki, Y. Sasaki, S. Nagaishi, T. Yoshida, K. Abe, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Low temperature fabrication of passivation films by plasma enhanced CVD, 7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020, 4th International Symposium on Energy Research and Application, 2020.01.
36. K. Kamataki, R. Iwamoto, S. Okunaga, S. Muraoka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Developing Prediction of Amorphization Condition Models from Sputter Deposition Experimental Results by Machine Learning Method, Materials Research Meeting 2019 (MRM2019), 2019.12.
37. K. Kamataki, R. Iwamoto, H. Tanaka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Investigation of Impact of Plasma Fluctuation Driven by Amplitude Modulated VHF Discharge on Growth of Nanoparticles in Reactive Plasma (Invited), Materials Research Meeting 2019 (MRM2019), 2019.12.
38. 鎌滝晋礼, 永石翔大, 佐々木勇輔, 原尚志, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治, 反応性プラズマにおけるナノ粒子生成制御(招待講演), 第36回プラズマ・核融合学会年会, 2019.11.
39. K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani , Low Temperature Fabrication of High Nitriding Degree of SiN films by Multi-Hollow Discharge SiH4+N2 Plasma CVD, 41st International Symposium on Dry Process (DPS2019), 2019.11.
40. K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Precision control of nanoparticle property in reactive plasma ~ Low Temperature Fabrication of Low Hydrogen Content SiN films in a Multi-Hollow Discharge Plasma CVD ~, 第35回九州・山口プラズマ研究会, 2019.11.
41. K. Kamataki, F. L. Chawarambwa, K. Koga, M. Shiratani, Challenges and Opportunities in Dye Sensitized Solar Cells Using DBD Plasma Treated Upconversion Nanoparticles (Invited), 236th ECS Meeting, 2019.10.
42. 鎌滝 晋礼, 田中 颯, 山下 大輔, 板垣 奈穂, 古閑 一憲, 白谷 正治, AM変調反応性プラズマにおけるナノ粒子成長揺動に関する時空間情報解析, 2019年第80回応用物理学会秋季学術講演会, 2019.09.
43. K. Kamataki, R. Iwamoto, S. Okunaga, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani , Developing Prediction of Key Plasma Processing Parameter from Small Data of Experimental Results by Machine Learning Method, The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019), 2019.09.
44. K. Kamataki, R. Iwamoto, H. Tanaka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Investigation of Spatiotemporal Structure of Fluctuation Related with Nanoparticle Growth in Amplitude-Modulated VHF Discharge Reactive Plasma, The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019), 2019.09.
45. K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Low Temperature Fabrication of Low Hydrogen Content SiN films in a Multi-Hollow Discharge Plasma CVD, XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10), 2019.07.
46. K. Kamataki, R. Zhou, H. Ohtomo, R. Iwamoto, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani, Study on Relationship between Growth of Nanoparticles and Plasma Fluctuation due to Amplitude Modulated Discharge Voltage in Capacitively Coupled Reactive Plasma, XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) & 10th International Conference on Reactive Plasmas (ICRP-10), 2019.07.
47. K. Kamataki, M. Shiratani, Predictive insight based on grey box analysis of plasma process data, 2nd International Conference on Data Driven Plasma Science (2nd ICDDPS), 2019.05.
48. 鎌滝晋礼, 周靭, 大友洋, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治, 反応性プラズマにおけるナノ粒子成長における変調レベル依存性, 日本物理学会第74回年次大会(2019年), 2019.03.
49. K. Kamataki, Y. Morita, K. Koga, G. Uchida, N. Itagaki, H. Seo, M. Shiratani, Spatio-temporal structure of growth of nano-particles with without amplitude modulation in reactive plasmas, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2013), 2013.01.
50. 鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 白谷正治, 放電電力変調反応性プラズマにおけるナノ粒子成長の時空間構造の観測, プラズマ・核融合学会 第29回年会, 2012.11.
