九州大学 研究者情報
論文一覧
林 照剛(はやし てるたけ) データ更新日:2021.06.14

准教授 /  工学研究院 機械工学部門 加工プロセス講座


原著論文
1. 朱 家慶, 林 照剛, 黒河 周平, ナノ粒子チップを用いた多分散ナノ粒子の粒度分布計測, 日本機械学会論文集, https://doi.org/10.1299/transjsme.20-00220, 86, 892, p. 20-00220-p. 20-00220, Online ISSN 2187-9761, 2020.12, [URL], For poly-dispersed nanoparticles, which have more than two peaks on their particle size distribution (PSD), it is important to determine the mean particle diameter and their dispersion at each peak in a liquid. Dynamic Light Scattering (DLS), that is one of a typical nanoparticle sizing method, has difficulty to determine the several peaks in the PSD for the poly-dispersed particles. On the other hand, Image analysis methods (IA) can distinguish the peak for both the primary particle and secondary particle in the PSD of poly-dispersed particles accurately. However, IA is a time-consuming method and it is difficult to apply the measurement of the PSD due to the requirement of measuring the large number of particles, one by one. The particles in the liquid are transferred to a substrate in air when observing the particle to measure their size and the size distribution. In this procedure, some particles usually aggregate with surrounding particles. It causes the difference between the PSD for dispersed particles in liquid and that of the particles on the substrate. In this study, we suggest a novel particle sizing method using “Nanoparticle chip”, that is nanoparticles grid on the substrate to maintain the poly-dispersed condition in the liquid, to develop IA for measuring the poly-dispersed particles in liquid. The dispersed condition of the particle on Nanoparticle chip can be kept from the condition in liquid when the particles are transferred to the substrate in air. Therefore, measuring the PSD on Nanoparticle chip is equal to measure the PSD in the liquid. In this paper, in order to verify the feasibility of the nanoparticle sizing using Nanoparticle chip to measure the PSD for poly-dispersed particles in the liquid, we performed a fundamental experiment to fabricate the Nanoparticle chip and to determine the PSD for poly-dispersed particles. In this report, it is reported that the PSD for the poly-dispersed particles, which is the mixture of 152nm particle and 498nm particle, using Nanoparticle chip..
2. Terutake Hayashi, Toshiki Seri, Syuhei Kurokawa, Particle Size Distribution Analysis for Nano-abrasives in CMP Slurry by Using Fluorescent Nano Probe, International Conference on Planarization/CMP Technology (ICPT2016), Vol.11, No.4, 2017.07.
3. Syuhei Kurokawa, Leo Hirashima, Terutake Hayashi, Keiichiro WATANABE, Hiroyuki TSUJI, Tomoki NAGAE, Planarization for Translucent Polycrystalline Alumina by Surface Polishing Technique, Proceedings of 16th International conference of Precision Engineering, C111-8207-1-C111-8207-4, 2016.11.
4. Keigo Matsunaga, Terutake Hayashi, Syuhei Kurokawa, Hideaki Yokoo, Masaharu Nishikino, Noboru Hasegawa, Takayuki Kumada, Tomohito Otobe, Yasuhiro Takaya, Planarization for Translucent Polycrystalline Alumina by Surface Polishing Technique
, Proceedings of 16th International conference of Precision Engineering, C111-8207-1-C111-8207-4, 2016.11.
5. Keigo Matsunaga, Terutake Hayashi, Syuhei Kurokawa, Hideaki Yokoo, Masaharu Nishikino, Noboru Hasegawa, Takayuki Kumada, Tomohito Otobe, Yasuhiro Takaya, Study on low power laser processing technique with instant surface excitation using femtosecond double pulse, Proceedings of 16th International conference of Precision Engineering , C305-8183-1-C305-8183-4, 2016.11.
6. Terutake Hayashi, Toshiki Seri, Syuhei Kurokawa, A Novel Particle Sizing Method for Nano Abrasives in CMP Slurry by Using Fluorescent Nano Probe, International Journal of Automation Technology, Vol.11, No.4, 2017.07.
7. Keigo Matsunaga, Terutake Hayashi, Syuhei Kurokawa, Hideaki Yokoo, Masaharu Nishikino, Noboru Hasegawa, Takayuki Kumada, Tomohito Otobe, Yasuhiro Takaya, Investigation of surface excitation effect for ablation of 4H-SiC substrate using double-pulse beam, Springer Proceedings in Physics: X-Ray Lasers 2016/ICXRL 2016, 2017.07.
8. Takayuki Kumada, Tomohito Otobe, Masaharu Nishikino, Noboru Hasegawa, Terutake Hayashi, Dynamics of spallation during femtosecond laser ablation studied by time-resolved reflectivity with double pump pulses, Applied Physics Letters , 10.1063/1.4939231, 108, 011102-1-011102-4, 2016.01.
9. Terutake Hayashi, Yuki Ishizaki, Masaki Michihata, Yasuhiro Takaya, Shin-ichi Tanaka, Study on Nanoparticle Sizing Using Fluorescent Polarization Method with DNA Fluorescent Probe, International Journal of Automation Technology, vol. 9, no. 5,, 534-540, 2015.05.
10. Terutake Hayashi, Wide-Range Axial Position Measurement for Jumping Behavior of Optically Trapped Microsphere Near Surface Using Chromatic Confocal Sensor, International Journal of Optomechatronics, vol. 9, no. 2,, 131-140, 2015.02.
11. Terutake Hayashi, Nanoparticle sizing method based on fluorescence anisotropy analysis, Measurement, vol. 59, 382-388, 2015.01, Demand for applications of nanoparticles in electric architecture has been increasing. Nanoparticles provide new opportunities for improving circuit response. We discuss a novel method for evaluating nanoparticle sizes based on fluorescence anisotropy analysis. Particle size evaluation is possible through measurements of the rotational diffusion coef- ficient, which is sensitive to particle size. We develop a system for measuring rotational diffusion coefficients by using a fluorescent probe to label a particle. We report fundamen- tal experiments that verify the feasibility of the proposed method. The rotational diffusion coefficients of gold nanoparticles with diameters ranging 6–20 nm were measured using the proposed method. The measured rotational diffusion coefficients decrease with increasing particle size. This finding indicates that nanoparticles smaller than 15 nm can be measured with fine resolution..
12. Terutake Hayashi, Study on chemical interaction analysis of reactive fullerenol molecules in Cu-CMP using high-sensitive Raman spectroscopy, Key Engineering Materials, vol. 625, 332-338, 2015.01.
13. 林 照剛, 石崎佑樹, 道畑正岐, 高谷裕浩, 田中慎一, 蛍光偏光法を用いたナノ粒子粒径計測に関する研究(第2 報)-DNA プローブの回転拡散係数評価に基づく粒径計測手法の提案-, 精密工学会, 80, 10, 956-960, 2014.10, The nanoparticle is key materials in the area of nanotechnology, and there is a strong demand to measure the particle size accurately and easily. We proposed a novel nanoparticle sizing method based on fluorescence polarization analysis, and constructed the rotational diffusion coefficient measurement system using fluorescent DNA probe (fl-DNA). Nano particle sizing is achieved by measuring the rotational diffusion coefficient of fl-DNA, which is labeled to nanoparticle. In this report, we investigate the relation between the rotational diffusion coefficient of fl-DNA and the size of the nano particles standard. The rotational diffusion coefficients of gold nanoparticles of diameters from 6 nm to 20 nm were measured using
the proposed method..
14. 石崎佑樹,林 照剛,道畑正岐,高谷裕浩, 蛍光偏光法を用いたナノ粒子粒径計測に関する研究(第1報)-蛍光DNAプローブを用いた回転拡散係数測定システムの開発-, 精密工学会, 80, 3, 214-219, 2014.09.
15. Masaki Michihata, Terutake Hayashi, Atushi Adachi, Yasuhiro Takaya, Measurement of probe-stylus sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery modes, CIRP, 63, 1, 469-472, 2014.08, Probe calibration contributes to the measurement uncertainty of micro-coordinate measuring machines (micro-CMMs). This study proposes a new method of measuring stylus sphere diameters for micro-CMMs based on the analysis of whispering gallery modes (WGMs). Depending on the incident wavelength, different WGMs will be excited in the probe stylus, resulting in a wavelength spectral fingerprint that is related to the sphere diameter. In this paper, the diameter of the microprobe stylus sphere was determined with a least-squares method using theoretical and measured spectra of WGMs.