51. 鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, H. Seo, 白谷正治, プラズマプロセスにおける揺らぎのダイナミックス, 九州山口プラズマ研究会、応物新領域研究会, 2012.11.
52. K. Kamataki, M. Shiratani, T. Ishihara, H. Nagano, Y. Morita, K. Kuwahara, G. Uchida, H. Seo, N. Itagaki, K. Koga, High Capacity Li Ion Battery Anodes Using Silicon Carbide Nanoparticles Produced by Double Multi-Hollow Discharge Plasma CVD, IUMRS‐ICEM 2012 , 2012.09.
53. M. Shiratani, K. Nakahara, K. Hatozaki, Y. Hashimoto, T. Matsunaga, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition, 2012 MRS Spring Meeting, 2012.04.
54. K. Kamataki, K. Koga, G. Uchida, N. Itagaki, H. Seo, M. Shiratani, Interaction between amplitude modulated plasmas and nanoparitcles growth in the plasmas, 4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012), 2012.03.
55. 鎌滝晋礼, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治, 反応性プラズマにおけるナノ粒子生成に対する放電電力摂動の効果, プラズマ・核融合学会 第15回九州・沖縄・山口支部大会, 2011.12.
56. K. Kamataki, K. Koga, G. Uchida, H. Seo, N. Itagaki, M. Shiratani, Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD, Plasma Conference 2011 (PLASMA2011), 2011.11.
57. K. Kamataki, K. Koga, G. Uchida, N. Itagaki, M. Shiratani, Impacts of Plasma Fluctuations in Reactive Plasmas (Invited), BIT's 1st Annual World Congress of Nano-S&T, 2011.10.
58. 鎌滝晋礼, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治, プラズマCVD中におけるナノ粒子成長に対するプラズマ揺らぎの効果, プラズマエレクトロニクス分科会20周年(研究会創設25周年)記念特別シンポジウム, 2011.10.
59. M. Shiratani, K. Kamataki, K. Koga, G. Uchida, Two dimensional laser light scattering to deduce size and density of nanoparticles in plasmas (Invited), Laser Aided Plasma Diagnostic conference (LAPD15), 2011.10.
60. 鎌滝晋礼, 理系日本人学生の実験授業における日本語と英語のハイブリッド授業の試み, 第60回九州地区大学一般教育研究協議会, 2011.10.
61. 白谷正治, 鎌滝晋礼, 西山雄士, 古閑一憲, 内田儀一郎, 板垣奈穂, 高周波放電のAM変調によるナノ粒子サイズ分布の制御, 平成23年度(第64回)電気関係学会九州支部連合大会, 2011.09.
62. M. Shiratani, K. Yamamoto, M. Sato, Y. Kawashima, K. Nakahara, K. Kamataki, N. Itagaki, G. Uchida, K. Koga, Deposition of quantum dot thin films using Si nanoparticles with surface nitridation (Invited), The 8th Asian-European International Conference on Plasma Surface Engineering (AEPSE2011), 2011.09.
63. M. Shiratani, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, Frontier science of interactions between plasmas and nano‐interfaces (Plenary), (ICPAT2011)4th International Conference on Advanced Plasma Technologies, 2011.09.
64. K. Kamataki , H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani, Impacts of Plasma Fluctuations on Growth of Nano-Particles in Reactive Plasmas, the XXX International Conference on Phenomena in Ionized Gases(ICPIG) 2012 Conference, 2011.08.
65. M. Shiratani, K. Koga, G. Uchida, N. Itagaki, K. Kamataki, Fluctuation Control towards Ultimate Plasma Nanotechnologies (Keynote), 第24回プラズマ材料科学シンポジウム (SPSM-24), 2011.07.
66. K. Kamataki, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani, Control of radial density profile of nano-particle produced in reactive plasma by amplitude modulation of rf discharge voltage, 第24回プラズマ材料科学シンポジウム (SPSM-24), 2011.07.
67. 鎌滝晋礼, 宮田大嗣, 古閑一憲, 内田儀一郎, 山下大輔, 松崎秀文, 白谷正治, 反応性プラズマ中のナノ粒子成長に対する気相揺らぎの効果, 第58回応用物理学関係連合講演会, 2011.03.
68. K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani, Investigation of Interaction between of Growth of Nano Particles and Plasma Fluctuations in Plasma CVD, 第20回日本MRS学術シンポジウム, 2010.12.
69. 鎌滝晋礼, 宮田大嗣, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治, プラズマCVD中のナノ粒子成長に対するプラズマ揺動の影響, プラズマ・核融合学会 九州・沖縄・山口支部 第14回 支部大会, 2010.12.
70. K. Kamataki, H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani, Effects of Amplitude Modulation of rf Discharge Voltage on Growth of Nano-Particles in Reactive Plasmas, International technical conference of IEEE Region 10, 2010.11.
71. M. Shiratani, K. Koga, G.u Uchida, N. Itagaki, K. Kamataki, Manipulation of Nano-objects Uusing Plasmas for a Plasma Nano-factory (Invited), The 11th Asia Pacific Physics Conference (APPC11), 2010.11, 新しいボトムアッププロセスとしてナノ粒子の操作をプラズマを用いて行う新概念の提案とその実験的検証に関する報告を行った。.
72. 鎌滝晋礼, 宮田大嗣, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治, 反応性プラズマ中のナノ粒子成長に対する電力摂動の効果, 第71回応用物理学会学術講演会, 2010.09.
73. 鎌滝晋礼, 基礎プラズマと反応性プラズマにおけるプラズマ揺動制御に関する研究 (招待講演), 第37回西日本放電懇談会, 2010.08.
74. K. Kamataki, Plasma Fluctuations in Pristine and Reactive Plasmas (Invited), The 11th International Workshop on Advanced Plasma Processing and Diagnostics, 2010.07.
75. K. Kamataki, Plasma Fluctuation, 2010 International Workshop on Plasma Application, 2010.06.
76. 鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝, LMD-UにおけるECRH重畳ヘリコンプラズマにおける揺動スペクトルの変化, プラズマ核融合学会 九州・山口・沖縄支部第13回支部大会, 2009.12.
77. K. Kamataki, K. Itoh, S. Itoh, A. Fujisawa, S. Inagaki, Y. Nagashima, M. Yagi, T. Yamada, ECRH Superposition on Linear Cylindrical Helicon Plasma in LMD-U, 19th International Toki Conference (ITC19), 2009.12.
78. 鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝, 直線円筒形ECRプラズマにおけるゾーナルフロー型振動の観測, 日本物理学会 2009年第64回年次大会, 2009.03.
79. 鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝, 直線ECRプラズマにおける帯状流型振動, プラズマ核融合学会 九州・山口・沖縄支部第12回支部大会, 2008.12.
80. K. Kamataki, S. Itoh, Y. Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh, Dynamics of Drift and Flute Modes in Linear Cylindrical ECR Plasma, 14th International Congress on Plasma Physics (ICPP2008), 2008.09.
81. K. Kamataki, S. Itoh, Y. Nagashima, S. Inagaki, S. Shinohara, M. Yagi, T. Yamada, Y. Kawai, A. Fujisawa, K. Itoh, Investigation of Competitive Oscillations between Drift Mode and Flute Mode in Linear Cylindrical ECR Plasma, 2nd ITER International Summer School (IISS2008) In conjunction with the 47th Summer School of JSPF for Young Plasma Scientists, 2008.07.
82. 鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝, 直線ECRプラズマ装置におけるドリフトモードとフルートモードの競合的関係, 第11回若手科学者によるプラズマ研究会, 2008.03.