The measurement results showed that the precision of the proposed method was nm..
16. 村井亮太,高谷裕浩,林 照剛,道畑正岐,小松直樹, ポリグリセロール修飾ナノダイヤモンドを用いた銅膜の平坦化加工に関する研究, 砥粒加工学会, 58, 2, 97-102, 2014.02.
17. 林 照剛, 福田悠介, 道畑正岐, 高谷裕浩, パルストレインビームを用いたコヒーレントフォノン励起加工に関する研究(第一報) ーコヒーレントフォノン励起加工システムの構築と加工基礎実験ー, 精密工学会, 80, 9, 867-872, 2014.02.
18. Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, and Kok Fonog Lee, Development of nanoparticle sizing system using fluorescence polarization, ACTA IMEKO, 2, 2, 67-72, 2013.12.
19. Yasuhiro TAKAYA, Masaki MICHIHATA, Terutake HAYASHI, Ryota MURAI, and Kazumasa KANO, Surface Analysis of the Chemical Polishing Process Using a Fullerenol Slurry by Raman Spectroscopy under Surface Plasmon Excitation, CIRP, 62, 1, 571-574, 2013.08.
20. Masaki MICHIHATA, Tadaaki YOSHIKANE, Terutake HAYASHI, and Yasuhiro TAKAYA, New Technique of Single-Beam Gradient-Force Laser Trapping in Air Condition, International Journal of Optomechatronics, 7, 46-59, 2013.07.
21. Terutake HAYASHI, Masaki MICHIHATA, and Yasuhiro TAKAYA, Development of an Optical Heterogeneity Evaluation System Using Phase-Shift Digital Holography, Key Engineering Materials, 523-524, 865-870, 2012.11.
22. Masafumi YASUDA, Terutake HAYASHI, Masaki MICHIHATA, and Yasuhiro TAKAYA, A Novel Batch Fabrication of Micro Parts Using DNA Pattern Recognition, Key Engineering Materials, 523-524, 598-603, 2012.11.
23. Yusuke FUKUTA, Terutake HAYASHI, Masaki MICHIHATA, and Yasuhiro TAKAYA, Development of a Novel Surface Processing System Using Femtosecond Pulse Train, Key Engineering Materials, 523-524, 220-225, 2012.11.
24. Terutake HAYASHI, Masaki MICHIHATA, and Yasuhiro TAKAYA, Evaluation of Optical Heterogeneity Using Phase-Shift Digital Holography, International Journal of Nanomanufacturing, 8, 5-6, 508-521, 2012.08.
25. Yasuhiro TAKAYA, Masaki MICHIHATA, Terutake HAYASHI, and Taisuke WASHITANI, Dimensional Measurement of Microform with High Aspect Ratio Using an Optically Controlled Particle with Standing Wave Scale Sensing, CIRP, 61, 1, 479-482, 2012.08.
26. Masaki MICHIHATA, Yasuhiro TAKAYA, and Terutake HAYASHI, Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition, Journal of Advanced Mechanical Design, Systems, and Manufacturing, 6, 6, 764-770, 2012.06.
27. Terutake HAYASHI, Yasuhiro TAKAYA, and Masaki MICHIHATA, Development of Nanoparticle Sizing System Integrated with Optical Microscopy Using Fluorescence Polarization, International Journal of Nanomanufacturing, 8, 1-2, 54-66, 2012.01.
28. Yasuhiro TAKAYA, Masaki MICHIHATA, and Terutake HAYASHI, Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle, International Journal of Automation Technology, 5, 3, 395-402, 2011.03.
29. Yasuhiro TAKAYA, Hirotaka KISHIDA, Terutake HAYASHI, Masaki MICHIHATA, and Ken KOKUBO, Chemical Mechanical Polishing of Patterned Copper Wafer Surface Using Water-Soluble Fullerenol Slurry, CIRP, 60, 1, 567-570, 2011.08.
30. Terutake HAYASHI, Masaki MICHIHATA, and Yasuhiro TAKAYA, Total Angle-Resolved Scattering: Characterization of Microlens Mold Surface, Procedia Engineering, 19, 132-137, 2011.01.

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