83. 鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝, 直線ECRプラズマにおけるドリフト不安定性とフルート不安定性の競合的振る舞い・Ⅱ, 日本物理学会 2008年第63回年次大会, 2008.03.
84. 鎌滝晋礼、伊藤早苗、永島芳彦、稲垣滋, 篠原俊二郎、矢木雅敏、山田琢磨、河合良信、藤澤彰英、伊藤公孝, 直線ECRプラズマにおけるドリフトモードとフルートモードの周期的競合, プラズマ核融合学会 九州・山口・沖縄支部第11回支部大会, 2007.12.
85. 鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗, 直線ECRプラズマにおけるドリフト不安定性とフルート不安定性の競合的振る舞い, 日本物理学会 2007年年次大会, 2007.09.
86. 鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗, 直線ECRプラズマにおける衝突性ドリフト波不安定性とフルート波不安定性の共存現象, 日本物理学会 2007年春季大会, 2007.03.
87. 鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗, 境界のある直線ECRプラズマにおける衝突性ドリフト波不安定性とフルート不安定性の共存, プラズマ核融合学会 九州・山口・沖縄支部第10回支部大会, 2006.12.
88. K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, M. Yagi, K. Itoh, S. Itoh, Collisional Drift and Flute Wave Instabilities in Bounded Linear ECR Plasma – Identification and Stabilization, The Sixth International Workshop on Nonlinear Waves and Turbulence in Space Plasmas (NLW-6), 2006.10.
89. 鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗, 直線ECRプラズマ中のドリフト波励起実験Ⅲ, 日本物理学会 2006年秋季大会, 2006.09.
90. 鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗, 直線ECRプラズマ中のドリフト波励起実験, RIAMフォーラム 2006, 2006.06.
91. K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, M. Yagi, K. Itoh, S. Itoh, Observation of the Drift Wave Instability in Bounded ECR Plasma, 33rd European Physical Society (EPS) Conferences on Plasma Physics, 2006.06.
92. 鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗, 直線ECRプラズマ中のドリフト波励起実験Ⅱ, 日本物理学会 第61回年次大会, 2006.03.
93. 鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、矢木雅敏、伊藤公孝、伊藤早苗, 境界のある直線ECRプラズマにおける衝突性ドリフト波不安定性, プラズマ核融合学会 九州・山口・沖縄支部第9回支部大会, 2005.12.
94. K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, M. Yagi, K. Itoh, S. Itoh, The Excitation of Drift Wave Instability in Bounded ECR plasma, The 7th Cross Straits Symposium on Materials, Energy, and Environmental Sciences (CSS), 2005.12.
95. K. Kamataki, Y. Nagashima, S. Shinohara, Y. Kawai, K. Itoh, S. Itoh, Experiment on Drift Wave Excitation in Linear ECR Plasma, 47th Annual Meeting of the Division of Plasma Physics(APS Meeting), 2005.10.
96. 鎌滝晋礼、永島芳彦、篠原俊二郎、河合良信、伊藤公孝、伊藤早苗, 直線ECRプラズマ中のドリフト波励起実験I, 日本物理学会 2005年秋季大会, 2005.09.
学会活動
所属学会名
応用物理学会
応用物理学会 プラズマエレクトロニクス分科会
プラズマ・核融合学会
日本物理学会
電気学会
日本教育心理学会
日本物理教育学会
初年次教育学会
学協会役員等への就任
2022.04, 応用物理学会プラズマエレクトロニクス分科会, 幹事.
2011.04~2014.03, 大阪大学接合科学研究所, 共同研究員.
学会大会・会議・シンポジウム等における役割
2023.01.09~2023.01.12, AFM2023(7th International Conference on Advances in Fractional Materials), Local Organizing Committee (LOC).
2022.08.02~2022.08.06, IUMRS-ICYRAM2022, 副組織委員長.
2021.12.13~2021.12.16, MRM2021, Symposium Organizer, Correspondence.
2021.09.26~2021.10.01, AAPPS-DPP2021(5th Asia Pacific Conference on Plasma Physics), Local Organizing Committee (LOC).
2020.10.26~2020.10.31, AAPPS-DPP2020(4th Asia Pacific Conference on Plasma Physics), Local Organizing Committee (LOC).
2019.12.10~2019.12.14, MRM2019, Symposium Organizer, Correspondence.
2018.12.18~2018.12.20, 第28回日本MRS年次大会, 現地実行委員.
2018.11.12~2018.11.17, 2nd Asia-Pacific Conference on Plasma Physics, 現地実行委員, 座長.
2010.09.15~2010.09.15, 人材育成・男女共同参画第10回ミーティング「若手のキャリアデザイン」(第71回応用物理学会学術講演会内), 相談員.
学術論文等の審査
年度 外国語雑誌査読論文数 日本語雑誌査読論文数 国際会議録査読論文数 国内会議録査読論文数 合計
2013年度    
2010年度      
2009年度      
その他の研究活動
海外渡航状況, 海外での教育研究歴
ICPE 2016: 18th International Conference on Physics Education, Singapore, 2016.09~2016.09.
BIT's 1st Annual World Congress of Nano-S&T, China, 2011.10~2011.10.
the 30th International Conference on Phenomena in Ionized Gases(ICPIG) Conference, UnitedKingdom, 2011.08~2011.09.
The 11th International Workshop on Advanced Plasma Processing and Diagnostics, Korea, 2010.07~2010.07.
34th European Physical Society (EPS) Conferences on Plasma Physics, Poland, 2007.07~2007.07.
33rd European Physical Society (EPS) Conferences on Plasma Physics, Italy, 2006.06~2006.06.
27th International Conference on Phenomena in Ionized Gases(ICPIG), Netherlands, 2005.07~2005.07.
受賞
AEPSE2019 "Young Scientist Awards: Gold Prize", Organizing committee of AEPSE, 2019.09.
IUMRS-ICEM2012 "Young Scientist Awards: Silver Award Winners" , 日本MRS, 2012.09.
"Advanced Plasma Application Award", 11th Asia Pacific Conference on Plasma Science adn Technology (APCPST) & 25th Symposium on Plasma Science for Materials (SPSM), 2012.10.
"Best Presentation Award", ISPlasma2012, 2012.03.
第11回プラズマ・核融合学会 九州沖縄山口支部大会講演奨励賞, プラズマ・核融合学会 九州沖縄山口支部, 2007.12.
研究資金
科学研究費補助金の採択状況(文部科学省、日本学術振興会)
2023年度~2025年度, 基盤研究(C), 代表, 放電手法制御によるプラズマプロセス精密制御機構の解明とその応用.
2020年度~2023年度, 基盤研究(A), 分担, プラズマ中光捕捉微粒子を用いたシース電場の時空間構造揺らぎ形成機構の解明.
2019年度~2021年度, 基盤研究(C), 代表, 時空間的電場振動中のナノ粒子成長に関する研究.
2014年度~2018年度, 基盤研究(A), 分担, プラズマを用いたナノ粒子精密配置制御の学術基盤創成.
2016年度~2018年度, 若手研究(B), 代表, 基礎教育から専門教育をつなぐ新しい実用的プラズマ科学実験教材の開発.
2011年度~2013年度, 若手研究(B), 代表, プラズマ揺らぎとナノ界面特性揺らぎの相互作用ダイナミックス.
2009年度~2013年度, 新学術領域研究, 分担, ナノ粒子含有プラズマによるナノ界面ボンドエンジニアリングの創生(代表者:白谷正治).
2008年度~2009年度, 特別研究員奨励費, 代表, 直線磁場プラズマ中のドリフト波乱流における波動間結合の実験的研究.
日本学術振興会への採択状況(科学研究費補助金以外)
2008年度~2009年度, 特別研究員, 代表, 直線プラズマ中のドリフト波乱流における波動間結合の実験的研究.
競争的資金(受託研究を含む)の採択状況
2012年度~2012年度, 地域イノベーション戦略支援プログラム(都市エリア型)可能性試験, 分担, リチウムイオン電池用Si系ナノ粒子含有ポーラス負極に関する研究開発.
2010年度~2010年度, JST、研究成果最適展開支援事業(A-STEP), 代表, 揺らぎ制御によるSi系単分散ナノ粒子の非凝集大量合成技術の構築.
共同研究、受託研究(競争的資金を除く)の受入状況
2023.04~2024.03, 代表, 核融合科学研究所一般共同研究「プラズマ中反応プロセス理解のための機械学習とその応用 」.
2022.04~2023.03, 代表, 核融合科学研究所一般共同研究「プラズマと壁相互作用における物理スパッタプロセス予測への機械学習の適用」.
2021.04~2022.03, 代表, 核融合科学研究所一般共同研究「プラズマと壁相互作用における物理スパッタプロセス予測への機械学習の適用」.
2021.04~2022.03, 代表, 新しいプラズマ源、粒子ビーム源の開発と高度プロセス技術(CVD、PVD)の研究.
2020.10~2023.03, 分担, プラズマCVDにおけるプラズマ変調による成膜機構の研究.
2020.04~2021.03, 代表, 新しいプラズマ源、粒子ビーム源の開発と高度プロセス技術(CVD、PVD)の研究.
2020.04~2021.03, 代表, 核融合科学研究所一般共同研究「ナノダスト堆積に対するプラズマ中ダスト雲の影響」.
2019.04~2020.03, 代表, 新しいプラズマ源、粒子ビーム源の開発と高度プロセス技術(CVD、PVD)の研究.
2019.04~2020.03, 代表, 核融合科学研究所一般共同研究「ナノダスト堆積に対するプラズマ中ダスト雲の影響」.
2013.04~2014.03, 代表, 新しいプラズマ源、粒子ビーム源の開発と高度プロセス技術(CVD、PVD)の研究.
2012.04~2013.03, 代表, 新しいプラズマ源、粒子ビーム源の開発と高度プロセス技術(CVD、PVD)の研究.
2011.04~2012.03, 代表, 大面積・低ダメージ・高密度プラズマ源の開発とナノ構造制御プラズマプロセスの研究.
学内資金・基金等への採択状況
2019年度~2019年度, 数理・データサイエンスに関する教育・研究支援プログラム, 代表, プラズマプロセス分野におけるsmall dataを基盤とした機械学習モデルの構築.
2019年度~2019年度, 令和元年度 スタートアップ支援経費, 分担, データ駆動型科学に基ずく革新デバイス実現のためのプラットフォーム開発(代表:板垣教授).
2018年度~2018年度, 平成30年度 スタートアップ支援経費, 分担, 大量の学術文献を用いた研究の流行に関するメタ研究(代表:池田大輔 准教授).
2015年度~2015年度, 平成27年度 基幹教育の質向上に資する取組企画, 代表, 学生に物理学(光の特性)に対する視野を広げるための改善.
2012年度~2012年度, 平成24年度全学教育改善・実施経費, 代表, 物理学を手にとって体験しよう(新規教材開発)(代表).
2011年度~2011年度, 九州大学宙空環境研究センター「一般共同研究」, 代表, 速度分散を持つダストの成長過程の研究.
2010年度~2011年度, 教育の質向上支援プログラム(EEP), 分担, 全学教育における異分野融合科学教材の開発(代表:山田秀人).
2010年度~2010年度, 九州大学宙空環境研究センター「一般共同研究」, 代表, プラズマとダストの相互作用関係の解明.

九大関連コンテンツ

pure2017年10月2日から、「九州大学研究者情報」を補完するデータベースとして、Elsevier社の「Pure」による研究業績の公開を開始しました。